KR20230018314A - Heat treating device - Google Patents

Abstract

The present invention provides a heating treatment device, which can more minutely control the temperature of the surface of a workpiece to which an object for heat treatment is attached, the temperature of the rear surface of the workpiece, and the uneven temperature distribution in the plane of the workpiece, even if heating is performed from both sides of the workpiece, by a simplified method. The heat treatment device according to an aspect comprises: a chamber; a first heating unit which is provided inside the chamber, and has at least one first heater; a second heating unit which is provided inside the chamber, has at least one second heater, and faces the first heating unit; at least one first cracked plate which is provided between the first heating unit and the second heating unit; at least one second cracked plate which is provided between the first cracked plate and the second heating unit; a first treatment area which is provided between the first cracked plate and the second cracked plate, and on which the workpiece is supported; a first temperature control unit which is provided on the first cracked plate; and a second temperature control unit which is provided on the second cracked plate. The first temperature control unit comprises a first radiation unit which is provided with a gap intervening between the first radiation unit and the first cracked plate. The second temperature control unit comprises a second radiation unit which is provided with a gap intervening between the second radiation unit and the second cracked plate.

Description

Heat treatment device {HEAT TREATING DEVICE}

An embodiment of the present invention relates to a heat treatment device.

There is a heat treatment device that heats a work to form a film or the like on the surface of the work or treats the surface of the work.

For example, a heat treatment apparatus has been proposed that forms an organic film on a substrate by applying a solution containing an organic material and a solvent onto a substrate and heating the solution. In such a heat treatment apparatus, for example, the internal space of the chamber is reduced in pressure from atmospheric pressure, and the substrate coated with the solution is heated to a temperature of about 100° C. to 600° C. in an atmosphere reduced in pressure from atmospheric pressure. In addition, by providing heaters on the front side (upper side) and the back side (lower side) of the work, and heating from both sides of the work through a soaking plate, shortening the treatment time is also being performed.

Here, in general, a solution or a layer to be subjected to the heat treatment is provided on the surface of the workpiece. When a chemical reaction proceeds from the surface of the object to be heat-treated, there is a risk that the reaction may not sufficiently proceed in a region in contact with the substrate of the object to be heat-treated. In this case, there is a possibility that the quality of the formed film or the processed layer may deteriorate. Therefore, in order to improve the quality of the formed film or the processed layer, it is required to heat the surface of the solution or layer provided on the surface of the workpiece in a state lower than the temperature of the back surface of the workpiece.

Further, higher quality films and layers are required. Therefore, a technique for more uniformly controlling the temperature distribution within the plane of the workpiece is required.

Therefore, even when heating is performed from both sides of the workpiece, the temperature of the surface of the workpiece to which the object to be subjected to heat treatment is adhered, the temperature of the backside of the workpiece, and the unevenness of the temperature distribution within the surface of the workpiece can be reduced more easily by a simple method. Development of a heat treatment device that can be controlled in detail has been desired.

Patent Document 1: International Publication No. 2019/117250

The problem to be solved by the present invention is to determine the temperature of the surface of the workpiece to which the object to be subjected to heat treatment is attached, the temperature of the backside of the workpiece, and the temperature distribution within the surface of the workpiece, even when heating is performed from both sides of the workpiece. It is to provide a heat treatment device capable of more detailed control of non-uniformity by a simple method.

A heat processing apparatus according to an embodiment includes a chamber, a first heating unit provided inside the chamber and having at least one first heater, provided inside the chamber, and including at least one second heater. , a second heating unit facing the first heating unit, at least one first cracking plate provided between the first heating unit and the second heating unit, and between the first cracking plate and the second heating unit at least one second soaking plate, a first processing region between the first soaking plate and the second soaking plate in which a work is supported, a first temperature controller provided on the first soaking plate, and It is equipped with the 2nd temperature control part provided in the 2 soak board. The first temperature control unit has a first radiation unit provided with the first soaking plate and a gap therebetween. The second temperature control section has a second radiation section provided with the second soaking plate and a gap therebetween.

According to the embodiment of the present invention, even when heating is performed from both sides of the workpiece, the temperature of the surface of the workpiece to which the object to be subjected to heat treatment is attached and the temperature of the backside of the workpiece, and the temperature distribution within the plane of the workpiece are not uniform. A heat treatment device capable of more detailed control by a simple method is provided.

1 is a schematic perspective view for illustrating a heat treatment apparatus according to the present embodiment.
2 is a schematic cross-sectional view for illustrating a temperature control unit.
3 is a schematic plan view for illustrating the planar shape of a temperature control unit.
4 is a schematic plan view for illustrating a temperature control unit according to another embodiment.
5 is a schematic cross-sectional view for illustrating a temperature control unit according to another embodiment.
6 is a schematic cross-sectional view for illustrating a temperature control unit according to another embodiment.
7 is a schematic cross-sectional view for illustrating the arrangement of a temperature control unit according to another embodiment.
8 is a schematic cross-sectional view for illustrating the arrangement of a temperature control unit according to another embodiment.
Fig. 9 is a schematic cross-sectional view for illustrating the arrangement of a temperature control unit in the case where processing regions are provided overlapping each other.
10 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where processing regions are provided overlapping.
11 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where processing regions are provided overlapping.
Fig. 12 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where processing regions are overlapped.
13 is a schematic perspective view for illustrating a form in the case of overlapping and providing a plurality of temperature control units.

EMBODIMENT OF THE INVENTION Hereinafter, an illustration is given about embodiment, referring drawings. In addition, in each drawing, the same code|symbol is attached|subjected to the same component, and detailed description is abbreviate|omitted suitably.

In the following, as an example, a heat treatment apparatus for forming an organic film on the surface of a workpiece by heating a workpiece in an atmosphere reduced in pressure from atmospheric pressure will be described. However, the present invention is not limited thereto. For example, the present invention can be applied to a heat treatment apparatus that heats a work to form an inorganic film or the like on the surface of the work, or treats the surface of the work.

In addition, the workpiece before heating may have, for example, a substrate and a solution applied to the surface of the substrate, or may be only the substrate. In the following, as an example, a case where the workpiece before heating has a substrate and a solution applied to the surface of the substrate will be described.

Also, in some cases, the solution applied to the surface of the substrate, the layer formed on the surface of the substrate, and the like are generally referred to as objects to be subjected to heat treatment.

1 is a schematic perspective view for illustrating a heat processing apparatus 1 according to the present embodiment.

In Fig. 1, the X direction, the Y direction, and the Z direction represent three directions orthogonal to each other. The vertical direction in this specification can be referred to as the Z direction.

The work 100 before heating has a substrate and a solution applied to the surface of the substrate.

The substrate is, for example, a glass substrate or a semiconductor wafer. However, the board|substrate is not limited to what was exemplified.

The solution contains, for example, an organic material and a solvent. The organic material is not particularly limited as long as it is soluble in a solvent. The solution can be, for example, a varnish containing polyamic acid. However, the solution is not limited to what was exemplified.

