CN104948744A - Ultrahigh vacuum magnetic fluid seal transmission device - Google Patents
Ultrahigh vacuum magnetic fluid seal transmission device Download PDFInfo
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- CN104948744A CN104948744A CN201510388698.3A CN201510388698A CN104948744A CN 104948744 A CN104948744 A CN 104948744A CN 201510388698 A CN201510388698 A CN 201510388698A CN 104948744 A CN104948744 A CN 104948744A
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- magnetic fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
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- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention discloses an ultrahigh vacuum magnetic fluid seal transmission device. The ultrahigh vacuum magnetic fluid seal transmission device comprises a shell, a seal assembly and bearings; the seal assembly comprises a main shaft, a permanent magnet, a first magnetic pole, a second magnetic pole and magnetic fluid, wherein the first magnetic pole and the second magnetic pole are arranged at the two sides of the permanent magnet, the magnetic fluid is arranged between the main shaft and the first magnetic pole and/or the second magnetic pole, and the seal assembly is arranged between the ultrahigh vacuum side and all the bearings; a first seal type cavity is arranged on the contact surface between the first magnetic pole and a flange of the shell, a first metal sealing gasket is arranged in the first seal type cavity, and after the first metal sealing gasket is compressed to be deformed by the axial force between the flange and the first magnetic pole, the flange and the first magnetic pole are sealed. The ultrahigh vacuum magnetic fluid seal transmission device has the advantages of being stable in seal, high in limiting vacuum, low in leak rate, low in gas permeability, large in pumping rate and free of vacuum pollution.
Description
Technical field
The present invention relates to Magneticfluid Seal Technique field, particularly relate to a kind of ultrahigh vacuum magnetic fluid seal driving device.
Background technique
Magneticfluid Seal Technique just grows up after this brand-new functional material of magnetic fluid occurs.Early 1960s, US National Aeronautics and Space Administration is the supplementary question solving liquid fuel under the vacuum seal of suit and space zero gravity state, develops magnetic fluid.This functional material of occurring as an additional achievement of U.S. spaceflight research at that time, progressively found that there is many application parts afterwards, as the precious metal in mining and metallurgy reclaim, Used in Boundary Lubrication of Magnetic Fluids in machine-building and grinding, and bio-separation in biomedicine popular in the recent period, biologically and medical to detect, all achieve many very important scientific achievements and industrial utility value in disease diagnosis and therapy.In addition, the sealing of important mechanical rotation portion is also applied to; To the sealing of dust and mist of oil in hard disc of computer storage; To the sealing of radioactive air in atomic power device; Sealing for preventing bacterium to be mixed into during fermenting tub stirs; Sealing under the superelevation such as vacuum coater, vacuum heat treatment furnace, monocrystaline silicon stove and extra high vacuum condition and reactor, blower fan, air pump etc. are for sealing under pressure differential etc., especially the dynamic leakage preventive portion as equipment in rotating shaft has outstanding superiority, both leakproof object can be reached, do not affect again the motion of movable member, so the application area of Magneticfluid Seal Technique is more and more wider.
Fig. 1 is the schematic diagram of the first typical magnetic fluid seal driving device of the prior art, as shown in Figure 1, black box is formed by a permanent magnet 106, two magnetic poles 107, running shaft 101 and magnetic fluids 108, sealing assembly is arranged in housing 103, and magnetic shield 105 is set at the edge of magnetic pole 107, be used for isolated magnetic field, avoiding bearing 104 to be magnetized, and playing the effect of axially locating; Bearing 104 is used for ensureing that running shaft 101 rotates, and ensures the consistent of seal clearance shown in figure " δ "; Static seal O RunddichtringO 102 is used for ensureing that gas is not revealed from the matching gap between magnetic pole 107 and housing 103; Bearing cap 109 is fixed on housing 103 end face by screw 110, and carries out axially locating to above-mentioned part, prevents part axial from moving.Because the N-S pole of permanent magnet 106 in this device is by axial distribution and two magnetic poles 107 and running shaft 101 are made up of permeability magnetic material, therefore, under magnetic fields, as shown in Fig. 1 Middle Ring Line, define multiple closed magnetic circuit, this closed magnetic path is formed along the interval rotating shaft surface of N-S.From figure, it can also be seen that to there is gap delta between two magnetic poles 107 and running shaft 101, this gap δ is around the cylindrical of running shaft, distribute in the form of a ring, define the air gap of magnetic circuit, because the magnetic intensity in the air gap of magnetic field magnetic circuit is maximum, therefore the magnetic fluid 108 with superparamagnetic characteristic is injected therebetween, under magnetic fields, magnetic fluid 108 steadily is adsorbed and is full of the gap between running shaft 101 and magnetic pole 107, achieves the separation to magnetic field two end spaces, is formed and seals reliably.
