KR20230100820A - Heater welding structure with improved welding defect and crack - Google Patents

Abstract

The present invention relates to a heater welding structure in which welding defects and cracks are improved.
The present invention is a heater welding structure that can be applied to a showerhead including a rear body having a gas inlet in the center and a middle body including a gas passage communicating with the gas inlet, at the boundary of the gas inlet. It includes a first welding portion provided, and a second welding portion formed on the rear surface of the intermediate body.

Description

Heater welding structure with improved welding defects and cracks {HEATER WELDING STRUCTURE WITH IMPROVED WELDING DEFECT AND CRACK}

The present invention relates to a heater welding structure in which welding defects and cracks are improved.

In semiconductor manufacturing, a process of supplying a process gas into a chamber is used in various processes such as deposition (CVD) and etching. At this time, equipment used to supply process gas into the process chamber is a shower head.

The showerhead has a heater to heat the process gas. In general, the heater may be composed of a heating wire having a circular cross-section, and is bent and disposed throughout the showerhead to uniformly heat process gas at all positions as much as possible.

Referring to FIG. 1, such a showerhead is manufactured by welding a base metal and a base metal through a weld metal. If the weld metal and the base metal or between the weld metal and the weld metal are not sufficiently fused, the base metal Alternatively, there may be a type of defect such as a crack in the weld metal.

Among them, when sufficient fusion is not achieved, it occurs because of at least one of the following cases: the angle of the area where the weld metal can be fused again is small, the welding speed is fast, or the welding heat input is not sufficient.

This problem mainly occurs at the junction between the cylinder of the gas inlet through which the process gas flows and the shower plate (combination of the intermediate body and the front body) forming the inner space for discharging the process gas. It is directly related to the leakage problem and needs to be improved.

Another problem with leakage of process gas is caused by cracks generated in the area where the hot wire is embedded due to factors including repetition of thermal expansion by the hot wire embedded in the shower plate.

That is, it is a situation in which a method to solve the problem of outflow of process gas due to welding defects and cracks must be sought.

On the other hand, as a conventional technique related to a shower head, there is Korean Patent Registration No. 10-2268559 (June 17, 2021), and the conventional techniques including the prior art do not suggest a solution to the above problem at all. can't

The present invention has been made to solve the above problems, and in welding each connection part of the showerhead to apply a hot wire to the showerhead, welding defects due to incomplete welding and It aims to improve crack generation.

The present invention for the purpose of solving the above problems is a heater welding structure applied to a showerhead including a rear body having a gas inlet in the center and a middle body including a gas passage communicating with the gas inlet, It includes a first welding portion provided on the boundary of the gas inlet side, and a second welding portion formed on the rear surface of the intermediate body.

In addition, the second welding portion is characterized in that it can be formed by electron beam welding (E-Beam) in a vacuum state.

In addition, the intermediate body is provided on the rear side and further includes a coupling groove portion in which the coupling protrusion of the rear body is accommodated, and the second welding portion may be formed on a side surface of the coupling groove portion.

In addition, the showerhead may further include a front body coupled to the front surface of the intermediate body, and may further include a third welding portion coupled to the front body and the intermediate body and formed on a rear surface of the intermediate body. to be

In addition, the third welding portion is characterized in that it can be formed by electron beam welding (E-Beam) in a vacuum state.

In addition, the front body includes a coupling protrusion protruding rearward, the intermediate body includes a through hole through which the coupling protrusion passes, and the third welding portion may be formed on an upper portion of the coupling protrusion. to be

In addition, the intermediate body is characterized in that it can be composed of a material having an aluminum content of 99.0% by weight or more.

In addition, the rear body may be made of a material having an aluminum content of 99.5% by weight or more.

In addition, the rear body is made of a material containing aluminum and manganese, and the manganese may be included in an amount of 1.0 to 1.5% by weight.

Furthermore, it may further include a heating wire embedded in the heat receiving unit provided in the intermediate body, and the heating wire may include a covering material made of a material having an aluminum content of 99.0% by weight or more.

In the present invention having the above constitution and characteristics, in welding each connection part of the shower head to apply the hot wire to the shower head, a plurality of welding parts are formed at the connection part between the rear body and the middle body to provide a strong coupling, , By introducing e-beam welding to the connection part of each body, including the front body, and adopting materials suitable for electron beam welding for each body, through the realization of slash welding and improvement of the welding structure Welding defects and cracks caused by incomplete welding are improved.

