KR20100099488A - Shower head using gas injection module and manufacturing method of it - Google Patents

Abstract

PURPOSE: A shower head with a gas injection module and a method for manufacturing the same are provided to be manufactured into a large size by being assembled using a plurality of modules. CONSTITUTION: A cover plate(110) and an upper plate(120) form a first flow path(121). Fluid flows through the first flow path, a second flow path(131), and a third flow path(141). A plurality of insertion holes is formed in identical positions of the upper plate, a middle plate(130), and a lower plate(140). A first tube(156) sprays the fluid flowing through the first flow path toward the lower plate. A second tube(157) sprays fluid flowing through the second flow path toward the lower plate. An injection module(150) is inserted into the insertion holes to be combined with the upper plate, the middle plate, and the lower plate.

Description

Shower head using gas injection module and manufacturing method thereof

The present invention relates to a shower head to which a gas injection module is applied and a manufacturing method thereof, and more particularly, to a shower head used in thin film deposition equipment such as CVD, MOCVD, and ALD (Atomic Layer Deposition) for manufacturing semiconductors and LCDs. The present invention relates to a showerhead to which a gas injection module for manufacturing a large area semiconductor, LCD, and the like is applied.

In order to manufacture semiconductors and LCDs, a process such as atomic layer deposition (ALD) is used in chemical vapor deposition (CVD) and metal organic chemical vapor deposition (MOCVD) processes.

Recently, showerheads have been widely used to uniformly spray gas over a large area for CVD, MOCVD, and ALD processes.

1 is a schematic diagram illustrating a conventional showerhead CVD apparatus.

As shown, the reaction chamber 10 is covered with a chamber lid (20) to provide a reaction space sealed to the outside and the reaction chamber 10 is provided inside the wafer 50 is seated The wafer support 40 is provided and is provided on the wafer support 40 so as to be connected to the gas injection pipe 80a so that the injected gas is uniformly sprayed on the entire surface of the wafer 50 through the injection hole 70a. Showerhead (showerhead) 70 is provided. The showerhead is mainly used as a single wafer type to be deposited by supplying a single kind of gas.

In order to supply two or more kinds of gases to be uniformly sprayed, a shower head having a separate gas supply structure or a multilayer structure is required.

As an example of a shower head having a multilayer structure, Japanese Patent Application Laid-Open No. 2009-016624 (name of the invention: a method for manufacturing a multi-shower head for CVD having a multilayer structure) has been disclosed.

The shower head is formed by stacking three upper, middle, and lower plates and stacking cover plates on top of the stacked plates to form flow paths through which gas flows between the top and middle plates and between the top and cover plates, and punching the plates. A plurality of short and long pipes are inserted to move from the lower plate to the lower plate to melt the brazing material and take a fixed form.

In order to increase the density of the sprayed gas, it is necessary to drill with a small diameter drill, but the thickness of the plate is 6 to 10 times larger than the diameter of the drill. By inserting the tube into this hole to fix it with brazing material, the drilling limitation is improved.

The showerhead, despite this advantage, stacks perforated plates to weld the pipe with brazing, and then inserts short and long pipes into the holes, respectively, and places the brazing at the outer periphery of the pipe to be welded. Laying of pipes and brazing after drilling is difficult to automate and is often done manually.

In this state, welding by brazing or the like is performed. Since such a shower head has a large area, the work of inserting a large number of pipes and brazing materials is performed manually, and thus there is a problem in that product defects such as leakage and welding defects are high. Since the leak test is performed after welding, there is a disadvantage that the pre-test can not be performed. If a defect occurs, the diameter of the hole is small, so it is impossible to remove the pipe and the brazing material from the plate, and thus it is impossible to reuse it. Therefore, the disposal of the material leads to an increase in material costs and labor costs, resulting in an increase in manufacturing cost.

The present invention is to solve the above problems, an object of the present invention is to rework and repair during the manufacturing process by using a plurality of modules are inserted into the tube and bonded to the module by inserting the module in the perforated body It is to provide a shower head and a method of manufacturing the same to which the gas injection module is applied.

In addition, another object of the present invention is to provide a shower head and a manufacturing method using the gas injection module to perform a pre-leak test before the finished product to reduce the product failure rate.

