KR102248101B1 - align for auto supply system of horizontal gas cylinder - Google Patents

Abstract

The present invention relates to an alignment guide device for an automatic gas supply system of a gas cylinder that automatically supplies gas from a horizontal (recumbent position) gas cylinder transported to a gas automatic supply device to a semiconductor manufacturing process. More particularly, the present invention relates to alignment guide device for an automatic gas supply system of a horizontal gas cylinder, for aligning a transport skid of the horizontal gas cylinder to an automatic gas supply device so that the longitudinal center of the horizontal gas cylinder is vertically arranged with respect to the vertical plane of the automatic gas supply device.

Description

Align for auto supply system of horizontal gas cylinder {align for auto supply system of horizontal gas cylinder}

The present invention relates to an alignment guide device for an automatic gas supply system of a gas cylinder for automatically supplying gas from a horizontal gas cylinder conveyed by an automatic gas supply device to a semiconductor manufacturing process. An alignment guide device for the automatic gas supply system of a horizontal gas cylinder in which the transport skid guides the alignment to the automatic gas supply device so that the center of the horizontal gas cylinder in the longitudinal direction is arranged vertically with respect to the vertical plane of the automatic gas supply device. It is about.

In general, various types of gases are supplied and used in the manufacturing process of manufacturing semiconductors, and most of these gases are inhaled into the human body or exposed to the atmosphere, causing great damage such as safety accidents and environmental pollution, so pay close attention. Cost.

For example, as the type of gas used in the ion implantation process, there are fluent gases such as arsenic hydride (AsH3: Arsine), hydrogen phosphide (PH 3: Phosphine), or boron trifluoride (BF3: Boron Fluoride). These gases are very toxic and cause fatal consequences when inhaled by a worker through a respirator, so they must be carefully managed so that they do not leak in the process of supplying them to the production line.

The management of the gases used in the semiconductor manufacturing process is very important. These gases are loaded in a gas cylinder (hereinafter referred to as "high pressure gas cylinder") at high pressure, mounted in a cabinet, and supplied to the production line through a gas supply line. , When about 90% of the gas is exhausted, the operator replaces the high-pressure gas cylinder with a new high-pressure gas cylinder so that foreign matter remaining inside the high-pressure gas cylinder is not supplied to the wafer processing process, thereby continuously supplying the gas.

To this end, as known in the patent document (Korean Patent Laid-Open Patent No. 10-2019-0040922), loading into a cabinet to supply gas from a fabrication process facility of a semiconductor to a wafer production line, and It relates to a high-pressure gas cylinder automatic replacement system that automatically replaces the high-pressure gas cylinder that is unloaded. More specifically, the high-pressure gas cylinder is automatically connected to the high-pressure gas cylinder connection unit by simply loading the high-pressure gas cylinder into the high-pressure gas cylinder lift. And it relates to a high-pressure gas cylinder automatic replacement system that automatically separates and unloads the high-pressure gas cylinder from the high-pressure gas cylinder connection unit when an appropriate amount of gas in the high-pressure gas cylinder is exhausted.

However, the conventional high-pressure gas cylinder is a vertical (upright) high-pressure gas cylinder, and the valve is opened in a vertical direction and the gas injection nozzle is in a horizontal direction, which is orthogonal to each other, and gas is discharged from the gas injection nozzle.

On the other hand, a gas cylinder called a Y-cylinder (a container with a valve assembly installed on the top and bottom) or a ton cylinder (a container with a lot of weight) is a shape that cannot work in an upright position or because of its large weight, it is usually horizontal lying on a skid for gas cylinder transportation The operator lowers the connector to the gas injection nozzle facing the sky, bringing it to the position of the automatic gas supply device, and tightens it.

However, if the gas injection nozzle heading to the sky is not oriented exactly vertically, the connection with the connector is not well made. Therefore, the gas injection nozzle of the horizontal gas cylinder must be adjusted by turning the gas injection nozzle of the horizontal gas cylinder toward the sky correctly, and then the connecting work must be performed.

In addition, the gas injection nozzle must fit exactly on the connector that goes down from the top to the bottom, but when the center does not fit when the operator pushes the skid for transport of the gas cylinder, there is an inconvenience that the operator must fit the skid back and forth.

Since there is no system that accurately automatically aligns the gas injection nozzle and connector of the horizontal gas cylinder, there are many difficulties in the field, such as connecting by force screwing.

