KR20220075159A - Rotary feedthrough sealing unit with built-in multi-stage insulated multi-lip seal - Google Patents

Abstract

The present invention is to block a fluid such as gas, oil, or air that wants to flow from inside to outside or from outside along the gap formed while connecting the rotary shaft of the rotary feed-through sealing unit to the motor shaft installed in a negative pressure or high pressure facility. It relates to a rotary feed-through sealing unit having a built-in insulating multi-lip seal having a sealing action while making sliding friction contact with the outer diameter of a rotating shaft.
The counterclockwise spiral lip tip formed at the right end of the rotary feed-through sealing unit installed in the vacuum deposition facility, and the concentric multi-lip tip formed in the middle part are the spiral lip tip and the left end formed at the tip. The tip of the other spiral lip is a rotary feed-through sealing unit equipped with a spiral lip and multi-lip seal in a multi-step form to counterclockwise that the fluid or foreign material introduced from the right is finally introduced into the vacuum deposition facility.
In addition, the clockwise spiral lip tip formed at the left end of the rotary feed-through sealing unit mounted on a high-pressure stirrer, pressure vessel, drying device, etc. pushes out the fluid leaking from the inside, and is molded at the right end The multi-lip tip of the concentric concentric shaft relates to a rotary feed-through sealing unit having a spiral lip and a multi-lip seal in a multi-step form to block external leakage of fluid passing through the spiral multi-lip tip or inflow of external fluid, respectively.
In addition, in order to solve the problem of weakening of sealing force and reduced durability due to the decrease in the strength of the tip of the spiral lip and the tip of the multi-lip of the concentric concentric shaft due to external heat flowing into the rotary feed-through sealing unit, the rotation shaft in contact with the tip of the lip A rotary feed with a structure in which a low-friction insulation tube with numerous micro dimples or a thick-film coating using a low-friction material is inserted into the outer diameter, and insulation is installed between the inner surface of the housing and the steel reinforcement frame. It relates to a through sealing unit.

Description

ROTARY FEEDTHROUGH SEALING UNIT WITH BUILT-IN MULTI-STAGE INSULATED MULTI-LIP SEAL

The present invention relates to a rotary feed-through sealing unit used to stably secure the vacuum degree of a rotating vacuum deposition facility, or to block fluid leakage in a high-pressure stirrer, pressure vessel, drying device, etc., and more particularly, to a negative pressure Or the outer diameter of the rotary shaft to block fluids such as gas, oil, or air that want to flow from inside to outside or from outside along the gap formed while connecting the rotary shaft of the rotary feed-through sealing unit to the motor shaft installed in the high-pressure facility. It relates to a rotary feed-through sealing unit having a built-in heat-insulating multi-lip seal having a sealing action while performing sliding friction contact motion with the rotary feed-through sealing unit.

The counterclockwise spiral lip tip formed at the right end of the rotary feed-through sealing unit installed in the vacuum deposition facility, and the concentric multi-lip tip formed in the middle part are the spiral lip tip and the left end formed at the tip. The other spiral lip tip is a rotary feed-through sealing unit equipped with a spiral lip and a multi-lip seal in a multi-step form to counterclockwise that the fluid or foreign material introduced from the right is finally introduced into the vacuum deposition facility.

In addition, the clockwise spiral lip tip formed at the left end of the rotary feed-through sealing unit mounted on a high-pressure stirrer, pressure vessel, drying device, etc. pushes out the leaking fluid from the inside, and is molded at the right end The multi-lip tip of the concentric concentric shaft relates to a rotary feed-through sealing unit having a spiral lip and a multi-lip seal in a multi-step form to block external leakage of fluid passing through the spiral multi-lip tip or inflow of external fluid, respectively.

In addition, the rotation shaft in contact with the tip of the lip is in contact with the tip of the lip to solve the problem of weakening of the sealing force and reducing the durability due to the decrease in the strength of the tip of the spiral lip and the tip of the multi-lip of the concentric shaft by an external heat source flowing into the rotary feed-through sealing unit. A rotary structure in which a low-friction insulation tube with numerous micro dimples or a thick-film coating using low-friction material is inserted into the outer diameter of the housing, and insulation is installed between the inner surface of the housing and the steel reinforcement frame It relates to a feed-through sealing unit.

