KR20230121009A - 검사 장치 및 검사 방법 - Google Patents
검사 장치 및 검사 방법 Download PDFInfo
- Publication number
- KR20230121009A KR20230121009A KR1020230017334A KR20230017334A KR20230121009A KR 20230121009 A KR20230121009 A KR 20230121009A KR 1020230017334 A KR1020230017334 A KR 1020230017334A KR 20230017334 A KR20230017334 A KR 20230017334A KR 20230121009 A KR20230121009 A KR 20230121009A
- Authority
- KR
- South Korea
- Prior art keywords
- imaging
- area
- imaging assembly
- depth
- field
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims description 11
- 238000003384 imaging method Methods 0.000 claims abstract description 181
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 238000013500 data storage Methods 0.000 claims abstract description 8
- 238000005286 illumination Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
Landscapes
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Operations Research (AREA)
- Studio Devices (AREA)
- Camera Bodies And Camera Details Or Accessories (AREA)
- Accessories Of Cameras (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2022-019321 | 2022-02-10 | ||
JP2022019321A JP2023116923A (ja) | 2022-02-10 | 2022-02-10 | 検査装置及び検査方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20230121009A true KR20230121009A (ko) | 2023-08-17 |
Family
ID=87544118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020230017334A KR20230121009A (ko) | 2022-02-10 | 2023-02-09 | 검사 장치 및 검사 방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2023116923A (ja) |
KR (1) | KR20230121009A (ja) |
CN (1) | CN116577325A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210009884A (ko) | 2019-07-18 | 2021-01-27 | 주식회사 엘지화학 | 화합물, 이를 포함하는 감광성 형광 수지 조성물, 색변환 필름, 백라이트 유닛 및 디스플레이 장치 |
-
2022
- 2022-02-10 JP JP2022019321A patent/JP2023116923A/ja active Pending
-
2023
- 2023-02-09 KR KR1020230017334A patent/KR20230121009A/ko unknown
- 2023-02-10 CN CN202310096501.3A patent/CN116577325A/zh active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210009884A (ko) | 2019-07-18 | 2021-01-27 | 주식회사 엘지화학 | 화합물, 이를 포함하는 감광성 형광 수지 조성물, 색변환 필름, 백라이트 유닛 및 디스플레이 장치 |
Also Published As
Publication number | Publication date |
---|---|
JP2023116923A (ja) | 2023-08-23 |
CN116577325A (zh) | 2023-08-11 |
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