KR102345570B1 - gasket collecting module for gas auto supply apparatus of gas cylinder - Google Patents

Abstract

The present invention relates to a gasket collection module for an automatic gas supply device of a gas cylinder that automatically supplies gas from a horizontal (recumbent position) gas cylinder transported to an automatic gas supply device to a semiconductor manufacturing process. It relates to a gasket collection module for an automatic gas supply device of a gas cylinder that can be opened and closed with a .

Description

Gasket collecting module for gas auto supply apparatus of gas cylinder

The present invention relates to a gasket collection module for an automatic gas supply device of a gas cylinder that automatically supplies gas from a horizontal (recumbent position) gas cylinder transported to an automatic gas supply device to a semiconductor manufacturing process. It relates to a gasket collection module for an automatic gas supply device of a gas cylinder that can be opened and closed with a .

In general, in the manufacturing process of manufacturing semiconductors, various types of gases are supplied and used depending on the purpose, but when most of these gases are inhaled into the human body or exposed to the atmosphere, they cause great damage such as safety accidents and environmental pollution. requires

For example, as a type of gas used in the ion implantation process, there is a fluid gas such as arsenic hydride (AsH3: Arsine), hydrogen phosphine (PH 3: Phosphine), or boron trifluoride (BF3: Boron Fluoride). These gases are very toxic and cause fatal results if inhaled by a worker. Therefore, care must be taken not to leak during the supply to the production line.

The gas used in the semiconductor manufacturing process is very important to manage, and these gases are installed in a cabinet with a high pressure charged in a gas cylinder (hereinafter referred to as "high pressure gas cylinder") and supplied to the production line through the gas supply line. , when about 90% of the gas is exhausted, the operator replaces the high-pressure gas cylinder with a new high-pressure gas cylinder so that foreign substances remaining inside the high-pressure gas cylinder are not supplied to the wafer processing process, thereby continuously supplying gas.

For this purpose, as is known in the patent literature (Korean Patent Application Laid-Open No. 10-2019-0040922), loading and It relates to an automatic high-pressure gas cylinder replacement system that automatically replaces an unloaded high-pressure gas cylinder, and more specifically, automatically connects the high-pressure gas cylinder to the high-pressure gas cylinder connection unit by simply loading the high-pressure gas cylinder into the high-pressure gas cylinder lift. And when the appropriate amount of gas in the high-pressure gas cylinder is exhausted, it relates to an automatic high-pressure gas cylinder replacement system that automatically separates the high-pressure gas cylinder from the high-pressure gas cylinder connection unit and enables unloading.

However, the conventional high-pressure gas cylinder is a vertical (upright) high-pressure gas cylinder, and the valve is opened in a posture perpendicular to each other in a vertical direction and the gas injection nozzle is horizontal, and the operation of discharging gas from the gas injection nozzle is performed.

On the other hand, a gas cylinder called a Y-cylinder (a container in which the valve assembly is installed at the top and bottom) or a ton cylinder (a container with a lot of weight) is usually placed on a skid for transporting the gas cylinder due to its shape that cannot be operated in an upright state or due to its large weight. Bring it to the position of the automatic gas supply device in the state of being mounted with

However, if the gas injection nozzle pointing to the sky is not directed exactly vertically, the connection with the connector is not performed well. Therefore, the gas injection nozzle of the horizontal gas cylinder should be adjusted by turning the gas injection nozzle of the horizontal gas cylinder toward the sky precisely before connecting.

In addition, the gas injection nozzle must fit in exactly on the connector coming down from the top, but when the center does not fit when the operator pushes the skid for transport of the gas cylinder, there is an inconvenience in that the operator has to adjust the skid while pushing it back and forth.

As there is no system that automatically aligns the gas injection nozzle of the horizontal gas cylinder with the connector exactly, there were many difficulties in the field, such as connecting by tightening the force screw.

In addition, if the operator continues to put in because he is unfamiliar with the timing of the completion of the input of the skid for transport, there is a high risk of collision with the equipment.

On the other hand, there is no configuration to prevent the pipe contamination of the connector module and the gas residue of the gas supply pipe from spreading to the outside in a state in which the transport skid is not inserted.

On the other hand, in the patent document (Korean Patent Application Laid-Open No. 10-2019-0070878 No. 10-2019-0070878) in which the gasket is input and discharged from the inside of the connector nut, the structure is complicated, and the structure and operation of the gasket removal cartridge are also complicated.

In addition, the conventional automatic gasket replacement device cannot be applied when the gas outlet port of the lying gas cylinder faces the sky.

On the other hand, a holder having an end cap separation prevention function of a gas cylinder is known in the patent document (Korean Patent Application Laid-Open No. 10-2019-0040922).

Since there is a separate actuator for separating/fastening the end cap by rotating the end cap in the holder having an end cap separation prevention function of the conventional gas cylinder, the gas cylinder must be rotated toward the connector to supply gas from the gas injection nozzle after the end cap is removed. A rotary table and its driving unit are required.

In addition, since the support means for supporting the end cap uses a latch and an elastic member, the structure is very complicated, and the holder may be forcefully inserted into the outer circumferential surface of the end cap.

On the other hand, since there is no sensor in the holder to detect whether the end cap is being held, whether the end cap was detached or detached after the end cap was removed, and the end cap is abnormal after holding the end cap before fastening the end cap. It is not possible to check whether or not it came out again due to an operation.

Korean Patent Publication No. 10-2019-0040922 Korean Patent Publication No. 10-2019-0070878

The present invention has been devised to solve the above problems, and an object of the present invention is to provide a gasket collection module for an automatic gas supply device of a gas cylinder in which the cover of the gasket container can be opened and closed automatically.

In order to achieve the above object, the gasket collection module for an automatic gas supply device of a gas cylinder according to claim 1 of the present invention has a gas outlet port 7 that is perpendicular to the valve 5 of the gas cylinder 1 (z). ), the finger gripper 550 gripping the gasket (G) ejected from the connector nut 340 of the connector module 300 connected to the A gasket collection part 910 including a gasket container 911 and a cover 913 disposed on one side of the gasket loading part 510 for loading the gasket G supplied from the supply part, and a gasket loading part 510 and An actuator 930 for forward and backward transport that transports the gasket collection unit 910 in the front-rear direction (y), and a container opening/closing driving unit that opens and closes the cover 913 through forward and backward movement and elevating for the gasket container 911 that moves back and forth ( 950).

In the gasket collection module for the automatic gas supplying device of a gas cylinder according to claim 2 of the present invention, the container opening/closing driving part 950 is located on the rear surface of the gasket collecting part 910, and a cam 952 for guiding the left and right elevation is provided. The formed cam fixing plate 951 includes a pin 953 installed on the cover 913 and moving along the trajectory of the cam 952 .

In the gasket collection module for automatic gas supply of a gas cylinder according to claim 3 of the present invention, an exhaust hole 915 connected to an exhaust pipe (not shown) is formed in the cover 913 .

In the gasket collection module for the automatic gas supplying device of a gas cylinder according to claim 4 of the present invention, the elevating guide portion 970 for guiding the elevating of the cover 913 is provided between the front and rear actuator 930 and the cover 913 . more installed in

According to the present invention, there are the following effects.

The used gasket is covered with fine residues of the supplied gas, and this gasket continues to generate fumes (smoke) from the container, which is dispersed in the air, pollutes the air, and exposes workers to danger. Therefore, a cover is installed on the upper part of the used gasket container, and in addition, an exhaust pipe is connected to the exhaust hole of the cover to suppress fumes from scattering to the outside.

As a singularity in the structure of the unit, it is manufactured in a structure in which the cover is opened only when necessary by using the driving body of the gasket loading unit 510 in use without making a separate driving body to move the cover.

