JP2005227188A - Observation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an observation device capable of observing surely a change of a sample by a temperature in real time, capable of compactifying a device, capable of detecting continuously a temperature of the sample with high precision to evaluate highly reliably a material of the sample, and capable of conducting highly reliable observation. <P>SOLUTION: This observation device for observing the temperature change of the sample is provided with a high temperature chamber of air-tight structure, a sample block arranged in the central part in the high temperature chamber to mount the sample, a heating means and a cooling means for supplying hot wind or cold wind attached to the high temperature chamber to heat and cool the sample on the sample block, a temperature detecting means for detecting the temperature of the heated and cooled sample, and a control means for controlling the heating means and the cooling means, based on a detection result by the temperature detecting means. In the observation device, the temperature of the sample in the high temperature chamber is elevated or lowered by supplying the hot wind or cold wind generated by the heating means and the cooling means provided separately from the high temperature chamber. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to an observation apparatus capable of observing in real time how a sample changes at a high temperature.

Various types of observation devices have been proposed that can observe in real time how the sample changes at high temperatures. However, in order to achieve rapid temperature rise, a heating means with a large capacity is required. ing.

In addition, it generally includes an image pickup means for picking up an image of a temperature-controlled sample through an observation window provided in the high temperature chamber, and a monitor for displaying an image picked up by the image pickup means. Is provided.

As such an example, an observation apparatus for observing a change due to the heating temperature of a sample as shown in Japanese Patent Application Laid-Open No. 2002-107317 (see Patent Document 1), and a high-temperature chamber having an airtight structure, A sample stage placed in the center and on which the sample is placed, heating means and cooling means for heating and cooling the sample on the sample stage, and the temperature of the sample heated and cooled by these heating means and cooling means A temperature detecting means for detecting, a control means for controlling the heating means and the cooling means based on a detection result of the temperature detecting means, and an observation window provided with the sample controlled in temperature by the control means in the high temperature chamber And at least two monitors for displaying images picked up by these image pickup means, and each of the monitors varies with the temperature of the sample. And measuring at least two operating means for moving the imaging means in the forward / backward / left / right and up / down directions based on the image to be measured, and measuring the horizontal and vertical movement amounts of the imaging means on the monitors. A device characterized by providing at least two means is known.
JP 2002-107317 A

However, in the case of the conventional observation apparatus described above, the apparatus is large and expensive, and the observation has a low degree of freedom of observation (a large number of blind spots), and is not reliable as a method for evaluating a sample such as a new material. There was a problem.

The present invention has been made to solve the above-described problems, and allows a change in the temperature of the sample to be observed in real time with a high degree of freedom, and the apparatus to be compact, and further, the temperature of the sample. It is an object of the present invention to provide an observation apparatus capable of continuously detecting with high accuracy to evaluate a material of a highly reliable sample and performing highly reliable observation.

An observation apparatus according to a first aspect of the present invention is an observation apparatus for observing a temperature change of a sample, and is a high-temperature chamber having an airtight structure, and a sample stage placed in the center of the high-temperature chamber and on which a sample is placed. Heating means and cooling means for supplying hot or cold air attached to a high temperature chamber for heating and cooling the sample on the sample stage, temperature detecting means for detecting the temperature of the heated and cooled sample, and Control means for controlling the heating means and the cooling means based on the detection result of the temperature detection means,
The sample in the high temperature chamber is heated or lowered by supplying hot air or cold air generated by a heating means and a cooling means provided separately from the high temperature chamber.

The observation apparatus according to claim 2 of the present invention is an observation apparatus for observing a change in the temperature of a sample, and is arranged in an airtight high temperature chamber provided with a dome-shaped observation window in the upper portion and a central portion of the high temperature chamber. A sample stage on which the sample is placed, heating means and cooling means for supplying hot air or cold air attached to the high temperature chamber for heating and cooling the sample on the sample stage, and the temperature of the sample to be heated and cooled And a control means for controlling the heating means and the cooling means based on the detection result of the temperature detection means,
An image pickup means for picking up an image of the sample whose temperature is controlled by the control means through a dome-shaped observation window provided in the upper portion of the high temperature chamber, and a monitor for displaying an image picked up by the image pickup means. Is.