1 is a view for explaining welding defect types.
Figure 2 is a view for explaining the type of crack generation by thermal deformation.
Figure 3 is a view for comparative description of the welding method.
4 is a diagram for explaining the characteristics of electron beam welding;
5 is a view for explaining a material for application of electron beam welding.
6 is a diagram showing the structure of a hot wire.
7 is a cross-sectional view of a showerhead according to an embodiment of the present invention.

Since the present invention can have various changes and various forms, the embodiments (or implementations) will be described in detail in the text. However, this is not intended to limit the present invention to a specific form disclosed, and should be understood to include all modifications, equivalents, or substitutes included in the spirit and scope of the present invention.

Terms used in this specification are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, terms such as ~comprising~ or ~consisting of are intended to designate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that it does not preclude the possibility of the presence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

~First~, ~Second~, etc. described in this specification will only be referred to to distinguish different components from each other, regardless of the manufacturing order, and the names in the detailed description and claims of the invention may not match.

Hereinafter, a heater welding structure (hereinafter, this structure) according to the present invention will be described in detail with reference to the accompanying drawings.

Prior to describing the present invention in detail, if an approximate direction is specified for convenience of explanation, the lower part is set to the front and the upper part to the rear based on the state shown in FIG. 7 . This is based on the discharge direction of the process gas.

The present structure relates to a heater welding structure that improves welding defects and cracks. Specifically, it is a heater structure applied to a showerhead, and in welding each connection part of the showerhead to apply a hot wire to the showerhead, An object of the present invention is to improve welding defects and cracks due to incomplete welding through welding realization and welding structure improvement.

As shown in FIG. 7, the showerhead to which the heater welding structure according to the present invention is applied includes a rear body (1), a middle body (2), a front body (3), and a middle body (2). ), and a cover 6 covering the opened side of the heat receiving portion 22.

On the other hand, this structure may narrowly include only each welding portion provided in the shower head, but since it should be interpreted as a whole concept including the configuration of each part of the shower head for the solution of the present invention, it is broadly It is revealed that it should be interpreted as including both the structure of the showerhead for improving welding defects and additional components therefor. Therefore, in the following description, the showerhead (this device) to which the present structure is applied will be limited and described as an example.

This structure is a shower head including a rear body 1 having a gas inlet 11 at the center and a middle body 2 including a gas passage 21 communicating with the gas inlet 11. As the applied heater welding structure, it may include a first welding part (W1) provided on the side boundary of the gas inlet (11) and a second welding part (W2) formed on the rear surface of the intermediate body (2).

As shown in Figure 7, the first welding portion (W1) is a configuration for connecting the rear body (1) and the intermediate body (2), is provided on the side of the gas inlet (11), more specifically, the gas It is provided at the boundary between the cylinder 14 constituting the inlet 11 and the intermediate body 2. The first welding portion W1 may be formed by TIG (Tungsten Inert Gas Welding) welding, but is not necessarily limited thereto.

And as shown in FIG. 7, the second welding part (W2) is a configuration for connecting the rear body (1) and the middle body (2) like the first welding part (W1), of the middle body (2). It is formed on the rear side, and more specifically, it is provided at the boundary between the coupling groove 23 formed on the rear side of the intermediate body 2 and the coupling protrusion 13 of the rear body. In a more specific embodiment, the second welding portion (W2) may be formed on the side of the coupling groove, where the side refers to the outer side, and the outer side refers to the opposite side of the center side, as shown Based on the drawing, it means the direction of the left and right ends of the device.

The second welding portion W2 may be formed by electron beam welding (E-Beam) in a vacuum state. Electron beam welding is a welding method in which electrons generated in a vacuum are focused and deflected with magnetic force and irradiated to a welded object to be melted and joined. , as shown in FIG. 3, there is an advantage in that thermal deformation can be minimized by instantaneous welding and high-quality welding is possible without a filler material. In addition, since the welding heat input is small, there are very few cases where the welding part is deformed, and since the melting welding can be deep, there is an advantage that high-speed welding is possible. In particular, since electron beam welding is so-called 'autogenous welding', which melts and welds the base material of the car body, there is little change in the characteristics of the welded part, so the resistance to thermal deformation caused by the heater increases, significantly reducing the possibility of cracking. (See FIGS. 4 to 5)

In order to explain in more detail the configuration for providing the solution to the welding defect of the first welded portion W1 and the second welded portion W2, the structure of the present device (shower head) will be described first, as shown in FIG. As described above, the gas inlet 11 may be formed by the cylinder 14 provided therein. More precisely, the inner space of the cylinder 14 becomes the gas inlet 11. In a preferred embodiment, the cylinder 14 may include an outer diameter portion 15 having a larger outer diameter than the outer diameter of the cylinder 14 at the front end. The outer diameter portion 15 is a part of the entire portion of the cylinder 14, and its thickness is increased to prevent welding defects occurring at the joint portion with the intermediate body 2, that is, at the first welding portion W1. . More specific details regarding the outer diameter portion 15 will be discussed in detail again in the configuration of the intermediate body 2 below.

