CN102345107A - Seal assembly of sliding and rotating shaft - Google Patents

Seal assembly of sliding and rotating shaft Download PDF

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Publication number
CN102345107A
CN102345107A CN2010102429371A CN201010242937A CN102345107A CN 102345107 A CN102345107 A CN 102345107A CN 2010102429371 A CN2010102429371 A CN 2010102429371A CN 201010242937 A CN201010242937 A CN 201010242937A CN 102345107 A CN102345107 A CN 102345107A
Authority
CN
China
Prior art keywords
seal
rotating shaft
base
axle
sealing
Prior art date
Application number
CN2010102429371A
Other languages
Chinese (zh)
Inventor
唐景庭
伍三忠
孙勇
袁卫华
Original Assignee
北京中科信电子装备有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京中科信电子装备有限公司 filed Critical 北京中科信电子装备有限公司
Priority to CN2010102429371A priority Critical patent/CN102345107A/en
Publication of CN102345107A publication Critical patent/CN102345107A/en

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Abstract

The invention discloses a seal assembly of a sliding and rotating shaft utilized for an orientation bench of an ion implantation machine, relates to an ion implantation machine, and belongs to the field of semiconductor manufacture. The seal assembly of a sliding and rotating shaft comprises a ladder-like lifting and rotating shaft, two seal base covers, two upper seal base, a seal base, two O-shaped loops located between the upper seal bases and the seal base, a seal cutting sleeve joint, two axle suspensions with self-lubricating axle sleeves, two lip-shaped seal loops and an O-shaped loop for end face seal. The ladder-like lifting and rotating shaft of the seal assembly is in a shape of a ladder and comprises multiple steps. The seal base covers are utilized for covering the lip-shaped seal loops. The upper seal bases are provided with grooves for installation of the lip-shaped seal loops. The upper seal bases are installed respectively at two ends of the seal base. The O-shaped loops are utilized for seal between the upper seal bases and the seal base. An interface between the seal base and the upper seal bases is provided with the self-lubricating axle sleeves which belong to the axle suspensions and are utilized for seal reinforcement and lubrication. A size of a shaft hole of the seal base is greater than a size of the ladder-like lifting and rotating shaft by 0.5 mm. The seal base is provided with a transverse hole and the transverse hole leads to the shaft hole. The transverse hole is connected with the seal cutting sleeve joint and is utilized for vacuum-pumping. The seal assembly of a sliding and rotating shaft has the advantages that a principle is simple; adopted standard parts are easy to be purchased in the market; through sliding and rotating seal, a leakage rate is tiny; and a structure is durable and reliable.

