KR20220010433A - Display method and substrate processing apparatus - Google Patents

Abstract

Provided is a display method for displaying a plurality of parameters indicating information on substrate processing, in which the display method includes: a step of acquiring information on a measured value of the plurality of parameters sampled at a predetermined period and a sampling time of the measured value; a step of extracting a measured value in which a time change occurs in the measured value of the plurality of parameters in an order of sampling or extracting the measured value in which the time change occurs and a measured valued sampled immediately before, based on the information on the sampling time of the measured value; a step of storing, in a memory unit, the extracted measured value of the plurality of parameters with the information on the sampling time of the measured value in association with each other; a step of drawing the measured value of the plurality of parameters based on the information on the sampling time of the measured value stored in the memory unit; and a step of displaying the drawn graph.

Description

Display method and substrate processing apparatus {DISPLAY METHOD AND SUBSTRATE PROCESSING APPARATUS}

The present disclosure relates to a display method and a substrate processing apparatus.

For example, in Patent Document 1, data collected by the data collection unit is temporarily stored in a data buffer, data is called from the data buffer at a predetermined period to draw a graph, and the period at that time is the CPU utilization rate. It is suggested to set according to

For example, Patent Document 2 discloses, in the case of using a logic analyzer with external connection, to solve the memory capacity shortage when the internal state value of the LSI is recorded, when outputting the same state value consecutively, the same state It is proposed to compress the values and record the overlapping count values of the same data repetition number and data count values having different values.

Japanese Patent Laid-Open No. 2010-224974 Japanese Patent Laid-Open No. 2006-90727

The present disclosure provides techniques that can offload processing for graphing.

According to one aspect of the present disclosure, there is provided a display method for displaying a plurality of parameters indicating information regarding substrate processing, wherein the measurement values of the plurality of parameters sampled at a preset period and information about the sampling time of the measurement values are acquired extracting the measured values in which the measured values of the plurality of parameters have a time change in the sampling order based on the information on the sampling time of the measured values, or the measured values in which the time change occurs and immediately thereafter A step of extracting the measured values sampled in the , a step of storing the extracted measured values of the plurality of parameters and information about the sampling time of the measured values in a memory unit, and sampling the measured values stored in the memory unit A display method is provided, comprising: a step of drawing the measured values of the plurality of parameters on a graph based on time-related information, and a step of displaying the drawn graph.

According to one aspect, the load of processing for graphing can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS It is a cross-sectional schematic diagram which shows an example of the substrate processing apparatus which concerns on one Embodiment.
2 is a diagram showing an example of a functional configuration of a control unit according to an embodiment.
3 is a diagram showing an example of a data file storage unit according to an embodiment.
4 is a diagram showing an example of a hardware configuration of a control unit according to an embodiment.
It is a figure which shows an example of the flow of the collection process of the measured value which concerns on one Embodiment.
Fig. 6 is a diagram showing an example of a flow of a conventional measurement value graphing process.
7 is a diagram for explaining a conventional graphing process and graph display of measured values.
It is a figure which shows an example of the flow of the graphing process of the measured value which concerns on one Embodiment.
It is a figure for demonstrating the graphing process and graph display of the measured value which concerns on one Embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this indication with reference to drawings is demonstrated. In each figure, the same code|symbol is attached|subjected to the same structural part, and the overlapping description may be abbreviate|omitted.

[Substrate processing unit]

First, a substrate processing apparatus 10 according to an embodiment will be described with reference to FIG. 1 . 1 is a schematic cross-sectional view showing an example of a substrate processing apparatus 10 according to an embodiment. 1 shows a processing apparatus for processing a substrate by means of a capacitively coupled plasma.

