KR20220083590A - Observation apparatus, decompression drying apparatus, display method, and storage medium - Google Patents

Abstract

[Problem] The convenience of imaging results of a substrate during a reduced pressure drying process is improved.
[Solution means] An imaging unit for imaging the substrate during a reduced pressure drying process in which a solution on a substrate is dried under reduced pressure, a substrate image obtained by imaging by the imaging unit at each time point during the reduced pressure drying process, and the reduced pressure It is an observation apparatus provided with the acquisition part which acquires the state regarding the said reduced-pressure drying process of the reduced-pressure drying apparatus which performs a drying process together with time information at the said time point.

Description

OBSERVATION APPARATUS, DECOMPRESSION DRYING APPARATUS, DISPLAY METHOD, AND STORAGE MEDIUM

The present disclosure relates to an observation apparatus, a reduced pressure drying apparatus, a display method, and a storage medium.

In Patent Document 1, an inspection comprising an imaging unit for imaging an application region coated with an organic material on a substrate, and a dry state detection unit for detecting a dry state of the application region based on the color density of the application region imaged by the imaging unit An apparatus is disclosed.

Japanese Patent Laid-Open No. 2017-73338

The technique according to the present disclosure improves the convenience of the imaging result of the substrate during the reduced pressure drying process.

An aspect of the present disclosure includes an imaging unit that images the substrate during a reduced pressure drying process for drying a solution on a substrate under reduced pressure, and a substrate image obtained by imaging by the image capturing unit at each time point during the reduced pressure drying process; , it is an observation apparatus provided with the acquisition part which acquires the state regarding the said reduced-pressure drying process of the reduced-pressure drying apparatus which performs the said reduced-pressure drying process together with the time information of the said time point.

ADVANTAGE OF THE INVENTION According to this indication, the convenience of the imaging result of the board|substrate during a reduced pressure drying process can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows schematic structure of the reduced-pressure drying apparatus which concerns on 1st Embodiment.
Fig. 2 is a longitudinal sectional view showing a schematic configuration of the reduced-pressure drying apparatus according to the first embodiment.
3 is a functional block diagram of a control unit related to display processing by an observation device.
4 is a diagram illustrating an example of a display screen displayed on a display unit.
5 is a diagram illustrating an example of a display screen displayed on a display unit.
It is a block diagram of the control part of the observation apparatus which concerns on 2nd Embodiment.
7 is a block diagram of a control unit related to a reduced pressure drying process according to a third embodiment.

Conventionally, an organic light emitting diode (OLED), which is a light emitting diode using light emission of organic EL (Electroluminescence), is known. An organic EL display using such an organic light emitting diode has the advantage of being thin, light, low power consumption, and excellent in terms of response speed, viewing angle, and contrast ratio, and thus has recently attracted attention as a next-generation flat panel display (FPD).

The organic light emitting diode has a structure in which an organic EL layer is sandwiched between an anode and a cathode on a substrate. The organic EL layer is formed by laminating, for example, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer in order from the anode side. In forming each layer of these organic EL layers (especially a hole injection layer, a hole transport layer, and a light emitting layer), for example, by an inkjet method, droplets of a solution containing an organic material are applied to the pixels of each color discretely arranged on the substrate. A method of forming a film of a solution containing the organic material of the pixel in the bank by discharging to the corresponding bank is used.

A large amount of solvent is contained in the solution of the organic material discharged onto the substrate by the inkjet method. Therefore, for the purpose of removing the solvent, a reduced pressure drying treatment of drying the solution on the substrate under reduced pressure is performed.

However, the method of drying the solution on the substrate varies depending on various factors such as the type or amount of the solution and the type of reduced pressure. Therefore, it is performed to observe the state of the board|substrate during a reduced pressure drying process, and the state of the reduced pressure drying apparatus itself at the time of determination of the process condition of a reduced pressure drying process, etc. For example, in patent document 1, it is trying to provide the imaging part which images the application area|region to which the solution containing the organic material was apply|coated on the board|substrate in a reduced pressure drying apparatus.

The technique according to the present disclosure improves the convenience of the imaging result of the substrate during the reduced pressure drying process.

EMBODIMENT OF THE INVENTION Hereinafter, the display method by the observation apparatus which concerns on this embodiment, the reduced pressure drying apparatus, and the observation apparatus is demonstrated with reference to drawings. In addition, in this specification and drawing, about the element which has substantially the same functional structure, the same code|symbol is attached|subjected, and redundant description is abbreviate|omitted.

(First embodiment)

1 and 2 are respectively a plan view and a longitudinal sectional view showing the schematic configuration of the reduced pressure drying apparatus according to the first embodiment, and FIG. 2 is a cross section taken along the line A-A in FIG. 1 .

The reduced pressure drying apparatus 1 performs a reduced pressure drying process in which the solution containing the organic material applied on the substrate W is dried under reduced pressure. In addition, the board|substrate W of the process object of the reduced pressure drying apparatus 1 is a glass substrate for organic electroluminescent displays, for example, The plane size is 2.2mx2.7m. Application of the solution to the substrate W to be treated is performed, for example, by an inkjet method.

