CN106969144A - Seal assembly, rotation section and vacuum processing apparatus - Google Patents
Seal assembly, rotation section and vacuum processing apparatus Download PDFInfo
- Publication number
- CN106969144A CN106969144A CN201710167810.XA CN201710167810A CN106969144A CN 106969144 A CN106969144 A CN 106969144A CN 201710167810 A CN201710167810 A CN 201710167810A CN 106969144 A CN106969144 A CN 106969144A
- Authority
- CN
- China
- Prior art keywords
- seal
- sealing
- rotation section
- seal assembly
- assembly according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
Abstract
The invention provides a kind of seal assembly, rotation section and vacuum processing apparatus.Seal assembly includes limiting section；Sealing, limiting section is arranged at the side of sealing, the opposite side of sealing has a vacuum work space, and limiting section and sealing are formed with for by rotation section is spacing and sealed accommodating chamber, rotation section to set through limiting section and sealing and extends in vacuum work space to form power source.Rotation section is set through limiting section and sealing, and rotation section is sealed and is limited in the accommodating chamber that limiting section is formed with sealing, and makes rotation section extend in the vacuum work space of sealing side to form the power source in the vacuum work space.The technical scheme can be good at realizing that efficiently solving in the prior art can not be the problem of sealed vacuum work intracavitary installs power source to being installed on the problem of vacuum work space internally-powered source is sealed.
Description
Technical field
The present invention relates to vacuum processing apparatus technical field, in particular to a kind of seal assembly, rotation section and vacuum
Process equipment.
Background technology
In existing vacuum equipment, because Sealing Technology it is not up to standard the problem of, cause seal operation intracavitary that power source can not be installed.
So that many vacuum equipments can not realize vacuum process automation operation, it can only complete true in the form of traditional artificial carrying
Sky processing operation.Due to automated job can not be used, for needing to process during the larger heavy vacuum equipment of workpiece, the person of causing
The problems such as work labor intensity is excessive, work added value is smaller.
The content of the invention
It is existing to solve it is a primary object of the present invention to provide a kind of seal assembly, rotation section and vacuum processing apparatus
The problem of vacuum work intracavitary can not install power source in technology.
To achieve these goals, according to an aspect of the invention, there is provided a kind of seal assembly, including：Limiting section；
Sealing, limiting section is arranged at the side of sealing, and the opposite side of sealing has vacuum work space, limiting section and sealing
It is formed with for by rotation section is spacing and sealed accommodating chamber, rotation section to set through limiting section and sealing and extends to vacuum
To form power source in working space.
Further, limiting section includes：Shoulder hole, the bigger diameter end of shoulder hole and sealing are offered on limiting plate, limiting plate
Portion, which encloses, is set as accommodating chamber, and the miner diameter end formation of shoulder hole supplies the first axis hole that rotation section is passed through.
Further, seal assembly also includes：Seal, seal is arranged in limiting section and/or sealing.
Further, seal assembly also includes seal groove, and seal groove is opened on limiting plate and/or sealing, seal groove
Seal is inside provided with to be sealed the gap formed between limiting plate and sealing.
Further, seal groove is annular groove, and the internal diameter of seal groove is more than the external diameter of the bigger diameter end of shoulder hole.
Seal groove is multiple, and multiple seal grooves are positioned apart from.
Further, sealing includes：Sealing plate, the outer surface of sealing plate and the bigger diameter end of shoulder hole, which enclose, to be set as accommodating
Chamber.
Further, sealing plate has the second axis hole passed through for rotation section, and the second axis hole is coaxially disposed with the first axis hole.
Further, the internal diameter of the first axis hole is identical with the internal diameter of the second axis hole.
Further, seal includes：First seal, is sheathed on rotation section and in accommodating chamber.
Further, seal also includes：Second seal, is sheathed on rotation section and in accommodating chamber, first is close
Sealing is located at the side of second seal.
Further, first seal includes multiple, and second seal includes at least one, multiple first seals and the
Two seals are arranged alternately along the axial direction of rotation section.
Further, first seal is the first O-ring seal, and/or, second seal is sealing copper ring.
Further, seal also includes：3rd seal, the 3rd seal is arranged in seal groove.
Further, the 3rd seal is the second O-ring seal.