In addition, the conventional (Korean Patent Laid-Open Patent No. 10-2019-0070878) in which the gasket is injected and discharged from the inside of the connector nut has a complicated structure.

In addition, the conventional gasket automatic replacement device cannot be applied when the gas outlet port of the lying gas cylinder faces the sky.

Korean Patent Publication No. 10-2019-0040922 Korean Patent Publication No. 10-2019-0070878

The present invention has been conceived to solve the above-described problem, and provides an alignment guide device for an automatic gas supply system of a gas cylinder that aligns and guides a transport skid of a horizontal gas cylinder to an automatic gas supply device. There is a purpose.

In order to achieve the above object, the alignment guide device for an automatic gas supply system of a gas cylinder according to claim 1 of the present invention is a horizontal type in which the gas outlet port 7 is orthogonal to the longitudinal direction of the gas cylinder 1. An alignment guide device that guides and transports the skid 9 for transport of the gas cylinder 1 orthogonally to the vertical plane of the automatic gas supply device 100, which is connected to the gas outlet port 7 to automatically supply gas. As 1000, the left and right fixed alignment guides 1200 arranged side by side on the left and right sides of the transport skid 9, and the left and right movable alignment guides 1300 arranged on the upper surface of the left and right fixed alignment guides 1200 Wow, an alignment guide driving unit 1400 for sliding the left and right movable alignment guide units 1300 in the longitudinal direction (y-axis) with respect to the left and right fixed alignment guide units 1200, and a left and right movable alignment guide unit 1300 It includes a plurality of rolls 1500 formed on the inner side of the, and a clamping module 1600 which is installed on the left and right movable alignment guide unit 1300 to clamp the skid 9 for transportation.

In the alignment guide device for an automatic gas supply system for a gas cylinder according to claim 2 of the present invention, a transport skid ( An inclined introduction portion 1115 having a trapezoidal shape that is wider than the left and right widths of 9) is formed.

According to the present invention, there are the following effects.

Even if the skid carrying the gas cylinder placed in the longitudinal direction enters the left and right alignment guides in an inclined manner, if the left and right movable alignment guides slide backward in the inclined state, the skid will cross the area that touches the roll and the area that does not. If the slope is easily aligned in the longitudinal direction of the left and right alignment guides, clamp it with a clamp and transfer it to an automatic gas supply device.

In addition, since the entrance entrance between the left and right alignment guides is made of a trapezoidal inclined introduction, the skid for transporting the gas cylinder can be pushed between the left and right alignment guides as much as possible, making it convenient to guide the alignment. The length in the longitudinal direction can be shortened.

1 is a side view of a transport skid carrying a horizontal gas cylinder (or Y-cylinder).
2 is a perspective view showing an automatic gas supply system including an automatic gas supply device and an alignment guide device according to a preferred embodiment of the present invention.
Figure 3 is a perspective view of the horizontal gas cylinder transport skid of Figure 1 before docking to the automatic gas supply device of Figure 2;
4 to 8 are a front view, a rear view, a left and right side view, and a plan view showing the automatic gas supply device of FIG. 1.
9 is a cross-sectional view taken along line 9-9 of FIG. 4;
Figure 10 is an explanatory view showing a transport state of alignment guided horizontal gas cylinder transport skid.
11 is a front view of the connector module before idle (tilting).
12 and 13 are front views of the connector module after revolving (tilting) clockwise and counterclockwise.
14 to 16 are perspective views showing a process unit.
17 and 18 are a front view and a partial perspective view of a state in which the gasket is chucked.
19 and 20 are a front view and a partial perspective view arranged around the connecting module by rotating 90 degrees.
21 and 22 are front views in which the gasket input/discharge module is inserted into the lower portion of the connector module.
23 is a perspective view of the gasket container sliding to the position of the grip portion chucking the old gasket.
24 is a front view of the charged (a) and lifted (b) state of the supplied gasket.
25 is a cross-sectional view showing a main part of the gasket alignment portion.
26 is a perspective view showing a gripper.
Fig. 27 is a plan view of a gripper chucking a gasket.
Fig. 28 is a partial perspective view of a gripper chucking a gasket.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the X-axis is defined as the left-right direction, the Y-axis as the forward and backward direction, and the Z-axis as the elevating direction.

