JPWO2024117019A1 - - Google Patents

Info

Publication number
JPWO2024117019A1
JPWO2024117019A1 JP2024561446A JP2024561446A JPWO2024117019A1 JP WO2024117019 A1 JPWO2024117019 A1 JP WO2024117019A1 JP 2024561446 A JP2024561446 A JP 2024561446A JP 2024561446 A JP2024561446 A JP 2024561446A JP WO2024117019 A1 JPWO2024117019 A1 JP WO2024117019A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024561446A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024117019A1 publication Critical patent/JPWO2024117019A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/02—Knowledge representation; Symbolic representation
    • G06N5/022—Knowledge engineering; Knowledge acquisition
    • G06N5/025—Extracting rules from data
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/90—Details of database functions independent of the retrieved data types
    • G06F16/901—Indexing; Data structures therefor; Storage structures
    • G06F16/9024—Graphs; Linked lists
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/02—Knowledge representation; Symbolic representation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Automation & Control Theory (AREA)
  • Computational Linguistics (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
  • General Factory Administration (AREA)
JP2024561446A 2022-11-29 2023-11-24 Pending JPWO2024117019A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202263428526P 2022-11-29 2022-11-29
PCT/JP2023/042110 WO2024117019A1 (ja) 2022-11-29 2023-11-24 コンピュータプログラム、情報処理装置及び情報処理方法

Publications (1)

Publication Number Publication Date
JPWO2024117019A1 true JPWO2024117019A1 (https=) 2024-06-06

Family

ID=91323887

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2024561446A Pending JPWO2024117019A1 (https=) 2022-11-29 2023-11-24
JP2024561441A Pending JPWO2024117013A1 (https=) 2022-11-29 2023-11-24

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024561441A Pending JPWO2024117013A1 (https=) 2022-11-29 2023-11-24

Country Status (6)

Country Link
US (2) US20250292119A1 (https=)
JP (2) JPWO2024117019A1 (https=)
KR (2) KR20250117398A (https=)
CN (2) CN120266131A (https=)
TW (2) TW202441666A (https=)
WO (2) WO2024117013A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025110000A1 (ja) * 2023-11-20 2025-05-30 東京エレクトロン株式会社 コンピュータプログラム、情報処理装置及び情報処理方法
JP2026000603A (ja) * 2024-06-18 2026-01-06 株式会社東芝 情報処理装置、情報処理システム、情報処理方法およびプログラム
CN121666898A (zh) * 2024-07-01 2026-03-13 株式会社日立高新技术 半导体器件制造系统、服务器以及异物产生原因确定方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
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JPH02102453A (ja) * 1988-10-11 1990-04-16 Mitsubishi Heavy Ind Ltd プラント水質監視診断システム
US6807583B2 (en) * 1997-09-24 2004-10-19 Carleton University Method of determining causal connections between events recorded during process execution
JP5082511B2 (ja) * 2007-03-07 2012-11-28 オムロン株式会社 因果構造決定装置、因果構造決定装置の制御方法、および因果構造決定装置の制御プログラム
JP6166980B2 (ja) * 2013-08-02 2017-07-19 エヌ・ティ・ティ・コムウェア株式会社 情報処理装置、情報処理方法、および情報処理プログラム
US10083073B2 (en) * 2015-09-14 2018-09-25 Dynatrace Llc Method and system for real-time causality and root cause determination of transaction and infrastructure related events provided by multiple, heterogeneous agents
US10628424B2 (en) * 2016-09-15 2020-04-21 Oracle International Corporation Graph generation for a distributed event processing system
US10699450B2 (en) * 2017-09-28 2020-06-30 International Business Machines Corporation Interactive tool for causal graph construction
US11687801B2 (en) * 2018-04-23 2023-06-27 Qliktech International Ab Knowledge graph data structures and uses thereof
EP3582007A1 (en) * 2018-06-15 2019-12-18 ASML Netherlands B.V. Determining significant relationships between parameters describing operation of an apparatus
JP7036697B2 (ja) * 2018-09-27 2022-03-15 株式会社日立製作所 監視システム及び監視方法
US11210149B2 (en) * 2018-11-16 2021-12-28 International Business Machines Corporation Prioritization of data collection and analysis for incident detection
JP7183877B2 (ja) * 2019-03-13 2022-12-06 オムロン株式会社 グラフ表示装置、グラフ表示方法、及びグラフ表示プログラム
JP7287801B2 (ja) * 2019-03-13 2023-06-06 オムロン株式会社 解析装置、解析方法、及び解析プログラム
US11238129B2 (en) * 2019-12-11 2022-02-01 International Business Machines Corporation Root cause analysis using Granger causality
US11474509B2 (en) * 2020-08-03 2022-10-18 Palo Alto Research Center Incorporated System and method for casual inference in manufacturing process
CN114080609A (zh) * 2020-11-18 2022-02-22 阿里巴巴集团控股有限公司 基于编码知识的非线性因果建模
JP2022086627A (ja) * 2020-11-30 2022-06-09 株式会社日立製作所 異常検知装置、異常検知方法
CN115082080A (zh) * 2021-03-12 2022-09-20 日本电气株式会社 用于数据处理的方法、设备、介质和产品
EP4080303B1 (en) * 2021-04-22 2025-03-19 Abb Schweiz Ag Decision support in industrial plants
JP2022170171A (ja) * 2021-04-28 2022-11-10 三菱電機株式会社 管理装置、管理方法およびプログラム
US12001546B2 (en) * 2021-05-27 2024-06-04 Salesforce, Inc. Systems and methods for causality-based multivariate time series anomaly detection

Also Published As

Publication number Publication date
TW202441666A (zh) 2024-10-16
CN120283244A (zh) 2025-07-08
WO2024117019A1 (ja) 2024-06-06
CN120266131A (zh) 2025-07-04
WO2024117013A1 (ja) 2024-06-06
JPWO2024117013A1 (https=) 2024-06-06
TW202431116A (zh) 2024-08-01
KR20250117398A (ko) 2025-08-04
KR20250117399A (ko) 2025-08-04
US20250292119A1 (en) 2025-09-18
US20250291849A1 (en) 2025-09-18

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