1 is a side view of a transport skid on which a horizontal gas cylinder (or Y-cylinder) is loaded;
2 is a perspective view illustrating an automatic gas supply system including an automatic gas supply device and an alignment guide device according to a preferred embodiment of the present invention;
Figure 3 is a perspective view of the horizontal gas cylinder transport skid of Figure 1 before docking to the automatic gas supply device of Figure 2;
4 to 8 are a front view, a rear view, a left and right side view, and a plan view showing the automatic gas supplying device of FIG. 1;
Fig. 9 is a cross-sectional view taken along line 9-9 of Fig. 4;
10 is an explanatory view showing a transport state by being an alignment guide of a skid for transporting a horizontal gas cylinder.
11 is a front view of the connector module before revolution (tilting).
12 and 13 are front views after the connector module revolves (tilting) in clockwise and counterclockwise directions.
14 to 16 are perspective views illustrating a process unit.
17 and 18 are a front view and a partial perspective view of a state in which the gasket is chucked;
19 and 20 are a front view and a partial perspective view which are rotated 90 degrees and disposed around the connecting module;
21 and 22 are front views in which the gasket input/discharge module is inserted and the lower part of the connector module;
23 is a perspective view of the gasket container sliding to the position of the grip part chucking the used gasket.
Fig. 24 is a front view of the supplied gasket in a state in which it is charged (a) and lifted (b);
25 is a cross-sectional view showing a main part of a gasket alignment part;
Fig. 26 is a perspective view showing a gripper;
Fig. 27 is a plan view of the gripper chucking the gasket;
Fig. 28 is a partial perspective view of a state in which the gripper chucks the gasket;
29 and 30 are upper and lower perspective views of the end cap separation/fastening module;
30A is a perspective view of an end cap separation/fastening module having a proximity sensor for end caps;
31 to 36 are views for explaining a separation process of the end cap.
37 to 40 are rear views illustrating a separation procedure of the connector plug module from the connector module;
41 to 43 are perspective views illustrating a collection procedure of used gaskets.
44 is a perspective view showing a state of avoiding interference with the connector plug module when the end cap is separated/fastened;
45 is a rear view showing a connector plug module, a connector module, a vision module, an end cap separation/tightening module, a connector idle module, a gasket input/discharge module, and a gasket collection module except for the valve shutter module;
46 and 47 are a plan view and a front view in which the wheel brake module is installed at the entrance of the alignment guide unit.
48 and 49 are a perspective view and a front view of a state in which the wheel brake module is idle;
50 and 51 are a perspective view and a front view of a braked state of the wheel brake module.
52A to 52E are flowcharts showing a gas supply control method;
53A to 53D are flowcharts illustrating a gas replacement control method;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the X-axis is defined as the left-right direction, the Y-axis is defined as the front-back (length) direction, and the Z-axis is defined as the elevation (up-down) direction.

1 is a side view of a transport skid on which a horizontal gas cylinder (or Y-cylinder) is loaded, and FIG. 2 shows an automatic gas supply system including an automatic gas supply device and an alignment guide device according to a preferred embodiment of the present invention. One perspective view, Figure 3 is a perspective view of the horizontal gas cylinder transport skid of Figure 1 before docking to the automatic gas supply device of Figure 2, Figures 4 to 8 are front views showing the automatic gas supply device of Figure 1 , a rear view, a left and right side view and a plan view, FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 4, and FIG. 10 is an explanatory view showing the transport state by being align guide of the horizontal gas cylinder transport skid, FIG. 11 is a front view of the connector module before revolution (tilting), FIGS. 12 and 13 are front views of the connector module after revolution (tilting) in clockwise and counterclockwise directions, and FIGS. 14 to 16 are perspective views showing the process unit, 17 and 18 are a front view and a partial perspective view of a state in which the gasket is chucked, FIGS. 19 and 20 are a front view and a partial perspective view of the connecting module rotated by 90 degrees, and FIGS. 21 and 22 are gasket insertion/discharging The module is a lower and inserted front view of the connector module, FIG. 23 is a perspective view of the gasket container sliding to the position of the grip part chucking the used gasket, and FIG. 24 is a state in which the supplied gasket is charged (a) and lifted (b) is a front view of, FIG. 25 is a cross-sectional view showing a main part of the gasket alignment part, FIG. 26 is a perspective view showing the gripper, FIG. 27 is a plan view of the gripper chucking the gasket, and FIG. 28 is the gripper chucking the gasket It is a partial perspective view of one state, FIGS. 29 and 30 are top and bottom perspective views of the end cap separation/fastening module, FIG. 30A is a perspective view of the end cap separation/fastening module with a proximity sensor for the end cap, and FIGS. 31 to 36 are end caps It is a view for explaining the separation process of the cap, FIGS. 37 to 40 are rear views illustrating the separation procedure of the connector plug module with respect to the connector module, and FIGS. 41 to 43 are perspective views showing the collection procedure of the used gasket, FIG. 44 is the removal of the end cap / It is a perspective view showing the state of avoiding interference with the connector plug module when fastening, and FIG. 45 is a connector plug module, connector module, vision module, end cap separation/tightening module, connector idle module, gasket input/discharge module except for the valve shutter module. , a rear view showing the gasket collection module, FIGS. 46 and 47 are a plan view and a front view in which the wheel brake module is installed at the entrance of the alignment guide unit, and FIGS. 48 and 49 are a perspective view and a front view of a state in which the wheel brake module is idle 50 and 51 are a perspective view and a front view of a braked state of the wheel brake module.

First, as shown in FIG. 1 , the horizontal gas cylinder 1 in the longitudinal direction y will be described as a Y cylinder in which valve assemblies are formed at both ends of the gas cylinder body 3 .

A valve 5 along the longitudinal direction y is installed at one end of the head 2 of the horizontal gas cylinder 1 , and the gas outlet port 7 is disposed in the z direction orthogonal to the valve 5 . That is, the valve 5 and the gas outlet port 7 are disposed at right angles.

In addition, an end cap 8 serving as a stopper is screwed to the gas outlet port 7 .

This horizontal gas cylinder (1) is laid down on the upper surface of the transport skid (9) with cast (wheels) in the horizontal direction and tied with a belt so that it does not move in the loaded state, and then the operator pushes it close to the automatic gas supply device (100). do.

2 and 3, the automatic gas supply system of the gas cylinder according to the present embodiment largely moves the automatic gas supply device 100 and the automatic gas supply device 100 toward the transport skid 9 in the longitudinal direction. It includes an alignment guide device 1000 for transporting and docking in a straight line with (y).

Gas automatic supply device (100)

As shown in Figs. 4 to 8, the automatic gas supply device 100 includes a valve shutter module 200, a connector module 300 and a vision module 400 arranged vertically, and a gasket input/discharge module arranged on the left and right sides. 500 and the end cap separation/fastening module 600 , and a connector idle module 700 .

This automatic gas supply device 100 is in a hood box.

Hereinafter, a connector module 300, a vision module 400, a gasket input/discharge module 500, an end cap separation/tightening module 600, a connector idle module 700, a connector plug module 800, and a gasket collection module Reference numeral 900 is directly or indirectly related to the gas outlet port 7, and is defined as a 'module for the gas outlet port'.

Valve shutter module (200)

As shown in FIG. 8 , the valve shutter module 200 includes a valve shutter 210 for opening and closing the valve 5 and a valve shutter motor 230 for rotationally driving the valve shutter 210 .

Of course, a rotational power transmission unit 220 is installed between the valve shutter 210 and the valve shutter motor 230 .

As shown in Fig. 4, the valve shutter 210 is configured to open and close by rotating the pin 211 between the grooves on the edge of the valve 5. (Refer to the prior art of the patent document)

In addition, the valve shutter module 200 is moved along the x-axis and the y-axis by the first and second actuators 201 and 203 of FIG. 8 .

The first and second actuators 201 and 203 are air cylinders and are disposed orthogonally to each other.

As shown in FIG. 5 , the first actuator 201 includes a first movable rail block 201b that slides in the x-axis direction on the first fixed rail block 201a fixed to the base 30 .

The second actuator 203 includes a second movable rail block 203b that slides in the y-axis direction on the second fixed rail block 203a fixed to the first movable rail block 201b, as shown in FIG. 8 .

The x-axis is a direction in which the valve shutter 210 is moved to the position of the valve 5 , and the y-axis is a direction in which the valve shutter 210 is inserted into the valve 5 and moved to a position to be opened and closed.

connector module (300)

As shown in FIG. 9, the connector module 300 includes a motor 310, a hollow reducer 320 receiving rotational power of the motor 310, and a connector socket 330 that is an output terminal of the hollow reducer 320. The connector nut 340 installed in and fastened to the gas outlet port 7, the nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and the center of the hollow reducer 320 It includes a gas pipe 360 disposed through, and a C-ring 370 for preventing separation interposed between the head 361 of the gas pipe 360 and the connector nut 340 .

It shows that the gasket (G) is inserted into the front end of the head (361).

Insertion/discharge of the gasket (G) to the tip of the head 361 is performed by the gasket input/discharge module 500 shown in FIG.

In addition, the connector module 300 is raised and lowered along the z-axis by the third actuator 301 .

The lowering of the connector module 300 is for fastening it to the gas outlet port 7, and the raising of the connector module 300 is for returning to the non-fastening position.

The third actuator 301 is also an air cylinder.

As shown in FIG. 4, the third actuator 301 includes a third fixed rail block 301a supported by the support frame 10, and a third actuator 301 sliding along the third fixed rail block 301b in the z-axis direction. It consists of three movable rail blocks (301b).