Negative pressure vacuum deposition equipment with rotary feed-through sealing unit installed and mechanical devices such as high-pressure stirrers and pressure vessels are designed to completely block the fluid flowing in from the outside through the gap between the rotating shafts or the fluid leaking from the inside to the outside. When the rotary feed-through sealing unit with an expensive magnetic fluid seal is operated at 150℃ or higher, the magnetic flux line of the permanent magnet and the viscosity of the magnetic fluid weaken due to the temperature rise. falling,

In addition, oil and wear particles generated from a pair of ball bearings supporting the power load of the motor shaft, especially oil evaporated from magnetic fluid, flows into the vacuum equipment and contaminates the deposition surface. Problems such as a decrease in sealing performance, difficulty in proper temperature management by a cooling device, and an increase in initial purchase cost are raised,

In addition, in the contact-type sealing unit, the external heat source and self-friction heat flowing into the sliding friction part between the lip tip and the rotating shaft reduce the sealing force and increase the risk of damage due to the decrease in the strength of the lip tip. If the initial contact pressure is increased, there are problems such as damage caused by increased wear at the tip of the lip, reduced durability, and loss of power due to increased friction.

Accordingly, the present invention has been devised to solve the problems of the related art as described above. Insulation material is used to reduce frictional force between the lip tip and the rotating shaft by applying a thick film coating using micro dimples or low-friction material on the surface of the low-friction insulation material to increase durability and reduce power loss.

In ball bearings that rotate at high temperatures, evaporated oil, wear particles, and magnetic fluid seals eliminate the problems of weakening of magnetic force lines and lowering of sealing action due to evaporation of magnetic fluid. It enhances the sealing ability to block external leakage or the inflow of external fluids,

To maintain the sealing performance of the magnetic fluid seal at high temperature, it is a multi-stage contact lip type sealing device that can be operated without a cooling device installed to reduce maintenance costs and reduce the initial purchase cost. unit is provided.

In order to achieve the object of the present invention, micro dimples are formed on the outer diameter surface to ensure low friction and heat insulation on the inner diameter portion of the housing and the outer diameter portion of the rotation shaft so as to operate without a cooling device at a high temperature of 150 ° C or higher. By using the formed insulation material or the insulation material coated with a thick film with a low-friction material, it flows into the tip of the lip and solves all the problems of low strength, weakened sealing, high friction, and poor deposition due to the inflow of foreign substances,

In addition, the weakening of magnetic field strength and sealing force generated by evaporation of oil, wear particles, and magnetic fluid in the ball bearing caused by high-temperature operation, and the problem of poor deposition due to the inflow of foreign substances mixed in the magnetic fluid A sealing structure in which the tip is molded into a multi-step integral part, and an insulating material to block the external heat source flowing into the tip of the lip,

It is a multi-step contact type lip-type sealing device that can be operated at high temperatures without a cooling device.

In addition, in order to solve the problem of weakening of sealing force and shortening of durability due to the decrease in strength of the tip of the spiral lip and the tip of the multi-lip of the concentric shaft due to the heat source flowing into the rotary feed-through sealing unit, there are numerous We provide a rotary feed-through sealing unit in which a low-friction insulation tube with micro dimples or an insulation tube coated with a thick film using a low-friction material is inserted, and an insulation material is installed between the inner surface of the housing and the steel reinforcement frame. is doing

As described above, the multi-lip built-in rotary feed-through sealing unit of the present invention can guarantee low friction and heat insulation in the inner diameter of the housing and the outer diameter of the rotating shaft so that it can operate normally at high temperatures above 150℃ without a cooling device. Insulation tube with micro dimples on the outer diameter surface or a thick film coated insulation tube using a low-friction material to block heat flowing into the tip of the lip, thereby reducing the strength of the tip of the lip, weakening the sealing force, high friction, and influx of foreign substances It is possible to solve the problem of deposition defects according to

In addition, the weakening of the magnetic force line strength and sealing force generated when the magnetic fluid evaporates due to high temperature, the problem of poor deposition due to the inflow of foreign substances mixed with the magnetic fluid, and the problem of evaporation oil and wear particles of the ball bearing are the spiral lip tip and multi-lip tip. It has the effect of improving sealing properties and reducing defective products with a sealing structure and insulation material molded in a multi-step integral form.