In addition, another object of the present invention is to provide a shower head and a manufacturing method using the gas injection module capable of manufacturing a larger semiconductor, LCD and the like by using a plurality of modules.

In order to achieve the above object, the shower head to which the gas injection module of the present invention is applied includes a cover plate 110 positioned at an upper portion thereof; Located in the lower portion of the cover plate 110, the central portion is spaced at regular intervals, and forms the first, second, third flow paths (121, 131, 141) through which the fluid moves, the edge parts are stacked to be in close contact with each other, First, second and third fluid supply passages 122, 132, and 142 are provided to supply fluid to the first, second, and third flow passages 121, 131, and 141, respectively, and a plurality of insertion holes 123, 133, and 143 in which a plurality of modules are to be inserted are provided on the same line. Upper plate, middle plate and lower plate (120,130,140) formed in; Upper, middle, and lower plates 151, 152, and 153 disposed in the same line as the upper plate, the middle plate, and the lower plate 120, 130, and 140, and spaced apart from each other, and the upper plate 151, the middle plate 152, and the intermediate plate 152. ) And the first and second connecting portions 154 and 155 formed with through holes 154a and 155a for connecting the lower plate 153 and the second and third flow passages 131 and 141, respectively, and the upper plate 151. And at least one first tube 156 penetrating the intermediate plate 152 and the lower plate 153 and discharging fluid moving to the first flow path 121 to the lower portion of the lower plate 153. At least one second tube 157 penetrates the intermediate plate 152 and the lower plate 153 and injects fluid moving to the second flow path 131 to the lower portion of the lower plate 153. Shovel The ball is inserted in the (123 133 143), injection module 150 is joined to the top plate, intermediate plate and the lower plate (120 130 140); And a control unit.

In addition, the upper portion of the upper plate 151 of the injection module 150 is projected to the upper portion of the upper plate 120 and is provided with a protrusion 151a to be temporarily fixed to the upper portion of the upper plate 120 by caulking. It is done.

In addition, the upper and lower portions of the first connecting portion 154 is fastened to the lower portion of the upper plate 120 and the upper portion of the intermediate plate 130 and the engaging jaw 154b bonded to the upper plate 120 and the intermediate plate, respectively. Characterized in that provided.

In addition, an annular ring 158 interposed between the lower plate 153 and the lower plate 140 of the injection module 150 and bonded to the lower plate 153 and the lower plate 140 is further provided. It is done.

In addition, the diameter of the injection module 150 is at least two or more types of different sizes to minimize the empty space, and the insertion hole (123, 133, 143) is characterized in that the diameter corresponding to the injection module 150.

On the other hand, the shower head manufacturing method to which the gas injection module of the present invention is applied a) preparing a cover plate 110 which is located in the upper, and the first, second, third, and third flow paths (121, 131, 141) in which the fluid is moved to the center portion spaced apart And first, second, and third fluid supply passages 122, 132, and 142, each of which is supplied with fluid to the first, second, third, and third flow passages 121, 131, and 141, respectively, and a plurality of insertion holes into which a plurality of modules are to be inserted. Preparing an upper plate, an intermediate plate, and a lower plate (120, 130, 140) such that (123, 133, 143) are formed on the same line; b) upper, middle and lower plates 151, 152 and 153 disposed in the same line as the upper plate, the middle plate and the lower plate 120, 130 and 140, and spaced apart from each other, and the upper plate 151 and the middle plate 152 and the middle plate. First and second connection parts 154 and 155 formed with through holes 154a and 155a for connecting the 152 and the lower plate 153 to communicate with the second and third flow paths 131 and 141, respectively; Penetrates the 151, the intermediate plate 152, and the lower plate 153 and protrudes above the upper plate 151 so that the fluid moving to the first flow path 121 is injected into the lower plate 153. The fluid penetrates the at least one first tube 156 and the intermediate plate 152 and the lower plate 153 and protrudes above the intermediate plate 152 to move to the second flow path 131. To bottom plate 153 Manufacturing a plurality of injection modules 150 by first integrally joining at least one second tube 157 to be injected; c) inserting the manufactured injection module 150 into the insertion holes 123, 133, and 143 to stack the upper plate, the middle plate and the lower plate 120, 130 and 140, and stack the cover plate 110 thereon; d) secondary bonding the edges of the cover plate 110 stacked with the edges of the upper plate, the middle plate and the lower plate 120 and the inserted injection module 150; Characterized in that comprises a.