According to another aspect of the present invention there is provided a kind of rotation section, rotation section is adapted with above-mentioned seal assembly, is turned
Dynamic portion has the spacing preiection being adapted with accommodating chamber.
Further, rotation section is multi-diameter shaft, and side face of the spacing preiection along multi-diameter shaft sets and be located in accommodating chamber, sealing
First seal and second seal that component has alternately are sheathed on the outer peripheral face of spacing preiection.
Further, rotation section opposing seal portion rotatably arranged with.
According to another aspect of the present invention there is provided a kind of vacuum processing apparatus, including seal assembly, seal assembly is upper
The seal assembly stated.
Apply the technical scheme of the present invention, rotation section is set through limiting section and sealing, and by rotation section sealing simultaneously
It is limited in the accommodating chamber that limiting section is formed with sealing, and the vacuum work for making rotation section extend to positioned at sealing side is empty
The interior power source to form the vacuum work space.The technical scheme can be good at realizing to being installed on vacuum work space
The problem of internally-powered source is sealed, asking for power source can not be installed in vacuum work intracavitary in the prior art by efficiently solving
Topic.
Brief description of the drawings
The Figure of description for constituting the part of the application is used for providing a further understanding of the present invention, and of the invention shows
Meaning property embodiment and its illustrate be used for explain the present invention, do not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 shows the structural representation of the embodiment of the seal assembly according to the present invention.
Wherein, above-mentioned accompanying drawing is marked including the following drawings：
10th, limiting section；11st, limiting plate；111st, shoulder hole；
20th, sealing；
21st, sealing plate；211st, the second axis hole；
30th, seal；
31st, first seal；32nd, second seal；33rd, the 3rd seal；
40th, seal groove；
50th, rotation section；51st, spacing preiection.
Embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Describe the present invention in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
It should be noted that term " first " in the description and claims of this application and above-mentioned accompanying drawing, "
Two " etc. be for distinguishing similar object, without for describing specific order or precedence.It should be appreciated that so using
Term can exchange in the appropriate case, so that presently filed embodiment described herein for example can be with except herein
Order beyond those of diagram or description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Be to cover it is non-exclusive include, for example, containing process, method, system, product or the equipment of series of steps or unit not
Be necessarily limited to those steps or the unit clearly listed, but may include not list clearly or for these processes, side
The intrinsic other steps of method, product or equipment or unit.
For the ease of description, space relative terms can be used herein, such as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation levied.It should be appreciated that space relative terms are intended to comprising the orientation except device described in figure
Outside different azimuth in use or operation.If for example, the device in accompanying drawing is squeezed, be described as " in other devices
It will be positioned as " under other devices or construction after the device of part or construction top " or " on other devices or construction "
Side " or " under other devices or construction ".Thus, exemplary term " ... top " can include " ... top " and
" in ... lower section " two kinds of orientation.The device can also other different modes positioning (being rotated by 90 ° or in other orientation), and
And respective explanations are made to the relative description in space used herein above.
Now, the illustrative embodiments according to the application are more fully described with reference to the accompanying drawings.However, these are exemplary
Embodiment can be implemented by many different forms, and should not be construed to be limited solely to embodiment party set forth herein
Formula.It should be appreciated that thesing embodiments are provided so that disclosure herein is thoroughly and complete, and these are shown
The design of example property embodiment is fully conveyed to those of ordinary skill in the art, in the accompanying drawings, for the sake of clarity, it is possible to expand
The big thickness of layer and region, and make identical device is presented with like reference characters, thus they are retouched by omitting
State.
With reference to shown in Fig. 1, there is provided a kind of seal assembly for embodiments in accordance with the present invention.
The seal assembly includes limiting section 10 and sealing 20.Limiting section 10 is arranged at the side of sealing 20, sealing
20 opposite side has vacuum work space, and limiting section 10 is formed with for rotation section 50 is spacing and sealed with sealing 20
Accommodating chamber, rotation section 50 sets through limiting section 10 and sealing 20 and extends in vacuum work space to form power source.