Description

A kind of slip and turning axle are used seal assembly
Technical field
The present invention is slip and the rotation axis seal assembly that a kind of orientation device of ion implanter is used, and relates to ion implanter, belongs to field of semiconductor manufacture.
Technical background
In the technology of 200mm or larger sized wafer; In the ion implantation technology of 90nm and higher 65nm processing procedure thereof; Wafer circumferential direction angle changes technology category during to injection: processing requirement angle of inclination " magic " 7 °; 22 °~45 ° of target platform angle of rotation, the tolerance range of the angle when must the primary study ionic fluid injecting raceway groove in the wafer; Isolate in the doping injection technology at triple-well, require the injection repeatability problem of solution around the small angle variation of channel axes (channeling axis); Inject in four directions position, 45 ° of injections of wafer rotation of waiting to annotate the people on the target platform once.The above strict complicated technology decision to the circumferential angle of wafer requires wafer before injection, accurately really to look for the breach of circumferential direction, is called chip oriented.To this 90-65nm angled ion implanter must solve a technology difficult problem owing to take all factors into consideration the production efficiency of implanter requirement more than 350 slices/hour, require wafer circumference orientation to require wafer twirl on the slide glass dish.According to the design requirements of wafer handling and orientation system, also to comprise wafer is looked for earlier three steps that breach descends again by rotation after the jack-up action in the orientation process.Wafer is positioned at high vacuum on the slide glass dish; Coding Motor torque in the atmosphere is delivered to the moving wafer rotation of slide glass dribbling through lifting rotating shaft; Realize the isolating seal of lifting rotating shaft high vacuum end and atmosphere end, the invention design is slided and turning axle is used seal assembly.
Summary of the invention
The invention discloses slip and rotation axis seal assembly that a kind of orientation device of ion implanter is used, relate to ion implanter, belong to field of semiconductor manufacture.This structure comprises: the present invention adopts a stair-stepping lifting rotating shaft, two sealing flaps, a sealing socket; O type circle between two sealing sockets and sealing socket; A sealing socket, the cutting ferrule joint that sealing is bled, the axle sleeve of two seizes and band self-lubricating property; Two lip-type packings, a mechanical seal is with O type circle.It is stair-stepping that the ladder slip turning axle of described seal assembly is, a plurality of ladders are arranged on it, and described sealing socket gland is used to cover lip-type packing; Leave the groove that lip-type packing is installed on the upper seal support; Upper seal support is installed the two ends of sealing socket, and sealing is an O type circle between both faces, at the separation surface of sealing socket and upper seal support enhanced leaktightness and the seize axle sleeve that lubricates is arranged; Axis hole on the sealing socket is greater than the diameter of axle 0.5mm of up-down and turning axle; Laterally have the hole on the sealing socket and lead to axis hole, transverse holes is connected with the cutting ferrule joint, is used for vacuum suction.The principle of the invention is simple, and accepted standard part market is prone to purchase, and the leak rate of slip and rotary seal is small, and structure durable is reliable.
This mechanism is made up of following part: 2, two upper seal supports 3 of stair-stepping lifting rotating shaft 1, two sealing flap; The cutting ferrule joint 6 that 5, one sealings of 4, one sealing sockets of O type circle that two upper seal supports 3 and sealing socket are 5 are bled; The axle sleeve 7 of two seizes and band self-lubricating property; 8, one mechanical seals of two lip-type packings are with O type circle 9, shown in accompanying drawing one and figure two:
One end of a described stair-stepping lifting rotating shaft 1 is connected with the target chamber high vacuum cavity of implanter, and the other end is in atmosphere.
Described sealing flap 2 is used to cover lip-type packing 8, is connected with upper seal support 3 with screw.
Have the through hole that axle slides on the described upper seal support 3, have sealing groove, O type circle 4 is positioned at sealing groove, and an end of upper seal support also has the axial opening with axle sleeve 7 external diameter transition fit
The O type circle that described O type circle 4 is standards is used for the mechanical seal between upper seal support 3 and the sealing socket 5
The body seal seat that described sealing socket 5 is sealing assemblies; The sealing socket center has through hole; The aperture is greater than lifting rotating shaft diameter of axle 0.5mm, and stair-stepping lifting rotating shaft is slided in the hole and rotated freely, and these through hole two ends have the big hole of axle sleeve 7 external diameters; The end that sealing socket 5 has the O RunddichtringO directly is connected with target chamber cavity high vacuum end with screw; The other end is connected with upper seal support 3 usefulness screws, and the end face between upper seal support laterally has the hole and leads to axis hole with 4 sealings of O type circle on the sealing socket 5.
The cutting ferrule joint 6 that described sealing is bled is connected to sealing socket 5, is used for vacuum suction and produces rough vacuum.
The axle sleeve 7 of described seize and band self-lubricating property is used for seize and seals stair-stepping lifting rotating shaft 1, is installed between sealing socket 5 and the upper seal support 3.
Described lip-type packing 8 is market standard products, and main effect is the stair-stepping lifting rotating shaft 1 of slipper seal.Described O RunddichtringO 9 is installed in the sealing groove on the sealing socket 5, is used for the face seal of sealing socket 5 and target chamber cavity
Description of drawings:
Fig. 1 is for sliding and rotation axis seal assembly synoptic diagram.
Fig. 2 is not for sliding and rotation axis seal assembly sectional view with the three-dimensional of step shaft.
Embodiment:
Below in conjunction with accompanying drawing the present invention is done further introduction, but not as the qualification to invention.
The present invention adopts an axle sleeve that a plurality of ladder lifting rotating shaft and two seizes and band self-lubricating property are arranged; Make axle go up and down to rotate freedom, slide and adopt lip-type packing commonly used, good sealing effect; Owing between axle and sealing socket very little gap is arranged; So the axle at the high vacuum end of axle and atmosphere end go-and-retum is used for vacuumizing with the hole that the sealing socket gap location is designed with vacuum suction, reduce because the pressure at two ends difference produces the resistance when acting on axle and going up and down, spool move freely.
Specific embodiment of the present invention elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities.

