KR102353833B1 - Clamping and removal method for high pressure gas cylinder in Cabinet - Google Patents

Abstract

The present invention relates to a method for fastening and removing a high-pressure gas barrel on a cabinet, which improves work efficiency of a worker. The method of the present invention comprises the steps of: mounting an alignment jig (9a) on a first high-pressure gas barrel (1); docking an automatic gas supply module (300a) to the alignment jig (9); precisely fixing the first high-pressure gas barrel (1); clicking a loading completion button; releasing a cylinder connector plug (610a); inputting a gasket; and opening a valve (3) of the first high-pressure gas barrel (1).

Description

Clamping and removal method for high pressure gas cylinder in Cabinet}

The present invention relates to a method of fastening and removing a high-pressure gas cylinder on a cabinet, in which the gas of the high-pressure gas cylinder is supplied, cut off, and replaced by a pair of automatic gas supply modules to a wire of a hoist module installed in the cabinet. After the automatic supply module is up/down and held by the alignment jig on the first high-pressure gas cylinder head, the blocked cylinder connector plug is disconnected, the end cap is separated by the cylinder connector and the end cap tool, and the gasket is placed on the cylinder connector. supply, connect to the outlet port of the first high-pressure gas cylinder, open the valve to supply gas, and when the control unit sounds a replacement alarm when the gas is exhausted, the valve of the first high-pressure gas cylinder is shut off, and the second high-pressure gas cylinder is on standby The purpose of this is to improve the work efficiency of workers due to manual work by supplying the gas and replace the third high-pressure gas cylinder at the same time, as well as prevent the industrial safety of workers, and furthermore, to be able to use it easily in a compact cabinet structure. .

In general, in a semiconductor device manufacturing process, a highly flammable or toxic gas is used according to process characteristics, and such gas is usually contained in a high-pressure gas cylinder in a high-pressure state, and is replaced according to the remaining gas amount.

That is, when the cylinder connector is fastened to the outlet port of the high-pressure gas cylinder and the piping disposed inside the cylinder connector and the outlet port are in contact with each other, the valve is opened and the gas of the high-pressure gas cylinder is supplied to the semiconductor device manufacturing process through the outlet port and the piping. will do

As a conventional gas cabinet-mounted module, what is known in Patent Document 1 (Korean Publication No. 10-2019-0014463) is disclosed.

In Patent Document 1, in the spherical type gas cylinder automatic opening and closing device having a cabinet of 800 × 590 (mm) in width × length, it is impossible to install a lift that automatically raises the gas cylinder 60 due to the narrow space, so the second alignment means (130) is designed to apply.

Since the gas cylinder automatic opening/closing device is installed on the left and right sides of the cabinet, one is supplying gas and the other is being replaced and waiting for continuous gas supply.

As shown in FIG. 44, the second aligning means 30 includes an aligner 31 fixed to the bottom surface of the main plate 11 and having two or more aligning pins 31a, and a valve ( The alignment block 32 is detachably fixed to 63 and provided with a positioning hole 32a into which the alignment pin 131a is fitted, and the alignment block 32 is connected to the valve 63 by a fastening member (not shown). It is composed of a fastening plate 33 to be fixed with a).

Therefore, when the main plate 11 descends in a state where the gas cylinder 60 is positioned inside the cabinet, the operator can visually identify the position of the alignment pin 31a and finely adjust the position of the gas cylinder 60 to align By allowing the pin 31a to be inserted into the positioning hole 32a of the alignment block 132, the position of the gas cylinder 60 is aligned.

As shown in FIG. 43, the main plate 11 uses a cylinder, a lifting block, and a pulley disposed on the left and right sides of the main plate 11. When the piston of the cylinder goes up, the main plate 11 goes down and when the piston goes down It is an ascending structure.

Since the elevating structure of the main plate 11 is installed on the outside of one side of the male plate 11, it more protrudes to the side for a certain size of the male plate 11, and in particular, the cabinet is mounted as a pair. It is difficult to fit the horizontal length (800mm) of

In addition, as shown in FIG. 43 , since the main plate 11 ascends and descends on the guide block, movement other than up and down is limited, and the position of the gas cylinder 60 needs to be finely adjusted for alignment.

In addition, there are very many parts for elevating the main plate, such as cylinders, pulleys, and guide blocks.

On the other hand, the gas cabinet-mounted module of Patent Document 2 (Korean Patent No. 10-2112765) is known in the arrangement as shown in FIG.

As shown in FIG. 45, in the gas cabinet-mounted module of Patent Document 2, the end cap part 60 and the cylinder connector part 70 are disposed on the rear side, and the gasket parts 81 and 82 are disposed on one side. have.

The gasket parts 81 and 82 are composed of a gasket supply part 81 and a gasket delivery part 80 .

The gasket supply part 80 is disposed next to the cylinder connector part 70 , and the gasket delivery part 82 is disposed in front of the gasket supply part 81 .

Since the gasket supply unit 81 is disposed on one side of the rear side, it is difficult for the operator to check the supply amount of the gasket with the naked eye (if the gasket is not filled immediately, the operation speed will be slow and it is fatal to the semiconductor process) It is undesirable in terms of maintenance, such as having to manually put your hand into the narrow space at the rear.

On the other hand, since there is no cylinder connector plug blocking the cylinder connector part in the state in which the high-pressure gas cylinder is not inserted, it is impossible to prevent contamination of the cylinder connector part pipe and the gas residue of the gas supply pipe from spreading to the outside.

On the other hand, since the end cap part 60 and the cylinder connector part 70 are fixed side by side, they not only occupy a larger space, but also have to move at the same time during rotation or forward/backward transfer, resulting in unnecessary power loss.

Since the outlet port of these prior art is a cylinder connector adapted to a hollow male screw, it is impossible to fasten with a conventional cylinder connector in the case of a solid male screw as in the present embodiment.

For reference, the cylinder connector is usually used as a term for a connector connected to a cylinder valve according to the CGA (Compressed Gas Associatipn) standard.

Korean Publication No. 10-2019-0014463 Korean Patent Registration No. 10-2112765

However, in the conventional method of fastening and replacing the high-pressure gas cylinder, when the replacement time of the high-pressure gas cylinder is detected while the new high-pressure gas cylinder is loaded in the cabinet, the used high-pressure gas cylinder is separated and removed by manual or semi-automated work, and then a new When the high-pressure gas cylinder is connected to the connector holder of the gas pipe, it is not easy to replace quickly, and depending on the skill of the operator, the accuracy of replacement and the replacement time are prolonged, resulting in a decrease in work efficiency, and in case of gas leakage due to carelessness during work. Not only can it lead to a gas explosion, but it is also a cause of industrial accidents in which workers are poisoned by leaking gas and endanger their lives.

In order to solve the above-mentioned problems, the present invention automatically supplies the known pair of gas from the first high-pressure gas cylinder to the semiconductor process through a pipe, and when all the gas of the first high-pressure gas cylinder is consumed By supplying the gas of the second high-pressure gas cylinder on standby and replacing the first pneumatic gas cylinder with the third high-pressure gas cylinder, the difficulties of work caused by the operator due to manual or conventional semi-automatic work are solved to improve the work efficiency of the worker. There is a characteristic of the task to be solved so that it can be used easily in a compact cabinet structure by preventing the occupational safety of workers.