The solution applied to the substrate W to be treated consists of a solute and a solvent, and the component to be subjected to the reduced pressure drying treatment is mainly a solvent. Many organic compounds contained in the solvent have a high boiling point, for example, 1,3-dimethyl-2-imidazolidinone (1,3-dimethyl-2-imidazolidinone, boiling point 220°C, melting point 8°C), 4- tert-Butylanisole (4-tert-Butylanisole, boiling point 222℃, melting point 18℃), Trans-Anethole (Trans-Anethole, boiling point 235℃, melting point 20℃), 1,2-dimethoxybenzene (1,2 -Dimethoxybenzene, boiling point 206.7℃, melting point 22.5℃), 2-Methoxybiphenyl (2-Methoxybiphenyl, boiling point 274℃, melting point 28℃), phenyl ether (Phenyl Ether, boiling point 258.3℃, melting point 28℃), 2-E Toxinaphthalene (2-Ethoxynaphthalene, boiling point 282°C, melting point 35°C), Benzyl Phenyl Ether (boiling point 288°C, melting point 39°C), 2,6-Dimethoxytoluene (2,6-Dimethoxytoluene, boiling point 222°C) , melting point 39℃), 2-propoxynaphthalene (2-Propoxynaphthalene, boiling point 305℃, melting point 40℃), 1,2,3-trimethoxybenzene (1,2,3-Trimethoxybenzene, boiling point 235℃, melting point 45) ℃), cyclohexylbenzene (boiling point 237.5℃, melting point 5℃), dodecylbenzene (dodecylbenzene, boiling point 288℃, melting point -7℃), 1,2,3,4-tetramethylbenzene (1,2, 3,4-tetramethylbenzene, boiling point 203° C., melting point 76° C.) and the like. Two or more of these high boiling point organic compounds may be combined in a solution in some cases.

The reduced pressure drying apparatus 1 is equipped with the chamber 10 as shown in FIG.

The chamber 10 is a container configured to be able to depressurize, and is made of, for example, a metal material such as stainless steel. A substrate W to be processed is accommodated in the chamber 10 .

In addition, an exhaust port 11 is provided on the bottom wall of the chamber 10 . An exhaust mechanism 20 is connected to the exhaust port 11 . The pressure in the chamber 10 of the decompression drying apparatus 1 can be reduced by the exhaust by the exhaust mechanism 20 passing through the exhaust port 11 . The exhaust mechanism 20 has a regulating valve 21 and a vacuum pump 22 . The adjustment valve 21 is for adjusting the exhaust pressure, and specifically, the exhaust pressure by the vacuum pump 22 can be adjusted by adjusting the opening degree. The vacuum pump 22 is configured such that, for example, a turbo molecular pump and a dry pump are connected in series from the upstream side in this order.

The adjustment valve 21 and the vacuum pump 22 are controlled by the control part 50 mentioned later. In addition, the information of the opening degree of the regulating valve 21 is acquired by the control part 50 mentioned later.

Further, the chamber 10 is provided with a pressure sensor 23 for measuring the internal pressure of the chamber (10). The measurement result by the pressure sensor 23 is output to the control part 50 which will be described later.

In addition, a mounting table 30 is provided inside the chamber 10 . The mounting table 30 is on which the substrate W is mounted, and has a main body 31 and a post member 32 .

The main body 31 is a member whose upper surface is a mounting surface on which the substrate is mounted, and is constituted of, for example, a plate-shaped member.

Each post member 32 is a member extending in a vertical direction, and supports the main body 31 horizontally at the front end. The base end of each holding member 32 is connected to the bottom wall of the chamber 10 .

In addition, the mounting table 30 is provided with a temperature control mechanism (not shown) for adjusting the temperature of the substrate W mounted on the mounting table 30 by adjusting the temperature of the mounting table 30 . The temperature control mechanism includes, for example, at least one of a heating mechanism such as a resistance heating heater and a cooling mechanism such as a flow passage through which a cooling refrigerant flows. The temperature control mechanism is provided in the main body 31 , for example. In addition, the temperature control mechanism is controlled by the control part 50 mentioned later.

A plurality of lifter pins 33 are provided below the main body 31 of the mounting table 30 so as to extend in the vertical direction. Each lifter pin 33 horizontally supports the substrate W at its tip. The base end of each lifter pin 33 is connected to a drive mechanism (not shown) having an actuator, such as a motor, for raising/lowering the lifter pin 33 . As a result, when the substrate W is transferred between the arm of the external substrate transfer mechanism (not shown) and the mounting table 30 , the lifter pins 33 are inserted into the through holes formed in the main body 31 (not shown). ), it can be protruded from the upper surface of the main body 31 .

In addition, the drive mechanism is controlled by a control unit 50 to be described later.

Furthermore, a solvent collecting member 40 is provided inside the chamber 10 .

The solvent collecting member 40 is a member that temporarily collects the solvent in the solution vaporized from the substrate W mounted on the mounting table 30 . The solvent collecting member 40 is provided in the chamber 10 above the board|substrate W mounted on the mounting table 30 so that it may oppose the said board|substrate W. By providing the solvent collecting member 40 in the chamber 10 , the concentration of the solvent in the atmosphere in the chamber 10 can be adjusted.

The solvent collecting member 40 is a plate-shaped member, and has a plurality of through holes 40a penetrating in the thickness direction of the solvent collecting member 40 . The through holes 40a are formed in a grid shape over the entire surface of the solvent collecting member 40 in a plan view.

Solvent trapping member 40, for example, in a plate material made of a material with good thermal conductivity, such as stainless steel, aluminum, or a metal material such as copper, by drilling a hole by laser processing, plasma etching, etc., a plurality of through-holes 40a produced by forming One sheet or multiple sheets may be sufficient as the number of sheets of the board|plate material in which many through-holes 40a were formed by the above-mentioned drilling process which comprises the solvent collecting member 40.

In addition, the solvent trapping member 40 is thin, and the thickness is 0.05 mm - 0.2 mm, for example. In plan view, the dimensions of the solvent trapping member 40 are approximately the same as the dimensions of the mounting table 30 .