As shown in FIG. 1 , the heat treatment apparatus 1 includes, for example, a chamber 10 , an exhaust unit 20 , a processing unit 30 , a cooling unit 40 , and a controller 50 .

The chamber 10 has a box shape. The chamber 10 has an airtight structure capable of maintaining an atmosphere reduced in pressure from atmospheric pressure. The outer shape of the chamber 10 is not particularly limited. The outer shape of the chamber 10 can be, for example, a rectangular parallelepiped or a cylinder. The chamber 10 may be formed of, for example, metal such as stainless steel.

For example, a flange 11 is provided at one end of the chamber 10 . The flange 11 can be provided with a sealing material 12 such as an O-ring. The opening of the chamber 10 on the side where the flange 11 is provided can be opened and closed by the opening and closing door 13 . The opening and closing door 13 is pressed against the flange 11 (seal member 12) by a drive device not shown, so that the opening of the chamber 10 is closed so as to be airtight. When the opening/closing door 13 separates from the flange 11 by a drive device not shown, carrying in or carrying out the workpiece 100 through the opening of the chamber 10 becomes possible.

A flange 14 may be provided at the other end of the chamber 10 . The flange 14 can be provided with a sealing material 12 such as an O-ring. The opening of the chamber 10 on the side where the flange 14 is provided can be opened and closed by the cover 15 . For example, the cover 15 can be provided to the flange 14 so that attachment or detachment is possible using fastening members such as screws. When performing maintenance or the like, the opening on the side where the flange 14 is provided in the chamber 10 is exposed by removing the cover 15 .

A cooling unit 16 may be provided on an outer wall of the chamber 10 . A cooling water supply unit (not shown) is connected to the cooling unit 16 . The cooling unit 16 can be, for example, a water jacket. When the cooling unit 16 is provided, it is possible to suppress the temperature of the outer wall of the chamber 10 from being higher than a predetermined temperature.

The exhaust unit 20 exhausts the inside of the chamber 10 . The exhaust unit 20 has a first exhaust unit 21 and a second exhaust unit 22 .

The first exhaust unit 21 is connected to an exhaust port 17 provided on the bottom surface of the chamber 10 .

The first exhaust unit 21 includes an exhaust pump 21a and a pressure control unit 21b.

The exhaust pump 21a can be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a larger exhaust volume than the exhaust pump 22a described later. The exhaust pump 21a can be, for example, a dry vacuum pump or the like.

The pressure controller 21b is provided between the exhaust port 17 and the exhaust pump 21a. The pressure controller 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on an output of a vacuum gauge or the like not shown which detects the internal pressure of the chamber 10 . The pressure controller 21b can be, for example, an APC (Auto Pressure Controller) or the like.

The second exhaust unit 22 is connected to an exhaust port 18 provided on the bottom surface of the chamber 10 .

The second exhaust unit 22 includes an exhaust pump 22a and a pressure control unit 22b.

The exhaust pump 22a performs exhaust to a predetermined lower pressure after rough exhaust by the exhaust pump 21a. The exhaust pump 22a has an exhaust capability capable of exhausting to, for example, a high vacuum molecular flow region. For example, the exhaust pump 22a can be a turbo molecular pump (TMP) or the like.

The pressure controller 22b is provided between the exhaust port 18 and the exhaust pump 22a. The pressure controller 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on an output of a vacuum gauge or the like not shown which detects the internal pressure of the chamber 10 . The pressure controller 22b can be, for example, an APC or the like.

The exhaust port 17 and the exhaust port 18 are arranged on the bottom surface of the chamber 10 . Therefore, a downflow airflow toward the bottom surface of the chamber 10 is formed in the space between the inner wall of the chamber 10 and the processing unit 30 . When a downflow airflow is formed in the space, the sublimated material containing an organic material generated when the workpiece 100 is heated flows into the space from the inside of the processing unit 30, thereby reducing the downflow airflow in the space. Riding is discharged to the outside of the chamber (10). Therefore, adhesion of foreign matter such as sublimated material to the work 100 can be suppressed.

Further, in the above, the case where the exhaust vent 17 and the exhaust vent 18 are provided on the bottom surface of the chamber 10 has been exemplified, but the exhaust vent 17 and the exhaust vent 18 are, for example, the ceiling surface of the chamber 10. or can be placed on the side. If the exhaust port 17 and the exhaust port 18 are provided on the bottom or ceiling surface of the chamber 10, an airflow directed toward the bottom or ceiling surface of the chamber 10 can be formed inside the chamber 10. .

The processing unit 30 includes, for example, the frame 31, the heating unit 32 (corresponding to an example of the first heating unit or the second heating unit), the support unit 33, the split unit 34, and the split plate support unit 35. ), a cover 36 and a temperature controller 37 (corresponding to an example of the first temperature controller or the second temperature controller).

Inside the processing unit 30, a processing area 30a (corresponding to an example of the first processing area) and a processing area 30b (corresponding to an example of the second processing area) are provided. The processing areas 30a and 30b become spaces in which the workpiece 100 is processed. The work 100 is supported inside the processing regions 30a and 30b. The processing region 30b is provided so as to overlap the processing region 30a. In addition, although a case in which two processing regions are provided has been exemplified, it is not limited thereto. Only one processing area may be provided, or three or more processing areas may be provided. In this embodiment, as an example, the case where two processing areas are provided is illustrated, but the case where one processing area and three or more processing areas are provided is also conceivable.

The processing regions 30a and 30b are provided between the heating unit 32 and the heating unit 32 . The processing regions 30a and 30b are surrounded by cracks 34 .

As will be described later, the crack portion 34 is constituted by a plurality of crack plates. Therefore, the crack portion 34 is not a closed structure. Therefore, when the pressure in the space between the inner wall of the chamber 10 and the processing unit 30 is reduced, the space inside the processing regions 30a and 30b is also reduced.

When the pressure in the space between the inner wall of the chamber 10 and the processing unit 30 is reduced, heat emitted from the processing regions 30a and 30b to the outside can be suppressed. That is, heating efficiency and heat storage efficiency can be improved. Therefore, the electric power applied to the heater 32a (corresponding to an example of a 1st heater or a 2nd heater) mentioned later can be reduced. If the electric power applied to the heater 32a can be reduced, since the temperature of the heater 32a can be suppressed from becoming more than a predetermined temperature, the lifetime of the heater 32a can be lengthened.

The frame 31 has a frame structure using, for example, a long and thin plate material, a section steel, or the like. The outer shape of the frame 31 can be the same as that of the chamber 10 . The outer shape of the frame 31 can be, for example, a rectangular parallelepiped. In this embodiment, the frame 31 is in contact with the bottom surface of the chamber 10 at four locations. A heat insulating member is provided at a contact location of the frame 31 with the chamber 10 . The heat storage efficiency of the frame 31 may be increased by reducing the contact area between the frame 31 and the chamber 10 and using a heat insulating member in the contact portion.