Referring to FIG. 7 , the rear body 1 may include a wall spaced apart from the outside of the cylinder 14, and a coupling protrusion 13 may be provided at the front end of the wall body. Obviously, the wall is an outer configuration that protects the inner cylinder 14, and the coupling protrusion 13 is provided for coupling with the intermediate body 2.

In a specific embodiment, the coupling protrusion 13 may have a greater thickness than the thickness of the wall including a portion protruding outward. In addition, the protruding portion of the coupling protrusion 13 may include an inclined portion, and welding may be performed on the inclined portion. In summary, the rear body 1 and the middle body 2 are welded, and a welding portion can be formed at the boundary between the outside of the coupling protrusion 13 and the outside of the coupling groove 23. In other words, the above-described second welding portion W2 is formed at the boundary between the outside of the coupling protrusion 13 and the outside of the coupling groove 23.

Next, the intermediate body 2 is provided in the middle of each body, and as shown in FIG. 22) may be included.

Specifically, the gas passage part 21 is configured to communicate with the gas inlet part 11, and the process gas introduced into the gas passage part 21 is discharged from the front body 3 through an internal space 4 described later. It is discharged into the ball (31). As one embodiment, as shown in FIG. 7, the gas passage part 21 may be configured such that its area increases as it goes forward, which is achieved by increasing the flow rate of process gas passing through the gas passage part 21. The processed gas can be evenly distributed in the inner space (4).

The heat receiving portion 22 has a configuration in which the hot wire 5 for heating the process gas is accommodated, and as described above, thermal expansion occurs by the hot wire 5, and there is a problem in that cracks occur in the device. In order to solve this problem, the heat receiving part 22 was configured in the form of an open front side to fundamentally block the possibility of cracks on the rear side. In the above, the open front surface of the heat receiving portion 22 is sealed by a cover 6 to be described later. Obviously, the heat receiving portion 22 may be configured in the form of a groove, and the size should have a size corresponding to the outer diameter of the heat wire 5.

In addition, the intermediate body 2 may further include a coupling groove 23 provided on the rear side. As shown in FIG. 7, the coupling groove 23 has a configuration in which the coupling protrusion 13 is accommodated, and may be provided at the rear of the hot water receiving portion 22, and obviously, the coupling protrusion 13 It has a shape corresponding to the shape, and does not need to be specifically limited to any one shape. In addition, in the embodiment of the present device, the intermediate body 2 and the rear body 1 are limited to being coupled by the coupling between the coupling groove 23 and the coupling protrusion 13, but the groove-protrusion structure is converted into a projection-groove structure. It may also be possible to perform substitution.

As a specific embodiment, as confirmed in FIG. 7 , the central body 2 of the intermediate body 2 may be configured to have a larger thickness than the outer side with respect to the coupling groove 23 . Through this, durability is enhanced by reinforcing the central part of the intermediate body 2, where cracks can often occur in use.

In addition, the intermediate body 2 may further include a receiving groove 25 provided on the rear side. As shown in FIG. 7, the receiving groove 25 is provided on the rear side of the intermediate body 2, and is particularly provided on the center side. This is because the cylinder 14 having an outer diameter portion 15 accommodated in the receiving groove portion 25 is provided at the center side, and obviously, the size and shape of the receiving groove portion 25 depend on the size of the outer diameter portion 15. It must have a corresponding size and shape.

That is, the cylinder 14 of the rear body 1 and the accommodation groove 25 of the intermediate body 2 have the thickness of the boundary between the rear body 1 and the intermediate body 2 constituting the gas inlet 11. By increasing , it is possible to use a high complete fusion in the first welding part W1, and through this, the weld metal and each body, which is the base material, can be sufficiently fused, thereby dramatically improving the welding part.

As a further embodiment, as shown in FIG. 7, the length of the outer diameter portion 15 in the front-back direction is larger than the length of the receiving groove 25 in the front-back direction, and the first welding portion W1 is the outer diameter portion 15 Of the unaccepted portion of the, it may be formed at the boundary with the intermediate body (2).