The substrate processing apparatus 10 includes a chamber 1 , and provides a processing space in which an etching process and a film forming process are performed in the chamber 1 . In the substrate processing apparatus 10 , a plasma is formed in a processing space between the upper electrode 3 in the chamber 1 and the mounting table ST, and the substrate G is processed by the action of the plasma. The mounting table ST has a lower electrode 4 and an electrostatic chuck 5 . The mounting table ST may have a heater. A substrate G is held on the lower electrode 4 . The RF power source 6 and the RF power source 7 are coupled to the lower electrode 4 , and other RF frequencies may be used. The upper electrode 3 is connected to the ground potential. In another example, the RF power supply 6 and the RF power supply 7 may be coupled to different electrodes. A gas supply unit 8 is connected to the chamber 1 through a gas supply line 11 , and a processing gas is supplied to the processing space. A flow controller MFC is connected to the gas supply line 11 . The process gas is flow-controlled by the flow rate controller MFC, and is supplied to the chamber 1 at a preset flow rate. An exhaust device 9 is connected to the bottom of the chamber 1 to exhaust the inside of the chamber 1 .

The substrate processing apparatus 10 includes a control unit 20 including a processor and various storage regions, and controls each element of the substrate processing apparatus 10 to perform plasma processing such as etching on the substrate G.

The chamber 1 is equipped with a pressure gauge CM. The pressure gauge CM measures the pressure in the chamber 1 while processing the substrate G. The pressure measurement value measured by the pressure gauge CM is transmitted to the control unit 20 .

The flow rate controller MFC controls and measures the flow rate of each gas included in the processing gas while the substrate G is being processed. The gas flow rate measurement value measured by the flow rate controller MFC is transmitted to the control unit 20 .

The loading stand ST is equipped with a thermometer T. The thermometer T measures the temperature of the mounting table ST while the substrate G is being processed. The temperature measurement value measured by the thermometer T is transmitted to the control part 20 .

The pressure gauge CM, the thermometer T, and the flow controller MFC are examples of devices that measure information regarding substrate processing such as the state of the substrate G, the state of the process, or the state of the chamber 1 while the substrate G is being processed. In addition, the pressure measurement value, the temperature measurement value, and the gas flow measurement value are examples of a plurality of parameters indicating the state of the substrate G, the state of the process, or the state of the chamber 1 , and the plurality of parameters indicating information related to the processing of the substrate The measured value of is not limited thereto.

The control unit 20 graphs a plurality of parameters representing the substrate processing performed by the substrate processing apparatus 10 , and communicates with the display 36 (see FIG. 3 ) or the control unit 20 of the control unit 20 . The display method that can be displayed on other computers runs.

[Functional Configuration of Control Unit]

Next, an example of the functional configuration of the control unit 20 will be described with reference to FIG. 2 . 2 is a diagram showing an example of a functional configuration of the control unit 20 according to the embodiment. The control unit 20 includes an acquisition unit 21 , a storage unit 22 , a process execution unit 23 , a data processing unit 24 , a writing unit 25 , a writing request unit 26 , and a display unit 27 . .

The acquisition unit 21 acquires the measured values of a plurality of parameters sampled at a preset period and information about the sampling time of the measured values. The information regarding the sampling time of a measured value may be the sampling number of a measured value, and the sampling time itself may be sufficient as it. In this embodiment, the case where a sampling number is acquired is taken as an example and demonstrated.

Sampling numbers are numbered in ascending order for each cycle. Thereby, the sampling time of a measured value can be computed by memorizing in the memory|storage part 22 in association with the sampling number of the measured value measured for every period. For example, if the period is T and the sampling number is n (where n is an integer greater than or equal to 1), the sampling time t of each measured value with the starting point of sampling as a starting point can be calculated by Formula (1).

For example, if the period T is 100 msec and all data of all parameters are sampled for each period, the sampling time of each measured value becomes t = 100 (msec) × (n-1), based on the sampling number n Thus, the sampling time t can be calculated. For example, in the case of n=11, the data is sampled after 1 second (100 msec×10) has elapsed from the start of sampling.

In addition, when n is an integer greater than or equal to 0, and the sampling start time is n=0, the sampling time t is computable by Formula (1').

The data processing unit 24 calculates the sampling time of each measured value by the product of the period T and the integer based on the sampling number n based on the formula (1) or the formula (1').

In addition, when paying attention only to the relative time between sampling, the above formula (1') can be applied even when n is an integer greater than or equal to 1 and the sampling start time is n = 1, but in that case, each The numerical value of the sampling time corresponding to n itself has no meaning.