A plurality of heating units 32 are provided. The heating unit 32 may be provided below the processing regions 30a and 30b and above the processing regions 30a and 30b. The heating unit 32 provided below the processing regions 30a and 30b serves as a lower heating unit. The heating part 32 provided in the upper part of processing area|region 30a, 30b becomes an upper heating part. The lower heating part faces the upper heating part. In addition, when a plurality of processing regions are overlapped in the vertical direction, the upper heating unit provided in the lower processing region can serve as the lower heating unit provided in the upper processing region. For example, the heating unit 32 provided between the processing region 30a and the processing region 30b is used in both the processing region 30a and the processing region 30b.

The heating unit 32 is provided inside the chamber 10 and heats the work 100 .

For example, the lower surface (lower surface) of the workpiece 100 supported by the treatment region 30a is heated by the heating unit 32 provided under the treatment region 30a. The surface (upper surface) of the workpiece 100 supported by the processing region 30a is heated by the heating unit 32 that serves both the treatment region 30a and the treatment region 30b.

The back surface of the workpiece 100 supported by the processing region 30b is heated by the heating unit 32 that is used both by the processing region 30a and the processing region 30b. The surface of the workpiece 100 supported by the processing region 30b is heated by the heating unit 32 provided above the processing region 30b.

In this way, since the number of heating units 32 can be reduced, power consumption reduction, manufacturing cost reduction, space saving, and the like can be achieved.

Each of the plurality of heaters 32 has at least one heater 32a and a pair of holders 32b. In addition, below, the case where the some heater 32a is provided is demonstrated.

The heater 32a has a bar shape and extends in the Y direction between the pair of holders 32b. A plurality of heaters 32a can be provided by arranging them in the X direction. A plurality of heaters 32a can be provided at regular intervals. The heater 32a is, for example, a sheath heater, a far infrared heater, a far infrared lamp, a ceramic heater, a cartridge heater, or the like. In addition, various heaters may be covered with quartz covers.

In addition, in this specification, various heaters covered with quartz covers are also referred to as "rod-shaped heaters". In addition, there is no limitation on the external shape of the "rod shape", and it can be made into a cylinder shape, a prismatic shape, etc., for example.

In addition, the heater 32a is not limited to the above as long as it can heat the workpiece 100 in an atmosphere reduced in pressure from atmospheric pressure. That is, the heater 32a may be one that uses thermal energy by radiation.

The specifications, number, spacing, etc. of the plurality of heaters 32a in the upper heating section and the lower heating section can be appropriately changed depending on the composition of the solution to be heated (heating temperature of the solution), the size of the workpiece 100, and the like. . The specification, number, spacing, etc. of the plurality of heaters 32a can be appropriately determined by conducting simulations, experiments, and the like.

The workpiece 100 is heated from both sides through the upper crack plate 34a and the lower crack plate 34b in the treatment regions 30a and 30b. Here, the vapor containing the sublimated material generated when the solution is heated tends to adhere to an object at a temperature lower than the temperature of the workpiece 100 to be heated. In this case, since the upper cracked plate 34a and the lower cracked plate 34b are heated, adhesion of the sublimated material to the upper cracked plate 34a and the lower cracked plate 34b is suppressed. In addition, the sublimated material is discharged out of the chamber 10 on the air current of the above-mentioned down flow. Therefore, adhesion of the sublimated material to the work 100 can be suppressed.

A pair of holders 32b extend in the X direction. The pair of holders 32b face each other in the Y direction. One holder 32b is fixed to an end face of the frame 31 on the side of the opening and closing door 13 . The other holder 32b is fixed to the end face of the frame 31 on the side opposite to the opening/closing door 13 side. The pair of holders 32b are fixed to the frame 31 using fastening members such as screws, for example. The pair of holders 32b hold the non-heating portion near the end of the heater 32a. The pair of holders 32b are made of, for example, an elongated metal plate or shaped steel. The material of the pair of holders 32b can be, for example, stainless steel.

A plurality of support parts 33 are provided inside the chamber 10 and support the work 100 . For example, the plurality of support parts 33 support the work 100 between the upper heating part and the lower heating part. The plurality of support parts 33 are provided below the processing region 30a and below the processing region 30b. The plurality of support portions 33 can be rod-shaped.

The shape of one end of the plurality of support portions 33 can be hemispherical or the like. When the shape of one end of the plurality of support portions 33 is hemispherical, it is possible to suppress damage to the lower surface of the work 100. In addition, since the contact area between the lower surface of the work 100 and the plurality of support portions 33 can be reduced, heat transmitted from the work 100 to the plurality of support portions 33 can be reduced.

The other end (lower end) of the plurality of support portions 33 can be fixed to a plurality of rod-like members or plate-like members constructed between the pair of frames 31, for example.

The number, arrangement, spacing, and the like of the plurality of support parts 33 can be appropriately changed depending on the size, stiffness (bending), and the like of the work 100 .

The split portion 34 includes a plurality of upper cracked plates 34a (corresponding to an example of the first cracked plate), a plurality of lower cracked plates 34b (corresponding to an example of the second cracked plate), and a plurality of side portions. It has a crack plate 34c and a plurality of side crack plates 34d. The plurality of upper cracked plates 34a, the plurality of lower cracked plates 34b, the plurality of side cracked plates 34c, and the plurality of side cracked plates 34d are plate-shaped.

A plurality of upper crack plates 34a are provided on the lower heating unit side (work 100 side) in the upper heating unit. The plurality of upper crack plates 34a are provided apart from the plurality of heaters 32a. A plurality of upper split plates 34a are arranged in the X direction and provided. A gap is provided between the plurality of upper cracked plates 34a. If the gap is provided, the increase in the size of the upper cracked plate 34a due to thermal expansion can be absorbed. Therefore, it is possible to suppress deformation caused by interference between the upper cracked plates 34a. Also, as described above, the pressure of the atmosphere in the processing regions 30a and 30b can be reduced through this gap.

A plurality of lower crack plates 34b are provided on the upper heating unit side (work 100 side) in the lower heating unit. The plurality of lower crack plates 34b are provided apart from the plurality of heaters 32a. A plurality of lower split plates 34b are arranged in the X direction and provided. A gap is provided between the plurality of lower crack plates 34b. If the gap is provided, the increase in the size of the lower cracked plate 34b due to thermal expansion can be absorbed. Therefore, it is possible to suppress deformation caused by interference between the lower cracked plates 34b. Also, as described above, the pressure of the atmosphere in the processing regions 30a and 30b can be reduced through this gap.

The side crack plates 34c are provided on each side of both sides of the treatment regions 30a and 30b in the X direction. The side crack plate 34c can be provided inside the cover 36. In addition, at least one heater 32a may be provided between the side crack plate 34c and the cover 36.

34 d of side crack plates are provided in each of the side part of the both sides of process area|region 30a, 30b in the Y direction.