An observation apparatus according to a third aspect of the present invention is an observation apparatus for observing a temperature change of a sample, and is a high-temperature chamber having an airtight structure, and a sample stage placed in the center of the high-temperature chamber and on which the sample is placed. Heating means and cooling means for supplying hot or cold air attached to a high temperature chamber for heating and cooling the sample on the sample stage, temperature detecting means for detecting the temperature of the heated and cooled sample, and Control means for controlling the heating means and cooling means based on the detection result of the temperature detection means;
An air supply passage and an exhaust passage formed by dividing the passage between the high greenhouse and these heating means and cooling means, respectively, and an exhaust passage portion in which the air in the high temperature chamber is sent to the heating means and the cooling means for circulation. A fan provided, an on-off valve provided on the passage between the high temperature chamber and the heating means and the cooling means, and a communication port provided on the high temperature chamber side from the on-off valve,
An image pickup means for picking up an image of the sample whose temperature is controlled by the control means through a dome-shaped observation window provided in the upper portion of the high temperature chamber, and a monitor for displaying an image picked up by the image pickup means. Is.

The observation device according to claim 4 of the present invention is characterized in that, in the invention according to claim 2 or 3, the dome-shaped observation window is composed of double glass with an air layer interposed therebetween. To do.

According to a fifth aspect of the present invention, in the observation device according to any of the second to fourth aspects, the imaging means can freely change the observation angle on the dome-shaped observation window. It is characterized by this.

The observation apparatus according to claim 6 of the present invention is the observation apparatus according to any one of claims 2 to 5, wherein the sample stage is made of a member that generates radiant heat by hot air supplied from the heating means. It is characterized by.

According to the first to sixth aspects of the present invention, a change in the temperature of the sample can be observed in real time with a high degree of freedom, the apparatus can be made compact, and the temperature of the sample can be reduced. Can be continuously detected with high accuracy and observation with high reliability can be performed, and an observation apparatus capable of accurately evaluating the material of a sample can be provided.
In particular, instead of sequential heating by the heater provided in the high-temperature chamber, hot air or cold air generated in advance by heating means or cooling means is supplied to the high-temperature chamber to cause temperature changes, so that the sample can be smoothly and quickly The temperature can be raised or cooled, and the temperature distribution of the sample can be made uniform.

The present invention will be described below based on the embodiment shown in FIGS.
1 is a schematic diagram for explaining the internal structure of the observation apparatus of the present invention, FIG. 2 is a plan view of the observation apparatus, FIG. 3 is a front view of the observation apparatus, FIG. 4 is a left side view of the observation apparatus, and FIG. FIG.

The observation apparatus according to the present embodiment has a rectangular appearance as shown in FIGS. 1 to 5, for example, and is an appearance by heating temperature of an inorganic material such as solder, an organic material such as synthetic resin, or a sample such as an electronic component. Used when observing changes. As shown in FIGS. 1 to 5, the observation apparatus is installed so as to protrude from the housing 1, a high temperature chamber (high temperature chamber) 2 provided substantially at the center of the housing 1, and the upper surface of the high temperature chamber 2. The dome-shaped observation window 3 is opened and closed, and the dome-shaped observation window 3 is opened and closed to put and remove the sample.

The dome-shaped observation window 3 can be opened and closed by pivotally supporting one end of the dome-shaped observation window 3 with a hinge so that the other end can be moved up and down, or rotating the dome-shaped observation window 3 horizontally and circularly about a pivot. It is possible to appropriately perform the measurement by dividing the dome-shaped observation window 3 at the center and sliding the dome-shaped observation window 3 outwardly.
The dome-shaped observation window 3 preferably has a double glass structure with an air layer 4 interposed between them, and it is necessary to use heat radiating glass for each.

