KR102148401B1 - vlave shutter module for gas supply apparatus of gas cylinder - Google Patents

Abstract

The present invention is a valve shutter module for a gas supply device of a gas cylinder that automatically opens and closes the valve 92 of the gas cylinder 90 without an operator to prevent inhalation accidents due to leakage of harmful gas to the human body. After checking the open and closed state of ), it relates to a valve shutter module for a gas supply device of a gas cylinder that stabilizes the load of the servomotor by rotating the encoder value in the reverse direction.

Description

Valve shutter module for gas supply apparatus of gas cylinder}

The present invention is a valve shutter module for a gas supply device of a gas cylinder that automatically opens and closes the valve 92 of the gas cylinder 90 without an operator to prevent inhalation accidents due to leakage of harmful gas to the human body. After checking the open and closed state of ), it relates to a valve shutter module for a gas supply device of a gas cylinder that stabilizes the load of the servomotor by rotating the encoder value in the reverse direction.

In general, in a semiconductor device manufacturing process, a lot of flammable or toxic gases are used according to process characteristics, and these gases are usually contained in a gas cylinder at high pressure and replaced according to the remaining amount of gas.

That is, when the connector is fastened to the outlet port of the gas cylinder and the pipe arranged inside the connector and the outlet port are in contact with each other, the valve is opened to supply gas from the gas cylinder through the outlet port and the pipe to the manufacturing process of the semiconductor device. .

However, since the outlet port and the connector are fastened and the valves of the gas cylinder are opened and closed manually, the installation or replacement time according to the manual work is lengthened, and the risk of gas leakage is very high because it is not accurate when fastening or disassembling.

Korean Publication No. 1998-051759

The present invention was conceived to solve the above-described problem, the present invention is to automatically open and close the valve 92 of the gas cylinder 90 without an operator to prevent inhalation accidents due to leakage of harmful gas to the human body in advance, and the valve The purpose of this is to provide a valve shutter module for a gas supply device of a gas cylinder that stabilizes the load of a servomotor by turning the encoder value in the reverse direction after checking the open/closed state of 92.

In order to achieve the above object, the valve shutter module for a gas supply device of a gas cylinder according to claim 1 of the present invention is a valve shutter module for a gas supply device of a gas cylinder that opens and closes the valve 92 of the gas cylinder 90. As 500, including a valve shutter 510, a rotation driving unit 540, and a rotational power transmission unit 550 for transmitting the rotational power of the rotational driving unit 540 to the valve shutter 510, the valve shutter ( 510 includes a cap portion 520 surrounding the outer circumferential surface of the valve 92 and a valve shutter portion 530 disposed inside the cap portion 520, and the valve shutter portion 530 is inside the cap portion 520 The shaft 531 arranged at predetermined intervals in a circular shape, the support plate 533 installed on the inner circumferential surface of the cylindrical plate 523 to support the shaft 531 to be liftable, and the upper plate 521 and the shaft 531 It includes a spring 535 installed between the top and a rotation shaft 537 rotatably fitted with the top plate 521 while the bottom is installed at the center of the support plate 533, and the rotation drive unit 540 is a servo motor. It includes 541 and an elbow-type reducer 543 that receives the rotational power of the servomotor 541, and the rotational power transmission unit 550 is an arc installed on the lower surface of the pulley 544 of the reducer 543 It includes a drive unit 560, an arc driven unit 570 installed on the upper plate 521, and a bearing 580 installed between the rotation shaft 534 and the pulley 544.

In the valve shutter module for a gas supply device of a gas cylinder according to claim 2 of the present invention, the arc driving part 560 is a 1/4 arc driving protrusion 560 protruding downward from the lower surface of the pulley 544, and The eastern part 570 is made of a semicircular arc driven protrusion 570 protruding upward from the upper plate 521.

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According to the present invention, there are the following effects.

The rotational power transmission unit 550 rotates freely with each other in the 90-degree section, which is a discontinuous section, and power transmission is performed at the same time in 90 or more.

If there is no discontinuous section, the opening and closing of the valve 92 is driven by the servo motor 541. Even if the open and closed state is checked and the servo motor 541 is immediately stopped, the servo motor 541 Due to the characteristic, since the encoder value exceeds the stop position, the load of the servo motor 541 continues to rise in order to find the encoder value, and thus servo off is performed.

To prevent such a situation, the purpose is to stabilize the load of the servomotor by turning the encoder value in the reverse direction after checking the open/closed state of the valve 92. (When the load value of the servo motor rises to the maximum value, the mechanism and valve are increased. Due to severe damage to the device, the equipment may be damaged when repeatedly used, and if it is damaged at the lower limit value than the target load value, the servomotor continues to rotate, leading to a large number of process defects or infinite stop.)

1 is a front view showing a gas cylinder.
Figure 2 is a front view showing a gas supply device of the gas cylinder according to a preferred embodiment of the present invention.
Figure 3 is a perspective view of the second opening and closing door of Figure 2 in an open state.
Figure 4 is a schematic operational flow chart of Figure 3;
5 is a perspective view of the door separated from FIG. 3.
6 and 7 are front and rear perspective views showing the door of FIG. 5.
8 is a perspective view schematically showing a cabinet.
9 is a front view in which the door is omitted in FIG. 2.
10 is a plan view showing a locked state of upper and lower door locks.
FIG. 11 is a plan view of the door in the advanced state of FIG. 10;
12 is a perspective view of the door in a manually opened state.
13 is a plan view showing an unlocked state of FIG. 10 for the operation of FIG. 12.
14 and 15 are perspective views showing main parts for automatic and manual opening and closing of a door.
16 and 17 are side views showing the front and rear of the door hinge portion.
18 is a plan cross-sectional view for explaining a door lock piece and a slot.
19 is a plan view with a door manually opened.
20, 21 and 22 are a front view, a front perspective view and a rear perspective view of the upper unit.
23 and 24 are bottom and top perspective views showing enlarged main parts of the upper unit.
Fig. 25 is a front view of a connector module connected to an outlet port of a gas cylinder.
26 to 29 are views for explaining no-load sliding of the connector module with respect to the first column frame.
30 is a perspective view showing an enlarged upper unit of the hollow reducer.
31 is a longitudinal sectional view of the connector module.
32 is a cross-sectional view of a connector nut fastened to an outlet port.
33 and 34 are front and rear perspective views of the gasket input/discharge module.
33A is a perspective view with the gripper of FIG. 33 removed.
35 and 36 are a front view and a perspective view showing a main part of a gasket input/dispensing module.
37 is a cross-sectional view showing a gasket alignment unit.
38 is a perspective view showing gasket alignment and chucking.
39 is a perspective view showing an enlarged main part of the grip part.
40 is a perspective view showing a process of inserting a chucked gasket.
41 is a perspective view showing the outer shape of the valve shutter module.
42 and 43 are a cross-sectional perspective view and a front view of a main part of FIG. 41;
44 is an explanatory view of power transmission of the valve shutter module.
45 is a diagram showing examples of various types of valves.
46 and 47 are front views of the valve shutter seating and emergency escape state.
48 is a perspective view showing the operation of the main part of the emergency escape.
49 and 50 are a defective and exploded perspective view showing a turntable module.
51 and 52 are cross-sectional views taken along lines 51-51 and 52-52 in FIG. 49;
53 is a bottom perspective view showing a turntable and a pallet-type dedicated jig separated.
54 and 55 are a perspective view and a plan view showing a clamping module.
56 to 59 are a perspective view and a plan view showing the operation of the jacket heating module.
60 and 61 are perspective and cross-sectional views showing an autonomous driving transport forklift 6300 carrying a pallet-type dedicated jig.
62 and 63 are perspective and cross-sectional views of the advanced state of FIGS. 60 and 61;
64 and 65 are perspective views showing a clamper and a lifter.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In addition, the horizontal*vertical*height directions of the cabinet 3 are referred to as x-axis (left and right), y-axis (front and rear), and z-axis (up and down) directions.