As described above, the plurality of heaters 32a are rod-shaped and arranged at predetermined intervals. When the heater 32a is rod-shaped, heat is radiated radially from the central axis of the heater 32a. In this case, the shorter the distance between the central axis of the heater 32a and the heated portion, the higher the temperature of the heated portion. Therefore, when the workpiece 100 is held so as to face the plurality of heaters 32a, the area of the workpiece 100 located directly above or directly below the heater 32a is the plurality of heaters 32a. The temperature is higher than the region of the workpiece 100 located right above or just below the space between them. That is, when the workpiece 100 is directly heated using a plurality of bar-shaped heaters 32a, unevenness in temperature distribution occurs within the surface of the heated workpiece 100.

When unevenness in temperature distribution occurs within the plane of the work 100, the quality of the formed organic film may deteriorate. For example, there is a possibility that bubbles may be generated or the composition of the organic film may change in a portion where the temperature is increased.

When a plurality of upper cracked plates 34a and a plurality of lower cracked plates 34b are provided, the heat radiated from the plurality of heaters 32a is transferred to the plurality of upper cracked plates 34a and the plurality of lower cracked plates 34b. join in The heat incident on the plurality of upper cracked plates 34a and the plurality of lower cracked plates 34b is radiated toward the work 100 while propagating the insides of these in the plane direction. Therefore, it is possible to suppress unevenness of the temperature distribution within the surface of the work 100, and furthermore, the quality of the formed organic film can be improved.

The material of the plurality of upper cracked plates 34a and the plurality of lower cracked plates 34b is preferably a material having high thermal conductivity. These materials can be, for example, aluminum, copper, or stainless steel. In addition, when using a material that is easily oxidized, such as aluminum or copper, a layer containing a material that is difficult to be oxidized can be provided on the surface.

Further, the thermal conductivity of the lower cracked plate 34b can be higher than that of the upper cracked plate 34a. In this way, since the heat radiated from the upper cracked plate 34a is smaller than the heat radiated from the lower cracked plate 34b, the temperature of the surface of the solution, layer, etc. provided on the surface of the work 100 It can be heated in a state lower than the temperature of the back surface of the workpiece 100.

Some of the heat radiated from the plurality of upper crack plates 34a and the plurality of lower crack plates 34b is directed to the side of the treatment area. Therefore, the above-mentioned side crack plates 34c and 34d are provided on the sides of the treatment area. The heat incident on the side crack plates 34c and 34d is partially radiated toward the work 100 while propagating through the side crack plates 34c and 34d in the plane direction. Therefore, the heating efficiency of the work 100 can be improved.

It can be said that the material of the side cracked plates 34c and 34d is the same as that of the above-mentioned upper cracked plate 34a and lower cracked plate 34b.

In addition, in the above, the case where a plurality of upper cracked plates 34a and a plurality of lower cracked plates 34b are provided has been exemplified, but at least one of the upper cracked plates 34a and lower cracked plates 34b is It can also be set as a single plate-like member.

A plurality of cracked plate support portions 35 are arranged in the X direction. The cracked plate support portion 35 is provided directly below the gap between the upper cracked plates 34a in the X direction. The plurality of crack plate support portions 35 are fixed to the pair of holders 32b using fastening members such as screws. The pair of crack plate support portions 35 detachably support both ends of the upper crack plate 34a. In addition, the plurality of crack plate support portions 35 supporting the plurality of lower crack plates 34b may also have the same configuration.

When the upper cracked plate 34a and the lower cracked plate 34b are supported by the pair of cracked plate support portions 35, the difference in dimensions due to thermal expansion can be absorbed. Therefore, deformation of the upper crack plate 34a and the lower crack plate 34b can be suppressed.

The cover 36 has a plate shape and covers the top, bottom and side surfaces of the frame 31 . That is, the inside of the frame 31 is covered by the cover 36 . However, the cover 36 on the side of the opening and closing door 13 can be provided in the opening and closing door 13, for example. The cover 36 surrounds the treatment areas 30a and 30b, but gaps are provided at the boundary between the top and side surfaces of the frame 31, the boundary between the side and bottom surfaces of the frame 31, and in the vicinity of the opening/closing door 13. there is.

In addition, the cover 36 provided on the upper and lower surfaces of the frame 31 is divided into a plurality. Further, a gap is provided between the divided covers 36 comrades. That is, the internal space of the processing unit 30 (processing region 30a, processing region 30b) communicates with the internal space of the chamber 10 through these gaps. Therefore, the pressure in the processing regions 30a and 30b can be equal to the pressure in the space between the inner wall of the chamber 10 and the cover 36 . The cover 36 is made of, for example, stainless steel.

The temperature controller 37 is provided on the upper cracked plate 34a and the lower cracked plate 34b. The temperature controller 37 controls the heat radiated from the upper soaking plate 34a and the lower soaking plate 34b, thereby controlling the temperature of the surface of the workpiece 100 to which the object to be subjected to heat treatment is adhered and the temperature of the workpiece 100. The temperature of the back surface and the unevenness of the temperature distribution within the plane of the workpiece are controlled.

In addition, the surface of the work 100 includes surfaces such as the surface of the substrate, the surface of the solution applied to the surface of the substrate, and the layer formed on the surface of the substrate.

In addition, the detail regarding the temperature control part 37 is mentioned later.

The cooling unit 40 supplies a cooling gas to a space in which a plurality of heaters 32a are provided. The cooling unit 40 may also supply a cooling gas to the processing regions 30a and 30b. The cooling unit 40 cools the cracks 34 surrounding the processing regions 30a and 30b with a cooling gas. By cooling the crack portion 34, the workpiece 100 in a high temperature state is indirectly cooled. In addition, by cooling the cracked portion 34, heat from the cracked portion 34 can be suppressed from being transmitted to the work 100. When the cooling gas is supplied to the processing regions 30a and 30b, the workpiece 100 in a high temperature state is directly cooled.

In addition, the cooling unit 40 is not necessarily required and may be omitted. However, if the cooling part 40 is provided, the cooling time of the workpiece 100 can be shortened.

The cooling unit 40 has a nozzle 41 , a gas source 42 and a gas control unit 43 .

The nozzle 41 is connected to a space in which a plurality of heaters 32a are provided. In the case of supplying the cooling gas to the processing regions 30a and 30b, the nozzle 41 is connected to the processing regions 30a and 30b. In addition, the number and arrangement of nozzles 41 can be changed appropriately.

The gas source 42 supplies cooling gas to the nozzle 41 . The gas source 42 can be, for example, a high-pressure gas cylinder, a factory pipe, or the like. In addition, a plurality of gas sources 42 may be provided.

The cooling gas can be a gas that does not easily react with the heated work 100 . The cooling gas is, for example, nitrogen gas, carbon dioxide gas (CO ₂ ), or rare gas. The noble gas is, for example, argon gas or helium gas. The temperature of the cooling gas can be, for example, room temperature (eg, 25°C) or less.

The gas controller 43 is provided between the nozzle 41 and the gas source 42 . The gas control unit 43 can control at least one of, for example, supply of the cooling gas, stop of the supply, and flow rate and flow rate of the cooling gas.

The controller 50 includes, for example, an arithmetic unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The controller 50 is, for example, a computer or the like. The controller 50 controls the operation of each element provided in the heat processing apparatus 1 based on the control program stored in the storage unit.