A sample stage 5 is arranged at the center of the high temperature chamber 2. The sample stage 5 can be mounted with a sample 6 and is formed of a metal (for example, nickel) having excellent thermal conductivity. By forming the sample stage 5 with a metal having excellent thermal conductivity such as nickel, the sample stage 5 is heated evenly in a short time, the temperature distribution is eliminated, and the temperature of the entire surface can be made uniform. The sample stage 5 may be a fixed type or may be provided with a mechanism that rotates in a forward or reverse direction in a turntable manner or slides in a horizontal direction.

A heating mechanism 7 and a cooling mechanism 8 provided opposite to each other are attached to both sides of the high temperature chamber 2. The heating mechanism 7 and the cooling mechanism 8 supply hot air for heating and cooling the sample 6 on the sample table 5 or supply cold air. The heating mechanism 7 includes a heater 9 and a cooling mechanism. 8 is provided with a refrigerant flow path (not shown) through which a refrigerant (for example, tap water) flows. The high temperature chamber 2 is provided with temperature detection means for detecting the temperature of the sample to be heated and cooled, and control means for controlling the heating means and the cooling means based on the detection result of the temperature detection means. ing. Incidentally, the temperature detecting means is preferably a thermocouple or a temperature sensor provided on the sample stage 5 at an appropriate interval, and the control means is preferably for controlling the temperature of the heater 9 or the amount of hot air blown.

In addition to the heater 9 provided in the heating mechanism 7, a mechanism for heating the sample 6 on the sample stage 5 with radiant heat may be provided. That is, as the sample stage 5, it is desirable to use a member that generates radiant heat by hot air supplied from the heating means, for example, a material such as copper having good thermal conductivity.
Of course, the main heating source is the heater 9 provided in the heating mechanism 7, and such heating by supplying hot air ensures a uniform temperature change of the sample 6 on the sample stage 5.

Below the sample stage 5, there are provided passages 11 communicating between the heating mechanism 7 and the cooling mechanism 8 provided opposite to both sides of the high temperature chamber 2. It is divided into an air supply path 12 and an exhaust path 13. The air supply path 12 is arranged outside the partition wall 14 so as to supply hot air along the inner wall of the dome-shaped observation window 3, and the exhaust path 13 is throttled into a cylindrical shape from the inside at the lower part of the sample stage 5. The internal air is discharged to the heating mechanism 7 and the cooling mechanism 8. Reference numeral 15 denotes a fan provided in the exhaust passage 13 for sending the air in the high temperature chamber 2 to the heating mechanism 7 and the cooling mechanism 8 for circulation, and reference numeral 16 denotes a motor for driving and controlling the fan 15.

An opening / closing valve 17 is provided at the end of the partition wall 14 disposed in the high-temperature chamber 2 and a passage between the heating mechanism 7 and the cooling mechanism 8, respectively. The heating to the sample 6 can be controlled more accurately.
A communication port 18 is provided on the high temperature chamber 2 side of the opening / closing valve 17 for reducing a shock caused by the opening / closing operation of the opening / closing valve 17 and smoothing the flow of hot air.

The temperature detecting means including the thermocouple and the temperature sensor is connected to the control means, and the heating mechanism 7 and the cooling mechanism 8 are connected to the control means. Therefore, the control unit can drive and control the heating mechanism 7 and the cooling mechanism 8 based on the temperature detected by the temperature detection unit via the setting program, and can raise or lower the temperature of the sample 6 according to a desired temperature profile. The control means is connected to the image pickup means and the corresponding monitor, and the captured image of the image pickup means is displayed on each monitor via the control means.

