KR20090102193A - Vacuum sealing structure of revolve shaft - Google Patents

Abstract

PURPOSE: A rotator having a vacuum airtight structure is provided to keep air-tightness by forming a blocking film generated in the permanent magnet and magnetic fluid with the magnetic force. CONSTITUTION: A rotator having a vacuum airtight structure comprises followings. A permanent magnet is united with an axis of rotation(20) combined with a housing. The vacuum airtight structure maintains the air-tightness with the magnetic force generated in the magnetic fluid(30) and permanent magnet(40). A fixture(10) is combined with the axis of rotation. A fluid storage space is made of a plurality of grooves consecutively formed at the outer side of the axis of rotation around the fixture. The magnetic fluid is filled in the fluid storage space. The permanent magnet has N pole and S pole crossing each other, and the permanent magnet of the ring type is installed in the part in which the fluid storage space is mounted.

Description

VACUUM SEALING STRUCTURE OF REVOLVE SHAFT

The present invention relates to a rotating body having a vacuum airtight structure to transmit the power of the power transmission unit while maintaining the airtight in the clean room (CLEAN ROOM) that must always be kept clean in order to produce a semiconductor or artificial bone, etc. The permanent magnet is coupled to the rotating shaft and forms a fluid storage space to fill the magnetic fluid, so that magnetic force is generated through the permanent magnet to form a barrier inside the membrane.At the same time, the rotating shaft rotates to wrap the rotating shaft in the magnetic fluid to generate a magnetic barrier. This more robust form relates to a rotating body having a vacuum hermetic structure that can prevent mechanical dust or contaminated external air, etc. from being introduced into the clean room through the power transmission unit.

In general, articles produced by mask manufacturing apparatuses, reduction projection type exposure apparatuses, plasma etching apparatuses, epitaxial growth apparatuses, CVD apparatuses, iron etching apparatuses, ion implantation apparatuses, or artificial products such as implants, semiconductors, hip joints, knee joints, vertebrae, etc. Items such as bolts coupled to bones and artificial bones are easily generated due to contact with dust or polluted external air, so work is always performed in a clean room that maintains cleanliness.

In addition, the manufacturing apparatus installed in such a clean room should receive power from a separate power transmission unit to produce an article, wherein a connection means is provided to connect the power transmission unit and the clean room.

The connecting means includes a rotating shaft having one end and the other end connected to a power transmission unit and an article manufacturing apparatus of a clean room, a bearing supporting the rotating shaft, a magnetic body installed on the rotating shaft, a gap retaining hole, and a housing supporting and rotating the bearing. It is composed.

However, since the connection means configured as described above is not properly maintained airtight, there is a problem in that the goods produced and produced in the clean room are contaminated and defective products are produced.

That is, the magnetic material installed on the rotating shaft is formed or installed so that the magnetic is divided, or a plurality of magnetic materials formed in a ring form are arranged through one another with other objects interposed therebetween, so that the magnetic force is not effectively generated. As dust or dust from outside the machine flows between the rotating shaft and the bearing or the gap between the rotating shaft and the housing, the product is contaminated. Therefore, the defective product is produced. There is a problem that the reliability and satisfaction for the fall.

In addition, if a defective product is generated as described above, the defective product must be classified one by one, which requires more manpower and time, which is not only economically inefficient, but also lowers production efficiency. Also, a triple triple clean room or a separate clean machine must be purchased. Therefore, there is a troublesome and uneconomical problem.

The present invention is designed to solve the above problems, by coupling a permanent magnet to the rotating shaft installed inside the housing and having a magnetic fluid to surround the rotating shaft to generate a magnetic force, the magnetic force generated in the permanent magnet and magnetic fluid Through the blocking film is formed to maintain a completely airtight, the purpose is to prevent mechanical dust or contaminated external air, etc. to be introduced into the clean room through the power transmission.

Rotating body having a vacuum airtight structure according to the present invention for realizing the above object, the permanent magnet is coupled to the rotating shaft coupled to the housing and provided with a magnetic fluid to maintain the airtight through the magnetic force generated in the magnetic fluid and permanent magnet In the rotating body having a vacuum hermetic structure, a fixture is coupled to the rotating shaft, a plurality of grooves are formed continuously on both sides of the rotating shaft around the fixture to form a fluid storage space, the magnetic fluid in the fluid storage space Filled, the ring-shaped permanent magnets are respectively installed in the portion where the fluid storage space is formed, each permanent magnet is characterized in that the N pole and the S pole are coupled to cross each other.