The solvent collecting member 40 is supported at a position between the ceiling wall of the chamber 10 and the substrate W on the mounting table 30 . In addition, the solvent collecting member 40 has a plurality of supporting members 41 to face the substrate W on the mounting table 30 in front, that is, to be substantially parallel to the substrate W on the mounting table 30 . Through the , it is supported on the bottom wall of the chamber 10 .

Each supporting member 41 is a member extending in the vertical direction, and horizontally supports the solvent collecting member 40 at the tip. The base end of each support member 41 is connected to a drive mechanism (not shown) having an actuator, such as a motor, for raising/lowering the support member 41 . Accordingly, the height of the solvent collecting member 40 with respect to the substrate W can be adjusted.

In addition, the drive mechanism is controlled by a control unit 50 to be described later.

Moreover, the window 12 for imaging by the imaging part 61 mentioned later is provided in the upper part of the chamber 10. As shown in FIG. The window 12 is specifically mounted in an opening 13 formed in the ceiling wall of the chamber 10 . The window 12 and the opening 13 are, for example, at positions opposite to the central portion of the substrate W mounted on the mounting table 30 on the ceiling wall of the chamber 10 , and It is provided at a position opposite to one corner portion and at a position opposite to another corner portion located on a diagonal line passing through the one corner portion of the substrate (W).

The window 12 is formed of a material (eg, glass) having a light-transmitting degree capable of imaging the substrate W inside the chamber 10 by an imaging unit 61 , which will be described later, from the outside of the chamber 10 . .

Moreover, the reduced pressure drying apparatus 1 is equipped with the control part 50. The control unit 50 is, for example, a computer provided with a CPU or a memory, and has a storage unit (not shown) for storing various types of information. The storage unit stores, for example, a program for realizing the reduced pressure drying process in the reduced pressure drying apparatus 1 . Further, the program may be recorded in a computer-readable non-transitory storage medium M, and may be installed in the control unit 50 from the storage medium M. Part or all of the program may be realized by dedicated hardware (circuit board). Moreover, the said memory|storage part memorize|stores the processing recipe in which the processing conditions in a reduced pressure drying process were integrated. The storage unit is, for example, a storage device such as an HDD, a memory such as a RAM for temporarily storing information related to operation of a program, or a combination thereof.

Furthermore, the reduced pressure drying apparatus 1 is provided with the observation apparatus 60 .

The observation apparatus 60 is an apparatus for observing the state of the board|substrate W in the reduced pressure drying apparatus 1, and has the imaging part 61. As shown in FIG.

The imaging unit 61 images the substrate in the reduced pressure drying apparatus 1 . Specifically, the imaging unit 61 images the substrate W in the chamber 10 during the reduced pressure drying process, and outputs a substrate image that is the imaging result. More specifically, the imaging unit 61 images each of a plurality of locations of the substrate W in the chamber 10 during the reduced pressure drying process, and outputs a substrate image. The solvent trapping member 40 is provided between the imaging unit 61 and the substrate W in the chamber 10 , but the imaging unit 61 passes through the through hole 40a of the solvent trapping member 40 to the substrate W ) is captured.

The imaging unit 61 is controlled by a control unit 100 to be described later. Specifically, the light sources of the lighting units 72a to 72c to be described later of the imaging unit 61, the imaging elements of the main body 71a to be described later, and the slide parts 75a to 75c of the focus adjustment parts 73a to 73c to be described later are provided. The driving mechanism for raising/lowering is controlled by the control unit 100 .

The imaging unit 61 has first to third imaging units 70a to 70c.

These first to third imaging units 70a to 70c are arranged in the vicinity of the window 12 outside the chamber 10 . Specifically, the first and third imaging units 70a and 70c are arranged in the vicinity of the window 12 opposite to the edge of the substrate W mounted on the mounting table 30, and the second imaging unit ( 70b) is disposed in the vicinity of the window 12 opposite to the central portion of the substrate W. As shown in FIG.

The first imaging unit 70a has a body portion 71a, an illumination portion 72a, and a focus adjustment portion 73a.

The body portion 71a is provided with an image pickup device (not shown) such as a CCD image sensor. The imaging element images the area|region to which the solution in the board|substrate W was apply|coated via the through-hole 40a of the window 12 and the solvent trapping member 40.

The lighting unit 72a is provided with a light source (not shown). The illuminator 72a illuminates the imaging area by the imaging element of the main body 71a with light from the light source. For example, a translucent mirror (not shown) that reflects the light from the lighting unit 72a downward is provided for the lighting unit 72a. Light from the light source of the lighting unit 72a is reflected by the translucent mirror, and is reflected back by an object below the translucent mirror. In addition, the light reflected by the object passes through the translucent mirror and is incident on the image pickup device of the body portion 71a. In this way, the image pickup device of the body portion 71a can image the area illuminated by the lighting portion 72a.

The focus adjustment part 73a has the fixed part 74a and the slide part 75a. The fixing part 74a is fixed to the ceiling wall of the chamber 10 . In addition, a drive mechanism (not shown) having an actuator such as a motor for raising/lowering the slide portion 75a in the vertical direction is housed inside the fixed portion 74a.

The slide portion 75a is mounted on the fixing portion 74a so as to be slidable in the vertical direction. A body portion 71a is fixed to the slide portion 75a. By sliding the slide part 75a in the vertical direction, it is possible to adjust the focus of imaging by the image pickup device of the body part 71a.

The configuration of the second and third imaging units 70b and 70c is the same as that of the first imaging unit 70a. For this reason, for each component of the second and third imaging units 70b and 70c, the same number as the same component in the first imaging unit 70a, only the last alphabet is given a different code, and explanation is given. omit

Furthermore, the observation device 60 has an information processing terminal 62 including a control unit 100 and a display unit 101 . The information processing terminal 62 is, for example, a laptop-type or tablet-type personal computer.

