KR20220070748A - Control Method For Automatic Replacement System Of Gas Cylinder - Google Patents

Abstract

The present invention relates to a control method of an automatic gas cylinder replacement system and, more particularly, to a control method of an automatic replacement system, comprising: a gas cylinder transfer unit which is inserted or discharged while loaded on a skid so that the longitudinal direction thereof is horizontal to the ground, and transfers or discharges, to or from an align unit case, the head of the gas cylinder having a valve, a gas outlet port, and an end cap provided thereon, respectively; an alignment unit which is built into the alignment unit case and moves in a height direction, in the longitudinal direction of a gas cylinder, in a direction from one side surface of the skid toward the other side surface thereof, in a direction (θ axis) in which the alignment unit rotates around a Y-axis in an YZ-plane, and in a direction (θ` axis) in which the alignment unit rotates around an X-axis in a YZ-plane, with respect to the ground; a valve opening and closing unit coupled to the align unit to open and close the valve; a connector unit coupled to the alignment unit, and including a connector attached to and detached from the gas outlet port to supply gas, filled in the gas cylinder, to a process chamber, a plug holder for attaching and detaching a plug to and from the connector, and an end cap holder for attaching and detaching an end cap; a gasket unit coupled to the alignment unit to supply or recover a gasket to and from the connector; and a vision unit coupled to the alignment unit or the gasket unit to photograph the head. The control method comprises a gas cylinder supply step and a gas cylinder recovery step. Therefore, the method can prevent accidents due to gas leakage by providing sophisticated coupling of the gas cylinder and a connecting device.

Description

Control Method For Automatic Replacement System Of Gas Cylinder

The present invention relates to a control method of a gas cylinder automatic replacement system, and more particularly, a gas cylinder capable of continuously supplying gas to a process chamber by automatically replacing a relatively large-capacity gas cylinder that is put in a lying state parallel to the ground. It relates to a control method of an automatic replacement system.

In general, in the process of manufacturing semiconductors and display panels, various gases are supplied depending on the use, and most of these gases are relatively toxic and flammable, so if they are inhaled into the human body or exposed to the air, safety accidents and environmental pollution may occur. can cause

In addition, these gases are filled inside a cylindrical cylinder (hereinafter, referred to as a gas cylinder) having a gas outlet port at the end, stored and transported, and connected to a connector including a gas flow path extending to the outside to supply gas to the process chamber. supply is made

On the other hand, the conventional gas cylinder replacement device is configured to supply gas to the process chamber by connecting a gas outlet port of a gas cylinder filled with gas to a pipe extending toward the process chamber to manually open and close the valve.

However, this conventional gas cylinder replacement device has a problem in that leakage may occur between the gas outlet port and the pipe connection part depending on the skill level of the operator.

In order to solve this problem, Korean Patent Laid-Open Publication No. 10-2019-0040922 discloses that simply loading a gas cylinder on a gas cylinder lift automatically connects the gas cylinder to the gas cylinder connection unit, and when the appropriate amount of gas in the gas cylinder is exhausted, the gas cylinder is connected. Disclosed is a gas cylinder replacement device capable of automatically removing and unloading a gas cylinder from a unit.

However, in this conventional gas cylinder replacement device, as the gas cylinder is put in a standing state on the ground, the gas cylinder connection unit is formed at a relatively high position on the ground.

In particular, when a relatively large-capacity gas cylinder with a length of 1,800 mm or more is applied to such a conventional gas cylinder replacement device, maintainability is improved as the device is separated for maintenance of the gas cylinder connection unit or the operator uses a ladder or forklift. There is a problem of degradation.

Republic of Korea Patent Publication No. 10-2019-0040922 (published on April 19, 2019)

An object of the present invention was devised to solve the above problems, and it is an automatic gas cylinder capable of smoothly supplying gas to various process chambers by transferring a relatively large capacity gas cylinder on a skid in a horizontal direction to the ground. It is to provide a control method of the replacement system.

Another object of the present invention is to provide a control method of an automatic gas cylinder replacement system in which a connector connected to a gas outlet port and one end of a gas cylinder toward a process chamber through an alignment unit can be automatically and securely coupled.

The objects of the present invention are not limited to the objects mentioned above, and other objects and advantages of the present invention not mentioned may be understood by the following description, and will be more clearly understood by the embodiments of the present invention.

It will also be readily apparent that the objects and advantages of the present invention may be realized by the means and combinations thereof indicated in the appended claims.

In order to solve the above problems, the present invention aligns the head side of a gas cylinder that is put in or discharged in a state loaded on the skid so that the longitudinal direction is horizontal to the ground, and is provided with a valve, a gas outlet port, and an end cap in the head, respectively. A gas cylinder transfer unit for transferring or discharging into the case, built in the alignment unit case, in the height direction based on the ground, the longitudinal direction of the gas cylinder, the other side direction from one side of the skid, and the y axis on the xz plane an alignment unit that moves in a rotational direction (θ axis) and a rotation direction (θ` axis) about the x axis on the yz plane, a valve opening/closing unit coupled to the alignment unit to open and close the valve, the alignment unit A connector coupled to the in-unit and detachable from the gas outlet port for supplying the gas charged in the gas cylinder to the process chamber side, a plug holder for attaching and detaching a plug to the connector, and an end cap holder for attaching and detaching the end cap. A connector unit comprising: a connector unit coupled to the alignment unit to supply or retrieve a gasket to the connector; and a vision unit coupled to the alignment unit or the gasket unit to photograph the head side. A control method, comprising a gas cylinder supply step and a gas cylinder recovery step.

More specifically, the gas cylinder supply step includes a first preparation step of introducing the gas cylinder to the gas cylinder transfer unit by an operator and the alignment unit sliding along the z-axis according to the height of the longitudinal center line of the gas cylinder. A gas cylinder input step of transferring the head of the gas cylinder into the alignment unit case by the gas cylinder transfer unit, including a second preparation step, and a plug separation step of separating the plug coupled to the connector side by the plug holder and at least one of the x, y, z, θ, θ` axes of the alignment unit based on at least one of the center line of the valve, the center line of the gas outlet port, the longitudinal center line of the gas cylinder, or the end cap. An alignment step of moving in one or more directions, an end cap separation step of separating the end cap by the end cap holder, a gasket input step of inserting a gasket into the connector by the gasket unit, the connector and the gas outlet and a connecting step in which a port is connected, and a valve opening step of supplying the gas filled in the gas cylinder to the connector by opening the valve by the valve opening/closing unit.