The connector module 300 is installed in the third movable rail block 301b, so that the elevation of the connector module 300 approaches/removes the gas outlet port 7 to be fastened/disconnected. Of course, even during the separation/fastening of the end cap 8 to be described later, the approach/exit is made through the elevation of the connector module 300 .

Vision module (400)

The vision module 400 continues to photograph the head 2 of the gas cylinder 1 docked to the position where the gas is to be supplied while moving the module for the gas outlet port in the X and Y axes and θ (orbits), and eventually the connector module ( It is a photographing module that confirms the final position where the connector nut 340 of 300 will be accurately connected to the gas outlet port 7 .

The vision module 400 includes a vision camera (not shown) and lighting (not shown).

As shown in FIG. 45 , the connector module 300 and the vision module 400 are supported by the support frame 10 to face up and down.

Connector Plug Module (800)

The connector plug module 800 is a functional module for preventing contamination of the pipe 360 of the connector module 300 and the gas residues of the gas supply pipe from spreading to the outside in a state in which the gas cylinder 1 is not docked, and the connector module It is meaningful that the connector plug 810 opens and closes the connector nut 340 in the standby position without lifting or lowering the 300 .

If a lowering operation of the connector module 300 is required, the gas cylinder 1 blocks the docking path in the automatic gas supply apparatus 100, so the gas cylinder 1 is docked in the automatic gas supply apparatus 100. The front connector plug 810 is opened (released) in advance, which is undesirable in terms of safety from contamination or gas residues.

Therefore, in order to arrange the sequence as close as possible to the connecting operation of the gas cylinder 1 in the sequence, the connector plug 810 can be opened and closed after the gas cylinder 1 has been docked and the vision alignment is completed.

The connector plug module 800 is installed on the third movable rail block 301b to be raised and lowered at the same time as the connector module 300 as shown in FIGS. 37 to 40 .

That is, the connector plug module 800 is installed in the connector plug 810 separated/fastened to the connector nut 340 and the third movable rail block 301b of the third actuator 301 to connect the connector plug 810 to the connector plug 810 . An actuator for turning the connector plug (801) for turning it around the z-axis, and an actuator for turning the connector plug (803) installed in the actuator for turning the connector plug (801) to raise and lower the connector plug (810) (z-axis), and a connector It includes a bridge 830 for connecting between the actuator for lifting the plug (803) and the connector plug (810).

The actuator for turning the connector plug 801 is a rotary air cylinder 801 installed on the lower surface of the bracket connecting the third movable rail block 301b and the connector module 300 .

The connector plug elevating actuator 803 is an air cylinder, and consists of a fixed rail block 803a installed on the lower surface of the rotary pneumatic cylinder 801, and a movable rail block 803b that elevates along the fixed rail block 803a. .

Accordingly, depending on the rotation direction of the connector nut 340, when the connector plug 810 descends downward, it is separated (see FIG. 38), and when it rises, it is fastened (see FIG. 37).

In addition, an avoidance space portion 835 is formed in the bridge 830 to avoid interfering with the descent of the connector plug module 800 .

That is, the bridge 830 includes an inclined bridge 831 of which one side faces downward from the connector plug elevating actuator 803, and a horizontal bridge 833 that faces horizontally outward from the other side of the inclined bridge 831.

A connector plug 810 is installed on the upper surface of the other side of the horizontal bridge 833 .

This avoidance space portion 835 is a space formed below the inclined bridge 831, and is shown in FIG. 44 when the end cap 8 is separated/fastened between the connector module 300 and the end cap separation/fastening module 600. Similarly, it serves as a passage that does not interfere with the lowered bridge 831, thereby making it compact.

The separation (release) process of the connector plug 810 will be described with reference to FIGS. 37 to 40 .

37 is a state in which the connector plug 810 is fastened to the connector nut 340 to block it.

In this state, when the movable rail block 803b of the connector plug elevating actuator 803 is lowered while the connector nut 340 rotates in the disassembly direction, it is released as shown in FIG. 38 .

In this released state, the rotation of the connector nut 340 is stopped and, as shown in FIG. 39, the bridge 830 is rotated 90 degrees with the actuator 801 for turning the connector plug, so that the connector plug 810 is located outside the connector nut 340. is placed as

Then, as shown in FIG. 40 , the movable rail block 803b is raised to complete the separation of the connector plug 810 .

The fastening process of the connector plug 810 may be performed in the reverse order of the disconnection process.

End cap separation/fastening module (600)

The end cap separation/fastening module 600 is a module that receives the rotational power of the connector nut 340 and rotates the end cap 8 which is the stopper of the gas outlet port 7 to separate/fasten it.

That is, the end cap separation/fastening module 600 is, as shown in FIGS. 29 and 30 , a horizontal arm 610 and an end for rotation in which one end of the horizontal arm 610 is rotatably supported about the z-axis. It includes a cap actuator 630 and a tool part 650 supported by the other end of the horizontal arm 610 .

The horizontal arm 610 is of a link type.

In addition, the horizontal arm 610 includes a first horizontal arm 611 having one side installed on the end cap actuator 630 for rotation, and a second horizontal arm having one side disposed on the upper surface of the other side of the first horizontal arm 611 ( 613) and the second horizontal arm 613 with respect to the first horizontal arm 611 includes a length adjustment unit 615 that is supported so as to be adjustable in length.

The length adjusting part 615 has a long hole formed in the second horizontal arm 613 and a bolt fastened to the first horizontal arm 611 and has a normal structure.

The rotary end cap actuator 630 is a rotary air cylinder.

The tool part 650 is disposed on the lower side of the connector nut socket 651 disposed above the horizontal arm 610 or the second horizontal arm 613 , and the horizontal arm 610 or the second horizontal arm 613 . A shaft 655 supported by the horizontal arm 610 or the second horizontal arm 613 while connecting the socket 653 for the end cap, the socket 651 for the connector nut and the socket 653 for the end cap, and the end It includes an end cap holding part (not shown) installed inside the cap socket 653 .

The shaft 655 is disposed in a through hole 611 formed vertically through the other end of the horizontal arm 610 or the second horizontal arm 613 to move freely up and down.

A proximity sensor 670 for an end cap socket is installed on the lower surface of the horizontal arm 610 or the second horizontal arm 613 , and the proximity sensor 670 for the connector nut socket is installed on the upper surface of the horizontal arm 610 or the second horizontal arm 613 . A sensor 680 is installed.

Since the proximity sensor 670 for the end cap socket senses the distance between the lower surface of the horizontal arm 610 or the second horizontal arm 613 and the socket 653 for the end cap, the proximity sensor 670 for the end cap socket is It is preferable to be installed in an upward concave groove formed on the lower surface of the horizontal arm 610 so as to be on the same line with the lower surface of the horizontal arm 610 or the second horizontal arm 613 .

Similarly, since the proximity sensor 680 for the connector nut senses the distance between the upper surface of the horizontal arm 610 or the second horizontal arm 613 and the socket 651 for the connector nut, the proximity sensor 680 for the connector nut is It is preferable to be installed in a downwardly concave groove formed on the upper surface of the horizontal arm 610 or the second horizontal arm 613 so as to be on the same line with the upper surface of the horizontal arm 610 or the second horizontal arm 613 .

The end cap holding unit (not shown) can be implemented in various ways, such as mechanical or magnet type, but it is preferable because it is simple in structure to be implemented with a magnet (not shown) as in this embodiment.

On the other hand, on the lower side of the horizontal arm 610 or the first horizontal arm 611 between the rotary end cap actuator 630 and the tool part 650, as shown in FIG. 30A, the proximity sensor 690 for the end cap through a bracket is further It is preferable to install

The proximity sensor 690 for the end cap checks whether the end cap 8 is properly held in the end cap socket 653 after the end cap 8 is removed, and the actual end cap 8 is held before the end cap 8 is fastened. It is a detection sensor for confirming that the end cap 8 is not separated again due to an abnormal operation after being fastened in the middle.

As the proximity sensor 690 for the end cap for this purpose, a high frequency oscillation type proximity sensor 690 is preferable.

The high-frequency oscillation type proximity sensor 690 is a sensor that detects a change in which oscillation is reduced or stopped due to heat loss due to an induced current flowing in the end cap 8 when the high-frequency magnetic field approaches. Stable detection regardless.

The operation of the end cap separation/fastening module 600 will be described with reference to FIGS. 31 to 36 .

End cap removal action

1. When the head 2 of the gas cylinder 1 is docked to the automatic gas supply device 100 as shown in FIG. 3, the end cap 8 under the connector nut 340 of the connector module 300 as shown in FIG. this is placed

2. In the state of FIG. 31 , the tool part 650 is disposed between the connector nut 340 and the end cap 8 by rotating the horizontal arm 610 by 90 degrees about the z-axis as shown in FIG. 32 . The socket 651 for the connector nut of the tool part 650 is caught by the horizontal arm 610 .