And, the outer diameter is in close contact with the inner circumferential surface of the housing, and the fastener having a coupling groove formed in the inner diameter is coupled to the rotating shaft, a plurality of permanent magnets having a fluid storage space formed in a ring shape and the height of the inner diameter is staggered, the coupling groove of the fixture Is inserted into, the magnetic fluid is filled in the fluid storage space, the permanent magnet is characterized in that both sides are formed differently to the N pole and the S pole.

In addition, the permanent magnet is characterized in that the inner and outer diameters are formed differently formed in the N pole and the S pole.

In the magnetic fluid bearing of the present invention, since the permanent magnet is installed on the rotating shaft and the magnetic fluid is provided, the barrier film is formed through the magnetic force generated in the permanent magnet and the magnetic fluid, thereby maintaining perfect airtight. There is an effect that can prevent the back is introduced into the clean room through the power transmission.

And, the permanent magnet is provided with a plurality of poles N and S poles are combined with each other, or provided with a plurality of ring-shaped permanent magnets formed on both sides or the inner and outer diameters differently to the N pole and S pole to surround the rotating shaft and strong By allowing the magnet to be generated there is an effect that can be more efficiently maintained confidentiality.

In addition, the airtight ring is installed on the flange outer surface of the housing, and the airtight ring is installed to be in close contact with the inner circumferential surface of the housing in the permanent magnet and the fixing part, so that the airtightness can be maintained more firmly.

1 is a perspective view showing a first embodiment according to a rotating body having a vacuum hermetic structure according to the present invention.

2 is a cross-sectional view showing a first embodiment according to a rotating body having a vacuum hermetic structure according to the present invention;

Figure 3 is a state of use showing a first embodiment according to the rotating body having a vacuum hermetic structure according to the present invention.

4 is a cross-sectional view showing a second embodiment of a rotating body having a vacuum hermetic structure according to the present invention;

5 is a cross-sectional view showing a third embodiment of a rotating body having a vacuum hermetic structure according to the present invention;

6 is a sectional view showing a fourth embodiment of a rotating body having a vacuum hermetic structure according to the present invention;

<Explanation of symbols for the main parts of the drawings>

1: first rotating body 2: second rotating body

3: linear moving body 10: fixture

20: rotation axis 30: magnetic fluid

40: permanent magnet 50: spacing zone

60: bearing 70: finish cam

80 housing 90 power transmission unit

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a first embodiment according to a rotating body having a vacuum hermetic structure according to the present invention, Figure 2 is a cross-sectional view showing a first embodiment according to the rotating body having a vacuum hermetic structure according to the present invention, 3 is a use state diagram showing a first embodiment according to a rotating body having a vacuum hermetic structure according to the present invention.

1 to 3, the rotary body having a vacuum hermetic structure of the present invention is installed on the inside of the housing 80 and a plurality of grooves are continuously formed on the outer surface of the rotating shaft having a fluid storage space (20a) ( 20), the magnetic fluid 30 is filled in the fluid storage space (20a), the fastener 10 is installed on the rotating shaft 20, and the permanent magnet is installed on both sides of the fastener 10 in order It consists of 40, the spacing holding part 50, and the bearing 60. As shown in FIG.

The rotating shaft 20 is formed in a cylindrical shape having a predetermined diameter and length, and a fluid storage space 20a formed of a plurality of grooves in the form of a thread on both sides of the fixture 10 is formed.

At this time, the fluid storage space (20a) is filled with a magnetic fluid 30 mixed with a metal powder at a predetermined ratio.

The permanent magnet 40 has a magnetic force and is formed and installed so that the outer diameter is in close contact with the inner circumferential surface of the housing 80 and the inner diameter is in close contact with the fluid storage space 20a of the rotating shaft 20, each permanent magnet 40 ) Is combined so that the poles are crossed with each other.

That is, among the plurality of permanent magnets 40 coupled to the rotating shaft 20, the first permanent magnet 40-1 located on one side of the fixture 10 has an inner diameter of N pole and an outer diameter of S pole, and on the other side. The second permanent magnet 40-2 located has an inner diameter of S pole and an outer diameter of N pole.