Between the end cap separation step and the gasket input step, the alignment unit moves in at least one direction among x, y, θ, and θ` axes by the alignment unit based on the position of the gas outlet port detected by the vision unit. It may further include the step of aligning.

On the other hand, the gas cylinder recovery step includes a valve locking step of locking the valve by the valve opening/closing unit when the supply of the gas charged inside the gas cylinder to the connector by a preset amount is completed, and the connector and the gas outlet port A connecting releasing step of separating the gasket, a gasket discharging step of recovering the gasket injected into the connector by the gasket unit, an end cap coupling step of coupling the end cap to the gas outlet port by the end cap holder, and the plug holder A plug coupling step of coupling the plug to the connector side by means of a plug coupling step, a notification step of notifying an operator of the work progress status through a wired/wireless connection network, and a gas cylinder discharging step of discharging the gas cylinder to the outside by the gas cylinder transfer unit. .

As described above, in the control method of the automatic gas cylinder replacement system according to the present invention, in a system in which gas is supplied in a state in which a relatively large-capacity gas cylinder is loaded on a skid in a direction horizontal to the ground, as the alignment is performed in multiple axes, It is possible to prevent safety accidents due to gas leakage by promoting precise coupling between the gas cylinder and the connecting device.

In addition to the above-described effects, the specific effects of the present invention will be described together while describing specific details for carrying out the invention below.

1 is a perspective view illustrating a state in which a gas cylinder is loaded on a skid in an automatic gas cylinder replacement system according to an embodiment of the present invention.
Figure 2 is a perspective view showing a state in which the gas cylinder is loaded skid in the automatic gas cylinder replacement system according to an embodiment of the present invention.
3 is a perspective view illustrating a state in which the frame assembly and the control unit are omitted in the gas cylinder automatic replacement system according to an embodiment of the present invention.
4 is a flowchart of a control method of a gas cylinder automatic replacement system according to an embodiment of the present invention.
5 is a front view showing the alignment unit in the gas cylinder automatic replacement system according to an embodiment of the present invention.
6 is a right side view showing the alignment unit in the gas cylinder automatic replacement system according to an embodiment of the present invention.
7 is a front view in which the frame assembly and the gas cylinder transfer unit are omitted in the gas cylinder automatic replacement system according to an embodiment of the present invention.
8 is a top perspective view illustrating a θ-axis alignment unit and a connector unit in an automatic gas cylinder replacement system according to an embodiment of the present invention.
9 is a bottom perspective view showing the θ-axis alignment unit and the connector unit in the gas cylinder automatic replacement system according to an embodiment of the present invention.
10 is a perspective view illustrating a gasket unit in an automatic gas cylinder replacement system according to an embodiment of the present invention.
11 is a rear perspective view illustrating a gasket unit and a vision unit in which a gasket magazine is omitted in the gas cylinder automatic replacement system according to an embodiment of the present invention.

The above-described objects, features and advantages will be described below in detail with reference to the accompanying drawings, and accordingly, those of ordinary skill in the art to which the present invention pertains will be able to easily implement the technical idea of the present invention.

In describing the present invention, if it is determined that a detailed description of a known technology related to the present invention may unnecessarily obscure the gist of the present invention, the detailed description will be omitted.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to indicate the same or similar components.

In the following, that an arbitrary component is disposed on the "upper (or lower)" of a component or "upper (or below)" of a component means that any component is disposed in contact with the upper surface (or lower surface) of the component. Furthermore, it may mean that other components may be interposed between the component and any component disposed on (or under) the component.

In addition, when it is described that a component is “connected”, “coupled” or “connected” to another component, the components may be directly connected or connected to each other, but other components are “interposed” between each component. It should be understood that “or, each component may be “connected,” “coupled,” or “connected” through another component.

As used herein, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the present application, terms such as “consisting of” or “comprising” should not be construed as necessarily including all of the various components or various steps described in the specification, some of which components or some steps are It should be construed that it may not include, or may further include additional components or steps.

Throughout the specification, when “A and/or B” is used, it means A, B or A and B, unless otherwise stated, and when “C to D” is used, it means that there is no specific opposite description. Unless otherwise specified, it means that it is greater than or equal to C and less than or equal to D.

Hereinafter, a gas cylinder automatic replacement system and a control method thereof according to some embodiments of the present invention will be described.

1 is a perspective view showing a state in which a gas cylinder is loaded on a skid in an automatic gas cylinder replacement system according to an embodiment of the present invention.

First, in the present invention, the gas cylinder (C) has a cylindrical shape as a whole and is filled with high-pressure gas inside as shown in FIG. 1 .

In addition, the gas cylinder (C) is a valve (C1) formed in the longitudinal direction at one end, a gas outlet port (C2) formed in a direction perpendicular to the valve (C1), and the gas outlet port (C2) is fastened to the end and Includes a detachable end cap (C3).

Hereinafter, an end of the gas cylinder C on which the valve C1 , the gas outlet port C2 , and the end cap C3 are formed is defined as the head of the gas cylinder C .

In addition, in the gas cylinder automatic replacement system according to the present invention, the gas cylinder (C) is not limited in size or capacity, but is loaded and operated while lying on a skid.

On the other hand, in the present invention, the skid (S) is formed in a rectangular shape as a whole by combining a plurality of hollow rectangular pipe skid frame (S1) by welding or the like, as shown in Fig. 1, respectively.

Accordingly, the skid (S) can be easily transported because a fork such as a forklift can be inserted into the skid frame (S1).

In addition, the skid (S) includes a plurality of gas cylinder support portions (S2) and a skid gripping portion (S3) respectively formed on the upper surface, and a plurality of skid casters (S4) formed on the bottom surface.

More specifically, the gas cylinder support part (S2) is for aligning the position of the gas cylinder (C) loaded on the upper surface of the skid (S), and is formed at both ends and the radial direction of the gas cylinder (C), respectively. When the cylinder (S2) is loaded on the upper surface of the skid (S), it can be stably fixed.

In addition, the gas cylinder support portion (S2) is preferably formed of a material having elasticity, such as rubber, so as to alleviate the impact applied to the gas cylinder (C) during transport.