As shown in FIG. 1, the dome-shaped observation window 3 above the high temperature chamber 2 is provided with a CCD camera 21 as an image pickup means for picking up an image of a sample to be heated. Such a CCD camera 21 is preferably a combination of an upper camera 21-1 and a lower camera 21-2 as shown in FIG. 3 for precise observation. Each CCD camera 21 is provided with an operating mechanism that is separate from the housing 1 or attached to the housing 1. In the example of this operation mechanism, a support post 22 is erected on a support base 22 and is held at the tip of an arm 24 that is swingable from the support 23 in the horizontal direction. It can be rotated in the direction. Therefore, each CCD camera 21 can move and swing horizontally, and can approach the sample 6 at an appropriate angle. In the figure, reference numeral 25 denotes a metal heat dissipation ring for protecting the lower portion of the dome-shaped observation window 3.
The CCD camera 21 has a video function and can edit observation records as needed. Each of the lenses of the CCD camera 21 has a zoom function of, for example, 10 to 100 times, and even a small sample that is difficult to observe with the naked eye can be enlarged and imaged to a size that can be observed with the naked eye. The CCD camera 21 captures an image of the sample through the dome-shaped observation window 3. The CCD camera 21 images the sample 6 from directly above or at a predetermined tilt angle. Therefore, a plurality of CCD cameras 21 can be used, and dedicated monitors can be connected to each of them, so that images captured by these can be displayed on the monitor screen in real time. According to the dome-shaped observation window 3, the CCD camera 21 can be freely arranged at an appropriate position.

As described above, the CCD camera 21 operates in the left-right direction (hereinafter referred to as “X direction”), the front-rear direction (hereinafter referred to as “Y direction”), and the up-down direction (hereinafter referred to as “Z direction”). The sample 6 on the sample stage 5 is imaged.

The dome-shaped observation window 3 is provided with illumination means (not shown) for illuminating the inside thereof. As this illumination means, for example, an optical fiber can be used. Then, when imaging the sample 6 in the high temperature chamber 2 by the CCD camera 21, the light from the observation light source is irradiated through the optical fiber attached to the dome-shaped observation window 3 to illuminate the sample 6 on the sample stage 5. .

In observing the sample 6 in the high temperature chamber 2, the inside of the high temperature chamber 2 can be switched to an appropriate gas atmosphere. As these gases, air, nitrogen gas, carbon dioxide (CO ₂ ), an inert gas, or the like can be used. Needless to say, it can be observed in a vacuum atmosphere.

Further, the control means has a superimpose controller, and can display the detected temperature, the measurement dimension and the time during observation on the monitor. Therefore, the detected temperature, measurement dimension, and time are displayed on a part of the captured image captured by the CCD camera 21, and the observation result of the sample can be correctly stored as evaluation data even if the video is edited.
3, 31 and 32 are temperature control panels for the cooling chamber and the heating chamber, 33 is an emergency stop switch, 37 is a safety lock, 34 in FIG. 4 is a power connector for supplying power to the apparatus, and 35 is a power supply. The air fan 36 in FIG. 5 is an exhaust duct.

Next, the operation will be described. First, various samples 6 are placed on the sample stage 5 in the high temperature chamber 2, the dome-shaped observation window 3 is closed, and the inside of the high temperature chamber 2 is sealed. Next, the sample 6 is imaged by the CCD camera 21, and various conditions such as the magnification, focus, and aperture of the camera suitable for observation are set through the monitor. Thereafter, each observation point is determined using the CCD camera 21. Next, after setting the temperature profile of the sample in the control means, when the start switch of the observation apparatus is turned on, the heating means 7, the cooling means 8 and the temperature detection means heat the sample according to the temperature profile set in the control means. As the sample temperature rises, the shape of the sample gradually changes. This state is captured and recorded by the CCD camera 21 clearly. When the entire sample cannot be observed only by moving the CCD camera 21, the entire sample 6 can be reliably observed by operating the operating means to rotate or slide the sample stage 5. Further, depending on the sample 6, there is a case where the observation is performed in another gas atmosphere such as nitrogen gas instead of the air atmosphere. In this case, it is possible to create a desired gas atmosphere by substituting gas using a vacuum exhaust means and a desired gas supply source.