The control unit 100 is, for example, a computer provided with a CPU or a memory, and has a storage unit (not shown) for storing various types of information. In the storage unit, for example, a program for realizing display processing by the observation device 60 is stored. In addition, the program may be recorded in a computer-readable non-transitory storage medium (K), and may be installed in the control unit (100) from the storage medium (K). Part or all of the program may be realized by dedicated hardware (circuit board). In addition, the storage unit is, for example, a storage device such as an HDD, a memory such as a RAM for temporarily storing information related to operation of a program, or a combination thereof.

The display unit 101 displays various types of information, and is a display device such as a liquid crystal display or an organic display.

Next, the structure of the control part 100 regarding the display process by the observation apparatus 60 is demonstrated. 3 is a functional block diagram of the control unit 100 related to display processing by the observation device 60 .

The control unit 100 functions as the acquisition unit 110 and the display control unit 111 when a processor such as a CPU reads and executes the program stored in the storage unit.

The acquisition unit 110 includes a substrate image obtained by imaging by the imaging unit 61 at each time point during the reduced pressure drying process, and the reduced pressure drying apparatus 1 as a state related to the reduced pressure drying process of the reduced pressure drying apparatus 1 . The internal pressure (specifically, the internal pressure of the chamber 10) is acquired together with the time information of the said time.

As for the substrate image, the acquisition unit 110 includes a substrate image of a corner portion of the substrate W by imaging by the first and third imaging units 70a and 70c at each time point during the reduced pressure drying process; The substrate image of the central part of the board|substrate W by imaging by the 2nd imaging unit 70b is acquired from the imaging part 61 together with the time information of the said viewpoint. That is, with respect to the substrate image, the acquisition unit 110 obtains an image for each of a plurality of locations on the substrate W at each time point during the reduced pressure drying process from the imaging unit 61 together with time information at the time point. acquire

In addition, with respect to the internal pressure of the chamber 10 , the acquisition unit 110 obtains the measurement result by the pressure sensor 23 at each time point during the reduced pressure drying process along with the time information at the time point in the control unit 50 . obtained from

Furthermore, the acquisition part 110 acquires from the control part 50 the height of the solvent collection member 40 in the reduced pressure drying process when the acquired board|substrate image was imaged. In addition, the height of the solvent collecting member 40 may change during a reduced pressure drying process. In this case, the acquisition part 110 may acquire the height of the solvent collection member 40 in each time point during a reduced pressure drying process from the control part 50 together with time information at the said time point.

Moreover, the acquisition part 110 acquires a recipe identification number from the control part 50 as information which identifies the process recipe applied to the reduced-pressure drying process when the acquired board|substrate image was imaged.

Furthermore, the acquisition unit 110 includes the temperature of the substrate W in the reduced pressure drying process when the acquired substrate image is imaged, specifically, a mounting table ( 30) is obtained from the control unit 50 .

The information acquired by the acquisition unit 110 is recorded in the aforementioned storage unit of the control unit 100 .

The display control unit 111 displays a display screen on the display unit 101 .

In particular, the display control unit 111 displays a display screen based on the acquisition result by the acquisition unit 110 .

4 and 5 are diagrams illustrating an example of a display screen displayed on the display unit 101 .

The display screen U of FIGS. 4 and 5 includes a moving picture playback area U1 and a status display area U2.

The moving picture reproduction area U1 continuously reproduces the substrate images acquired by the acquisition unit 110 in time series for a predetermined period. The predetermined period is, for example, a period from the start of the reduced pressure drying process to the completion.

Specifically, the moving picture reproduction area U1 reproduces, for example, the substrate images for each of a plurality of locations on the substrate W side by side. In the example of the figure, in the moving picture reproduction area|region U1, the board|substrate images U11a, U11c of the edge part of the board|substrate W, and the board|substrate image U11b of the center part of the board|substrate W are reproduced side by side.

The state display area U2 displays the time change of the internal pressure of the chamber 10 acquired by the acquisition unit 110 for the predetermined period. In the example of the figure, the state display area U2 displays a flight logarithmic graph representing the internal pressure of the chamber 10 logarithmically as a graph representing the time change of the internal pressure of the chamber 10 .

In particular, the state display area U2 displays the internal pressure of the chamber 10 identifiably at the point in time when the substrate image reproduced in the moving picture reproduction area U1 is captured. Specifically, for example, as shown in FIG. 4 , when the substrate image captured at the time T1 is displayed in the moving picture reproduction area U1, the status display area U2 is displayed at the time T1 from the start of the reduced pressure drying process. ) to indicate the time change of the internal pressure of the chamber 10. Then, as shown in Fig. 5 , when a substrate image captured at time T2 (time T2 is later than time T1) is displayed in the moving picture reproduction area U1, the state display area U2 ) represents the time change of the internal pressure of the chamber 10 from the start of the reduced pressure drying process to the time T2. That is, the status display area U2 displays, for example, the time change of the internal pressure of the chamber 10 up to the point in time when the substrate image being reproduced in the moving picture reproduction area U1 is captured, thereby displaying the moving picture reproduction area U1. ) makes it possible to identify the internal pressure of the chamber 10 at the point in time when the substrate image reproduced in FIG.

In other words, the display screen U continuously reproduces the substrate image in the moving picture reproduction area U1 in accordance with the passage of time during the reduced pressure drying process, and the time of the internal pressure of the chamber 10 in the status display area U2. Draw changes gradually.

In addition, the display screen U includes the following areas U3 to U6 separately from the moving picture playback area U1 and the status display area U2.