In addition, the skid caster (S4) is a wheel for movement, and the gas cylinder (C) is loaded, so that the skid (S) of a relatively large load can be easily moved in a state in which the operator grips the skid gripper (S3). have.

On the other hand, Figure 2 is a perspective view showing a state in which the gas cylinder is loaded skid in the automatic gas cylinder replacement system according to an embodiment of the present invention, Figure 3 is a gas cylinder automatic replacement system according to an embodiment of the present invention It is a perspective view showing a state in which the frame assembly and the control unit are omitted.

Hereinafter, the direction is defined as follows to facilitate the description of the automatic gas cylinder replacement system according to the present invention.

The x-axis means a direction from one side to the other side of the skid (S) as shown in FIG. 2 .

In addition, the y-axis means the longitudinal direction of the gas cylinder (C) in a state in which the gas cylinder (C) is horizontally loaded on the ground on the skid (S) as shown in FIG.

In addition, the z-axis means a direction from the bottom surface to the top surface of the skid (S) as shown in FIG.

At this time, the front means the side where the valve is not formed among the ends of the gas cylinder (C) loaded on the skid (S), and the rear is the end of the gas cylinder (C) loaded on the skid (S) It means the side on which the valve is formed.

In addition, the θ axis means a direction of rotation based on the y axis on the xz plane as shown in FIG. 2 .

In addition, the θ` axis (yaw) refers to the direction of rotation based on the x axis on the zy plane.

On the other hand, since the gas cylinder automatic replacement system according to the present invention is a device for handling high-pressure gas, the driving unit, cylinder, etc., for changing the position or rotation of each component, operate with pneumatic or hydraulic pressure, etc. that do not generate sparks to prevent explosion It is preferable to be

2 and 3 , the automatic gas cylinder replacement system according to the present invention includes a frame assembly 100 , a gas cylinder transfer unit 200 , an alignment unit 300 , a valve opening/closing unit 400 , and a connector unit 500 . ), a gasket unit 600 , a vision unit 700 and a control unit 800 .

More specifically, the frame assembly 100 includes a base plate 110 and an alignment unit case 120 .

At this time, as shown in FIG. 2 , the gas cylinder transfer unit 200 is coupled to the upper surface of the base plate 110 and the alignment unit case 120 is disposed at the rear.

In addition, a load cell (not shown) is built in the base plate 110 , and as shown in FIG. 2 b , the skid S on which the gas cylinder C is loaded is loaded on the base plate 110 . If so, you can detect it.

In addition, the alignment unit case 120 may be installed on the ground instead of the base plate 110 .

Meanwhile, the alignment unit 300 , the valve opening/closing unit 400 , the connector unit 500 , the gasket unit 600 , and the vision unit 700 are built in the alignment unit case 120 .

In addition, it is preferable that the control unit 800 is mounted on the upper side of the alignment unit case 120 .

In addition, the control unit 800 is formed to protrude to the front as shown in FIG. 2 and includes a switch box 810 for operating the On/Off of the automatic gas cylinder replacement system according to the present invention.

More specifically, the control unit 800 includes the gas cylinder transfer unit 200 and the alignment unit 300 , the valve opening/closing unit 400 , the connector unit 500 , the gasket unit 600 , and the vision unit 700 . ) and are electrically connected to each other and can be controlled.

Meanwhile, FIG. 4 is a flowchart of a control method of a gas cylinder automatic replacement system according to an embodiment of the present invention.

Referring to Figure 4, the control method of the automatic gas cylinder replacement system according to the present invention is put in or discharged in a state loaded on the skid (S) so that the longitudinal direction is horizontal to the ground, and the valve (C1) and the gas outlet port (C2) in the head ) and the gas cylinder transfer unit 200 for transferring or discharging the head side of the gas cylinder (C) each having an end cap (C3) into the alignment unit case 120, the alignment unit case 120. Built-in, based on the ground, in the height direction (z-axis), the longitudinal direction (y-axis) of the gas cylinder (C), and the other side direction (x-axis) from one side of the skid (S) and the y-axis on the xz plane as the center The alignment unit 300 moving in the rotation direction (θ axis) and the rotation direction (θ` axis) about the x axis on the yz plane, respectively, is coupled to the alignment unit 300 and the valve (C1) A connector ( 510) and the connector unit 500, further comprising a plug holder 520 for attaching and detaching the plug P to and from the connector 510, and an end cap holder 530 for attaching and detaching the end cap C3, the alignment A gasket unit 600 coupled to the unit 300 for supplying or recovering the gasket G to the connector 510 and the aligning unit 300 or the gasket unit 600 coupled to the head side is photographed In the control method of the automatic replacement system including the vision unit 700 to include a gas cylinder supply step (S100) and a gas cylinder recovery step (S200).

More specifically, the gas cylinder supply step (S100) is a first preparation step (S111) of introducing the gas cylinder (C) to the gas cylinder transfer unit 200 side by an operator and the longitudinal center line of the gas cylinder (C) Aligning the head of the gas cylinder (C) by the gas cylinder transfer unit 200, including a second preparation step (S112) in which the alignment unit 300 slides in the z-axis according to the height of the aligning unit A gas cylinder input step (S110) of transferring the gas cylinder to the inside of the case 120, a plug separation step (S120) of separating the plug (P) coupled to the connector 510 by the plug holder 520, and the valve (C1) ), the center line of the gas outlet port (C2), the longitudinal center line of the gas cylinder (C), or at least one of the end cap (C3), the alignment unit 300 is x, y , z, θ, θ` axis, the alignment step (S130) moving in at least one direction or more and the end cap separation step (S140) of separating the end cap (C3) by the end cap holder 530 (S140); A gasket input step (S150) of inserting a gasket (G) into the connector 510 by the gasket unit 600 and a connecting step (S160) of connecting the connector 510 and the gas outlet port (C2); and and a valve opening step (S170) of supplying the gas filled in the gas cylinder (C) to the connector (510) by opening the valve (C1) by the valve opening/closing unit (400).

The gas outlet port C2 detected by the vision unit 700 between the aligning step (S120), the plug separation step (S130), the end cap separation step (S140), and the gasket input step (S150) ) may further include aligning in at least one direction among x, y, z, θ, and θ` axes by the alignment unit 300 based on the position of the .