3. In the state of Fig. 32, when the support frame 10 is lowered by operating the elevating driving unit 110 to be described later, the gas outlet port module is lowered as shown by the arrow ① as shown in Fig. 33, and the socket for the end cap 653 is After being inserted into the outer circumferential surface of the end cap 8, the horizontal arm 610 is dropped from the socket 653 for the end cap by raising it slightly upward as shown by the arrow ②, so that it is in the middle of the shaft 655.

4. In the state of FIG. 33, by operating the third actuator 301, as shown in FIGS. 34 and 44, the connector module 300 is lowered by the arrow ③ to insert the connector nut 340 into the socket 651 for the connector nut. insert

5. When the connector nut 340 is rotated in the state of FIGS. 34 and 44 (rotating in the same manner as unwinding from the gas outlet port 7 described above) in the state of FIGS. 34 and 44, the tool part 650 is also the end cap 8 as shown in FIG. is rotated in the loosening direction to pull it out. At this time, by sensing the loosening height of the end cap 8 by the proximity sensor 670 for the end cap, the support frame 10 is also gradually raised in the direction of the arrow ④.

6. When the end cap 8 is separated from the gas outlet port 7 as shown in FIG. 35, the connector nut 340 is pulled out from the connector nut socket 651 by the operation of the third actuator 301 as shown in FIG. The module 300 is returned to its original position.

7. The horizontal arm 610 holding the end cap 8 is rotated and goes to the position shown in FIG. 31 .

8. The proximity sensor 690 for the end cap detects whether the end cap 8 held by the horizontal arm 610 at the position of FIG. 31 is holding, and if not held, an alarm is notified to the operator.

The separated end cap 8 is adsorbed and held by an end cap holding part (not shown) such as a magnet installed inside the end cap socket 653 and is not separated.

Here, since the support frame 10 also rises slightly upward while the end cap 8 is separated, the operation for supplying gas after lowering the support frame 10 to fit the valve shutter 210 to the valve 5 do

End cap tightening action

After the gas supply to the gas cylinder 1 is completed, the end cap 8 is connected in the reverse order of the end cap separation operation in order to close it again by fastening the separated end cap 8 to the gas outlet port 7 . Of course, this is blocked by fastening the end cap 8 to the gas outlet port 7 by rotating it in the same way as the fastening connection method of the connector nut 340 to the gas outlet port 7 described above.

At this time, while measuring the distance between the proximity sensor 680 for the connector nut socket and the horizontal arm 610, the support frame 10 may be lowered according to the amount of the end cap 8 being fastened and descending.

Gasket input/discharge module (500)

The gasket input/discharge module 500 inserts an unused gasket (G) into the gasket support pipe 362 of the gas pipe 360 before the connector nut 340 is fastened to the gas outlet port 7, and the connector nut ( When the 340 is separated from the gas outlet port 7, it is a module for taking out the used gasket (G).

That is, the gasket input/discharge module 500 includes a gasket loading part 510 for loading the gasket G supplied from the gasket supply part 501, and a gasket loading part 510 as shown in FIGS. 17 to 23 . ), a pair of finger grippers 550 for gripping the gasket (G), and a gasket actuator 560 for approaching/removing (y-axis) of the pair of finger grippers 550 from each other. , a gasket actuator 570 for left and right that moves a pair of finger grippers 550 to the left and right (x-axis), and a pair of finger grippers 550 for rotation (xz plane) toward the connector module 300 The gasket actuator 580 and the gasket (G) of the pair of finger grippers 550 are lifted (z-axis) to be inserted/discharged into the connector nut 340 of the connector module 300. A gasket actuator for input/discharge ( 590).

As shown in FIGS. 24 and 25, the gasket loading unit 510 includes a gasket charging unit 520 for charging the gasket G supplied from the gasket supply unit 501, and a gasket charging unit 520. It includes a gasket aligning unit 530 disposed on the upper side of and a gasket actuator 540 for lifting lifting (z-axis) the gasket G of the gasket charging unit 520 to the gasket aligning unit 530 .

In addition, the gasket loading unit 510 has a proximity sensor 515 for a gasket that detects whether the gasket G is in the lifting position as shown in FIG. 24(b) and whether the gasket G is gripped as shown in FIG. 18 . ) is installed.

As shown in Figs. 24 and 25, the gasket charging unit 520 includes a gasket charging plate 523 having lower and front support pieces 521 and 222 supporting the lower surface and the front surface of the gasket G, and a gasket. It includes an alignment block 524 that supports the rear surface of (G).

The lower surface support piece 521 has an arc shape concave downward in the same trajectory as the lower surface of the gasket (G).

The front support piece 522 has a bar shape protruding from the vertical center line of the gasket charge plate 523 , and its upper end protrudes to the center of the gasket (G).

As shown in FIG. 25, a blocking wall 525 is formed on one side of the alignment block 524 to block the gasket G supplied from the gasket supply unit (not shown) from deviated from the lower surface support piece 521. has been

As shown in FIGS. 24 and 25 , the gasket alignment unit 530 is provided on the front surface of the alignment block 524 .

The gasket alignment part 530 includes a groove 531 for alignment formed from the front side of the block 524 for alignment toward the left side (x-axis), a gasket alignment plate 532 disposed in the groove 531 for alignment, and , and a spring 533 installed between the gasket alignment plate 532 and the alignment groove 531 .

This is because when the gasket aligning plate 532 is of a fixed type in the aligning operation of the gasket (G), the finger gripper 550 presses the gasket (G) with the gasket aligning plate 532, thereby causing a scratch on the gasket (G). Therefore, the movable gasket alignment plate 532 with the spring 533 compressed in the y-axis direction is made of a resin-based material to prevent automatic alignment of the gasket (G) and scratches.

That is, when the gasket charge plate 523 occupied by the gasket G is lifted and the rear surface of the gasket G is located on the front surface of the gasket aligning plate 523, the both sides of the gasket G with the finger grippers 550 are lifted. Alignment is automatically performed when chucking.

The lifting gasket actuator 540 is an air cylinder installed on the rear surface of the alignment block 524 .

The lower surface of the gasket charge plate 523 and the piston of the actuator 930 for front and rear to be described later are connected by a connection block 543 .

As shown in FIG. 23 , the alignment block 524 is supported by the support frame 10 through the front and rear actuators 930 .

A pair of finger grippers 550 are arranged on the left and right with the front support piece 522 as the center.

That is, the pair of finger grippers 550 are a pair of access/exit blocks 551 installed on the upper surface of the gasket actuator 560 for approach/exit, as shown in FIGS. 26 to 28, and an approach/exit block 551 A pair of grip parts 552 installed on the upper end of the removal block 551 and disposed on both sides of the gasket G, and a pair of grip parts 552 formed on the inner surface of the pair of grip parts 552 as long as they are in contact with the front surface of the gasket (G) A pair of gasket alignment projections 553 are included.

In particular, a fitting groove 554 into which the C-ring G1 installed on the side surface of the gasket G is fitted is formed on the inner surface of the pair of grip parts 552 as shown in FIGS. 26 and 27 .

Here, the gasket (G) is a donut-shaped metal, and a C-ring (G1) is fitted on the side thereof (see FIG. 27).

Therefore, by manufacturing the grip portion 552 in a shape consistent with the shape of the side of the gasket (G), it is possible to implement a stable operation with only a two-position grip (Position Grip) during chuck operation.

In addition, there is a gasket alignment protrusion 553 capable of supporting alignment in the finger gripper 550, so that alignment is performed without a separate operation during the operation of the gasket chuck.

In addition, since the front and rear surfaces of the gasket G should not be scratched, the grip portion 552 is preferably made of an engineering plastic material.

The gasket actuator 560 for approach/exit is an air cylinder, and is installed in the gasket actuator 580 for rotation.

The left and right gasket actuators 570 are air cylinders and are supported by the support frame 10 .

The rotary gasket actuator 580 is a rotary air cylinder.

The gasket actuator 590 for input/discharge is an air cylinder provided due to a specific posture of the horizontal gas cylinder 1, and is installed between the left and right gasket actuators 570 and the rotary gasket actuator 580, as shown in FIG. .

The gasket actuator 590 for input/discharge moves the finger gripper 550 up and down because the connector module 300 is vertically disposed.

On the other hand, a gasket collecting part 910 is installed on one side of the gasket loading part 510, and the gasket loading part 510 and the gasket collecting part 910 are forward and backward actuators 930 for transferring them in the front-rear direction (y). include

The actuator 930 for front and rear is an air cylinder, and includes a fixed rail block 931 and a movable rail block 933 sliding back and forth in the fixed rail block 931 .