In addition, in this embodiment, since the first and second are a pair of left and right, a single term is used when describing the configuration, and when it is necessary to distinguish between the first and the second, the first and second terms and the symbol Use a and b.

The gas supply system of the gas cylinder according to the present embodiment is largely a gas supply device 1, a cabinet 3 in which the gas supply device 1 is installed, and a gas cylinder 90 in the gas supply device 1 It includes an autonomous vehicle (6000) that transports and loads/unloads.

The gas supply device 1 is composed of a first gas supply device 1a for a gas cylinder ① and a second supply device 1b for a gas cylinder ② installed on the left and right sides of the cabinet 3.

Hereinafter, the first and second gas supply devices 1a and 1b are configured as a pair, and will be described only with the gas supply device 1, and the terms 1 and 2 are used when the left and right sides are required.

The gas supply device 1 includes upper and lower units 5 and 7 disposed on the upper and lower sides of the cabinet 3 and a control unit 9 for driving and controlling the upper and lower units 5 and 7.

In addition, the upper and lower units 5 and 7 are composed of a pair of first upper and lower units 5a, 7a and second upper and lower units 5b and 7b that are disposed on the left and right, and the gas cylinder 90 is It is to supply gas continuously and smoothly.

Of course, it is possible to install only a single upper and lower unit, but there is a problem that the supply of gas is temporarily stopped while replacing the exhausted gas cylinder with a new gas cylinder.

1.Cabinet(3)

8 and 12, the cabinet 3 is a rectangular cabinet body 10 having an opening 11 formed on the front side, and first and second door modules 20a for opening and closing the left and right of the opening 11 ) (20b).

The first and second door modules 20a and 20b include first and second doors 30a and 30b, and first and second doors 30a, as shown in FIGS. 6, 7, 11 to 17. ) The first and second automatic door opening and closing portions 50a and 50b for automatically opening and closing the 30b, and the first and second manual door opening and closing portions 70a and 70 for manually opening and closing the first and second doors 30a and 30b. 70b).

The first and second auto door opening and closing parts 50a and 50b operate to automatically open and close the first and second doors 30a and 30b as shown in FIGS. 3 and 4 to replace the gas cylinder 90 This is to ensure only the minimum opening.

Manually opening and closing the first and second doors 30a and 30b as shown in FIG. 12 using the first and second manual door openings and closing parts 70a and 70b prevents maintenance of the upper and lower units 5 and 7. It is to secure the worker's work space as much as possible.

The first and second doors 30a and 30b are disposed on the first and second door frames 31a and 31b and the first and second door frames 31a and 31b, as shown in FIGS. 6 and 7. It includes first and second opening and closing doors 32a and 32b.

The first and second door frames 31a and 31b consist of the first and second upper and lower flanges 33a, 34a, 33b, 34b and the first and second webs 35a and 35b. 36a) (36b), first and second rail grooves (39a) (39b) having first and second front and rear rail grooves (37a, 38a) (37b, 38b) formed in the first and second phase flanges (33a) (33b) ).

The first opening and closing door 32a is arranged in the first front rail groove 37a, and the second opening and closing door 32b is arranged in the second front rail groove 37b.

Accordingly, the first opening and closing door 32a is opened by sliding into the second rear rail groove 38b with the second door frame 31b protruding forward with respect to the first door frame 31a, and conversely, the second opening and closing door 32b ) Is opened by sliding into the first rear rail groove 38a in a state in which the first door frame 31a comes out forward with respect to the second door frame 31b.

The first and second auto door openings and closing portions 50a and 50b have the first and second door frames 31a and 31b with respect to the cabinet body 10 and the y-axis (front and back) as shown in FIGS. 10 to 15. The driving cylinders 51a and 51b for the first and second door frames that slide along, and the first and second opening and closing doors 32a and 32b for the first and second door frames 31a and 31b are x-axis (left and right) It includes a driving cylinder (53a) (53b) for the first and second opening and closing door sliding along the.

As shown in Fig. 11, the driving cylinders 51a and 51b for the first and second door frames include cylinders ③ installed on the upper and lower sides of the cabinet body 10, and the first and second upper and lower flanges 33a and 34a. ) It consists of a piston rod (④) installed on (33b, 34b).

The driving cylinders 53a and 53b for the first and second opening and closing doors are implemented as first and second rodless pneumatic cylinders 53a and 53b.

The rodless pneumatic cylinder 53, as shown in FIG. 6, is a slide 55 within the stroke length range through a magnet, etc., unlike the general pneumatic cylinder output method by the piston rod. ) Is to work in a straight line. Therefore, when the rodless pneumatic cylinder 53 is used, there is an advantage that the installation area is minimized, and the intermediate stop characteristic is good because the cross-sectional area of the piston is the same when moving forward and backward.

The rodless pneumatic cylinder 53 includes a barrel 54 installed on the upper and lower flange 34 in the outer shape, and a slide 55 that slides along the outer circumferential surface of the barrel 54.

Inside the barrel 54, a piston sliding left and right by air is disposed, and the piston is transferred together with the slide 55 by magnetism.

Accordingly, the upper and lower sides of the opening and closing door 32 slide stably through the rail groove 39 and the slide 55.

The first and second manual door openings and closing portions 70a and 70b are provided in which the first and second doors 30a and 30b are opened and closed with respect to the cabinet body 10 as shown in FIGS. 12 to 17. The first and second door locks 72a and 72b installed on the pistons of the 1,2 hinge parts 71a and 71b, the driving cylinders 51a and 51b for the first and second door frames, and the first and second door frames The first and second door lock grooves 73a, 74a and 73b, 74b formed in the first and second upper and lower flanges 33a, 34a, 33b, 34b of (31a) (31b), and the first and second door lock grooves It includes drive cylinders 75a and 75b for first and second door locks that lock/unlock the first and second door locks 72a and 72b with respect to (73a, 74a) (73b, 74b).

The first and second hinge portions 71a and 71b include first and second male hinge portions 76a and 76b installed on the cabinet body 10, as shown in FIGS. 16 and 17, and the first and second hinge portions. The first and second arm hinges 77a installed on the first and second webs 35a and 35b of the door frames 31a and 31b so as to be pivotable with respect to the first and second male hinges 76a and 76b (77b).

In particular, the first and second male hinge portions 76a and 76b have first and second front and rear hinge portions 78a and 78b that are slidably supported with respect to the cabinet body 10 in the y-axis direction, and the second and second front and rear hinge portions. It includes first and second male hinge pins 79a and 79b protruding upward in the z direction with respect to the hinge portions 78a and 78b.

The first and second front and rear hinge portions 78a and 78b function to move together when the first and second door frames 31a and 31b move back and forth, as shown in FIG. 11.

The first and second front and rear hinge portions 78a and 78b are installed in the first and second front and rear movable pins 81a and 81b and the cabinet 10 to accommodate the first and second front and rear movable pins 81a and 81b. The first and second guide pieces 82a, 82b to guide, and the first and second front separation prevention pieces 88a and 88b installed at the rear ends of the first and second front and rear movable pins 81a and 81b, It includes first and second springs 83a and 83b installed between the first and second guide pieces 82a and 82b and the first and second front separation prevention pieces 88a and 88b.

The first and second springs 83a and 83b automatically add a reversing force when the first and second doors 30a and 30b are retracted.

The first and second female hinge portions 77a and 77b are formed of first and second female hinge holes 77a and 77b that are fitted into the first and second male hinge pins 79a and 79b.

The first and second door locks 72a and 72b are important components that serve as both an automatic door and a manual door.

As shown in FIG. 18, the first and second door locks 72a and 72b include first and second finger portions 84a and 84b disposed on the left and right, and first and second finger portions 84a and 84b. It includes first and second door lock pieces (85a, 85b) receiving elastic force to protrude to the left and right of the tip of the outer side.

The first and second door lock pieces 85a and 85b are pushed into the first and second finger portions 84a and 84b when an external force is applied.

In addition, the first and second door lock pieces 85a and 85b protrude in a right triangle when viewed in a plan view, with a horizontal surface 86 at the rear and an inclined surface 87 at the front.