In addition, the primary junction temperature is characterized in that higher than the secondary junction temperature. At this time, the bonding is characterized in that the bonding by brazing.

In addition, the upper part of the upper plate 151 of the injection module 150 is provided with a protrusion 151a protruding to the upper portion of the upper plate 120, in step c) by caulking the protrusion 151a to the injection module ( Characterized in that it further comprises; 150 is to be temporarily fixed to the upper portion of the top plate (120).

In addition, the upper and lower portions of the first connecting portion 154 is further provided with a locking jaw (154b) for catching the lower portion of the upper plate 120 and the upper portion of the intermediate plate 130, the locking step (d) in step d) 154b) is bonded to the upper plate 120 and the intermediate plate, respectively.

In addition, e) bonding the lower plate 153 and the lower plate 140 with the annular ring 158 interposed between the lower plate 153 and the lower plate 140 of the injection module 150, respectively. It is characterized by including.

In addition, the annular ring 158 and the lower plate and the lower plate 140 is bonded by laser welding or electron beam welding.

The present invention can reduce the product defect rate by using a plurality of modules are inserted into the tube and bonded to the module by inserting the module in the perforated body, and can be repaired because the module can be separated during the manufacturing process, a plurality of modules Since bonding is used, there is an advantage in size increase.

Hereinafter, with reference to the accompanying drawings will be described in detail a showerhead to which the gas injection module of the present invention is applied.

2 is a perspective view showing a shower head applying the gas injection module according to the present invention, Figure 3 is a cross-sectional view showing a shower head applying the gas injection module according to the present invention, Figure 4 is a gas injection module according to the present invention 5 is a cross-sectional perspective view illustrating the shower head, and FIG. 5 is a plan view illustrating a state viewed from the top by cutting along the line AA ′ of FIG. 3, and FIG. 6 is a plan view illustrating the state viewed from the top by cutting along the line BB ′ of FIG. 3. to be.

Shower head 100 to which the gas injection module of the present invention is applied comprises a cover plate (110); An upper plate, an intermediate plate, and a lower plate (120, 130, 140) in which the first, second, and third flow passages (121, 131, 141) and the plurality of insertion holes (123, 133, 143) through which the fluid moves are formed on the same line; Upper, middle, and lower plates 151, 152, and 153, a first tube 156 allowing the fluid flowing in the first flow path 121 to be injected below the lower plate 153, and the second flow path 131. It comprises a second tube 157 for injecting the fluid to move to the lower plate 153, and is inserted into the insertion hole (123, 133, 143) is bonded to the upper plate, intermediate plate and lower plate (120, 130, 140) Injection module 150; .

The cover plate 110 is located at the top and forms a first flow path 121 together with the upper plate 120.

The upper plate, the middle plate and the lower plate (120, 130, 140) is located in the lower portion of the cover plate 110, the central portion to form a first, first, second, third flow path (121, 131, 141) to move the fluid spaced apart. In addition, the edge portions are stacked to be in close contact with each other, and the first, second, and third fluid supply passages 122, 132, and 142 are respectively provided with fluids supplied to the first, second, third, and third passages 121, 131, and 141. In addition, the upper plate, the intermediate plate and the lower plate (120, 130, 140) is a plurality of insertion holes (123, 133, 143) so that a plurality of injection module 150 is inserted into each of the central portion where the first, second, third flow paths (121, 131, 141) is formed. ) Are formed on the same line.

2 shows a showerhead formed by inserting a plurality of injection modules 150.

In FIG. 3, different types of gas are supplied to the first flow passage 121 and the second flow passage 131 through first and second fluid supply passages 122 and 132, respectively, and to the third flow passage 141. Cooling water is supplied through the fluid supply passage 142.

Figure 4 is a cross-sectional perspective view of the injection module according to the present invention.

