KR20220161802A - 기상 전기 환원법을 이용한 실리콘의 제조방법 - Google Patents
기상 전기 환원법을 이용한 실리콘의 제조방법 Download PDFInfo
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- KR20220161802A KR20220161802A KR1020210070006A KR20210070006A KR20220161802A KR 20220161802 A KR20220161802 A KR 20220161802A KR 1020210070006 A KR1020210070006 A KR 1020210070006A KR 20210070006 A KR20210070006 A KR 20210070006A KR 20220161802 A KR20220161802 A KR 20220161802A
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4417—Methods specially adapted for coating powder
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- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0428—Chemical vapour deposition
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- H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
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- H01M4/36—Selection of substances as active materials, active masses, active liquids
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- H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
- H01M4/583—Carbonaceous material, e.g. graphite-intercalation compounds or CFx
- H01M4/587—Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
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- Y02E60/10—Energy storage using batteries
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- Manufacturing & Machinery (AREA)
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- Metallurgy (AREA)
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- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
도 2는 본 발명의 일 실시예에 따른 규소계 전구체의 기상 공급 과정을 나타낸 도면이다.
Claims (4)
- 모재의 표면에 전위를 인가하는 단계;
전위가 인가된 상기 모재 상에 규소계 화합물을 기상 공급하는 단계; 및
기상에서 규소계 화합물이 환원되면서 상기 모재의 표면 상에 실리콘 코팅층이 형성되는 단계;를 포함하는 것을 특징으로 하는, 기상 전기 환원법을 이용한 실리콘의 제조방법. - 제1항에 있어서, 상기 규소계 화합물은 실리콘 테트라클로라이드(Silicon Tetrachloride, SiCl4), 헥사클로로디실란(Hexachlorodisilane, Si2Cl6), 다이클로로실란(Dichlorosilane, SiH2Cl2), 메틸실란(Methylsilane, CH3SiH3), 테트라키스 실란(Tetrakis(trichlorosilyl)silane) 또는 실리콘 테트라플루오라이드 (Silicon Tetrafluoride, SiF4)인 것을 특징으로 하는, 기상 전기 환원법을 이용한 실리콘의 제조방법.
- 제1항에 있어서, 상기 모재는 흑연, 구리, 리튬, 알루미늄, 스테인레스 또는 배터리 NMC/NCA 소재인 것을 특징으로 하는, 기상 전기 환원법을 이용한 실리콘의 제조방법.
- 양극; 음극; 및 전해질;을 포함하고,
상기 음극은 제1항 내지 제3항 중 어느 한 항에 따른 방법으로 코팅된 실리콘 박막을 포함하는 리튬 이온/메탈 배터리.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210070006A KR102517722B1 (ko) | 2021-05-31 | 2021-05-31 | 기상 전기 환원법을 이용한 실리콘의 제조방법 |
| DE112022001926.3T DE112022001926B4 (de) | 2021-05-31 | 2022-05-30 | Verfahren zur Herstellung von Silizium unter Verwendung von Gasphasen-Elektroreduktion |
| PCT/KR2022/007666 WO2022255753A1 (ko) | 2021-05-31 | 2022-05-30 | 기상 전기 환원법을 이용한 실리콘의 제조방법 |
| US18/558,536 US12148923B2 (en) | 2021-05-31 | 2022-05-30 | Method for preparing silicon by using gas-phase electroreduction |
| JP2023566988A JP7544993B2 (ja) | 2021-05-31 | 2022-05-30 | 気相電気還元法を用いたシリコンの製造方法 |
| CN202280033489.5A CN117242205A (zh) | 2021-05-31 | 2022-05-30 | 利用气相电还原法的硅的制备方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210070006A KR102517722B1 (ko) | 2021-05-31 | 2021-05-31 | 기상 전기 환원법을 이용한 실리콘의 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20220161802A true KR20220161802A (ko) | 2022-12-07 |
| KR102517722B1 KR102517722B1 (ko) | 2023-04-04 |
Family
ID=84324404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020210070006A Active KR102517722B1 (ko) | 2021-05-31 | 2021-05-31 | 기상 전기 환원법을 이용한 실리콘의 제조방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12148923B2 (ko) |
| JP (1) | JP7544993B2 (ko) |
| KR (1) | KR102517722B1 (ko) |
| CN (1) | CN117242205A (ko) |
| DE (1) | DE112022001926B4 (ko) |