The acquired measured values of the plurality of parameters are stored in the data storage unit 28 of the storage unit 22 in association with information about the sampling time of the measured values for each parameter. In the data storage unit 28, a plurality of monitor data files 128a, 128b... are stored.

3 : is a figure which shows an example of the measured value memorize|stored in the data storage part 28 which concerns on one Embodiment. For example, in the monitor data file 128a stored in the data storage unit 28, all parameters (measured pressure value, measured gas flow rate, measured temperature...) of sampling number 1 (n=1) are stored. In the monitor data file 128b, all parameters of sampling number 2 (n=2) are stored. In the monitor data file 128c, all parameters of sampling number 3 (n=3) are stored.

In this way, the monitor data files 128a, 128b... are provided for each sampling number, and for a plurality of parameters, the measured value of each parameter is stored in association with the sampling number. In FIG. 3 , only three parameters are shown, but the number of parameters is not limited to three and may be two or more. In addition, the monitor data files 128a, 128b... are collectively referred to as the monitor data file 128.

The process execution unit 23 executes a desired process on the substrate G. The data processing unit 24 performs data processing (part of the graphing processing) for graphing the measurement values of a plurality of parameters based on the sampling number associated with each measurement value. Specifically, the data processing unit 24 searches for the measured values for each parameter of the plurality of parameters in the order of the sampling numbers, and extracts the measured values with time changes. However, the data processing part 24 may search the measured value for every parameter of a some parameter in order of sampling number, and may extract the measured value in which the time change arose, and the measured value immediately before it. The measured values extracted according to the predetermined rule determined as described above are stored in the memory unit 29 which is a temporary storage area of the storage unit 22 . In the memory unit 29, information about the sampling time of the measured value in association with the extracted measured value is stored.

The drawing unit 25 draws a corresponding measured value on a graph for each parameter based on the sampling time calculated from the sampling number stored in the memory unit 29 . The display part 27 displays the graph which drew the time change of the measured value of a some parameter.

In the present embodiment, the control unit 20 first accumulates all of the sampled measured values in the monitor data file 128 . Then, when the graph is drawn, the measured values of the plurality of parameters extracted based on the predetermined rule from the measured values of the plurality of parameters stored in the monitor data file 128 are correlated with information about the sampling time of the extracted measured values. It is stored in the memory unit 29 .

However, the method of storing the measured values is not limited thereto, and for example, the measured values extracted by the data processing unit 24 from the sampled measured values may be directly stored in the memory unit 29 . In this case, the process of first storing all of the sampled measured values in the monitor data file 128 can be omitted. Thereby, while being able to reduce the load of a process, the usage-amount of the memory which memorize|stores the sampled measured value can be reduced.

In response to a graph drawing request, the data processing unit 24 extracts the measured values of a plurality of parameters from the sampled measured values based on the predetermined rule, and the drawing unit 25 extracts the plurality of extracted values in accordance with this. You may draw on a graph the time change of the measured value of the parameter of . The drawing request unit 26 may output an instruction signal instructing the start of the process of extracting the measured value in response to the display of a screen (drawing request screen) in which the drawing request of the graph is possible. The drawing request unit 26 may output an instruction signal instructing the start of the drawing process (part of the graphing process) in response to the operation of the graph drawing request on the drawing request screen.

[Hardware configuration of control unit]

Next, an example of the hardware configuration of the control unit 20 will be described with reference to FIG. 4 . 4 is a diagram showing an example of the hardware configuration of the control unit 20 according to the embodiment. The control unit 20 has an interface 31 , an auxiliary storage device 32 , a main memory 33 , a CPU 34 , a keyboard 35 , and a display 36 .

The interface 31 is an interface with a measurement unit such as a pressure gauge CM. Thereby, the control part 20 can acquire the measured value of the several parameter sampled at the period preset through the interface 31. As shown in FIG.

The auxiliary storage device 32 is a nonvolatile storage device that stores the sampled measured values of a plurality of parameters in association with the sampling numbers of the measured values. The main memory 33 is a volatile semiconductor memory that temporarily stores measured values extracted from the sampled measured values of a plurality of parameters based on the predetermined rule in association with the sampling numbers of the measured values.