The injection module 150 includes upper, middle and lower plates 151, 152 and 153 spaced apart from each other, first and second connection parts 154 and 155 connecting them to each other, and fluid moving in the first flow path 121. (153) At least one or more first tubes 156 to be sprayed to the bottom, and at least one or more second tubes 157 to spray the fluid moving to the second flow path 131 below the lower plate 153 ).

The upper, middle, and lower plates 151, 152, and 153 are disposed at the same line as the upper, middle, and lower plates 120, 130, and 140, and are spaced apart from each other. The space between the upper plate 151 and the intermediate plate 152 communicates with the second flow path 131, and the space between the intermediate plate 152 and the lower plate 153 is connected to the third flow path ( 141).

The first and second connectors 154 and 155 connect the upper plate 151 and the intermediate plate 152, and the intermediate plate 152 and the lower plate 153, respectively. A through hole 154a is formed such that a space between the upper plate 151 and the intermediate plate 152 communicates with the second flow path 131, and the intermediate plate 152 and the lower plate are formed in the second connection part 155. The through hole 155a is formed so that the space between the 153 communicates with the third flow path 141.

The first tube 156 penetrates through the upper plate 151, the intermediate plate 152, and the lower plate 153 and is formed by the cover plate 110 and the upper plate 120. At least one or more fluid is injected into the lower plate 153 to be moved to the lower portion. In this case, when the first tube 156 is disposed to penetrate the upper plate 151, the intermediate plate 152, and the lower plate 153, for ease of arrangement and confirmation of the arrangement of the first tube 156. It is preferred to have a length that protrudes above the upper plate 151 in a disposed state.

The second tube 157 penetrates the intermediate plate 152 and the lower plate 153 and moves fluid moving to the second flow path 131 formed by the upper plate 120 and the intermediate plate 130. At least one of the lower plates 153 is sprayed to the lower portion and provided. At this time, when the second tube 157 is also disposed so as to pass through the intermediate plate 152 and the lower plate 153 like the first tube 156, it is easy and easy to arrange the second tube 157. It is preferred to have a length protruding above the intermediate plate 152 in a state arranged for confirmation.

In FIG. 5, it is a plan view illustrating a state viewed from the top by cutting along the AA ′ line of FIG. 3, and shows that only the first tube 156 is inserted into the injection module 150. In FIG. 6, BB of FIG. It is a plan view showing a state viewed from the top by cutting along a line, and it can be seen that both the first and second tubes 156 and 157 are inserted into the injection module 150.

The injection module 150 allows the upper, middle and lower plates 151, 152 and 153, the first and second connection parts 154 and 155, the first tube 156 and the second tube 157 to be integrally bonded. Bonding at this time is performed by brazing (primary).

The injection module 150 manufactured by bonding is inserted into the insertion holes 123, 133, and 143 provided in the upper plate, the intermediate plate, and the lower plate 120, 130, and 140, and then bonded to the upper plate, the intermediate plate, and the lower plate 120, 130, and 140. Bonding at this time is performed by brazing (secondary).

Preferably, the temperature of the primary brazing is higher than the temperature of the secondary brazing. The reason is that when the injection module 150 bonded by the primary brazing is bonded to the upper plate, the middle plate and the lower plate 120, 130, 140 by the secondary brazing, the temperature of the secondary brazing must be lowered so that the primary brazing can be performed. This is to prevent melting of the brazing material (filler) used in brazing bonding.

The material of the upper plate, the middle plate and the lower plate (120, 130, 140) uses a material resistant to corrosion, such as Ni, stainless series, Inconel, and the brazing material is Ni-based, Ag-based, etc. Paste, foil (foil), tape (tape) form, etc. are used.

When the injection module 150 is bonded to the upper plate, the middle plate and the lower plate 120, 130, 140, the upper plate 151 of the injection module 150 protrudes to the upper portion of the upper plate 120 and is caulked by the caulking. Preferably, the projection module 150 is provided with a protrusion 151a to temporarily fix the upper plate 120.

In addition, in order to position the injection module 150 on the intermediate plate 130, the upper and lower portions of the upper plate 120 and the upper portion of the intermediate plate 130 are caught on the upper and lower portions of the first connecting portion 154. It is preferable that the engaging jaw 154b is further provided on the upper plate 120 and the intermediate plate, respectively.