Fig. 2 is the schematic diagram of the typical magnetic fluid seal driving device of the second of the prior art, as shown in Figure 2, this device is identical with most of parts of the first magnetic fluid seal driving device above-mentioned, distinguish as follows: first, what this device adopted is spiral cover 209, and the cylindrical of spiral cover 209 has screw thread, also has the screw thread matched with it in housing 203 endoporus simultaneously, spiral cover 209 is screwed in housing 203 by threaded engagement, plays fixing effect; The second, the cylindrical of each magnetic pole 207 arranges 2 grooves for mounting O-shaped seal ring 202, and two slots are in the both sides of cooling bath 2071, and is provided with warter connection 210 in the position that the cylindrical of housing 203 is corresponding with cooling bath 2071.O RunddichtringO 202 not only isolated gas passes through from the matching gap of magnetic pole 207 and housing 203, prevents cooling bath 2071 inner cooling water from spilling simultaneously.This kind of magnetic fluid seal driving device, owing to realizing cooling by inside, thus can be used for the place that temperature is higher.
But above-mentioned two kinds of magnetic fluid seal driving devices are also applicable to lower than 1 × 10
-5the ultra-high vacuum environment of Pa, limits its application.On the one hand, the rubber o-ring seal ring used due to it has relatively high gas permeation rate usually, therefore be not suitable in the sealing of ultrahigh vacuum, and ultrahigh vacuum equipment all needs the high-temperature baking degasification carrying out about 400 DEG C for a long time, this high temperature easily makes rubber produce residual deformation, accelerate ageing of rubber, affect sealability; In addition, rubber at normal temperatures and pressures long-term storage or in a vacuum use can agingly gradually to become fragile, thus cause seal failure, and rubber seal also exists the problem of matter damage under vacuum conditions, namely along with the forfeiture of filler and volatile component, its quality can be made to reduce gradually, and when matter damage has exceeded initial decrement, namely rubber seal has lost sealability; On the other hand, from the structure of above-mentioned two kinds of devices, bearing is between the black box that vacuum cavity and O RunddichtringO, permanent magnet, magnetic pole, magnetic fluid form, and there is volatilization phenomenon in the lubricating grease in bearing under vacuum or high temperature, not only can cause bearing premature breakdown due to insufficient lubrication, meanwhile, lubricating grease volatile matter also can pollute vacuum environment, has influence on the acquisition of ultrahigh vacuum.
Summary of the invention
For solving the problem, the invention provides a kind of ultrahigh vacuum magnetic fluid seal driving device, so that the seal ring that can solve existing for current magnetic fluid seal driving device easily lost efficacy, and the easy contaminated problem of vacuum environment.
For achieving the above object, technological scheme provided by the invention is as follows:
A kind of ultrahigh vacuum magnetic fluid seal driving device, comprises housing, black box and bearing; Described black box comprises main shaft, permanent magnet, the first magnetic pole being arranged at described permanent magnet both sides and the second magnetic pole, be arranged at magnetic fluid between described main shaft and described first magnetic pole and/or the second magnetic pole, and:
Described black box is arranged between ultra-high vacuum environment side and whole described bearing;
The surface of contact of the flange of described first magnetic pole and described housing is provided with the first sealing die cavity, the first metallic gasket is provided with in described first sealing die cavity, described first metallic gasket forms static seal with the flange of described housing and described first magnetic pole after being compressed distortion by the axial force between the flange of described housing and described first magnetic pole.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, the flange other end of described housing is also provided with the second half cavitys, and the second half cavitys that the second half cavitys described in this can be offered with the mounting flange on equipment fasten formed to seal with described first die cavity identical second seal die cavity, the second metallic gasket is provided with in described second sealing die cavity, described second metallic gasket forms static seal with the mounting flange on the flange of described housing and described equipment after being compressed distortion by axial force.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described first metallic gasket and described second metallic gasket are oxygen free copper sealing gasket or alumiseal pad.