The inclined surface 87 of the first and second door lock pieces 85a and 85b is allowed to ride in by the pushing force when closing the first and second doors 30a and 30b, so that the first and second door lock pieces 85a) ( 85b) is pushed in, and when it is released from its force, it returns again and the locking is performed.

The first and second door lock grooves (73a, 74a) (73b, 74b) are the first and second slots (73a, 74a) formed long in the x-axis direction on the first and second upper and lower flanges (33a, 34a) (33b, 34b) It consists of (73b, 74b).

Accordingly, the first and second door lock pieces 85a and 85b are connected to the first and second slots 73a, 74a, 73b, while the first and second finger portions 84a and 84b approach each other as shown in FIG. When it is removed as soon as it enters the interior of 74b, the gap (c) between the first and second finger portions 84a, 84b and the horizontal surface 86 of the first and second door lock pieces 85a and 85b, as shown in FIG. ) Is inserted into the edges of the first and second slots 73a, 74a, 73b, and 74b, and is locked, and in this case, the door is automatically moved back and forth.

On the contrary, in the state of FIG. 10, when the first and second finger portions 84a and 84b are in close proximity to each other as shown in FIG. 13, the first and second door lock pieces 85a and 85b are the first and second slots 73a and 74a. ) (73b, 74b) is in the unlocked state because it does not get caught in the edges, in this case, the door is opened and closed manually.

Operation sequence for automatically opening the first door (30a) and the second door (30b)

In a state in which the first door 30a and the second door 30b are in close contact with the cabinet body 10 around the opening 11, the first rear rail groove 38a of the first door 30a is opened and closed for the second. The second rodless cylinder 53b is driven and advanced until it is located on the same line as the door 32b.

When the second rodless cylinder (53b) slides toward the first rear rail groove (38a) with the advance of the second rodless cylinder (53b), the second door frame (31b) is opened to perform necessary tasks such as replacement of the gas cylinder (②). Do.

Conversely, in a state in which the first door 30a and the second door 30b are in close contact with the opening 11, the second rear rail groove 38b of the second door 30b is connected to the first opening and closing door 32a. The first rodless cylinder 53a is driven and advanced until it is located on the same line.

When sliding the first opening and closing door 32a toward the second rear rail groove 38b with the advance of the first rodless cylinder 53a, the first door frame 31a is opened and necessary work such as replacement of the gas cylinder (①) Do.

Operation sequence for manually opening the first door (30a) and the second door (30b)

When the first door 30a and the second door 30b are in close contact with the cabinet body 10 around the opening 11, the first and second air cylinders 75a and 75b for door locks are used. The first and second door lock pieces 85a and 85b of the door locks 72a and 72b are approached and the first and second door lock pieces 85a and 85b are connected to the first and second slots 73a, 74a and 73b, 74b. ).

When the first and second doors 30a and 30b are held and opened, the first and second hinges 71a and 71b rotate in an opening/closing manner to completely open the opening 11 (see FIG. 19).

2. Upper unit (5)

The upper unit 5 includes a support frame 100 including a first support frame 110 and a second support frame 120, as shown in FIGS. 9 and 20; A support frame forward and backward driving module 200 for moving the first support frame 110 back and forth in the x-axis direction with respect to the second support frame 160; A connector module 300, a gasket input/discharge module 400, and a valve shutter module 500 installed on the first support frame 110; A vision module 600 disposed on the second support frame 160; A support frame lifting module 700 for lifting the support frame 100 in the z-axis direction; And a valve shutter emergency escape module 800.

2-1. Support frame (100)

The support frame 100 is divided into a first support frame 110 and a second support frame 120 as shown in FIG. 20.

The first and second support frames 110 and 120 are the first and second column frames 130 and 140 in the y-axis direction, and the x-axis installed on the upper side of the first and second column frames 130 and 140 It includes a cross frame 150 of the direction.

The cross frame 150 is divided into a first cross frame 151 installed on the first column frame 130 and a second cross frame 152 installed on the second column frame 140.

The first cross frame 151 and the second cross frame 152 are connected by the support frame front and back driving module 200.

A valve shutter module 500 is installed in the first cross frame 151 in the z-axis direction.

The vision module 600 is installed on the second cross frame 152.

A connector module 300 is suspended and supported on the first column frame 130 so as to be slidable without load through a pair of cross roller guides 131 and 132.

That is, as shown in FIGS. 26 and 27, the upper end 303 of the support plate 301 of the connector module 300 is caught on the upper end 134 of the cross roller guide 131 of the first column frame 130. As a structure that hangs, that is, the cross roller guide 131 is accommodated in the support plate 301, the upper end 134 of the cross roller guide 131 naturally hangs on the upper end 303 of the support plate 301, and Figs. As shown in 29, the first column frame 130 is supported to be slidable under no load with respect to the connector module 300 through a pair of cross roller guides 131 and 132.

Therefore, even if the connector nut 340 of the connector module 300 is fastened and fixed to the outlet port 91 of the gas cylinder 90 as shown in FIG. 29, it is not affected at all and the lifting of the support frame 100 and the Together, the valve shutter module 500 is also freely raised and lowered.

The purpose of this is to minimize an error range caused by mechanical factors in detecting a change in weight of the gas cylinder 90 according to the amount of gas due to the no-load sliding of the cross roller guides 131 and 132.

That is, as the weight of the gas cylinder 90 mounted on the turntable module 1000 decreases, the connector module 300 also descends with the gas cylinder 90 when the gas cylinder 90 is slightly lowered. Minimize

The support plate 301 of the connector module 300 has a lead-out hole 302 through which a gas pipe 360 to be described later is drawn out, and a gas pipe 360 drawn out from the lead-out hole 302 is formed in the first column frame 130. ) A vertical long hole 133 is formed to avoid interference due to the elevation of the support frame 100.

2-2. Support frame front and back drive module (200)

The support frame front and rear drive module 200 is fastened forward (refer to Fig. 25) or retracted (Fig. 23 and Fig. 23 and Fig. 2) with the connector nut 340 of the connector module 300 to the outlet port 91 of the gas cylinder 90. 24) and the valve shutter 510 of the valve shutter module 500 on or off the valve 92 of the gas cylinder 90 at the same time.

The support frame forward and backward driving module 200 connects the first cross frame 151 and the second cross frame 152 to advance (pull) the first cross frame 151 with respect to the second cross frame 152 Or, it includes an actuator 200 that retracts (membranes).

At this time, the actuator 200 is preferably divided into a first actuator 210 and a second actuator 220, the reason is as follows.

The first actuator 210 is implemented as an air (pneumatic) cylinder 210 that advances (pulls) the first cross frame 151 with respect to the second cross frame 152.

In addition, on the movable side of the air cylinder 210, as shown in FIG. 23, a release completion position sensor 211, a fastening start position sensor 212, and a fastening completion position sensor 213 are installed.

The second actuator 220 is implemented with a gas spring 220 that retracts (pushes) the first cross frame 151 with respect to the second cross frame 152.

On the other hand, if the regulators 214 and 215 are installed in the air cylinder 210 to lower the pressure during retreat than when moving forward, the air cylinder 210 provides an auxiliary retraction force when the gas spring 220 is retracted. Provides.

The function of the back and forth operation of the air cylinder 210 and the gas spring 220 will be described.

The air cylinder 210 moves forward in order to connect the connector nut 340 to the outlet port 91. The weight of the connector module 300 that must move during the forward operation and the pressure of the forward regulator 214 for smooth operation. Is set to 0.3Mpa or more, and when contact is made with each other after advancing, the connector nut 340 strongly presses the outlet port 91 of the gas cylinder 90, so that the inlet side wears each other. At this time, the gas spring 220 applies a force in the opposite direction to the forward direction to reduce the pressing force of the connector module 300 by half, thereby preventing each other from being worn to a minimum.