In order to achieve the above object, the present invention is a method of fastening a high-pressure gas cylinder by moving a pair of high-pressure gas cylinders into a cabinet, and before loading the high-pressure gas cylinder into the cabinet, an alignment jig is installed in the first and second high-pressure gas cylinders. A first step of mounting; the first and second high-pressure gas cylinders equipped with the alignment jig are loaded into the cabinet, and the automatic gas supply module hanging from the hoist module is lowered to the aligner installed in the header of the first and second high-pressure gas cylinders. A second step of docking to the in-jig; A third step of precisely fixing the first and second high-pressure gas cylinders by operating a pneumatic chuck mounted on the automatic gas supply module; Loading into the control unit after closing the cabinet door A fourth step of clicking the completion button; A fifth step of releasing the cylinder connector plug to prevent leakage of residual gas and input of foreign substances from the cylinder connector of the cylinder connector member; The cylinder connector of the cylinder connector member is a first high pressure gas cylinder A sixth step of moving in the direction of the fastening position of the outlet port; the end cap member has a separated structure in parallel with the cylinder connector member, the end cap tool moves along the cam follower and is integrally coupled on the cylinder connector member, When the second actuator provided on the cylinder connector member is advanced, the end cap tool is inserted into the end cap, and the end cap tool is rotated and reversed in a releasing direction to return to the holding state of the end cap. an eighth step of moving the cylinder connector to the cylinder connector plug position and receiving a gasket from a pair of gasket grippers; the cylinder connector with the gasket inserted moves toward the high-pressure gas cylinder outlet port and fastening on the high-pressure gas cylinder outlet port Step;, when the cylinder connector is fastened and fixed to the outlet port, the valve shutter of the valve shutter member is rotated to open the valve of the first high-pressure gas cylinder, and the gas of the high-pressure gas cylinder is discharged by the control unit of the cylinder connector fastened to the outlet port The gas is exhausted by the fastening method of the high-pressure gas cylinder, characterized in that supplying it to the semiconductor process through a pipe, and waiting for the gas supply for the second high-pressure gas cylinder; cuts off the valve of the first high-pressure gas cylinder at the time of operation, supplies the gas of the second high-pressure gas cylinder on standby, and at the same time makes it possible to replace the third high-pressure gas cylinder, thereby improving the work efficiency of the operator due to manual operation, as well as the industrial safety of the worker The solution is to prevent it from happening, and to be able to use it easily in a compact cabinet structure.

In addition, the present invention relates to a method of removing a high-pressure gas cylinder by moving a pair of high-pressure gas cylinders into a cabinet. A first step of switching to stop the supply of gas from the first high-pressure gas cylinder and supplying gas from the second high-pressure gas cylinder to the gas supply line; Reversely rotating the valve of the first high-pressure gas cylinder and the valve shutter of the valve shutter member A second step of blocking the valve of the first high-pressure gas cylinder and then generating a replacement alarm; When the valve of the first high-pressure gas cylinder is blocked, the second actuator is unloaded when the outlet port is disconnected by rotating the cylinder connector on the cylinder connector member A third step of changing from the reverse state to a stand-by position; A fourth step of moving the cylinder connector of the cylinder connector member to the cylinder connector plug position and removing the gasket by a pair of gasket grippers; The end cap tool moves along the cam follower and is integrally coupled on the cylinder connector member, advances the second actuator provided on the cylinder connector member, and the cylinder connector rotates to remove the end cap mounted on the end cap tool of the high-pressure gas cylinder. A fifth step of reversing the end cap tool of the end cap tool part to return to the original position along a cam follower after blocking the outlet port; to prevent leakage of residual gas present on the cylinder connector of the cylinder connector member and foreign substances a sixth step of fastening the cylinder connector plug for Eighth step of lifting the automatic gas supply module hanging from the hoist module docked from the alignment jig to separate it from the first high-pressure gas cylinder, and separating the high-pressure gas cylinder from the cabinet;, after removing the first high-pressure gas cylinder, the third high-pressure gas cylinder After combining the aligning jig to the cabinet, the automatic gas supply module of the cabinet is lowered and combined with the aligning jig installed in the header of the third high-pressure gas cylinder, and then the door of the cabinet. a ninth step of closing the cylinder connector member; releasing the cylinder connector plug fastened to prevent leakage of residual gas present on the cylinder connector of the cylinder connector member and introduction of foreign substances, and the end cap tool is used for driving and After the end cap is separated by deceleration, the end cap tool returns to its original position along the cam follower, and the gasket input/discharge member chucks the gasket in the gasket supply member and inserts the gasket into the cylinder connector member, and the cylinder connector member with the gasket is inserted. A tenth step of connecting to the outlet port of the third high-pressure gas cylinder; and an eleventh step of waiting by opening the valve of the third high-pressure gas cylinder by the valve shutter of the valve shutter member; .

According to the present invention, there are the following effects.

The present invention relates to a method for fastening and removing a high-pressure gas cylinder by moving a pair of high-pressure gas cylinders into a cabinet. To replace, the automatic supply module is up/down and held in the alignment jig on the high-pressure gas cylinder head, then the blocked cylinder connector plug is disconnected, the end cap is separated by the cylinder connector and the end cap tool, and the gasket is placed on the cylinder connector. It is supplied and connected to the outlet port of the high-pressure gas cylinder to supply gas, and when the gas is exhausted, the valve of the high-pressure gas cylinder is shut off, and the gas of the second high-pressure gas cylinder in standby is supplied and the first high-pressure gas cylinder can be replaced at the same time. Through this method, the work efficiency of the worker due to manual work is improved, of course, the industrial safety of the worker is prevented, and furthermore, there is an effect of being able to use it easily in a compact cabinet structure.

In addition, the present invention first mounts an alignment jig to the high-pressure gas cylinder 1 before loading the high-pressure gas cylinder into the cabinet, and inserts the high-pressure gas cylinder equipped with the alignment jig into the cabinet, and the gas automatic hanging from the hoist module By lowering the supply module, it is very easy for the operator to combine the first and second high-pressure gas cylinders using the flexible wire.

In addition, the present invention sets the reducer and the end cap tool as separate units so that the end cap tool is arranged in parallel with the cylinder connector and the end cap tool is transferred forward, backward, left and right. Because there is no power transmission part of the end cap tool, it is very easy to maintain other parts by securing space.

In addition, the present invention contributes to the efficiency of power by performing the end cap separation/fastening or connecting with the outlet port with one power.

In addition, the present invention is very excellent in terms of preservation because only the end cap tool needs to be replaced in the end cap tool part, even if there are many shapes of end caps that are variously applied to the outlet port.

In addition, according to the present invention, when the end cap tool is placed in parallel with the cylinder connector, the cam follower is further included to be disposed at the rear rather than in front of the cylinder connector. there is no

In addition, according to the present invention, the cylinder connector plug member and the gasket input/discharge member are installed at the same time so that they overlap each other on one side plate, so that the cylinder connector, the cylinder connector plug, and the gasket gripper can operate on the same line and realize compactness.