In addition, the weakening of sealing force and shortening of the durability life due to the decrease in strength of the tip of the spiral lip and the tip of the multi-lip of the concentric axis due to the heat flowing into the rotary feed-through sealing unit. Low-friction insulation tube or insulation tube coated with a thick film using a low-friction material is inserted, and insulation is installed between the inner surface of the housing and the steel reinforcement frame. High-temperature operation is possible due to the cooling effect of insulation, which has the effect of reducing maintenance cost and initial purchase cost.

1 is a perspective view of a rotary feed-through sealing unit incorporating a conventional magnetic fluid seal.
Figure 2 is a perspective view of a rotary feed-through sealing unit incorporating a multi-lip of the present invention.
3 is a perspective view of a rotary feed-through sealing unit having a built-in multi-lip showing a first embodiment of the present invention.
4 is a perspective view of a rotary feed-through sealing unit having a built-in multi-lip showing a second embodiment of the present invention.
5 is a perspective view of a rotary feed-through sealing unit having a built-in multi-lip showing a third embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings, the configuration of the present invention will be described in detail according to embodiments as follows.

As shown in Figure 1, the conventional rotary feed-through sealing unit 100 is a rotary shaft of the rotary feed-through sealing unit 100 in which the magnetic fluid seal 12 is built in the central shaft 11 of the vacuum deposition facility 10. (13) is fastened with a key (14), and the rotating shaft (13) receives power from the motor (15) and is contaminated with the surface of a component such as a wafer (16) mounted on a cylindrical flat plate connected to the central shaft (11). Deposition is carried out in a vacuum without suspended matter,

In the vacuum deposition facility 10, a hollow permanent magnet 18 is assembled in the space between the inner diameter of the housing 17 and the rotating shaft 13 made of a magnetic material to maintain a clean and high degree of vacuum, and the permanent On the left and right sides of the magnet 18, hollow magnetic pole pieces 19 and 19' are assembled, respectively, and the magnetic fluid 20, 20' filled in the space between the pole pieces 19 and 19' and the rotation shaft 13. ) receives the magnetic force of the closed circuit shape, and the magnetic particles mixed in the magnetic fluid 20 and 20' are connected to each other like a chain and sealed.

In addition, in order to support the rotational power transmitted from the motor 15, the non-magnetic tubes 21 and 21' and the ball bearings 22 and 22' are sequentially assembled along the outer direction of the pole pieces 19 and 19'. do,

In addition, the flange 23 formed at the lower end of the vacuum deposition facility 10 and the flange 23 ′ formed at the end of the rotary feed-through sealing unit 100 are fastened with bolts 25 with the O-ring 24 interposed therebetween. to block the inflow of foreign substances and air, and the lubricating oil or grease supplied to the magnetic fluids 20 and 20' and the ball bearings 22 and 22' is oil evaporated by internal frictional heat and heat transferred from the outside. , It relates to a rotary feed-through sealing unit 100 having a built-in magnetic fluid seal in order to maintain a clean vacuum degree without contamination by blocking the inflow of air.

2 is a rotary shaft 13 of a rotary feed-through sealing unit 100 ′ having a heat-insulating multi-lip seal 30 embedded in the central shaft 11 of the vacuum deposition facility 10 shown in FIG. 1 according to the present invention. A pair of ball bearings 22 on the left and right sides of the tube 21 "assembled in the middle between the inner diameter of the housing 17 and the rotation shaft 13 so as to support the rotational power transmitted from the motor 15 by connection. ,22') assembling,

In the inner diameter portion of the housing 17 , the rotating shaft 13 , and the corner space 31 formed on the left side of the ball bearing 22 , a L-shaped insulator forming the outer surface of the heat insulating multi-lip seal 30 . (32) is fitted upside down to block the heat conducted from the outside, and the inner surface of the insulating material 32 is joined to the inner surface of the r-shaped steel reinforcement frame 33 to secure elastic flexibility, and the steel reinforcement frame ( 33) insert molding so as to surround the lowermost inner diameter part and the left and right sides with a rubber material 34, and at the right end of the inner diameter part of the rubber material 34, a counterclockwise spiral lip 35 is integrally molded from the outside A plurality of concentric multi-ribs (36, 36 ', 36 ") are formed on the left extension line of the spiral lip 35 to seal the foreign material or fluid to be introduced, respectively, and the fluid passing through the spiral lip 35 is formed. Block the left inflow, and mold another spiral lip 35' on the left extension line of the multi-rib 36" to prevent the left-hand inflow of the fluid passing through the multi-ribs 36, 36', 36". The lip tip of the multi-stage sealing structure that pushes in the direction is integrally formed,