On the contrary, in the retracting (reverse) operation of releasing the connector nut 340 from the outlet port 91, the speed of the air cylinder 210 is faster than the speed at which the air cylinder 210 is released only when the air cylinder 210 is retracted. The pressure in the rod (piston) space continues to be compressed, and due to the pressure of the rod, which was compressed at the moment the connector module 300 and the outlet port 91 are released, it is 30 regardless of the adjustment of the speed controller. The ~40mm section is moved at full speed.In this case, a severe collision may occur at the end point of the stroke, which can shorten the life of the entire device and cause the setting to be wrong. ) To less than 0.1 MPa to reduce the air force compressed on the rod, and release it with the force and speed of the gas spring 220 to maintain a constant speed even at the moment of release of the connector module 300 and the outlet port 91. It escapes stably, and in case the force of the gas spring 220 is insufficient to push the mechanism until the end of the stroke, the air set to 0.1 MPa replaces the insufficient force.

The air cylinder 210 and the gas spring 220 are disposed on the front side of the first cross frame 151 and the second cross frame 152, and a guide post corresponding thereto is installed on the rear side. Make the sliding stable.

2-3. Connector module (300)

The connector module 300 is a device that automatically connects the gas cylinder and the gas pipe to protect the operator from dangerous gases without human error in connecting the gas cylinder 90 and the gas pipe 360. .

That is, the connector module 300 is a module that is automatically fastened (gas supplied) or released (replacement of the gas cylinder) to the outlet port 91 of the gas cylinder 90.

The connector module 300 includes a motor 310, a hollow reducer 320 receiving the rotational power of the motor 310, and a connector socket as an output terminal of the hollow reducer 320, as shown in FIGS. 30 to 32 A connector nut 340 installed at 330 and fastened to the outlet port 91, a nut concentric correction piece 350 installed between the connector socket 330 and the connector nut 340, and a hollow reducer 320 A gas pipe 360 disposed through the center of the pipe, a pipe fixing block 370 fixing the other end of the gas pipe 360 to the hollow reducer 320, a head 361 and a connector nut of the gas pipe 360 It includes a C-ring 380 for separation between the 340 interposed.

The motor 310 is inserted into the motor bracket 321 formed in the hollow reducer 320 as a servo motor.

That is, the motor bracket 321 is disposed in the y-axis direction with respect to the rotational axis of the hollow reducer 320 (with respect to the x-axis), so as to form an L-shaped rotational power transmission unit as a whole, the occupied space is minimized as much as possible.

The drive unit (not shown) of the motor 310 and the driven unit (not shown) of the hollow reducer 320 are connected and transmitted by a conventional gear, and a detailed description thereof will be omitted.

The hollow reducer 320 is provided with a supporting plate 301 or a moving plate 301 having a cross roller guide 131 of the first column frame 130 and a cross roller guide 132 connected in a non-load sliding manner.

It is preferable that the nut concentric correction piece 350 is implemented with a spring 350.

The spring 350 makes the connector nut 340 move with a high degree of freedom, thereby correcting the concentricity of each other, which is not accurate when screwing with the outlet port 91.

The connector socket 330 and the connector nut 340 are inserted in a polygonal type, so that the rotational force of the connector socket 330 is transmitted to the connector nut 340 through the polygon.

At the rear end of the connector nut 340, a seat 341 on which one side of the spring 350 is placed is formed to protrude toward the rotation center axis. That is, the seat 341 may be referred to as an inner flange.

When the head 361 of the gas pipe 360 is caught on the inside of the seat 341, the C-ring 380 may be omitted.

The gas pipe 360 is a stainless pipe, and the head 361 of the gas pipe 360 is inserted into the outlet port 91.

That is, the gas pipe 360 is fixed to the hollow reducer 320 so that the head 361 is disposed inside the connector nut 340.

The C-ring 380 is installed between the seat 341 and the head 361 to prevent the connector nut 340 from being separated from the front.

In addition, a resin-based pipe guide 390 is further installed between the center of the hollow reducer 320 and the gas pipe 360, thereby maintaining the straightness of the gas pipe 360.

That is, since the stainless steel pipe 360 lacks flexibility, it is severely twisted during the up/down operation of the support frame 100 and the forward and backward movement of the connector module 300, which serves to hold the part. If the stainless steel gas pipe 360 is twisted, the connector socket 330 is twisted and the connector socket 330 is not fastened or it is not properly fastened, so there is a high possibility of leakage. I like the way.)

The head 361 of the gas pipe 360 is formed with a locking protrusion 331 that is caught on the output end side.

Accordingly, the gas pipe 360 is installed while being prevented from moving back and forth by the pipe fixing block 370 and the locking protrusion 331.

In addition, a tube-shaped gasket support pipe 362 is further protruded from the front end of the head 361 of the gas pipe 360, and a pair of cutout grooves 363 from which a pair of grip portions 452, which will be described later, are drawn out. Is formed.

Therefore, when the gasket G is inserted into the inside of the gasket support pipe 362, the C-ring G1 installed on the side of the gasket G is in elastic contact to maintain the inserted state without being removed from the front.

The rotational power of the motor 310 is fastened to the outlet port 91 by rotating the connector socket 330 and the connector nut 340 installed on the rotating plate 322 through the reduction gear of the hollow reducer 320, It is released.

A spacer block 323 is installed between the rotating plate 322 and the connector socket 330.

In addition, left and right reflectors 640 and 650 for reflecting the light source of the vision module 600 to be described later are installed on the left and right sides of the spacer block 323.

The left reflecting plate 640 has a larger diameter than the right reflecting plate 650.

The fastening/unlocking operation of the connector module 300 will be described.

Tightening action

1. Align the outlet port 91 of the gas cylinder 90 with the connector nut 340 of the connector module 300 with the vision camera of the vision module 600.

2. Advance (pull) the connector module (300) toward the outlet port (91) with the air cylinder (210)

3. After detecting the fastening start position, rotate the connector nut 340 in the fastening direction by rotating the motor.

4. Motor rotation and forward stop after detecting the set motor load value and tightening position

Release action

1. The connector module 300 is moved backward by mixing the main reaction force of the gas spring 220 and the auxiliary reverse force of the air cylinder 210

2. Motor rotation in reverse direction

3. Motor rotation and reverse stop after detecting the release completion position

2-4. Gasket input/discharge module (400)

The gasket input/discharge module 400 inserts the gasket G into the gasket support pipe 362 of the gas pipe 360 before the connector nut 340 is fastened to the outlet port 91, and the connector nut 340 When is separated from the outlet port 91, the inserted gasket (G) is taken out and collected.

That is, the gasket input/discharge module 400 is a gasket supply unit 410 and a gasket charging unit that charges the gasket G supplied from the gasket supply unit 410, as shown in FIGS. 33 to 36 Lifting to lift the gasket (G) of the gasket alignment unit 430 disposed above the gasket charging unit 420 and the gasket alignment unit 430 in the z-axis direction 420 and the gasket charging unit 420 A gasket actuator 440 for, a pair of finger grippers 450 facing the gasket alignment unit 430 and gripping both sides of the gasket G in the y-axis direction, and a pair of finger grippers 450 An approach/removal gasket actuator 460 for approaching/removing along the y-axis direction, a gasket actuator 470 for forward/backward movement for moving a pair of finger grippers 450 forward and backward along the x-axis direction, and a pair of fingers It includes a rotation gasket actuator 480 for rotating the gripper 450 toward the connector nut 340 around the x-axis, and a gasket container 490 disposed below the pair of finger grippers 450.

Here, the gasket G is a donut-shaped metal, and a C-ring G1 is fitted on its side surface.

In addition, since the gasket G is compressed when it is fastened, it is disposable and is collected in the gasket container 490 and discarded.

The gasket supply unit 410 includes a gasket storage container 413 close to an L-shaped shape in which a gasket inlet 411 is formed on the upper side and a gasket outlet 412 is formed on the lower side, and a gasket inlet 411 and a gasket outlet of the gasket storage container 413 It includes an air purge 414 and 415 for an inlet and an outlet installed on the 412 side.

The gasket storage container 413 uses an extra gasket (G) storage method as a gasket side contact method, so that a separate protective slip sheet is not required, and damage of the gasket (G) is prevented by avoiding contact between the front and rear parts, which are important parts.