1 is an external view showing an automatic gas supply device of a high-pressure gas cylinder according to the present invention.
Figure 2 is a state diagram in which the alignment jig is gripped in the high-pressure gas cylinder.
Figure 3 is a state diagram in which the automatic gas supply module is mounted on the high-pressure gas cylinder.
Figure 4 is a step diagram showing the holding process of the alignment jig in the high-pressure gas cylinder.
5 is a bottom perspective view in which the automatic gas supply module of FIG. 1 is suspended from the hoist module;
Figure 6 is a bottom view showing the hoist module of Figure 2;
7 is a layout view of an end cap member and a cylinder connector member of the automatic gas supply module;
8 is a perspective view of an end cap member of the automatic gas supply module;
9 is a perspective view in which the end cap member of the automatic gas supply module is advanced.
10 is a perspective view in which an end cap member is coupled to a cylinder connector member;
11 is a front view in which a cylinder connector member and an end cap member are arranged;
12 is a perspective view showing an end cap member coupled to a cylinder connector member;
13 is a perspective view showing a state in which the end cap member is loaded into the end cap;
14 is a perspective view showing a state in which the end cap member is separated from the end cap;
Fig. 15 is a perspective view showing a state in which the end cap member clamping the end cap is returned to its original position;
16 is a view showing the cylinder connector in a state in which the cylinder connector plug is blocked.
17 is a view showing the cylinder connector in a state in which the cylinder connector plug is released.
18 is a perspective view of a gasket input/discharge member and a gasket supply member;
19 is a state diagram in which the gasket finger gripper moves forward and chucks the gasket;
20 is a state diagram in which the gasket finger gripper is reversed and rotated 180 degrees;
Fig. 21 is a state diagram in which the gasket finger gripper advances to insert and unchuck the cylinder connector;
23 is a state diagram in which the cylinder connector is connected to the outlet port;
24 is a state diagram in which the cylinder connector is separated from the outlet port;
25 is a rear view of the valve shutter member;
26 is a view of the valve shutter member and the alignment jig just before fastening;
Fig. 27 is a flow chart showing the steps of fastening the high-pressure gas cylinder on the cabinet.
28 is a flow chart showing the step of removing the high pressure gas cylinder on the cabinet.
29 is a step diagram showing the holding process of the alignment jig in the high-pressure gas cylinder.
30 is a perspective view showing a conventional gas automatic supply module.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is an external view showing an automatic gas supply device for a high-pressure gas cylinder according to the present invention, FIG. 2 is a state diagram in which an alignment jig is gripped in a high-pressure gas cylinder, and FIG. 3 is a state diagram in which the automatic gas supply module is mounted on the high-pressure gas cylinder 4 is a step diagram showing the holding process of the alignment jig in the high-pressure gas cylinder, FIG. 5 is a bottom perspective view of the automatic gas supply module of FIG. 1 hanging from the hoist module, and FIG. 7 is a layout view of the end cap member and the cylinder connector member of the automatic gas supply module, FIG. 8 is a perspective view of the end cap member of the automatic gas supply module, and FIG. 9 is an advanced perspective view of the end cap member of the automatic gas supply module 10 is a perspective view in which the end cap member is coupled to the cylinder connector member, FIG. 11 is a front view in which the cylinder connector member and the end cap member are arranged, and FIG. 12 is an end cap member coupled to the cylinder connector member. 13 is a perspective view showing a state in which the end cap member is loaded into the end cap, FIG. 14 is a perspective view showing a state in which the end cap member is separated from the end cap, and FIG. 15 is the end cap clamped. It is a perspective view showing a state in which the end cap member has returned to its original position, FIG. 16 is a state diagram in which the cylinder connector plug is blocked, and FIG. 17 is a state diagram in which the cylinder connector and the cylinder connector plug are released. It is a perspective view of the gasket input/discharge member and the gasket supply member, FIG. 19 is a state diagram of the gasket finger gripper moving forward and chucking the gasket, FIG. is a state diagram in which the cylinder connector is put in and unchucked forward, FIG. 23 is a state diagram in which the cylinder connector is connected to the outlet port, FIG. 24 is a state diagram in which the cylinder connector is separated from the outlet port, and FIG. 25 is a rear view of the valve shutter member , Figure 26 is a state diagram immediately before the fastening of the valve shutter member and the alignment jig, Figure 27 is a flow chart showing the high-pressure gas cylinder fastening step on the cabinet, Figure 28 is a flowchart showing the high-pressure gas cylinder removal step on the cabinet, 29 is It is a step diagram showing a holding process of an alignment jig in a high-pressure gas cylinder, and FIG. 30 is a perspective view showing a conventional automatic gas supply module.

Prior to this, the terms or words used in the present specification and claims should not be construed in a conventional and dictionary meaning, and the inventor may properly define the concept of a term to describe his invention in the best way. Based on the principle that there is, it should be interpreted as meaning and concept consistent with the technical idea of the present invention. Accordingly, the embodiments described in this specification and the configurations shown in the drawings are only a preferred embodiment of the present invention, and do not represent all of the technical spirit of the present invention, so various equivalents that can be substituted for them at the time of the present application It should be understood that there may be water and variations.

First, the cabinet specification in the present invention defines the horizontal*vertical*height directions as the x-axis (left and right), y-axis (front and back), and z-axis (up and down) directions, and the advancing of the piston of the cylinder means approaching the working position. that the piston of the cylinder retracts means returning (retracting) to the initial position.

A specific technical configuration in the present invention is specified as follows.

First, the present invention relates to a method for fastening a high-pressure gas cylinder by moving a pair of high-pressure gas cylinders (1) and (2) into the cabinet 100. First step of mounting the alignment jig (9a) to the high-pressure gas cylinder (1) before; the high-pressure gas cylinder (1) (2) equipped with the alignment jig (9) is loaded into the cabinet 100, and the hoist module A second step of lowering the automatic gas supply module 300a suspended from 200a and docking it to the alignment jig 9 installed on the header of the first and second high-pressure gas cylinders 1 and 1; A third step of precisely fixing the high-pressure gas cylinders 1 and 2 by operating the pneumatic chuck 920a mounted on the module 300a; After closing the cabinet 100 door, click the loading complete button on the control unit a fourth step; a fifth step of releasing the cylinder connector plug 610a to prevent leakage of residual gas and foreign substances from the cylinder connector 510a of the cylinder connector member 500a; and the cylinder connector member 500a A sixth step of moving the cylinder connector 510a of the high-pressure gas cylinder 1 in the direction of the fastening position of the outlet port 5; the end cap tool member 400a has a separation structure in parallel with the cylinder connector member 500a However, the end cap tool member 400a moves along the cam follower 2490a, is integrally coupled to the cylinder connector member 500a, and a second actuator 550a provided on the cylinder connector member 500a. A seventh step of returning to the holding state of the end cap 8 by rotating and backward in the direction in which the end cap tool 410a is released and the end cap tool 410a is inserted into the end cap 8 when moving forward: , the cylinder connector (510a) moves to the position of the cylinder connector plug (610a) and receives the gasket from a pair of gasket grippers (710a) in an eighth step; A ninth step of moving in the port (5) direction and fastening on the high-pressure gas cylinder outlet port (5); in the high-pressure gas cylinder outlet port (5) When the cylinder connector 510a is fastened and fixed, the valve shutter 910a of the valve shutter member 900a is rotated to open the valve 3 of the first high-pressure gas cylinder 1, and the high-pressure gas cylinder 1 by the controller ) is supplied to the semiconductor process through the pipe of the cylinder connector 510a coupled to the outlet port 5, and the second high-pressure gas cylinder 2 waits for the gas supply. characterized by being.

In addition, the present invention in the first step of mounting the alignment jig (9a) to the high-pressure gas cylinder (1) before charging the high-pressure gas cylinder (1) (2) in the cabinet 100 of the method of fastening the high-pressure gas cylinder in the first step The step of inserting the alignment jig 9a for aligning the gas cylinders 1 and 2 is a step of matching the height and the side surfaces of the high-pressure gas cylinders 1 and 2 to closely contact the reference block 94a, the slider ( Combining the right gripping block 91a and the left gripping block 92 by pushing 95a), fixing the combined right gripping block 91a and the left gripping block 92 by a slide lock 96a , characterized in that the step of holding and fixing the side so as not to move by turning the locking valve (98a) located below the slide lock (96a).

In addition, according to the present invention, the high-pressure gas cylinder (1) (2) equipped with the alignment jig (9) of the method of fastening the high-pressure gas cylinder is charged in the cabinet 100, and the gas is automatically supplied suspended from the hoist module (200a). In the second step of docking the module 300a to the alignment jig 9 installed on the header of the first and second high-pressure gas cylinders 1 and 1 by lowering the module 300a, the hoist module 200a has an upper portion of the cabinet 100. A step of providing a hoist in the form of a four-line wire, each of the four wires can be adjusted in length to enable horizontal adjustment, and a step of enabling free movement of forward/backward/left/right/rotation by means of a wire , The hoist is characterized in that it is a step in which an operation is made to enable automatic or manual elevating and maintaining in one pneumatic cylinder.

