JP2005069760A - Emission spectrum measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve analysis accuracy by heightening the accuracy of temperature control of a sample, and to facilitate visual confirmation of a measuring portion on the sample. <P>SOLUTION: A sample stand 23 itself for placing the sample 22 horizontally is constituted from a material having excellent heat conductivity to thereby form a temperature-controlled block, and the sample stand 23 is heated/cooled by a Peltier element 25. A measuring window 24 is opened on the center of the sample stand 23, and the sample 22 is set on the sample stand 23 so that the emission surface faces downward. The sample 22 is heated/cooled from the emission surface side, and since the area of the measuring window 24 is small, the temperature at the measuring portion becomes nearly equal to a target temperature. A reflecting mirror 26 rotatable around a vertical shaft 27 is installed just under the measuring window 24, and the measuring portion is projected in the mirror surface to thereby enable visual confirmation by facing the reflecting mirror 26 forward. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an emission spectrum measuring apparatus for measuring a spectrum of emitted light from an emission source, and more specifically, an emission spectrum measuring apparatus suitable for measuring an emission spectrum of a sample having a flat shape such as an organic EL panel. About.

  In recent years, with the development of self-luminous thin displays such as organic EL, the demand for devices that measure the light emission characteristics (luminance, chromaticity, etc.) of thin flat light emitters with high accuracy has become very strong. Devices for meeting these requirements have been commercialized (see, for example, Non-Patent Documents 1 and 2).

  For example, in the conventional measuring apparatus disclosed in Non-Patent Document 1, a flat plate-like sample is held in a vertical state, and the measurement light emitted in a substantially horizontal direction from the light emitting surface of the sample is detected by a luminance meter. At the same time, the optical fiber is introduced into the spectrometer. In addition, since there is a great demand for measuring the temperature dependence of the light emission characteristics of the organic EL element, the conventional measuring apparatus described in Non-Patent Document 2 allows the temperature of the sample to be controlled by the electronic cooling element. When adjusting the temperature of the sample, it is necessary to prevent the temperature adjustment means from blocking the measurement light, so conventionally, a temperature adjustment block is provided so as to contact the back side of the sample held vertically. The sample is maintained at a predetermined temperature by heat conducted from the temperature control block.

  However, in such a conventional configuration, since the sample is heated and cooled from the back side, the difference between the actual temperature of the measurement site on the sample and the target temperature increases depending on the thermal conductivity of the sample and the thickness of the sample. This is one of the factors that impair the measurement accuracy. Further, in the measurement of the organic EL panel and the like, there is a strong demand for visually confirming the measurement site on the sample, but it has been difficult to perform such visual confirmation with the conventional configuration.

“Organic EL Luminous Efficiency Measuring Device EL1003”, [online], Precise Gauge Co., Ltd. [Search August 6, 2003], Internet <URL: http://www.p-gauges.com/products3/EL1003 .pdf> "Organic EL Evaluation System ELS-1500", "Organic EL Manufacturing Process and Shimadzu Evaluation Equipment" Catalog, Shimadzu Corporation

  The present invention has been made in view of these problems, and an object thereof is to provide an emission spectrum measuring apparatus capable of improving measurement accuracy by adjusting the temperature of a measurement site of a sample to a target temperature with high accuracy. There is to do. It is another object of the present invention to provide an emission spectrum measuring apparatus that allows a measurer to easily visually check a measurement site on a sample.

In order to solve the above-mentioned problems, the present invention represents a light emission spectrum by introducing light emitted from a substantially flat sample into a photometry unit, wavelength-dispersing the light and detecting it with a photodetector. In an emission spectrum measuring device for acquiring information,
a) For placing the sample with the measurement surface of the sample facing down, the measurement window is opened so that the measurement site on the lower surface of the sample can be viewed, and itself has high heat conduction A sample stage made of a material having properties;
b) heating / cooling means arranged in thermal contact with the sample stage to heat or cool the sample stage;
It is characterized by having.