The gasket storage container 413 is made of a resin-based guide frame 416 having a U-shaped cross section, and a cover 417 of a transparent PC installed on the front of the guide frame 416, so that the remaining amount can be easily checked and the gasket (G) Does not damage.

The air purge 414 for the inlet port can block the penetration of particles in advance by making the gasket inlet 411 in an open type, and the air purge 415 for the outlet port is in the gasket storage container 413 Contamination of the gasket (G) in storage can be blocked.

The gasket charging unit 420 includes a gasket charging plate 423 having a bottom surface and front supporting pieces 421 and 422 supporting the bottom surface and the front surface of the gasket G, and an alignment block supporting the rear surface of the gasket G ( 424).

The lower support piece 421 has a concave circular arc shape with the same trajectory as the lower surface of the gasket G.

The front support piece 422 has a bar shape protruding from the vertical center line of the gasket charge plate 423, and its upper end protrudes to the center of the gasket G.

A blocking wall 425 is formed on one side of the alignment block 424 so that the gasket G from the gasket outlet 412 does not deviate from the support piece 421.

The lifting gasket actuator 440 is a pneumatic cylinder composed of a cylinder 441 and a piston 442 installed on the rear surface of the alignment block 424.

The lower surface of the gasket charge plate 423 and the lower end of the piston 442 are connected by a connection block 443.

The alignment block 424 is supported by the main block 444 installed on the first cross frame 151 as shown in FIG. 22.

The gasket alignment unit 430 is installed on the front surface of the alignment block 424 as shown in FIG. 37.

The gasket alignment unit 430 includes an alignment groove 431 formed from the front to the rear (y-axis) of the alignment block 424, a gasket alignment plate 432 disposed in the alignment groove 431, and It includes a spring 433 installed between the gasket alignment plate 432 and the alignment groove 431.

In the alignment operation of the gasket (G), if the gasket alignment plate 432 is a fixed type, the finger gripper 450 compresses the gasket (G) with the gasket alignment plate 432, causing scratches on the gasket (G). Therefore, the movable gasket alignment plate 432 containing the spring 433 compressed in the y-axis direction is made of a resin-based material to prevent automatic alignment and scratches of the gasket G.

That is, when the gasket charge plate 423 occupied by the gasket (G) is lifted and the rear surface of the gasket (G) is located on the front surface of the gasket alignment plate 423, the finger gripper 450 controls both sides of the gasket (G). It is automatically aligned when chucking.

A pair of finger grippers 450 are disposed on the left and right around the front support piece 422.

That is, as shown in Figs. 38 and 39, a pair of finger grippers 450 have a pair of access/removal blocks 451 installed on the upper surface of the gasket actuator 460 for access/removal, and As long as it is formed on the inner side of the pair of grips 452 and the pair of grips 452 installed on both sides of the gasket G installed on the upper end of the eviction block 451 and contacts the front of the gasket G It includes a pair of gasket alignment projections 453.

In particular, a fitting groove 454 into which the C-ring G1 installed on the side of the gasket G is fitted is formed on the inner surface of the pair of grip portions 452.

Therefore, by manufacturing the grip portion 452 in a shape matching the shape of the side of the gasket G, it is possible to implement a stable operation with only a two-position grip when the chuck is operated.

In addition, the finger gripper 450 has a gasket alignment protrusion 453 that can support alignment, and is configured to perform alignment without a separate operation during the gasket chuck operation.

In addition, since the front and rear surfaces of the gasket G must not be scratched, the grip part 452 is preferably made of an engineering plastic material.

The forward and backward gasket actuator 470 is a pneumatic cylinder, which is a cylinder and a piston, and is supported by the main block 444.

The rotation gasket actuator 480 is a rotary pneumatic cylinder and is supported by a third block 447 supported by the forward and backward gasket actuator 470.

The approach/removal gasket actuator 460 is a pneumatic cylinder comprising a cylinder and a piston, and is fixed to the upper surface of the second block 446, and the second block 446 is supported by the rotating gasket actuator 480.

In addition, a gasket supply part 410 is supported on the other side of the alignment block 424.

A support frame 491 is installed below the third block 447 to support the gasket container 490 detachably.

The operation of the gasket input/discharge module 400 will be described with reference to FIGS. 36, 38 and 40.

Gasket closing operation

1. As shown in FIG. 36, the gasket charge plate 423 takes over one new gasket (NG) from the gasket supply unit 410 in a free fall in the x-axis direction.

2. As shown in FIG. 36, by moving the gasket charge plate 423 up in the z-axis direction with the gasket actuator 440 for lifting, the gasket alignment part 430 on the same x-axis as the position of the grip part 452 Lift the gasket (NG). When the gasket charge plate 423 is lifted, the side gasket outlet 412 is blocked.

3. As shown in FIG. 38, the gasket alignment plate 432 of the gasket alignment unit 430 contacts the grip part 452 with the gasket NG in a backward motion in the x-axis direction of the gasket actuator 470 for forward and backward movement. NG) is chucked by the approach motion of the gasket actuator 460 for alignment and approach/removal.

4. When the gasket (NG) is aligned and chucked, when the gasket charge plate 423 is lowered in the z-axis direction, one new gasket (NG) is taken over in the x-axis direction by free fall.

5. As shown in FIG. 40(a), the gripped grip 452 is returned to the initial position by the forward motion of the gasket actuator 470 for forward and backward movement in the x-axis direction.

6. The returned grip part 452 is rotated 90 degrees around the x-axis by the rotation gasket actuator 480 and positioned on the connector nut 340 as shown in FIG. 40(b).

7. The gasket NG of the grip part 452 is put into the gasket support pipe 362 of the connector nut 340 as shown in FIG. 40(c) by the backward operation of the gasket actuator 470 for forward and backward movement. At this time, the grip part 452 is input/discharged from the cutout groove 363.

8. When the gasket (NG) is inputted, the grip part 452 is unchucked by the retracting motion of the approach/removal gasket actuator 460 and then unchucked by the forward motion of the gasket actuator 470 for forward and backward movement. As shown in (d), it comes out from the connector nut 340.

9. By rotating the gasket actuator 480 for rotation by -90 degrees, the unchucked grip part 452 is positioned on the gasket alignment part 430 as shown in FIG. 40(e).

Gasket ejection operation

After the gas supply of the gas cylinder 90 is completed, one cycle, which is an operation of discharging the old gasket OG inside the connector nut 340 from the outlet port 91, will be described below.

1. The unchucked grip part 452 is positioned on the connector nut 340 by rotating the gasket actuator 480 for rotation 90 degrees.

2. The grip part 452 enters the inside of the connector nut 340 by the backward motion of the forward and backward gasket actuator 470.

3. With the approaching operation of the approach/removal gasket actuator 460, the grip portion 452 chuck the gasket OG.

4. The grip part 452 chucked by the forward motion of the forward and backward gasket actuator 470 is pulled out from the connector nut 340.

5. The chucked grip part 452 is rotated by -90 degrees with the rotation gasket actuator 480.

6. The gasket OG used due to the unchucking of the grip part 452 due to the retraction operation of the approach/removal gasket actuator 460 is freely dropped and collected in the gasket container 490.

2-5. Valve shutter module (500)

The purpose is to prevent inhalation accidents caused by leakage of harmful gas to the human body by automatically opening and closing the valve 92 of the gas cylinder 90 without an operator.

The valve shutter module 500 is installed on the first cross frame 151.

As shown in FIG. 41, the valve shutter module 500 is a rotational power transmission unit that transmits the rotational power of the valve shutter 510, the rotation drive unit 540, and the rotation drive unit 540 to the valve shutter 510. Includes 550.

The valve shutter 510 is a component that opens and closes the valve 92 of the gas cylinder 90.

The valve shutter 510 includes a cap portion 520 surrounding an outer peripheral surface of the valve 92 and a valve shutter portion 530 disposed inside the cap portion 520.

The cap portion 520 includes an upper plate 521 and a cylindrical plate 523 installed at an edge of the upper plate 521.