In the present invention, in the second step of the method for fastening the high-pressure gas cylinder, the pneumatic chuck 920a mounted on the automatic gas supply module 300a is a pneumatic pin formed on the upper surface coupling member 93a of the aligning jig 9a. It is mounted by (931a) and characterized in that it is a step of precisely fixing the high-pressure gas cylinder (1) (2) by the align pneumatic chuck button (940a).

In addition, in the present invention, the pneumatic chuck 920a mounted on the gas automatic supply module 300a, which is the third step of the method for fastening the high-pressure gas cylinder, is a pneumatic pin formed on the upper surface coupling member 93a of the aligning jig 9a. The pneumatic chuck 920a mounted on the automatic gas supply module 300a in the step of precisely fixing the high-pressure gas cylinder 1 and 2 by the align pneumatic chuck button 940a and mounted by the 931a is It characterized in that the step of forming a guide pin (932a) on the upper surface coupling member (93a) to stably fix the pneumatic pin (931a) formed on the upper surface coupling member (93a) of the alignment jig (9a).

In addition, in the fifth step of releasing the cylinder connector plug (610a) to prevent leakage of residual gas and foreign matter in the cylinder connector (510a) of the cylinder connector member (500a) of the method of fastening the high-pressure gas cylinder, the cylinder When the connector plug 610a rotates in the direction in which the cylinder connector 510a is released, it is pushed back in the direction to be released in the no-load state of the fourth actuator 630a. and the fourth actuator 630a moves the cylinder connector plug 610a backward to confirm the release by the detection sensor.

In addition, the present invention is characterized in that the holding of the end cap (8) in the seventh step of the method of fastening the high-pressure gas cylinder is a step performed by the ball plunger of the end cap tool (410a).

In the present invention, in the eighth step of the method for fastening the high-pressure gas cylinder, a pair of gasket grippers 710a advances the sixth actuator 730a to access the gasket supplied to the gasket chucking unit, and the fifth actuator 720a ) by approaching each other and chucking both sides of the gasket.

In the present invention, in the eighth step of the method of fastening the high-pressure gas cylinder, the pair of gasket grippers 710a are chucked by reversing the sixth actuator 730a and rotating 180° by the seventh actuator 740a. to the cylinder connector 510a side, the gasket is put into the cylinder connector 510a as the 6th actuator 730a advances, and after unchucking with the 5th actuator 720a retraction, the 6th actuator 730a ), the input is completed, and when the input of the gasket is completed, it is characterized in that it is a step of returning to the position by the gasket input/discharge member (700a).

In addition, in the ninth step of the method of fastening the high-pressure gas cylinder, the cylinder connector 510a into which the gasket G is inserted moves the cylinder connector member 500a to the left by the third actuator 550a. When the center of the cylinder connector (510a) is aligned with the center of the outlet port (5) and stops, and then the cylinder connector member (500a) is advanced with the second actuator (570a), the cylinder connector (510a) is connected to the outlet port (5). The second actuator 570a is changed to a no-load state when the cylinder connector 510a is rotated in the fastening direction in the fastening direction, and the second actuator 570a is changed to a no-load state and is stopped when the connection is completed by the set torque. Characterized in that.

On the other hand, the present invention is a method of removing the high-pressure gas cylinder by moving a pair of high-pressure gas cylinders (1) (2) into the cabinet 100, while supplying gas from the first high-pressure gas cylinder (1) by the control unit When the replacement time of the first high-pressure gas cylinder 1 is detected, the flow path is switched to stop the gas supply from the first high-pressure gas cylinder 1, and the second high-pressure gas cylinder 1 supplies gas to the gas supply line. Step and; Reversely rotating the valve 3 of the first high-pressure gas cylinder 1 by rotating the valve shutter 910a of the valve shutter member 900a to block the valve 3 of the first high-pressure gas cylinder 1 and then replace Second step of generating an alarm; When the valve 3 of the first high-pressure gas cylinder 1 is blocked, the cylinder connector 510a on the cylinder connector member 500a is rotated to rotate the outlet port 5 when the outlet port 5 is disconnected. 2, a third step in which the actuator 570a is changed from the no-load state to the reverse to the standby position; the cylinder connector 510a of the cylinder connector member 500a moves to the cylinder connector plug 610a position and moves to the position of a pair of gaskets A fourth step of removing the gasket by the gripper 710a; the end cap tool 410a on the end cap tool member 400a moves along the cam follower 2490a and is integrally coupled on the cylinder connector member 500a, When the second actuator 550a provided on the cylinder connector member 500a is advanced, the end cap mounted on the end cap tool 410a is fastened to the outlet port of the high-pressure gas cylinder 1 to block the gas, and then the end A fifth step of reversing the end cap tool 410a of the cap tool member 400a and returning to the original position along the cam follower 2490a; A sixth step of fastening the cylinder connector plug 610a to prevent leakage and foreign matter input; by opening the door 110 of the cabinet 100 and operating the pneumatic chuck mounted on the automatic gas supply module 300a A seventh step of releasing the high-pressure gas cylinder (1); docked from the alignment jig (9) mounted on the high-pressure gas cylinder (1) An eighth step of lifting the automatic gas supply module 300a suspended from the hoist module 200a to separate it from the first high-pressure gas cylinder 1, and separating the high-pressure gas cylinder 1 from the cabinet 100;, first After removing the high-pressure gas cylinder (1), the alignment jig (9a) is coupled to the third high-pressure gas cylinder (1) and then put into the cabinet (100) to lower the automatic gas supply module (300a) of the cabinet (100) 3 A ninth step of closing the door 110 of the cabinet 100 after coupling to the alignment jig 9a installed on the header of the high-pressure gas cylinder 1; and the cylinder connector 510a of the cylinder connector member 500a Disassemble the cylinder connector plug 610a that is fastened to prevent leakage of residual gas present in the phase and input of foreign substances, and the end cap tool member 400a is an end cap by driving and decelerating the cylinder connector member 500a. After separating (8), the end cap tool member 400a returns to its original position along the cam follower 2490a, and the gasket input/discharge member 700a chucks the gasket in the gasket supply member 800a, and the cylinder connector member 500a ) and connecting the cylinder connector member 500a loaded with the gasket to the outlet port 5 of the third high-pressure gas cylinder 1; a valve shutter of the valve shutter member 900a ( The eleventh step of waiting by opening the valve 3 of the third high-pressure gas cylinder 3 by 910); is characterized in that it is performed sequentially.

In addition, in the present invention, the cylinder connector 510a separated from the outlet port 5 in the third step in the method for removing the high-pressure gas cylinder moves to the right, so that the cylinder connector plug 610a and a pair of gasket grippers 710a) It is characterized in that it is a step of returning to the position where

In addition, in the present invention, in the fourth step of the method for removing a high-pressure gas cylinder, a pair of gasket grippers 610a come to a position facing the cylinder connector 510a, chuck the previously used gasket and move backward, and it is discharged, 180 When the pair of gasket grippers 610a are unchucked by rotating to the ° position, collection is completed when the previously used gasket falls into the gasket container 850a.

In addition, in the present invention, when the discharging of the previously used gasket in the fifth step in the method for removing the high-pressure gas cylinder is completed, the end cap tool member 400a is advanced and rotated to transfer the held end cap 8 to the outlet port 5. It is characterized in that the fastening of the end cap (8) is completed when moving backward after completing the fastening.

Hereinafter, the operation relationship of the specific configuration of the present invention will be described.

First, before describing the method of fastening and releasing the high-pressure gas cylinder of the high-pressure gas cylinder of the present invention, a technical configuration operated in the method of fastening and releasing the high-pressure gas cylinder of the high-pressure gas cylinder of the present invention will be briefly described.

As a technical configuration operating in the present invention, as shown in FIG. 1 , there is a cabinet 100 having a box-shaped structure with a door on the front side, and a load cell (not shown) is installed at the bottom of the cabinet 100, and the load cell A high-pressure gas cylinder 1 is placed on (not shown).