Embodiments and effects of the invention

  In the emission spectrum measuring apparatus according to the present invention, the sample stage itself, on which the sample is placed substantially horizontally, functions as a temperature control block that applies heat (hot or cold) to the sample. Furthermore, heating from the surface (same surface as the measurement site) of the sample is realized by opening a measurement window on the sample stage and extracting measurement light downward therefrom. In such an emission spectrum measuring apparatus, the measurement sites on the sample that are desired to be measured at the same time or that need to be measured at the same time are in a relatively narrow range. Therefore, the opening area of the measurement window may be small. Therefore, the distance between the sample portion that is in contact with the sample stage that is the temperature control block and the measurement site is short. As a result, there is almost no difference between the temperature of the measurement site and the temperature of the sample stage, and the light emission characteristics at a predetermined temperature and the temperature dependence of the light emission characteristics can be accurately measured regardless of the thickness of the sample and the thermal conductivity of the sample. Can be measured.

  The emission spectrum measuring apparatus according to the present invention further includes light reflecting means including a reflecting mirror disposed below the measurement window, and the light reflecting means emits light emitted from the measurement site of the sample through the measurement window. And a second state in which the measurement portion of the sample is reflected on the reflecting mirror and made visible from the outside can be switched. Is preferred.

  In this configuration, the light reflecting means is set to the first state when measurement is performed, and the light reflecting means is switched to the second state when the measurer wants to visually observe the measurement site of the sample. In the second state, the measurement site is reflected in the reflecting mirror, so that the measurer can actually visually confirm the state and position of the measurement site.

  As one aspect of the light reflecting means, the light reflecting means includes a single reflecting mirror that is located immediately below the measurement window and is inclined with respect to a horizontal plane, and a rotating mechanism that rotates the reflecting mirror around a vertical axis; And the first state and the second state can be switched by changing the direction of the reflecting mirror by the rotating mechanism. According to this configuration, the reflecting mirror can be shared between the measurement and the sample observation, which is advantageous in terms of cost and excellent in space saving.

  As another aspect of the light reflecting means, the light reflecting means selectively selects two reflecting mirrors facing in different directions corresponding to the first state and the second state, and either of the two reflecting mirrors. It is good also as a structure provided with the reflecting-mirror moving means to be located directly under the said measurement window. According to this configuration, although it is necessary to provide a reflecting mirror corresponding to each time of measurement and sample observation, the reflecting mirror moving means may be a slide type, so that the mechanism becomes simple and the reliability is improved.

  An organic EL panel measuring apparatus according to an embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 is an overall configuration diagram of an organic EL panel measuring apparatus according to the present embodiment. This apparatus includes an ultraviolet-visible spectrophotometer 1 having a photometric unit 2 including a spectroscope, a photodetector, and the like, an organic EL panel measurement unit 10 loaded in a sample chamber installation space of the spectrophotometer 1, and a spectrophotometer. Temperature control connected to a personal computer (PC) 3 for performing various data processing in response to detection data acquired by the meter 1 and controlling the operation of the spectrophotometer 1, and an organic EL panel measurement unit 10, respectively. The apparatus 4 includes a cooling water circulation device 5 and a DC power source 6. In this measuring apparatus, in place of the organic EL panel measurement unit 10, other units are loaded, so that the light emission measurement of other light emitters other than the organic EL panel and the absorbance, reflectivity, and the like due to transmission or reflection of an appropriate sample can be performed. Measurement is possible.

  The measuring apparatus of this embodiment is characterized by the structure of the organic EL panel measuring unit 10. FIG. 2 is a schematic external front view of the organic EL panel measurement unit 10. The organic EL panel measurement unit 10 includes a sample mounting chamber 11 that is substantially sealed by a detachable cover that covers the top of the organic EL panel measurement unit 10. Remove the cover when setting the sample, and close the cover after setting the sample as described later. The internal impurity gas is purged via the purge pipe 12 as necessary. Below the sample mounting chamber 11 is an optical chamber 13 having a detachable sample position confirming lid 14 on the front surface, and a temperature control monitor connected to the temperature control device 4 on the left front surface. Connector 16 for the connector for the connector, connector 17 for the connector for the DC power source connected to the DC power source 6, a connector 18 for the connector for the digital multimeter connected to the digital multimeter (not shown), and the temperature control device 4 A connector connection portion 15 such as a connection portion 19 of a temperature control drive connector to be connected is collected.