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, also there is in the space that described main shaft and described first magnetic pole are formed the magnetic pole tooth of multiple axial distribution along described main shaft, and described magnetic pole tooth is opened on the cylindrical of described main shaft, or on described first magnetic pole, and each described magnetic pole tooth is in the axial raised closed hoop towards described main shaft.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described magnetic fluid is only filled in the space that described main shaft and described first magnetic pole formed.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, also comprise the cooling annular groove be opened on described first magnetic pole cylindrical, the described housing position corresponding with described cooling annular groove is provided with circumferentially uniform cooling water connector, and the contact position of described first magnetic pole cylindrical or end face and housing is provided with O type rubber seal or metal o-ring for preventing cooling water leakage.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, also comprise the annular cooling chamber be opened in the middle part of described first magnetic pole, and the opening of described annular cooling chamber is towards the flange of described housing, described first sealing die cavity comprises two, and two described first seal the both sides that die cavity lays respectively at the opening of described annular cooling chamber, and be all built-in with described first metallic gasket, the cooling water passage for communicating with the opening of described cooling chamber is offered in the flange of described housing, and the circumference of the flange of described housing is evenly provided with cooling water connector.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described main shaft cylindrical also offers the magnetic pole tooth corresponding with described second magnetic pole, and described magnetic fluid is filled in described main shaft and described first magnetic pole, and in the space that formed of described main shaft and described second magnetic pole.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, the periphery of described second magnetic pole also offers circular groove, the O type rubber seal for sealing described housing and described second magnetic pole surface of contact is installed in described circular groove.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described bearing at least comprises two, Magnetic isolation cover is provided with between described second magnetic pole and adjacent bearing, arbitrary neighborhood two described bearings are also separated by Magnetic isolation cover, for being threaded with described housing to the bearing (ball) cover of described bearing axial compression, or by screw and described housing affixed.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described first magnetic pole and described second magnetic pole are integral type magnetic pole, and in the middle part of the cylindrical of described integral type magnetic pole, offer permanent magnet accommodation annular groove, and described permanent magnet is embedded and holds in annular groove at described permanent magnet.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, the flange of described housing and described housing are split-type structural, and both are bolted, the surface of contact of described housing and described first magnetic pole is provided with ladder surface, and described ladder surface is used for applying towards the axial force of the flange of described housing described first magnetic pole.
Preferably, in above-mentioned ultrahigh vacuum magnetic fluid seal driving device, described bearing at least comprises two, Magnetic isolation cover is provided with between described second magnetic pole and adjacent bearing, arbitrary neighborhood two described bearings are also separated by Magnetic isolation cover, and are positioned at the round nut axially locating of bearing by being connected with described spindle thread of end.
Also disclose another ultrahigh vacuum magnetic fluid seal driving device in the present invention, comprise housing, black box and bearing; Described black box comprises main shaft, permanent magnet, the first magnetic pole being arranged at described permanent magnet both sides and the second magnetic pole, be arranged at magnetic fluid between described main shaft and described first magnetic pole and/or the second magnetic pole, and:
Described black box is arranged between ultra-high vacuum environment side and whole described bearing;
Described first magnetic pole is made up of the flange of described housing, and the side that the flange of described housing is used for connecting with the mounting flange of equipment is provided with half cavity, half cavity described in this can form complete seal die cavity with half cavity that arranges on the mounting flange of described equipment, metallic gasket is provided with in described complete seal die cavity, described metallic gasket forms static seal with the flange of described housing and the mounting flange of described equipment after being compressed distortion by axial force.