Next, the temperature controller 37 will be further explained.

As described above, if the upper cracked plate 34a and the lower cracked plate 34b are provided, it is possible to suppress the occurrence of non-uniformity in the temperature distribution within the plane of the heated workpiece 100. However, the solution to be subjected to the heat treatment is provided on the surface side of the work 100 . When a chemical reaction proceeds from the surface of the object to be heat-treated, there is a risk that the reaction may not sufficiently proceed in a region in contact with the substrate of the object to be heat-treated. In this case, there is a possibility that the quality of the formed film or the processed layer may deteriorate. Therefore, it is required to heat the surface of the object to be subjected to heat treatment, that is, the temperature of the surface of the workpiece in a state lower than the temperature of the back surface of the workpiece.

Further, higher quality films and layers are required. Therefore, a technique for more uniformly controlling the temperature distribution within the plane of the work 100 is required. If non-uniformity occurs in the temperature distribution within the surface of the work 100, there is a risk that non-uniformity in quality may occur within the surface of the formed organic film.

Therefore, even when heating is performed from both sides of the workpiece 100, the temperature of the surface of the workpiece 100 to which the object to be subjected to heat treatment is attached and the temperature of the backside of the workpiece 100, and the inside of the surface of the workpiece 100 A temperature control unit 37 is provided in order to more precisely control the unevenness of the temperature distribution in a simple method.

2 is a schematic cross-sectional view for illustrating the temperature control unit 37.

FIG. 2 illustrates an upper cracked plate 34a and a lower cracked plate 34b opposed to a region (intermediate region) existing between the peripheral edge region and the central region of the work 100 .

3 is a schematic plan view for illustrating the planar shape of the temperature control unit 37.

As shown in FIGS. 2 and 3 , the temperature control unit 37 controls the surface of the work 100 side and the workpiece ( 100) side and can be provided on at least any one of the surface (surface on the side of the heater 32a) on the opposite side. The temperature controller 37 exemplified in FIG. 2 is provided on the surface of the upper crack plate 34a on the work 100 side. Further, for example, the temperature controller 37 controls the surface of the work 100 side and the side opposite to the work 100 side of the plurality of lower cracked plates 34b facing the central region and the middle region of the work 100. It can be provided on at least any one of the surfaces (surface on the side of the heater 32a). The temperature controller 37 exemplified in FIG. 2 is provided on the surface of the lower crack plate 34b, opposite to the work 100 side.

The temperature control part 37 has a radiation part 37a (corresponding to an example of a 1st radiation part or a 2nd radiation part) and several convex part 37b.

The radiation portion 37a has a plate shape. The radiation portion 37a is provided with an upper crack plate 34a and a gap therebetween. In addition, the radiating part 37a is provided with the lower crack plate 34b and the gap therebetween. The plurality of convex portions 37b have a protruding shape. The plurality of convex portions 37b may be provided on the surface of the radiation portion 37a on the side of the upper crack plate 34a or the surface of the side of the lower crack plate 34b. In addition, a plurality of convex portions 37b are provided to provide a gap between the radiation portion 37a and the upper crack plate 34a or between the radiation portion 37a and the lower crack plate 34b.

Depending on the distance between the radiating portion 37a and the upper cracked plate 34a or between the radiated portion 37a and the lower cracked plate 34b, the amount of heat incident on the front or back surface of the work 100 does not change. Therefore, the height of the plurality of convex portions 37b may be such that the radiation portion 37a and the upper crack plate 34a or the radiation portion 37a and the lower crack plate 34b do not contact each other. For example, the height of the plurality of convex portions 37b may be 0.2 mm or more. In addition, if the distance between the radiation portion 37a and the upper crack plate 34a or between the radiation portion 37a and the lower crack plate 34b is increased, the size of the chamber 10 is increased. Therefore, the height of the plurality of convex portions 37b may be 1 mm or less.

As described above, the heat radiated from the plurality of heaters 32a and incident on the upper cracked plate 34a and the lower cracked plate 34b is radiated to the work 100 side while propagating the inside of these in the plane direction. do. The temperature of the work 100 rises due to the heat radiated to the work 100 side, but the peripheral side of the work 100 is more likely to dissipate heat than the center side of the work 100. Therefore, the temperature of the central region of the work 100 is higher than the temperature of the peripheral region of the work 100 .

Here, in the region where the temperature control unit 37 is provided, the heat radiated from the upper cracked plate 34a enters the temperature control unit 37, and the heat incident on the temperature control unit 37 is directed toward the workpiece 100. is radiated In this case, since the temperature controller 37 is provided with a plurality of convex portions 37b, the heat radiated from the upper crack plate 34a enters the radiation portion 37a through the gap, and the radiation portion 37a Radiated toward the work 100 from the Further, on the lower soaked plate 34b side, the heat radiated from the temperature controller 37 is incident on the lower cracked plate 34b, and the heat incident on the lower cracked plate 34b is radiated toward the work 100. do. In this case, since the temperature controller 37 is provided with a plurality of convex portions 37b, the heat radiated from the radiation portion 37a enters the lower cracked plate 34b through the gap, and the lower cracked plate 34b ) is emitted toward the work 100. That is, in the area|region where the temperature control part 37 is provided, the propagation efficiency of radiant heat declines because the temperature control part 37 interposes. Therefore, the temperature of the region of the work 100 facing the temperature control unit 37 is lower than the temperature of the region of the work 100 that does not face the temperature control unit 37 .

In this case, as shown in FIG. 3 , in plan view, the temperature control unit 37 is provided in the central region of the upper cracked plate 34a and the lower cracked plate 34b opposite to the central region of the work 100. If there is, heat incident on the central region of the work 100 can be reduced. Therefore, in the surface of the work 100, it is possible to balance the amount of heat released from the work 100 and the amount of heat incident on the work 100. As a result, it is possible to further suppress the occurrence of non-uniformity in temperature distribution within the surface of the work 100, and further improve the quality of the formed organic film.

In addition, the unevenness of the amount of heat incident on the front surface or back surface of the workpiece 100 and the amount of heat incident on the surface of the workpiece 100 is determined by the planar shape of the radiation section 37a and the planar dimension of the radiation section 37a. You can control it. In addition, by making the planar dimension of the radiation portion 37a provided on the upper crack plate 34a larger than the plane dimension of the radiation portion 37a provided on the lower crack plate 34b, the temperature of the surface of the work 100 It can be heated in a state lower than the temperature of the back surface of the work 100. In this case, the temperature controller 37 may also be provided on the upper cracked plate 34a facing the periphery of the work 100. In addition, the temperature control unit 37 may be provided on both sides of the upper cracked plate 34a, and the temperature control unit 37 may be provided on one side of the lower cracked plate 34b.

In addition, the in-plane distribution of the temperature of the work 100 is affected by factors provided around the work 100, processing conditions, and the like. Therefore, the planar shape of the radiating portion 37a and the planar dimensions of the radiating portion 37a are preferably determined appropriately by, for example, experiments or simulations.