The fixed rail block 931 is supported on the support frame 10 , and a gasket loading part 510 and a gasket container 911 are installed in the movable rail block 933 .

Since the gasket (G) is a disposable that is compressed when it is fastened, it is collected and discarded in the gasket container (911).

The reason that the gasket container 911 is disposed in this way is because the gas outlet port 7 of the horizontal gas cylinder 1 is oriented orthogonally, so that the minimum occupied space among the interior of the automatic gas supply device 100 is reduced. in order to occupy

The operation of the gasket input/discharge module 500 will be described with reference to FIGS. 17 to 24 .

Gasket Insertion Operation

1. As shown in FIG. 24( a ), one unused gasket NG supplied from the gasket supply unit 501 is taken over by the gasket charge plate 523 .

2. As shown in Figs. 24(a) to 24(b), the gasket aligning unit 530 facing the grip unit 552 by raising (z-axis) the gasket charge plate 523 with a gasket actuator 540 for lifting. Lift the unused gasket (NG) with The presence or absence of lifting of the gasket (G) is detected by the proximity sensor 515 for the gasket.

3. As shown in FIGS. 17, 18 and 28, by pulling the left and right gasket actuators 570 to the left (x-axis), the grip part 552 contacts the unused gasket NG and at the same time the gasket aligning part 530 ), while aligning the unused gasket (NG) in the gasket alignment plate 532, chucking by the approach (y-axis) operation of the gasket actuator 560 for approach/exit.

4. When the unused gasket (NG) is aligned and chucked, when the gasket charge plate 523 is lowered (z-axis), the unused gasket (NG) is taken over and is stopped. At this time, the gasket proximity sensor 515 detects the presence or absence of chucking of the gasket (G).

5. Push the chucked grip part 552 to the right with the left and right gasket actuators 570 (x-axis) to get out of the gasket alignment part 530 and return it to the initial position.

6. The chucked grip part 552 returned to its initial position is rotated 90 degrees about the y-axis with a rotary gasket actuator 580 to be disposed around the connector module 300 as shown in FIGS. 19 and 20 .

7. Push the chucked grip part 552 further to the right with the left and right gasket actuators 570 (x-axis) to position the chucked unused gasket NG just below the connector nut 340 as shown in FIG. 21 .

8. As shown in FIG. 22, the unused gasket NG of the grip part 552 is put into the gasket support pipe 362 of the connector nut 340 by the rising (z-axis) operation of the gasket actuator 590 for input/discharge. .

9. When the input of the unused gasket (NG) is completed, unchucking is performed by the removal (y-axis) operation of the gasket actuator for approach/exit 560, and then lowers (z-axis) of the gasket actuator 570 for input/discharge. The unchucked grip part 552 is taken out of the connector nut 340 by operation. (See FIG. 21 )

10. Pull the unchucked grip portion 552 to the left (x) with the left and right actuators 570 to move away from the circumference of the connector nut 340 (see FIG. 19).

gasket ejection action

One cycle of discharging the used gasket OG in the connector nut 340 separated from the gas outlet port 7 after the gas supply to the gas cylinder 1 is completed will be described below.

1. Push the unchucked grip part 552 to the right (x) with the left and right gasket actuators 570 to position it under the connector nut 340 (see FIG. 21).

2. The grip portion 552 is inserted into the connector nut 340 by the lifting operation of the gasket actuator 570 for input/discharge. (See FIG. 22 )

3. The gasket OG in which the grip part 552 is used is chucked by the approach operation of the gasket actuator 560 for approach/exit.

4. The chucked grip portion 552 is taken out from the connector nut 340 by the lowering operation of the gasket actuator 590 for input/discharge. (See FIG. 21 )

5. Pull the chucked grip part 552 to the left with the left and right gasket actuators 570 to escape from the circumference of the connector nut 340 (see FIG. 19).

6. The chucked grip part 552 is rotated by -90 degrees with the rotary gasket actuator 580 to return to a position facing the gasket alignment part 530 .

7. By sliding the gasket container 911 and the gasket loading part 510 backward, the gasket container 911 faces the chucked grip part 552 as shown in FIG. 23 .

8. Pull the chucked grip part 552 to the left with the left and right actuators 570 and place it on the gasket container 911.

9. The gasket (OG) used for unchucking of the grip part 552 is free-falling by the removal operation of the gasket actuator 560 for approach/exit, and is collected in the gasket container 911.

Gasket collection module (900)

A normally used gasket is stained with fine residues of the supplied gas. This gasket continues to generate hum in the gasket container 911, which is dispersed in the air to pollute the air, and puts workers at risk. will expose

Therefore, the cover 913 is installed on the upper portion of the gasket container 911 and an exhaust pipe (not shown) is connected to the cover 913 to suppress scattering of smoke to the outside.

One peculiarity in the structure of the gasket collection module is that the cover 913 is automatically turned on/off only in necessary situations using the existing front and rear actuators 930 without making a separate actuator for moving the cover 913.

As shown in FIGS. 41 to 43 and 45 , the gasket collecting module 900 includes a gasket collecting unit 910 , an actuator 930 for forward/backward transfer, and a container opening/closing driving unit 950 .

The gasket collecting unit 910 includes a gasket collecting box 911 and a cover 913 disposed on one side of the gasket loading unit 510 .

The actuator 930 for forward and backward transfer is an air cylinder, and transfers the gasket loading part 510 and the gasket collecting part 910 in the forward and backward direction (y).

The gasket loading unit 510 and the gasket collecting unit 910 are installed on the movable rail block 933 .

The container opening/closing driving unit 950 opens and closes the gasket container 911 that is transported back and forth through forward and backward transport and elevating of the cover 913 .

The container opening/closing driving unit 950 includes a cam fixing plate 951 fixed to the bracket 15 connecting the support frame 10 and the gasket input/discharging module 500, and a cam fixing plate 951 while installed on the cover 913. and a pin 953 that moves along the trajectory of the cam 952 of

As shown in FIG. 42 , the cam 951 is formed in the final horizontal direction while going obliquely from the bottom to the top, and as the pin 953 is transferred back and forth, it is gradually raised and lowered at the same time.

In addition, it is preferable that the elevating guide portion 970 for guiding the elevating of the cover 913 is further installed between the front and rear actuator 930 and the cover 913 .

The elevating guide unit 970 includes an elevating guide bar 971 installed on the movable rail block 933, an elevating convex 973 elevating along the elevating guide bar 971, an elevating block 973, and a cover ( 913) to include a connection bracket (975) for connecting.

An exhaust hole 915 connected to an exhaust pipe (not shown) is formed in the cover 913 .

The operation of such a gasket collection module 900 will be described with reference to FIGS. 41 to 43 .

In the state in which the finger gripper 550 gripping the gasket OG used as shown in FIG. 41 is positioned on the gasket loading part 510, it is transferred to the y-axis (rear side) as shown in FIG. 42 and the gasket collecting part 910 moves to the position where the finger gripper 550 is located.

Then, as shown in FIG. 42 , when the gasket collecting part 910 is transferred to the rear, the cover 913 goes up to open the upper part of the gasket collecting container 911 .

When the gasket collecting part 910 with the cover 913 open comes to the position of the finger gripper 550 as shown in FIG. 42, the finger gripper 550 is rotated by the rotary gasket actuator 580 as shown in FIG. When it is located in the container 911 and the gripping is released, the gasket OG is dropped into the gasket container 911 for automatic collection.

Connector idle module (700)

The connector idle module 700 is a unit that revolves (rotates) the module for the gas outlet port on the x-z plane with respect to the support frame 10 .

The connector revolving module 700 is a unit that revolves (rotates) the support frame 10 with respect to the movable left and right rail blocks 150 around a circle drawn by the x-z plane, that is, the connector module 300 and the vision module 400 .

That is, when the gas outlet port 7 is located on the same line between the connector module 300 and the vision module 400 as shown in FIG. 11 , the connector module 300 is lowered and connected to the gas outlet port 7 . .

However, as shown in FIGS. 13 and 14 , when the gas outlet port 7 is not located on the same line between the connector module 300 and the vision module 400 and is inclined by +θ or -θ, the connector idle module After the module for the gas outlet port is rotated clockwise or counterclockwise by 700 and aligned on the same tilting line, the connector module 300 is lowered and connected to the gas outlet port 7 .

As shown in FIGS. 14 to 16, the connector idle module 700 is a motor 710 and a screw rod 720, a ball screw moving block 730 fastened to the screw rod 720, and a ball screw moving block ( A cam follower block 740 disposed before and after 730, a first cam follower 750 that rolls along the first cam follow rail 741 of the cam follower block 740, a cam follower block 740 and a cam The driving plate block 760 installed between the follower 750, the second cam follower 770 and the second cam follower 770 rolling along the second cam follower rail 743 of the cam follower block 740. It includes an idle plate 780 to which is fixed, and a cover plate 790 fastened to the driving plate block 760 and the idle plate 780 .