The valve shutter unit 530 includes a shaft 531 disposed at predetermined intervals in a circular shape inside the cap unit 520, and a support plate installed on the inner circumferential surface of the cylindrical plate 523 so that the shaft 531 can be lifted. 533), a spring 535 installed between the upper end of the upper plate 521 and the shaft 531, and a rotation shaft rotatably fitted with the upper plate 521 while the lower end is installed in the center of the support plate 533 ( 537).

A linear bush 532 is installed between the shaft 531 and the support plate 533 to provide smooth lifting of the shaft 531.

The upper side of the shaft 531 is formed with a locking protrusion 534 that is caught on the upper end of the support plate 533 or the upper end of the linear bush 532.

The upper side of the spring 535 is fitted into the groove 522 formed on the lower surface of the upper plate 521, and the lower side of the spring 535 is fitted into the upper end 531a of the shaft 531.

Since the upper plate 521 and the rotation shaft 537 are fitted in a polygonal shape, the valve shutter unit 530 also rotates at the same time as the rotation shaft 537 rotates.

When the valve shutter 510 is seated on the valve 92 of the gas cylinder 90 in a basic state in which the structure of the linear bush 532 and the spring 535 continuously pushes the shaft 531 downward, the valve ( 92) According to the shape of the interference part, the shaft 531 is avoided upward, and the part without interference serves as a pillar that opens and closes the valve 92 during rotation. The above structure is to cope with the diversity of the shape of the valve 92 as shown in FIG. 45.

The rotation drive unit 540 includes a servo motor 541 and an elbow-type reducer 543 receiving the rotational power of the servo motor 541.

The rotational power transmission unit 550 includes an arc driving unit 560 installed on the lower surface of the pulley 544 of the reducer 543, an arc driven unit 570 installed on the upper plate 521, and a rotation shaft 534 It includes a bearing 580 installed between the pulley 544.

The arc driving part 560 is an arc driving protrusion 560 protruding downward from the lower surface of the pulley 544.

That is, the arc driving protrusion 560 is a fan-shaped, as shown in FIG. 44, and has an arc length of 1/2 of a half circle, that is, 1/4.

The arc driven part 570 is an arc driven protrusion 570 protruding upward from the upper plate 521.

In addition, the arc driven protrusion 570 is implemented as a semicircular driven protrusion 570.

Accordingly, a discontinuous section separated by about 90 degrees is formed between the fan-shaped driving protrusion 560 and the semicircular driven protrusion 570.

The reasons for this discontinuous section are as follows.

The rotational power transmission unit 550 rotates freely with each other in the 90-degree section, which is a discontinuous section, and power transmission is performed at the same time in 90 or more.

If there is no discontinuous section, the opening and closing of the valve 92 is driven by the servo motor 541. Even if the open and closed state is checked and the servo motor 541 is immediately stopped, the servo motor 541 Due to the characteristic, since the encoder value exceeds the stop position, the load of the servo motor 541 continues to rise in order to find the encoder value, and thus servo off is performed.

To prevent such a situation, the purpose is to stabilize the load of the servomotor by turning the encoder value in the reverse direction after checking the open/closed state of the valve 92. (When the load value of the servo motor rises to the maximum value, the mechanism and valve are increased. Due to severe damage to the device, the equipment may be damaged when repeatedly used, and if it is damaged at the lower limit value than the target load value, the servomotor continues to rotate, leading to a large number of process defects or infinite stop.)

The inner ring 581 and the outer ring 583 of the bearing 580 are provided with a rotating shaft 534 and a pulley 544.

In the discontinuous section, only the pulley 544 installed on the outer ring 533 rotates in a clockwise direction, and then the arc drive part 560 contacts the arc driven part 570 and the valve shutter 510 also rotates to open and close the valve 92. .

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2-6. Vision module (600)

The vision module 600 is a module that detects the location of the connector nut 340 of the connector module 300 and the outlet port 91 of the gas cylinder 90.

The vision module 600 is installed on the second cross frame 152.

The vision module 600 includes a vision camera 610 and a lighting 630.

In addition, the vision module 600 further includes the left and right reflectors 640 and 650 described above.

The left and right reflectors 640 and 650 reflect the light emitted from the illumination from the rear to make the front and rear business cards on the head 95 of the gas cylinder 90 more distinct and take a clear picture.

2-7. Support frame lifting module (700)

The support frame lifting module 700 is installed in the cabinet 3 to lift the second column frame 140.

The support frame lifting module 700 includes a housing 710 fixed to one side wall of the cabinet 3, a lifting slider (not shown) disposed inside the housing 710 installed in the second column frame 140, and a housing A vertical male screw rod (not shown) mounted on the inside of the 710 and fastened to the lifting slider (not shown), and a motor that transmits rotational force to the vertical male screw rod (not shown) installed on the lower surface of the housing 710 ( 730).

2-8. Valve shutter emergency escape module (800)

In order to solve the irrationality of removing the valve shutter module 500 in order to close the valve 92 of the gas cylinder 90 when the power is turned off in an emergency situation, the valve shutter emergency escape module 800 is It is an object of the present invention to provide an upper unit 5 for a gas supply device of a gas cylinder in which an emergency evacuation module capable of manually closing the valve 92 is added while maintaining the connection between the gas cylinder 90 and the gas cylinder 90.

The upper unit 5 further includes a valve shutter emergency escape module 800 for raising the support frame 100 with respect to the support frame lifting module 700.

More specifically, a valve shutter emergency escape module 800 is further installed between the second column frame 140 and the lifting slider (not shown).

The valve shutter emergency escape module 800 attempts an emergency situation (electricity down) after the valve shutter 510 of the valve shutter module 500 is seated to open the valve 92 of the gas cylinder 90 as shown in FIG. As shown in 47, it is a safety device that raises the valve shutter 510 and locks the valve 92 of the gas cylinder 90 directly by the operator.

That is, the valve shutter emergency escape module 800 fixes the second column frame 140 with respect to the lifting plate 810 for the support frame and the lifting plate 810 for the support frame installed on the lifting slider (not shown). Includes a manual lever unit 830 and an emergency escape gas spring 850 for supporting the second column frame 140 to be upwardly supported with respect to the lifting plate 810 for the support frame when the manual lever unit 830 is released. do.

The second column frame 140 and the lifting plate 810 for the support frame are connected to be elevating and descending by cross roller guides 801 and 803 for escape.

The manual lever part 830 is inserted through a through hole 831 formed in the second column frame 140, a groove 833 formed in the lifting plate 830 for a support frame, and a groove 833 It consists of a manual escape lever 835 plugged in.

The emergency escape gas spring 850 automatically lifts the weight of the device when using the emergency escape module, thereby helping the support frame not to descend while a person manually operates the valve.

The operation of the valve shutter emergency escape module 800 is as follows.

When the valve shutter 510 is seated on the valve 92 of the gas cylinder 90 and is being opened and an emergency situation such as electricity down occurs, the operator manually pulls the manual escape lever 835.

Then, by the force of the emergency escape gas spring 850, the second column frame 140 is lifted (usually set to be raised by 50 mm) with respect to the lifting plate 810 for the support frame, so that the valve shutter 510 becomes a gas cylinder ( When it is out of the valve 92 of 90), the operator manually closes the valve 92.

When the emergency situation is over, the manual escape lever 835 is pulled and lowered manually, and then the manual escape lever 835 is inserted into the groove 833 and the operation is resumed.

The elevation of the valve shutter 510 in such an emergency situation is also performed in a state where the connector module 300 is continuously fastened and connected to the outlet port 91 (due to the no-load sliding structure).

3. Lower unit (7)

The lower unit 7 includes a turntable module 1000 on which the gas cylinder 90 is placed, a clamp module 3000 for rotatably clamping the gas cylinder 90, and a jacket heating module for heating the gas cylinder 90 ( 5000).

