KR20250139292A - 층류 소자, 유량 센서 및 매스 플로 컨트롤러 - Google Patents

층류 소자, 유량 센서 및 매스 플로 컨트롤러

Info

Publication number
KR20250139292A
KR20250139292A KR1020257025232A KR20257025232A KR20250139292A KR 20250139292 A KR20250139292 A KR 20250139292A KR 1020257025232 A KR1020257025232 A KR 1020257025232A KR 20257025232 A KR20257025232 A KR 20257025232A KR 20250139292 A KR20250139292 A KR 20250139292A
Authority
KR
South Korea
Prior art keywords
laminar flow
flow
flow element
laminar
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257025232A
Other languages
English (en)
Korean (ko)
Inventor
마사아키 이타타니
Original Assignee
구와나 메탈스, 엘티디.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구와나 메탈스, 엘티디. filed Critical 구와나 메탈스, 엘티디.
Publication of KR20250139292A publication Critical patent/KR20250139292A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
KR1020257025232A 2023-01-31 2024-01-26 층류 소자, 유량 센서 및 매스 플로 컨트롤러 Pending KR20250139292A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2023-012937 2023-01-31
JP2023012937 2023-01-31
PCT/JP2024/002357 WO2024162194A1 (ja) 2023-01-31 2024-01-26 層流素子、流量センサ及びマスフローコントローラ

Publications (1)

Publication Number Publication Date
KR20250139292A true KR20250139292A (ko) 2025-09-23

Family

ID=92146709

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257025232A Pending KR20250139292A (ko) 2023-01-31 2024-01-26 층류 소자, 유량 센서 및 매스 플로 컨트롤러

Country Status (4)

Country Link
JP (1) JPWO2024162194A1 (https=)
KR (1) KR20250139292A (https=)
CN (1) CN120615161A (https=)
WO (1) WO2024162194A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440300A (en) 1987-08-07 1989-02-10 Mitsubishi Heavy Ind Ltd Liquid-metal jet cutting method
US4949755A (en) 1986-11-21 1990-08-21 Allied-Signal Inc. Fluidic volumetric fluid flow meter
JP2001336958A (ja) 2000-05-26 2001-12-07 Stec Inc 流量検出機構
JP2013080424A (ja) 2011-10-05 2013-05-02 Horiba Stec Co Ltd 流体制御システム
US9134079B2 (en) 2005-04-08 2015-09-15 Velocys, Inc. Flow control through plural, parallel connection channels to/from a manifold
JP2017191090A (ja) 2016-04-07 2017-10-19 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3135946B2 (ja) * 1991-07-11 2001-02-19 株式会社エステック 層流素子の製造方法
JPH11101673A (ja) * 1997-09-27 1999-04-13 Stec Kk 層流素子
JP2003185477A (ja) * 2001-12-21 2003-07-03 Yazaki Corp 流量計
JP3637051B2 (ja) * 2003-05-19 2005-04-06 シーケーディ株式会社 熱式流量計
DE102013009347A1 (de) * 2013-06-04 2014-12-04 Hydrometer Gmbh Durchflussmesser
CN107218981A (zh) * 2017-05-16 2017-09-29 湖北锐意自控系统有限公司 一种基于超声波旁流原理的气体流量测量装置及方法
CN109341788A (zh) * 2018-12-24 2019-02-15 西北工业大学 小型层流元件
EP4063802B1 (en) * 2019-11-19 2024-09-25 Panasonic Intellectual Property Management Co., Ltd. Ultrasonic flowmeter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949755A (en) 1986-11-21 1990-08-21 Allied-Signal Inc. Fluidic volumetric fluid flow meter
JPS6440300A (en) 1987-08-07 1989-02-10 Mitsubishi Heavy Ind Ltd Liquid-metal jet cutting method
JP2001336958A (ja) 2000-05-26 2001-12-07 Stec Inc 流量検出機構
US9134079B2 (en) 2005-04-08 2015-09-15 Velocys, Inc. Flow control through plural, parallel connection channels to/from a manifold
JP2013080424A (ja) 2011-10-05 2013-05-02 Horiba Stec Co Ltd 流体制御システム
JP2017191090A (ja) 2016-04-07 2017-10-19 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Also Published As

Publication number Publication date
WO2024162194A1 (ja) 2024-08-08
CN120615161A (zh) 2025-09-09
JPWO2024162194A1 (https=) 2024-08-08

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)