And if the form of the sample 6 changes to melting etc., and a dimension changes, the change (change amount) of a dimension can be confirmed with the scale (scale) displayed on the monitor. Therefore, it is possible to obtain material from this observation as a guideline for the subsequent development, and it is possible to leave an observation record by video editing.

The observation apparatus according to the present invention can be used as appropriate for observing a change in form due to temperature, such as synthetic resin and other organic compounds, ceramic and other inorganic compounds, solder and other metals.

It is the schematic explaining the internal structure of the observation apparatus of this invention. It is a top view of an observation apparatus. It is a front view of an observation apparatus. It is a left view of an observation apparatus. It is a right view of an observation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Housing 2 High greenhouse 3 Dome type observation 4 Air layer 5 Sample stand 6 Sample 7 Heating mechanism 8 Cooling mechanism 9 Heater 11 Passage 12 Air supply passage 13 Exhaust passage 14 Partition 15 Fan 16 Motor 17 On-off valve 18 Communication port 21 CCD camera 21 -1 Upper camera 21-2 Lower camera 22 Support base 23 Post 24 Arm 25 Metal heat dissipation ring 31, 32 Temperature control panel 33 Emergency stop switch 34 Power connector 35 Air supply fan 36 Exhaust duct 37 Safety lock

Claims (6)

An observation device for observing a change in temperature of a sample, which is a high-temperature chamber having an airtight structure, a sample table placed in the center of the high-temperature chamber and on which the sample is placed, and heating and cooling the sample on the sample table Therefore, heating means and cooling means for supplying hot air or cold air attached to the high temperature chamber, temperature detection means for detecting the temperature of the sample to be heated and cooled, the heating means based on the detection result of the temperature detection means, and Control means for controlling the cooling means,
An observation apparatus characterized in that the sample in the high temperature chamber is heated or lowered by supplying hot air or cold air generated by a heating means and a cooling means provided separately from the high temperature chamber. An observation apparatus for observing a temperature change of a sample, which is a high-temperature chamber having an airtight structure provided with a dome-shaped observation window at an upper portion, a sample stage disposed in the center of the high-temperature chamber and mounting the sample, and the sample Heating means and cooling means for supplying hot air or cold air attached to a high temperature chamber for heating and cooling the sample on the table, temperature detecting means for detecting the temperature of the sample to be heated and cooled, and the temperature detecting means And a control means for controlling the heating means and the cooling means based on the detection result,
An image pickup means for picking up an image of the sample whose temperature is controlled by the control means through a dome-shaped observation window provided in the upper portion of the high temperature chamber, and a monitor for displaying an image picked up by the image pickup means. Observation device. An observation device for observing a change in temperature of a sample, which is a high-temperature chamber having an airtight structure, a sample table placed in the center of the high-temperature chamber and on which the sample is placed, and heating and cooling the sample on the sample table Therefore, heating means and cooling means for supplying hot air or cold air attached to the high temperature chamber, temperature detection means for detecting the temperature of the sample to be heated and cooled, the heating means based on the detection result of the temperature detection means, and Control means for controlling the cooling means;
An air supply passage and an exhaust passage formed by dividing the passage between the high greenhouse and these heating means and cooling means, respectively, and an exhaust passage portion in which the air in the high temperature chamber is sent to the heating means and the cooling means for circulation. A fan provided, an on-off valve provided on the passage between the high temperature chamber and the heating means and the cooling means, and a communication port provided on the high temperature chamber side from the on-off valve,
An image pickup means for picking up an image of the sample whose temperature is controlled by the control means through a dome-shaped observation window provided in the upper portion of the high temperature chamber, and a monitor for displaying an image picked up by the image pickup means. Observation device. The observation device according to claim 2 or 3, wherein the dome-shaped observation window is made of double glass with an air layer interposed therebetween. 4. An observation apparatus according to claim 2, wherein the imaging means can freely change the observation angle on the dome-shaped observation window. 6. The observation apparatus according to claim 2, wherein the sample stage is made of a member that generates radiant heat by hot air supplied from the heating means.

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