2 to 4 show an alignment jig 9a and a step of mounting the alignment jig 9a, wherein the alignment jig 9a is fastened to the high-pressure gas cylinder valves 1 and 2, As a means for coupling with the valve shutter 910a on the valve shutter member 900a, it is coupled with a right gripping block 91a, a left gripping block 92a, and an upper surface coupling member 93a so as to be coupled with the valve, and the upper surface A pneumatic chuck pin 931a and an align guide pin 932a are formed in the coupling member 93a to engage and operate the valve shutter 910a, and the right gripping block 91a and the left gripping block ( 92a) is connected by a slide 95a, and a reference block 94a and a gas outlet alignment block 97a for supplying gas to the line are formed so that the height and side of the high-pressure gas cylinder can be closely aligned. , is composed of a locking valve (98a) that is fixed by a slide slide lock (96a) when the height and side of the gas cylinder are in close contact.

In addition, in FIGS. 5 and 6, in the configuration of the hoist module 200a, the hoist module 200a has a ceiling 110a on the upper portion, and a frame 110b (110c) on which the automatic gas supply module 300a on the left and right is suspended, respectively. installed. In addition, the frames 110b and 110c are made of a pair, and a pair of hoist modules 200a installed on the left and right are installed to hang and support the left and right of one automatic gas supply module 300a. The pair of hoist modules 200a is provided with a four-row wire hoist on the upper portion of the cabinet 100, each wire is horizontally adjustable, and forward/backward/left/right/rotation is possible by wire characteristics. It is provided so as to be able to be raised and lowered by a pneumatic cylinder. Each of the pair of hoist modules 200a includes a single pneumatic cylinder 111a, one end of which is fixed to the pneumatic cylinder 111a, and the other end of which is fixed to the left side of the automatic gas supply module 300a. ) and the ceiling 110a includes a horizontal pulley 230a and a vertical pulley 240a on which the wire 220a is hung in the x-direction. The pneumatic cylinder 111a includes a guide rail guide part 115a for guiding in the vertical longitudinal direction of the pneumatic cylinder 111a disposed and installed in the y-direction vertical and longitudinal direction. An adjustment part 117a that can be adjusted according to the length of the 4-row wire is attached to the end of the piston 115a operating in the pneumatic cylinder 111a. Since the automatic gas supply module 300a is suspended through the wire 220a connected to the hoist module 200a, it can move in any direction, so it is installed in the head of the high-pressure gas cylinder 1 placed in the cabinet 100. It is very easy to lower the automatic gas supply module 300a to the in jig 9 and couple it.

In addition, the automatic gas supply module 300a is shown in FIGS. 7 to 15 , wherein the automatic gas supply module 300a is a cylinder connector member 500a in which the cylinder connector 510a is fastened/disengaged to the outlet port 5 . ), a cylinder connector plug member (600a) to which the cylinder connector plug (610a) is fastened/released to the cylinder connector (510a) of the cylinder connector member (500a), and a gasket (G) is put in/out of the cylinder connector (510a) The discharge is a gasket input/discharge member 700a, a gasket supply member 800a for supplying a gasket (G) to the gasket input/discharge member 700a, and a gasket storage member 849a for accommodating the used gasket (G). ) and a valve shutter member (900a) for opening/closing the valve (3) of the high-pressure gas cylinder (1).

In addition, it is preferable that an end cap tool part 400a for separating/fastening the end cap 8 of the outlet port 5 of the high-pressure gas cylinder 1 is further installed in the gas automatic supply module 300a.

The automatic gas supply module 300a of the present invention rotates 90° counterclockwise when viewed from the front so that the end cap tool member 400a/cylinder connector member 500a and the gasket supply member 800a are disposed on the left and right, The cylinder connector plug member (600a) and the gasket input/discharge member (700a) are arranged on the rear surface, and the cylinder connector member (500a) and the end cap to member (400a) are operated in combination with the reduction gear (533a), but the reduction gear (533a) and the end cap tool member 400a are configured as individual units and are operated.

Further, the cylinder connector member 500a is supported on the upper surface side of the frame 310a by the support plate 501a. The cylinder connector member 500a includes a cylinder connector 510a connected to the outlet port 5, a first actuator 530a for transmitting rotational power to the cylinder connector 510a, and a cylinder connector 510a through the outlet port ( 5) and the second actuator 570a and the cylinder connector 510a that are linearly transferred back and forth (y) between the outlet port 5 and the cylinder connector plug 610a to be arranged in line (series) or side by side (parallel) with 5) It includes a third actuator (550a) that linearly transports left and right (x) to approach/retract with respect to the outlet port (5). Substantially, the forward and backward (y) and left and right (x) movements of the cylinder connector member 500a are performed by the first actuator 530a including the cylinder connector 510a. In addition, the cylinder connector 510a disposed side by side with the outlet port 5 is a position facing the cylinder connector plug member 600a/gasket input and discharge member 700a.

In addition, as shown in Figs. 7 to 15, the end cap tool member 400a includes an end cap tool 410a disposed in parallel with the cylinder connector 510a, and a rotational power of the cylinder connector 510a to the end cap tool ( An actuator 1450a for the end cap tool that transfers the rotational power transmission unit 430a to 410a), the end cap tool 410a forward and backward so as to be arranged in parallel/series with the cylinder connector 510a, and the cylinder connector 510a and a return actuator 470a for returning the end cap tool 410a advanced together. The end cap tool 410a has a hollow shape, and includes an end cap tool 1410a fitted to the end cap 8 and a cylinder connector tool 2410a that receives rotational power of the cylinder connector 510a. The inner peripheral surface of the tool 1410a for the end cap has a configuration in which protrusions protruding inward are provided at predetermined intervals.

The actuator 450a for the end cap tool includes an air cylinder part 1450a for the end cap tool installed on a support plate 350a installed on the frame 310a, and an air cylinder part 1450a for the end cap tool while supporting the end cap tool 410a. ) and a first end cap tool LM guide 3450a installed between the upper surface of the support plate 350a and the lower surface of the end cap tool bracket 2450a. The LM guide 3450a for the first end cap tool is formed by combining the first guide rail 3451a installed on the support plate 350a and the first guide rail groove block 3453a installed on the bracket 2450a for the end cap tool. . In addition, the air cylinder unit 1450a for the end cap tool includes an air cylinder 1451a for the end cap tool installed on the upper surface of the support plate 350a and a piston 1453a installed to the bracket 2450a for the end cap tool. In addition, the support bracket 2450a for the end cap tool has an L-shape as a whole, and is disposed in front of the plate-shaped end cap tool block 2451a in which the return actuator 470a is installed, and the end cap tool block 2451a. It includes a bracket (2453a) for the L-shaped end cap tool to be installed.

According to this configuration, since the end cap tool 410a is always positioned in front of the cylinder connector 510a, there is a risk of interference when the gas cylinder is inserted or the cylinder connector 510a is repaired.

For that reason, when the end cap tool 410a is parallel to the cylinder connector 510a, the cam follower part 490a is further included so as not to protrude forward than the cylinder connector 510a.

In addition, the cylinder connector plug member (600a) in FIGS. 16 and 17, even before the high-pressure gas cylinder 1 is placed in the cabinet 100, the contamination of the pipe 511 of the cylinder connector member 500a and the residual gas in the gas supply pipe It is a functional member for preventing water from spreading to the outside, and even after the automatic gas supply module 300a is coupled to the alignment jig 9a, the cylinder connector plug 610a is There is a feature of opening and closing the cylinder connector (510a). The cylinder connector plug member 600a includes a cylinder connector plug 610a fastened to/separated from the cylinder connector 510a, and a fourth actuator for moving the cylinder connector plug 610a back and forth in the y direction with respect to the cylinder connector 510a. (630a). The cylinder connector plug 610a has a male screw type cylindrical shape and is fastened/disconnected by rotation of the cylinder connector 510a. In addition, the center of the cylinder connector plug 610a is oriented inside the right plate 313 to be arranged in a direction coincident with the y-axis rotation center of the cylinder connector 510a.