The injection module 150 is temporarily fixed to the upper plate by the caulking of the protrusion 151a, and the injection module 150 and the upper plate, the intermediate plate and the lower plate 120, 130 and 140 are caught by the upper end of the intermediate plate 130 on the locking jaw. After bonding, the injection module 150 and the lower plate 140 are bonded to complete the shower head.

In this case, the bonding between the injection module 150 and the lower plate 140 is interposed between the lower plate 153 and the lower plate 140 of the injection module 150 and the lower plate 153 and the lower plate 140. The annular ring 158 is bonded to each other is made in the state via the annular ring 158. Bonding in this case is made by laser or electron beam welding.

As described above, the present invention manufactures a shower head by inserting a plurality of injection modules 150, which are bonded and manufactured, into insertion holes 123, 133, and 143, respectively. Compared with the conventional showerhead, the defective rate can be reduced. In other words, since the defect of the injection module 150 is checked and the injection module 150 having a good state is inserted into the insertion holes 123, 133, and 143, the defect check can be performed.

As such, unlike the conventional method of discarding the entire bad shower head, when the injection module 150 is defective, only the bad injection module 150 is discarded, thereby reducing the material cost and thus reducing the manufacturing cost.

In addition, the present invention can be repaired because the injection module 150 has a larger diameter than the tube, even if a poor bonding when the injection module 150 is bonded to the upper plate, intermediate plate and lower plate (120, 130, 140) There is an advantage.

The diameter of the injection module 150 is at least two or more kinds of different sizes in order to minimize the empty space and the insertion hole (123, 133, 143) is preferably a diameter corresponding to the injection module 150.

Although the drawing shows a case in which the shower head is circular, it may also be in the form of a square for manufacturing a square semiconductor, LCD, and the like.

Reference numeral 143 denotes a discharge passage through which the coolant supplied through the third fluid supply passage 142 cools the heat injection module 150 and is discharged by heat exchange.

The shower head to which the gas injection module of the present invention having the above configuration is applied is manufactured by the following method.

7A to 7F are cross-sectional views illustrating processes of a shower head to which a gas injection module according to the present invention is applied.

First, the cover plate 110 is disposed on the upper portion, and the first, second, and third flow paths 121, 131, and 141 may be formed to move the fluid by the central part spaced apart from each other. The first, second, and third fluid supply passages 122, 132, and 142 to which the fluid is supplied to the 121, 131, and 141, respectively, and the upper plate, the middle plate, and the lower plate are formed so that the plurality of insertion holes 123, 133, 143 are formed in the same line. Prepare (120, 130, 140).

Upper, middle, and lower plates 151, 152, and 153 disposed on the same line as the upper, middle, and lower plates 120, 130, and 140 and spaced apart from each other, the upper plate 151, the middle plate 152, and the intermediate plate 152. And first and second connection parts 154 and 155 formed with through holes 154a and 155a for connecting the lower plate 153 and the second and third flow paths 131 and 141, respectively, and the upper plate 151. At least one first tube 156 through which the fluid flowing through the intermediate plate 152 and the lower plate 153 and moving to the first flow passage 121 is injected into the lower plate 153, and the intermediate portion Primary to integrally at least one or more second tubes 157 through the plate 152 and the lower plate 153 and to inject the fluid moving to the second flow path 131 to the lower portion of the lower plate 153 Multiple injection by joining Manufacture module 150.

The injection module 150 is manufactured to be inserted into the insertion hole 133 of the intermediate plate 130. At this time, the upper portion of the intermediate plate 130 provided in the lower portion of the first connecting portion 154 is arranged to be caught by the engaging jaw (154b) (see Fig. 7a). After placement, the brazing material is inserted between the intermediate plate 130 and the locking step 154b and between the intermediate plate 130 and the intermediate plate 152.

The upper portion of the injection module 150 is inserted into the insertion hole 123 provided in the upper plate 120 to be coupled. When the injection module 150 is coupled to the insertion hole 123 of the upper plate 120, the lower portion of the upper plate 120 provided at the upper portion of the first connection part 154 is caught and caught by the locking jaw 154b. (See FIG. 7B).