In the present embodiment, rotation section 50 is set through limiting section 10 and sealing 20, and rotation section 50 is sealed simultaneously
It is limited in the accommodating chamber that limiting section 10 is formed with sealing 20, and rotation section 50 is extended to positioned at the true of the side of sealing 20
The interior power source to form the vacuum work space of empty working space.The technical scheme can be good at realizing to being installed on vacuum
The problem of working space internally-powered source is sealed, efficiently solving in the prior art can not be in sealed vacuum work intracavitary
The problem of installing power source.
Further, limiting section 10 includes limiting plate 11.Offer shoulder hole 111 on limiting plate 11, shoulder hole 111 it is big
Footpath end is enclosed with sealing 20 is set as accommodating chamber, and the miner diameter end formation of shoulder hole 111 supplies the first axis hole that rotation section 50 is passed through.So
Setting effectively can be positioned rotation section 50, it is therefore prevented that the play in rotation process of rotation section 50, improve limiting section
Sealing reliability between 10 and rotation section 50.Limiting plate 11 clasps rotation section, can avoid the rotary shaft of rotation section when rotated,
Generation axial float, makes seal failure.
Wherein, seal assembly also includes seal 30.Seal 30 is arranged in limiting section 10 and sealing 20.So set
Put and further increasing sealing reliability between seal assembly and rotation section 50.
Seal assembly also includes seal groove 40.As shown in figure 1, seal groove 40 is opened on limiting plate 11, in seal groove 40
Seal 30 is provided with to be sealed the gap formed between limiting plate 11 and sealing 20.So set further
Improve the sealing reliability between limiting section 10 and rotation section 50.Certainly, seal groove 40 can also be opened on sealing 20,
Or simultaneously at the position relative with sealing 20 of limiting plate 11 simultaneously open up seal groove 40, so equally can be to limiting plate
Play sealed effect in the gap formed between 11 and sealing 20.
Preferably, seal groove 40 is annular groove, and the internal diameter of seal groove 40 is more than the external diameter of the bigger diameter end of shoulder hole 111.Will
Seal groove 40, which is arranged in the outside of shoulder hole 111, and seal groove 40, is provided with seal 30.3rd seal 33 is arranged at close
In sealing groove 40.It can realize and the gap formed between limiting plate 11 and sealing 20 is repeatedly sealed, be effectively improved
The sealing property of seal assembly.
Wherein, sealing 20 includes sealing plate 21.The outer surface of sealing plate 21 is enclosed with the bigger diameter end of shoulder hole 111 to be set as holding
Receive chamber.The assembling of rotation section can be facilitated by so setting, you can so that first rotation section is installed on limiting plate 11, then will be turned again
Dynamic portion and limiting plate 11 are connected and sealed with sealing plate 21.
Specifically, sealing plate 21 has the second axis hole 211 passed through for rotation section 50, the second axis hole 211 and the first axis hole
It is coaxially disposed.The reliability of rotation section and seal assembly can be effectively improved by so setting.
It is in order to further improve sealing reliability, the internal diameter of the first axis hole is identical with the internal diameter of the second axis hole.
Seal 30 includes first seal 31.First seal 31 is sheathed on rotation section 50 and in accommodating chamber.
The sealing property between rotation section 50 and seal assembly can be effectively improved by so setting.
Seal 30 also includes second seal 32.Second seal 32 is sheathed on rotation section 50 and positioned at accommodating chamber
Interior, first seal 31 is located at the side of second seal 32.So set and enable between rotation section 50 and accommodating chamber
Multiple-sealed system is formed with, the sealing property of seal assembly is further increased.
In the present embodiment, first seal 31 include it is multiple, second seal 32 include at least one, multiple first is close
Axial direction of the sealing 31 with second seal 32 along rotation section 50 is arranged alternately.Two first seals 31, one are shown in Fig. 1
Second seal 32, wherein, second seal 32 is located between two first seals 31.Specifically, first seal 31 is
First O-ring seal, second seal 32 is sealing copper ring.
Seal 30 also includes the 3rd seal 33.3rd seal 33 is arranged in seal groove 40.3rd seal 33
For the second O-ring seal.So set effectively to seal to the gap formed between limiting plate 11 and sealing 20.