The area U3 displays the numerical value of the internal pressure of the chamber 10 at the point in time when the substrate image reproduced in the moving picture reproduction area U1 is captured.

The area U4 displays the numerical value of the height of the solvent collecting member 40 in the reduced pressure drying process when the substrate image reproduced in the moving picture reproduction area U1 is captured. Moreover, as mentioned above, the height of the solvent collecting member 40 may change during a reduced pressure drying process. In this case, the area U4 may display the numerical value of the height of the solvent collecting member 40 when the substrate image reproduced in the moving picture reproduction area U1 is captured.

The area U5 displays the recipe identification number of the reduced pressure drying process when the substrate image being reproduced in the moving picture reproduction area U1 is captured.

The area U6 is the temperature of the substrate W in the reduced pressure drying process when the substrate image reproduced in the moving picture reproduction area U1 is captured, specifically, the substrate reproduced in the moving picture reproduction area U1. The set temperature of the mounting table 30 in the reduced pressure drying process when an image is captured is displayed.

Next, an example of the reduced pressure drying process using the reduced pressure drying apparatus 1 is demonstrated. In addition, when performing a reduced pressure drying process, the process recipe applied to this reduced pressure drying process is previously selected by an operator, for example.

(substrate loading process)

In the reduced pressure drying process using the reduced pressure drying apparatus 1 , first, the substrate W is loaded into the chamber 10 and mounted on the mounting table 30 . Specifically, in a state in which the solvent trapping member 40 is raised, an arm (not shown) of the substrate transport mechanism holding the substrate W is connected to the solvent trapping member 40 from the outside of the chamber 10 . It is placed in the space between the main bodies 31 , and then the lifter pins 33 are raised, so that the substrate W is transferred to the lifter pins 33 . Then, the arm is withdrawn from the chamber 10 , and when the lifter pins 33 are lowered, the substrate W is mounted on the main body 31 . Further, the solvent trapping member 40 is lowered to the original position, specifically, to the center between the substrate W and the ceiling wall of the chamber 10 . Further, the main body 31 is temperature-controlled in advance to a set temperature based on the processing recipe selected by the operator.

(Process of removing the solvent on the substrate W)

Then, according to the processing recipe selected by the operator, the control unit 50 executes control to remove the solvent in the solution on the substrate W mounted on the mounting table 30 . Specifically, the inside of the chamber 10 is depressurized, the gas in the chamber 10 is cooled by adiabatic expansion, the solvent collecting member 40 is cooled by the gas, and the solvent collecting member 40 is The solvent in the solution vaporized from the substrate W mounted on the mounting table 30 is temporarily collected. Hereinafter, this process is demonstrated more concretely.

First, the dry pump of the vacuum pump 22 is operated, and the inside of the chamber 10 is depressurized and exhausted. The reduced pressure exhaust by the dry pump is performed until the internal pressure of the chamber 10 becomes, for example, 10 Pa.

During this reduced pressure exhaust, the gas in the chamber 10 is cooled by adiabatic expansion. Even if the gas in the chamber 10 is cooled in this way, the temperature of the substrate W is not affected by the cooled gas due to the large heat capacity of the substrate W and the like, and changes substantially at 23° C. of room temperature. I never do that. However, since the solvent trapping member 40 has a small heat capacity, it is cooled by this cooled gas.

Then, the turbo molecular pump of the vacuum pump 22 is operated, and the inside of the chamber 10 is reduced-pressure-evacuated further. With this reduced pressure exhaust, the solvent trapping member 40 is cooled similarly to the above-mentioned, and it becomes below the dew point (for example, 8-15 degreeC) in the internal pressure of the chamber 10 at that time.

Further, when the internal pressure of the chamber 10 is lower than the vapor pressure of the solvent on the substrate W due to reduced pressure exhaust, the solvent on the substrate W is vaporized.

The vaporized solvent is collected by the solvent collecting member 40 cooled by adiabatic expansion as described above.

(Drying process of solvent collecting member 40)

After the removal of the solvent on the substrate W is completed, a drying process of the solvent trapping member 40 is performed in which the solvent collected by the solvent trapping member 40 is removed from the solvent trapping member 40 .

This step is performed by, for example, continuing the exhaust by the turbo molecular pump of the vacuum pump 22 even after removal of the solvent on the substrate W is completed. If exhaust by the turbo molecular pump continues until a predetermined time elapses after the turbo molecular pump is operated, the drying process of the solvent collecting member 40 is finished.

(Board out)

Then, the board|substrate W is carried out from the chamber 10 in the order reversed to carrying in of the board|substrate W.

Thereby, the reduced pressure drying process using the reduced pressure drying apparatus 1 is complete|finished.

Next, the display process in the observation apparatus 60 performed in order to observe the state etc. of the board|substrate W during a reduced pressure drying process is demonstrated. This display process is performed, for example, when determining in advance the optimal conditions as the process conditions of the reduced pressure drying process, that is, when presenting so-called conditions.

In addition, before this display process, adjustment of the focus position of the imaging part 61 is performed. In this focal position adjustment, the focus of the imaging unit 61 (specifically, the focus of a lens provided with respect to the imaging element of the imaging unit 61 ) does not match the solvent collecting member 40 , and the substrate on the mounting table 30 . (W) is done.

(imaging process)

And in the display process, under the control of the control part 100, the board|substrate W in the pressure reduction drying process for setting out conditions is imaged by the imaging part 61 first. Specifically, during the reduced pressure drying process, under the control of the control unit 100 , the substrate W in the chamber 10 is continuously imaged by the imaging unit 61 , that is, it is photographed as a moving picture. The imaging of the substrate W in the chamber 10 by the imaging unit 61 is automatically started when, for example, the reduced-pressure drying process is started, and automatically ends when the reduced-pressure drying process is finished. To enable this, for example, information on the start timing and end timing of the reduced pressure drying process is output from the controller 50 to the controller 100 .