In this case, each of the permanent magnets 40-1 and 40-2 has a first installation groove 30a formed at the center of the outer circumferential surface thereof, and the first airtight ring 31 is formed in the housing 80 by the first installation groove 30a. It is installed in close contact with the inner circumferential surface of

The bearing 60 is a general ball bearing and the outer diameter and the inner diameter are fixed to the inner circumferential surface of the housing 80 and the outer circumferential surface of the rotating shaft 20, respectively, and the spacing holder 50 has a permanent magnet 40 and a bearing 60. ) Is installed between the permanent magnet 40 and the bearing 60 to be installed at a constant interval.

The housing 80 has a cylindrical shape as a whole and a space 89 is formed inward to support and protect the rotating shaft 20, the bearing 60, the permanent magnet 40, and the fixture 10, and the housing 80. ), And the flange 86 is formed with a plurality of bolt holes on one side.

In addition, a second installation groove 80a is formed between the bolt hole and the rotation shaft 20 on the outer surface of the flange 86, and a second hermetic ring 87 is installed, and the housing 80 opposite the flange 86 is provided. ) The closing cap 70 is screwed into the inlet.

Figure 4 is a cross-sectional view showing a second embodiment according to the rotating body having a vacuum hermetic structure according to the present invention, the same as the first embodiment is made of a rotating body having a vacuum hermetic structure, the fixture 10 and The permanent magnet 40 has a different structure.

That is, the outer diameter is in close contact with the inner circumferential surface of the housing 80, the fastener 10 having a coupling groove 10b formed in the inner diameter is coupled to the rotating shaft 20, formed in a ring shape and the height of the inner diameter is formed to be a fluid storage space A plurality of permanent magnets (40a) are fitted in the coupling groove (10b) of the fixture 10, the magnetic fluid 30 is filled in the fluid storage space (20a), the permanent magnet (40) ) And one side and the other side is formed differently to the N pole and the S pole.

At this time, the permanent magnet 40 is continuously fitted into the coupling groove (10b) of the fixture (10).

And, The fixture 10 has a third installation groove (10a) is formed at intervals on the outer peripheral surface, respectively, and the third airtight ring 11 is installed in close contact with the inner peripheral surface of the housing 80 by the third installation groove (10a). .

Figure 5 is a cross-sectional view showing a third embodiment according to the rotating body having a vacuum hermetic structure according to the present invention, the rotating body having a vacuum hermetic structure in the same configuration as the second embodiment, the coupling groove (10b) The pole and the pole of the permanent magnet 40 to be fitted to is configured differently.

That is, the outer diameter is in close contact with the inner circumferential surface of the housing 80, the fastener 10 having a coupling groove 10b formed in the inner diameter is coupled to the rotating shaft 20, formed in a ring shape and the height of the inner diameter is formed to be a fluid storage space A plurality of permanent magnets (40a) is inserted into the coupling groove (10b) of the fixture 10, the magnetic fluid 30 is filled in the fluid storage space (20a), the permanent magnet (40) ) Is continuously inserted into the pole and the pole of the inner diameter and the outer diameter different from each other.

At this time, the long permanent magnet 40-3 of the permanent magnet 40 formed by staggering the height of the inner diameter of the inner diameter is the N pole and the outer diameter is the S pole, the short permanent magnet 40-4 is the inner diameter This is S-pole, and outer diameter consists of N-pole.

6 is a cross-sectional view showing a fourth embodiment of a rotating body having a vacuum hermetic structure according to the present invention, in which a rotating body 1.2 and a linear moving body 3 having the above structure are combined into one.

That is, the first fixing sphere 14 is coupled to the rotating shaft 20 installed in the first housing 81, and the magnetic fluid 30 is filled on both sides of the rotating shaft 20 about the first fixing sphere 14. A fluid storage space (20a) consisting of a plurality of grooves in the form of a thread is formed so that the ring-shaped permanent magnets (40) are respectively coupled to the portion where the fluid storage space (20a) is formed, each permanent magnet (40) The N pole and the S pole are alternately coupled to each other to form a first rotating body (1).

Permanent magnet 40 installed on the first rotating body 1 is formed and installed so that the inner diameter is in close contact with the fluid storage space (20a) of the rotating shaft 20, each permanent magnet 40 is a pole and a pole Combined to cross each other. That is, the first permanent magnet 40-1 located on one side of the first fixture 14 has an inner diameter of N pole and an outer diameter of S pole, and the second permanent magnet 40-2 located on the other side has an inner diameter of S pole. And the outer diameter consists of N poles.