The radiation portion 37a and the plurality of convex portions 37b can be formed of, for example, metal such as stainless steel. The radiation portion 37a and the plurality of convex portions 37b can be integrally formed by, for example, embossing, press molding, or the like.

4 is a schematic plan view for illustrating a temperature controller 137 according to another embodiment.

As shown in FIG. 4 , the temperature control unit 137 has a radiation portion 137a and convex portions 137b to 137d.

The radiation part 137a can be the same as the above-mentioned radiation part 37a. However, the planar shape of the radiating portion 137a is a rectangle.

The convex portions 137b to 137d have a protruding shape. The convex portion 137b is provided in the central region of the radiation portion 137a. The convex portion 137d is provided in the circumferential edge region of the radiation portion 137a. The convex portion 137c is provided in an intermediate region between the area where the convex portion 137b of the radiation portion 137a is provided and the area where the convex portion 137d is provided.

Further, in a direction parallel to the plane of the radiation portion 137a on which the convex portions 137b to 137d are provided, the cross-sectional area of the convex portion 137b is smaller than that of the convex portion 137c, and the convex portion 137c The cross-sectional area of is smaller than the cross-sectional area of the convex portion 137d.

As described above, most of the heat radiated from the upper cracked plate 34a (lower cracked plate 34b) is transmitted to the radiation portion 137a by radiation through the gap. However, since the convex portions 137b to 137d contact the upper cracked plate 34a (lower cracked plate 34b), heat is transmitted by thermal conduction in the portion where the convex portions 137b to 137d are provided. In this case, when the cross-sectional area of the convex portion is reduced, heat is difficult to transmit, and when the cross-sectional area of the convex portion is increased, heat is easily transmitted. Therefore, if the cross-sectional area of the convex portion is changed according to the region where the convex portion is provided, the unevenness of the temperature distribution within the surface of the radiation portion 137a can be reduced.

For example, the peripheral area of the radiation portion 137a is easy to dissipate heat, so the temperature is easy to drop. On the other hand, since it is difficult to dissipate heat in the central region of the radiation portion 137a, the temperature tends to rise. Therefore, if the arrangement and cross-sectional area of the convex portions 137b to 137d are as described above, the heat transmitted to the peripheral region of the radiation portion 137a by heat conduction is the largest, and the heat transmitted to the middle region is next to and the heat transmitted to the central area can be minimized. Therefore, unevenness in the temperature distribution within the surface of the radiation portion 137a can be reduced.

In addition, the in-plane temperature distribution of the radiation part is affected by the temperature of the upper cracked plate 34a (lower cracked plate 34b), elements provided around the radiation part, processing conditions, and the like. Therefore, it is preferable to determine the arrangement, number, and cross-sectional area of the convex portions appropriately, for example, by conducting experiments or simulations.

In addition, although what has been described above is the case of reducing the unevenness of the temperature distribution in the surface of the radiation part, the temperature in a specific region of the radiation part can also be controlled by appropriately setting the arrangement, number, and cross-sectional area of the convex parts.

5 is a schematic cross-sectional view for illustrating a temperature controller 237 according to another embodiment.

The temperature controller 37 described above has a plate-shaped radiation portion 37a and a plurality of protruding projections 37b provided on one surface of the radiation portion 37a.

In contrast, the temperature control unit 237 is made of corrugated plate. For example, a flat plate can be processed into a corrugated plate shape by press molding or the like to form the temperature controller 237 . The temperature controller 237 can be made of, for example, metal such as stainless steel.

In this case, as shown in FIG. 5 , the portion 237b on the side of the upper cracked plate 34a (lower cracked plate 34b) of the temperature control unit 237 functions as the plurality of convex portions 37b described above. And, the portion 237a on the opposite side of the temperature controller 237 to the upper cracked plate 34a (lower cracked plate 34b) side functions as the radiation portion 37a.

That is, the temperature control unit should just have a radiation part provided in the upper cracked plate 34a (lower cracked plate 34b) through the gap.

6 is a schematic cross-sectional view for illustrating a temperature controller 337 and a temperature controller 437 according to another embodiment.

As shown in FIG. 6 , the temperature control unit 337 can be provided on at least one of the surface on the work 100 side and the surface on the opposite side to the work 100 side of the upper cracked plate 34a. The temperature controller 337 exemplified in FIG. 6 is provided on the surface of the upper crack plate 34a on the work 100 side. The temperature controller 337 can reduce the heat radiated to the workpiece 100 compared to the temperature controller 37 .

The temperature controller 337 has a radiation portion 37a, a plurality of convex portions 37b, and a reflective film 37c.

The reflective film 37c is provided on the surface of the temperature control unit 337 on the side of the heater 32a (in the temperature control unit 337 illustrated in FIG. 6, the surface on the side of the upper soaking plate 34a). The reflective film 37c is made of a material that is less heat absorbing than the radiation portion 37a. For example, the reflective film 37c can be formed of gold. If the reflective film 37c is provided, in the temperature control unit 337 illustrated in FIG. 6 , it is possible to suppress heat radiated from the upper cracked plate 34a from entering the radiation unit 37a of the temperature control unit 337. . Therefore, since the heat radiated to the workpiece 100 from the radiation portion 37a of the temperature controller 337 can be reduced, the area of the workpiece 100 facing the temperature controller 337 (eg, the workpiece ( It becomes easy to lower the temperature of the central region of 100).

In addition, in the temperature controller 37 indicated by the broken line, it is possible to suppress heat emitted from the heater 32a from entering the radiation portion 37a of the temperature controller 337 . Therefore, the heat radiated from the temperature controller 337 to the upper crack plate 34a can be suppressed. Therefore, since the heat radiated from the upper cracked plate 34a to the work 100 can be reduced, the region of the work 100 facing the upper cracked plate 34a to which the temperature control unit 337 is attached (e.g., , It becomes easy to lower the temperature of the central region of the work 100).

The temperature controller 437 can be provided on at least one of the surface on the work 100 side and the surface on the opposite side to the work 100 side of the lower crack plate 34b. The temperature controller 437 exemplified in FIG. 6 is provided on the surface of the lower cracked plate 34b, opposite to the work 100 side. The temperature controller 437 can increase the heat radiated to the workpiece 100 compared to the temperature controller 37 .

The temperature controller 437 has a radiation portion 37a, a plurality of convex portions 37b, and an absorption film 37d.

The absorption film 37d is provided on the surface of the temperature controller 437 on the side of the heater 32a (the surface of the radiation portion 37a in the temperature controller 437 illustrated in FIG. 6). The absorption film 37d is formed of a material that absorbs heat more easily than the radiation portion 37a (a material that easily radiates heat). For example, the absorption film 37d may be an oxide film, a nitride film, or a black film having a rough surface. If the absorption film 37d is provided, the temperature controller 437 can more efficiently absorb the heat radiated from the heater 32a. Therefore, it is possible to increase the heat radiated to the work 100 from the region of the lower cracked plate 34b facing the temperature controller 437.