As can be seen from technique scheme, the black box of ultrahigh vacuum magnetic fluid seal driving device provided by the invention is arranged between ultrahigh vacuum side and whole bearings, namely bearing has been in the outside of ultra-high vacuum environment, the lubricant oil volatilized in bearing cannot enter into ultrahigh vacuum side, thus solve the easy contaminated problem of ultra-high vacuum environment, the end face of flange of the first magnetic pole and housing is provided with the first metallic gasket simultaneously, after first metallic gasket is compressed distortion by the axial force between flange and the first magnetic pole, by flange and the sealing of the first magnetic pole, also seal by between housing and black box, metallic gasket adopts the good metal of ductility to be made usually, its gas permeability is low, high temperature resistant, and the matter that there is not rubber seal damages problem, the ultimate vacuum that not only can meet ultra-high vacuum environment is high, leak rate is low, gas permeability is low, the speed of exhaust is fast, without requirements such as vacuum pollutions, long-time sealing reliably can also be ensured.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments of the invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
Fig. 1 is the schematic diagram of the first typical magnetic fluid seal driving device of the prior art;
Fig. 2 is the schematic diagram of the typical magnetic fluid seal driving device of the second of the prior art;
The schematic diagram of the first ultrahigh vacuum magnetic fluid seal driving device that Fig. 3 provides for the embodiment of the present application;
The schematic diagram of the second ultrahigh vacuum magnetic fluid seal driving device that Fig. 4 provides for the embodiment of the present application;
The schematic diagram of the third ultrahigh vacuum magnetic fluid seal driving device that Fig. 5 provides for the embodiment of the present application;
The schematic diagram of the 4th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 6 provides for the embodiment of the present application;
The schematic diagram of the 5th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 7 provides for the embodiment of the present application;
The schematic diagram of the 6th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 8 provides for the embodiment of the present application;
The schematic diagram of the 7th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 9 provides for the embodiment of the present application;
The schematic diagram of the 8th kind of ultrahigh vacuum magnetic fluid seal driving device that Figure 10 provides for the embodiment of the present application;
The schematic diagram of the 9th kind of ultrahigh vacuum magnetic fluid seal driving device that Figure 11 provides for the embodiment of the present application.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technological scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The first ultrahigh vacuum magnetic fluid seal driving device that the embodiment of the present application provides as shown in Figure 3, in figure 3, left side represents ultra-high vacuum environment side, right side represents atmosphere environment side, this transmission device comprises housing, black box and bearing, wherein black box comprises main shaft, permanent magnet, be arranged on the first magnetic pole of permanent magnet both sides and the second magnetic pole and be arranged on the magnetic fluid between main shaft and the first magnetic pole and/or the second magnetic pole, the meaning represented by "and/or" in the present embodiment is at main shaft and the first magnetic pole, and all can be filled with magnetic fluid in the gap that formed of main shaft and the second magnetic pole, also magnetic fluid can be filled with in any one gap, black box is arranged between ultra-high vacuum environment side and whole bearings, as shown in Figure 3, the surface of contact of the flange of the first magnetic pole and housing is provided with the first sealing die cavity, the first metallic gasket is provided with in the first sealing die cavity, first metallic gasket forms static seal with the flange of housing and the first magnetic pole after being compressed distortion by the axial force between the flange of housing and the first magnetic pole.
More specifically product, please refer to Fig. 3, the schematic diagram of the first ultrahigh vacuum magnetic fluid seal driving device that Fig. 3 provides for the embodiment of the present application.This kind of ultrahigh vacuum magnetic fluid seal driving device is made up of main shaft 301, first metallic gasket 302, housing 303, first magnetic pole 3071, second magnetic pole 3072, Magnetic isolation cover 305, bearing 304, permanent magnet 306, bearing (ball) cover 309, screw 310, O RunddichtringO 311, magnetic fluid 308 and circlip for shaft 312.
Wherein, main shaft 301, permanent magnet 306, be arranged at described permanent magnet both sides the first magnetic pole 3071, second magnetic pole 3072, be arranged at described main shaft and the magnetic fluid 308 between described first magnetic pole 3071 and the second magnetic pole 3072 forms black box jointly, black box is arranged at ultrahigh vacuum side and all between bearing 304; The surface of contact of the flange of the first magnetic pole 3071 and housing 303 is provided with the first sealing die cavity, the first metallic gasket 302 is provided with in first sealing die cavity, first metallic gasket forms static seal with flange and the first magnetic pole 3071 after being compressed distortion by the axial force between flange and the first magnetic pole 3071.
As shown in FIG., first sealing die cavity the first half cavitys be opened in by symmetry on the end face of flange of the first magnetic pole 3071 side and housing fasten and are formed, and the first sealing die cavity comprises rectangle ring cavity, and the dovetail ring cavity to connect with rectangle ring cavity, the small end of described dovetail ring cavity connects with rectangle ring cavity, as shown in Figure 3, flange inclined-plane 3031 on end face of flange can form the first sealing die cavity with the pole face bevel 30711 on the first magnetic pole, the thickness of the first metallic gasket is greater than the Extreme breadth in the first sealing die cavity, so that the first metallic gasket generation deformation can be made after applying axial force, the sharp corner of dovetail ring cavity is by embedding first metallic gasket, thus form reliable static seal.
