KR20250117398A - 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법 - Google Patents

컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법

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Publication number
KR20250117398A
KR20250117398A KR1020257021472A KR20257021472A KR20250117398A KR 20250117398 A KR20250117398 A KR 20250117398A KR 1020257021472 A KR1020257021472 A KR 1020257021472A KR 20257021472 A KR20257021472 A KR 20257021472A KR 20250117398 A KR20250117398 A KR 20250117398A
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KR
South Korea
Prior art keywords
observation
variables
causal structure
causal
control unit
Prior art date
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Pending
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KR1020257021472A
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English (en)
Korean (ko)
Inventor
다이 고바야시
준 시나가와
Original Assignee
도쿄엘렉트론가부시키가이샤
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Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20250117398A publication Critical patent/KR20250117398A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/02—Knowledge representation; Symbolic representation
    • G06N5/022—Knowledge engineering; Knowledge acquisition
    • G06N5/025—Extracting rules from data
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/90—Details of database functions independent of the retrieved data types
    • G06F16/901—Indexing; Data structures therefor; Storage structures
    • G06F16/9024—Graphs; Linked lists
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/02—Knowledge representation; Symbolic representation
    • H01L21/67253—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Automation & Control Theory (AREA)
  • Computational Linguistics (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
  • General Factory Administration (AREA)
KR1020257021472A 2022-11-29 2023-11-24 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법 Pending KR20250117398A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263428526P 2022-11-29 2022-11-29
US63/428,526 2022-11-29
PCT/JP2023/042110 WO2024117019A1 (ja) 2022-11-29 2023-11-24 コンピュータプログラム、情報処理装置及び情報処理方法

Publications (1)

Publication Number Publication Date
KR20250117398A true KR20250117398A (ko) 2025-08-04

Family

ID=91323887

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020257021472A Pending KR20250117398A (ko) 2022-11-29 2023-11-24 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법
KR1020257021478A Pending KR20250117399A (ko) 2022-11-29 2023-11-24 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020257021478A Pending KR20250117399A (ko) 2022-11-29 2023-11-24 컴퓨터 프로그램, 정보 처리 장치 및 정보 처리 방법

Country Status (6)

Country Link
US (2) US20250292119A1 (https=)
JP (2) JPWO2024117019A1 (https=)
KR (2) KR20250117398A (https=)
CN (2) CN120266131A (https=)
TW (2) TW202441666A (https=)
WO (2) WO2024117013A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025110000A1 (ja) * 2023-11-20 2025-05-30 東京エレクトロン株式会社 コンピュータプログラム、情報処理装置及び情報処理方法
JP2026000603A (ja) * 2024-06-18 2026-01-06 株式会社東芝 情報処理装置、情報処理システム、情報処理方法およびプログラム
CN121666898A (zh) * 2024-07-01 2026-03-13 株式会社日立高新技术 半导体器件制造系统、服务器以及异物产生原因确定方法

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JPH02102453A (ja) * 1988-10-11 1990-04-16 Mitsubishi Heavy Ind Ltd プラント水質監視診断システム
US6807583B2 (en) * 1997-09-24 2004-10-19 Carleton University Method of determining causal connections between events recorded during process execution
JP5082511B2 (ja) * 2007-03-07 2012-11-28 オムロン株式会社 因果構造決定装置、因果構造決定装置の制御方法、および因果構造決定装置の制御プログラム
JP6166980B2 (ja) * 2013-08-02 2017-07-19 エヌ・ティ・ティ・コムウェア株式会社 情報処理装置、情報処理方法、および情報処理プログラム
US10083073B2 (en) * 2015-09-14 2018-09-25 Dynatrace Llc Method and system for real-time causality and root cause determination of transaction and infrastructure related events provided by multiple, heterogeneous agents
US10628424B2 (en) * 2016-09-15 2020-04-21 Oracle International Corporation Graph generation for a distributed event processing system
US10699450B2 (en) * 2017-09-28 2020-06-30 International Business Machines Corporation Interactive tool for causal graph construction
US11687801B2 (en) * 2018-04-23 2023-06-27 Qliktech International Ab Knowledge graph data structures and uses thereof
EP3582007A1 (en) * 2018-06-15 2019-12-18 ASML Netherlands B.V. Determining significant relationships between parameters describing operation of an apparatus
JP7036697B2 (ja) * 2018-09-27 2022-03-15 株式会社日立製作所 監視システム及び監視方法
US11210149B2 (en) * 2018-11-16 2021-12-28 International Business Machines Corporation Prioritization of data collection and analysis for incident detection
JP7183877B2 (ja) * 2019-03-13 2022-12-06 オムロン株式会社 グラフ表示装置、グラフ表示方法、及びグラフ表示プログラム
JP7287801B2 (ja) * 2019-03-13 2023-06-06 オムロン株式会社 解析装置、解析方法、及び解析プログラム
US11238129B2 (en) * 2019-12-11 2022-02-01 International Business Machines Corporation Root cause analysis using Granger causality
US11474509B2 (en) * 2020-08-03 2022-10-18 Palo Alto Research Center Incorporated System and method for casual inference in manufacturing process
CN114080609A (zh) * 2020-11-18 2022-02-22 阿里巴巴集团控股有限公司 基于编码知识的非线性因果建模
JP2022086627A (ja) * 2020-11-30 2022-06-09 株式会社日立製作所 異常検知装置、異常検知方法
CN115082080A (zh) * 2021-03-12 2022-09-20 日本电气株式会社 用于数据处理的方法、设备、介质和产品
EP4080303B1 (en) * 2021-04-22 2025-03-19 Abb Schweiz Ag Decision support in industrial plants
JP2022170171A (ja) * 2021-04-28 2022-11-10 三菱電機株式会社 管理装置、管理方法およびプログラム
US12001546B2 (en) * 2021-05-27 2024-06-04 Salesforce, Inc. Systems and methods for causality-based multivariate time series anomaly detection

Also Published As

Publication number Publication date
TW202441666A (zh) 2024-10-16
CN120283244A (zh) 2025-07-08
WO2024117019A1 (ja) 2024-06-06
CN120266131A (zh) 2025-07-04
WO2024117013A1 (ja) 2024-06-06
JPWO2024117013A1 (https=) 2024-06-06
TW202431116A (zh) 2024-08-01
KR20250117399A (ko) 2025-08-04
US20250292119A1 (en) 2025-09-18
US20250291849A1 (en) 2025-09-18
JPWO2024117019A1 (https=) 2024-06-06

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