(Acquisition process)

In addition, the acquisition unit 110 obtains the substrate image obtained by imaging by the imaging unit 61 and the internal pressure of the chamber 10 at each time point during the reduced-pressure drying process for setting conditions, and time information at the time point. acquired with

The substrate image at each time point during the reduced pressure drying process for setting conditions and time information at that time point are acquired from the imaging unit 61, and the internal pressure of the chamber 10 and the corresponding time point during the reduced pressure drying process Time information of the viewpoint is acquired from the control unit 50 .

Acquisition of the substrate image by the acquisition unit 110 is performed, for example, in parallel with the imaging process, that is, in parallel with the reduced pressure drying process for setting conditions. Acquisition of the internal pressure of the chamber 10 by the acquisition unit 110, for example, may be performed in parallel with the imaging process, that is, in parallel with the processing, or may be performed after the imaging process, ie, after the reduced pressure drying process for setting conditions. good night.

In addition, when displaying the display screen U as described with reference to FIGS. 4 and 5 in the display process of the next process, in this acquisition process, the acquisition part 110 uses other information necessary for the said display screen U. also acquire The other information includes the height of the solvent collecting member 40 during the reduced pressure drying process for setting conditions, the recipe identification number related to the reduced pressure drying process, and the set temperature of the mounting table 30 in the reduced pressure drying process. . The height of the solvent collecting member 40 during the reduced pressure drying process, the recipe identification number related to the reduced pressure drying process, and the set temperature of the mounting table 30 in the reduced pressure drying process may be acquired during the reduced pressure drying process. You may acquire it before the said reduced-pressure drying process or after the said reduced-pressure drying process.

(display process)

Then, the display control unit 111 causes the display unit 101 to display a display screen based on the result obtained by the acquisition unit 110 . In this step, what is displayed on the display unit 101 is, for example, the display screen U as described with reference to FIGS. 4 and 5 .

The display screen U has a moving picture reproduction area U1 for continuously reproducing the substrate image during the reduced pressure drying process for setting conditions in time series (that is, the substrate image is reproduced as a moving image), and a chamber during the reduced pressure drying process. (10) has a status display area U2 that displays the time change of the internal pressure. Then, the state display area U2 displays the internal pressure of the chamber 10 identifiable at the time when the substrate image reproduced in the moving picture reproduction area U1 is captured.

Therefore, the operator sees the moving picture playback area U1 based on the substrate image (that is, the imaging result of the substrate W) during the reduced pressure drying process for setting the conditions, and starts and completes the drying of the solution on the substrate W can judge In addition, when the operator sees the moving picture playback area U1 and determines that the drying has started and when it is determined that the drying has been completed, by looking at the status display area U2, the chamber 10 at the start and the completion of the drying You can check the internal pressure of That is, according to the display screen U, the operator can easily determine whether the pressure zone from the start of the drying to the completion of the drying (hereinafter referred to as "drying pressure zone") falls within the specific pressure zone. can be confirmed The drying pressure band differs depending on the solution applied to the substrate W, and if the pressure band does not fall within the desired pressure band, the substrate W cannot be dried uniformly in the plane, and the quality of the film on the substrate W after drying is adversely affected. may affect For example, depending on the solution applied to the substrate W, in some cases, it is preferable that the dry pressure band enters the pressure band where the vacuum pump 22 is evacuated by the turbo molecular pump. Therefore, it is useful for the operator to be able to confirm whether the drying pressure zone is in a specific pressure zone.

In addition, when the drying pressure band does not fall within the specific pressure band, for example, the set temperature of the mounting table 30 during the reduced pressure drying process is corrected, and the solution applied to the substrate W on the mounting table 30 is corrected. The drying pressure range can be adjusted by adjusting the vapor pressure of (specifically, the vapor pressure of the solvent in the solution).

As described above, in the present embodiment, the imaging unit 61 in which the observation device 60 images the substrate during the reduced pressure drying process, and the substrate obtained by the imaging by the imaging unit 61 at each time point during the reduced pressure drying process. An acquisition unit 110 for acquiring an image and the internal pressure of the chamber 10 together with time information at the time is provided. Therefore, according to this embodiment, it becomes possible to display the display screen U based on the acquisition result by the acquisition part 110, for example. The display screen U is based on the imaging result of the board|substrate during a reduced pressure drying process, and as mentioned above, an operator can confirm easily whether a drying pressure zone enters a specific pressure zone. That is, according to this embodiment, the convenience of the imaging result of the board|substrate during a reduced pressure drying process can be improved.

Further, in the present embodiment, the substrate images are reproduced side by side in the moving picture reproduction area U1 of the display screen U for each of a plurality of locations on the substrate W. As shown in FIG. Therefore, by viewing the moving image reproduction area U1, the operator sees whether the substrate W is actually dried uniformly in the plane (specifically, the drying start timing and drying completion timing of the solution on the substrate W) Whether this plane is uniform) can be checked. For this confirmation, it is useful to reproduce the substrate image of the central portion of the substrate W, which is difficult to dry, and the substrate image of the corner portion of the substrate W, which is easy to dry, side by side in the moving picture reproduction area U1.

