CN119486845A - 测量系统、加工系统、测量方法和加工方法 - Google Patents

测量系统、加工系统、测量方法和加工方法 Download PDF

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Publication number
CN119486845A
CN119486845A CN202280097816.3A CN202280097816A CN119486845A CN 119486845 A CN119486845 A CN 119486845A CN 202280097816 A CN202280097816 A CN 202280097816A CN 119486845 A CN119486845 A CN 119486845A
Authority
CN
China
Prior art keywords
measurement
measuring
processing
control device
coordinate system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280097816.3A
Other languages
English (en)
Chinese (zh)
Inventor
中村隆志
宫川智树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN119486845A publication Critical patent/CN119486845A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1628—Program controls characterised by the control loop
    • B25J9/1653—Program controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37097—Marker on workpiece to detect reference position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37457—On machine, on workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39024—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39026—Calibration of manipulator while tool is mounted
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39033—Laser tracking of end effector, measure orientation of rotatable mirror

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202280097816.3A 2022-06-02 2022-06-02 测量系统、加工系统、测量方法和加工方法 Pending CN119486845A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/022460 WO2023233613A1 (ja) 2022-06-02 2022-06-02 計測システム、加工システム、計測方法及び加工方法

Publications (1)

Publication Number Publication Date
CN119486845A true CN119486845A (zh) 2025-02-18

Family

ID=89026111

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280097816.3A Pending CN119486845A (zh) 2022-06-02 2022-06-02 测量系统、加工系统、测量方法和加工方法

Country Status (7)

Country Link
US (1) US20250339972A1 (https=)
EP (1) EP4534257A4 (https=)
JP (1) JPWO2023233613A1 (https=)
KR (1) KR20250019066A (https=)
CN (1) CN119486845A (https=)
TW (1) TW202413021A (https=)
WO (1) WO2023233613A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8705301D0 (en) 1987-03-06 1987-04-08 Renishaw Plc Calibration of machines
KR100345150B1 (ko) * 2000-09-29 2002-07-24 현대자동차주식회사 레이저 측정기를 이용한 로봇 위치 보정 방법
JP5088186B2 (ja) * 2008-03-18 2012-12-05 株式会社Ｉｈｉ ロボット装置及びロボット装置の制御方法
JP2017019072A (ja) * 2015-07-14 2017-01-26 トヨタ自動車株式会社 位置計測システム
JP6622775B2 (ja) * 2017-10-12 2019-12-18 ファナック株式会社 計測システム
CN108527360B (zh) * 2018-02-07 2021-11-19 唐山英莱科技有限公司 一种位置标定系统及方法
JP7260877B2 (ja) * 2019-05-21 2023-04-19 国立大学法人 東京大学 ロボットハンド、ロボットハンドの制御装置、およびロボットシステム
CA3189581A1 (en) * 2020-07-29 2022-02-03 Nikon Corporation Processing system

Also Published As

Publication number Publication date
TW202413021A (zh) 2024-04-01
US20250339972A1 (en) 2025-11-06
JPWO2023233613A1 (https=) 2023-12-07
KR20250019066A (ko) 2025-02-07
EP4534257A1 (en) 2025-04-09
EP4534257A4 (en) 2026-04-22
WO2023233613A1 (ja) 2023-12-07

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