In addition, as shown in FIGS. 16 to 20 , the gasket input/discharge member 700a inserts the gasket G before the cylinder connector 510a is fastened to the outlet port 5, and the cylinder connector 510a ) is separated from the outlet port (5), and performs the function of taking out the injected gasket (G). The gasket input/discharge member 700a is disposed on the inside of the right side plate like the cylinder connector plug member 600a.

The gasket input/discharge member 700a is a pair of gasket grippers 710a for chucking both sides of the supplied new gasket G, and a pair of gasket grippers 710a to approach/retract each other along the x-axis direction. The fifth actuator 720, the sixth actuator 730a for moving the pair of gasket grippers 710a forward and backward along the y-axis direction, and the pair of gasket grippers 710a are connected to the cylinder connector 510a about the x-axis. ) includes a seventh actuator (740a) for rotating 180 degrees toward the side.

In addition, as shown in FIG. 16, the gasket supply member 800a is a gasket supply unit 810a and a gasket charging unit 820a for charging and chucking the gasket G supplied from the gasket supply unit 810a. and an eighth actuator 840a for lifting (up) the gasket G of the gasket chucking part and the gasket charging part 820a by the gasket chucking part.

In addition, as shown in FIG. 23, the valve shutter member 900a automatically opens and closes the valve 3 of the high-pressure gas cylinder 1 without an operator to prevent an inhalation accident due to leakage of harmful gas to the human body in advance. In a configuration, the valve shutter member 900a is installed perpendicularly to the inner frame 317a installed inside the frame 310a rather than the center of the frame 310a. The valve shutter member 900a includes a valve shutter 910a and a ninth actuator (not shown) for rotating the valve shutter 910a. A ninth actuator (not shown) is also implemented with a reducer coupled to the valve shutter 910a and an air motor that transmits rotational power to the reducer, and the valve shutter 910a is formed on the outer peripheral surface of the valve 3 of the high-pressure gas cylinder 1 It is a configuration that wraps and opens and closes.

As described above, in the present invention, the configuration of the object as a target in the method of the object has been described. Based on this, the operational relationship of the method of fastening and releasing the high-pressure gas cylinder of the high-pressure gas cylinder of the present invention will be described.

A method of moving a pair of high-pressure gas cylinders (1) and (2) into the cabinet 100 to fasten the high-pressure gas cylinder is as follows.

Before charging the high-pressure gas cylinders 1 and 2 into the cabinet 100, the alignment jig 9a is mounted on the high-pressure gas cylinder 1 (first step).

Looking at the more specific operation steps in step 1, the step of inserting the alignment jig 9a to align the high-pressure gas cylinders 1 and 2 is the height and side of the high-pressure gas cylinders 1 and 2 Adhering to the reference block 94a to fit, pushing the slider 95a to combine the right gripping block 91a and the left gripping block 92, the combined right gripping block 91a and the left gripping block 92 ) is fixed by the slide lock (96a), the slide lock (96a) has a time series step of gripping and fixing the side so as not to move by turning the locking valve (98a) located below the lock.

The first and second high pressure gas cylinders 1 and 2 equipped with the alignment jig 9 are loaded into the cabinet 100 and the gas automatic supply module 300a suspended from the hoist module 200a is lowered. It docks to the alignment jig 9a installed on the header of the gas cylinder (1) (1) (second step).

Looking at the specific operation steps made in the second step, the hoist module 200a is provided with a hoist in the form of a four-line wire on the upper part of the cabinet 100, and the four wires can be adjusted in length so that they can be adjusted horizontally. A step of enabling the hoist to move freely forward/backward/left/right/rotation by means of a wire, and the hoist is operated in one pneumatic cylinder automatically or manually to be able to move up and down. have steps

By operating a pneumatic chuck mounted on the automatic gas supply module 300a, the high-pressure gas cylinders 1 and 2 are precisely fixed (third step). In the third step, the pneumatic chuck 920a mounted on the automatic gas supply module 300a is mounted by the pneumatic pin 931a formed on the upper surface coupling member 93a of the aligning jig 9a, and the align pneumatic chuck button It has a step of precisely fixing the high-pressure gas cylinder (1) (2) by (940a).

After closing the door of the cabinet 100, a loading completion button is clicked on the control unit (4th step).

Release the cylinder connector plug 610a, which prevents leakage of residual gas and input of foreign substances from the cylinder connector 510a of the cylinder connector member 500a (fifth step). In the fifth step, when the cylinder connector plug 610a rotates in the direction in which the cylinder connector 510a is released, it is pushed back in the direction to be released in the no-load state of the fourth actuator 630a. The rotation of the 510a is stopped and the fourth actuator 630a moves the cylinder connector plug 610a backward to confirm the release by the detection sensor.

The cylinder connector 510a of the cylinder connector member 500a moves in the direction of the fastening position of the outlet port 5 of the high-pressure gas cylinder 1 (sixth step).

The end cap tool member 400a has a separate structure in parallel with the cylinder connector member 500a, and the end cap tool member 400a moves along the cam follower 2490a and is integrated on the cylinder connector member 500a. When the second actuator 550a coupled to the cylinder connector member 500a is advanced, the end cap tool 410a is inserted into the end cap, and the end cap tool 410a rotates and moves backward in a releasing direction. to return to the holding state of the end cap 8 (seventh step). In the seventh step, the holding of the end cap 8 is performed by the magnetism of the end cap tool 410 .

The cylinder connector 510a moves to a position of the cylinder connector plug 610a to receive a gasket from a pair of gasket grippers 710a (step 8). In the eighth step, the pair of gasket grippers 710a advance the sixth actuator 730a to access the gasket supplied to the gasket chucking part 830a, and approach each other by the fifth actuator 720a to access the gasket. has a step of chucking both sides of the

In addition, the pair of gasket grippers 710a reverse the sixth actuator 730a and rotate the chucked gasket by 180 degrees by the seventh actuator 740a to face the cylinder connector 510a side, and the sixth actuator With the advance of 730a, the gasket is put into the cylinder connector 510a, and when unchucking and reversing due to the retreat of the fifth actuator 720a, the input is completed, and when the input of the gasket is completed, the gasket input/discharge member ( 700a) to return to position.

The cylinder connector 510a into which the gasket is inserted moves toward the high-pressure gas cylinder outlet port 5 and is fastened on the high-pressure gas cylinder outlet port 5 (9th step). In particular, the cylinder connector 510a into which the gasket G is inserted moves the cylinder connector member 500a to the left by the third actuator 550a so that the center of the cylinder connector 510a is the outlet port 5 . When the cylinder connector member 500a is moved forward with the second actuator 570a, the cylinder connector 510a comes into contact with the outlet port 5, and the cylinder connector 510a is rotated in the direction in which it is fastened. Thus, when the connection is completed, there is a step of stopping.

When the cylinder connector 510a is fastened and fixed to the outlet port 5, the valve shutter 910a of the valve shutter member 900a is rotated to open the valve 3 of the first high-pressure gas cylinder 1, and the control unit By this, the gas of the high-pressure gas cylinder 1 is supplied to the semiconductor process through the pipe of the cylinder connector 510a coupled to the outlet port 5, and the second high-pressure gas cylinder 2 waits for gas supply (step 10). ).

On the other hand, a method of removing the high-pressure gas cylinder by moving the pair of high-pressure gas cylinders 1 and 2 into the cabinet 100 is as follows.