In order to optimize the technological scheme in above-described embodiment further, the other end of the flange of housing is also provided with identical with the first half cavity geometries on the first magnetic pole the second half cavitys, and the second half cavitys that the second half cavitys on flange can be offered with the mounting flange on equipment fasten formation second and seal die cavity, mounting flange side on equipment is inlet side, opposite side is atmospheric side, the second metallic gasket is provided with in second sealing die cavity, after second metallic gasket is compressed distortion by the axial force between the mounting flange on the flange of housing and described equipment, by the flange of housing and inlet side sealing, second sealing die cavity and first seals the shape of die cavity, constituted mode and inside, and to fill out the metallic gasket established all same or similar, contrasts and no longer carry out repeated description in the embodiment of the present invention.
In the present embodiment, on main shaft cylindrical, or the endoporus of the first magnetic pole also offers multiple magnetic pole tooth 3011, magnetic pole tooth 3011 is along the axial distribution of main shaft, magnetic fluid 308 is filled in main shaft 301 and the first magnetic pole 3071, and/or in the space that formed of main shaft 301 and the second magnetic pole 3072, positioning step 3012 and circlip for shaft 312 can realize bearing location in the axial direction, first metallic gasket 302 is low by gas permeation rate, high temperature resistant, the oxygen free copper that ductility is good, the materials such as aluminium are formed, the static seal between the first magnetic pole 3071 and housing 303 is ensured after installation, housing 303 can play location, certralizing ability to all inner bodies.Further, the periphery of the second magnetic pole 3072 also offers circular groove, mounting O-shaped rubber seal 311 in groove; Because the first magnetic pole 3071, second magnetic pole 3072 and main shaft 301 are by permeability magnetic material manufacture, and the endoporus of the first magnetic pole 3071, second magnetic pole 3072 is slightly larger than the cylindrical of main shaft 301, form seal clearance after installation, the fixed magnetic field of permanent magnet 306 forms magnetic loop along the first magnetic pole 3071, second magnetic pole 3072 and main shaft 301; When magnetic fluid 308 is added seal clearance, magnetic fluid 308 is bound in seal clearance along the magnetic line of force, not with the impact of the external force such as pressure reduction, gravity, thus reaches the usefulness of sealing.
Magnetic isolation cover 305 is manufactured by non-magnet_conductible material, not only can to weaken on the second magnetic pole 3072 magnetic field to the impact of bearing 304, axially locating effect can be played to each mounting parts in housing 303 endoporus simultaneously, bearing 304 pairs of main shafts 301 play radial location effect, ensure main shaft 301 flexible rotating and and the first magnetic pole 3071, second magnetic pole 3072 endoporus between gap uniformity.Bearing (ball) cover 309 plays axially locating effect to each part be loaded in housing 303 endoporus.End cap 309 not only can be made to be fixed on housing 303 by tightening screw 310, simultaneously axial compression can be loaded on each part in housing 303, by sealing gasket 302 compressive strain, making it play seal action.
Those skilled in the art it is easily understood that, main shaft and the first magnetic pole, and magnetic pole tooth all can be offered in the gap formed between main shaft and the second magnetic pole, or only offer magnetic pole tooth in a gap wherein, this several scheme all can meet the filling requirement of magnetic fluid in gap, a kind of embodiment is additionally provided in the present invention, as shown in Figure 4, the schematic diagram of the second ultrahigh vacuum magnetic fluid seal driving device that Fig. 4 provides for the embodiment of the present application, it should be noted that, when understanding the present embodiment, should carry out with reference to the first embodiment, the both sides of ultrahigh vacuum magnetic fluid seal driving device permanent magnet 406 disclosed in the present embodiment are respectively arranged with the first magnetic pole 4071 and the second magnetic pole 4072, bearing 404 specifically comprises two, and between bearing 404 and the second magnetic pole 4072 and be provided with Magnetic isolation between two bearings 404 and overlap 405, the cylindrical of main shaft has only offered magnetic pole tooth in the position corresponding with the first magnetic pole 4071, and be the position that the second magnetic pole 4072 is corresponding is not offered magnetic pole tooth, the cylindrical of simultaneously the second magnetic pole 4072 does not offer circular groove, O RunddichtringO is not set yet, but still there is gap between the second magnetic pole 4072 and main shaft, not annotate in this gap magnetic fluid 408, this gap only plays the effect forming magnetic loop, the axially locating of main parts on shaft adopts round nut 411 simultaneously, round nut 411 is threaded with the relevant position of main shaft, to lock each part be arranged on main shaft, eliminate the axial float of each part, the simultaneously play of also adjustable bearing 404, bearing (ball) cover 409 is arranged on housing by screw 410.