  FIG. 3 is a schematic front view of the main part in a state where the cover of the sample mounting chamber 11 and the lid 14 are removed. In the sample mounting chamber 11, a sample table 23 having an upper surface formed in a horizontal plane, and a sample pressing mechanism 20 for pressing the sample 22 from the upper surface of the sample 22 placed substantially horizontally on the sample table 23. With. The sample pressing mechanism 20 has a structure in which the pressing plate 21 moves up and down by a driving force of a motor (not shown). When the sample 22 is set, the sample 22 is placed on the sample table 23 with the measurement plate (light emitting surface) facing downward with the presser plate 21 raised most. Thereafter, the motor is driven to lower the presser plate 21, and the sample 22 is sandwiched between the sample table 23.

  The sample stage 23 is provided with a measurement window 24 penetrating vertically at a substantially central location corresponding to the measurement site, and light emitted from the measurement site on the lower surface of the sample 22 is guided substantially vertically downward through the measurement window 24. It is burned. Here, the size of the upper surface of the sample stage 23 is φ20 mm, and the opening size of the measurement window 24 is φ3.5 mm. However, this is an example and the present invention is not limited to this.

  The sample stage 23 is made of a metal having good thermal conductivity, and also functions as a temperature control block (constant temperature block). A Peltier element 25 as a heating / cooling means is disposed in close contact with the lower surface of the sample table 23. A drive current is supplied from the temperature control device 4 to the Peltier element 25 so that the temperature detected by a temperature sensor (not shown) attached in close contact with the sample stage 23 becomes the target temperature. Since the entire sample stage 23 reaches the target temperature almost uniformly, the periphery of the sample 22 facing the opening of the measurement window 24 is maintained in the vicinity of the target temperature by the heat transmitted from the sample stage 23. Furthermore, since the opening area of the measurement window 24 is small, the temperature of the portion facing the opening of the measurement window 24 and not in direct contact with the sample table 23 is also very close to the target temperature.

  In general, there is a great demand for measuring the temperature dependence of the light emission characteristics of the organic EL element. However, according to the above configuration, the temperature of the measurement portion of the sample 22 can be adjusted with high accuracy. It becomes possible to measure accurately.

  Inside the optical chamber 13, immediately below the measurement window 24, a reflecting mirror 26 inclined to stand up at an angle of 45 ° from a horizontal plane is provided to be rotatable about a vertical axis 27. The angle range of this rotation is exactly 90 °, and when the mirror surface of the reflecting mirror 26 is directed leftward as shown in FIG. 3, the light emitted vertically downward from the sample 22 is directed horizontally leftward. The first state (measurement state) is entered. On the other hand, as shown in FIG. 4, when the mirror surface of the reflecting mirror 26 faces forward, an image 30 of the measurement site is reflected in the reflecting mirror 26, and this can be viewed from the second state (state when checking the sample). It becomes. The switching between the first state and the second state is achieved by the rotation of the reflecting mirror 26. Here, the rotating operation is performed manually, but the reflecting mirror may be driven to rotate by a motor or the like.

  As described above, in the normal state, the lid 14 is closed with the position of the reflecting mirror 26 in the first state, and the lid 14 is removed when the measurer wants to visually check the measurement position of the sample. Then, the reflecting mirror 26 may be rotated by 90 ° to enter the second state. Thus, the measurement site of the sample 22 can be easily confirmed visually.

  Next, an organic EL panel measuring apparatus according to another embodiment of the present invention will be described. The difference from the first embodiment lies in the structure of the switching mechanism between the measurement and the sample position confirmation in the organic EL panel measurement unit 10, and this point will be described with reference to FIG. FIG. 5 is a schematic view of the organic EL panel measurement unit and the main part of the photometry unit in this embodiment as viewed from above.