| WO (1) | WO2022255753A1 (ko) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20150118304A (ko) * | 2014-04-14 | 2015-10-22 | 한국과학기술연구원 | 리튬 이차전지용 음극, 이의 제조방법 및 이를 포함하는 리튬 이차전지 |
| KR101929413B1 (ko) | 2016-10-11 | 2018-12-14 | 울산과학기술원 | 리튬 이차 전지용 음극 활물질, 이의 제조 방법, 및 이를 포함하는 리튬 이차 전지 |
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| NL244172A (ko) | 1959-05-25 | |||
| JPH06291050A (ja) * | 1993-03-31 | 1994-10-18 | Toshiba Lighting & Technol Corp | 気相成長Si膜、Si膜の気相成長方法および気相成長装置 |
| JP2000058460A (ja) * | 1998-08-12 | 2000-02-25 | Mitsubishi Heavy Ind Ltd | シリコン薄膜製造方法 |
| RU2155158C1 (ru) * | 1999-10-07 | 2000-08-27 | Институт химии высокочистых веществ РАН | Способ получения моноизотопного кремния si28 |
| JP2002294450A (ja) * | 2001-03-29 | 2002-10-09 | Sony Corp | 多結晶性半導体薄膜の形成方法、半導体装置の製造方法、並びにこれらの方法の実施に使用する装置 |
| DE102006003464A1 (de) * | 2006-01-25 | 2007-07-26 | Degussa Gmbh | Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung |
| KR100875712B1 (ko) | 2007-05-10 | 2008-12-23 | 재단법인서울대학교산학협력재단 | 전기장을 이용한 막 증착 장치 및 막 증착 방법 |
| WO2008030047A1 (en) * | 2006-09-06 | 2008-03-13 | Seoul National University Industry Foundation | Apparatus and method of depositing films using bias and charging behavior of nanoparticles formed during chemical vapor deposition |
| US8828481B2 (en) * | 2007-04-23 | 2014-09-09 | Applied Sciences, Inc. | Method of depositing silicon on carbon materials and forming an anode for use in lithium ion batteries |
| FR2928036B1 (fr) * | 2008-02-26 | 2010-12-24 | Commissariat Energie Atomique | Procede de fabrication d'une electrode a base de silicium, electrode a base de silicium et batterie au lithium comprenant une telle electrode |
| FR2936102B1 (fr) * | 2008-09-12 | 2010-10-29 | Commissariat Energie Atomique | Procede de preparation d'un materiau composite silicium/ carbone, materiau ainsi prepare et electrode notamment electrode negative, comprenant ce materiau. |
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| US20130177820A1 (en) * | 2012-01-06 | 2013-07-11 | University of Pittsburgh - of the Commonwealth Systems of Higher Education | Silicon-containing compositions, methods of their preparation, and methods of electrolytically depositing silicon on a current carrier for use in lithium ion battery applications |
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2021
- 2021-05-31 KR KR1020210070006A patent/KR102517722B1/ko active Active
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2022
- 2022-05-30 WO PCT/KR2022/007666 patent/WO2022255753A1/ko not_active Ceased
- 2022-05-30 CN CN202280033489.5A patent/CN117242205A/zh active Pending
- 2022-05-30 US US18/558,536 patent/US12148923B2/en active Active
- 2022-05-30 DE DE112022001926.3T patent/DE112022001926B4/de active Active
- 2022-05-30 JP JP2023566988A patent/JP7544993B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150118304A (ko) * | 2014-04-14 | 2015-10-22 | 한국과학기술연구원 | 리튬 이차전지용 음극, 이의 제조방법 및 이를 포함하는 리튬 이차전지 |
| KR101929413B1 (ko) | 2016-10-11 | 2018-12-14 | 울산과학기술원 | 리튬 이차 전지용 음극 활물질, 이의 제조 방법, 및 이를 포함하는 리튬 이차 전지 |
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| Publication number | Publication date |
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| JP7544993B2 (ja) | 2024-09-03 |
| WO2022255753A1 (ko) | 2022-12-08 |
| US20240243270A1 (en) | 2024-07-18 |
| DE112022001926B4 (de) | 2025-03-27 |
| DE112022001926T5 (de) | 2024-01-25 |
| CN117242205A (zh) | 2023-12-15 |
| KR102517722B1 (ko) | 2023-04-04 |
| US12148923B2 (en) | 2024-11-19 |
| JP2024516266A (ja) | 2024-04-12 |
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