In addition, the outer diameter and the inner diameter are installed in close contact with the inner circumferential surface of the second housing 82 and the outer circumferential surface of the first housing 81, respectively, and a coupling groove 10b is formed between the inner diameter and the outer diameter, and the center of the coupling groove 10b is formed. In the part, the partition 18 is formed to protrude, and the second fixing tool 15 having the first coupling groove 10c and the second coupling groove 10d on both sides of the partition 18 is provided on the rotation shaft 20. The first and second coupling grooves of the second fixing tool 15 are coupled to each other, and have a plurality of permanent magnets 40 formed in a ring shape to have a fluid storage space 20a formed in a ring shape and staggered in height. Continuously inserted into (10c, 10d), the permanent magnet 40 is fitted to the first coupling groove (1c) both sides are formed differently to the N pole and S pole, and inserted into the second coupling groove (1d) The losing permanent magnet 40 has an inner diameter and an outer diameter different from the N pole and the S pole, and the magnetic fluid 30 is filled in the fluid storage space 20a so that the first magnet of the first rotating body 1 may be filled. It is to the housing 81 in the axial direction one side rotatably to the second rotating body (2) is coupled.

In addition, a third fixture 16 is formed such that the outer diameter is in close contact with the inner circumferential surface of the third housing 83 and the inner diameter has the receiving portion 19 between the rotating shaft 20, and the receiving portion 19 is permanent. Magnet 40 is coupled, the permanent magnet 40 is one side and the other side is formed differently to the N pole and the S pole is inserted into the rotary shaft 20 continuously, the height of the inner diameter to form a fluid storage pipe ( 20a) is formed, and the magnetic fluid 30 is filled in the fluid storage space (20a) to the linear movement through the linear bearing (3-1) with a linear bearing on the outer circumferential surface of the second housing 82 The moving body 3 is coupled.

At this time, a first installation groove (30a) is formed on the outer circumferential surface of the permanent magnet 40 of each of the first rotating body (1) and the first hermetic ring (31) to the first installation groove (30a) the first housing ( 81 is installed to be in close contact with the inner circumferential surface, the third fixing groove (10a) is formed on the outer circumferential surface of the second fixing tool (15) of the second rotating body (2), respectively, and the third mounting groove (10a) A third hermetic ring 11 is installed, and is formed between the bolt hole and the rotating shaft 20 on the outer surface of the flange 86 of each of the first rotating body 1, the second rotating body 2, and the linear moving body 3. The second installation groove 80a is formed to install the second hermetic ring 87.

In addition, one side of the rotating shaft 20 of the first rotating body 1 is coupled to the power transmission unit 90 and the other side is connected and installed to the clean room 100, and the second rotating body 2 and the linear moving body ( 3) is connected and installed with a separate power transmission unit (not shown) to operate.

On the other hand, in the rotary shaft 20 of the first rotating body 1 and the second rotating body 2, as in the first embodiment, the spacer 50 and the bearing 60 are provided on both sides of the permanent magnet 40. It is installed in sequence, the linear movable body 3 is installed on both sides of the permanent magnet 40, only the linear bearing (3-1), one side of each housing (81, 82, 83), that is, the opposite side of the flange 86 Closing caps 70 are screwed into the inlets of the housings 81, 82, 83.

In addition, the housings 81, 82, 83, the bearing 60, and the spacing holder 50 of the first rotating body 1, the second rotating body 2, and the linear moving body 3 are coated with ceramic. The ceramic coated housings (81, 82, 83) can improve the flow of fluid, minimize the sliding and frictional heat, can be used in chemical and special environments, and the outer circumferential surface of the second rotating body (2) It is coated.

Referring to the state of use of the rotating body having a vacuum hermetic structure according to the present invention having such a configuration as follows.

The present invention By combining permanent magnets on the rotating shaft and forming a fluid storage space to fill the magnetic fluid, magnetic force is generated through the permanent magnet to form a barrier inside, and while the rotating shaft rotates, the magnetic shaft surrounds the rotating shaft and generates magnetic force to block the membrane. Since it is more firmly formed, it is possible to prevent mechanical dust or contaminated external air from entering the clean room through the power transmission unit.