  In the first embodiment, the same reflecting mirror 26 is rotated around the vertical axis 27 in order to switch the optical path between measurement and sample position confirmation. In this second embodiment, however, the measurement is performed as a reflecting mirror. The first reflecting mirror 261 and the second reflecting mirror 262 for confirming the sample position are provided, and the positions of the two reflecting mirrors 261 and 262 are switched by a slide moving mechanism. That is, in FIG. 5, a first reflecting mirror 261 having a mirror surface facing leftward is provided on the rear side, and a second reflecting mirror 262 having a mirror surface facing front is provided in front of the two reflecting mirrors 261. 262 is installed on a movable table 40 that is movable on the slide rail 41 in the front-rear direction.

  In the state where the moving table 40 is moved most forward, as shown in FIG. 5A, the first reflecting mirror 261 is positioned immediately below the measurement window 24, and the sample is measured through the measurement window 24. The light emitted vertically downward from the part is reflected to the left by the first reflecting mirror 261 and enters the photometric unit 2 where it is wavelength-dispersed by the spectroscope 201 and detected by the photodetector 202. On the other hand, in the state where the movable table 40 is moved to the rearmost position, the second reflecting mirror 262 is positioned directly below the measurement window 24 as shown in FIG. At this time, an image of the measurement site in the measurement window 24 is reflected in the mirror surface of the reflecting mirror 262 and can be seen from the front. In this way, instead of rotating the reflecting mirror in the first embodiment to switch between the first state and the second state, the moving table is switched between the foremost position and the rearmost position, thereby allowing measurement and sample position confirmation. Can be realized.

  Since Examples 1 and 2 are only examples of the present invention, it is apparent that the present invention includes the present invention even if changes, modifications, and additions are made as appropriate within the scope of the present invention.

1 is an overall configuration diagram of an organic EL panel measuring apparatus according to an embodiment of the present invention. The schematic external appearance front view of the organic electroluminescent panel measurement unit in a present Example. Schematic of the principal part in the state which removed the cover and cover body of the sample mounting chamber (at the time of measurement). The figure which shows the state of the reflective mirror at the time of sample position confirmation in FIG. The schematic top view which shows the characteristic structure of the organic electroluminescent panel measurement unit in the other Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... UV-visible spectrophotometer 2 ... Photometry part 3 ... Personal computer 4 ... Temperature control apparatus 5 ... Cooling water circulation apparatus 6 ... DC power supply 10 ... Organic EL panel measurement unit 11 ... Sample mounting chamber 12 ... Purge tube 13 ... Optical chamber 14 ... Lid 20 ... Sample holding mechanism 21 ... Sample holding plate 22 ... Sample 23 ... Sample stage 24 ... Measurement window 25 ... Peltier element 26, 261, 262 ... Reflector 27 ... Vertical axis 40 ... Moving table 41 ... Slide rail

Claims (4)

In an emission spectrum measuring apparatus for acquiring information representing an emission spectrum by introducing light emitted from a substantially flat sample into a photometry unit, wavelength-dispersing the light and detecting it by a photodetector,
a) For placing the sample with the measurement surface of the sample facing down, the measurement window is opened so that the measurement site on the lower surface of the sample can be viewed, and itself has high heat conduction A sample stage made of a material having properties;
b) heating / cooling means arranged in thermal contact with the sample stage to heat or cool the sample stage;
An emission spectrum measuring apparatus comprising:   The apparatus further includes light reflecting means including a reflecting mirror disposed below the measurement window, and the light reflecting means reflects light emitted from the measurement site of the sample through the measurement window by the reflecting mirror to the photometry unit. 2. The emission spectrum measuring apparatus according to claim 1, wherein a first state that can be introduced and a second state in which a measurement site of the sample is reflected on a reflecting mirror and made visible from outside can be switched. .   The light reflecting means includes a single reflecting mirror positioned directly below the measurement window and inclined with respect to a horizontal plane, and a rotating mechanism that rotates the reflecting mirror about a vertical axis. The emission spectrum measuring apparatus according to claim 2, wherein the first state and the second state are switched by changing a direction of the reflecting mirror.   The light reflecting means includes two reflecting mirrors facing in different directions corresponding to the first state and the second state, respectively, and a reflecting mirror that selectively positions one of the two reflecting mirrors directly below the measurement window. The emission spectrum measuring apparatus according to claim 2, further comprising a moving unit.

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