On the other hand, in the gas cylinder recovery step (S200), when the supply of the gas filled in the gas cylinder (C) to the connector 510 by a preset amount is completed, the valve ( The valve locking step (S210) of locking C1), the connecting release step (S220) in which the connector 510 and the gas outlet port (C2) are separated, and the connector 510 by the gasket unit 600 A gasket discharging step (S230) of recovering the gasket (G) and an end cap coupling step (S240) of coupling the end cap (C3) to the gas outlet port (C2) by the end cap holder (530) and the plug A plug coupling step (S250) of coupling the plug (P) to the connector 510 by the holder 520, a notification step (S260) of notifying the operator of the work progress through a wired/wireless connection network, and the gas cylinder transfer unit ( 200), and a gas cylinder discharging step (S270) of discharging the gas cylinder (C) to the outside.

On the other hand, the gas cylinder transfer unit 200 is fixed to the base plate 110 or the ground so as to be arranged side by side on both sides of the skid (S) as shown in Figs. 2 and 3, a fixing guide 210 and It includes a movable guide 220 that slides in the y-axis direction with respect to each of the fixing guides 210 and a lock stopper 230 fixed to the base plate 110 so as to be disposed in front of the fixing guide 210 . .

More specifically, the fixed guide 210 includes a transfer unit driving unit 211 for driving the movable guide 220 .

In addition, the movable guide 220 is in contact with both sides of the skid (S), respectively, a movable guide clamp 221 for gripping the skid (S) and a plurality of rollers 222 formed opposite to the skid (S) side ) is included.

In addition, the movable guide 220 is at least one gas cylinder transfer unit sensor capable of detecting whether the skid (S) is gripped, the relative position of the movable guide 220 with respect to the fixed guide 210, etc. (223) may be further included.

In addition, the distance between the movable guides 220 arranged side by side on both sides of the skid (S) is preferably formed to increase toward the front.

Accordingly, the gas cylinder transfer unit 200 can prevent damage or deformation caused by the skid S collides with the end of the movable guide 220 .

In addition, the lock stopper 230 includes a lock stopper clamp 231 that is in contact with the side surface of the skid S to grip both sides of the skid S, and a lock stopper damper 232 formed on the front surface.

The operation method of the gas cylinder transfer unit 200 configured as described above is as follows.

The gas cylinder (C) is loaded on the skid (S), and the head of the gas cylinder (C) is put into the gas cylinder transfer unit 200 to face the alignment unit case 120 side.

Then, when the movable guide 220 slides forward with respect to the fixed guide 210 and is located on both sides of the skid S, the movable guide clamp 221 grips both sides of the skid S. As it returns to one state, the gas cylinder (C) is transferred to the alignment unit case 120 side.

At this time, when the head of the gas cylinder (C) is positioned inside the alignment unit case 120 and the transfer is completed, the movable guide clamp 221 is spaced apart from the side surface of the skid S, and the lock stopper clamp ( 231), both sides of the skid (S) are fixed.

On the other hand, when the transfer of the gas cylinder (C) is not completed by the operation as described above, the movable guide clamp 221 is spaced apart from the side surface of the skid S and moves forward with respect to the fixed guide 210. Through the sliding movement and the operation of the movable guide clamp 221 , the gas cylinder C is transferred again to the alignment unit case 120 side.

At this time, in order to prevent the sliding of the skid S that may occur when the movable guide clamp 221 is spaced apart from the side surface of the skid S, the skid S is moved by the lock stopper clamp 231 . Both sides of the can be fixed.

That is, the clamping operations of the movable guide clamp 221 and the lock stopper clamp 231 are reversed while the gas cylinder C is being transported.

On the other hand, Figures 5 and 6 are respectively a front view and a right side view showing the alignment unit in the gas cylinder automatic replacement system according to an embodiment of the present invention.

5 and 6 , the alignment unit 300 includes a z-axis alignment unit 310 , a y-axis alignment unit 320 , an x-axis alignment unit 330 , and a θ-axis alignment unit 340 . ) is included.

In addition, each of the z-axis alignment unit 310, the y-axis alignment unit 320, the x-axis alignment unit 330, and the θ-axis alignment unit 340 has at least one or more position detection sensors. is provided to sense the position of the gas cylinder (C) in real time.

More specifically, the z-axis alignment unit 310 is a rectangular z-axis alignment fixing plate 311 fixed to the base plate 110 and the z-axis alignment base plate 311 at the side of the square. It includes four z-axis alignment cylinders 312 vertically formed, respectively, and a z-axis alignment movable plate 313 coupled to upper ends of the four z-axis alignment cylinders 312 .

In this case, the z-axis alignment fixing plate 311 may be formed integrally with the base plate 110 .

In addition, the z-axis alignment movable plate 313 is vertically aligned on both sides of the z-axis alignment movable plate bottom surface part 313a and the z-axis alignment movable plate bottom surface part 313a, respectively, as shown in FIG. 5 . It includes two z-axis alignment movable plate side portions 313b to be formed.

Accordingly, the z-axis alignment movable plate 313 may slide in the z-axis with respect to the z-axis alignment fixing plate 311 by the z-axis alignment cylinder 312 .

In addition, when the displacement of the z-axis alignment cylinder 312 located at the front is different from the displacement of the z-axis alignment cylinder 312 located at the rear side, the z-axis alignment movable plate 313 is disposed on the front side and the rear side. may have different heights.

Accordingly, the z-axis alignment movable plate 313 is a yaw rotating on the zy plane with respect to the x-axis to which the z-axis alignment cylinder 312 and the z-axis alignment movable plate 313 located in the front are coupled. (θ`) is performed.

Conversely, the z-axis alignment movable plate 313 rotates on the zy plane with respect to the x-axis to which the z-axis alignment cylinder 312 and the z-axis alignment movable plate 313 located at the rear are coupled. θ`) may be performed.

That is, in the gas cylinder automatic replacement system according to the present invention, the z-axis alignment unit 310 slides the z-axis alignment movable plate 313 in the z-axis as well as the z-axis alignment movable plate 313 ) can be rotated and moved in the rotational direction (θ` axis) about the x-axis on the zy plane.

More preferably, the z-axis alignment movable plate 313 includes a θ-axis damper coupling part 313c formed to be slidably movable in the x-axis and the y-axis, respectively, on one side.

