KR20250019066A - 계측 시스템, 가공 시스템, 계측 방법 및 가공 방법 - Google Patents

계측 시스템, 가공 시스템, 계측 방법 및 가공 방법 Download PDF

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Publication number
KR20250019066A
KR20250019066A KR1020247042405A KR20247042405A KR20250019066A KR 20250019066 A KR20250019066 A KR 20250019066A KR 1020247042405 A KR1020247042405 A KR 1020247042405A KR 20247042405 A KR20247042405 A KR 20247042405A KR 20250019066 A KR20250019066 A KR 20250019066A
Authority
KR
South Korea
Prior art keywords
measuring
measurement
processing
control device
coordinate system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247042405A
Other languages
English (en)
Korean (ko)
Inventor
다카시 나카무라
도모키 미야카와
Original Assignee
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20250019066A publication Critical patent/KR20250019066A/ko
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1628—Program controls characterised by the control loop
    • B25J9/1653—Program controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37097—Marker on workpiece to detect reference position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37457—On machine, on workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39024—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39026—Calibration of manipulator while tool is mounted
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39033—Laser tracking of end effector, measure orientation of rotatable mirror

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020247042405A 2022-06-02 2022-06-02 계측 시스템, 가공 시스템, 계측 방법 및 가공 방법 Pending KR20250019066A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/022460 WO2023233613A1 (ja) 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法

Publications (1)

Publication Number Publication Date
KR20250019066A true KR20250019066A (ko) 2025-02-07

Family

ID=89026111

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247042405A Pending KR20250019066A (ko) 2022-06-02 2022-06-02 계측 시스템, 가공 시스템, 계측 방법 및 가공 방법

Country Status (7)

Country Link
US (1) US20250339972A1 (https=)
EP (1) EP4534257A4 (https=)
JP (1) JPWO2023233613A1 (https=)
KR (1) KR20250019066A (https=)
CN (1) CN119486845A (https=)
TW (1) TW202413021A (https=)
WO (1) WO2023233613A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007006A (en) 1987-03-06 1991-04-09 Renishaw Plc Method of and apparatus for calibration of machines

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345150B1 (ko) * 2000-09-29 2002-07-24 현대자동차주식회사 레이저 측정기를 이용한 로봇 위치 보정 방법
JP5088186B2 (ja) * 2008-03-18 2012-12-05 株式会社Ｉｈｉ ロボット装置及びロボット装置の制御方法
JP2017019072A (ja) * 2015-07-14 2017-01-26 トヨタ自動車株式会社 位置計測システム
JP6622775B2 (ja) * 2017-10-12 2019-12-18 ファナック株式会社 計測システム
CN108527360B (zh) * 2018-02-07 2021-11-19 唐山英莱科技有限公司 一种位置标定系统及方法
JP7260877B2 (ja) * 2019-05-21 2023-04-19 国立大学法人 東京大学 ロボットハンド、ロボットハンドの制御装置、およびロボットシステム
CA3189581A1 (en) * 2020-07-29 2022-02-03 Nikon Corporation Processing system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5007006A (en) 1987-03-06 1991-04-09 Renishaw Plc Method of and apparatus for calibration of machines

Also Published As

Publication number Publication date
TW202413021A (zh) 2024-04-01
US20250339972A1 (en) 2025-11-06
JPWO2023233613A1 (https=) 2023-12-07
EP4534257A1 (en) 2025-04-09
EP4534257A4 (en) 2026-04-22
CN119486845A (zh) 2025-02-18
WO2023233613A1 (ja) 2023-12-07

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PA0105 International application

Patent event date: 20241220

Patent event code: PA01051R01D

Comment text: International Patent Application

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PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20250530

Comment text: Request for Examination of Application