There is provided a kind of rotation section according to another aspect of the present invention.The rotation section 50 and the sealing in above-described embodiment
Component is adapted, and rotation section 50 has the spacing preiection 51 being adapted with accommodating chamber.Wherein, week of the spacing preiection 51 along multi-diameter shaft
Face sets and is located in accommodating chamber, and the first seal 31 and second seal 32 that seal assembly has alternately are sheathed on spacing
The outer peripheral face of projection 51.The opposing seal portion 20 of rotation section 50 rotatably arranged with.So setting enables to the rotation section can
As the power source carried out by seal assembly in sealed vacuum work space, efficiently solving in the prior art can not be true
The problem of power source being installed in sky sealing.
Seal assembly in above-described embodiment can be also used for vacuum processing apparatus technical field, i.e., according to the another of the present invention
On the one hand there is provided a kind of vacuum processing apparatus.The process equipment includes seal assembly, and seal assembly is in above-described embodiment
Seal assembly.Specifically, seal assembly includes limiting section 10 and sealing 20.Limiting section 10 is arranged at the side of sealing 20,
The opposite side of sealing 20 has vacuum work space, and limiting section 10 is formed with for rotation section 50 is spacing simultaneously with sealing 20
Sealed accommodating chamber, rotation section 50 sets through limiting section 10 and sealing 20 and extended to dynamic to be formed in vacuum work space
Power source.Rotation section 50 is set through limiting section 10 and sealing 20, and by rotation section 50 seal and be limited in limiting section 10 with
In the accommodating chamber of the formation of sealing 20, and rotation section 50 is set to extend in the vacuum work space positioned at the side of sealing 20 with shape
Into the power source in the vacuum work space.The technical scheme can be good at realizing to being installed on vacuum work space internally-powered source
The problem of being sealed, asking for power source can not be installed in sealed vacuum work intracavitary in the prior art by efficiently solving
Topic.
Specifically, the Sealing Technology present application addresses the axial workpiece of high-speed motion in vacuum chamber.Vacuum equipment
Vacuum chamber provides reliable and stable power source.Structure needs simply, to be easy to maintenance.Reliable and stable power is provided for vacuum equipment
Source.Sealing mechanism is simple in construction, convenient disassembly, is easy to maintenance.Sealed using O-ring, it is with low cost.Plane and radial direction are close
The combination of envelope, multiple-sealed, sealed reliable degree is higher.
Further, between rotation section and sealing using gap coordinate, can low processing cost, convenient disassembly, just
In maintenance.
It is that the sealing section of limiting plate processes the seal groove of at least more than one end face seal in sealing station, that is to say, that can
So that seal groove is arranged into multiple, multiple seal grooves are positioned apart from.More than one end-face seal ring can be at least installed.Realize
The sealing of end face together above.Joined according to the many-side such as the vacuum level requirements of vacuum chamber, rotary shaft rotating speed, driving torque and rotation
Number synthesis is considered, and is radially at least installed twice above O-ring seal, that is, is realized sealings more than radial direction twice and twice.Radially
More to sealing can increase the contact area of sealing ring and seal, increase sealing effectiveness.
Preferably, it is sealing copper ring that one dustless copper ring of folder is added between each radial direction seal ring, makes each sealing ring only
Vertical work, forms an independent seal, is not influenceed by other sealing ring working conditions.Formation is more to sealed, and is increased close
Seal effect.
Rotary shaft boss is the length of spacing preiection, with sealing station counterbore be the bigger diameter end of shoulder hole depth according to radially
Seal depending on road number, increase sealing road number then accordingly increases land length and counterbore depth.Radial direction seal ring is the first sealing
Part should be more or less the same with the compression ratio that planar seal ring is the 3rd seal.In theory integrated sealing structure such as reinforced seal,
The sealing structure such as mechanical seal sealing property more preferably, but installs difficulty and requires relatively harsh with use environment, and maintenance is difficult,
It is live typically to be sealed using O-ring, but workpiece rotates for a long time, O-ring has abrasion, and sealing effectiveness may be reduced, therefore,
Multiple-sealed form multiple sealing systems using multiple-sealed increase and can be effectively increased the reliability of seal assembly.