More specifically, the θ-axis damper coupling part 313c is on the side where the y-axis alignment unit 320 and the alignment unit 330 are not formed among the two z-axis alignment movable plate side parts 313b. is formed

On the other hand, the y-axis alignment unit 320 is coupled to a rail formed in the y-axis on the upper surface of any one of the z-axis alignment movable plate side parts 313b to form a y-axis by the y-axis alignment driving part 321 . move by sliding

More preferably, the y-axis alignment unit 320 is coupled to the upper surface of the z-axis alignment movable plate side part 313b on which the θ-axis damper coupling part 313c is not formed.

In addition, the x-axis alignment unit 330 is coupled to a rail formed along the x-axis on the upper surface of the y-axis alignment unit 320 to slide along the x-axis by the x-axis alignment driving unit 331 .

At this time, the y-axis alignment driving unit 321 and the x-axis alignment driving unit 331 may be operated by pneumatically or hydraulically operated cylinders, motors, or the like.

Meanwhile, the θ-axis alignment unit 340 includes the θ-axis alignment fixing plate 341 and the θ-axis alignment fixing plate 341 coupled to the x-axis alignment unit 330 as shown in FIG. 5 . ) includes a θ-axis alignment movable plate 343 that rotates the y-axis as a rotation axis by the θ-axis alignment driving unit 342 .

In addition, the θ-axis alignment movable plate 343 is formed on a side of the z-axis alignment movable plate side portion 313b other than the side to which the θ-axis alignment fixing plate 341 is coupled. and a θ-axis damper 344 coupled to the portion 313c.

At this time, the θ-axis damper 344 is for reducing vibration generated when the θ-axis alignment movable plate 343 is tilted in the θ-axis, and various mechanisms including a gas spring may be applied.

Meanwhile, FIG. 7 is a front view in which the frame assembly and the gas cylinder transfer unit are omitted in the gas cylinder automatic replacement system according to an embodiment of the present invention.

3 and 7, the valve opening/closing unit 400 is a device that opens and closes the valve C1 by inserting a pin into the groove formed on the outer peripheral surface of the valve C1 and then rotating it along the θ axis. 410).

At this time, the valve shutter 410 clamps and rotates the valve C1, such as the valve shutter module disclosed in Republic of Korea Patent Publication No. 10-2148401 (published on August 28, 2020). Various known technologies are applied. can

More preferably, the valve shutter 410 can open and close the valve C1 by rotating while holding the valve C1 by a plurality of pins detachable from the plurality of grooves formed on the outer peripheral surface of the valve C1. have.

In addition, the valve opening/closing unit 400 may include a valve shutter transfer unit 420 to move the valve shutter 410 in the x, y, and z axes independently of the alignment unit 300 .

More preferably, the valve opening/closing unit 400 has one side fixedly coupled to the x-axis alignment unit 330 or the θ-axis alignment fixing plate 341 and the other side is the z-axis alignment movable plate bottom part 313a ) can be coupled to be slidable in the x and y axes, respectively.

Accordingly, the valve opening/closing unit 400 is movable in the x, y, and z axes by the alignment unit 300 except for the θ-axis alignment unit 340 .

Meanwhile, FIGS. 8 and 9 are top and bottom perspective views respectively showing the θ-axis alignment unit and the connector unit in the gas cylinder automatic replacement system according to an embodiment of the present invention.

7 to 9, the connector unit 500 is connected to the gas outlet port (C2) of the gas cylinder (C) to use the gas filled in the gas cylinder (C) to manufacture semiconductors, display panels, etc. The connector 510 supplied to the process chamber, the plug holder 520 for attaching and detaching the plug P to the connector 510, and the end cap holder 530 for attaching and detaching the end cap C3 to the gas cylinder C ) is included.

In addition, the connector unit 500 is coupled to the θ-axis alignment movable plate 343 so that the position can be adjusted in the x, y, z, θ, θ` axes by the alignment unit 300 .

More specifically, the connector 510 includes a connector nut 512 rotating by a connector nut driving unit 511 , a gas passage 513 formed in the center of the connector nut 512 , and the connector 510 in the Z axis. It includes a connector transfer unit 514 for transferring, and one side is coupled to the θ-axis alignment movable plate 343 .

In addition, a structure such as a screw thread to be detached from the gas outlet port C2 and a protrusion or a groove to detach the plug P and/or the gasket G is formed on the inner circumferential surface of the connector nut 512 .

In addition, in the gas cylinder automatic replacement system according to the present invention, the connector nut 512 is coupled to the plug P when gas is not supplied to the gas passage 513, and the plug P when gas is supplied. is separated

In addition, in the connector nut 512 , the gasket G is separated when gas is not supplied to the gas passage 513 , and the gasket G is coupled to the connector nut 512 when gas is supplied.

In addition, it is preferable that one end of the gas passage 513 is formed in the inner center of the connector nut 512 , and the other end is formed outside the connector 510 .

More preferably, the other end of the gas passage 513 may include a pipe connector to which a pipe connected to the process chamber can be connected.

In addition, the connector 510 is capable of z-axis sliding movement independently of the alignment unit 300 by the connector transfer unit 514 .

Meanwhile, the plug holder 520 includes a plug holder revolving driving unit 521 , a plug holder revolving arm 522 , and a plug holder conveying unit 523 , one end of which is coupled to the connector conveying unit 514 and the connector 510 . ) and sliding along the z-axis.

In addition, the plug holder 520 is pivotally moved along the plug holder pivot arm 522 in the xy plane about the z axis by the plug holder pivot drive unit 521, and the connector is passed through the plug holder transfer unit 523. The z-axis sliding movement is possible independently of the 510 .

More specifically, one end of the plug holder revolving arm 522 is coupled to the plug holder revolving driving unit 521 , and the plug holder 520 is formed at the other end.

In addition, in a general state, the plug holder 520 is maintained facing the rear as shown in FIGS. 8 and 9, and when the connector 510 and the gas outlet port C2 are connected or disconnected, the The connector nut 512 rotates 90° counterclockwise in the xy plane around the coupling axis of the plug holder pivot arm 522 and the plug holder pivot drive unit 521 so as to be positioned on the center line of the connector nut 512 .

In addition, the plug holder 520 includes a mechanical clamp capable of gripping the outer circumferential surface of the plug P, or a structure such as a protrusion or groove is formed so that the plug P is fixed to the plug holder 520 . can

In addition, the plug (P) can be applied to plugs of various standards and shapes as well as plugs according to the Compressed Gas Association (CGA) standard.