3-1. Turntable module (1000)

The turntable module 1000 uses the load cell 1100 to measure the amount of use of the gas cylinder 90 and the replacement cycle of the gas cylinder 90, and at the same time, the outlet of the gas cylinder 90 to the connector module 300 This is a configuration in which a rotation function for aligning the ports 91 is added.

The turntable module 1000 rotates the load cell 1100 placed on the floor, the turntable portion 1300 placed on the upper surface of the load cell 1100, and the turntable portion 1300 as shown in FIGS. 49 to 52. It includes a rotation transmission unit 1500.

The turntable unit 1300 includes a lower base 1310 having a through hole 1311 on which the loss cell 1100 is placed, an upper base 1320 placed on the upper surface of the load cell 1100, and the lower base 1310. An elevating guide portion 1330 for guiding the upper base 1320 up and down (z-axis), the turntable 1340, and the inner ring 1351 are installed on the turntable 1340, and the outer ring 1352 is the upper base 1320 It includes a cross roller bearing 1350 installed on.

The elevating guide part 1330 includes a guide shaft 1331 installed on the edge of the upper case 1320 in an upward (z-axis) direction, and a guide installed on the lower base 1310 to guide the guide shaft 1331 up and down. Including the ball (1333).

In addition, the linear bush 1332 is fitted in the guide hole 1333 to provide precise lifting of the guide shaft 1331.

Of course, the guide hole 1333 is preferably formed in the guide hole block 1335 installed in the lower base 1310.

The guide hole block 1335 is preferably installed at an edge close to the through hole 1311 so that the guide hole 1333 is placed on the through hole 1311 to secure a sufficient stroke of the guide shaft 1331.

The turntable 1340 includes a driven table 1341 installed on the inner ring 1351 and a cover table 1343 installed on the upper surface of the driven table 1341.

A side surface of the driven table 1341 is of a spur gear type having teeth that mesh with a timing belt to be described later.

Of course, if it is not the timing belt 1530, it can rotate in engagement with a rack or other gear.

A gas cylinder 90 or a pallet-type dedicated jig 6100 is placed on the turntable 1340 as shown in FIG. 53.

At this time, a positioning protrusion 6150 is installed on the lower surface of the pallet-type exclusive jig 6100, and a positioning groove 1370 in which the positioning protrusion 6150 is positioned is formed in the turntable 1340.

The rotation transmission unit 1500 applies rotational power to the driving pulley 1510 and the driven pulley (not shown), the timing belt 1530 hanging from the driving pulley 1510 and the driven pulley (not shown), and the driving pulley 1510. It includes a motor 1540 to transmit.

The teeth of the timing belt 1530 are formed on the outer surface, and are meshed with the teeth of the driven table 1341 such as a flat tooth to rotate the driven table 1341 forward or reverse.

Of course, the rotation transmission unit 1500 can be variously meshed and transmitted in the form of gears such as a worm and a worm gear, but in the case of the meshing between these gears, the turntable 1340 descends as the amount of gas decreases, and accurate measurement is required. If the gears are meshed, they may not come down, or even if they come down, the teeth may be damaged.

To this end, in this embodiment, even if the driven table 1341 meshed with the teeth of the timing belt 1530 with the inner and outer faces turned over is finely lowered, relative sliding with the driven table 1341 is possible with respect to the teeth of the timing belt. It can transmit rotational force without interference.

The core of the turntable module 1000 is as follows.

First, since the load cell 1100 is lying on the floor, there are no parts to which pneumatic and electrical wiring are connected over the rotating turntable 1340. This may be referred to as a stroke (stroke) that requires movement by ±180 degrees because the gas cylinder 90 is injected in an irregular direction. Therefore, when pneumatic and electrical wiring is placed on the turntable 1340, it is possible to move ±180 degrees, and at the same time, it is necessary to cope with an unexpected situation that moves more than ±180 degrees. This is because it cannot be used with.

Second, in order to prevent external force from affecting the weight of the turntable 1340 and the gas cylinder 90 mounted on the load cell 1100, the linear bush 1333 and the guide shaft 1331 are installed in all directions. While maintaining the balance, it serves as a guide for preventing separation of the upper base 1320.

Sequence of turntable module 1000

1. The self-driving forklift 6300 places the pallet-type exclusive jig 6100 on which the gas cylinder 90 is placed on the turntable 1340.

2. The gas cylinder 90 is clamped by the clamping module 3000 so that it can rotate around the z-axis.

3. Using the vision module 600, alignment is performed by rotating the turntable 1340 until the outlet port 91 of the gas cylinder 90 is aligned with the connector module 300.

3-2. Clamp module (3000)

The clamp module 3000 includes an upper and lower clamp module 3000 that clamps the upper and lower sides of the body 93 of the gas cylinder 90.

That is, the upper and lower clamp modules 3000 are arranged on the upper and lower sides with the jacket heating module 5000 as the center, as shown in FIG. 9.

Each of the clamp modules 3000 includes a pair of left and right clamp portions 3100 and an actuator 3300 for approaching/removing a clamp for approaching/removing the pair of clamp portions 3100 along the x-axis direction.

The clamp unit 3100 includes a clamp body 3110 having a trajectory such as the body 93 of the gas cylinder 90 formed on an inner surface thereof, and a roller 3130 installed on the inner surface of the clamp body 3110.

The roller 3130 is to freely allow rotation for alignment while the gas cylinder 90 is clamped.

3-3. Jacket heating module (5000)

Since compressed gas is used, the jacket heating module 5000, which is installed to remove the freezing phenomenon caused by vaporization during use, automatically wraps and releases the body of the gas cylinder, thereby realizing the automation of the facility.

Basically, since the contents of the gas cylinder 90 are liquefied gas, if it is continuously used, the heat of vaporization is taken away and the inside of the cylinder becomes cold. Therefore, the liquid in the cylinder cannot be vaporized in a sufficient amount. In this case, it is necessary to maintain the gas cylinder at a constant temperature because it has a serious effect on the process of equipment receiving gas from the cabinet 3.

The jacket heating module 5000 for this purpose includes the left and right jackets 5100 surrounding the body 93 of the gas cylinder 90, a hinge part 5200 connecting the rear side of the left and right jackets 5100, and a hinge part 5200. ), the left and right pneumatic cylinders 5300 for pulling or pushing the left and right jackets 5100, and a heater 5400 installed on the inner surface of the left and right jackets 5100.

The left and right jackets 5100 are circular when viewed in a plane (x-y plane).

In addition, the left and right jackets 5100 include a fixing jacket 5110 supported on the side wall of the cabinet 3 and a movable jacket 5130 connected to the left and right sides of the fixing jacket 5110 through a hinge part 5200. It is divided.

The fixing jacket 5110 is supported on the side wall of the cabinet 3 by a support 5120.

The pneumatic cylinder 5300 is disposed between the bracket 5310 fixed to the side wall of the cabinet 3 and the movable jacket 5130, and installed with front and rear hinge portions 5330 and 5340 at the front and rear of the pneumatic cylinder 5300 It is connected.

The rear hinge part 5330 is connected to the cylinder 5301 side, and the front hinge part 5340 is connected to the piston 5303 side.

Therefore, when the piston 5303 is pulled, the pneumatic cylinder 5300 is rotated outward by the front and rear hinge portions 5330 and 5340 when viewed in a plan view, so that the movable jacket 5130 moves the hinge portion 5200. It turns around the center (rotates around the z-axis) and opens up.

The heater 5400 may be implemented in various ways, but a planar heating element or the like is preferable.

This hinge point is a layout for preventing heat wire arrangement and connection of the heater 5400.

4. Gas cylinder autonomous vehicle (6000)

The basic configuration is a structure in which a structure such as motion is mounted on the autonomous vehicle, and it minimizes the amount of power when driving motion other than that of the autonomous vehicle (transport robot), allowing additional operations to be performed.

The autonomous driving transport mechanism 6000 of the gas cylinder includes a pallet-type exclusive jig 6100 and an autonomous driving transport forklift 6300 that carries the pallet-type exclusive jig 6100.