Please refer to Fig. 5, the schematic diagram of the third ultrahigh vacuum magnetic fluid seal driving device that Fig. 5 provides for the embodiment of the present application, it should be noted that, when understanding the present embodiment, should carry out with reference to the second embodiment, the feature identical with the second embodiment, no longer carries out repeated description in the present embodiment.
Improvement is proposed for the constituted mode of permanent magnet 506, first magnetic pole and the second magnetic pole in the present embodiment, in the present embodiment, first magnetic pole and the second magnetic pole are integral type magnetic pole 507, and in the middle part of the cylindrical of this integral type magnetic pole 507, offer permanent magnet hold annular groove, permanent magnet is embedded and holds in annular groove at permanent magnet, permanent magnet holds the base diameter 2.5mm-3mm larger than the outer dia of main shaft magnetic pole tooth of annular groove, and permanent magnet accommodation annular groove makes open top or closed form all can meet the demands.
In order to optimize the technological scheme in above-described embodiment further, so that the requirement under making ultrahigh vacuum magnetic fluid seal driving device disclosed in the present invention meet hot environment, also improvement is proposed to scheme in the present embodiment, it should be noted that, when understanding the present embodiment, should carry out with reference to the second embodiment, the feature identical with the second embodiment, in the present embodiment, no longer carry out repeated description.
Please refer to Fig. 6, the schematic diagram of the 4th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 6 provides for the embodiment of the present application.The first magnetic pole 6071 in the present embodiment and the second magnetic pole 6072 are arranged on the both sides of permanent magnet 606 equally, and on the cylindrical of the first magnetic pole 6071, be also provided with cooling annular groove 60712 and circular groove, and the position corresponding with cooling annular groove 60712 at housing is provided with the cooling water connector 614 be uniformly distributed circumferentially, cooling water connector 614 preferably 2 (only illustrating one in figure), O type rubber seal 613 is provided with, so that seal up the cooling water in cooling annular groove 60712 in circular groove.The sealing of cooling annular groove 60712 inner cooling water is also completed by metallic gasket, as in Fig. 9 and Figure 10 to the sealing cooling annular groove.Owing to can cool while ultrahigh vacuum magnetic fluid seal driving device busy disclosed in the present embodiment, thus it can meet the application in higher temperature occasion.
In addition, the embodiment of the present invention additionally provides the vacuum magnetic fluid seal driving device required under another can meet hot environment, please refer to Fig. 9, the schematic diagram of the 7th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 9 provides for the embodiment of the present application, it should be noted that, when understanding the present embodiment, should carry out with reference to the 4th embodiment, the feature identical with the 4th embodiment, no longer carries out repeated description in the present embodiment.
In the present embodiment, the both sides of permanent magnet 1006 are respectively arranged with the first magnetic pole 10071 and the second magnetic pole 10072, the middle part of the first magnetic pole 10071 is also provided with annular cooling chamber 100711, and the opening of annular cooling chamber 100711 is towards flange, first sealing die cavity specifically comprises two, as shown in the figure, and two first sealing die cavities lay respectively at the both sides of annular cooling chamber 100711 opening, namely the opening of annular cooling chamber 100711 is just between two first sealing die cavities, two first sealing die cavities are all built-in with the first metallic gasket, offer the cooling water passage 10132 for communicating with the opening of annular cooling chamber 100711 in flange simultaneously, and the circumference of flange is evenly provided with cooling water connector 1014, cooling water connector 1014 preferably 2 (only illustrating one in figure).
And in the present embodiment, the flange of housing and housing are split-type structural, and both are connected by screw 1012, the surface of contact of housing and the first magnetic pole 10071 is provided with ladder surface, and ladder surface is used for applying towards the axial force of flange to the first magnetic pole 10071, compression between such first magnetic pole 10071 and flange no longer needs the bearing (ball) cover of low order end or round nut to complete, but is completed by the screw 1012 between flange and housing.