In addition, a low-friction heat insulating material having a ball bearing 22 on the right side of the circular jaw 37 protruding from one end of the outer diameter part of the rotation shaft 13 and numerous micro dimples 38 on the outer diameter surface on the left side. By inserting the tube 39 to block the inflow of heat conducted through the rotating shaft 13, the strength of the ends of the spiral ribs 35, 35' and the multi-ribs 36, 36', 36" and the deterioration of sealing durability are prevented. do,

In addition, a multi-lip ring 41 having a plurality of lip tips is inserted into the O-ring groove 40 formed on the outer surface of the flange 23' formed at the left end of the rotary feed-through sealing unit 100' by inserting a vacuum. When fastening with the deposition facility 10, high sealing durability and safety are ensured,

The higher the vacuum degree and pressure difference applied to the left and right sides of the rotary feed-through sealing unit 100', and in particular, the higher the deposition temperature, the higher the oil particles due to evaporation of the lubricant or grease supplied to the ball bearings 22 and 22', foreign substances or It relates to a rotary feed-through sealing unit (100') having a built-in multi-stage heat insulating multi-lip seal (30) in a counterclockwise direction to completely block the inflow of fluid or the external leakage of the internal fluid.

3 is a perspective view illustrating a first embodiment of the present invention in which the sliding friction resistance is reduced and the direction of the tip of the lip is reversed. Instead of the r-shaped steel reinforcement frame 33, the d-shaped steel reinforcement frame 33' is connected upside down to secure elastic flexibility, and the lowermost inner diameter part and the left and right sides of the steel reinforcement frame 33' are made of a rubber material. Insert molding to wrap around (34'), and integrally molding a clockwise spiral lip (35') at the left end of the inner diameter of the rubber material (34') to push out foreign substances or fluids to be introduced from the left and seal , A plurality of concentric multi-ribs 36, 36', 36" are formed on the right extension line of the spiral lip 35', respectively, and sealed in a clockwise direction to prevent the left side of the fluid passing through the spiral lip 35'. The lip tip of the multi-stage sealing structure is integrally formed,

In addition, in Fig. 2, in order to reduce sliding frictional force, instead of the heat insulating tube 39 having numerous micro dimples 38 on the outer diameter surface, a low friction material is used on the outer diameter part of the heat insulating tube 39' to which the thick coating 43 is applied. ) to block the inflow of heat conducted through the rotating shaft 13, thereby reducing the sliding friction resistance generated at the ends of the spiral lip 35' and the multi-ribs 36, 36', 36" and blocking the occurrence of wear, And it relates to a rotary feed-through sealing unit (100") having a structure in which a clockwise multi-stage heat insulating multi-lip seal 30' is built in order to prevent a decrease in strength and sealing durability.

4 is a perspective view in which the insulating material and the steel reinforcement frame illustrating the second embodiment of the present invention are replaced with a single elastic insulating material, and the method of reducing the sliding friction resistance and the insert molding method of the rubber material in the elastic insulating material are changed. Looking at structural features different from 2, in FIG. 4, the insulating function of the insulating material 32 of FIG. 2 and the strength function of the steel reinforcement frame 33 are C-shaped elasticity in the corner space 31 formed on the left side of the ball bearing 22. Replace the insulating material 44 by fitting, insert molding with a rubber material 34" into a plurality of hot joint grooves 45 formed in the lowermost inner diameter of the elastic insulating material 44, and the rubber material 34". At the right end of the inner diameter, a plurality of concentric multi-ribs (36, 36', 36") are respectively molded so that the inner diameter of the tip of the lip toward the right decreases while moving from right to left. The sealing property is increased by this, and a lip seal 46 directed in the left direction is formed on the left extension line of the multi-lip 36 " to block foreign substances or fluids flowing from the left side,

In addition, in FIG. 2, in order to reduce sliding frictional force, instead of the heat insulating tube 39 having numerous micro dimples 38 on the outer diameter surface, a low friction material is used on the outer diameter part of the heat insulating tube 39' to which the thick film coating 43 is applied. ) to block the inflow of heat conducted through the rotating shaft 13, thereby reducing the sliding friction resistance generated at the tip of the multi-ribs 36, 36', 36" and the lip seal 46 and blocking the occurrence of wear; And it relates to a rotary feed-through sealing unit (100") having a structure in which a multi-stage heat insulating multi-lip seal 30" in a counterclockwise direction is built in order to prevent a decrease in strength and sealing durability.