The CPU 34 executes graphing processing (data processing and drawing processing, etc.) based on the measurement values stored in the auxiliary storage device 32 and the main memory 33 and the sampling numbers of the measurement values.

The keyboard 35 is an example of an input device, and inputs predetermined operation. The display 36 is an example of a display device, and displays the time change of the measured value of several parameterized graph. Instead of the keyboard 35, a touch panel may be used as an input device.

2 is a block diagram focusing on the functions of the control unit 20, for example, the function of the process execution unit 23, the data processing unit 24, and the drawing unit 25 is a substrate that causes the CPU 34 to execute It can be realized by processing, data processing, and drawing processing.

The function of the storage unit 22 can be realized by the auxiliary storage device 32 and the main memory 33 . The function of the display unit 27 can be realized by the display 36 . The function of the acquisition unit 21 can be realized by the interface 31 . The function of the drawing request unit 26 can be realized by the keyboard 35 .

[Measured value collection processing]

Next, the measurement value collection process performed by the control part 20 is demonstrated, referring FIG. 5 is a diagram illustrating an example of a flow of a measurement value collection process according to an embodiment.

This collection process is a process in which all measured values of a plurality of parameters are acquired, for example, every 100 msec period, and stored in the monitor data file 128 while the process execution unit 23 is executing the substrate process.

When the substrate processing is started, the acquisition unit 21 samples the measured values of the plurality of parameters at a preset period to acquire the sampling numbers and measured values of the plurality of parameters (step S1). Next, the acquisition unit 21 stores the acquired sampling number and measurement value for each parameter in the monitor data file 128 of the data storage unit 28 (step S2).

Next, the acquisition unit 21 determines whether the process (substrate processing) has ended (step S3). Until the process ends, steps S1 to S3 are repeatedly executed, and the sampling number and the measured value for each sampled parameter are accumulated in the monitor data file 128 . When the process is finished, it is determined whether the next process has been started (step S4), and it waits until the next process is started. When the next process is started, while the next process is being executed, the acquisition unit 21 acquires the sampling numbers and measured values of a plurality of resampled parameters and stores them in the monitor data file 128 .

[Conventional graphing]

Next, the graphing process of the conventional measurement value is demonstrated, referring FIG.6 and FIG.7. Fig. 6 is a diagram showing an example of a flow of a conventional measurement value graphing process. Fig. 7 is a diagram for explaining a conventional graphing process and graph display of measured values. In addition, in the conventional graphing process, the measurement values are accumulated in the monitor data file 128 in the order of sampling, and when the sampling time of the measurement value is obtained without using the sampling number, the sampling number is associated with the measurement value you don't have to remember

In the conventional graphing process of Fig. 6, first, it is determined whether or not the transition to the drawing request screen has been reached (step S11). When the drawing request screen is displayed in this way, it is determined that the drawing request screen has changed, and the measured values of a plurality of parameters stored in the monitor data file 128 are stored in the memory unit 29 as they are (step S12). ).

For example, as shown in Fig. 7, when the drawing request screen 136 is displayed on the display 36, each parameter (A: pressure measurement) stored in the monitor data file 128 shown in Fig. 7 (a). value, B: gas flow rate measurement value, C: temperature measurement value) is stored in the memory unit 29 as it is. That is, the data stored in the memory unit 29 is the same as the measured value of each parameter stored in the monitor data file 128 .

Next, it is determined whether there is a drawing request (step S13). For example, when the operator does not press the "Yes" button 136a of the drawing request screen 136 shown in FIG. 7 (step S13 "No") and the preset time has elapsed (step S14), this process quit If the button 136a of "Yes" on the drawing request screen 136 is pressed before the predetermined time has elapsed, it is determined that there has been a drawing request. In addition, you may make it return to before step S13 in the case of "No" in step S13 so that the waiting state may continue until the button 136a is pressed without providing step S14.