One surface of the cam follower block 740 is supported on the movable left and right rail blocks 153 through brackets 157 .

The first cam follower rail 741 has a circular arc shape convex downward on the other surface of the cam follower block 740 .

The second cam follower rail 743 is an arc-shaped long hole perforated in the cam follower block 740 .

Accordingly, the first and second cam follower rails 741 and 743 are arranged side by side.

The driving plate block 760 elevates (z) along the z-axis rail 731 of the ball screw moving block 730 .

The left and right movement of the driving plate block 760 is linked to the movement of the first cam follower 750 along the first cam follower rail 741 .

The first cam follower 750 is rotatably installed on the driving plate block 760 and is placed on the first cam follower rail 741 .

As shown in FIGS. 15 and 16 , the second cam follower 770 is placed in plurality in the second cam follower rail 743 .

Of course, the second cam follower 770 is pre-assembled and installed on the idle plate 780 .

The idle operation of this connector idle module 700 is as follows.

When the motor 710 rotates, the screw rod 720 is rotated, and the ball screw moving block 730 rises or descends in the z-axis direction by the rotated amount.

The driving plate block 760 is also raised or lowered by the raised or lowered length, and at the same time, the first cam follower 750 is raised or lowered along the first cam follower rail 741 so that the driving plate block 760 is also left or move to the right

The rising or falling of the driving plate block 760 is performed by simultaneously raising or lowering the second cam follower 770 of the idle plate 780 transmitted through the cover plate 790 along the second cam follower rail 743, As shown in FIG. 12 or 13 , the connector module 300 is idle or tilted.

By this connector idle module 700, automatic connection is possible by matching the same radius as the connecting nut 340 no matter where the direction of the gas outlet port 7 of the very heavy and lying gas cylinder 1 is located.

If it is not possible to idle or tilt, it is inconvenient to take the gas cylinder 1 again and turn the gas outlet port 7 of the gas cylinder 1 to the original position.

X, Y, Z axis transfer driving part of the gas automatic supply device 100

On the other hand, the automatic gas supplying device 100 has, as shown in FIGS. 4 to 8 and 45 , a lift driving unit 110 for elevating (Z) the automatic gas supplying device 100 , and a module for the gas outlet port. It includes a forward and backward movement unit 130 and a left and right movement unit 150 for moving the forward and backward (Y) and left and right (X).

The lift driving unit 110 is installed between the floor and the base 30 , and is a vertical transfer driving unit for aligning the virtual center image between the connector module 300 and the vision module 400 with the gas outlet port 7 .

The forward/backward movement unit 130 is a forward/backward transfer driving unit that pulls the gas outlet module toward the gas outlet port 7 to approach it when the alignment guide device 1000 enters the automatic gas supply device 100 .

That is, the front and rear moving part 130 is a fixed front and rear rail block 131, a movable front and rear rail block 133 placed on the upper surface of the fixed front and rear rail block 131, and a movable front and rear rail block with respect to the fixed front and rear rail block 131. It includes a front and rear driving unit 135 for sliding the 133 back and forth.

The front and rear drive unit 135 includes a screw-nut mechanism in which the nut of the front and rear rail block 133 reciprocates back and forth by the rotation of the screw rod of the motor.

In addition, the lower surface of the fixed front and rear rail block 131 is fixed to one side of the upper surface of the base (30).

The left and right movement unit 150 is a left and right transfer driving unit for aligning the connector module 300 and the vision module 400 toward the gas outlet port 7 .

That is, the left and right moving part 150 includes a fixed left and right rail block 151 fixed to the upper surface of the rail block 133 before and after movable, and a movable left and right rail block 153 placed on the upper surface of the fixed left and right rail block 151, and fixed It includes a left and right driving unit 155 for sliding the movable left and right rail blocks 153 left and right with respect to the left and right rail blocks 151 .

The left and right driving unit 155 also includes a screw-nut mechanism in which the nut of the movable left and right rail block 153 reciprocates left and right by the rotation of the screw rod of the motor.

The connector revolving module 700 revolves (rotates) the support frame 10 with respect to the movable left and right rail blocks 150 .

Gas cylinder alignment guide device (1000)

In addition, it is preferable that the gas cylinder 1 enters the automatic gas supply device 100 straight in its longitudinal direction from the beginning.

For this purpose, as shown in FIGS. 2 and 9 , the alignment guide device 1000 is installed on the front side of the automatic gas supply device 100 .

In the alignment guide device 1000 , left and right alignment guide units 1100 are installed side by side in the longitudinal direction.

The left and right alignment guide unit 1100 is a left and right fixed alignment guide unit 1200 disposed side by side on the left and right sides of the transport skid 9, and left and right movable alignment disposed on the upper surface of the left and right fixed alignment guide unit 1200 The guide part 1300, the left and right movable alignment guide part 1300 with respect to the left and right fixed alignment guide part 1200, the alignment guide driving part 1400 for sliding it in the longitudinal direction (y-axis), and the left and right movable alignment It includes a plurality of rolls 1500 formed on the inner surface of the guide unit 1300, and a clamping module 1600 installed on the left and right movable alignment guide unit 1300 to clamp the transport skid 9.

The alignment guide driving unit 1400 is a ball screw type mechanism that converts rotational motion into linear motion by rotation of a motor.

The left and right fixed alignment guide part 1200 and the left and right movable alignment guide part 1300 slide in the form of rails.

The clamping module 1600 is clamped by pressing the both sides of the skid 9 by moving the clamp 1630 by a driving cylinder 1610 such as an air cylinder.

On the other hand, at the entrance between the left and right fixed alignment guide unit 1200 and the left and right movable alignment guide unit 1300, a trapezoidal inclined introduction unit 1115 that is wider than the left and right width of the transport skid 9 is formed.

An operation of the alignment guide apparatus 1000 will be described with reference to FIG. 10 .

First, as shown in FIG. 10 ( a ), the transport skid 9 initially enters between the alignment guide units 1100 .

At this time, it represents a case in which the skid for transport 9 entered skewed by θ with respect to the longitudinal direction.

When the left and right movable alignment guide part 1300 retreats in the longitudinal direction as shown in FIG. 10(b) in the initial entry state as shown in FIG. A crooked state equal to the width between the left and right movable alignment guide units 1300 is directly aligned.

When the transport skid 9 is aligned as shown in FIG. 10 ( b ), the clamp 1630 of the clamping module 1600 presses both sides of the transport skid 9 to clamp it as shown in FIG. 10 ( c ).

In the state in which the transport skid 9 is clamped, the left and right movable alignment guide unit 1300 may be advanced along the longitudinal direction toward the automatic gas supply device 100 as shown in FIG. 10( d ).

On the other hand, as shown in FIGS. 46 to 51, the alignment guide device 1000 is disposed in front of the entrance side of the left and right alignment guide units 1100, and is in contact with the left and right sides of the transport skid 9 to be transported. The left and right wheels 1700 that are idle (rotated) around the z-axis, the skid sensor 1800 that detects the transport skid 9 before departing from the exit of the left and right alignment guide unit 1100, and the left and right clamping modules ( It is preferable to further include a left and right wheel brake unit 1900 that converts the left and right wheels 1700 to an idle (rotation) or brake (stop) state according to the presence or absence of clamping of the 1600) or the detection of the skid sensor 1800.

The left and right wheels 1700 are installed with the z-axis as the center of rotation, and their outer peripheral surface is in line contact with the side of the transport skid 9 .

The skid sensor 1800 includes a light emitting sensor 1800a and a light receiving sensor 1800b installed inside the left and right movable alignment guide unit 1300 as shown in FIG. 47 .

In addition, when the operator pushes the transport skid 9 to the position shown in FIG. 46 and the sensor 1800 for the skid detects the side of the transport skid 9, the child is in contact with the side of the transport skid 9 The left and right wheels 1700 rotating slowly (see FIGS. 48 and 49) are braked (refer to FIGS. 50 and 51) to stop the rotation. Then, the operator no longer pushes the transport skid 9 and ends.

As shown in FIGS. 48 to 51 , the left and right wheel brake units 1900 include a first locking unit 1910 and a second locking unit 1930 installed on the same rotation axis as the left and right wheels 1700 , and a second It includes an actuator 1950 for wheel locking for linearly moving the locking part 1930 to engage the first locking part 1910 .

The first locking unit 1910 is preferably implemented as a spur gear type.

The second locking unit 1930 is preferably implemented as a rack gear type having a very short length meshing with the spur gear.