As described above, when the reflective film 37c or the absorbing film 37d is provided, the temperature control of the region of the workpiece 100 facing the temperature controllers 337 and 437 becomes easier. Therefore, the surface temperature and the back surface temperature of the work 100 can be controlled in more detail.

In addition, the temperature controller 437 may provide a reflective film 37c instead of the absorbing film 37d. In the case of increasing the heat radiated from the temperature controller 437 provided with the reflective film 37c to the workpiece 100, the reflective film 37c may be provided on the surface opposite to the side provided with the absorbing film 37d.

7 is a schematic cross-sectional view for illustrating the arrangement of a temperature controller 37 according to another embodiment.

As shown in FIG. 7 , a plurality of temperature control units 37 (corresponding to an example of a third temperature control unit) may be overlapped and provided on at least one surface of the upper cracked plate 34a. For example, as shown in FIG. 7 , two temperature control units 37 may be superimposed on the surface of the upper crack plate 34a on the work 100 side.

When a plurality of temperature control units 37 are overlapped and provided, it is easy to lower the temperature of the region of the work 100 facing the plurality of temperature control units 37 (for example, the temperature of the central region of the work 100). it gets done

In the case of the temperature control part 337 having the above-mentioned reflective film 37c, a plurality can be provided by overlapping on at least one surface of the upper cracked plate 34a.

In addition, in the case of the temperature controller 437 having the absorber film 37d described above, a plurality of layers may be provided, overlapping each other, on at least one surface of the lower cracked plate 34b, for example.

In addition, you may overlap a plurality of them by combining the temperature control parts 37, 337, 437 as needed.

8 is a schematic cross-sectional view for illustrating the arrangement of a temperature controller 37 according to another embodiment.

As described above, in the portion where the convex portion 37b is provided, heat is transmitted by heat conduction. In the case where a plurality of temperature control units 37 (corresponding to an example of the third temperature control unit) are superimposed and provided, when the convex portions 37b overlap each other in plan view, the convex portion of the radiation portion 37a The temperature of the part where 37b is provided may become excessively high.

In this case, as shown in Fig. 8, if the convex portions 37b are not overlapped with each other in plan view, it is possible to suppress an increase in unevenness in the temperature distribution within the surface of the radiation portion 37a.

Fig. 9 is a schematic cross-sectional view for illustrating the arrangement of the temperature controller in the case where the treatment region 30a and the treatment region 30b are provided overlapping each other.

As shown in Fig. 1, there is a case where the processing region 30a and the processing region 30b overlap each other. In this case, as described above, the upper heating unit provided in the lower processing region 30a may serve as the lower heating unit provided in the upper processing region 30b. In this case, it is conceivable to reduce the electric power applied to the heater 32a on the surface side of the workpiece 100 in the processing region 30a in order to prevent excessive heating of the surface of the workpiece 100 . However, in this case, the temperature of the back side of the workpiece 100 in the processing region 30b also decreases. Therefore, in the case where a plurality of processing units 30 are overlapped and the workpiece 100 is heated from both sides, the temperature of the object to be subjected to heat treatment can be controlled simply by controlling the electric power applied to the heater 32a. More detailed control is difficult.

Even in such a case, by providing the temperature controllers 37, 137, 237, 337, and 437 described above, it is possible to reduce unevenness in the temperature distribution within the surface of the work 100.

For example, as shown in FIG. 9 , in the lower processing region 30a, the temperature control unit 37 can be provided on the surface of the upper cracked plate 34a on the work 100 side. In the upper processing region 30b, the temperature control unit 37 can be provided on the surface of the lower soaking plate 34b on the side opposite to the work 100 side (the surface on the heater 32a side). In this way, as in the case described above, the effect of being able to reduce the non-uniformity of the temperature distribution within the surface of the workpiece 100 can be enjoyed. At this time, each temperature controller 37, 137, 237, 337, 437 is selected or the plane size of the temperature controller is adjusted so that the temperature on the front side of the work 100 is lower than the temperature on the back side of the work 100 It is preferable to do

10 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where the processing region 30a and the processing region 30b are overlapped and provided.

10 illustrates a plurality of upper cracked plates 34a and lower cracked plates 34b opposing the central region and the middle region of the work 100 .

As described above, when the workpiece 100 is heated, it is preferable to make the temperature on the surface side of the workpiece 100 lower than the temperature on the backside side of the workpiece 100.

Therefore, for example, as shown in FIG. 10 , the planar dimensions of the temperature controller 537 provided on the upper soaking plate 34a of the lower treatment region 30a are set to the lower soaking plate of the upper treatment region 30b. It can be larger than the planar dimension of the temperature control part 37 provided in (34b).

The temperature controller 537 can be provided, for example, with the convex portions 37b interposed in the five upper cracked plates 34a shown in FIG. 1 . The convex portion 37b may be provided around the outer edge of the upper split plate 34a. In addition, the length of the radiation part 37a of the temperature controller 537 in the X direction is such that it does not reach the central region of the upper cracked plate 34a facing the outer edge region of the work 100.

In this way, in the lower processing region 30a, the temperature on the surface side of the workpiece 100 can be made lower than the temperature on the backside side of the workpiece 100. In addition, since the temperature control section 537 is provided at predetermined intervals on the upper crack plate 34a with the convex portion 37b interposed therebetween, the temperature control section 537 can be prevented from bending. In addition, since the length in the X direction of the radiation portion 37a of the temperature control unit 537 is set to a length that does not reach the central region of the upper cracked plate 34a facing the outer edge region of the work 100, The temperature of the outer edge of the back surface side of the work 100 increases easily, and the temperature distribution within the surface of the work 100 can be more uniformly controlled.

In addition, if the planar shape of the radiation part 37a of the temperature controller 537 is a rhombic shape, the heat incident on the periphery of the workpiece 100, which tends to decrease in temperature due to heat radiation, is increased, and the temperature due to heat radiation is increased. Heat incident on the central region of the work 100, which is unlikely to deteriorate, can be reduced.

11 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where the processing region 30a and the processing region 30b are overlapped and provided.

As shown in FIG. 11 , the above-described reflective film 37c can be further provided in the temperature control unit 537 . In this case, the reflective film 37c can be provided in the central region of the radiating portion in plan view. If the reflective film 37c is provided, it becomes easier to make the temperature of the surface side of the workpiece 100 lower than the temperature of the backside side of the workpiece 100 in the lower processing region 30a.

In addition, the reflective film 37c can be provided at a position facing the central region of the surface of the work 100 . As described above, since the central region of the work 100 is difficult to dissipate heat, the temperature tends to increase. Therefore, when the reflective film 37c is provided at a position facing the central region of the surface of the work 100, the unevenness of the temperature distribution within the plane of the surface of the work 100 can be reduced.

12 is a schematic cross-sectional view for illustrating another embodiment of the temperature control unit in the case where the processing region 30a and the processing region 30b are overlapped and provided.