As shown in Figure 10, the schematic diagram of the 8th kind of ultrahigh vacuum magnetic fluid seal driving device that Figure 10 provides for the embodiment of the present application, with the 7th kind of embodiment's difference be, in this embodiment, annular cooling chamber 110712 is formed jointly by the first magnetic pole 11071 and flange, and the position of two the first metallic gaskets is also corresponding there occurs change, the cooling water in annular cooling chamber 110712 can be sealed up, simultaneously, also the cooling water passage 11132 for communicating with the opening of annular cooling chamber 110712 is provided with in flange, and the circumference of flange is evenly provided with cooling water connector 1114, cooling water connector 1114 preferably 2 (only illustrating one in figure).
Please refer to Fig. 7 and Fig. 8, wherein the schematic diagram of the 5th kind of ultrahigh vacuum magnetic fluid seal driving device that provides for the embodiment of the present application of Fig. 7, the schematic diagram of the 6th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 8 provides for the embodiment of the present application.
These two embodiments should carry out with reference to the second embodiment, and the feature identical with the second embodiment, no longer carries out repeated description in the present embodiment.Flange and the housing 703 of embodiment's middle shell 703 itself all adopt split-type structural, and both are bolted, as shown in Figure 7, shoulder hole 7031 is offered in housing 703, ladder surface on shoulder hole 7031 is used for applying towards the axial force of flange to the first magnetic pole 7071, by arranging shoulder hole 7031, the endoporus of housing 703 has been divided into two sections and has exerted pressure, position, right side is by spiral cover axial compression, and left part is exerted pressure to the first metallic shim with the screw 712 of flange by connecting housing 703.
Please refer to Fig. 8, the schematic diagram of the 6th kind of ultrahigh vacuum magnetic fluid seal driving device that Fig. 8 provides for the embodiment of the present application, in the present embodiment, be not arrange shoulder hole with the difference of the 5th embodiment, but by the endoporus installing the first magnetic pole 8071 in housing 803 is strengthened, its internal diameter is made to be greater than the endoporus of installation second magnetic pole, thus form shaft shoulder structure, this shaft shoulder structure can apply towards the axial force of flange to the first magnetic pole 8071, thus compress the first metallic shim realization sealing, this kind of structure is easier to processing, and the precision in course of working more easily ensures.
Also disclose another ultrahigh vacuum magnetic fluid seal driving device in the embodiment of the present invention, as shown in Figure 11, comprise housing, black box and bearing; Black box comprises main shaft, permanent magnet 906, the first magnetic pole 9071 being arranged at permanent magnet 906 both sides and the second magnetic pole 9072, be arranged at magnetic fluid between main shaft and the first magnetic pole 9071 and/or the second magnetic pole 9072, and:
Black box is arranged at ultra-high vacuum environment side and all between bearing, namely all bearing is in atmosphere environment;
First magnetic pole 9071 is made up of the flange of housing, the flange of housing is made up of magnetic conductive material, and the side that the flange of housing is used for connecting with the mounting flange of equipment is provided with half cavity, half cavity described in this can form complete seal die cavity with half cavity that arranges on the mounting flange of described equipment, metallic gasket is provided with in described complete seal die cavity, after metallic gasket is compressed distortion by axial force, the mounting flange of the flange of housing and equipment is sealed.
Because the sealing gasket in magnetic fluid seal driving device disclosed in this embodiment is also metallic gasket, and black box is also arranged between ultrahigh vacuum side and whole bearing, thus this kind of magnetic fluid seal driving device ultimate vacuum that equally not only can meet ultra-high vacuum environment (UHV) is high, leak rate is low, gas permeability is low, the speed of exhaust is fast, without requirements such as vacuum pollutions, can also ensure long-time sealing reliably.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a ultrahigh vacuum magnetic fluid seal driving device, comprises housing, black box and bearing; Described black box comprises main shaft, permanent magnet, the first magnetic pole being arranged at described permanent magnet both sides and the second magnetic pole, be arranged at magnetic fluid between described main shaft and described first magnetic pole and/or the second magnetic pole, it is characterized in that,
Described black box is arranged between ultra-high vacuum environment side and whole described bearing;
The surface of contact of the flange of described first magnetic pole and described housing is provided with the first sealing die cavity, the first metallic gasket is provided with in described first sealing die cavity, described first metallic gasket forms static seal with the flange of described housing and described first magnetic pole after being compressed distortion by the axial force between the flange of described housing and described first magnetic pole.