The actuator 1950 for wheel locking is preferably implemented as a single-acting cylinder 1950 that is spring-returned (unlocked) when pneumatic inlet, and spring-expanded (locked) when pneumatic exhaust.

Accordingly, the second locking part 1930 is a second locking piece 1931 installed on the piston 1953 of the single-acting cylinder 1950 and the second locking piece 1931 with respect to the cylinder 1951 of the single-acting cylinder 1950 . ) includes a straight guide rail 1933 for guiding the linear motion.

The straight guide rail 1933 includes a fixed guide rail 1933a and a movable guide rail 1933b.

The fixed guide rail 1933a is fixed to the upper surface of the bracket 1955 surrounding the single-acting cylinder 1950 .

A second locking piece 1931 is coupled to the front end of the movable guide rail 1933b through a bracket 1935 .

In addition, the piston 1953 and the bracket 1935 are coupled through a L-shaped bracket 1937 .

This wheel locking actuator 1950 operates to idle (unlock) the left and right wheels 1700 in FIG. 49 or brake (lock) FIG. 51 according to the skid sensor 1800 .

On the other hand, it is preferable that a load cell 1010 for measuring the weight of the gas cylinder 1 of the transport skid 9 during gas supply is installed on the floor.

That is, since the transport skid 9 is held to some extent when the gas supply is performed, the clamping force of the clamp 1630 during gas supply is weaker than the clamping force during transport of the transport skid 9. 9), since it is impossible to accurately measure the weight, the left and right wheels 1700 are locked to compensate for the weakened clamping force for weight measurement to hold the rear of the transport skid 9 in a brake state.

Due to the configuration of the left and right wheel brake units 1900 as described above, the following effects are obtained.

When inputting the horizontal gas cylinder (1), if the operator does not know the timing of the completion of the input and continues to input, there is a risk of collision with the automatic gas supply device 100. When the sensor detects the input of the horizontal gas cylinder (1), the left and right wheels (1700) in the idle state (unlocked) are switched to the brake state (locked), making it somewhat difficult for the operator to push the gas cylinder transport skid (9) This allows for familiarization before collision.

When the transport skid 9 is clamped and moved to the automatic gas supply device 100, the wheel 1700 is maintained in an idle state, and a section in which the clamping is released occurs between step operations. At this time, the transport skid 9 is In order to prevent the wheel from being pushed, it is switched to the brake state of the wheel 1700 to increase safety in the alignment guide operation.

The actuator for wheel locking (1950) consists of a single-acting cylinder that returns (unlocks) the spring when pneumatic inlet and expands (locks) the spring when pneumatic exhaust. (100) It acts as an interlock to prevent pushing inward or outward.

After the normal input of the transport skid 9 is completed, the remaining gas amount and replacement time are checked using the load cell 1010 during gas supply. The clamping force switches from high pressure to low pressure. However, when switching to low-pressure gripping, a sliding phenomenon may occur due to an earthquake or floor slope, so it serves to hold the skid 9 as a safety device that is a locking (brake) of the wheel 1700 . However, since the wheel 1700 is in line contact and the braking force is enough to maintain the stopped state of the contact wheel 1700 , there is no significant influence on the load cell 1010 .

Even if the skid 9 carrying the horizontal gas cylinder 1 enters obliquely between the left and right alignment guide parts 1100, sliding the left and right movable alignment guide part 1300 back and forth in the inclined entry state rolls 1500. The inclination of the skid 9 is easily aligned in the longitudinal direction of the left and right alignment guide parts 1300 through the intersection of the parts touching and not touching.

When the center is in the right state, clamping and releasing the skid 9 with the clamp 1630 and operating the left and right movable alignment guide unit 1300 with front and rear sliding, the gas to the desired position of the automatic gas supply device 100 The cylinder 1 is transport docked.

Gas supply/replacement control method

Hereinafter, a control method for injecting gas into the gas cylinder or replacing the gas cylinder using the alignment guide device 1000 and the automatic gas supply device 100 of the gas cylinder 1 described above will be described.

How to control gas supply

The gas supply control method is as shown in FIGS. 52A to 52E, inserting the gas cylinder transport skid->Gas cylinder barcode reading (BCR)->Gas cylinder center height measurement->Vision->Connector plug separation (disassembly)-> End cap removal -> gasket tightening -> connector nut fastening -> valve open sequence.

1. Insert the skid (9)

(1) The operator pushes the skid 9 between the alignment guide devices 1000 and starts inputting the gas cylinder 1 (Y-Cylinder) (S10).

(2) When the input skid 9 is detected by the skid sensor 1800, the wheel 1700 is braked at idle (lock) and the operator does not push the skid 9 anymore and ends the input (S11).

(3) Then, when the operator presses the input button (S12), the clamp 1630, which is an alignment guide cylinder, clamps the skid 9, and the brake of the wheel 1700 is unlocked (S13).

(4) In the clamping (chuck) state, the left and right movable alignment guide part 1300 pushes the skid 9 forward along the y-axis direction (S14).

(5) If the advanced skid (9) is correct as a result of checking the correct position, it is determined whether the barcode of the gas cylinder (1) is read (S20), otherwise the left and right movable alignment guides by locking and unlocking the brake The unit 1300 is moved backward (S16), and the step S13 is repeated.

2. Barcode reading of gas cylinder (BCR Reading)

If the barcode of the gas cylinder 1 is read and the type of gas to be supplied is correct, the automatic gas supply device 100 is raised by using the Z-axis lift driving unit 110 (S30), otherwise an alarm is generated (S21).

3. Align the height center of the gas cylinder with the height center of the gas automatic supply device.

The Z-axis is moved upward (S30), the longitudinal center height of the gas cylinder 1 is measured with a height measuring sensor (S31), and the gas automatic supply device 100 is moved to the center height position of the gas cylinder 1 (S32).

4. Vision alignment (X-axis, Y-axis, orbit)

After moving to the Z-axis center position (S32), the gas cylinder 1 is moved to the vision measurement position, that is, in the automatic gas supply device (inside the skid hood box) (S40).

After moving to the vision measurement position (S40), while checking the vision shooting, determine the X-axis, Y-axis, and idle position of the gas automatic supply device 100 (S41), and if correct, plug the automatic gas supply device 100 into the connector (CGA Plug) and End Cap Move to the workable Z-axis position (S50), otherwise, move the X-axis, Y-axis, and idle position (S42), and the moved X-axis, Y-axis, and idle position Confirmation judgment is made with a vision (S43).

5. Remove (release) the connector plug (CGA PLUG)

When the X-axis, Y-axis, and the idle position match (S41 or S43), the gas automatic supply device 100 is moved to the Z-axis position, which is a connector plug and end cap workable position (S50).

In the pivoting neutral state of the connector plug 810, the connector nut 340 is rotated in the separation direction (S51), and the connector plug 810 is lowered to separate it (S52).

The rotation of the connector nut 340 is stopped, the separated connector plug 810 is rotated 90 degrees (S53), and the connector plug 810 is raised to end the separation of the connector plug 810 (S54).

6. End cap removal (disassembly)

When the separation of the connector plug 810 is finished (S54), the end cap separation/fastening module 600 is rotated toward the end cap 8 (S60), and the Z-axis is lowered while checking the bottom of the end cap 8. Insert the end cap socket 653 of the end cap separation/fastening module 600 into the end cap 8 (S61).

The connector nut 340 is inserted into the connector nut socket 651 of the end cap separation/fastening module 600 by lowering the connector module 300 (S62).

The connector nut 340 rotates in the separation direction (S63), and the end cap separation/fastening module 600 is in a neutral state (S64), and when the Z-axis is raised in proportion to the rotation encoder value, the coupling is released (S65).

After rotating as much as the specified encoder value, when the sensor detects the top confirmation and the bottom is not confirmed, the rotation of the connector nut 340 is stopped (S66), the connector module 300 is raised, and the end cap separation/tightening module 600 is turned ( Swing) to end the separation of the end cap 8 (S67).

It is determined whether the end cap 8 is held (S68), and if it is correct, the Z-axis position is moved to the fastening position of the gas outlet port 7 (S70), otherwise an alarm is generated (S69).

7. Insert the gasket

When the connector nut 340 is moved to the fastening position of the gas outlet port 7 in the Z-axis position (S70), the gripper 550 is rotated 90 degrees and the gasket (G) is returned to the gripping ready position by the gasket charging part 520. The cylinder is raised (S71).

It is judged whether the gasket (G) is in the ready position (S72), and if it is correct, chuck the gasket (G) with the gripper 550 (gasket hand) (S73), otherwise, the gasket preparation cylinder is down (an alarm occurs when more than two times) (S72').