Claims (4)

1. slip and turning axle are used seal assembly, by a stair-stepping lifting rotating shaft, and two sealing flaps; Two upper seal supports, the O type circle between two upper seal supports and sealing socket, a sealing socket; The cutting ferrule joint that sealing is bled; The axle sleeve of two seizes and band self-lubricating property, two lip-type packings, a mechanical seal is formed with O type circle.Wherein said lifting rotating shaft is stair-stepping.
2. a sealing socket as claimed in claim 1, it is characterized in that: the sealing socket center has through hole, and the aperture is that stair-stepping lifting rotating shaft is slided in the hole and rotated freely greater than lifting rotating shaft diameter of axle 0.5mm.
3. the axle sleeve of two seizes as claimed in claim 1 and band self-lubricating property is characterized in that: material adopts Teflon, and the frictional coefficient of this axle sleeve is little, and self-lubricating property is arranged, and does not have the particle contamination that motion produces, and dimensional stability is good.
4. two lip-type packings as claimed in claim 1 are used for the to-and-fro movement and the rotary seal of axle, can bear rapid temperature variation, dimensional stabilizing, and frictional coefficient is little.
CN2010102429371A 2010-08-02 2010-08-02 Seal assembly of sliding and rotating shaft CN102345107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010102429371A CN102345107A (en) 2010-08-02 2010-08-02 Seal assembly of sliding and rotating shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010102429371A CN102345107A (en) 2010-08-02 2010-08-02 Seal assembly of sliding and rotating shaft

Publications (1)

Publication Number Publication Date
CN102345107A true CN102345107A (en) 2012-02-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010102429371A CN102345107A (en) 2010-08-02 2010-08-02 Seal assembly of sliding and rotating shaft

Country Status (1)

Country Link
CN (1) CN102345107A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119772A (en) * 2016-08-25 2016-11-16 江苏瑞尔光学有限公司 A kind of eyeglass vacuum coating equipment screw spindle
CN106969144A (en) * 2017-03-20 2017-07-21 珠海格力电器股份有限公司 Seal assembly, rotation section and vacuum processing apparatus
CN108871692A (en) * 2018-06-26 2018-11-23 爱发科东方真空(成都)有限公司 A kind of lithium battery automatic detection production line and its detection method
CN108895193A (en) * 2018-06-22 2018-11-27 爱发科东方真空(成都)有限公司 The oil-free valve of vacuum
CN109860012A (en) * 2019-02-28 2019-06-07 中国电子科技集团公司第四十八研究所 A kind of ion implantation apparatus upright scanning device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2390053Y (en) * 1998-06-01 2000-08-02 中国科学院长春光学精密机械研究所 Superhigh vacuum coaxial rotating, translation differential feed-in device
CN2438878Y (en) * 2000-09-04 2001-07-11 中国科学院半导体研究所 Dynamic sealing apparatus of shaft for high-temperature high-pressure gas container
CN2929393Y (en) * 2006-03-17 2007-08-01 北京中科信电子装备有限公司 Inflation overpressure overflow valve for vacuum
WO2010085466A1 (en) * 2009-01-20 2010-07-29 Plasma-Therm, Llc Conductive seal ring electrostatic chuck

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2390053Y (en) * 1998-06-01 2000-08-02 中国科学院长春光学精密机械研究所 Superhigh vacuum coaxial rotating, translation differential feed-in device
CN2438878Y (en) * 2000-09-04 2001-07-11 中国科学院半导体研究所 Dynamic sealing apparatus of shaft for high-temperature high-pressure gas container
CN2929393Y (en) * 2006-03-17 2007-08-01 北京中科信电子装备有限公司 Inflation overpressure overflow valve for vacuum
WO2010085466A1 (en) * 2009-01-20 2010-07-29 Plasma-Therm, Llc Conductive seal ring electrostatic chuck

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106119772A (en) * 2016-08-25 2016-11-16 江苏瑞尔光学有限公司 A kind of eyeglass vacuum coating equipment screw spindle
CN106119772B (en) * 2016-08-25 2018-07-13 江苏瑞尔光学有限公司 A kind of eyeglass vacuum coating equipment screw spindle
CN106969144A (en) * 2017-03-20 2017-07-21 珠海格力电器股份有限公司 Seal assembly, rotation section and vacuum processing apparatus
CN106969144B (en) * 2017-03-20 2020-11-10 珠海格力电器股份有限公司 Seal assembly, rotating part and vacuum processing equipment
CN108895193A (en) * 2018-06-22 2018-11-27 爱发科东方真空(成都)有限公司 The oil-free valve of vacuum
CN108871692A (en) * 2018-06-26 2018-11-23 爱发科东方真空(成都)有限公司 A kind of lithium battery automatic detection production line and its detection method
CN109860012A (en) * 2019-02-28 2019-06-07 中国电子科技集团公司第四十八研究所 A kind of ion implantation apparatus upright scanning device
CN109860012B (en) * 2019-02-28 2021-02-05 中国电子科技集团公司第四十八研究所 Vertical scanning device of ion implanter

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Application publication date: 20120208