On the other hand, the end cap holder 530 includes an end cap holder swing driving unit 531, an end cap holder swing arm 532, and an end cap holder rotation driving nut 533, and one side of the θ-axis alignment movable plate ( 343).

Accordingly, the end cap holder 530 is movable in the x, y, z, θ and θ` axes by the alignment unit 300 .

In addition, in a general state, the end cap holder 530 is maintained facing the rear as shown in FIGS. 8 and 9, and connects or disconnects the connector 510 and the gas outlet port C2. When the operation is performed, the end cap holder pivot arm 532 and the end cap holder pivot drive unit 531 are positioned on the center line of the connector nut 512 in a counterclockwise direction with the center of the coupling axis 90 in the xy plane. ˚ Move around turning.

In addition, the connector nut 512 may be inserted or separated from the end cap holder rotation driving nut 532 by the connector transfer unit 514 .

In addition, the end cap C3 may be inserted or separated from the end cap holder 530 by the z-axis alignment unit 310 .

In addition, the end cap holder 530 is removed from the end cap holder 530 when the end cap C3 is inserted into the end cap holder 530 by a protrusion structure including a vacuum or a magnet or including an elastic body. escape can be prevented.

In addition, the end cap holder 530 may include a separate transfer means to slide along the z-axis independently of the z-axis alignment unit 310 .

Meanwhile, FIG. 10 is a perspective view showing a gasket unit in the automatic gas cylinder replacement system according to an embodiment of the present invention, and FIG. 11 is a gasket in which the gasket magazine is omitted in the gas cylinder automatic replacement system according to an embodiment of the present invention. It is a rear perspective view showing the unit and the vision unit.

3, 10 and 11, the gasket unit 600 includes a gasket loader transfer unit 610, a gasket magazine 620, a gasket loader 630, a gasket collection box 640, and a gasket gripper 650. and coupled to the θ-axis alignment unit 330 .

More specifically, the gasket loader transfer unit 610 is coupled to a rail formed on the gasket unit base frame 611 that is predetermined to be coupled to the θ-axis alignment movable plate 343, and is coupled to the gasket unit base frame 611 with respect to the gasket. The magazine 620, the gasket loader 630, and the gasket collection box 640 slide together along the y-axis.

Meanwhile, FIG. 10 is a perspective view illustrating a state in which the cover of the gasket magazine 620 is omitted. Referring to this, the gasket magazine 620 has a plurality of gaskets G lined up on a gasket rail 621 formed therein. are sorted by

In addition, it is preferable that one end of the gasket rail 621 is inclined downward toward the gasket loader 630 in order to smoothly supply the gasket G to the gasket loader 630 .

In addition, the gasket loader 630 is formed to have a step in the z-axis at one end of the gasket magazine 620, and grips the gaskets G sequentially supplied from the gasket magazine 620 one by one to obtain gaskets. It includes a gasket loading block 632 for transport and mounting to the loading unit (631).

In addition, the gasket loading block 632 is the gasket loading block ( It includes a separate gasket loading block transfer unit 632a for sliding 632 in the z-axis.

On the other hand, the gasket collection box 640 includes a gasket collection box first cover 641 and a gasket collection box second cover 642 in the shape of an open box for collecting the previously used gasket (G).

More specifically, the gasket collection box first cover 641 is formed to open and close the upper surface of the gasket collection box 640 as it slides along the z-axis.

At this time, when the gasket collection box first cover 641 moves forward along the y-axis together with the gasket loader 630 and the gasket magazine 630 by the gasket loader transfer unit 610, z It may include a gasket collection box first cover cam 641a and a gasket collection box first cover cam follower 641b so as to ascend along the axis and move backward along the y-axis to descend along the z-axis.

More specifically, the gasket collection box first cover cam 641a is formed on the gasket unit base frame 611 , and the gasket collection box first cover cam follower 641b is formed on the gasket loader transfer unit 610 .

In addition, the gasket collection box second cover 642 may be hingedly coupled to the gasket collection box 640 to open and close the upper surface of the gasket collection box 640 .

Accordingly, the upper surface of the gasket collection box 640 is automatically opened and closed by the gasket collection box first cover 641, and when the gasket collection box first cover 641 is opened, the gasket collection box second cover It can be closed manually or automatically by (642).

Accordingly, it is possible to minimize the exposure of the gasket (G) to the air polluted by the completion of use.

Meanwhile, the gasket gripper 650 includes a gasket gripper x-axis driving unit 651 , a gasket gripper z-axis driving unit 652 , a gasket gripper rotating driving unit 653 , and a gasket rotating arm 654 . In addition, the gasket gripper 650 can slide in the x-axis and z-axis with respect to the gasket unit base frame 611 by the gasket gripper x-axis driving unit 651 and the gasket gripper z-axis driving unit 652, respectively. have. In addition, the gasket gripper 650 is formed at the other end of the gasket gripper orbital arm 654 having one end coupled to the gasket gripper revolving driving unit 653 , and pivots by 90° on the xz plane about the y-axis.

In addition, the gasket gripper 650 is a mechanical clamp whose left and right widths can be adjusted to grip or release the gasket G.

Accordingly, the gasket gripper 650 grips the gasket G from the gasket loading part 631, passes between the connector nut 510 and the gas outlet port C2, and the connector nut 512. or the previously used gasket G from the connector nut 510 may be disposed of in the gasket collection box 640 .

On the other hand, the vision unit 700 has at least one photographing means and a built-in light, is coupled to the gasket unit base frame 611 as shown in FIG. The frame 611 may be slidably moved along the x-axis.

That is, the vision unit 700 is movable in the x, y, z, and θ axes by the alignment unit 300 , and separately from the alignment unit 300 by the vision unit driving unit 710 ). Sliding movement is possible in the x-axis.

Also, the vision unit 700 may photograph the gas outlet port C2 and the end cap C3 that are disposed to face the connector nut 512 and are transferred to the connector nut 512 side.

Meanwhile, as shown in FIG. 2 , the control unit 800 is formed on the upper side of the alignment unit case 120 , and the gas cylinder transfer unit 200 , the alignment unit 300 , and the valve opening/closing unit are formed. 400 , the connector unit 500 , the gasket unit 600 , and the vision unit 700 can be controlled, respectively.

In addition, at least two or more of the gas cylinder automatic replacement system according to the present invention configured as described above are arranged in parallel to continuously supply gas to the process chamber irrespective of the time according to the replacement interval of the gas cylinders.