After the gripper 550 checks the gasket (G) chucking (S73), the gasket charging unit 520 lowers the cylinder (S74), and determines whether the gripper 550 has gasket chucking (S75), and if correct, the gripper 550 ) is rotated 90 degrees and forwarded to the connector nut 340 (S76), otherwise the gripper 550 goes to the stage in which the gasket is unchucked (S75').

The forwarded gasket is inserted and unchucked with the connector nut while rising upward (S77), and the gripper 55 moves backward (S78) when it comes down, and the gripper 550 is rotated to the 0 degree position to remove the gasket. The input is completed (S79).

8. Signed CGA

After the input of the gasket is completed (S79), the connector nut 340 is connected to the gas outlet port 9 (Put In) (S80), and the connector nut 340 is rotated in the reverse direction by the set number of wheels (S81) , rotate the connector nut 340 in the fastening direction (S82).

When the tightening reaches the set torque value (S83), it is checked whether the motor minimum encoder value of the connector module 300 or more and the putting sensor is detected (S84). Otherwise, an alarm is generated (S85).

9. Open valve (start gas supply)

The state signal is transmitted to the upper controller (S90), and when the upper controller signal is obtained (S91), the valve shutter 210 is put in to the valve 5 by the movement of the cylinder (S92), and again the upper controller When the state signal is transmitted to (S90) and the upper controller signal is obtained (S91), the valve 5 is opened by the valve shutter 210 (S93) and the supply of gas is started (S94).

When the gas supply starts, the brake of the wheel 1700 is locked, and the clamp 1630, which is an alignment guide cylinder, unclamps the skid 9.

How to control gas replacement

As shown in FIGS. 53A to 53D, the gas replacement control method is opposite to the gas supply control method, valve cloth (close) -> CGA dismantling -> gasket ejection (disassembly) -> end cap fastening-> connector plug fastening- > Skid discharge is done in order.

1. Close the valve (stop gas supply)

When the gas supply is finished (S94), the valve 5 is closed by the valve shutter 210 (S100), and the valve shutter 210 is taken out from the valve 5 (Put Out) (S110), and returns to the original position. Move forward (S120).

2. Connector module (CGA) separation (disassembly)

After the valve shutter 210 is separated (S120), the connector nut 340 is connected to the gas outlet port 7, and in the fastening state (S200), the connector module 300 cylinder is maintained in a neutral state and the connector nut 340 is ) is rotated in the dismantling direction (S210).

Putting position detection and encoder value are checked to determine whether the connector module 300 is dismantled (S220), and if it is correct, the connector module 300 is raised. to complete (S230).

3. Gasket ejection (disassembly)

The gripper 550 is rotated 90 degrees (Swing) and forwarded with the connector nut 340 (S300), and after the gripper 550 rises upward, the gripper 550 chucks the gasket used (S310).

The gripper 500, which has risen, descends, ejects the used gasket, and moves the gripper 550 backward (S320).

After rotating the gripper 550 by 0 degrees (Swing) to approach the gasket loading part 510, check whether the gasket is in the finger gripper with a sensor (S340). The collecting unit 910 is moved to a position facing the gripper 550 (stoke backward) and the gripper 550 is rotated 90 degrees (Swing) to approach the gasket collecting unit 910 (S330). Otherwise, an alarm is generated (S360).

Unchucking the gripper 550 approaching the collecting unit 910, dropping the used gasket into the gasket collecting box 911 of the gasket collecting unit 910 (S350), rotating the gripper 550 again by 90 degrees, and then rotating the gasket When the collecting unit 910 moves to the original position, the gasket loading unit 510 returns to the position facing the gripper 550 (S370), and the gripper 550 rotates to the 0 degree position to prepare for chucking the unused gasket. do (S380).

4. End cap fastening

After preparing to chuck the unused gasket (S380), the automatic gas supply device 100 is moved to the Z-axis position, which is a position where the connector plug and the end cap can work (S400). After moving the Z-axis, the end cap separation/fastening module 600 is rotated toward the gas outlet port 7 (S410).

Lower the Z-axis to check the bottom of the end cap (S420), lower the connector nut 340 and insert it into the connector nut socket 651 (S430), and insert the end cap separation/tightening module 600 Make it neutral. (S440),

After that, while rotating the connector nut 340 in the fastening direction, the Z-axis is lowered in proportion to the encoder value, and when the set torque value is reached, the fastening is completed (S450).

After the fastening is completed, the connector nut 340 rotates in the reverse direction by the set encoder value, and then the connector nut 340 is raised (S460) to separate the connector nut 340 and the connector nut socket 651 (S470).

After separation, the automatic gas supply device 100 is moved to the Z-axis position, which is a position where the connector plug and end cap can be operated (S480), and the end cap separation/fastening module 600 is rotated (Swing) of the end cap (8). Separation is terminated (S490).

5. Fastening the connector plug

After completing the separation of the end cap (8) (S490), the connector plug (810) cylinder down and turn toward the connector nut (340) (S500), the connector plug (810) cylinder up and connect to the connector nut (340) to do (S510).

The connector module 300 is positioned in the reverse direction before the shaft is fastened (S520), the connector module 300 shaft is fastened (torque control) in the neutral state of the connector plug (S530), and the connector plug 810 is fastened to the connector nut 340 becomes (S540).

6. Skid (9) drain

The Z-axis is moved to the vision position (S600), the skid brake is released and clamped with a clamp 1630 (S610), and the left and right movable alignment guide units 130 are positioned backward (S620).

After repeating the movable alignment guide operation for a specified number of times (S630), an alarm is generated (S640) and a signal is transmitted to the upper level (S650) to notify the operator that the operation is finished (S660).

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify or modify the present invention within the scope without departing from the spirit and scope of the present invention as set forth in the claims below. can be carried out.

1 : Horizontal gas cylinder 3 : Gas cylinder body
5: valve 7: gas outlet port
8: end cap 9: carrying skid
10: support frame 30: base
100: automatic gas supply device 200: valve shutter module
300: connector module 340: connector nut
400: vision module 500: gasket input/discharge module
510: gasket loading part 520: gasket charging part
550: finger gripper 600: end cap separation/fastening module
610: horizontal arm 630: rotary end cap actuator
650: tool part 651: socket for connector nut
653: socket for end cap 655: shaft
670: proximity sensor for end cap socket 680: proximity sensor for connector nut socket
690: proximity sensor for end cap 700: idle unit motor
710: motor 720: screw rod
730: ball screw moving block 740: cam follow block
741,743: 1st and 2nd cam follower rail 750,770: 1st and 2nd cam follower
760: drive plate block 780: idle plate
790: cover plate 800: connector plug module
810: connector plug 830: bridge
835: avoidance space 900: gasket collection module
910: gasket collection unit 911: gasket collection box
913: cover 1000: alignment guide device
1010: load cell 1100: left and right alignment guide unit
1115: inclined introduction part 1200: left and right fixed alignment guide part
1300: left and right movable alignment guide unit 1400: alignment guide driving unit
1500: roll 1600: clamping module
1630: clamp 1700: wheel
1800: sensor for skid 1900: wheel brake part
1910,1930: 1st and 2nd locking parts 1950: Actuator for wheel locking

Claims (4)

A gasket collection module 900 that collects the used gasket G ejected from the connector nut 340 of the connector module 300 connected to the gas outlet port 7 of the gas cylinder 1 by placing it in the gasket container 911 )as,
A gasket collection part 910 including a gasket container 911 and a cover 913 disposed on one side of the gasket loading part 510 for loading unused gaskets (NG),
An actuator 930 for forward and backward transport for transferring the gasket loading unit 510 and the gasket collecting unit 910 in the forward and backward direction (y);
Including a container opening/closing driving unit 950 that opens and closes through the forward and backward transfer (y) and elevation (z) of the cover 913 with respect to the gasket container 911 for forward and backward transfer (y).
The cover 913 suppresses fumes (smoke) scattering generated by burying the fine residue of the supplied gas on the used gasket (G),
Gasket collection module for automatic gas supply of gas cylinder.
The method according to claim 1,
The container opening and closing driving unit 950 is
A cam fixing plate 951 located on the rear surface of the gasket collecting part 910 and having a cam 952 guiding the lifting and lowering (z) formed therein;
a pin 953 installed on the cover 913 and moving along the trajectory of the cam 952;
Gasket collection module for automatic gas supply of gas cylinder.
The method according to claim 1,
In the cover 913, an exhaust hole 915 connected to an exhaust pipe (not shown) is formed,
Gasket collection module for automatic gas supply of gas cylinder.
The method according to claim 1,
Elevating guide portion 970 for guiding the elevation (z) of the cover 913 is further installed between the actuator 930 and the cover 913 for forward and backward transfer,
Gasket collection module for automatic gas supply of gas cylinder.

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