First, in the method of removing the high-pressure gas cylinder by moving the pair of high-pressure gas cylinders 1 and 2 into the cabinet 100, the first high-pressure gas cylinder 1 by the control unit while supplying gas from the first high-pressure gas cylinder 1 When the replacement timing of the gas cylinder 1 is detected, the flow path is switched to stop the gas supply from the first high-pressure gas cylinder 1, and gas is supplied from the second high-pressure gas cylinder 1 to the gas supply line (first step) .

A replacement alarm is generated after the valve 3 of the first high-pressure gas cylinder 1 is reversely rotated by the valve shutter 910a of the valve shutter member 900a to block the valve 3 of the first high-pressure gas cylinder 1 (2nd step).

When the valve 3 of the first high-pressure gas cylinder 1 is shut off, the cylinder connector 510a on the cylinder connector member 500a is rotated and reversed to separate it from the outlet port 5 (third step). In the third step, the cylinder connector 510a separated from the outlet port 5 moves to the right and returns to the position where the cylinder connector plug 610a and the pair of gasket grippers 710a are located.

The cylinder connector 510a of the cylinder connector member 500a moves to the position of the cylinder connector plug 610a to remove the gasket by a pair of gasket grippers 710a (fourth step). In the fourth step, a pair of gasket grippers 610a comes to a position facing the cylinder connector 510a, chucks the used gasket and moves it backwards to eject it, and rotates it to a 180° position to turn the pair of gasket grippers 610a ), when the previously used gasket falls into the gasket container 850a, the collection is completed.

The end cap tool 410a on the end cap tool member 400a moves along the cam follower 2490a, is integrally coupled to the cylinder connector member 500a, and a second actuator provided on the cylinder connector member 500a ( 570a) is advanced, the cylinder connector 510a rotates, and the end cap 8 mounted on the end cap tool 410a is fastened to the outlet port 5 of the high-pressure gas cylinder to block the end cap tool member 400a. The end cap tool 410a is moved backward to return to the original position along the cam follower 2490a (Step 5). When the discharging of the previously used gasket in the fifth step is completed, the end cap tool member 400a is advanced and rotated to complete fastening the held end cap 8 to the outlet port 5 and then backwards, the end cap ( 8) has a step of completing the fastening.

The cylinder connector plug 610a is fastened to prevent leakage of residual gas existing on the cylinder connector 510a of the cylinder connector member 500a and the introduction of foreign substances (Sixth step).

The door 110 of the cabinet 100 is opened and the high-pressure gas cylinder 1 is released by operating a pneumatic chuck mounted on the automatic gas supply module 300a (step 7).

The gas automatic supply module 300a suspended from the hoist module 200a docked from the alignment jig 9a mounted on the high-pressure gas cylinder 1 is raised to separate it from the first high-pressure gas cylinder 1, and the high-pressure gas cylinder (1) is separated from the cabinet 100 (step 8).

After removing the first high-pressure gas cylinder (1), the alignment jig (9) is coupled to the third high-pressure gas cylinder (1) and then put into the cabinet (100) to lower the automatic gas supply module (300a) of the cabinet (100) After coupling to the alignment jig 9 installed on the header of the third high-pressure gas cylinder 1, the door 110 of the cabinet 100 is closed (Step 9).

Disassemble the cylinder connector plug 610a that is fastened to prevent leakage of residual gas and input of foreign substances existing on the cylinder connector 510a of the cylinder connector member 500a, and the end cap tool member 400a is a cylinder After separating the end cap 8 by driving and decelerating the connector member 500a, the end cap tool member 400a returns to its original position along the cam follower 2490a, and the gasket input/discharge member from the gasket supply member 800a (700a) chucks the gasket to be charged into the cylinder connector member (500a), and the cylinder connector member (500a) in which the gasket is loaded is connected to the outlet port (5) of the third high-pressure gas cylinder (1) (10th) step).

The valve 3 of the third high-pressure gas cylinder 3 is opened by the valve shutter 910 of the valve shutter member 900a to wait (11th step)

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify or modify the present invention within the scope without departing from the spirit and scope of the present invention as set forth in the claims below. can be carried out.

1: high pressure gas cylinder 3: valve
5: outlet port 8: end cap
9a: Alignment jig 91a: Right gripping block
92a: left gripping block 93a: upper surface coupling member
931a: pneumatic chuck pin 932a: alignment guide pin
94a: reference block 95a: slide
96a: slide fixing lock 97a: gas outlet alignment block
98a: locking valve
100: cabinet 110a: ceiling
110b: left frame 110c: right frame
111a: pneumatic cylinder 111b: piston
117a: wire control unit
200a: hoist module 220a: wire
230a: horizontal pulley 240a: vertical pulley
300a, 300b: gas automatic supply module 310a: frame
317a : inner frame
400a: end cap tool member 410a: end cap tool
430a: rotational power transmission unit 450a: actuator for end cap
470a: return actuator 1490a: cam follower
500a: cylinder connector member 501a: connector module base
510a: cylinder connector 511a: piping
512a: polygonal hollow 518a: connecting piece
519a: Flange 520a: Grand return spring
521a: Stopper 580a: Gasket & plug presence detection sensor
600a: cylinder connector plug member 610a: cylinder connector plug
631a : Connector Plug Cylinder
700a: gasket input/discharge member 710a: gasket gripper
720a: fifth actuator 730a: sixth actuator
740a: the seventh actuator
800a: gasket supply member 810a: gasket supply part
813a: upper gasket cartridge 814a: lower gasket cartridge
815a: gasket spare detection sensor 816a: gasket detection sensor
825a: gasket module base 820a: gasket charging part
830a: gasket chucking part 840a: eighth actuator
841a: eighth actuator block 850a: fixed gasket collection box
860a : Removable gasket collection box
900a: valve shutter member 910a: valve shutter
920a: pneumatic chuck 930a: guide hole
940a: align pneumatic chuck button 950a: valve shutter manual button
960a: Cylinder connector manual rotation button

Claims (13)