Furthermore, in the present embodiment, on the display screen U, the height of the solvent collecting member 40 during the reduced pressure drying treatment, the set temperature of the mounting table 30 during the reduced pressure drying treatment, and the treatment recipe applied to the reduced pressure drying treatment are displayed. Areas U4 to U6 for displaying identification information are provided. The information displayed in these areas U4 to U6 is useful, for example, when setting conditions for a reduced pressure drying process. Specifically, it is useful when an operator judges that adjustment of the processing conditions of the reduced pressure drying process is necessary by looking at the moving picture playback area U1 and the status display area U2, and the operator determines which processing conditions to adjust.

In the state display area U2, a logarithmic graph representing the internal pressure of the chamber 10 is displayed in logarithmic form, whereas in the area U3, the internal pressure of the chamber 10 is displayed as a numerical value. The operator can read the internal pressure of the chamber 10 also from the flight number graph displayed in the status display area U2, but by looking at the area U3, it is easier to know the more accurate internal pressure of the chamber 10 can

In addition, although the state regarding the reduced-pressure drying process of the reduced-pressure drying apparatus 1 acquired by the acquisition part 110 was the internal pressure of the chamber 10 in the said example, it is not limited to this. For example, the opening degree of the regulating valve 21 may be sufficient and the height of the solvent collecting member 40 may be sufficient. In addition, any two or more of the internal pressure of the chamber 10, the opening degree of the regulating valve 21, and the height of the solvent collecting member 40 may be combined. The same applies to the state regarding the reduced pressure drying process of the reduced pressure drying apparatus 1 displayed in the state display area U2.

In the above example, acquisition and display processing of various information by the acquisition unit 110 is executed when the conditions for the reduced pressure drying process are presented. However, during the reduced pressure drying process during mass production, the Acquisition and display processing of various types of information may be executed.

In addition, in this embodiment, the result acquired by the acquisition part 110 is not only the display of the display screen U, log analysis at the time of a reduced pressure drying process, analysis of a failure cause when the reduced pressure drying apparatus 1 fails, etc. is also available.

In addition, in the above example, the display screen U was displayed on the display unit 101 provided in the information processing terminal 62 including the control unit 100 related to the display processing in the observation device 60 , The display destination of the display screen U is not limited to this. For example, when an operation panel having a display unit is provided in the vicinity of the chamber 10, the display screen U may be displayed on the display unit of the operation panel.

(Second embodiment)

It is a block diagram of the control part of the observation apparatus which concerns on 2nd Embodiment.

In the present embodiment, the control unit 200 of the observation apparatus reads and executes the program stored in the storage unit (not shown) by a processor such as a CPU included in the control unit 200, so that not only the acquisition unit 110 but also the acquisition unit 110 is executed. , functions as the calculation unit 210 and the display control unit 211 .

The calculation unit 210 calculates the temporal change of the luminance in the substrate image based on the result obtained by the acquisition unit 110 . Specifically, the calculation unit 210 calculates the temporal change in luminance in the substrate image during the reduced pressure drying process. In addition, the calculating part 210 may identify the part corresponding to the application area|region of a solution in the substrate image during a reduced pressure drying process by pattern recognition etc., and you may make it compute the time change of the brightness|luminance of this part.

In addition to or instead of displaying the above-described display screen U on the display unit 101 , the display control unit 211 causes the display unit 101 as a notification unit to execute the following notification.

The display control unit 211 determines a time point at which the time change in luminance in the substrate image calculated by the calculation unit 210 starts, and sets this time point as a starting point of drying the solution on the substrate W, and the display unit 101 . to display a visible notification, that is, to In addition, the display control unit 211 determines the time point at which the change in luminance in the substrate image calculated by the calculation unit 210 stops, and sets this time point as the end point of drying the solution on the substrate W, the display unit ( 101) is visually notified, that is, displayed. The visible notification is performed, for example, in a form such that it is displayed overlaid on the status display area U2 of the display screen U. FIG.

According to this embodiment, the operator can recognize the starting point and the ending point of drying of the solution on the board|substrate W regardless of the skill level of an operator.

(Third embodiment)

7 is a block diagram of a control unit related to a reduced pressure drying process according to the third embodiment.

In the present embodiment, the control unit 300 is provided in place of the control unit 50 of the first and second embodiments, and functions as the condition adjustment unit 310 in addition to having the same function as the control unit 50 . . The control unit 300 functions as the condition adjustment unit 310 by a processor such as a CPU of the control unit 300 reading and executing a program stored in a storage unit (not shown).

Also in this embodiment, similarly to 2nd Embodiment, the calculation part 210 of the control part 200 calculates the temporal change of the brightness|luminance in a board|substrate image based on the acquisition result by the acquisition part 110. As shown in FIG. The calculation result of the calculation unit 210 is output to the control unit 300 .

The control unit 300 adjusts the processing conditions of the reduced pressure drying process based on the result of the condition adjustment unit 310 calculated by the calculation unit 210 . Specifically, the condition adjustment unit 310 determines a time point at which the temporal change in luminance in the substrate image calculated by the calculation unit 210 starts and a time point at which the temporal change stops. And, the condition adjustment unit 310, based on the information that the time when the time change starts is the start point of drying the solution on the substrate W, and the time when the time change stops is the end point of the drying of the solution on the substrate W. , adjust the processing conditions of the reduced pressure drying treatment. That is, the condition adjusting unit 310 feeds back the determination result of the starting point and the ending point of drying the solution on the substrate W to the processing conditions of the reduced pressure drying process.

The condition adjusting unit 310 is configured to, for example, when the starting point of drying the solution on the substrate W is too early, the mounting table 30 as the processing conditions for the reduced pressure drying process so that the starting point of drying the solution on the substrate W is delayed. ) to lower the set temperature.

According to this embodiment, the processing conditions of the reduced pressure drying process can be automatically adjusted so that drying of the solution on the substrate W becomes uniform within the surface of the substrate.