1 is a side view of a transport skid loaded with a horizontal gas cylinder (or Y-cylinder), and FIG. 2 shows an automatic gas supply system including an automatic gas supply device and an alignment guide device according to a preferred embodiment of the present invention. 1 is a perspective view, and FIG. 3 is a perspective view of the horizontal gas cylinder transport skid of FIG. 1 before docking to the automatic gas supply device of FIG. 2, and FIGS. 4 to 8 are front views showing the automatic gas supply device of FIG. 1 , A rear view, a left and right side view and a plan view, and FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 4, and FIG. 10 is an explanatory view showing a transport state by being aligned guided by a horizontal gas cylinder transport skid, FIG. 11 is a front view of the connector module before revolving (tilting), FIGS. 12 and 13 are front views after revolving (tilting) the connector module clockwise and counterclockwise, and FIGS. 14 to 16 are perspective views showing the process unit, 17 and 18 are a front view and a partial perspective view of a state in which the gasket is chucked, FIGS. 19 and 20 are a front view and a partial perspective view arranged around the connecting module by rotating 90 degrees, and FIGS. 21 and 22 are gasket input/discharge The module is a bottom view of the connector module and a front view, FIG. 23 is a perspective view of the gasket container sliding to the position of the grip part chucking the old gasket, and FIG. 24 is a charge (a) and a lifted (b) state of the supplied gasket. It is a front view, Figure 25 is a cross-sectional view showing the main part of the gasket alignment, Figure 26 is a perspective view showing a gripper, Figure 27 is a plan view of a state in which the gripper chucked the gasket, and Figure 28 is a gripper chucking the gasket. It is a partial perspective view of the state.

First, as shown in FIG. 1, the horizontal gas cylinder 1 in the longitudinal direction will be described as being a Y cylinder having valve assemblies formed at both ends of the gas cylinder body 3.

At one end head of the horizontal gas cylinder 1, a valve 5 is installed along the longitudinal direction y, and the gas outlet port 7 is oriented in a direction z orthogonal to the valve 5.

This horizontal gas cylinder (1) is laid in a horizontal direction on the upper surface of the transport skid (9) equipped with a cast, and tied with a belt so that it does not move, and the operator pushes it toward the automatic gas supply device (100).

As shown in FIGS. 2 and 3, the automatic gas supply system of the gas cylinder according to the present embodiment largely extends the automatic gas supply device 100 and the transport skid 9 toward the automatic gas supply device 100 in the longitudinal direction. It includes an alignment guide device 1000 for transporting in a straight line (y).

Automatic gas supply device (100)

As shown in Figs. 4 to 8, the automatic gas supply device 100 includes a valve shutter module 200, a connector module 300 and a vision module 400 disposed vertically, and a gasket input/discharge module disposed on the left side. 500 and a connector idle module 700.

Hereinafter, the connector module 300, the vision module 400, and the gasket input/discharge module 500 are directly or indirectly related to the gas outlet port 7, and are defined as a “gas outlet port module”.

Valve shutter module (200)

As shown in FIG. 8, the valve shutter module 200 includes a valve shutter 210 for opening and closing the valve 5 and a valve shutter motor 230 for rotationally driving the valve shutter 210.

Of course, a rotational power transmission unit 220 is installed between the valve shutter 210 and the valve shutter motor 230.

As shown in FIG. 4, the valve shutter 210 is configured to open and close by rotating while the pin 211 is inserted between the rim grooves of the valve 5 (refer to the prior art of the patent document).

In addition, the valve shutter module 200 is moved along the x-axis and y-axis by the first and second actuators 201 and 203.

The first and second actuators 201 and 203 are arranged orthogonally to each other as air cylinders.

The first actuator 201 includes a first movable rail block 201b that slides in the x-axis direction on a first fixed rail block 201a fixed to the base 30.

The second actuator 203 includes a second movable rail block 203b that slides in the y-axis direction on the second fixed rail block 203a fixed to the second movable rail block 201b.

The x-axis moves the valve shutter 210 to the position of the valve 5, and the y-axis moves the valve shutter 210 to the position to be opened and closed by being inserted into the valve 5.

Connector module (300)

As shown in FIG. 9, the connector module 300 includes a motor 310, a hollow reducer 320 receiving rotational power of the motor 310, and a connector socket 330, which is an output terminal of the hollow reducer 320. A connector nut 340 installed in the gas outlet port 7 and fastened, a nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and the center of the hollow reducer 320 And a gas pipe 360 disposed through the gas pipe 360 and a C-ring 370 for preventing separation interposed between the head 361 and the connector nut 340 of the gas pipe 360.

It is shown that the gasket (G) is inserted at the tip of the head 361.

The input/discharge of the gasket G to the front end of the head 361 is operated by the gasket input/discharge module 500 shown in FIG. 4.

In addition, the connector module 300 is raised and lowered along the z-axis by the third actuator 301.

The lowering of the connector module 300 is for fastening with the gas outlet port 7, and the rising of the connector module 300 is for returning to the non-fastening position. Move.

The third actuator 301 is also an air cylinder.

The third actuator 301 includes a third fixed rail block 301a supported by the support frame 10 and a third movable rail block 301b sliding along the third fixed rail block 301b.

Vision module (400)

The vision module 400 is a module that detects the positions of the connector nut 340 and the gas outlet port 7 of the connector module 300.

The vision module 400 includes a vision camera (not shown) and lighting (not shown).

The connector module 300 and the vision module 400 are supported on the support frame 10.

The vision module 400 is installed under the support frame 10 facing the connector module 300.

Gasket input/discharge module (500)

The gasket input/discharge module 500 inserts the gasket G into the gasket support pipe 362 of the gas pipe 360 before the connector nut 340 is fastened to the gas outlet port 7, and the connector nut 340 When) is separated from the gas outlet port (7), the inserted gasket (G) is taken out and collected.

That is, the gasket input/discharge module 500 includes a gasket loading unit 510 for loading a gasket G supplied from a gasket supply unit (not shown) and a gasket loading unit ( A pair of finger grippers 550 for gripping the gasket G loaded on 510 and an approach/removal gasket actuator 560 for approaching/removing (y-axis) the pair of finger grippers 550 to each other Wow, a left and right gasket actuator 570 for moving a pair of finger grippers 550 left and right (x-axis), and a rotation for rotating a pair of finger grippers 550 toward the connector module 300 (xz plane) It includes a dedicated gasket actuator 580 and a gasket actuator 590 for input/dispensing for lifting (y) the gasket G of the pair of finger grippers 550 to be input/discharged to the connector module 300.

As shown in FIG. 24, the gasket loading unit 510 has a gasket charging unit 520 that charges a gasket G supplied from a gasket supply unit (not shown), and an upper side of the gasket charging unit 520 A gasket alignment unit 530 disposed in the gasket alignment unit 530 and a gasket actuator 540 for a lift that lifts (z-axis) the gasket G of the gasket charging unit 520 to the gasket alignment unit 530.

As shown in FIG. 25, the gasket charging unit 520 includes a gasket charging plate 523 having a bottom surface and front supporting pieces 521 and 222 supporting the bottom surface and the front surface of the gasket G, and a gasket G It includes an alignment block 524 supporting the rear surface of the.

The lower support piece 521 has an arc shape concave down the same trajectory as the lower surface of the gasket G.

The front support piece 522 has a bar shape protruding from the vertical center line of the gasket charge plate 523, and its upper end protrudes to the center of the gasket G.

On one side of the alignment block 524, as shown in FIG. 25, a blocking wall 525 is formed to block the gasket G supplied from the gasket supply unit (not shown) from being dislodged from the support piece 521. Has been.

The gasket alignment unit 530 is installed on the front surface of the alignment block 524 as shown in FIG. 25.

The gasket alignment unit 530 includes an alignment groove 531 formed from the front side of the alignment block 524 toward the left side (x-axis), a gasket alignment plate 532 disposed in the alignment groove 531, and , And a spring 533 installed between the gasket alignment plate 532 and the alignment groove 531.

In the alignment operation of the gasket (G), if the gasket alignment plate 532 is a fixed type, the finger gripper 550 compresses the gasket (G) with the gasket alignment plate 532, causing scratches on the gasket (G). Therefore, the movable gasket alignment plate 532 containing the spring 533 compressed in the y-axis direction is made of a resin-based material to prevent automatic alignment and scratches of the gasket (G).

That is, when the gasket charging plate 523 occupied by the gasket G is lifted and the rear surface of the gasket G is located in the front of the gasket alignment plate 523, the finger gripper 550 controls both sides of the gasket G. When chucking, it is automatically aligned together.

The lifting gasket actuator 540 is an air cylinder installed on the rear surface of the alignment block 524.

The lower surface of the gasket charge plate 523 and the piston of the front and rear actuator 503 are connected by a connection block 543.

The alignment block 524 is supported by the support frame 10 through the front and rear actuators 503 as shown in FIG. 23.

A pair of finger grippers 550 are disposed on the left and right around the front support piece 522.

That is, a pair of finger grippers 550 are a pair of access/removal blocks 551 installed on the upper surface of the access/removal gasket actuator 560, as shown in FIGS. 26 to 28, and access/removal A pair of grip portions 552 installed on the upper end of the eviction block 551 and disposed on both sides of the gasket (G), and as long as it is formed on the inner side of the pair of grip portions 552 and touches the front surface of the gasket (G). It includes a pair of gasket alignment projections 553.

In particular, as shown in FIGS. 26 and 27, a fitting groove 554 into which a C ring G1 installed on the side of the gasket G is fitted is formed on the inner surface of the pair of grip portions 552.

Here, the gasket G is a donut-shaped metal, and a C-ring G1 is fitted on the side surface thereof (see Fig. 27).

Therefore, by manufacturing the grip portion 552 in a shape matching the shape of the side of the gasket (G), it is possible to implement a stable operation with only a two-position grip when the chuck is operated.

In addition, the finger gripper 550 has a gasket alignment protrusion 553 capable of supporting alignment, and is configured to perform alignment without a separate operation during the gasket chuck operation.

In addition, since the front and rear surfaces of the gasket G must not be scratched, the grip part 552 is preferably made of an engineering plastic material.

The approach/removal gasket actuator 560 is an air cylinder and is installed on the rotation gasket actuator 580.

The left and right gasket actuators 570 are air cylinders and are supported by the support frame 10.

The rotating gasket actuator 580 is a rotary air cylinder.

The input/discharge gasket actuator 590 is an air cylinder installed due to a specific posture of a horizontal gas cylinder, and is installed between the left and right gasket actuators 570 and the rotating gasket actuator 580.

The input/discharge gasket actuator 590 moves the finger gripper 550 up and down in a relationship in which the connector module 300 is vertically disposed.

On the other hand, a gasket container 501 is installed on one side of the gasket loading unit 510, and the gasket loading unit 510 and the gasket container 501 further include an actuator 503 for front and rear transfers in the forward and backward direction (y). .

The front-rear actuator 503 is an air cylinder and includes a fixed rail block 503a and a movable rail block 503b that slides back and forth in the second fixed rail block 503a.

The fixed rail block 503a is supported on the support frame 10,

The movable rail block 503b is provided with a gasket loading unit 510 and a gasket collection container 501.

Since the gasket G is compressed when it is fastened, it is disposable, so it is collected in the gasket container 501 and discarded.

In this way, the gasket container 501 is disposed at the top because the gas outlet port 7 of the horizontal gas cylinder 1 is orthogonally oriented, so that the minimum occupied space in the interior of the automatic gas supply device 1 is eliminated. It is to make it occupy.

The operation of the gasket input/discharge module 500 will be described with reference to FIGS. 17 to 24.

Gasket closing operation

1. As shown in Fig. 24(a), one new gasket NG supplied from the gasket supply unit (not shown) is handed over to the gasket charging plate 523.

2. As shown in Fig. 24(a) to 24(b), the gasket alignment unit 530 facing the grip unit 552 by raising the gasket charge plate 523 with the gasket actuator 540 for lifting (z-axis) Lift the new gasket (NG) with

3. As shown in Figs. 17, 18 and 28, pull the left and right gasket actuator 570 to the left (x-axis) to bring the grip part 552 into contact with the new gasket NG, and at the same time, the gasket alignment part 530 While aligning the new gasket (NG) in the gasket alignment plate 532 of ), chucking is performed by the approach (y-axis) operation of the gasket actuator 560 for approach/removal.

4. When the new gasket (NG) is aligned and chucked, when the gasket charge plate 523 is lowered (z-axis), it is stopped with one new gasket (NG) taken over.

5. The chucked grip part 552 is pushed to the right with the left and right gasket actuators 570 (x-axis) to escape from the gasket alignment part 530 and return to the initial position.

6. The chucked grip part 552 returned to the initial position is rotated 90 degrees around the y-axis with a rotation gasket actuator 580 and disposed around the connector module 300 as shown in FIGS. 19 and 20.

7. Push the chucked grip part 552 to the right with the left and right gasket actuators 570 (x-axis) to position the chucked new gasket NG directly under the connector nut 340 as shown in FIG. 21.

8. As shown in FIG. 22, a new gasket NG of the grip part 552 is put into the gasket support pipe 362 of the connector nut 340 by an upward (z-axis) operation of the input/dispensing gasket actuator 590. .

9. When the input of the new gasket (NG) is completed, the gasket actuator 560 for access/removal is unchucked with the retraction (y-axis) motion, and then the gasket actuator 590 for input/discharge is lowered (z-axis). The grip portion 552 unchucked by operation is taken out of the connector nut 340 (see FIG. 21).

10. Pull the unchucked grip part 552 to the left side (x) with the left and right actuators 570 so that it is removed from the circumference of the connector nut 340 (see Fig. 19).

Gasket dispensing operation

After the gas supply of the gas cylinder 1 is completed, one cycle, which is an operation of discharging the old gasket OG in the inside of the connector nut 340 separated from the gas outlet port 7, will be described below.

1. Push the grip portion 552 unchucked by the left and right gasket actuators 570 to the right (x) and place it under the connector nut 340 (see Fig. 21).

2. The grip part 552 is inserted into the connector nut 340 by the raising operation of the input/discharge gasket actuator 590 (see Fig. 22).

3. With the approaching operation of the approach/removal gasket actuator 560, the grip part 552 chuck the old gasket OG.

4. Take out the chucked grip part 552 from the connector nut 340 by the lowering motion of the input/discharge gasket actuator 590 (see Fig. 21).

5. Pull the chucked grip part 552 to the left with the left and right gasket actuators 570 so that it is removed from the circumference of the connector nut 340 (see Fig. 19).

6. The chucked grip part 552 is rotated by -90 degrees with the rotation gasket actuator 580 to return to a position facing the gasket alignment part 530.

7. By sliding the gasket container 501 and the gasket alignment part 530 backward, the gasket container 501 faces the chucked grip part 552 as shown in FIG. 23.

8. Pull the chucked grip part 552 to the left with the left and right actuators 570 and place it on the gasket container 501.

9. The gasket actuator 560 for access/removal is removed by unchucking the grip part 552 to freely fall the old gasket OG and collect it in the gasket container 501.

Connector idle module (700)

The connector idle module 700 is a unit that revolves (rotates) the module for the gas outlet port on the x-z plane with respect to the support frame 10.

The connector revolving module 700 is a unit that revolves (rotates) the support frame 10 with respect to the movable left and right rail blocks 150 around an x-z plane, that is, a circle drawn by the connector module 300 and the vision module 400.

That is, as shown in FIG. 11, when the gas outlet port 7 is located on the same line between the connector module 300 and the vision module 400, the connector module 300 is lowered and connected to the gas outlet port 7. .

However, when the gas outlet port 7 is not located on the same line between the connector module 300 and the vision module 400 as shown in FIGS. 13 and 14 but is inclined by +θ or -θ, the connector idle module The gas outlet port module is rotated clockwise or counterclockwise by 700 to align it on the same tilting line, and then the connector module 300 is lowered and connected to the gas outlet port 7.

As shown in Figs. 14 to 16, the connector idle module 700 includes a motor 710 and a screw rod 720, a ball screw moving block 730 fastened to the screw rod 720, and a ball screw moving block. A cam follower block 740 disposed before and after 730, a first cam follower 750 rolling along the first cam follower rail 741 of the cam follower block 740, a cam follower block 740 and a cam A drive plate block 760 installed between the follower 750, a second cam follower 770 rolling along the second cam follower rail 743 of the cam follower block 740, and a second cam follower 770 And a cover plate 790 fastened and fixed to the revolving plate 780 to which the is fixed, and the driving plate block 760 and the revolving plate 780.

One surface of the cam follower block 740 is supported on the movable left and right rail blocks 153 through brackets 157.

The first cam follow rail 741 has an arc shape convex downward on the other surface of the cam follow block 740.

The second cam follower rail 743 is an arc-shaped long hole perforated in the cam follower block 740.

Accordingly, the first and second cam follower rails 741 and 743 are arranged side by side.

The driving plate block 760 moves up and down (z) along the z-axis rail 731 of the ball screw moving block 730.

The left and right movement of the driving plate block 760 is interlocked with the movement of the first cam follower 750 along the first cam follower rail 741.

The first cam follower 750 is rotatably installed on the driving plate block 760 and is placed on the first cam follower rail 741.

As shown in FIGS. 15 and 16, the second cam follower 770 is placed in a plurality of the second cam follower rails 743.

Of course, the second cam follower 770 is previously assembled and installed on the orbiting plate 780.

The idle operation of the connector idle module 700 is as follows.

When the motor 710 rotates, the screw rod 720 rotates, and the ball screw moving block 730 rises or descends in the z-axis direction by the amount rotated.

The drive plate block 760 is also raised or lowered by the length of the ascending or lowered length, and the driving plate block 760 is also left or lower so that the first cam follower 750 rises or falls along the first cam follower rail 741. Move to the right.

The rising or falling of the driving plate block 760 is performed by simultaneously raising or lowering the second cam follower 770 of the orbiting plate 780 transmitted through the cover plate 790 along the second cam follower rail 743, 12 or 13, the connector module 300 is rotated or tilted.

By this connector idle module 700, it is possible to automatically connect according to the same radius as the connecting nut 340 no matter where the direction of the gas outlet port 7 of the gas cylinder 1, which is very heavy and lying in, is located.

If it is not possible to rotate or tilt, there is an inconvenience of having to take the gas cylinder 1 again and turn the gas outlet port of the gas cylinder to the correct position.

X,y,z axis transfer drive of the automatic gas supply device (100)

On the other hand, in the automatic gas supply device 100, as shown in Figs. 4 to 8, the lifting drive unit 110 for lifting (y) the gas outlet port module, and the gas outlet port module front and rear (y ) And the front and rear moving parts 130 and the left and right moving parts 150 for moving to the left and right (x).

The elevating driving unit 110 is installed between the floor and the base 30 and is a vertical transfer driving unit for aligning the virtual center image between the connector module 300 and the vision module 400 with the gas outlet port 7.

When the alignment guide device 1000 comes to the automatic gas supply device 100, the front-rear moving unit 130 is a front-rear transfer driving unit that pulls the gas outlet port module toward the gas outlet port 7 to approach it.

In other words, the front and rear moving part 130 is a rail block before and after the movable with respect to the rail block 131 before and after the fixed, the rail block before and after the movable placed on the upper surface of the rail block 131 before and after the fixed, and the rail block before and after the fixing 131 It includes a front-rear driving part 135 for sliding 133 back and forth.

The front-rear drive part 135 includes a screw-nut mechanism in which the nut of the rail block 133 moves back and forth by rotation of the screw rod of the motor.

In addition, the lower surface of the rail block 131 before and after fixing is fixed to one side of the upper surface of the base 30.

The left and right moving parts 150 are left and right transfer driving parts for aligning the connector module 300 and the vision module 400 toward the gas outlet port 7.

That is, the left and right moving parts 150 are fixed left and right rail blocks 151 fixed to the upper surface of the rail block 133 before and after the operation, and movable left and right rail blocks 153 placed on the upper surface of the fixed left and right rail blocks 151, and are fixed. It includes left and right driving units 155 for sliding the movable left and right rail blocks 153 left and right with respect to the left and right rail blocks 151.

The left and right drive units 155 also include a screw-nut mechanism in which the nuts of the movable left and right rail blocks 153 reciprocate left and right by rotation of the screw rod of the motor.

The connector revolving module 700 revolves (rotates) the support frame 10 with respect to the movable left and right rail blocks 150.

Gas cylinder alignment guide device (1000)

In addition, it is preferable that the gas cylinder 1 enters the automatic gas supply device 100 straight in the longitudinal direction from the beginning.

To this end, as shown in FIGS. 3 and 10, an alignment guide device 1000 is installed on the front side of the automatic gas supply device 100.

In the alignment guide device 1000, left and right alignment guide units 1100 are installed side by side in the longitudinal direction.

The left and right alignment guide units 1100 include left and right fixed alignment guides 1200 arranged side by side on the left and right sides of the transport skid 9, and left and right movable alignment guides arranged on the upper surface of the left and right fixed alignment guides 1200. An alignment guide driving unit 1400 that slides the left and right movable alignment guide units 1300 in the longitudinal direction (y-axis) with respect to the unit 1300 and the left and right fixed alignment guide units 1200, and a left and right movable alignment guide A plurality of rolls 1500 formed on the inner side of the unit 1300, and a clamping module 1600 installed on the left and right movable alignment guide units 1300 to clamp the skid 9 for transport.

The alignment guide driving unit 1400 is a mechanism that converts rotational motion into linear motion in a ball screw type by rotation of a motor.

The left and right fixed alignment guide units 1200 and the left and right movable alignment guide units 1300 slide in a rail shape.

The clamping module 1600 is clamped by moving the clamp 1630 by a driving cylinder 1610 such as an air cylinder to pressurize both sides of the skid 9.

On the other hand, a trapezoidal inclined introduction portion 1115 is formed at the entrance between the left and right fixed alignment guides 1200 and the left and right movable alignment guides 1300, which are wider than the left and right widths of the skid 9 for transportation.

The operation of the alignment guide device 1000 will be described with reference to FIG. 10.

First, the transport skid 9 initially enters between the alignment guide units 1100 as shown in FIG. 10(a).

At this time, it represents a case where the transport skid 9 is skewed by θ with respect to the longitudinal direction.

When the left and right movable alignment guide unit 1300 retreats in the longitudinal direction as shown in Fig. 10(b) in the initial entering state as shown in Fig. 10(a), the rolls 1500 are riding on the side of the skid 9 for transportation Alignment is guided immediately in a state that is crooked equal to the width between the left and right movable alignment guide units 1300.

When the transport skid 9 is aligned and guided as shown in FIG. 10(b), the clamp 1630 of the clamping module 1600 pressurizes and clamps both sides of the transport skid 9 as shown in FIG. 10(c).

In a state where the transport skid 9 is clamped, the left and right movable alignment guide units 1300 may be advanced along the longitudinal direction toward the automatic gas supply device 100 as shown in FIG. 10(d).

As described above, although it has been described with reference to a preferred embodiment of the present invention, those skilled in the art will variously modify or modify the present invention within the scope not departing from the spirit and scope of the present invention described in the following claims. It can be done.

1: horizontal gas cylinder 5: valve
7: gas outlet port 9: transport skid
10: support frame 30: base
100: automatic gas supply device 200: valve shutter module
300: connector module 340: connector nut
400: vision module 500: gasket input/discharge module
501: gasket container 510: gasket loading part
520: gasket charging part 550: finger gripper
700: idle unit motor 710: motor
720: screw rod 730: ball screw moving block
740: cam follow block 741,743: first and second cam follow rail
750,770: first and second cam follower 760: drive plate block
780: orbit plate 790: cover plate
1000: alignment guide device 1100: left and right alignment guide unit
1115: inclined introduction
1200,1300: Left and right fixed/movable alignment guide part
1400: alignment guide driving unit 1500: roll
1600: clamping module

Claims (2)

The transport skid (9) of the horizontal gas cylinder (1) in which the gas outlet port (7) is orthogonal to the longitudinal direction (y) of the horizontal gas cylinder (1) is connected to the gas outlet port (7) to transfer gas. As an alignment guide device 1000 that is orthogonally aligned to the vertical plane (xz) of the automatic gas supply device 100 to be automatically supplied and transported,
Left and right fixed alignment guide units 1200 arranged side by side on the left and right sides of the transport skid 9,
The left and right movable alignment guide units 1300 disposed on the upper surface of the left and right fixed alignment guide units 1200,
An alignment guide driving unit 1400 that slides the left and right movable alignment guide units 1300 with respect to the left and right fixed alignment guide units 1200 in the longitudinal direction (y-axis),
A plurality of rolls 1500 formed on the inner side of the left and right movable alignment guide unit 1300,
Including a clamping module 1600 installed on the left and right movable alignment guide unit 1300 to clamp the skid 9 for transport,
When the left and right movable alignment guide unit 1300 slides, a plurality of rolls 1500 aligns the transport skid 9,
An alignment guide device for an automatic gas supply system of a horizontal gas cylinder that transports the transport skid 9 when the left and right movable alignment guide unit 1300 slides in the clamping state
The method according to claim 1,
A horizontal gas cylinder in which a trapezoidal inclined introduction part 1115 that is wider than the left and right width of the transport skid 9 is formed at the entrance between the left and right fixed alignment guides 1200 and the left and right movable alignment guides 1300 Alignment guide device for automatic gas supply system of China.

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