In this case, in response to the drawing request, the measured values of each parameter of the plurality of parameters stored in the memory unit 29 are plotted in the stored order and graphed (step S15), and the graph of the plurality of parameters is displayed, (Step S16), the process ends. Thereby, as shown in FIG.7(b), the time change of the measured value of the some parameter memorize|stored in the memory part 29 is displayed as a graph, and the substrate processing state can be confirmed.

In the conventional graphing process, the measured value stored in the memory unit 29 is the same as the measured value of each parameter stored in the monitor data file 128, and all of the sampled measured values are plotted on the graph. For this reason, the load of the process of plotting and graphing in the sampling order is high, and it takes time to graph. In particular, in recent years, the number of parameters is enormous, and the load of the graphing process is increasing.

In addition, in the conventional graphing process, since the measured values of a plurality of parameters accumulated in the monitor data file 128 are stored in the memory unit 29 as they are, the amount of memory used is large. In particular, in recent years, the number of parameters has been enormous, and the amount of memory used has been increasing. Since the memory is used not only for graph drawing but also for other processing, if the amount of memory used by the graphing processing increases, other processing is also affected.

As described above, the consumption of the CPU 34 and the main memory 33 used for graphing increases. In addition, since the situation where the load of the CPU 34 continues to be high in the graphing process, the time it takes to display the graph on the screen also increases, resulting in a decrease in service.

Therefore, in the graphing process of the present embodiment, the consumption of the CPU 34 and the main memory 33 used to display the graphs of a plurality of parameters is reduced, and the time until the graphs are displayed on the screen is shortened. do. Moreover, the graphing process which shows the display method which concerns on this embodiment includes the collection process shown in FIG. 5, and the graphing process (data process, drawing process, etc.) shown in FIG.

[Graphization of this embodiment]

Next, the graphing process of the measured value which concerns on this embodiment is demonstrated, referring FIG.8 and FIG.9. 8 is a diagram showing an example of a flow of graphing processing of measured values according to an embodiment. It is a figure for demonstrating the graphing process and graph display of the measured value which concerns on one Embodiment.

In this process, first, it is determined whether the drawing request unit 26 has transitioned to the drawing request screen (step S21). When the drawing request unit 26 determines that the transition to the drawing request screen has been made, the data processing unit 24 determines the measurement values for a plurality of parameters stored in the monitor data file 128 based on the predetermined rule for each parameter. Extract the point of change. The data processing unit 24 associates the extracted measured value of the change point with the sampling number and stores it in the memory unit 29 (step S22). However, the data processing unit 24 may store the extracted measured value of the change point and the measured value sampled immediately before the measured value in the memory unit 29 in association with the sampling number.

For example, as shown in Fig. 9 , when a drawing request screen 136 is displayed on the display 36, the drawing request unit 26 outputs an instruction signal instructing the start of a process for extracting a measured value. do. When the data processing unit 24 receives an instruction signal instructing the start of the process for extracting the measured value, each parameter (A: pressure measured value, B) stored in the monitor data file 128 shown in Fig. 9A : Gas flow rate measurement value, C: Temperature measurement value…) and extract the change point of the measurement value. Then, the data processing unit 24 stores the extracted change point measurement value in association with the sampling number in the memory unit 29 . In addition, the first measured value and the last measured value of the sampling period composed of a plurality of periods are unconditionally stored in the memory unit 29 . Thereby, for example, from the pressure measurement value of A, the change points of sampling numbers 1, 3, and 6 are extracted. Then, the extracted measurement values "7", "10", and "11" of the change points are stored in the memory unit 29 in association with the sampling numbers "1", "3", and "6". In addition, in this embodiment, the memory unit 29 is also associated with the sampling numbers "2" and "5" for the measured values "7" and "10" of the sampling numbers "2" and "5" immediately before the extracted change point. ) is remembered in The measured value is extracted similarly also about the gas flow rate measurement value of B and the temperature measurement value of C.

As a result, as shown in FIG.9(b), the pressure measurement value and temperature measurement value of sampling number "4" are substantially discarded, and are not memorize|stored in the memory part 29. As shown in FIG. Accordingly, the data stored in the memory unit 29 is smaller than the measured values of each parameter stored in the monitor data file 128 , and the amount of use of the memory unit 29 can be reduced.