Than that described above, in addition it is also necessary to which explanation is " one embodiment ", " another implementation spoken of in this manual
Example ", " embodiment " etc., refer to that the specific features, structure or the feature that combine embodiment description are included in the application summary
Property description at least one embodiment in.It is not necessarily to refer to same reality that statement of the same race, which occur, in multiple places in the description
Apply example.Furthermore, it is understood that when describing a specific features, structure or feature with reference to any embodiment, what is advocated is knot
Other embodiment is closed to realize that this feature, structure or feature are also fallen within the scope of the present invention.
In the above-described embodiments, the description to each embodiment all emphasizes particularly on different fields, and does not have the portion being described in detail in some embodiment
Point, it may refer to the associated description of other embodiment.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies
Change, equivalent substitution, improvement etc., should be included in the scope of the protection.
Claims (19)
1. a kind of seal assembly, it is characterised in that including：
Limiting section (10)；
Sealing (20), the limiting section (10) is arranged at the side of the sealing (20), the sealing (20) it is another
Side has vacuum work space, and the limiting section (10) is formed with for rotation section (50) are spacing simultaneously with the sealing (20)
Sealed accommodating chamber, the rotation section (50) sets through the limiting section (10) and the sealing (20) and extended to described
To form power source in vacuum work space.
2. seal assembly according to claim 1, it is characterised in that the limiting section (10) includes：
Shoulder hole (111), the bigger diameter end of the shoulder hole (111) and institute are offered on limiting plate (11), the limiting plate (11)
State sealing (20) and enclose and be set as the accommodating chamber, the miner diameter end formation of the shoulder hole (111) is passed through for the rotation section (50)
The first axis hole.
3. seal assembly according to claim 2, it is characterised in that the seal assembly also includes：
Seal (30), the seal (30) is arranged in the limiting section (10) and/or the sealing (20).
4. seal assembly according to claim 3, it is characterised in that the seal assembly also includes seal groove (40), institute
State seal groove (40) to be opened on the limiting plate (11) and/or the sealing (20), be provided with the seal groove (40)
The seal (30) is so that the gap formed between the limiting plate (11) and the sealing (20) to be sealed.
5. seal assembly according to claim 4, it is characterised in that the seal groove (40) is annular groove, the sealing
The internal diameter of groove (40) is more than the external diameter of the bigger diameter end of the shoulder hole (111).
6. the seal assembly according to claim 4 or 5, it is characterised in that the seal groove (40) be it is multiple, it is multiple described
Seal groove (40) is positioned apart from.
7. seal assembly according to claim 3, it is characterised in that the sealing (20) includes：
Sealing plate (21), the outer surface of the sealing plate (21) is enclosed with the bigger diameter end of the shoulder hole (111) is set as the receiving
Chamber.
8. seal assembly according to claim 7, it is characterised in that the sealing plate (21), which has, supplies the rotation section
(50) the second axis hole passed through, second axis hole is coaxially disposed with first axis hole.
9. seal assembly according to claim 8, it is characterised in that the internal diameter of first axis hole and second axis hole
Internal diameter it is identical.
10. seal assembly according to claim 3, it is characterised in that the seal (30) includes：
First seal (31), is sheathed on the rotation section (50) and in the accommodating chamber.
11. seal assembly according to claim 10, it is characterised in that the seal (30) also includes：
Second seal (32), is sheathed on the rotation section (50) and in the accommodating chamber, the first seal
(31) it is located at the side of the second seal (32).
12. seal assembly according to claim 11, it is characterised in that the first seal (31) includes multiple, institute
Stating second seal (32) includes at least one, and multiple first seals (31) and the second seal (32) are along described
The axial direction of rotation section (50) is arranged alternately.
13. seal assembly according to claim 12, it is characterised in that the first seal (31) is first O-shaped close
Seal, and/or, the second seal (32) is sealing copper ring.
14. seal assembly according to claim 4, it is characterised in that the seal (30) also includes：
3rd seal (33), the 3rd seal (33) is arranged in the seal groove (40).
15. seal assembly according to claim 14, it is characterised in that the 3rd seal (33) is second O-shaped close
Seal.
16. a kind of rotation section, it is characterised in that the rotation section (50) and the sealing any one of claim 1 to 15
Component is adapted, and the rotation section (50) has the spacing preiection (51) being adapted with the accommodating chamber.