The upper plate 120 is coupled to the injection module 150, and then the protrusion 151a protruding to the upper portion of the upper plate 120 provided on the upper plate 151 of the injection module 150 is caulked. The injection module 150 is temporarily fixed to the upper portion of the upper plate 120 (see Fig. 7c). After caulking the protrusion 151a, the brazing material is inserted into the outside of the protrusion 151a so that the brazing material is inserted between the upper plate 120 and the upper plate 151 (see FIG. 7D).

The lower plate 140 is laminated on the lower portion of the intermediate plate 130, and the edge of the cover plate 110 and the edge of the upper plate, the middle plate and the lower plate 120, 130, and 140 are secondly bonded to the injection module 150. (See FIG. 7D). In the drawings, the cover plate is not illustrated, and the edges of the upper plate, the middle plate, and the lower plate 120, 130, and 140 are not shown.

At this time, the secondary bonding is performed by lowering the temperature of the primary bonding temperature.

After the secondary bonding, the annular ring 158 interposed between the lower plate 153 and the lower plate 140 of the injection module 150 is inserted (see FIG. 7E), and the lower plate 153 and the lower plate 140 are inserted. ), The injection module 150 and the lower plate 140 are bonded to each other (see FIG. 7F) to complete the showerhead according to the present invention. In this case, the annular ring 158, the lower plate 153 and the lower plate 140 is preferably bonded by laser or electron beam welding.

1 is a schematic diagram for explaining a conventional showerhead CVD apparatus.

Figure 2 is a perspective view showing a shower head to which the gas injection module according to the present invention is applied.

3 is a cross-sectional view showing a shower head to which the gas injection module according to the present invention is applied.

Figure 4 is a cross-sectional perspective view showing a shower head to which the gas injection module according to the present invention is applied.

Figure 5 is a plan view showing a state viewed from the top cut along the line AA 'of FIG.

Figure 6 is a plan view showing a state viewed from the top cut along the line B-B 'of FIG.

7A to 7F are cross-sectional views showing processes of the shower head to which the gas injection module according to the present invention is applied.

DESCRIPTION OF REFERENCE NUMERALS

110: cover plate

121,131,141: First 1,2,3 Euros

122, 132, 142: first, second, and third fluid supply passages

123,133,143: Insertion hole

120,130,140: top plate, middle plate and bottom plate

150: injection module

151,152,153: top, middle, bottom plate

151a: protrusion

154, 155: first and second connections

154a, 155a: through hole

154b: jamming jaw

156: first tube

157: second tube

158: annular ring

Claims (12)