In the above example, although the control units 100 and 200 related to the display processing in the observation device and the control units 50 and 300 related to the reduced pressure drying processing are separate, they may be integrated. Moreover, you may make it implement|achieve the above-mentioned function of one control part by the other control part.

It should be considered that the embodiment disclosed herein is illustrative in all respects and not restrictive. The above embodiments may be omitted, replaced, or changed in various forms without departing from the appended claims and the gist thereof.

1: reduced pressure drying device
60: observation device
61: imaging unit
110: acquisition unit
U11a: substrate image
U11b: substrate image
U11c: board image
W: substrate

Claims (17)

an imaging unit for imaging the substrate during a reduced pressure drying process in which a solution on the substrate is dried under reduced pressure;
At each time point in the reduced pressure drying process, the substrate image obtained by the imaging by the imaging unit and the state related to the reduced pressure drying process of the reduced pressure drying apparatus performing the reduced pressure drying process are the time at the time point. Having an acquisition unit to acquire information together
observation device. The method of claim 1,
Further comprising a display control unit for displaying a display screen on the display unit,
The display screen is
a moving picture reproduction area for continuously reproducing the substrate image acquired by the acquisition unit in time series for a predetermined period;
and a status display area for displaying a time change of a state related to the reduced pressure drying process acquired by the acquisition unit for the predetermined period,
wherein the status display area identifiably displays a state related to the reduced pressure drying process at a time point when the substrate image being reproduced in the moving picture reproduction area is captured.
observation device. 3. The method of claim 2,
The status display area displays the time change of the state related to the reduced pressure drying process up to the time when the substrate image being reproduced in the moving picture reproduction area is captured.
observation device. 4. The method of claim 2 or 3,
The acquisition unit acquires the substrate image for each of a plurality of locations on the substrate,
The moving picture playback area of the display screen is configured to reproduce the substrate images for each of the plurality of locations on the substrate side by side.
observation device. 5. The method according to any one of claims 2 to 4,
The display screen has a region for displaying the numerical value of the internal pressure of the reduced pressure drying apparatus at the time when the substrate image being reproduced in the moving picture playback region is captured, separate from the state display region;
observation device. 6. The method according to any one of claims 2 to 5,
In the reduced pressure drying apparatus, a solvent collecting member for temporarily collecting a solvent in the solution vaporized from the substrate is disposed above the substrate,
The display screen has an area for displaying the numerical value of the height of the solvent collecting member at the time when the substrate image being reproduced in the moving picture reproduction area is captured separately from the status display area;
observation device. 7. The method according to any one of claims 2 to 6,
The display screen further has an area for displaying information identifying a recipe for the reduced pressure drying process performed on the board on which the board image being reproduced in the moving picture reproduction area was captured;
observation device. 8. The method according to any one of claims 2 to 7,
the display screen further includes an area for displaying a numerical value of the temperature of the substrate in the reduced pressure drying process performed on the substrate on which the substrate image being reproduced in the moving picture reproduction region was captured;
observation device. 9. The method according to any one of claims 1 to 8,
The state related to the reduced-pressure drying process includes at least one of an opening degree of a regulating valve that adjusts an internal pressure of the reduced-pressure drying apparatus and an exhaust pressure exhausting the interior of the reduced-pressure drying apparatus
observation device. 10. The method according to any one of claims 1 to 9,
In the reduced pressure drying apparatus, a solvent collecting member for temporarily collecting a solvent in the solution vaporized from the substrate is disposed above the substrate,
The state related to the reduced pressure drying treatment includes the height of the solvent collecting member
observation device. 11. The method of claim 6 or 10,
The solvent collecting member is disposed between the imaging unit and the substrate,
The imaging unit is configured such that the focus position is adjusted so that the focus does not match the solvent collecting member but matches the substrate.
observation device. 12. The method according to any one of claims 1 to 11,
a calculation unit for calculating a temporal change in luminance in the substrate image;
The time point at which the time change in luminance in the substrate image starts is visually notified as the starting point of drying the solution, and the time point at which the time change in luminance in the substrate image stops is visually as the end point of drying the solution In addition to providing a notification unit to notify
observation device. The observation device according to any one of claims 1 to 12;
and a chamber for accommodating the substrate;
In the upper part of the chamber, a window is formed for the imaging unit to image.
reduced pressure drying device. 14. The method of claim 13,
In the chamber, a solvent collecting member for temporarily collecting a solvent in the solution vaporized from the substrate is disposed above the substrate,
The imaging unit is configured such that the focus position is adjusted so that the focus does not match the solvent collecting member but matches the substrate.
reduced pressure drying device. 15. The method according to claim 13 or 14,
a calculation unit for calculating a temporal change in luminance in the substrate image;
A time point at which the change in luminance in the substrate image starts is a starting point for drying the solution, and a time point at which the time change in luminance in the substrate image stops is an end point in drying the solution, the starting point and a condition adjusting unit that adjusts the processing conditions of the reduced pressure drying process based on the information on the end point.
reduced pressure drying device. a step of imaging the substrate in a reduced pressure drying process of drying the solution on the substrate under reduced pressure with an imaging unit;
The substrate image obtained by the imaging by the imaging unit at each time point during the reduced pressure drying process and the state related to the reduced pressure drying process of the reduced pressure drying apparatus performing the reduced pressure drying process are displayed together with the time information at the time point. the process of acquiring
a step of displaying on a display unit a display screen based on an acquisition result in the acquiring step;
A display method in an observation device. A readable storage medium storing a program that operates on a computer that controls the observation apparatus in order to cause the observation apparatus to execute the display method disclosed in claim 16.

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