Pallet-type dedicated jig 6100 is a gas cylinder 90 is loaded, a pedestal 6110, a fork insertion groove 6130 into which a fork F is inserted into the lower surface of the pedestal 6110, and a positioning groove ( It includes a positioning protrusion 6150 positioned at 1370.

In addition, in the center of the upper surface of the pedestal 6110, a convex portion 6111 on which the concave lower surface 94 is placed above the gas cylinder 90 is formed, and a protruding border 6113 is formed at the edge of the pedestal 6110.

The autonomous driving transport forklift 6300 largely includes an autonomous driving vehicle 6400 and a transport forklift 6500 docked and loaded on the autonomous driving vehicle 6400.

The autonomous vehicle 6400 is a transport robot, and has a built-in controller box (CB) that provides a battery with a transport forklift 6500 mounted thereon, and controls driving by transmitting and receiving with the control unit 9.

The transport forklift 6500 includes a mounting frame 6510 mounted on the autonomous vehicle 6400, a vertical plate 6520 disposed in the z-axis direction on the front of the mounting frame 6510, and the vertical plate 6520. It includes a clamper 6530 and a lifter 6540 installed on the side, and an actuator 6570 for moving forward and backward for moving the vertical plate 6520 back and forth with respect to the mounting frame 6510 in the y-axis direction.

A control box (CB) is mounted on the mounting frame (6510).

The clamper 6530 includes a pair of left and right clamp portions 6531 and an approach/removal actuator 6533 for approaching/removing along the x-axis direction, similar to the clamp module 3000 described above.

However, there is no roller on the inner surface of the clamp portion 6531 because it is not necessary to rotate in a clamped state.

The approach/removal actuator (6533) is a rack and pinion type linear module installed in each of the clamp units (6531) of both arms, and transmits the rotational power of the motor (6534) and the motor (6534) to the clamp unit (6531). It consists of a rack and a pinion portion 6535 to allow the clamp portions 6531 of both arms to move symmetrically.

The lifter 6540 includes a lifting part 6550 and a lifting actuator 6560 for lifting the lifting part 6550 in the z-axis direction.

The lifting part 6550 includes a lifting plate 6551 and left and right forks F installed at the lower end of the lifting plate 6551.

The left and right forks F are inserted into the fork insertion groove 6130 of the pallet-type dedicated jig 6100.

The lifting actuator 6560 includes a housing 6651 installed on the front side of the vertical plate 6520, a nut-type lift (not shown) and a vertical male thread mounted on the lifting plate 6551 while mounted on the housing 6651. It includes a ball screw type mechanism 653 (not shown) and a servo motor 6567 for transmitting rotational power to a vertical male threaded rod (not shown).

The motor 6567 is disposed on the upper surface of the housing 6651.

The forward/reverse actuator 6570 moves the vertical plate 6520 forward and backward with respect to the mounting frame 6510, and is composed of a pulley and a ball screw type linear module, and reinforces deflection when moving forward with an LM guide.

That is, the forward and backward actuator 6570 is a motor 6571, a ball screw 6573 receiving the rotational power of the motor 6571, and a transfer nut 6575, as shown in Figs. 61 and 63. It includes a bar (6579) for forward and backward installed on the nut (6575).

The forward and backward bar 6552 moves the vertical plate 6520 back and forth while supported by the LM guide.

Here, a protruding dock sensor (not shown) is installed on one side of the pedestal 6110 of the pallet-type exclusive jig 6100, and a proximity sensor (not shown) for detecting a dock sensor (not shown) is provided in the gas supply device. As a result, it detects that the fork F of the autonomous driving forklift 6300 is located on the turntable 1340, stops driving, and loads the pallet-type exclusive jig 6100 to the turntable 1340.

The upper unit 5, the lower unit 7 and the autonomous driving forklift 6300 described above are driven and controlled by a sensor and communication with the control unit 9 such as Wi-Fi.

As described above, although it has been described with reference to a preferred embodiment of the present invention, those skilled in the art will variously modify or modify the present invention within the scope not departing from the spirit and scope of the present invention described in the following claims. It can be done.

1: gas supply device 3: cabinet
5,7: upper and lower unit 9: control unit
10: gabinet body 11: opening
20a, 20b: first and second door modules 30a, 30b: first and second doors
31a,31b: 1st and 2nd door frames 32a,32b: 1st and 2nd opening and closing doors
50a, 50b: 1st and 2nd auto door opening/closing part 51a, 51b: 1st and 2nd door frame drive cylinder
53a, 53b: drive cylinder for the first and second opening and closing doors
70a,70b: first and second manual door opening and closing parts 71a,71b: first and second hinge parts
72a,72b: 1st and 2nd door lock 75a,75b: 1st and 2nd door lock drive cylinder
90: gas cylinder 91: outlet port
92: valve 93: gas cylinder body
100: support frame 110,120: first, second support frame
130,140: first and second column frame 150: cross frame
151,152: first, second cross frame 200: support frame front and back drive module
210: first actuator (pneumatic cylinder) 220: second actuator (gas spring)
300: connector module 310: motor
320: hollow reducer 330: connector socket
340: connector nut 350: nut concentricity correction
360: gas pipe 370: pipe fixing block
380: C-ring for piping 390: Piping guide
400: gasket input/discharge module 410: gasket supply unit
420: gasket charging unit 430: gasket alignment unit
440: lift gasket actuator 450: finger gripper
460: gasket actuator for approach/removal 470: gasket actuator for forward and backward movement
480: rotation gasket actuator 500: valve shutter module valve shutter
510: valve shutter 540: rotation drive
550: rotational power transmission unit 560: circular drive unit
570: arc driven part 600: vision module
700: support frame lifting module 710: housing
730: motor 800: valve shutter emergency escape module
810: lifting plate for support frame 830: manual lever part
850: gas spring for emergency escape 1000: turntable module
1100: load cell 1300: turntable
1500: rotation transmission unit 3000: clamp module
3100: clamp part
3300: clamp approach/removal actuator
5000: jacket heating module 5100: left and right jackets
5200: hinge part 5300: left and right pneumatic cylinder
5400: heater 6000: autonomous vehicle
6100: exclusive jig for pallet 6110: pedestal
6130: fork insertion groove 6150: positioning protrusion
6300: autonomous driving transport forklift 6400: autonomous driving vehicle
6500: transport forklift 6510: mounting frame
6520: vertical plate 6530: clamper
6570: forward and backward actuator
G(NG)(OP): Gasket (new gasket) (old gasket)
G1: C-ring for gasket

Claims (4)

As a valve shutter module 500 for a gas supply device of a gas cylinder for opening and closing the valve 92 of the gas cylinder 90,
Including a valve shutter 510, a rotation driving unit 540, and a rotational power transmission unit 550 for transmitting the rotational power of the rotation driving unit 540 to the valve shutter 510,
The valve shutter 510 includes a cap portion 520 surrounding an outer peripheral surface of the valve 92 and a valve shutter portion 530 disposed inside the cap portion 520,
The valve shutter unit 530 includes a shaft 531 disposed at predetermined intervals in a circular shape inside the cap unit 520, and a support plate installed on the inner circumferential surface of the cylindrical plate 523 so that the shaft 531 can be lifted. 533), a spring 535 installed between the upper end of the upper plate 521 and the shaft 531, and a rotation shaft rotatably fitted together with the upper plate 521 while the lower end is installed in the center of the support plate 533 ( 537),
The rotation drive unit 540 includes a servo motor 541 and an elbow-type reducer 543 that receives the rotational power of the servo motor 541,
The rotational power transmission unit 550 includes an arc driving unit 560 installed on the lower surface of the pulley 544 of the reducer 543, an arc driven unit 570 installed on the upper plate 521, and a rotation shaft 534 A valve shutter module for a gas supply device of a gas cylinder including a bearing 580 installed between the pulleys 544.
The method according to claim 1,
The arc driving part 560 is a 1/4 arc driving protrusion 560 protruding downward from the lower surface of the pulley 544,
The arc driven part 570 is a valve shutter module for a gas supply device of a gas cylinder comprising a semicircular driven protruding part 570 protruding upward from the top plate 521.
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