17. rotation section according to claim 16, it is characterised in that the rotation section (50) is multi-diameter shaft, described spacing
The side face of raised (51) along the multi-diameter shaft sets and is located in the accommodating chamber, the first seal that the seal assembly has
And second seal (32) is alternately sheathed on the outer peripheral face of the spacing preiection (51) (31).
18. seal assembly according to claim 1, it is characterised in that the relatively described sealing of rotation section (50)
(20) rotatably arranged with.
19. a kind of vacuum processing apparatus, including seal assembly, it is characterised in that the seal assembly is in claim 1 to 18
Seal assembly described in any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710167810.XA CN106969144B (en) | 2017-03-20 | 2017-03-20 | Seal assembly, rotating part and vacuum processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710167810.XA CN106969144B (en) | 2017-03-20 | 2017-03-20 | Seal assembly, rotating part and vacuum processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106969144A true CN106969144A (en) | 2017-07-21 |
| CN106969144B CN106969144B (en) | 2020-11-10 |
Family
ID=59329046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710167810.XA Active CN106969144B (en) | 2017-03-20 | 2017-03-20 | Seal assembly, rotating part and vacuum processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106969144B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108361381A (en) * | 2018-04-13 | 2018-08-03 | 深圳市诺峰光电设备有限公司 | The full-automatic single-side laminators of IPAD and its composite sport cavity sealing system |
| CN111522366A (en) * | 2020-05-13 | 2020-08-11 | 珠海格力电器股份有限公司 | Juicer control method and equipment and juicer |
| CN112032308A (en) * | 2020-08-20 | 2020-12-04 | 中国联合工程有限公司 | Multistage decompression sealing structure and sealing method |
| CN112901777A (en) * | 2021-02-03 | 2021-06-04 | 湖北航天技术研究院总体设计所 | Special-shaped sealing element and sealing structure |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4054293A (en) * | 1976-12-27 | 1977-10-18 | Borg-Warner Corporation | Hybrid magnetic fluid shaft seals |
| DE4308204A1 (en) * | 1992-03-26 | 1993-08-19 | Siemens Ag | Method for shaft seal arrangement - has vacuum inside arrangement, which communicates with atmosphere via gaps between parts |
| US6857635B1 (en) * | 2001-10-18 | 2005-02-22 | Ferrotec (Usa) Corporation | Ultra high vacuum ferrofluidic seals and method of manufacture |
| CN102052463A (en) * | 2009-10-28 | 2011-05-11 | 财团法人工业技术研究院 | Vacuum rotating power transmitting device |
| CN102345107A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Seal assembly of sliding and rotating shaft |
| CN203395180U (en) * | 2013-06-26 | 2014-01-15 | 山东兴驰高压开关有限公司 | Novel rotary seal structure |
| CN203584692U (en) * | 2013-11-29 | 2014-05-07 | 珠海格力电器股份有限公司 | Draught fan and waterproof device for bearing chamber of draught fan |
| CN203784300U (en) * | 2014-03-20 | 2014-08-20 | 江苏牧羊控股有限公司 | Shaft end sealing device |
| CN204061914U (en) * | 2014-07-31 | 2014-12-31 | 营口桃仙制药设备有限公司 | A kind of sealing mechanism |
| CN104948744A (en) * | 2015-07-06 | 2015-09-30 | 湖南维格磁流体股份有限公司 | Ultrahigh vacuum magnetic fluid seal transmission device |
| CN105387209A (en) * | 2015-11-09 | 2016-03-09 | 重庆大学 | Low-speed rotary sealing device |
| CN106122478A (en) * | 2016-08-25 | 2016-11-16 | 辽宁桃仙制药机械设备有限公司 | A kind of sealing device |
-
2017
- 2017-03-20 CN CN201710167810.XA patent/CN106969144B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4054293A (en) * | 1976-12-27 | 1977-10-18 | Borg-Warner Corporation | Hybrid magnetic fluid shaft seals |
| DE4308204A1 (en) * | 1992-03-26 | 1993-08-19 | Siemens Ag | Method for shaft seal arrangement - has vacuum inside arrangement, which communicates with atmosphere via gaps between parts |