Next, the drawing request unit 26 determines whether there is a drawing request (step S23). For example, when the operator does not press the "Yes" button 136a of the drawing request screen 136 shown in FIG. 9 (step S23 "No") and the preset time has elapsed (step S24), this process quit When the "Yes" button 136a of the drawing request screen 136 is pressed before the predetermined time has elapsed, the drawing request unit 26 determines that a drawing request has been made, and instructs the start of drawing processing of the extracted measured values. output an instruction signal. In addition, you may make it return to before step S23 in the case of "No" in step S23 so that the waiting state may continue until the button 136a is pressed without providing step S24.

When the writing unit 25 receives an instruction signal instructing the start of the writing process, the measurement value extracted by the data processing unit 24 is subjected to sampling calculated from the sampling number based on equation (1) or equation (1'). It plots with time and graphs it (step S25). The display unit 27 displays a graph of a plurality of parameters (step S26), and ends the process. For example, the measured value is plotted for each parameter according to the sampling time calculated from the sampling number associated with the measured value in the memory unit 29 of FIG. do. Thereby, as shown in FIG.9(c), the measured value of the some parameter memorize|stored in the memory part 29 is displayed as a graph, and the state of a board|substrate process etc. can be confirmed. The graph shown in FIG. 9(c) has the same display as the graph of the conventional example shown in FIG. 7(c).

As described above, in the graphing processing of the measured values according to the present embodiment, the measured value change point of each parameter accumulated in the monitor data file 128 is extracted, and the measured value of the change point is stored in the memory unit 29 . remember Alternatively, the change point of the measured value of each parameter accumulated in the monitor data file 128 is extracted, and the measured value of the change point and the measured value sampled immediately before it are stored in the memory unit 29 .

Thereby, while the measured value does not change, the measured value during that time can be discarded without being stored in the memory unit 29 as data unnecessary for graphing. That is, since the sampled measured value is displayed as a horizontal straight line on the graph while the same value continues, the measured value other than the measured value at the change point or the measured value other than the measured value at the change point and the measured value immediately before is displayed on the graph. It becomes unnecessary data for fire. Therefore, in the present embodiment, the measurement value for graphing is reduced by not storing the measurement value determined as unnecessary data in the memory unit 29 . Thereby, the memory usage for graphing can be reduced.

In addition, as the number of measured values stored in the memory unit 29 decreases compared to the prior art, the number of measured values to be drawn on the graph is reduced, and the load on the CPU 34 that performs the processing for graphing can be reduced. , the time from drawing a graph to displaying it can be shortened. In addition, in order to calculate the time at which the measured value was sampled, the sampling number is stored in the memory unit 29 in association with the measured value. Thereby, for example, the sampling time of the measuring part memorize|stored in the memory part 29 can be computed, a measured value can be plotted according to the sampling time, and the time change of a measured value can be graphed.

In addition, the measured value immediately before the measured value of a change point may be memorize|stored, and it is not necessary to memorize|store. In the case where the measured value immediately before the change is stored together with the measured value of the change point in the memory unit 29, the plotted adjacent measured values may be graphed by a graphing rule that connects them with a straight line.

When only the measured value of the change point is stored in the memory unit 29, instead of connecting adjacent measured values plotted with a straight line, a horizontal straight line is drawn from the measured value of the immediately preceding change point until the measured value of the next change point. , you may use a graphing rule in which the measured value increases or decreases step by step from the measured value at the next change point. However, the graphing rule is not limited thereto, and other rules may be used.

According to the display method according to the present embodiment described above, the measured values stored in the memory unit 29 can be compressed. Thereby, the number of points to be plotted in graphing the measured values can be reduced, the load of processing for graphing can be reduced, and the time until graphing can be shortened.

In addition, in order to compress and store the measured values of a plurality of parameters accumulated in the monitor data file 128 in the memory unit 29, the amount of memory used can be reduced.