5 is a third embodiment of the present invention for replacing the insulating material, the steel reinforcement frame, and the rubber material of the tip of the lip by molding it with a single elastic insulating sealing material, to reduce the sliding friction resistance of the tip of the lip and to increase the elastic deformation behavior As a perspective view changed to insert molding, here, if you look at the structural features different from FIG. 2, in FIG. 5, the insulating function of the insulating material 32 of FIG. The sealing function by the tip of the lip (36, 36', 36") is performed by fitting an elastic insulating sealing material 47 formed integrally with the tip of the lip in the shape of a C into the corner space 31 formed on the left side of the ball bearing 22. Instead, a counterclockwise spiral lip 35 is integrally molded at the right end of the inner diameter part of the lip tip responsible for the sealing function in the elastic insulating sealing material 47 to push out foreign substances or fluids to be introduced from the outside and seal it. , The spiral lip 35 has a structure in which a plurality of concentric multi-ribs 36, 36', 36" are respectively molded so that the inner diameter of the tip of the lip is reduced while moving from right to left on the left extension line of the spiral lip 35, so the sliding friction contact surface pressure is Conversely, the sealing property can be gradually increased to block the left inflow of the fluid passing through the spiral lip 35, and another spiral lip 35' is formed on the left extension line of the multi-lip 36" to form a multi The lip tip of the multi-stage sealing structure that pushes in the counterclockwise direction to prevent the left side of the fluid passing through the lips 36, 36', 36" is integrally formed,

In addition, in Fig. 2, in order to reduce sliding frictional force, instead of the heat insulating tube 39 having numerous micro dimples 38 on the outer diameter surface, a low friction material is used on the outer diameter part and the thick film coating 43' is applied ( 48) to block the inflow of heat conducted through the rotating shaft 13 and reinforce the elastic deformation behavior of the tip of the spiral ribs 35, 35' and multi-ribs 36, 36', 36" to resist sliding friction. A rotary feed-through sealing unit (100"') with a built-in multi-step insulation multi-lip seal (30"') in a counterclockwise direction to reduce will be.

The present invention described above is not limited to the configuration and operation as shown and described. That is, the present invention is capable of various changes and modifications within the spirit and scope of the claims described.

10: vacuum deposition equipment 11: central axis
12: magnetic fluid seal 13: rotation shaft
14: key 15: motor
16: wafer 17: housing
18: permanent magnet 19,19': pole piece
20,20': magnetic fluid 21,21',21": tube
22,22' : Ball bearing 23,23' : Flange
24,24': O-ring 25: bolt
26: Heating pad 30,30',30",30"': Insulation type multi-lip seal
31: corner space 32: insulation material
33,33' : Steel reinforcement frame 34,34',34" : Rubber material
35,35' : Spiral Rib 36,36',36" : Multi Rib
37: circular jaw 38: micro dimple
39,39': Insulation tube 40: O-ring groove
41: multi-lip ring 42, 42': packing
43,43': thick film coating 44: elastic insulation
45: dowel joint groove 46: lip seal
47: elastic insulating sealing material 48: insulating high elastic tube
100,100',100",100"' : Rotary Feedthrough Sealing Unit

Claims (4)