A cover plate 110 positioned at an upper portion thereof; Located in the lower portion of the cover plate 110, the central portion is spaced at regular intervals, and forms the first, second, third flow paths (121, 131, 141) through which the fluid moves, the edge parts are stacked to be in close contact with each other, First, second and third fluid supply passages 122, 132, and 142 are provided to supply fluid to the first, second, and third flow passages 121, 131, and 141, respectively, and a plurality of insertion holes 123, 133, and 143 in which a plurality of modules are to be inserted are provided on the same line. Upper plate, middle plate and lower plate (120,130,140) formed in; Upper, middle, and lower plates 151, 152, and 153 disposed at the same line as the upper, middle, and lower plates 120, 130, and 140, and spaced apart from each other; Through holes 154a and 155a connecting the upper plate 151 and the intermediate plate 152 and the intermediate plate 152 and the lower plate 153 to communicate with the second and third flow paths 131 and 141, respectively. The first and second connection parts 154 and 155 formed thereon; At least one first tube penetrating the upper plate 151, the intermediate plate 152, and the lower plate 153 and discharging the fluid moving to the first flow path 121 to the lower portion of the lower plate 153. 156, At least one second tube 157 penetrates the intermediate plate 152 and the lower plate 153 and injects fluid moving to the second flow path 131 to the lower portion of the lower plate 153. An injection module (150) inserted into the insertion holes (123, 133, 143) and bonded to the upper plate, the intermediate plate, and the lower plate (120, 130, 140); Shower head applying the gas injection module, characterized in that comprises a The method of claim 1, An upper portion of the upper plate 151 of the injection module 150 protrudes to the upper portion of the upper plate 120 and temporarily secures the upper portion of the upper plate 120 by caulking to secure an appropriate bonding interval during the brazing process. Shower head is applied to the gas injection module, characterized in that provided with a protrusion (151a). The method of claim 1, The upper and lower portions of the first connecting portion 154 are further provided with a locking step 154b that is attached to the upper plate 120 and the intermediate plate and the lower portion of the upper plate 120 and the upper portion of the intermediate plate 130. Shower head to which the gas injection module is applied. The method of claim 1, An annular ring 158 interposed between the lower plate 153 and the lower plate 140 of the injection module 150 and bonded to the lower plate 153 and the lower plate 140 is further provided. Shower head with gas injection module. The method of claim 1, The diameter of the injection module 150 is at least two or more kinds of different sizes in order to minimize the empty space and the insertion hole (123, 133, 143) is a gas injection module, characterized in that the diameter corresponding to the injection module 150 Shower head applied. a) preparing a cover plate 110 positioned at an upper portion thereof, and forming first, second and third flow paths 121, 131, and 141 through which a central portion is spaced so that the fluid moves; The first, second, and third fluid supply passages 122, 132, and 142 to which the fluid is supplied to the 121, 131, and 141, respectively, and the upper plate, the middle plate, and the lower plate are formed so that the plurality of insertion holes 123, 133, 143 are formed in the same line. Preparing (120, 130, 140); b) upper, middle, and lower plates 151, 152 and 153 disposed on the same line as the upper, middle and lower plates 120, 130 and 140 and spaced apart from each other to communicate with the second and third flow paths 131 and 141, respectively, and the upper plate ( A first through hole 154a and 155a connecting the 151 and the intermediate plate 152 and the intermediate plate 152 and the lower plate 153 to communicate with the second and third flow paths 131 and 141, respectively. 2, a fluid flowing through the connecting portions 154 and 155, the upper plate 151, the intermediate plate 152, and the lower plate 153 and moving to the first flow path 121 is injected into the lower portion of the lower plate 153. At least one first tube 156 and fluid flowing through the intermediate plate 152 and the lower plate 153 and moving to the second flow path 131 to be sprayed under the lower plate 153. At least one or more second tubes Manufacturing a plurality of injection modules 150 by primary bonding 157 integrally; c) inserting the manufactured injection module 150 into the insertion holes 123, 133, and 143 to stack the upper plate, the middle plate and the lower plate 120, 130 and 140, and stack the cover plate 110 thereon; d) secondary bonding the edges of the cover plate 110 stacked with the edges of the upper plate, the middle plate and the lower plate 120 and the inserted injection module 150; Showerhead manufacturing method applying the gas injection module, characterized in that comprises a. The method of claim 6, The first junction temperature is a showerhead manufacturing method applying a gas injection module, characterized in that higher than the secondary junction temperature. The method of claim 7, wherein The joining is a showerhead manufacturing method applying a gas injection module, characterized in that the joining by brazing. The method of claim 6, The upper part of the upper plate 151 of the injection module 150 is provided with a protrusion 151a protruding to the upper portion of the upper plate 120, and in step c) by caulking the protrusion 151a to the injection module 150 Temporarily fixed to the upper portion of the top plate 120; Shower head manufacturing method applying the gas injection module characterized in that it further comprises. The method of claim 6, The upper and lower portions of the first connecting portion 154 are further provided with a locking jaw (154b) for catching the lower portion of the upper plate 120 and the upper portion of the intermediate plate 130, the locking step (154b) in step d) Shower head manufacturing method is applied to the gas injection module, characterized in that bonded to the upper plate and the intermediate plate, respectively. The method of claim 6, e) bonding to the lower plate 153 and the lower plate 140 with an annular ring 158 interposed between the lower plate 153 and the lower plate 140 of the injection module 150, respectively. The method of manufacturing a showerhead to which a gas injection module is applied, characterized in that rebrazing or repairing is possible in the case of poor brazing bonding of the intermediate plate (130) and finally the annular ring (158) is bonded to complete the product. The method of claim 11, Bonding between the annular ring (158) and the lower plate and the lower plate (140) is a shower head manufacturing method applying a gas injection module, characterized in that the bonding by laser or electron beam welding.

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