Next, the device further includes a front body 3 coupled to the front of the intermediate body 2, and this structure combines the front body 3 and the intermediate body 2, and the intermediate body 2 It may further include a third welding portion (W3) formed on the rear surface of.

Prior to the detailed description of the third welding portion, the front body 3 of the present device will be described in detail. The front body 3 is a configuration provided at the front of each body, as shown in FIG. , It is coupled to the front of the intermediate body (2), in particular, it can be coupled with the intermediate body (2) and a predetermined distance.

The inner space 4 formed by the separation between the middle body 2 and the front body 3 communicates with the gas passage 21 and provides a passage before discharging process gas. The process gas filled in the inner space 4 is discharged to the process space through the discharge hole 31 .

In the above, the process space may be the inside of a general reaction chamber. In addition, in the above, the discharge hole 31 may be formed through the front body 3 from the front to the rear and connected to the inner space 4.

On the other hand, it has been recalled that the apparatus is configured so that the heat wire 5 is accommodated in the heat accommodating portion 22 and the cover 6 covers the open side of the heat accommodating portion 22. At this time, the front body (3) is preferably provided to be spaced apart from the cover 6, and can be detachably coupled to the front surface of the cover 6 by a sealing coupling portion 32 to be described later. In the installation method of the hot wire 5 under such a structure, after the heat wire 5 is embedded in the heat receiving portion 22 having an open front, the cover 6 is coupled to the front of the intermediate body 2, and the cover ( 6) is completed by combining the intermediate body 2 and the front body 3 on the front side, and the coupling between the intermediate body 2 and the cover 6 does not need to be particularly limited to any one form, and the intermediate body 2 ) And the coupling between the front body (3) can be made by coupling by the sealing coupling part (32).

In one embodiment, the sealing coupling part 32 is provided outside the inner space 4, provides a coupling with the intermediate body 2, and has a configuration for sealing the inner space 4, as shown in FIG. As has been done, the sealed coupling portion 32 may be made of a coupling protrusion. More specifically, the sealed coupling portion 32 may be provided on the outside of the front body 3, which may be limited to an outer side than the gas passage portion 21 described above.

In an embodiment in which the sealing coupling portion 32 is formed of a coupling protrusion, the coupling protrusion protrudes rearward and can be welded to the intermediate body 2 while passing through a through hole formed in the intermediate body 2 . At this time, since the cover 6 is coupled to the front of the intermediate body 2, the cover 6 is provided with a through hole 61 so that the coupling protrusion can pass through, and the coupling protrusion passes through the through hole 61 It is preferable to be configured to pass through the through hole of the intermediate body (2).

In the above, the third welding portion (W3) may be formed on the upper part of the coupling protrusion, as shown in FIG. 7, the coupling protrusion to the rear surface of the intermediate body (2) by the through hole of the intermediate body (2). In the exposed state, the open portion of the through hole is welded and closed, so that the coupling protrusion and the intermediate body (through hole) are welded together. Obviously, the third welding part W3 may be the top and side of the coupling protrusion, and the position of the third welding part W3 will be easily understood with reference to the description and drawings of the present invention.

The third welding portion W3 may be formed by electron beam welding (E-Beam) in a vacuum state. In particular, as confirmed in FIG. 2 , since the second and third welding regions W2 and W3 are disposed close to the hot wire, thermal deformation occurs more often than the first welding region W1. Accordingly, it is preferable that the second and third welding portions W2 and W3 are formed by electron beam welding that is resistant to thermal deformation, and the first welding portion W1, which is relatively free from thermal deformation, is advantageous from an economic point of view. It is preferably formed by TIG welding with fewer constraints. (Weld defects of the first welded portion W1 can be solved through the above-described large-diameter portion 15.)

In addition, as a configuration for realizing the welding method of the first to third welding parts (W1) (W2) (W3), this structure is a rear body (1) is a material (M1) containing aluminum and manganese It is composed of, and manganese may be included in an amount of 1.0 to 1.5% by weight. Aluminum alloys (Al 3000 series) with manganese (Mn) as the main additive have advantages of superior strength, weldability, corrosion resistance, and workability compared to pure aluminum.

In addition, the intermediate body 2 may be made of material M2 having an aluminum content of 99.0% by weight or more. The Al 1000 series, which is named pure aluminum, has good corrosion resistance, excellent thermal conductivity, and good welding and forming processability. This is to reduce thermal deformation due to heat dissipation by configuring the intermediate body 2, which is most directly affected by the heat of the hot wire, with pure aluminum having good thermal conductivity, as well as to optimize the electron beam welding described above, and is most commonly used. The aluminum alloy of the 6000 series is pure aluminum in that electron beam welding is impossible.

