KR20240034690A - 특징량 출력 모델 생성 시스템, 특징량 출력 모델 생성 방법, 특징량 출력 모델 생성 프로그램 및 특징량 출력 모델 - Google Patents

특징량 출력 모델 생성 시스템, 특징량 출력 모델 생성 방법, 특징량 출력 모델 생성 프로그램 및 특징량 출력 모델 Download PDF

Info

Publication number
KR20240034690A
KR20240034690A KR1020237041660A KR20237041660A KR20240034690A KR 20240034690 A KR20240034690 A KR 20240034690A KR 1020237041660 A KR1020237041660 A KR 1020237041660A KR 20237041660 A KR20237041660 A KR 20237041660A KR 20240034690 A KR20240034690 A KR 20240034690A
Authority
KR
South Korea
Prior art keywords
image
learning
focus position
output model
feature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237041660A
Other languages
English (en)
Korean (ko)
Inventor
아카리 이토
도모치카 다케시마
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Priority claimed from PCT/JP2022/010685 external-priority patent/WO2023002678A1/ja
Publication of KR20240034690A publication Critical patent/KR20240034690A/ko
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/04Architecture, e.g. interconnection topology
    • G06N3/0464Convolutional networks [CNN, ConvNet]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/70Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/778Active pattern-learning, e.g. online learning of image or video features
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00Special procedures for taking photographs; Apparatus therefor
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • G06N3/09Supervised learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/70Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/70Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/70Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/67Focus control based on electronic image sensor signals
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/67Focus control based on electronic image sensor signals
    • H04N23/675Focus control based on electronic image sensor signals comprising setting of focusing regions
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20084Artificial neural networks [ANN]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30148Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • Multimedia (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Computational Linguistics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Image Analysis (AREA)
  • Automatic Focus Adjustment (AREA)
  • Studio Devices (AREA)
  • Focusing (AREA)
  • Closed-Circuit Television Systems (AREA)
KR1020237041660A 2021-07-19 2022-03-10 특징량 출력 모델 생성 시스템, 특징량 출력 모델 생성 방법, 특징량 출력 모델 생성 프로그램 및 특징량 출력 모델 Pending KR20240034690A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021118886 2021-07-19
JPJP-P-2021-118886 2021-07-19
PCT/JP2022/010685 WO2023002678A1 (ja) 2021-07-19 2022-03-10 特徴量出力モデル生成システム、特徴量出力モデル生成方法、特徴量出力モデル生成プログラム及び特徴量出力モデル

Publications (1)

Publication Number Publication Date
KR20240034690A true KR20240034690A (ko) 2024-03-14

Family

ID=84901072

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237041660A Pending KR20240034690A (ko) 2021-07-19 2022-03-10 특징량 출력 모델 생성 시스템, 특징량 출력 모델 생성 방법, 특징량 출력 모델 생성 프로그램 및 특징량 출력 모델

Country Status (5)

Country Link
US (1) US20240290080A1 (https=)
EP (1) EP4336461A4 (https=)
JP (2) JP7205013B1 (https=)
KR (1) KR20240034690A (https=)
CN (1) CN117677988A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240147065A1 (en) * 2022-10-31 2024-05-02 Samsung Electronics Co., Ltd. Method and apparatus with autofocus
JP2024104391A (ja) * 2023-01-24 2024-08-05 浜松ホトニクス株式会社 焦点位置推定方法、焦点位置推定プログラム、焦点位置推定システム、モデル生成方法、モデル生成プログラム、モデル生成システム及び焦点位置推定モデル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013050713A (ja) 2007-03-08 2013-03-14 Cella Vision AB 合焦位置を決定する方法及びビジョン検査システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019181053A1 (ja) * 2018-03-22 2021-04-08 富士フイルム株式会社 デフォーカス量測定装置、方法およびプログラム、並びに判別器
JP7190951B2 (ja) * 2019-03-27 2022-12-16 株式会社日立製作所 画像認識システムおよび画像認識方法
JP7455542B2 (ja) * 2019-09-27 2024-03-26 キヤノン株式会社 画像処理方法、プログラム、画像処理装置、学習済みモデルの製造方法、および、画像処理システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013050713A (ja) 2007-03-08 2013-03-14 Cella Vision AB 合焦位置を決定する方法及びビジョン検査システム

Also Published As

Publication number Publication date
EP4336461A1 (en) 2024-03-13
CN117677988A (zh) 2024-03-08
JP2023055694A (ja) 2023-04-18
JP7824871B2 (ja) 2026-03-05
JPWO2023002678A1 (https=) 2023-01-26
US20240290080A1 (en) 2024-08-29
JP7205013B1 (ja) 2023-01-16
EP4336461A4 (en) 2025-04-30

Similar Documents

Publication Publication Date Title
KR102468234B1 (ko) 심층 합성곱 신경망을 이용한 레이저 가공 시스템의 가공오류 검출 시스템 및 방법
JP7824871B2 (ja) 焦点位置推定モデル生成システム、焦点位置推定モデル生成方法、焦点位置推定モデル生成プログラム及び焦点位置推定モデル
KR20160102982A (ko) 화상 처리 방법, 화상 처리 장치, 화상 처리 프로그램 및 화상 처리 프로그램을 기억한 기억 매체
JP2023111948A (ja) 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム
US10928448B2 (en) Automated scan chain diagnostics using emission
JPWO2017149869A1 (ja) 情報処理装置、方法、プログラム及びマルチカメラシステム
Alaniz-Plata et al. Extrinsic calibration of complex machine vision system for mobile robot
KR20220016030A (ko) 반도체 검사 방법 및 반도체 검사 장치
KR20240035945A (ko) 경사 추정 시스템, 경사 추정 방법, 경사 추정 프로그램, 반도체 검사 시스템 및 생체 관찰 시스템
KR102898288B1 (ko) 검사 장치 및 검사 방법
KR102129069B1 (ko) 스캐닝 홀로그램 기반 자동광학검사 장치 및 방법
WO2023002678A1 (ja) 特徴量出力モデル生成システム、特徴量出力モデル生成方法、特徴量出力モデル生成プログラム及び特徴量出力モデル
US11809134B2 (en) Method and apparatus of automatic optical inspection using scanning holography
KR102129071B1 (ko) 스캐닝 홀로그램 기반 자동광학검사 장치 및 방법
US20240257490A1 (en) Focal position estimation method, focal position estimation system, model generation method, model generation system, focal position estimation model, and non-transitory computer-readable storage medium
JP2011133360A (ja) 距離計測装置、距離計測方法、及びプログラム
KR102191743B1 (ko) 거리 측정 장치
KR102357212B1 (ko) 랜덤 포레스트 기반의 오토포커싱 장치 및 방법
KR101941086B1 (ko) 구조조명 기법을 이용하는 3차원 이미지 획득 장치
CN118511103A (zh) 显微镜、图像处理装置、图像处理方法以及图像处理程序
Wei Depth reconstruction with Fresnel diffraction

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20231201

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20241008

Comment text: Request for Examination of Application