KR20230121009A - 검사 장치 및 검사 방법 - Google Patents

검사 장치 및 검사 방법 Download PDF

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Publication number
KR20230121009A
KR20230121009A KR1020230017334A KR20230017334A KR20230121009A KR 20230121009 A KR20230121009 A KR 20230121009A KR 1020230017334 A KR1020230017334 A KR 1020230017334A KR 20230017334 A KR20230017334 A KR 20230017334A KR 20230121009 A KR20230121009 A KR 20230121009A
Authority
KR
South Korea
Prior art keywords
imaging
area
imaging assembly
depth
field
Prior art date
Application number
KR1020230017334A
Other languages
English (en)
Korean (ko)
Inventor
다이스케 센가
켄지 코바야시
노부로 마수야
Original Assignee
쥬키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 쥬키 가부시키가이샤 filed Critical 쥬키 가부시키가이샤
Publication of KR20230121009A publication Critical patent/KR20230121009A/ko

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices

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  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Operations Research (AREA)
  • Studio Devices (AREA)
  • Camera Bodies And Camera Details Or Accessories (AREA)
  • Accessories Of Cameras (AREA)
KR1020230017334A 2022-02-10 2023-02-09 검사 장치 및 검사 방법 KR20230121009A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2022-019321 2022-02-10
JP2022019321A JP2023116923A (ja) 2022-02-10 2022-02-10 検査装置及び検査方法

Publications (1)

Publication Number Publication Date
KR20230121009A true KR20230121009A (ko) 2023-08-17

Family

ID=87544118

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020230017334A KR20230121009A (ko) 2022-02-10 2023-02-09 검사 장치 및 검사 방법

Country Status (3)

Country Link
JP (1) JP2023116923A (ja)
KR (1) KR20230121009A (ja)
CN (1) CN116577325A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210009884A (ko) 2019-07-18 2021-01-27 주식회사 엘지화학 화합물, 이를 포함하는 감광성 형광 수지 조성물, 색변환 필름, 백라이트 유닛 및 디스플레이 장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210009884A (ko) 2019-07-18 2021-01-27 주식회사 엘지화학 화합물, 이를 포함하는 감광성 형광 수지 조성물, 색변환 필름, 백라이트 유닛 및 디스플레이 장치

Also Published As

Publication number Publication date
JP2023116923A (ja) 2023-08-23
CN116577325A (zh) 2023-08-11

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