| US6857635B1 (en) * | 2001-10-18 | 2005-02-22 | Ferrotec (Usa) Corporation | Ultra high vacuum ferrofluidic seals and method of manufacture |
| CN102052463A (en) * | 2009-10-28 | 2011-05-11 | 财团法人工业技术研究院 | Vacuum rotating power transmitting device |
| CN102345107A (en) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | Seal assembly of sliding and rotating shaft |
| CN203395180U (en) * | 2013-06-26 | 2014-01-15 | 山东兴驰高压开关有限公司 | Novel rotary seal structure |
| CN203584692U (en) * | 2013-11-29 | 2014-05-07 | 珠海格力电器股份有限公司 | Draught fan and waterproof device for bearing chamber of draught fan |
| CN203784300U (en) * | 2014-03-20 | 2014-08-20 | 江苏牧羊控股有限公司 | Shaft end sealing device |
| CN204061914U (en) * | 2014-07-31 | 2014-12-31 | 营口桃仙制药设备有限公司 | A kind of sealing mechanism |
| CN104948744A (en) * | 2015-07-06 | 2015-09-30 | 湖南维格磁流体股份有限公司 | Ultrahigh vacuum magnetic fluid seal transmission device |
| CN105387209A (en) * | 2015-11-09 | 2016-03-09 | 重庆大学 | Low-speed rotary sealing device |
| CN106122478A (en) * | 2016-08-25 | 2016-11-16 | 辽宁桃仙制药机械设备有限公司 | A kind of sealing device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108361381A (en) * | 2018-04-13 | 2018-08-03 | 深圳市诺峰光电设备有限公司 | The full-automatic single-side laminators of IPAD and its composite sport cavity sealing system |
| CN111522366A (en) * | 2020-05-13 | 2020-08-11 | 珠海格力电器股份有限公司 | Juicer control method and equipment and juicer |
| CN112032308A (en) * | 2020-08-20 | 2020-12-04 | 中国联合工程有限公司 | Multistage decompression sealing structure and sealing method |
| CN112901777A (en) * | 2021-02-03 | 2021-06-04 | 湖北航天技术研究院总体设计所 | Special-shaped sealing element and sealing structure |
| CN112901777B (en) * | 2021-02-03 | 2023-03-28 | 湖北航天技术研究院总体设计所 | Special-shaped sealing element and sealing structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106969144B (en) | 2020-11-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106969144A (en) | Seal assembly, rotation section and vacuum processing apparatus | |
| CN104812534B (en) | Motor module, multi-axis motor drive component, multi-spindle machining hand equipment and electronic device manufacturing system and method | |
| US20120160163A1 (en) | Robot arm and robot using the same | |
| WO2017203754A1 (en) | Actuator | |
| EP3783373A1 (en) | Emc test system applicable to rotating load, and test method thereof | |
| US20160020662A1 (en) | Static Vacuum Shafting Device for Integrated Rotary Transformer | |
| US20150107495A1 (en) | Rotary joint and worktable using the same | |
| CN209319784U (en) | A kind of transmission device in six-joint robot joint | |
| CN216682261U (en) | Modular joint and robot system | |
| CN108662085A (en) | A kind of high leakproofness turbine worm reducer | |
| CN210403676U (en) | Multi-shaft rotary table | |
| CN206280504U (en) | Single end face mechanical seal device for rubber bellows | |
| CN106487201A (en) | A kind of compact type magnetic coupling motor | |
| CN110821944B (en) | Sleeve fluid conveying device | |
| CN107588118A (en) | A kind of interior external tooth friction disk type hydraulic clutch | |
| CN208793624U (en) | Sealing ring, sealing structure and cycloid hydraulic motor | |
| CN209504153U (en) | A kind of robot wrist portion mechanism | |
| CN206972918U (en) | A kind of rotating ring common type mechanically-sealing apparatus | |
| CN208487319U (en) | A kind of multi-path gas-liquid rotary slip ring | |
| US2697192A (en) | Electric motor operation | |
| CN107251377B (en) | Motor, driver, semiconductor manufacturing apparatus and flat panel display manufacturing apparatus | |
| CN206708376U (en) | Reactor stopping device | |
| CN207638455U (en) | A kind of high-protection level motor sealing structure | |
| CN207278845U (en) | Minitype speed reducing motor and robot | |
| CN108644509A (en) | A kind of multi-path gas-liquid rotary slip ring |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |