KR102343685B1 - gas auto supply module of gas cylinder - Google Patents

Abstract

The present invention relates to an automatic gas supply module for a gas cylinder in which a connector plug member and a gasket input/discharge member are installed on one side plate of a frame at the same time to perform an operation with a connector without interference. According to the present invention, the automatic gas supply module for a gas cylinder comprises: a connector member (500 or 500a) to which a connector (510 or 510a) is fastened/released to an outlet port (5) of the gas cylinder (1); a connector plug member (600) including a connector plug (610) and a fourth actuator (630); and a gasket input/discharge member (700) for inputting/discharging a gasket (G) into the connector (510 or 510a) with a pair of finger grippers (710) chucking the gasket (G).

Description

Gas auto supply module of gas cylinder

The present invention relates to a gas automatic supply module for a gas cylinder in which a connector plug member and a gasket input/discharge member are installed on one side plate of a frame at the same time to perform an operation with a connector without interference.

In general, in a semiconductor device manufacturing process, a highly flammable or toxic gas is used according to process characteristics, and this gas is usually contained in a gas cylinder at a high pressure and replaced according to the remaining amount of gas.

That is, when the connector is fastened to the outlet port of the gas cylinder and the pipe disposed inside the connector and the outlet port are in contact with each other, the valve is opened and the gas of the gas cylinder is supplied to the semiconductor device manufacturing process through the outlet port and the pipe. .

As a conventional gas cabinet-mounted module, what is known in Patent Document 1 (Korean Publication No. 10-2019-0014463) is disclosed.

In Patent Document 1, in the spherical type gas cylinder automatic opening and closing device having a cabinet of 800 × 590 (mm) in width × length, it is impossible to install a lift that automatically raises the gas cylinder 60 due to the narrow space, so the second alignment means (130) is designed to apply.

Since the gas cylinder automatic opening/closing device is installed on the left and right sides of the cabinet, one is supplying gas and the other is being replaced and waiting for continuous gas supply.

As shown in FIG. 44, the second aligning means 30 includes an aligner 31 fixed to the bottom surface of the main plate 11 and having two or more aligning pins 31a, and a valve ( The alignment block 32 is detachably fixed to 63 and provided with a positioning hole 32a into which the alignment pin 131a is fitted, and the alignment block 32 is connected to the valve 63 by a fastening member (not shown). It is composed of a fastening plate 33 to be fixed with a).

Therefore, when the main plate 11 descends in a state where the gas cylinder 60 is positioned inside the cabinet, the operator can visually identify the position of the alignment pin 31a and finely adjust the position of the gas cylinder 60 to align By allowing the pin 31a to be inserted into the positioning hole 32a of the alignment block 132, the position of the gas cylinder 60 is aligned.

As shown in FIG. 43, the main plate 11 uses a cylinder, a lifting block, and a pulley disposed on the left and right sides of the main plate 11. When the piston of the cylinder goes up, the main plate 11 goes down and when the piston goes down It is an ascending structure.

Since the elevating structure of the main plate 11 is installed on the outside of one side of the male plate 11, it more protrudes to the side for a certain size of the male plate 11, and in particular, the cabinet is mounted as a pair. It is difficult to fit the horizontal length (800mm) of

In addition, as shown in FIG. 43 , since the main plate 11 ascends and descends on the guide block, movement other than up and down is limited, and the position of the gas cylinder 60 needs to be finely adjusted for alignment.

In addition, there are very many parts for elevating the main plate, such as cylinders, pulleys, and guide blocks.

On the other hand, the gas cabinet-mounted module of Patent Document 2 (Korean Patent No. 10-2112765) is known in the arrangement as shown in FIG.

As shown in FIG. 45, in the gas cabinet-mounted module of Patent Document 2, the end cap part 60 and the connector part 70 are disposed on the rear side, and the gasket parts 81 and 82 are disposed on one side. .

The gasket parts 81 and 82 are composed of a gasket supply part 81 and a gasket delivery part 80 .

The gasket supply part 80 is disposed next to the connector part 70 , and the gasket delivery part 82 is disposed in front with respect to the gasket supply part 81 .

Since the gasket supply unit 81 is disposed on one side of the rear side, it is difficult for the operator to check the supply amount of the gasket with the naked eye (if the gasket is not filled immediately, the operation speed will be slow and it is fatal to the semiconductor process) It is undesirable in terms of maintenance, such as having to manually put your hand into the narrow space at the rear.

On the other hand, since there is no connector plug to block the connector part in the state in which the gas cylinder is not inserted, it is impossible to prevent contamination of the connector part pipe and the gas residue of the gas supply pipe from spreading to the outside.

On the other hand, since the end cap part 60 and the connector part 70 are fixed side by side, they not only occupy a larger space, but also have to move at the same time during rotation or forward/backward transfer, resulting in unnecessary power loss.

Since the outlet port of these prior art is a connector adapted to a hollow male screw, as in the present embodiment, in the case of a solid male screw, it is impossible to fasten with a conventional connector.

Korean Publication No. 10-2019-0014463 Korean Patent No. 10-2112765

The present invention has been devised to solve the above problem, and by installing a connector plug and a gasket input/discharge member on one side plate to provide a gas automatic supply module of a gas cylinder that realizes compactness of the module that can be operated without interference. There is a purpose.

In order to achieve the above object, the automatic gas supply module of the gas cylinder according to claim 1 of the present invention is a connector member ( 500 or 500a), the connector plug member 600 to which the connector plug 610 is fastened/released from the connector 510 or 510a, and a pair of finger grippers chucking the gasket G to the connector 510 or 510a The side plate 313 of the frame 310 includes a gasket input/discharge member 700 for input/discharge into the 710, but the connector plug member 600 and the gasket input/discharge member 700 overlap each other to operate is installed on

In the gas automatic supply module of the gas cylinder according to claim 2 of the present invention, the connector plug member 600 includes a connector plug 610 that is fastened/disconnected to the connector 510 or 510a, and the connector plug 610 is connected to the connector ( and a fourth actuator 630 that approaches/retracts relative to 510 or 510a.

In the gas automatic supply module of the gas cylinder according to claim 3 of the present invention, the fourth actuator 630 includes a fourth air cylinder 631 and a piston 633 installed on the outer surface of the side plate 313, a fourth piston ( 633) and a fourth connection block 635 for connecting the connector plug 610, a fourth guide rail 637 installed inside the side plate 313, and a fourth connection block 635 installed on the fourth connection block 635 A fourth guide rail groove 639 sliding along the guide rail 637 is included, and the fourth piston 633 and the fourth connection block 635 are connected through a bracket (not shown), and the fourth guide rail A long hole 638 is formed in the side plate 313 between the 637 to allow the bracket (not shown) to pass through and slide.

In the automatic gas supply module of the gas cylinder according to claim 4 of the present invention, the gasket input/discharge member 700 includes a pair of finger grippers 710 for chucking both sides of the new gasket G to be supplied, and a pair A fifth actuator 720 that approaches/retracts the finger grippers 710 of the and a seventh actuator 740 that rotates 180 degrees toward (510 or 510a).

In the automatic gas supply module of the gas cylinder according to claim 5 of the present invention, the pair of finger grippers (710) includes a pair of fifth movable blocks (711) installed on the front surface of the fifth actuator (720); 5 is installed on the upper end of the movable block 711 and includes a pair of grip parts 713 disposed on both sides of the gasket G, and the fifth actuator 720 is a fifth air cylinder 721 and a piston (not shown). ), a guide rail groove 722 is formed in the fifth air cylinder 721, and a guide rail protrusion 723 sliding along the guide rail groove 722 is installed in the fifth movable block 711. , the sixth actuator 730 includes a sixth air cylinder 731 and a piston 733, and the sixth piston 733 and the fifth actuator 720 are connected through a sixth bracket 735, and the first The seventh actuator 740 is a rotary air cylinder 740 installed on the outside of the side plate 313 , and a sixth air cylinder 731 is installed on the rotary plate 741 of the rotary air cylinder 740 .

According to the present invention, there are the following effects.

The connector plug member and the gasket input/discharge member are installed at the same time to overlap each other on one side plate, so that the connector, connector plug, and gasket gripper can operate on the same line, and compactness is realized.

In particular, since the gasket input/discharge member is rotatably implemented on one side plate, it is possible to realize each operation even when overlapping with the connector plug member.

In addition, since the connector plug member and the gasket input/discharge member are disposed on one side plate, it is very easy for the operator to perform maintenance on the left and right sides.

1 is an external front view showing an automatic gas supply device for a gas cylinder according to a first preferred embodiment of the present invention.
Figure 2 is a bottom perspective view in which the automatic gas supply module of Figure 1 is suspended from the hoist module.
Figure 3 is a bottom view showing the hoist module of Figure 2;
4 is a bottom perspective view in which the head of the gas cylinder in which the alignment jig is installed is separated from the automatic gas supply module;
5 to 9 are a front view, a rear view, a left and right side view and a bottom view of the automatic gas supply module of FIG. 4;
Fig. 10 is a perspective view showing main parts of an end cap member and a connector member;
11 and 12 are a rear view and a bottom perspective view of FIG.
13 is an actual arrangement perspective view of a connector plug member, a gasket input/discharge member, and a gasket supply member;
14 is a perspective view showing the gasket input/discharge member and the gasket supply member of FIG. 13 separated;
15 is a rear perspective view of the gasket supply member of FIG. 14;
16 (a) (b) is a rear view showing the gasket supplied in FIG. 14 before and after lifting.
17 and 18 are a plan view and a left side view in which a connector plug is fastened to the connector;
Fig. 19 is a plan view in which the connector plug is retracted and released from the connector;
20 and 21 are plan views showing the end cap member and the connector member moving forward and backward with respect to the outlet port to separate the end cap.
Fig. 22 is a left side view of the gasket finger gripper moving forward and chucking the gasket;
23 is a left side view of the gasket finger gripper reversed and rotated 180 degrees;
Fig. 24 is a left side view of the gasket finger gripper advancing to insert and unchuck the connector;
25 and 26 are plan views in which the operating member for the outlet port is connected to the outlet port by moving and advancing to the left.
27 is a front perspective view showing an automatic gas supply module according to a second preferred embodiment of the present invention.
28 and 29 are left and right perspective views showing the end cap tool part and the connector member of FIG. 27 separated;
Fig. 30 is a coupling view showing the main part of the connector member separated from the speed reducer;
Fig. 31 is an exploded perspective view of Fig. 30;
32 is an enlarged perspective view of the end cap tool;
Fig. 33 is a cross-sectional view of Fig. 32;
34 is an exemplary view comparing the holding relationship between the end cap and the end cap tool, (a) the present invention (b) is an exemplary view showing the prior art.
35 and 35A are a perspective view and a front view of a connector member and an end cap tool part in parallel before the end cap is removed;
Fig. 36 is a perspective view showing the end cap tool part of Fig. 35;
37 is a perspective view of the connector member and the end cap tool part in series before the end cap is removed;
38 is a perspective view showing the end cap tool unit of FIG. 37;
Fig. 39 is a perspective view showing the connector member and the end cap tool part moving forward to separate the end cap;
Fig. 40 is a perspective view showing the end cap tool part of Fig. 39;
Fig. 41 is a perspective view of Fig. 39 reversed and returned to the initial position;
Figure 42 is a perspective view of the end cap separation operation is completed.
43 is a perspective view showing a conventional gas automatic supply module.
44 is a perspective view of a state in which the gas cylinder is aligned by lowering of the main plate;
45 is a plan view showing an operation of moving from a conventional gasket supply unit to a gasket transfer unit;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Also, the horizontal*vertical*height directions of the cabinet are referred to as the x-axis (left and right), y-axis (front and back), and z-axis (up and down) directions.

Further, moving the piston of the cylinder forward means approaching the working position, and moving the piston of the cylinder backward means returning (retracting) to the initial position.

first embodiment

1 is an external front view showing an automatic gas supplying device for a gas cylinder according to a first preferred embodiment of the present invention, FIG. 2 is a bottom perspective view of the automatic gas supplying module of FIG. 1 suspended from a hoist module, and FIG. 2 is a bottom view showing the hoist module, FIG. 4 is a bottom perspective view in which the head of the gas cylinder installed with the alignment jig is separated from the automatic gas supply module, and FIGS. 5 to 9 are front views of the automatic gas supply module of FIG. , a rear view, a left and right side view, and a bottom view, FIG. 10 is a perspective view showing main parts of the end cap member and the connector member, FIGS. 11 and 12 are a rear view and a bottom perspective view of FIG. 10 , and FIG. 13 is a connector plug It is an actual arrangement perspective view of the member, the gasket input/discharge member, and the gasket supply member, FIG. 14 is a perspective view showing the gasket input/discharge member and the gasket supply member of FIG. 13 separated, and FIG. 15 is the rear surface of the gasket supply member of FIG. It is a perspective view, Fig. 16 (a) (b) is a rear view showing before and after lifting of the gasket supplied in Fig. 14, Figs. 17 and 18 are a plan view and a left view in which the connector plug is fastened to the connector, and Fig. 19 is It is a plan view in which the connector plug is retracted and released from the connector, FIGS. 20 and 21 are plan views in which the end cap member and the connector member move forward and backward with respect to the outlet port to separate the end cap, and FIG. It is a left side view for chucking, Fig. 23 is a left side view of the gasket finger gripper being reversed and rotated 180 degrees, Fig. 24 is a left side view showing the gasket finger gripper moving forward to insert and unchuck the connector, and Figs. 25 and 26 are the outlet ports. It is a plan view in which the operating member for operation is connected to the outlet port by moving and advancing to the left.

As shown in FIGS. 1 and 2, the gas cylinder automatic gas supply device according to the first embodiment is installed on the cabinet 100 in which the gas cylinder 1 is placed, and the ceiling 110 of the cabinet 100. It includes a hoist module 200 that is, and an automatic gas supply module 300 suspended up/down from the hoist module 200 .

Cabinet(100)

The cabinet 100 has a box shape with a door on the front.

A load cell (not shown) is installed on the bottom of the cabinet 100 , and the gas cylinder 1 is placed on the load cell (not shown).

Hoist module (200)

As shown in FIGS. 2 and 3, the hoist module 200 is installed with parts (A) and parts (B) on which the automatic gas supply modules 300 on the left and right are respectively hung in front and rear arrangement.

Moreover, a part (A) and a part (B) consist of a pair.

In addition, a pair of hoist modules installed on the left and right are installed in the part (A), and the left and right sides of one automatic gas supply module 300 are suspended and supported.

Hereinafter, only one hoist module 200 will be described.

Each of the hoist modules 200 includes a multi-stage cylinder 210, one end of which is fixed to the multi-stage cylinder 210, and the other end of which is fixed to the left side of the automatic gas supply module 300, and the wire 220 is applied. It includes a horizontal pulley 230 and a vertical pulley 240 .

The multi-stage cylinder 210 includes an air cylinder 211 disposed and installed on the ceiling 110 in the left-right longitudinal direction, a multi-stage piston 213 , and a guide part 215 guiding the multi-stage piston 213 in the left and right longitudinal direction. .

The guide part 215 includes a fixed guide rail 216 installed on the ceiling 110 in parallel with the multi-stage piston 213 , and one end is fixed to the end of the multi-stage piston 213 and the other end is sliding on the fixed guide rail 216 . and a movable block 217 that is possibly installed.

The horizontal pulley 230 is horizontally arranged to rotate about the z-axis.

The horizontal pulley 230 is rotatably supported by a horizontal bracket 231 installed on the ceiling 110 .

A downward separation prevention plate 232 is installed on the horizontal bracket 231 to prevent the wire 220 caught on the horizontal pulley 230 from being separated downward.

The vertical pulley 240 is vertically arranged to be rotated about the x-axis.

The vertical pulley 240 is rotatably supported by a vertical bracket 241 installed on the ceiling 110 .

A side separation prevention plate 242 is installed on the vertical bracket 241 to prevent the wire 220 caught on the vertical pulley 240 from being separated laterally.

Since such a multi-stage cylinder 210 is installed on the ceiling 110 as well as multi-stage (two-stage in the embodiment), the up/down stroke amount of the wire 220 can be secured by contraction and expansion of the piston 213 in multiple stages (two stages in the embodiment). , it is possible to maintain the horizontal length (horizontal width) of the existing cabinet 100 as it is.

In addition, since the automatic gas supply module 300 is suspended through the wire 220, movement in any direction is possible, so that the alignment jig 9 installed on the head of the gas cylinder 1 placed in the cabinet 100 It is very easy to lower and combine the automatic gas supply module 300 .

Here, when the automatic gas supply module 300 is coupled to the alignment jig 9, the valve shutter 910 of the automatic gas supply module 300 is fitted to the valve 3 of the gas cylinder 1, and the gas cylinder The outlet port (5) of (1) is directed toward the connector member (500) or the end cap member (400).

In addition, the multi-stage cylinder 210 controls the pressure through a proportional control valve (not shown), and not only stops at the position when the operator holds the gas automatic supply module 300 up/down, but also stops in the lock ( interlock) implementation and up/down speed control are also possible.

In addition, since the multi-stage cylinder 210 fixes the gas cylinder 1 with a constant force, there is an effect of suppressing the load of the load cell (not shown) in the lower part.

On the other hand, if the left and right width of the cabinet 100 does not matter, the hoist module 200 is installed on one inner wall instead of the ceiling 110 of the cabinet 100, and the gas is automatically supplied so that the piston rises by using a single-stage cylinder instead of a multi-stage cylinder If you grab the module 300 and pull it down, the descending height is sufficient.

Gas automatic supply module (300)

As shown in FIGS. 4 to 9 , the automatic gas supply module 300 includes a connector member 500 to which the connector 510 is fastened/released to the outlet port 5 and a connector 510 of the connector member 500 . ), a connector plug member 600 for fastening/disengaging the connector plug 610, a gasket inserting/discharging member 700 for inserting/discharging the gasket (G) into the connector 510, and a gasket inserting/discharging member It includes a gasket supply member 800 for supplying the gasket G to the 700 , and a valve shutter member 900 for opening/closing the valve 3 of the gas cylinder 1 .

In addition, it is preferable that an end cap member 400 for separating/fastening the end cap 8 of the outlet port 5 of the gas cylinder 1 is further installed in the gas automatic supply module 300 .

The end cap member 400 is normally used when the end cap 8, which is the stopper of the outlet port 5, is fastened, and if there is no end cap 8 in the outlet port 5 of the gas cylinder 1, do not use if

connector member (500)

The connector member 500 has no human error in connecting the gas cylinder 1 and the gas pipe 511, and also automatically the gas cylinder 1 and the gas pipe 511 to protect the worker from dangerous gas. It is a part that connects

That is, the connector member 500 is a member that is automatically fastened (gas supply) or released (replacement of the gas cylinder) to the outlet port 5 of the gas cylinder 1 .

The connector member 500 is disposed on the back side of the frame 310 .

As shown in FIGS. 10, 11 and 12 , the connector member 500 includes a connector 510 connected to the outlet port 5 and a first for transmitting rotational power to the connector 510 about the y-axis. An actuator 530, a second actuator 550 for linearly transporting the connector 510 along the y-axis (front and back), and a third actuator 570 for linearly transporting the connector 510 along the x-axis (left and right). do.

The connector 510 is slightly different depending on the type of the outlet port 5, but generally, since the outlet port 5 is a male screw, the connector 510 is a female screw type nut type, so that the It is fastened (gas supply) or separated in the direction of rotation and forward/backward.

A pipe 511 to which a gas supply tube (not shown) is connected protrudes from the rear surface of the connector 510 as shown in FIGS. 11 and 12 .

In addition, the pipe 511 is exposed to the outside through the long hole 513 in the left and right directions formed in the back plate 311 of the frame 310, as shown in FIG. 6, and is not caught during the left and right transfer of the connector 510 do not

When the connector member 500 is transferred to the left side toward the outlet port 5 , the rotational center of the connector 510 is arranged to coincide with the center of the outlet port 5 .

The first actuator 530 includes an air motor 531 and a reduction gear 533 that transmits rotational power of the air motor 531 to the connector 510 .

The air motor 531 is very good for explosion-proof because there is no spark.

In this embodiment, the rotational power of the air motor 531 is transmitted to the reducer 533 through the timing belt.

The reducer 533 is located on the rear surface of the connector 510 , and the air motor 531 is installed above the reducer 533 .

As shown in FIG. 11 , the second actuator 550 includes a second guide rail groove 551 installed on the bottom surface of the reducer 533 in the y direction, and a second in which the second guide rail groove 551 is coupled. It includes a second movable plate 553 on which the guide rail 552 is installed, and a second air cylinder part 555 in which the second guide rail groove 551 moves forward and backward along the second guide rail 552 .

The second air cylinder unit 555 includes a second air cylinder 556 installed on the second movable plate 553 and a second piston for moving the speed reducer 533 forward and backward in the y-direction through the second bracket 558 . (557).

As shown in FIG. 12 , the third actuator 570 includes a third guide rail groove 571 installed on the bottom surface of the second movable plate 553 in the x direction and the third guide rail groove 571 are coupled to each other. A third fixing plate 573 on which the third guide rail 572 is installed, and a third air cylinder part in which the third guide rail groove 571 moves forward and backward in the x-axis direction along the third guide rail 572 ( 575).

The third air cylinder part 575 moves the second movable plate 553 forward and backward in the x direction through the third air cylinder 576 installed on the bottom surface of the third fixing plate 573 and the third bracket 578 . The actuator includes a third piston (577).

As shown in FIG. 12 , a long hole 574 is formed in the third fixing plate 573 to allow the third bracket 578 to slide in the x-axis direction.

End cap member (400)

The end cap member 400 includes an end cap separation/fastening part 410 disposed side by side with the connector member 500, a first actuator 530 for transmitting rotational power about the y-axis, and separating/fastening the end cap. A second actuator 550 for linearly transporting the part 410 in the y-axis (front and back), and a third actuator 570 for linearly transporting the end cap separation/fastening part 410 along the x-axis (left and right). .

That is, the end cap separation/fastening unit 410 uses the first, second, and third actuators 530 , 550 and 570 together with the connector 510 in common.

Accordingly, the first actuator 530 rotates the connector 510 and the end cap separation/fastening part 410 together, and the second and third actuators 550 and 570 move together along the y-axis and the x-axis.

The rotation center of the end cap separation and fastening part 410 is placed in a state coincident with the center of the outlet port 5 .

That is, the rotation center of the end cap member 400 or the connector member 500 is arranged in line with the center of the outlet port 5 when the automatic gas supply module 300 is down and coupled to the alignment jig 9 . will become

In addition, an end cap holding unit (not shown) for holding the separated end cap 8 is installed in the end cap separation/fastening unit 410 .

The end cap holding part (not shown) can be implemented in various ways, such as mechanical or magnet type, but it is preferable because it is simple in structure to be implemented with a magnet (not shown) as in this embodiment.

Connector plug member (600)

The connector plug member 600 is functional to prevent the contamination of the pipe 511 of the connector member 500 and the gas residue of the gas supply pipe from spreading to the outside even before the gas cylinder 1 is placed in the cabinet 100 . member, and even after the automatic gas supply module 300 is coupled to the alignment jig 9 , the connector plug 610 opens and closes the connector 510 in the standby position without the operation of the connector member 500 .

The connector plug member 600 is disposed inside and outside the right side plate 313 as shown in FIGS. 8, 13 and 14 .

The connector plug member 600 includes a connector plug 610 that is fastened to/disconnected from the connector 510, and a fourth actuator 630 that moves the connector plug 610 back and forth with respect to the connector 510 in the y-direction. .

The connector plug 610 has a cylindrical shape in the form of a male screw and is fastened/disconnected by rotation of the connector 510 .

In addition, the center of the connector plug 610 is oriented on the inside of the right side plate 313 to be disposed in a direction coincident with the y-axis rotation center of the connector (510).

The fourth actuator 630 is a fourth connecting block connecting the fourth air cylinder 631 and the piston 633, the fourth piston 633 and the connector plug 610 installed on the outer surface of the right plate 313 ( 635), a fourth guide rail 637 installed in the y-direction on the inside of the right plate 313, and a fourth guide installed in the fourth connection block 635 and sliding along the fourth guide rail 637 It includes a rail groove (639).

In addition, the fourth piston 633 and the fourth connection block 635 are connected through a bracket, and the right plate 313 between the fourth guide rails 637 is provided to allow passage of the bracket and movement in the y-axis direction. An elongated hole 638 is formed.

Gasket input/discharge member (700)

The gasket input/discharge member 700 inserts the gasket G before the connector 510 is fastened to the outlet port 5 , and when the connector 510 is separated from the outlet port 5 , the inserted gasket G It is a member that takes out and ejects.

The gasket input/discharge member 700 is disposed on the inside of the right side plate 311 like the connector plug member 600 .

In addition, the gasket input/discharge member 700 is disposed on a line along the y-axis direction with the connector plug member 600 .

As shown in FIGS. 13, 14 and 18, the gasket input/discharge member 700 includes a pair of finger grippers 710 for chucking both sides of the supplied new gasket G, and a pair of finger grippers A fifth actuator 720 that approaches/retracts the 710 from each other along the x-axis direction, and a sixth actuator 730 that moves the pair of finger grippers 710 forward and backward along the y-axis direction, and a pair of and a seventh actuator 740 that rotates the finger gripper 710 toward the connector 510 by 180 degrees about the x-axis.

Here, the gasket (G) is a donut-shaped metal, and a C-ring is fitted on the side thereof.

In addition, the gasket (G) is disposable because it is compressed when fastened to the gas outlet (5).

A pair of finger grippers 710 includes a pair of fifth movable blocks 711 installed on the front side of the fifth actuator 720, and a pair of fifth movable blocks 711 installed on the upper end of the fifth movable block 711 to both sides of the gasket (G). It includes a pair of grip parts 713 disposed on the.

A C-ring installed on the side surface of the gasket G is fitted on the inner surfaces of the pair of grip parts 713 and is chucked.

The fifth actuator 720 includes a fifth air cylinder 721 and a piston (not shown).

A guide rail groove 722 in the x direction is formed in the fifth air cylinder 721 , and a guide rail projection 723 sliding along the guide rail groove 722 in the x direction is installed in the fifth movable block 711 . has been

The sixth actuator 730 includes a sixth air cylinder 731 and a piston 733 .

The sixth piston 733 and the fifth actuator 720 are connected through the sixth bracket 735 .

The seventh actuator 740 is a rotary air cylinder 740 installed on the outside of the right side plate 313 .

A sixth air cylinder 731 is installed on the rotary plate 741 of the rotary air cylinder 740 .

The rotation center of the rotating plate 741 is the x-axis.

Therefore, since the backward position of the connector plug 610 almost overlaps on the center line of the rotation plate 741 as shown in FIG. 22, the pair of grippers 710 are rotated 180 degrees upward to move the connector 510 toward the taking the structure.

Due to this arrangement, the connector plug member 600 and the gasket input/discharge member 700 can be installed to overlap each other on the right side plate 313 , thereby contributing to the compactness of the gas automatic supply module 300 .

Gasket supply member (800)

As shown in FIGS. 5 and 15 , the gasket supply member 800 includes a gasket supply unit 810 and a gasket charging unit 820 for charging and chucking the gasket G supplied from the gasket supply unit 810 . ) and a gasket chucking unit 830 , and an eighth actuator 840 for lifting (up) the gasket G of the gasket charging unit 820 by the gasket chucking unit 830 .

In addition, it is preferable that the gasket supply member 800 further includes a gasket container 850 installed below the gasket charging part 820 .

In particular, the gasket supply unit 810 is disposed on the right front side of the automatic gas supply module 300 as shown in FIG. It is very good in terms of maintenance because it can be checked.

As shown in FIG. 15 , the gasket supply unit 810 includes a gasket storage container 813 close to an L-shape in which a gasket inlet 811 is formed at the upper side and a gasket outlet 812 is formed at the lower side.

The gasket storage container 813 is a resin series, and includes a C-shaped back case 813a disposed on the back side, and a transparent front cover 813b installed on the front side of the back case 813a.

Due to the transparent front cover (813b), it is very easy for the operator to check the remaining amount from the outside.

A separation prevention plate 815 for blocking the rear surface of the passage to the gasket charge plate 823 is further installed in the gasket outlet 812 .

The gasket charge part 820 includes a gasket charge plate 823 having a lower surface and rear support pieces 821 and 822 for supporting the lower surface and the rear surface of the gasket (G), and a gasket block for supporting the front surface of the gasket (G) ( 824).

The gasket block 824 has an inverted U-shape.

The lower surface support piece 821 has a circular arc shape concave downward with the same trajectory as the lower surface of the gasket (G).

The back support piece 822 has a bar shape protruding from the vertical center line of the gasket charge plate 823 , and its upper end protrudes to the center of the gasket (G).

A stepped blocking wall 825 is formed on one side of the gasket block 824 to prevent the gasket G coming out of the gasket outlet 812 from deviated to the left on the gasket charge plate 823 .

The eighth gasket actuator 840 includes an eighth air cylinder 841 and a piston 842 installed on the front surface of the gasket block 824 .

The lower surface of the gasket charge plate 823 and the lower end of the eighth piston 842 are connected by a connecting plate 843 .

Accordingly, when the eighth piston 842 is raised as shown in FIG. 16(b), the gasket charge plate 823 is lifted to move the gasket G to the chucking position, and as shown in FIG. 16(a), the eighth piston 842 is lifted. When this is down, the gasket charge plate 823 returns to the position occupying the gasket (G).

The gasket block 824 is supported by the support block 825 on the right side of the front surface 315 of the frame 310 as shown in FIG. 5 .

The gasket chucking unit 830 is installed on the rear surface of the gasket block 824 that is an upper portion of the gasket charging unit 820 .

In the gasket chucking part 830 , a chucking groove 831 into which a pair of advanced grip parts 713 enters to chuck both sides of the gasket G is formed in the gasket block 824 .

The gasket container 850 is installed below the gasket block 824 .

Valve shutter member (900)

The purpose of this is to prevent inhalation accidents due to leakage of harmful gases to the human body by automatically opening and closing the valve 3 of the gas cylinder 1 without an operator.

The valve shutter member 900 is installed perpendicularly to the inner frame 317 installed inside the frame 310 in more detail than the center of the frame 310 .

The valve shutter member 900 includes a valve shutter 910 and a ninth actuator (not shown) rotating the valve shutter 910 .

The ninth actuator (not shown) is also preferably implemented as a reducer coupled to the valve shutter 910 and an air motor that transmits rotational power to the reducer.

The valve shutter 910 is a part that opens and closes the outer peripheral surface of the valve 3 of the gas cylinder 1 .

Gas automatic supply method

Hereinafter, a method of supplying the gas of the gas cylinder 1 to the semiconductor process will be described with reference to FIGS. 17 to 26 .

First, the operator combines the alignment jig 9 to the head of the gas cylinder (1).

The gas cylinder 1 to which the alignment jig 9 is coupled is placed on a load cell installed on the floor in the cabinet 100 .

When the gas cylinder (1) is placed in the cabinet (100), the operator holds the automatic gas supply module (300) and lowers it while the positioning pin of the alignment jig (9) is inserted into the positioning hole of the automatic gas supply module (300) , while the valve shutter 910 is fitted to the valve 3, the outlet port 5 is directed to the rear.

17 is a plan view schematically illustrating a state in which the automatic gas supply module 300 descends and is coupled to the alignment jig 9 as described above.

1. Unplug the connector from the connector

17 and 18 show a state in which the connector plug 610 is fastened to the connector 510 .

In this state, when the connector 510 rotates in the unwinding direction, the connector plug 610 is pushed back in the unwinding direction in the no-load state of the fourth actuator 630. The fourth actuator 630 releases the connector plug 610 backwards as shown in FIG. 19 .

2. Remove the end cap of the outlet port

After the connector plug 610 is released from the connector 510, when the connector member 500 and the end cap member 400 are advanced to the second actuator 550 as shown in FIG. 20, the end of the end cap member 400 The cap separation/fastening part 410 is fitted to the end cap 8 .

When the end cap separation/fastening part 410 rotates and reverses in the unwinding direction, it returns to the holding state of the end cap 8 as shown in FIG. 21 .

The holding of the end cap 8 is performed by the magnetism of the end cap separation/fastening part 410 .

3. Insert the gasket of the connector

After the end cap 8 is separated, as shown in FIG. 22 , the sixth actuator 730 is advanced so that a pair of grip parts 713 approaches the gasket G supplied to the gasket chucking part 830, and the pair of the grip portion 713 approaches each other by the fifth actuator 720 to chuck both sides of the gasket (G).

As shown in FIG. 23, the chucked pair of gripping parts 731 is rotated 180 degrees by the sixth actuator 730 and the seventh actuator 740 to face the chucked gasket (G) toward the connector 510. do.

Then, as shown in FIG. 24 , the gasket G is put into the connector 510 by the forward movement of the sixth actuator 730 , and unchucking and backward by the retreat of the fifth actuator 720 , the input is completed.

When the input of the gasket is completed, the gasket input/discharge member 700 returns to the position shown in FIG. 18 .

4. Connection of connector and outlet port

When the gasket (G) is inserted into the connector 510, the end cap member 400 and the connector member 500 are moved to the left by the third actuator 570 as shown in FIG. 25, and the center of the connector 510 is It stops in alignment with the center of this outlet port (5).

Then, when the end cap member 400 and the connector member 500 are advanced by the second actuator 550 , the connector 510 comes into contact with the outlet port 5 .

Then, if the connector 510 rotates and moves forward in the fastening direction, as shown in FIG. 26 , when the connection is completed, it stops.

5. valve open

When the connector 510 is fastened to the outlet port 5 , when the valve 3 is opened by rotating the valve shutter 910 , the gas of the gas cylinder 1 is transferred to the outlet port 5 and the pipe of the connector 510 . through the semiconductor process.

Gas automatic exchange method

The method for replacing the gas in the gas cylinder (1) is supplied is as follows.

1. Close the valve

The valve 3 is closed by rotating the valve shutter 910 opposite to the valve opening.

2. Release the connector

When the valve 3 is locked, the connector 510 is rotated and reversed to release the separation from the outlet port 5 .

3. Gasket ejection of connector

The connector 510 separated from the outlet port 5 moves to the right and returns to the position where the connector plug 610 and the pair of grip parts 713 are located as shown in FIG. 21 .

Then, as shown in FIG. 23, a pair of grip parts 713 come to a position facing the connector 510, chuck the old gasket and move it backwards to eject the pair of grip parts 713, and rotate to the position shown in FIG. When unchucking, the old gasket falls into the gasket container 850, and collection is completed.

4. End cap fastening

When the discharging of the old gasket is completed, the end cap separating/fastening part 510 is advanced and rotated as shown in FIG. 20 in the state of FIG. 21 to fasten the held end cap 8 to the outlet port 5. When moving backward as shown in FIG. 19 , the fastening of the end cap 8 is completed.

5. Fastening the connector plug

After the end cap 8 is fastened, when the connector plug 610 is advanced and the connector 510 is rotated, the connector 510 is blocked as shown in FIG. 17 .

6. Separation of gas automatic supply module from alignment jig

When the fastening of the connector plug 610 is completed, the air pulling the alignment jig 9 is removed, and the gas automatic supply module 300 is held up by the operator and the gas cylinder 1 can be replaced.

second embodiment

27 is a front perspective view showing an automatic gas supply module according to a second preferred embodiment of the present invention, FIGS. 28 and 29 are left and right perspective views showing the end cap tool part and the connector member of FIG. 27 separated, and FIG. 30 is It is a coupling view showing the main part of the connector member separated from the reducer, Fig. 31 is an exploded perspective view of Fig. 30, Fig. 32 is an enlarged perspective view of the end cap tool, Fig. 33 is a cross-sectional view of Fig. 32, and Fig. 34 is an end view As an exemplary view comparing the holding relationship between the cap and the end cap tool, (a) the present invention (b) is an exemplary view showing the prior art, and FIGS. 35 and 35A are parallel to the connector member and the end cap tool before separating the end cap It is a perspective view and a front view of the state, FIG. 36 is a perspective view showing the end cap tool part of FIG. 35, FIG. 37 is a perspective view of the connector member and the end cap tool part in series before the end cap is separated, and FIG. 38 is the end cap tool part of FIG. 39 is a perspective view showing the connector member and the end cap tool part moving forward to separate the end cap, FIG. 40 is a perspective view showing the end cap tool part of FIG. 39, and FIG. and Figure 42 is a perspective view of the end cap separation operation is completed.

A gas automatic supply module 300a according to the second embodiment is shown in FIG. 27 .

The automatic gas supply module 300a of the second embodiment has a structure and function similar to that of the automatic gas supply module 300, but rotates the automatic gas supply module 300 counterclockwise by 90 degrees when viewed from the front by turning the end cap The point that the tool part 400a/connector member 500a and the gasket supply member 800a are disposed on the left and right, and the connector plug member 600 and the gasket input/discharge member 700 are disposed on the rear surface, Although the connector member 500 and the end cap member 400 are operated in combination with the reducer 533, there is a difference in that the reducer 533a and the end cap tool part 400a are set as separate units.

That is, as a configuration for separating/fastening the end cap 8 with the end cap tool part 400a receiving rotational power about the x-axis of the connector member 500a, the end cap tool 410a of the end cap tool part 400a is When positioned side by side in series in front of the connector 510a of the connector member 500a, it is the end cap separation/fastening operation position (see FIG. 37), and when positioned in parallel with the left and right sides of the connector member 500a, the connector 510a is the connecting operation position ( 35) is characterized in that it is moved to be disposed.

In addition, due to the nature of the operation of the connector member (500a), the degree of freedom of the ground nut (513a) and the portion of the gland (514a), which should normally protrude forward, are connected to the outlet port (5)/connector plug (610) when the gland (514a) is connected. The grand guide part 515a for giving autonomy so that the nut 513a can enter the inside is implemented.

As shown in FIGS. 28 and 29, the connector member 500a is supported on the upper surface side of the frame 310 by a support plate 501a.

The connector member 500a includes a connector 510a connected to the outlet port 5, a first actuator 530a for transmitting rotational power to the connector 510a, and the connector 510a in line with the outlet port 5. A second actuator 550a that linearly transports back and forth (y) between the outlet port 5 and the connector plug 610 to be arranged (series) or side by side (parallel), and the connector 510a to the outlet port 5 It includes a third actuator 570a that linearly moves to the left and right (x) to approach/retract with respect to each other.

Substantially, the forward and backward (y) and left and right (x) transfers of the connector member 500a are performed by the first actuator 530a including the connector 510a.

In addition, the connector 510a disposed side by side with the outlet port 5 is a position facing the connector plug member 600/gasket input/discharge member 700 .

The connector 510a has some differences depending on the shape of the outlet port 5/connector plug 610, but in this embodiment, the outlet port 5/connector plug 610 has a male thread formed on the outer circumferential surface of the shaft. Since it is a normal male threaded rod shape, the pipe 511a is linearly slid so that the pipe 511a is pushed in when fastened, and the gasket G is also a donut disc shape hanging on the front surface of the connector 510a.

Of course, in the center of the outlet port 5, an outlet hole through which the gas of the gas cylinder 1 is discharged is formed to be substantially equal to or smaller than the pipe 511a.

As shown in FIGS. 30 and 31, the connector 510a passes through the inside of the reducer 533a and both ends protrude to the outside, and a polygonal hollow part that receives the rotational force of the reducer 533a. (512a), and a grand nut (513a) inserted therein to be rotated along with the polygonal hollow part (512a), and the outlet port (5) or connector plug (610) while being fixed to the outer peripheral surface of one end of the pipe (511a) and a gland 514a disposed inside the gland nut 513a screw-fastened to the gland 514a, and a gland guide part 515a for guiding the gland 514a to be slidable in a straight line with respect to the gland nut 513a.

One end of the pipe 511a protrudes slightly forward from the gland 514a, and a gasket is fitted in this portion.

In addition, the polygonal hollow portion 512a, the ground nut 513a, and the gland 514a are disposed to protrude outside the main body of the reducer 533a.

The grand nut 513a and the polygonal hollow part 512a are coupled in a polygonal shape to facilitate transmission of rotational force.

That is, as shown in Figure 31a, the rear outer circumferential surface of the grand nut 513a is a polygon 513a' coupled to the polygonal hollow part 512a, and is caught by the hooking (512a') of the inner circumferential surface of the polygonal hollow part 512a. It is prevented from further deviating forward.

The grand nut 513a is pushed in from the rear to the front of the polygonal hollow part 512a until it is caught by the locking jaw 512a.

At this time, a separation prevention ring (512a'') is installed at the rear of the polygonal hollow part (512a).

In addition, a nut correction spring 525a is further installed between the separation prevention ring 512'' and the ground nut 512a.

The nut correction spring (525a) serves to correct the eccentricity with the outlet port (5) when fastening/disconnecting.

The grand guide portion 515a includes a ball bush 516a fitted to the other side of the pipe 511a, a ball bush housing 517a fitted to the outer circumferential surface of the ball bush 516a, and the rear surface of the reduction gear 533a body and the ball bush. The connecting piece 518a fixed to the housing 517a, the flange 519a installed on the outer peripheral surface of the pipe 511a between the ball bushing housing 517a and the gland 514a, and the ball bushing housing 517a and the flange 519a ) includes a ground return spring (520a) installed between, and a stopper (521a) installed at the other end of the pipe (511a) is caught on the connecting piece (518a).

The ball bush 516a includes a cylindrical bush fitted to the pipe 511a and a plurality of balls installed on the outer surface of the cylindrical bush.

The ball bush housing 517a is a stepped housing that is a large-diameter housing and a small-diameter housing.

The end surface of the large-diameter housing is fastened to the connecting piece 518a.

The stepped portion 517b serves as a seat to which both ends of the grand return spring 520a together with the flange 519a come into contact with each other.

The connecting piece 518a has a hole, a U-shape, or an inverted U-shaped penetrating portion so as not to interfere with the sliding of the pipe 511a.

The flange 519a serves not only as a seat of the grand return spring 520a but also as a shaft that substantially guides the through hole in the reduction gear 533a body.

That is, when the gland nut 513a is forwardly fastened with the cover plug 610 or the outlet port 5, the gland 514a together with the pipe 511a is pushed inward, and the grand return spring 520a is compressed and fastened. When this is released, the gland 514a together with the pipe 511a returns to its original position.

In addition, the tip 511b of the pipe 511a is a fitting protrusion protruding forward from the gland 514a, and a donut-shaped gasket is inserted thereinto.

The gasket seals between the front surface of the gland 514a and the front surface of the outlet port 5 .

In addition, the stopper 521a is to prevent the pipe 511a from being pulled forward by the grand return spring 520a from being separated, and is fixed to the pipe 511a by grabbing both ends of the U-shape.

A sensor 522a for detecting a gasket placed on the tip 511b of the pipe 511a is further installed in the hollow reducer 533a.

In order to guide the grand 514a that requires precision, autonomy and freedom by the configuration of the grand guide unit 515a, there was an LM guide outside the reducer in the past, but space restrictions occur. It can be configured to maximize space utilization, and it is configured to be a guide in all directions by using a ball bush so that there is no need for a separate setting.

The first actuator 530a includes an air motor 531a and a speed reducer 533a for transmitting the rotational power of the air motor 531a to the polygonal hollow part 512a as in the first embodiment.

The reduction gear 533a has an L-shape by removing the power transmission portion of the end cap member 400 of the first embodiment.

The air motor 531a is disposed on one side of the reduction gear 533a as shown in FIG. 29 .

The rotational force of the first actuator 530a rotates the polygonal hollow part 512a and the grand nut 513a.

In addition, when the grand nut 513a is fastened to the outlet port 5, the gland 514a is pushed back to compress the grand return spring 520a.

The third actuator 570a includes a third guide rail 571a installed on the bottom surface of the support plate 501a, and a third guide rail groove block 572a coupled to the third guide rail 571a. It includes a plate 573a and a third air cylinder portion 575a for moving the third movable plate 573a with respect to the support plate 501a.

The third guide rail 571a and the third guide rail groove block 572a are the 3 LM guides, and it is irrelevant even if their positions are changed.

The third air cylinder part 575a includes a third air cylinder 576a installed on the support plate 501a and a third piston 577a for moving the third movable plate 573a.

The second actuator 550a includes a second guide rail 551a installed on the bottom surface of the third movable plate 573a, a second guide rail groove block 552a coupled to the second guide rail 551a, and a reducer ( The second bracket 554a connecting 533a and the second guide rail groove block 552a include a second air cylinder part 555a moving along the second guide rail 551a.

The second air cylinder part 555a includes a second air cylinder 556a installed on the third movable plate 573a and a second piston 557a for moving the speed reducer 533a through the second bracket 554a. include

The second actuator 550a can be made compact as a whole by arranging it in a space in which the reducer portion corresponding to the end cap member 400 of the first embodiment is deleted.

Such a connector member (500a) may be applied instead of the connector member (500) of the first embodiment.

On the other hand, the end cap tool 410a slides along with the advancement (approach) of the connector member 500a by the amount that the end cap 8 is fastened to the outlet port 5 while receiving the rotational power of the connector 510a. , by the amount of the end cap 8 separated from the outlet port 5 by the return force of the end cap tool 410a to slide backward (retreat) together with the connector member 500a.

As shown in FIGS. 28, 29, and 40, the end cap tool part 400a applies the rotational power of the end cap tool 410a arranged in parallel with the connector 510a and the connector 510a to the end cap tool 410a. ), an actuator 450a for the end cap tool that transports the end cap tool 410a back and forth so as to be arranged in parallel/series with the connector 510a, and the connector 510a. and a return actuator 470a for returning the end cap tool 410a.

The end cap tool 410a has a hollow shape as shown in FIGS. 32 and 33, and an end cap tool 1410a fitted to the end cap 8, and a connector tool that receives rotational power of the connector 510a ( 2410a).

On the inner peripheral surface of the end cap tool 1410a, protrusions 1411a protruding inward are provided at predetermined intervals.

That is, as shown in Figure 34 (a), the edge (8a) of the end cap (8) is disposed between the projection (1411a) and the projection (1411a), the side (8b) of the end cap (8) when holding and turning Since the edge 8a of the end cap 8 cannot penetrate by touching the side surface of the protrusion 1411a, the phenomenon that the end cap 8 and the tool 1410a for the end cap are tightly pinched is prevented.

If, as shown in Fig. 34(b), if the inner peripheral surface of the end cap tool 1410a is formed in a hexagonal shape like the end cap 8, the edge 8a of the end cap 8 is on the inner peripheral surface when holding and turning. When the end cap tool 1410a rotates with a strong force when touched, the edge 8a of the end cap 8 digs into the inner circumferential surface and fits tightly. Then, when the end cap tool part 400a is restored (reversed) after fastening again, an error may occur due to resistance.

In addition, an inclined surface 1413a is formed on the protrusion 1411a , and serves as a guide surface to easily enter the end cap 8 .

In addition, the end cap holding part 1415a for holding the separated end cap 8 as shown in FIG. 33 is installed in the end cap tool 1410a.

A magnet or a mechanical method can be implemented as the end cap holding part 1415a, but in this embodiment, it is implemented as a ball 1416a that applies pressure to the side of the end cap 8.

The ball 1416a is disposed immediately behind the protrusion 1411a in the radial direction along the circumference of the end cap tool 1410a, and is pressed by the compression spring 1417a.

After the end cap tool 410a is rotatably fitted to the end cap tool support bracket 2450a, particularly the end cap tool bracket 2453a, a C-ring 1440a is assembled on the outer peripheral surface of the end cap tool 1410a to prevent separation. .

Therefore, the end cap tool bracket 2453a is disposed between the connector tool 2410a and the C-ring 1440a and is not separated even if it rotates.

The connector tool 2410a is a flange type, and is larger than the outer diameter of the end cap tool 1410a.

This end cap tool 410a is very excellent in terms of maintenance because it can be replaced when the end cap 8 having a different shape is separated/fastened depending on the type of the gas cylinder 1 .

The rotational power transmission unit 430a includes a pin 1430a installed to protrude forward from the front surface of the polygonal hollow part 512a, and an insertion hole 2430a formed in the connector tool 2410a to insert the pin 1430a. do.

At this time, it is preferable that the insertion hole 2430a is formed as a long hole type insertion hole 2430a which is a tangential direction of rotation as shown in FIG. 29 .

Accordingly, the insertion hit ratio of the pin 1430a into the long hole type insertion hole 2430a is increased, and separation from each other is also facilitated.

The pins 1430a and the long hole-type insertion hole 2430a are disposed along the perimeter at a predetermined interval (eg, at least 120 degrees apart).

The actuator 450a for the end cap tool includes an air cylinder part 1450a for an end cap tool installed on a support plate 350a installed on the frame 310, and an air cylinder part 1450a for an end cap tool while supporting the end cap tool 410a. ) and a first end cap tool LM guide 3450a installed between the upper surface of the support plate 350a and the lower surface of the end cap tool bracket 2450a.

The LM guide 3450a for the first end cap tool is formed by combining the first guide rail 3451a installed on the support plate 350a and the first guide rail groove block 3453a installed on the bracket 2450a for the end cap tool. .

The air cylinder part 1450a for the end cap tool includes an air cylinder 1451a for the end cap tool installed on the upper surface of the support plate 3450a, and a piston 1453a installed to the bracket 2450a for the end cap tool.

The support bracket 2450a for the end cap tool has an L-shape as a whole, and is disposed and installed in front of the plate-shaped end cap tool block 2451a in which the return actuator 470a is installed, and the end cap tool block 2451a. It includes a bracket (2453a) for the L-shaped end cap tool.

According to this configuration, since the end cap tool 410a is always positioned in front of the connector 510a, there is a risk of interference when the gas cylinder is inserted or the connector 510a is repaired.

Therefore, when the end cap tool 410a is parallel to the connector 510a, the cam follower 490a is further included so as not to protrude forward than the connector 510a as shown in FIGS. 27 and 35A .

As shown in FIGS. 36 and 38, the cam follower portion 490a includes a cam follower 1490a protruding downward from the block 2451a for the end cap tool, and a rail 2490a for the cam follower formed on the support plate 350a. ) and an LM guide 3490a for a second end cap tool that guides forward and backward between the first guide rail groove block 3453a and the block 2451a for the end cap tool, wherein the piston 1453a has the first guide rail groove installed in block 3453a.

The rail 2490a for the cam follower is composed of a curved rail 2491a almost L-shaped and a straight rail 2493a.

The straight rail 2493a is formed in front in parallel with the first guide rail 3451a.

The curved rail 2491a is formed as an outwardly convex arc between at least the first guide rail 3451a and the straight rail 2493a, the starting point being on the same line as the first guide rail 3451a, and the end point being the straight rail It is preferable to connect with the time point of (2493a).

The LM guide 3490a for the second end cap tool includes a second guide rail block 3491a installed in the first guide rail groove block 3453a and a second guide rail groove installed on the lower surface of the block 2451a for the end cap tool. Block 3493a is made to be coupled.

Accordingly, when the first guide rail groove block 3453a is pulled toward the rear, when the cam follower 1490a passes along the curved rail 2491a, the second guide rail groove block 3493a with respect to the second guide rail block 3491a. As it moves forward, it naturally crosses the straight rail 2493a and is arranged in series in front of it as shown in FIG. 37 .

The return actuator 470a is a free back cylinder for reversing the end cap tool 410a according to the amount to be separated when the end cap 8 is separated.

That is, the return actuator (470a) is that air is injected only in the backward direction, and is in a no-load state when moving forward.

Accordingly, when the connector member 500a and the end cap tool 410a advance to the outlet port 5, the connector member 500a is in a loaded state and the end cap tool 410a is in a no-load state, and the connector member 500a is moved to the end cap tool. (410a) is pushed.

In particular, the return actuator 470a also functions to reduce the force applied by the connector member 500a to the end cap tool part 400a by half, so that excessive force is not applied to the coupling with the end cap 8 .

Conversely, when the connector member 500a and the end cap tool 410a move backward from the outlet port 5, the connector member 500a is in a no-load state, the end cap tool 410a is in a loaded state, and the end cap tool 410a is connected to the connector. The member 500a is pulled.

When the end cap tool 410a comes to a position where the reversing is completed, the connector member 500a retracts under the load so that the pin 1430a comes out completely from the long hole type insertion hole 2430a.

As shown in FIG. 40, the return actuator 470a includes a back cylinder 1470a installed on the upper surface of the end cap tool block 2451a and a back piston 2470a installed on the end cap tool bracket 2453a. include

The back piston 2470a is installed on the back piston block 2471a coupled to the upper surface of the back cylinder 1470a by the LM guide, and the back piston block 2471 is installed on the end cap tool bracket 2453a.

In addition, a guide bar 3470a for guiding the sliding of the end cap tool bracket 2453a with respect to the end cap tool block 2451a is installed before and after the return actuator 470a.

One end of the guide bar 3740a is guided while being fixed to the bracket 2453a for the end cap tool while being inserted into the guide hole 3742a of the block 2451a for the end cap tool.

The forward and backward movement of the end cap tool 410a is stably guided by the configuration of the return actuator 470a and the guide bar 3740a.

Hereinafter, a method of separating the end cap 8 from the outlet port 5 by combining the connector member 500a and the end cap tool part 400a will be described with reference to FIGS. 35 to 42 .

35 is an initial working state in which the connector 510a of the connector member 500a which faces the end cap 8 in a straight line and the end cap tool 410a of the end cap tool part 400a are parallel to each other.

As shown in FIG. 35A , the end cap tool 410a is disposed slightly behind the connector 510a when viewed from the front, but may be disposed on the same line.

In the initial state of operation, when the piston 1453a of the air cylinder part 1450a for the end cap tool is pulled in the y direction approaching the connector 510a as shown in FIGS. 37 and 38, the second end cap tool LM guide 3490a As a result, the cam follower 1490 rides the curved rail 2491a and crosses the straight rail 2493a in the x-direction, and the end cap tool 410a is placed in series on the connector 510a.

37, when the end cap tool 410a is placed in front of the connector 510a, the third air cylinder part 575a is operated to advance the connector member 500a (x direction), and the pin 1430a is inserted into the long hole type insertion hole. The end cap tool 410a is also advanced (x-direction) while being inserted into the 2430a so that the end cap tool 1410a is fitted to the end cap 8 as shown in FIG. 39 .

Then, the third air cylinder part 575a is switched to a no-load state (intermediate exhaust state), and the polygonal hollow part 512a is rotated around the x-axis through the hollow reducer 533a of the first actuator 530a. The end cap 8 is released from the outlet port 5 as the end cap tool 410a is rotated through the power transmission unit 430a.

At this time, the end cap tool 410a and the connector member 500a are returned together by the return actuator 470a according to the amount of the end cap 8 released.

When the return of the end cap tool 410a is completed, the connector member 500a switches to the load state to return the third air cylinder part 575a to its original position so that the pin 1430a is completely removed from the long hole insertion hole 2430a. out (see FIG. 41).

When the separation of the end cap 8 is completed as shown in FIG. 41, when the piston 1453a of the air cylinder part 1450a for the end cap tool is pushed in the y direction away from the connector 510a, the LM guide 3490a for the second end cap tool ), the cam follower 1490 rides on the straight rail 2493a and goes to the curved rail 2491a, and as shown in FIG. 42, the end cap tool 410a holding the end cap 8 is parallel to the connector 510a. It will return to the finished position.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify or modify the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. can be carried out.

1: gas cylinder 3: valve
5: outlet port 8: end cap
9: align jig 100: cabinet
110: ceiling 200: hoist module
210: multi-stage cylinder 220: wire
230: horizontal pulley 240: vertical pulley
300,300a: gas automatic supply module 310: frame
400: end cap member 410: end cap separation / fastening part
400a: end cap tool part 410a: end cap tool
430a: rotational power transmission unit 450a: actuator for end cap
470a: return actuator 490a: cam follower
500: connector member 510, 510a: connector
511,511a: pipe 512a: polygonal hollow part
513a: gland nut 514a: gland
515a: grand guide part 516a: ball bush
517a: ball bush housing 518a: connection piece
519a: Flange 520a: Grand return spring
521a: stopper 600: connector plug member
610: connector plug 700: gasket input/output member
800: gasket supply member 810: gasket supply unit
813: gasket storage container 813a: rear case
813b: transparent front cover 820: gasket charging part
830: gasket chucking part 840: eighth actuator
900: valve shutter member 910: valve shutter

Claims (5)

A connector member (500 or 500a) to which the connector (510 or 510a) is fastened/disengaged to the outlet port (5) of the gas cylinder (1);
A connector plug comprising a connector plug 610 fastened to/disconnected from the connector 510 or 510a, and a fourth actuator 630 for approaching/retracting the connector plug 610 with respect to the connector 510 or 510a. member 600, and
The fourth actuator 630 is a fourth connecting block for connecting a fourth air cylinder 631 and a piston 633, a fourth piston 633 and a connector plug 610 installed on the outer surface of the side plate 313 ( 635 , a fourth guide rail 637 installed inside the side plate 313 , and a fourth guide rail groove 639 installed in the fourth connection block 635 and sliding along the fourth guide rail 637 . ), the fourth piston 633 and the fourth connection block 635 are connected through a bracket (not shown), and the side plate 313 between the fourth guide rails 637 includes the bracket (not shown). An elongated hole 638 is formed that allows the passage and slide movement of
and a gasket input/discharge member 700 for inputting/discharging the gasket (G) to the connector (510 or 510a) with a pair of finger grippers (710) chucked, wherein the connector plug member (600) and the gasket The input/discharge member 700 is a gas automatic supply module of a gas cylinder installed on the side plate 313 of the frame 310 to overlap each other.
delete delete The method according to claim 1,
The gasket input/discharge member 700 includes a pair of finger grippers 710 for chucking both sides of the supplied new gasket G, and a fifth actuator for approaching/retracting the pair of finger grippers 710 from each other ( 720); ) of the gas cylinder including the automatic gas supply module.
5. The method according to claim 4,
A pair of finger grippers 710 includes a pair of fifth movable blocks 711 installed on the front side of the fifth actuator 720, and a pair of fifth movable blocks 711 installed on the upper end of the fifth movable block 711 to both sides of the gasket (G). Including a pair of grip parts 713 disposed on,
The fifth actuator 720 includes a fifth air cylinder 721 and a piston (not shown),
A guide rail groove 722 is formed in the fifth air cylinder 721,
A guide rail projection 723 sliding along the guide rail groove 722 is installed in the fifth movable block 711,
The sixth actuator 730 includes a sixth air cylinder 731 and a piston 733,
The sixth piston 733 and the fifth actuator 720 are connected through the sixth bracket 735,
The seventh actuator 740 is a rotary air cylinder 740 installed on the outside of the side plate 313,
A gas automatic supply module of a gas cylinder in which a sixth air cylinder 731 is installed on the rotary plate 741 of the rotary air cylinder 740 .

Images