On the other hand, the control method of the automatic gas cylinder replacement system according to the present invention will be described in more detail with reference to the configuration as described above.

In the cylinder supply step (S110), when the input of the gas cylinder (C) is detected by a sensor provided on the transfer unit 200 side, the lock stopper clamp 231 holds both sides of the skid (S). fixation is made

Thereafter, when the operator presses the start button provided in the switch box 810 , the loading of the gas cylinder C by the alignment unit 200 is performed.

More specifically, when the movable guide 220 slides forward with respect to the fixed guide 210 and is positioned on both sides of the skid S, the movable guide clamp 221 closes the both sides of the skid S. As it returns to the gripped state, the gas cylinder (C) is transferred to the alignment unit case 120 side.

At this time, the upper end of the valve C1 is sensed by a sensor provided in the alignment unit case 120 so that the head side of the gas cylinder C can be inserted into the alignment unit case 120 , and Through the z-axis alignment cylinder 312, the height of the z-axis alignment movable plate 313 is adjusted.

Thereafter, a sensor provided in the alignment unit case 120 detects the neck portion of the gas cylinder C, and the z-axis correction is performed by the z-axis alignment unit 310 through this.

In addition, when the head of the gas cylinder (C) is located inside the alignment unit case 120 and the transfer to a preset position and z-axis alignment are completed, the movable guide clamp 221 of the skid (S) It is spaced apart from the side and both sides of the skid S are fixed by the lock stopper clamp 231 . Meanwhile, in the plug separation step S130 , the plug P is connected to the gas by the plug holder 520 . It is separated from the cylinder C and is moved to be spaced apart from the connector 510 as shown in FIG. 8 by the plug holder turning driving unit 521 and the plug holder transferring unit 523 .

Then, in the alignment step (S130), the position of the end cap (C3) is measured by the vision unit (700), and through this, the x of the connector unit (500) by the alignment unit (300), Alignment is performed on the y, θ, and θ` axes, respectively.

Meanwhile, in the end cap separation step ( S140 ), the end cap holder 530 is positioned between the connector 510 and the end cap C3 by the end cap turning driving unit 5531 .

Thereafter, the connector nut 512 is moved in the z-axis by the connector transfer unit 514 to be fastened to the end cap holder 530 , and the end cap holder 530 and the end cap C3 are fastened.

Thereafter, the end cap C3 is separated from the gas cylinder C by the connector nut 512 rotated by a preset number of rotations by the connector nut driving unit 511 .

In addition, the end cap C3 separated from the gas cylinder C is pneumatically gripped by the end cap holder 530 as shown in FIG. 8 by the end cap turning driving unit 5531. As such, it is moved to be spaced apart from the connector 510 .

At this time, whether the end cap C3 is gripped can be confirmed through the amount of air pressure of the end cap holder 530 .

Thereafter, the position of the gas outlet port C2 is detected by the vision unit 700 and, through this, the x, y, θ, θ` axes of the connector unit 500 are detected by the alignment unit 300 through this. Each alignment is performed again.

Meanwhile, in the gasket inputting step (S150), the gasket G is transferred from the gasket loading part 631 to the inlet side of the gas passage 513 of the connector 510 by the gasket gripper 650 and inputted.

Thereafter, in the connecting step (S160), the connector 510 slides along the z-axis to be engaged with the gas outlet port C2.

At this time, the connector 510 is in a no-load state, and it is possible to check whether the fastening is completed based on the torque, the number of rotations, the position, and the like.

On the other hand, when the opening of the valve C1 is completed by the valve opening and closing unit 400 in the valve opening step S170, the lock stopper clamp ( 231) by the gripping of the skid (S) is released.

Accordingly, the gas cylinder supply step (S100) of the control method of the automatic gas cylinder replacement system according to the present invention is completed, and the gas is supplied to the process chamber.

On the other hand, the specific details of the gas cylinder recovery step (S200) are as follows.

After the skid S is gripped by the lock stopper clamp 231 before the valve locking step S210 , the valve C1 is locked by the valve opening/closing unit 400 .

In addition, in the disconnecting step ( S220 ) of the connection, the connector 510 is in a no-load state, and it can be checked whether the disconnection is complete based on torque, number of rotations, position, and the like.

On the other hand, the gasket (G) previously used in the gasket discharging step (S230) is transferred and discharged from the inlet side of the gas passage (513) of the connector (510) to the collection box (640) by the gasket gripper (650). do.

Thereafter, in the end cap coupling step (S240), the end cap holder 530, which was waiting while holding the end cap C3, moves the end cap C3 by the end cap turning driving unit 5531. It is moved between the connector 510 and the gas outlet port C2.

Thereafter, the connector nut 512 is moved in the z-axis by the connector transfer unit 514 to be fastened to the end cap holder 530 , and the end cap holder 530 and the end cap C3 are fastened to the above The end cap C3 is fastened to the gas cylinder C by the connector nut 512 rotated by a preset number of rotations by the connector nut driving unit 511 .

On the other hand, in the plug coupling step (S250), the plug holder 520, which has been waiting in a state of gripping the plug P, is moved to the plug ( P) moves to the fastening position of the end cap (C3).

Thereafter, the plug P is coupled to the end cap C3 by rotation of the connector 510 .

On the other hand, in the notification step (S260), when a notification signal is sent to the operator through the wired/wireless connection network, and the operator who confirms this clicks the discharge button on the switch box 810, the gas cylinder discharge step (S270) is performed.

As described above, the present invention has been described with reference to the illustrated drawings, but the present invention is not limited by the embodiments and drawings disclosed in this specification, and various methods can be obtained by those skilled in the art within the scope of the technical spirit of the present invention. It is obvious that variations can be made.

In addition, although the effects according to the configuration of the present invention have not been explicitly described and described while describing the embodiments of the present invention, it is natural that the effects predictable by the configuration should also be recognized.