1 to 3, in order to install the present invention, first, one end of the rotating shaft 20 is connected and coupled to the power transmission unit 90 on the output side, and the other end is the clean room 100 (semiconductor) on the input side. Production equipment).

In this state, when the power of the power transmission unit 90 is operated, as the rotary shaft 20 of the first rotating body 1 rotates, magnetic force is generated in the magnetic fluid 30 in which the metal powder is mixed, so that a film is firmly formed. Confidentiality can be maintained.

That is, since permanent magnets 40 are coupled to both sides of the fixture 10 coupled to the rotating shaft 20 to generate magnetic force, respectively, a film is formed first. In this state, the power transmission unit 90, When the motor is operated, the rotating shaft 20 rotates to one side, and the secondary membrane is firmly formed by the magnetic force of the magnetic fluid 30 filled in the fluid storage space 20a, so that the machine connected to the dust of the motor itself or to one side of the motor. By completely blocking the inflow of dust or contaminated external air on the rotary shaft 20 can prevent the product from being contaminated.

In particular, the first permanent magnet 40-1 located on one side of the fixture 10 has an inner diameter of N pole and an outer diameter of S pole, and the second permanent magnet 40-2 located on the other side has an inner diameter of S pole. The outer diameter is made of N poles to surround the rotating shaft 20 to generate a magnetic force can be maintained more tightly airtight.

At this time, the first hermetic ring 31 coupled to the permanent magnet 40 maintains the airtight between the permanent magnet 40 and the housing 80.

In addition, the bearing 60 installed at a predetermined distance apart from the fixing member 10 and the spacing member 50 may be rotated at the same time as the inner and outer rings are fixed to the rotating shaft and the inner circumferential surface of the housing 80 to support the shaft. .

In addition, a second hermetic ring 87 is installed on the outer surface of the flange 86 so that the airtightness with the power transmission unit 90 can be more firmly maintained.

As in the second embodiment of Figure 4, it has the same effect as the first embodiment, A plurality of permanent magnets 40 having a fluid storage space 20a are inserted into the coupling grooves 10b of the fixture 10 by being formed in a ring shape and having a height of the inner diameter staggered, and the fluid storage space 20a. The magnetic fluid 30 is filled in, but the permanent magnet 40 is formed on both sides of the N pole and the S pole differently inserted into the rotary shaft 20, the rotor 1 is the permanent magnet 40 and Not only is the gas tightly made through the magnetic fluid 30, but in particular, the magnetism of the permanent magnet 40 can be formed without breaking, so that the airtightness can be more efficiently maintained.

At this time, the permanent magnet 40 is formed by varying the height of the inner diameter to form a fluid storage space (20a) and filling the magnetic fluid 30 in the fluid storage space (20a) by the magnetic fluid without the outside or mixing with the neighbors Can be stored.

As shown in the third embodiment of FIG. 5, the third permanent magnet 40-3 having a long length is formed in the same manner as in the second embodiment, but the permanent magnet 40 having the height of the inner diameter staggered. The fourth permanent magnet 40-4 having an N pole, an outer diameter of S pole, and a short length has an inner diameter of S pole and an outer diameter of N pole, and the rotor 1 is formed of each permanent magnet as described above. 40-3, 40-4) and the magnetic fluid 30 to generate a strong magnetic force can be maintained by airtight.

As in the fourth embodiment of FIG. 6, the second rotating body 2 is rotatably coupled with the first rotating body 1 as an axis, and the linear bearing 3 is attached to the second rotating body 2. 1) The linear moving body 3 is installed to enable the linear movement through each of the rotating bodies 1 and 2 and the linear moving body 3 are connected and installed to each other to operate through each power transmission unit, and at the same time tightly sealed. Can be maintained.

That is, among the permanent magnets 40 installed in the first rotating body 1, the first permanent magnet 40-1 has an inner diameter of N pole and an outer diameter of S pole, and the second permanent magnet 40-2. The inner diameter is the S pole and the outer diameter is the N pole, and the plurality of permanent magnets 40 are installed in the first coupling groove 10c of the second rotating body 2 and the receiving portion 19 of the linear moving body 3. ) Is formed on both sides of the N pole and the S pole differently, the plurality of permanent magnets 40 installed in the second coupling groove (10d) is formed in the inner diameter and the outer diameter are different in the N pole and S pole, respectively The magnetic fluid 30 is filled in the fluid storage space 20a to generate magnetic force through the permanent magnet 40, and at the same time, the magnetic force is generated in the magnetic fluid 30 while the rotating shaft 20 rotates. Since it is formed more firmly, it is possible to prevent mechanical dust or contaminated external air from entering the clean room 100 through the power transmission unit 90.