As shown in FIG. 12, the above-mentioned temperature control part 37 (corresponding to an example of the 3rd temperature control part) can be overlapped and provided in the temperature control part 537. For example, temperature controllers having different planar dimensions of the radiating portion may be overlapped. In this case, the temperature controller 37 can be provided at a position facing the central region of the surface of the work 100 . As described above, since the central region of the work 100 is difficult to dissipate heat, the temperature tends to increase. Therefore, if the temperature control part 37 is provided in the position facing the central region of the surface of the work 100, the unevenness of the temperature distribution within the surface of the work 100 can be reduced.

The temperature controllers 37, 137, 237, 337, 437, and 537 exemplified above may be thermally connected to the upper cracked plate 34a (lower cracked plate 34b). For example, these temperature controllers may be welded to the upper cracked plate 34a (lower cracked plate 34b) or bonded to the upper cracked plate 34a (lower cracked plate 34b) using fastening members such as screws. can

13 is a schematic perspective view for illustrating a form in the case of overlapping and providing a plurality of temperature control units.

As shown in Fig. 13, a convex positioning unit 637a1 is provided in the lower temperature control unit 637a (corresponding to an example of the third temperature control unit), and the positioning unit ( A positioning unit 637b1 into which 637a1 is inserted may be provided. The positioning portion 637b1 can be, for example, a notch or a hole.

Since attaching and detaching the temperature controllers 637a and 637b in this way becomes easy, maintenance can be improved.

In the above, examples were given about the embodiment. However, the present invention is not limited to these techniques.

Regarding the above-described embodiment, those skilled in the art appropriately made design changes are also included in the scope of the present invention as long as they have the characteristics of the present invention.

For example, the shape, size, arrangement, etc. of the heat processing apparatus 1 are not limited to those illustrated and can be appropriately changed.

In addition, each element provided in each embodiment described above can be combined as much as possible, and a combination thereof is also included in the scope of the present invention as long as the features of the present invention are included.

In the form of another form shown in FIG. 7 and FIG. 12, the case where the temperature control part is overlapped and provided was demonstrated. However, the temperature control unit is not limited to being overlapped and provided. For example, the temperature control unit 537 is provided on the surface of the upper soaking plate 34a on the side of the heater 32a, and the temperature control unit 37 is placed on the workpiece of the upper soaking plate 34a facing the central region of the work 100. It may be provided on the surface on the (100) side.

Further, the number of temperature controllers 37 may be changed from the central region to the outer edge region of the work 100 . For example, the number of temperature controllers 37 may decrease from the central area toward the outer edge area. By doing in this way, the non-uniformity of the temperature distribution within the plane of the workpiece 100 can be reduced.

Moreover, you may use together the temperature control part 37 and the temperature control part 337. For example, the temperature controller 337 may be provided on the upper soaked plate 34a facing the central region of the work 100, and the temperature controller 37 may be provided on the upper soaked plate 34a disposed on both sides thereof. there is. By doing in this way, the non-uniformity of the temperature distribution within the plane of the workpiece 100 can be reduced.

In addition, the shape of the temperature control part 37 is not limited to a rectangle. For example, the temperature distribution within the surface of the workpiece 100 in the case of heating only the cracked portion may be obtained in advance, and the shape of the temperature control unit 37 may be determined according to the temperature distribution. In this case, the temperature control part 37 can be made into various shapes, such as a triangle, an ellipse, a gourd shape, and a fan shape, for example.

Further, in a heat treatment apparatus having a plurality of heating units 32, the shape and configuration of the temperature control unit 37 may be changed for each heating unit 32. For example, the shape or configuration of the temperature controller 37 provided on the upper soaking plate 34a may be different for each heating unit 32 . In addition, unlike the other heating units 32, heat escapes easily from the lowermost and uppermost heating units 32. Therefore, it is not necessary to provide the temperature control part 37 in the split part 34 provided on the side opposite to the workpiece|work 100 side of the heating part 32 about the heating part 32 of the lowermost stage and the uppermost stage. By doing in this way, the non-uniformity of the temperature distribution within the surface of the work 100 provided in the process part 30 of the lowermost stage and the uppermost stage can be reduced.

1 heating processing unit, 10 chamber, 20 exhaust unit, 30 processing unit, 30a processing area, 30b processing area, 32 heating unit, 33 support unit, 34a upper soaking plate, 34b lower soaking plate, 37 temperature control unit, 37a radiation part, 37b convex part, 37c reflective film, 100 workpiece, 137 temperature controller, 237 temperature controller, 337 temperature controller, 437 temperature controller, 537 temperature controller

Claims (11)

chamber,
A first heating unit provided inside the chamber and having at least one first heater;
A second heating unit provided inside the chamber, having at least one second heater, and facing the first heating unit;
At least one first soaking plate provided between the first heating unit and the second heating unit;
at least one second soaking plate provided between the first soaking plate and the second heating part;
A first processing region in which a work is supported, between the first soaking plate and the second soaking plate;
A first temperature controller provided on the first soaking plate;
A second temperature controller provided on the second soaking plate
to provide,
The first temperature control unit has a first radiation unit provided with the first soaking plate and a gap therebetween,
The heat treatment apparatus according to claim 1, wherein the second temperature control unit has a second radiation unit provided with the second soaking plate and a gap therebetween. chamber,
An exhaust unit that exhausts the inside of the chamber to vacuum the inside of the chamber;
A first processing region provided inside the chamber and supporting a workpiece;
a first heating unit provided above the first processing region and having at least one first heater;
a second heating unit provided below the first processing region and having at least one second heater;
at least one first soaking plate provided between the first treatment region and the first heating part;
at least one second soaking plate provided between the first treatment region and the second heating part;
A first temperature controller provided on the first soaking plate
to provide,
The heat treatment apparatus according to claim 1 , wherein the first temperature control unit has a first radiation unit provided with the first soaking plate and a gap therebetween. According to claim 2,
A second temperature controller provided on the second soaking plate
to provide,
The heat treatment apparatus according to claim 1, wherein the second temperature control unit has a second radiation unit provided with a second soaking plate and a gap therebetween. The heat treatment apparatus according to claim 1, wherein a plane dimension of the first radiation part is larger than a plane dimension of the second radiation part. The heat treatment apparatus according to claim 3, wherein a plane dimension of the first radiation part is larger than a plane dimension of the second radiation part. The heat processing apparatus according to claim 1, wherein the first radiation part is provided with a reflective film that absorbs heat more easily than the first radiation part. The heat processing apparatus according to claim 6, wherein the reflective film is provided in a central region of the first radiation portion when viewed in plan. The heat treatment apparatus according to claim 1, wherein the thermal conductivity of the second soaked plate is higher than that of the first soaked plate. According to claim 1,
A third temperature controller overlapping the first temperature controller
A heat treatment device further comprising. The method of claim 9, wherein the third temperature control unit has a third radiation unit provided with the first temperature control unit and a gap therebetween,
A plane dimension of the third radiation part is different from a plane dimension of the first radiation part provided in the first temperature control unit. According to any one of claims 1 to 10,
A second processing region overlapping the first processing region
have more
wherein the first heating unit provided between the first processing region and the second processing region is used in both the first processing region and the second processing region.

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