In the method of fastening the high-pressure gas cylinder by moving a pair of high-pressure gas cylinders (1) (2) into the cabinet 100,
A first step of mounting the alignment jig (9a) to the high-pressure gas cylinder (1) before loading the high-pressure gas cylinder (1) (2) into the cabinet 100;
The first and second high-pressure gas cylinders 1 and 2 equipped with the alignment jig 9a are loaded into the cabinet 100, and the gas automatic supply module 300a suspended from the hoist module 200a is lowered. A second step of docking to the alignment jig (9a) installed in the header of the gas cylinder (1) (1);
A third step of precisely fixing the high-pressure gas cylinder (1) (2) by operating the pneumatic chuck (920a) mounted on the automatic gas supply module (300a);
A fourth step of clicking the loading complete button on the control unit after closing the cabinet 100 door;
A fifth step of releasing the cylinder connector plug (610a) to prevent the leakage of residual gas and the introduction of foreign substances in the cylinder connector (510a) of the cylinder connector member (500a);
A sixth step of moving the cylinder connector (510a) of the cylinder connector member (500a) toward the fastening position of the high-pressure gas cylinder (1) outlet port (5);
The end cap tool member 400a has a separate structure in parallel with the cylinder connector member 500a, and the end cap tool member 400a moves along the cam follower 2490a and is integrated on the cylinder connector member 500a. When the second actuator 550a coupled to the cylinder connector member 500a is advanced, the end cap tool 410a is inserted into the end cap 8, and the end cap tool 410a rotates in the loosening direction. and a seventh step of returning to a state in which the end cap 8 is held by moving backward:
an eighth step of moving the cylinder connector (510a) to the position of the cylinder connector plug (610a) and receiving a gasket from a pair of gasket grippers (710a);
A ninth step of moving the cylinder connector (510a) into which the gasket is inserted in the direction of the high-pressure gas cylinder outlet port (5) and fastening it on the high-pressure gas cylinder outlet port (5);
When the cylinder connector 510a is fastened and fixed to the high-pressure gas cylinder outlet port 5, the valve shutter 910a of the valve shutter member 900a is rotated to open the valve 3 of the first high-pressure gas cylinder 1 and the gas of the high-pressure gas cylinder 1 is supplied to the semiconductor process through the pipe of the cylinder connector 510a coupled to the outlet port 5 by the control unit, and the second high-pressure gas cylinder 2 is a second gas cylinder waiting for gas supply. Step 10; The fastening method of the high-pressure gas cylinder, characterized in that it is made sequentially. The method according to claim 1,
The step of inserting the alignment jig 9a to align the high-pressure gas cylinders 1 and 2 in the first step is to align the height and the side surfaces of the high-pressure gas cylinders 1 and 2 to the reference block 94a. The step of making close contact, the step of pushing the slider 95a to combine the right gripping block 91a and the left gripping block 92, and the combined right gripping block 91a and the left gripping block 92 with a slide lock 96a ), the fastening method of the high-pressure gas cylinder, characterized in that the step of holding and fixing the side so as not to move by turning the locking valve (98a) located below the slide lock (96a). The method according to claim 1,
In the second step, the hoist module 200a is provided with a hoist in the form of a four-line wire on the upper portion of the cabinet 100, and each of the four wires is adjustable in length to enable horizontal adjustment, wire of a high-pressure gas cylinder, characterized in that the hoist is operated so that it can be automatically or manually raised and lowered in one pneumatic cylinder. fastening method. The method according to claim 1,
In the third step, the pneumatic chuck 920a mounted on the automatic gas supply module 300a is mounted by the pneumatic pin 931a formed on the upper surface coupling member 93a of the aligning jig 9a, and the align pneumatic chuck button Fastening method of the high-pressure gas cylinder, characterized in that the step of precisely fixing the high-pressure gas cylinder (1) (2) by (940a). The method according to claim 1,
In the fifth step, when the cylinder connector plug 610a rotates in the direction in which the cylinder connector 510a is released, it is pushed back in the direction to be released in the no-load state of the fourth actuator 630a. 510a) stops the rotation and the fourth actuator 630a moves the cylinder connector plug 610a backward to confirm the release by the detection sensor. The method according to claim 1,
The method of fastening the high-pressure gas cylinder, characterized in that the holding of the end cap (8) in the seventh step is performed by the ball plunger of the end cap tool (410a). The method according to claim 1,
In the eighth step, the pair of gasket grippers 710a advances the sixth actuator 730a to access the gasket supplied to the gasket chucking unit, and approaches each other by the fifth actuator 720a to chuck both sides of the gasket. Fastening method of high-pressure gas cylinder, characterized in that the step. 8. The method according to claim 1 or 7,
The pair of gasket grippers 710a reverses the sixth actuator 730a and rotates 180 degrees by the seventh actuator 740a so that the chucked gasket faces the cylinder connector 510a side, and the sixth actuator 730a ), the gasket is put into the cylinder connector 510a, and after unchucking by retraction of the fifth actuator 720a, when it is reversed by the sixth actuator 730a, the input is completed, and when the input of the gasket is completed A method of fastening a high-pressure gas cylinder, characterized in that the step of returning to the position by the gasket input/discharge member (700a). The method according to claim 1,
The cylinder connector 510a into which the gasket G is inserted moves the cylinder connector member 500a to the left by the third actuator 550a, so that the center of the cylinder connector 510a is at the center of the outlet port 5. When the cylinder connector member 500a is advanced with the second actuator 570a, the cylinder connector 510a comes into contact with the outlet port 5, and the cylinder connector 510a is rotated in the fastening direction and fastened. When this progresses, the second actuator (570a) is changed to a no-load state, and when the set torque is output, the fastening method of the high-pressure gas cylinder, characterized in that it is a step of stopping when the connection is completed. In the method of removing the high-pressure gas cylinder by moving a pair of high-pressure gas cylinders (1) (2) into the cabinet (100),
When the replacement time of the first high-pressure gas cylinder 1 is detected by the control unit while gas is supplied from the first high-pressure gas cylinder 1, the flow path is switched to stop the gas supply from the first high-pressure gas cylinder 1, and 2 A first step of supplying gas from the high-pressure gas cylinder (1) to the gas supply line;
The valve 3 of the first high-pressure gas cylinder 1 is reversely rotated by the valve shutter 910a of the valve shutter member 900a to block the valve 3 of the first high-pressure gas cylinder 1 and then to generate a replacement alarm second step;
When the valve 3 of the first high-pressure gas cylinder 1 is blocked, the second actuator 570a is operated in a no-load state when the outlet port 5 is disconnected by rotating the cylinder connector 510a on the cylinder connector member 500a. A third step of changing to reverse and going to the standby position;
a fourth step of moving the cylinder connector 510a of the cylinder connector member 500a to the position of the cylinder connector plug 610a and removing the gasket by a pair of gasket grippers 710a;
The end cap tool 410a on the end cap tool member 400a moves along the cam follower 2490a, is integrally coupled to the cylinder connector member 500a, and a second actuator provided on the cylinder connector member 500a ( 550a) forward, the cylinder connector 510a rotates to lock the end cap mounted on the end cap tool to the outlet port of the high-pressure gas cylinder, and then moves the end cap tool 410a of the end cap tool member 400a backward to the cam. A fifth step of returning to the original position along the follow (2490a);
A sixth step of fastening the cylinder connector plug (610a) to prevent leakage of residual gas existing on the cylinder connector (510a) of the cylinder connector member (500a) and the introduction of foreign substances;
A seventh step of opening the door 110 of the cabinet 100 and operating the pneumatic chuck 920a mounted on the automatic gas supply module 300a to release the high-pressure gas cylinder 1;
The gas automatic supply module 300a suspended from the hoist module 200a docked from the alignment jig 9a mounted on the high-pressure gas cylinder 1 is raised to separate it from the first high-pressure gas cylinder 1, and the high-pressure gas cylinder an eighth step of separating (1) from the cabinet 100;
After removing the first high-pressure gas cylinder (1), the alignment jig (9a) is coupled to the third high-pressure gas cylinder (1), and then put into the cabinet (100), and the automatic gas supply module (300a) of the cabinet (100) A ninth step of closing the door 110 of the cabinet 100 after being lowered and coupled to the alignment jig 9a installed on the header of the third high-pressure gas cylinder 1;
Disassemble the cylinder connector plug 610a, which is fastened to prevent leakage of residual gas and foreign matter present on the cylinder connector 510a of the cylinder connector member 500a, and the end cap tool member 400a is a cylinder After separating the end cap 8 by driving and decelerating the connector member 500a, the end cap tool member 400a returns to its original position along the cam follower 2490a, and the gasket input/discharge member (800a) from the gasket supply member (800a). 700a) chucks the gasket and inserts it into the cylinder connector member 500a, and the cylinder connector member 500a with the gasket is connected to the outlet port 5 of the third high-pressure gas cylinder 1; ;,
The eleventh step of waiting by opening the valve 3 of the third high-pressure gas cylinder 3 by the valve shutter 910 of the valve shutter member 900a; Way. 11. The method of claim 10,
In the third step, the cylinder connector (510a) separated from the outlet port (5) moves to the right and returns to the position where the cylinder connector plug (610a) and the pair of gasket grippers (710a) are located. How to remove the high-pressure gas cylinder. 11. The method of claim 10,
In the fourth step, a pair of gasket grippers 610a comes to a position facing the cylinder connector 510a, chucks the previously used gasket and discharges it backwards. ), the removal method of the high-pressure gas cylinder, characterized in that the collection is completed when the previously used gasket falls on the gasket container (850a) when unchucking. 11. The method of claim 10,
When the discharging of the gasket used in the fifth step is completed, the end cap tool member 400a is moved forward and rotated to complete fastening the held end cap 8 to the outlet port 5, and then the end cap 8 is moved backward. ) method of removing the high-pressure gas cylinder, characterized in that the step of completing the fastening.

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