Claims (4)

In the rotating body having a vacuum-tight structure to couple the permanent magnet to the rotating shaft coupled to the housing and having a magnetic fluid to maintain the airtight through the magnetic force generated in the magnetic fluid and permanent magnet, The fixture 10 is coupled to the rotating shaft 20, and a plurality of grooves are continuously formed on both outer surfaces of the rotating shaft 20 about the fixture 10 to form a fluid storage space 20a, and the fluid storage space. The magnetic fluid 30 is filled in the 20a, and the permanent magnets 40 in a ring form are respectively installed in the fluid storage space 20a, and the permanent magnets 40 are the N pole and the S pole. Rotating body having a vacuum hermetic structure, characterized in that the mutually coupled to each other. In the rotating body having a vacuum-tight structure to couple the permanent magnet to the rotating shaft coupled to the housing and having a magnetic fluid to maintain the airtight through the magnetic force generated in the magnetic fluid and permanent magnet, The outer diameter is in close contact with the inner circumferential surface of the housing 80 and the fastener 10 having a coupling groove 10b formed in the inner diameter is coupled to the rotating shaft 20, is formed in a ring shape and the height of the inner diameter is staggered fluid storage space (20a) A plurality of permanent magnets 40 are fitted into the coupling groove 10b of the fixture 10, and the magnetic fluid 30 is filled in the fluid storage space 20a, but the permanent magnet 40 is A rotating body having a vacuum hermetic structure, characterized in that both sides are formed differently to the N pole and the S pole. The method of claim 2, Permanent magnet 40 is a rotor having a vacuum hermetic structure, characterized in that the inner diameter and the outer diameter is formed differently to the N pole and the S pole. In the rotating body having a vacuum-tight structure that couples the permanent magnet to the rotating shaft installed in the housing and has a magnetic fluid to maintain the airtight through the magnetic force generated in the magnetic fluid and permanent magnet, The first fixture 14 is coupled to the rotating shaft 20 installed in the first housing 81, and the fluid storage so that the magnetic fluid 30 is filled on both sides of the rotating shaft 20 about the first fixture 14. A space 20a is formed, and ring-shaped permanent magnets 40 are respectively coupled to the fluid storage space 20a, and the permanent magnets 40 are coupled so that the N pole and the S pole are crossed with each other. A first rotating body (1) made up of; The outer diameter and the inner diameter are installed in close contact with the inner circumferential surface of the second housing 82 and the outer circumferential surface of the first housing 81, respectively, and a coupling groove 10b is formed between the inner diameter and the outer diameter, and a central portion of the coupling groove 10b is provided. The partition 18 is protruded so that the second fixing tool 15 having the first coupling groove 10c and the second coupling groove 10d on both sides of the partition 18 is coupled to the rotation shaft 20. , Made of a ring shape and the height of the inner diameter are staggered so that a plurality of permanent magnets 40 having a fluid storage space 20a are formed in the first and second coupling grooves 10c and 10d of the second fixing tool 15. Continuously inserted, the permanent magnet 40 is inserted into the first coupling groove (1c) is formed on both sides of the N pole and S pole differently, the permanent magnet 40 is fitted into the second coupling groove (1d) The inner and outer diameters are formed to be different from the N pole and the S pole, and the magnetic fluid 30 is filled in the fluid storage space 20a so that the first housing 81 of the first rotating body 1 is the axis. One side A second rotatable body (2) rotatably coupled inward direction; A third fixture 16 is formed such that the outer diameter is in close contact with the inner circumferential surface of the third housing 83, and the inner diameter has the receiving portion 19 between the rotating shaft 20, and the permanent magnet ( 40 is coupled, the permanent magnet 40 is formed on both sides of the N pole and the S pole differently and the height of the inner diameter is formed to form a fluid storage pipe (20a), the fluid storage space (20a) A vacuum characterized in that it consists of a linear moving body (3) made of a magnetic fluid (30) to be filled is coupled to the linear movement through the linear bearing (3-1) to the outer peripheral surface of the second housing (82) as an axis Rotating body having airtight structure.