In the corner space 31 formed on the inner diameter portion of the housing 17, the rotation shaft 13, and the left side of the ball bearing 22, a L-shaped insulating material 32 forming the outer surface of the heat insulating multi-lip seal 30 is fitted upside down to block heat transmitted from the outside, and the lowermost inner diameter and left and right side surfaces of the d-shaped steel reinforcement frame 33 integrally joined to the inner surface of the heat insulating material 32 are made of a rubber material (34). Insert molding so as to wrap, and on the left extension line of the counterclockwise spiral lip 35 integrally molded to the right end of the inner diameter part of the rubber material 34, a plurality of concentric multi-ribs 36, 36', 36" A multi-stage sealing structure is formed that pushes foreign substances or fluids flowing in from the right side in a counterclockwise direction by means of another spiral lip 35' integrally formed on the left extension line of the multi-lip 36",
In addition, on the left side of the circular jaw 37 formed to protrude from one end of the outer diameter part of the rotation shaft 13, a heat insulating tube 39 formed of a low friction heat insulating material having numerous micro dimples 38 on the outer diameter surface is inserted. Reduces the frictional force at the tip of the spiral ribs (35,35') and multi-ribs (36,36',36"), and at the same time blocks the inflow of heat conducted through the rotating shaft 13,
In addition, the multi-lip ring 41 having a plurality of lip tips is inserted into the O-ring groove 40 formed on the outer surface of the flange 23' formed at the left end of the rotary feed-through sealing unit 100'. A rotary feed-through sealing unit with a built-in counterclockwise multi-stage insulating multi-lip seal (30). The method according to claim 1,
Insert molding is carried out so that the lowermost inner diameter part and the left and right side surfaces of the structure in which a r-shaped steel reinforcement frame 33' is connected to the inner surface of the heat insulating material 32 upside down is wrapped by a rubber material 34', and the rubber material ( 34'), a plurality of concentric multi-ribs 36, 36', 36" are molded on the right extension line of the clockwise spiral lip 35' integrally formed at the left end of the inner diameter part, and the fluid introduced from the left A multi-stage sealing structure that pushes out foreign substances in a clockwise direction is formed,
In addition, the spiral lip 35' and the multi-ribs 36, 36', 36" are inserted by inserting the insulating tube 39' coated with a thick film 43 using a low-friction material in the outer diameter of the rotating shaft 13. ) To reduce the frictional resistance generated at the tip and suppress the occurrence of wear, and at the same time block the inflow of heat conducted through the rotating shaft 13 to prevent deterioration of the strength and sealing durability of the tip of the lip A rotary feed-through sealing unit with a built-in lip seal (30'). The method according to claim 1,
A C-shaped elastic insulator 44 forming the outer surface of the heat insulating multi-lip seal 30" is fitted in the corner space 31, and a plurality of heat joints formed in the inner diameter of the lowermost end of the elastic insulator 32 are fitted. At the right end of the inner diameter part of the rubber material (34") insert-molded into the groove 45, the inner diameter of the tip of the lip facing in the right direction decreases while moving from right to left. Multi-ribs (36, 36', 36") A multi-stage sealing structure that blocks foreign substances or fluids flowing from the left side by forming a plurality of each to increase the contact pressure in the opposite direction, and forming a left-facing lip seal 46 on the left extension line of the multi-lip 36" formed,
In addition, in the left outer diameter part of the circular jaw 37 formed to protrude from one end of the outer diameter part of the rotation shaft 13, a heat insulating tube 39' coated with a thick film coating 43 using a low-friction material is inserted into the multi-lip 36 , 36 ', 36") and the frictional resistance generated at the tip of the lip seal 46, while suppressing wear and tear, at the same time blocking the inflow of heat conducted through the rotation shaft 13, the strength and sealing of the tip of the lip A rotary feed-through sealing unit with a built-in multi-level insulation multi-lip seal (30") in a counterclockwise direction to prevent deterioration of durability. The method according to claim 1,
A C-shaped elastic insulating sealant 47 forming the outer surface of the insulating multi-lip seal 30"' is fitted in the corner space 31, and the lower end of the inner diameter part of the elastic insulating sealant 47 is fitted at the right end. On the left extension line of the integrally molded spiral lip 35, a plurality of concentric concentric multi-ribs 36, 36', 36" are formed so that the inner diameter of the tip of the lip decreases while moving from right to left, and the multi-lip ( On the left extension line of 36"), another spiral lip 35' is formed and the lip tip of the multi-stage sealing structure is formed to push it counterclockwise to prevent the inflow of fluid or foreign substances from the right side,
In addition, in the left outer diameter part of the circular jaw 37 formed to protrude from one end of the outer diameter part of the rotation shaft 13, a heat-insulating high-elasticity tube 48 coated with a thick film coating 43' with a low-friction material is inserted, and the spiral lip 35 ,35') and multi-ribs (36, 36', 36") A rotary feed-through sealing unit with a built-in multi-stage insulation-type multi-lip seal (30"') with a structure that reinforces the elastic deformation behavior of the tip.

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