2. ultrahigh vacuum magnetic fluid seal driving device according to claim 1, it is characterized in that, the flange other end of described housing is also provided with the second half cavitys, and the second half cavitys that this second half cavity can be offered with the mounting flange on equipment fasten formed to seal with described first die cavity identical second seal die cavity, the second metallic gasket is provided with in described second sealing die cavity, described second metallic gasket forms static seal with the mounting flange on the flange of described housing and described equipment after being compressed distortion by axial force.
3. ultrahigh vacuum magnetic fluid seal driving device according to claim 1, it is characterized in that, also there is in the space that described main shaft and described first magnetic pole are formed the magnetic pole tooth of multiple axial distribution along described main shaft, and described magnetic pole tooth is opened on the cylindrical of described main shaft, or on described first magnetic pole, and each described magnetic pole tooth is in the axial raised closed hoop towards described main shaft.
4. ultrahigh vacuum magnetic fluid seal driving device according to claim 3, is characterized in that, described magnetic fluid is only filled in the space that described main shaft and described first magnetic pole formed.
5. ultrahigh vacuum magnetic fluid seal driving device according to claim 4, it is characterized in that, also comprise the cooling annular groove be opened on described first magnetic pole cylindrical, the described housing position corresponding with described cooling annular groove is provided with circumferentially uniform cooling water connector, and the contact position of described first magnetic pole cylindrical or end face and described housing is provided with O type rubber seal or metal o-ring for preventing cooling water leakage.
6. ultrahigh vacuum magnetic fluid seal driving device according to claim 4, it is characterized in that, also comprise the annular cooling chamber be opened in the middle part of described first magnetic pole, and the opening of described annular cooling chamber is towards the flange of described housing, described first sealing die cavity comprises two, and two described first seal the both sides that die cavity lays respectively at the opening of described annular cooling chamber, and be all built-in with described first metallic gasket, the cooling water passage for communicating with the opening of described annular cooling chamber is offered in the flange of described housing, and the circumference stating flange of institute's housing is evenly provided with cooling water connector.
7. ultrahigh vacuum magnetic fluid seal driving device according to claim 1, it is characterized in that, described bearing at least comprises two, Magnetic isolation cover is provided with between described second magnetic pole and adjacent bearing, arbitrary neighborhood two described bearings are also separated by Magnetic isolation cover, for being threaded with described housing to the bearing (ball) cover of described bearing axial compression, or by screw and described housing affixed.
8. ultrahigh vacuum magnetic fluid seal driving device according to claim 1, it is characterized in that, described first magnetic pole and described second magnetic pole are integral type magnetic pole, and in the middle part of the cylindrical of described integral type magnetic pole, offering permanent magnet accommodation annular groove, described permanent magnet is embedded and holds in annular groove at described permanent magnet.
9. ultrahigh vacuum magnetic fluid seal driving device according to claim 1, it is characterized in that, the flange of described housing and described housing are split-type structural, and both are bolted, the surface of contact of described housing and described first magnetic pole is provided with ladder surface, and described ladder surface is used for applying towards the axial force of the flange of described housing described first magnetic pole.
10. a ultrahigh vacuum magnetic fluid seal driving device, comprises housing, black box and bearing; Described black box comprises main shaft, permanent magnet, the first magnetic pole being arranged at described permanent magnet both sides and the second magnetic pole, be arranged at magnetic fluid between described main shaft and described first magnetic pole and/or the second magnetic pole, it is characterized in that,
Described black box is arranged between ultra-high vacuum environment side and whole described bearing;
Described first magnetic pole is made up of the flange of described housing, and the side that the flange of described housing is used for connecting with the mounting flange of equipment is provided with half cavity, half cavity described in this can form complete seal die cavity with half cavity that arranges on the mounting flange of described equipment, metallic gasket is provided with in described complete seal die cavity, described metallic gasket forms static seal with the flange of described housing and the mounting flange of described equipment after being compressed distortion by axial force.
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| CN201510388698.3A CN104948744A (en) | 2015-07-06 | 2015-07-06 | Ultrahigh vacuum magnetic fluid seal transmission device |
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| CN201510388698.3A CN104948744A (en) | 2015-07-06 | 2015-07-06 | Ultrahigh vacuum magnetic fluid seal transmission device |
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| CN104948744A true CN104948744A (en) | 2015-09-30 |
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| CN201510388698.3A Pending CN104948744A (en) | 2015-07-06 | 2015-07-06 | Ultrahigh vacuum magnetic fluid seal transmission device |
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