C. Gas cylinder
C1. valve
C2. gas outlet port
C3. end cap
G. gasket
P. plug
S. Skid
S1. skid frame
S2. gas cylinder support
S3. skid grip
S4. skid caster
S100. gas cylinder supply stage
S110. Gas cylinder input stage
S120. Plug disconnection step S130. alignment step
S140. End cap separation step
S150. Gasket input stage
S160. Connecting step
S170. valve opening stage
S200. Gas cylinder recovery stage
S210. valve lock stage
S220. Connection disconnection step
S230. Gasket ejection stage
S240. End cap bonding step
S250. plug mating step
S260. Notification step S270. Gas cylinder discharge stage
100. Frame assembly
110. Base plate
120. Align unit case
200. Gas cylinder transfer unit
210. Fixed guide
211. Transfer unit driving part
220. Operation guide
221. Movable guide clamp
222. Roller
223. Gas cylinder transfer unit sensor
230. Rockstopper
231. Rockstopper Clamp
232. Rockstopper Damper
300. Align unit
310. z-axis alignment unit
311. z-axis alignment fixing plate
312. z-axis alignment cylinder
313. z-axis alignment movable plate
313a. z-axis alignment movable plate bottom
313b. Z-axis alignment movable plate side part
313c. θ-axis damper coupling part
320. y-axis alignment unit
321. y-axis alignment driver
330. x-axis alignment unit
331. x-axis alignment driver
340. θ-axis alignment unit
341. θ-axis alignment fixing plate
341a. θ-axis alignment fixing block
341b. 1st rail
341c. 2nd rail
342. θ-axis alignment driver
342a. θ-axis alignment drive motor
342b. screw
342c. z-axis moving block
342d. x-axis floating block
343. θ-axis alignment movable plate
343a. 1st cam follower
343b. 2nd cam follower
343c. θ-axis alignment movable block
344. θ-axis damper
400. Valve opening/closing unit
410. Valve Shutter
420. Valve shutter transfer part
500. Connector unit
510. Connector
511. Connector nut drive
512. Connector Nut
513. Gas channel
514. Connector transport
520. Plug Holder
521. Plug holder swivel drive part
522. Plug holder swivel arm
523. Plug holder transport
530. End cap holder
531. End cap holder swivel driving part
532. End cap holder swivel arm
533. End cap holder rotary drive nut
600. Gasket unit
610. Gasket Loader Transport
611. Gasket unit base frame
620. Gasket Magazine
621. Gasket rail
630. Gasket Loader
631. Gasket loading part
632. Gasket Loading Block
632a. Gasket loading block transfer part
640. Gasket collection box
641. Gasket collection box 1st cover
641a. Gasket collection box 1st cover cam
641b. Gasket Bin 1st Cover Cam Follower
642. Gasket collection box 2nd cover
650. Gasket Gripper
651. Gasket gripper x-axis drive
652. Gasket gripper z-axis drive
653. Gasket Gripper Slewing Drive
654. Gasket Gripper Glow
700. Vision Unit
710. Vision unit driving part
800. Control unit
810. switch box

Claims (4)

The head of the gas cylinder (C) is put in or discharged while being loaded on the skid (S) so that the longitudinal direction is horizontal to the ground, and the head is equipped with a valve (C1), a gas outlet port (C2), and an end cap (C3), respectively a gas cylinder transfer unit 200 for transferring or discharging the side into the alignment unit case 120;
Built in the alignment unit case 120, the height direction (z-axis) with respect to the ground, the longitudinal direction (y-axis) of the gas cylinder (C), and the other side direction (x) from one side of the skid (S) axis) and an alignment unit 300 moving in a direction (θ axis) rotating about the y axis on the xz plane and a direction rotating about the x axis on the yz plane (θ` axis), respectively;
a valve opening/closing unit 400 coupled to the alignment unit 300 to open and close the valve C1;
A connector 510 coupled to the alignment unit 300 and attached to and detached from the gas outlet port C2 to supply the gas filled in the gas cylinder C to the process chamber side and a plug to the connector 510 A connector unit 500 further comprising a plug holder 520 for attaching and detaching (P) and an end cap holder 530 for attaching and detaching the end cap C3;
a gasket unit (600) coupled to the alignment unit (300) to supply or retrieve a gasket (G) to the connector (510); and
In the control method of the automatic replacement system comprising; a vision unit 700 coupled to the alignment unit 300 or the gasket unit 600 to photograph the head side,
gas cylinder supply step (S100); and
A control method of an automatic replacement system comprising a; gas cylinder recovery step (S200).
The method of claim 1,
The gas cylinder supply step (S100) is
According to the first preparation step (S111) of putting the gas cylinder (C) into the gas cylinder transfer unit 200 side by the operator and the height of the longitudinal center line of the gas cylinder (C), the alignment unit 300 is A gas cylinder input step of transferring the head of the gas cylinder (C) into the alignment unit case 120 by the gas cylinder transfer unit 200, including a second preparation step (S112) of sliding in the z-axis (S110);
A plug separation step (S120) of separating the plug (P) coupled to the connector (510) side by the plug holder (520);
The alignment unit 300 based on at least one of the center line of the valve C1, the center line of the gas outlet port C2, the longitudinal center line of the gas cylinder C, or the end cap C3. An alignment step (S130) of moving in at least one of the x, y, z, θ, and θ` axes; an end cap separation step of separating the end cap C3 by the end cap holder 530 (S140);
a gasket input step (S150) of inserting a gasket (G) into the connector (510) by the gasket unit (600);
a connecting step (S160) in which the connector 510 and the gas outlet port C2 are connected; and
Gas including; Control method of cylinder automatic replacement system.
3. The method of claim 2,
Between the end cap separating step (S140) and the gasket inputting step (S150), based on the position of the gas outlet port C2 detected by the vision unit 700, x , y, θ, the control method of the automatic gas cylinder replacement system further comprising the step of aligning in at least one direction of the θ' axis.
3. The method of claim 2,
The gas cylinder recovery step (S200) is
A valve locking step (S210) of locking the valve (C1) by the valve opening/closing unit (400) when the supply of the gas filled in the gas cylinder (C) to the connector (510) by a preset amount is completed (S210);
a connecting release step (S220) in which the connector 510 and the gas outlet port (C2) are separated;
a gasket discharging step (S230) of recovering the gasket (G) injected into the connector (510) by the gasket unit (600);
an end cap coupling step (S240) of coupling the end cap (C3) to the gas outlet port (C2) by the end cap holder (530);
a plug coupling step (S250) of coupling the plug (P) to the connector (510) side by the plug holder (520);
A notification step (S260) of notifying the worker of the work progress status through a wired/wireless connection network; and
A control method of an automatic gas cylinder replacement system including a; a gas cylinder discharging step (S270) of discharging the gas cylinder (C) to the outside by the gas cylinder transfer unit (200).

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