In addition, in the present embodiment, in the monitor data file 128, all the measured values for which all the parameters were sampled are stored, and in the memory unit 29, the measured values of each parameter after the extraction of the change points are stored. However, the measured value of each parameter after extraction of the change point is stored in the monitor data file 128, and when an instruction signal instructing the start of the process of extracting the measured value is received, the change point stored in the monitor data file 128 is received. You may graph and display the measured value of each parameter after extraction. Alternatively, the data of the monitor data file 128 may be updated according to the measured values stored in the memory unit 29 . Accordingly, it is possible to reduce the amount of use of the data storage unit 28 that compresses and stores the sampled measured values and stores the monitor data file 128 .

It should be thought that the display method and substrate processing apparatus which concern on embodiment disclosed this time are an illustration in all points, and are not restrictive. Embodiments can be modified and improved in various forms without departing from the appended claims and the gist thereof. The matters described in the plurality of embodiments can be combined within the non-contradictory range, and other configurations can be taken within the non-contradictory range.

The substrate processing apparatus of the present disclosure is an Atomic Layer Deposition (ALD) apparatus, Capacitively Coupled/EPlasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), Helicon Wave Plasma Any type of device of (HWP) is applicable.

In addition, although a plasma processing apparatus is mentioned and demonstrated as an example of a substrate processing apparatus, a substrate processing apparatus may just be an apparatus which performs predetermined processing (for example, film-forming process, an etching process, etc.) on a board|substrate, and it is limited to a plasma processing apparatus. it is not going to be

Claims (6)

A display method for displaying a plurality of parameters indicating information related to substrate processing,
a step of acquiring information about the measured values of the plurality of parameters sampled at a preset period and the sampling time of the measured values;
Based on the information about the sampling time of the measured value, the measured value in which the measured values of the plurality of parameters in the sampling order have a time change is extracted, or the measured value in which the time change occurs and the measurement sampled immediately before it the process of extracting the value; and
a step of associating the extracted measured values of the plurality of parameters with information on sampling times of the measured values and storing them in a memory unit;
Drawing the measured values of the plurality of parameters on a graph based on the information about the sampling time of the measured values stored in the memory unit;
Step of displaying the drawn graph
A display method having . The method according to claim 1, wherein the acquired information about the sampling time of the measured value is a sampling number of the acquired measured value,
In the step of drawing on the graph, the sampling time of the measured value is calculated by a product of an integer based on the sampling number and the period, and corresponding to the sampling time of the measured value, the measured values of a plurality of the parameters are calculated to draw on a graph,
How to display. The method according to claim 1 or 2, further comprising: a step of associating the obtained measured values of the plurality of parameters with information on sampling times of the measured values and storing them in a data file;
The step of storing in the memory unit may include correlating information about a sampling time of the measured values with the measured values of a plurality of parameters extracted from the measured values of a plurality of the parameters of data stored in the data file and storing the data stored in the data file in the memory unit ,
How to display. The method according to claim 3, wherein in the step of acquiring the measured values, the measured values of a plurality of the parameters are sampled at the cycle during the substrate processing, and a sampling number indicating the sampling sequence is associated and stored in the data file. doing,
How to display. The method according to any one of claims 1 to 4, comprising the steps of: displaying a screen on which a request for drawing of the graph is possible;
and outputting an instruction signal instructing the start of the process of extracting the measured value in response to display of a screen on which the graph drawing request is possible;
How to display. A substrate processing apparatus for performing substrate processing,
an acquisition unit configured to acquire information about measurement values of a plurality of parameters sampled at a preset period and a sampling time of the measurement values;
Based on the information about the sampling time of the measured value, the measured value in which the measured values of the plurality of parameters in the sampling order have a time change is extracted, or the measured value in which the time change occurs and the measurement sampled immediately before it a data processing unit for extracting values;
a storage unit for storing the extracted measurement values of the plurality of parameters in association with information about the sampling time of the measurement values and storing the information in the memory unit;
a drawing unit that draws the measured values of the plurality of parameters on a graph based on the information about the sampling time of the measured values stored in the memory unit;
A display unit that displays the drawn graph
having, a substrate processing apparatus.

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