More preferably, the intermediate body 2 may be made of a material M2 having an aluminum content of 99.5% by weight or more, that is, Al 1060, which is ultra-pure aluminum.

In addition, the material M3 of the front body 3 is not particularly limited to any one type, but may be selected from the Al 1000 series or Al 1060 for effective electron beam welding.

In particular, since the Al 6000 series cannot be used for electron beam welding and the Al 5000 series cannot be used in a heater structure because of magnesium (Mg), the Al 1000 series is preferably used.

Next, this structure further includes a heating wire 5 embedded in the heat receiving portion 22 provided in the intermediate body 2, and the heating wire 5 is made of a material (M4) having an aluminum content of 99.0% by weight or more. Covering materials may be included.

As shown in FIG. 6, the heating wire 5 is provided with an internal heating coil and the heating coil is covered with a covering material. In general, stainless steel called Sus is used as the covering material. In this structure, the covering material of the heating wire 5 is the same as the material of the intermediate body 2 in order to prevent cracks that may occur on the side of the heat receiving part 22. Thus, cracks are prevented by having the same coefficient of thermal expansion. Obviously, when the intermediate body 2 is made of Al 1060, which is ultra-pure aluminum, it is preferable that the covering material of the hot wire 5 is also made of ultra-pure aluminum.

In particular, when the material (M4) of the hot wire (5) is composed of the same Al 1000 series, a vacuum brazing method can be employed. As shown in FIG. Since this disappears, the degree of bonding of the material is high, and cracks due to thermal deformation do not occur, which is effective.

In addition, this structure may further include a fourth welding portion (W4) formed at the contact boundary between the side end of the front body (3) and the middle body (2), the fourth welding portion (W4) also described above. It is preferably formed by electron beam welding. The effect of the adoption of electron beam welding shall refer to the above effect.

The present invention described above with reference to the accompanying drawings is capable of various modifications and changes by those skilled in the art, and such modifications and changes not limited by the claims should be construed as being included in the scope of the present invention.

1: rear body
11: gas inlet 13: coupling protrusion
14: cylinder 15: outer diameter
2: middle body
21: gas passage part 22: heat receiving part
23: coupling groove 25: receiving groove
3: front body
31: discharge hole 32: sealed joint
4: interior space
5: hot wire
6: cover
61: through hole
M1: Material of the rear body M2: Material of the middle body
M3: Material of front body M4: Material of heat shield
W1: first welding area W2: second welding area
W3: 3rd welding area W4: 4th welding area

Claims (10)

In the heater welding structure applied to a showerhead including a rear body having a gas inlet in the center and a middle body including a gas passage communicating with the gas inlet,
a first welding portion provided at a boundary of the gas inlet; and
a second welding portion formed on the rear surface of the intermediate body;
Heater welding structure comprising a.
The method of claim 1,
The heater welding structure, characterized in that the second welding portion is formed by electron beam welding (E-Beam) in a vacuum state.
The method of claim 2,
The intermediate body further includes a coupling groove provided on a rear surface and accommodating the coupling protrusion of the rear body,
The second welding portion is a heater welding structure, characterized in that formed on the side of the coupling groove.
The method of claim 1,
The shower head further includes a front body coupled to a front surface of the intermediate body,
Heater welding structure combining the front body and the intermediate body, and further comprising a third welding portion formed on a rear surface of the intermediate body.
The method of claim 4,
The heater welding structure, characterized in that the third welding portion is formed by electron beam welding (E-Beam) in a vacuum state.
The method of claim 5,
The front body includes a coupling protrusion protruding rearward, and the middle body includes a through hole through which the coupling protrusion passes.
The heater welding structure, characterized in that the third welding portion is formed on the upper portion of the coupling protrusion.
According to claim 2 or 5,
The intermediate body is a heater welded structure, characterized in that composed of a material having an aluminum content of 99.0% by weight or more.

According to claim 2 or 5,
The heater welded structure, characterized in that the rear body is made of a material having an aluminum content of 99.5% by weight or more.
The method of claim 1,
The heater welded structure, characterized in that the rear body is made of a material containing aluminum and manganese, and the manganese is contained in 1.0 to 1.5% by weight.
The method of claim 1,
Further comprising a heating wire embedded in the heat receiving unit provided in the intermediate body,
The heater welding structure, characterized in that the heating wire comprises a covering material made of a material having an aluminum content of 99.0% by weight or more.

Images