KR102511296B1 - Display method and substrate processing apparatus - Google Patents

Abstract

A display method for displaying a plurality of parameters indicating information related to substrate processing, comprising: acquiring measured values of a plurality of parameters sampled at a preset cycle and information related to a sampling time of the measured values; Based on the information on the sampling time, extracting the measured value in which the time change occurs in the measured value of a plurality of parameters in the order of sampling, or extracting the measured value where the time change occurs and the measured value sampled immediately before that Based on the step of associating and storing the extracted measured values of the plurality of parameters and information about the sampling time of the measured values in a memory unit, and the information about the sampling time of the measured values stored in the memory unit, A display method comprising: a step of drawing measurement values of a plurality of the parameters on a graph; and a step of displaying the drawn graph.

Description

Display method and substrate processing apparatus {DISPLAY METHOD AND SUBSTRATE PROCESSING APPARATUS}

The present disclosure relates to a display method and a substrate processing apparatus.

For example, Patent Document 1 describes temporarily storing data collected by a data collection unit in a data buffer, calling data from the data buffer at predetermined cycles to draw a graph, and calculating the cycle at that time as the CPU usage rate. It is suggested to set according to

For example, in Patent Document 2, when externally connected and a logic analyzer is used, in order to solve the lack of memory capacity or the like when the state value inside the LSI is recorded, when the same continuous state value is output, this same state It is proposed to compress the value and record the same data repetition count value and the data number count value having different values in an overlapping manner.

Japanese Unexamined Patent Publication No. 2010-224974 Japanese Unexamined Patent Publication No. 2006-90727

The present disclosure provides a technique capable of reducing the load of processing for graphing.

According to one aspect of the present disclosure, a display method for displaying a plurality of parameters representing information related to substrate processing, wherein measurement values of a plurality of parameters sampled at a preset cycle and information related to a sampling time of the measurement values are obtained. process, and based on the information on the sampling time of the measured values, in the order of sampling, measured values in which time changes occurred in the measured values of a plurality of parameters are extracted, or the measured values where the time changes occurred and immediately before that a step of extracting the measured values sampled in the above; a step of linking the extracted measured values of the plurality of parameters with information on sampling time of the measured values and storing them in a memory unit; and sampling the measured values stored in the memory unit. A display method is provided which includes a step of plotting measured values of a plurality of the parameters on a graph based on time-related information, and a step of displaying the plotted graph.

According to one aspect, the load of processing for graphing can be reduced.

1 is a schematic cross-sectional view showing an example of a substrate processing apparatus according to an embodiment.
2 is a diagram showing an example of a functional configuration of a control unit according to an embodiment.
3 is a diagram showing an example of a data file storage unit according to an embodiment.
4 is a diagram showing an example of a hardware configuration of a control unit according to an embodiment.
5 is a diagram showing an example of a flow of measurement value collection processing according to an embodiment.
Fig. 6 is a diagram showing an example of the flow of conventional measurement value graphing processing.
Fig. 7 is a diagram for explaining conventional measurement value graphing processing and graph display.
8 is a diagram showing an example of a flow of graphing processing of measured values according to an embodiment.
9 is a diagram for explaining graphing processing and graph display of measured values according to an embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this indication is demonstrated with reference to drawings. In each drawing, the same code|symbol is attached|subjected to the same component part, and overlapping description may be abbreviate|omitted.

[substrate processing device]

First of all, a substrate processing apparatus 10 according to an embodiment will be described using FIG. 1 . 1 is a schematic cross-sectional view showing an example of a substrate processing apparatus 10 according to an embodiment. 1 shows a processing apparatus for processing a substrate by capacitively coupled plasma.

The substrate processing apparatus 10 has a chamber 1 and provides a processing space in the chamber 1 where an etching process or a film formation process is performed. In the substrate processing apparatus 10, plasma is formed in a processing space between the upper electrode 3 and the mounting table ST in the chamber 1, and the substrate G is processed by the action of the plasma. The mounting table ST has a lower electrode 4 and an electrostatic chuck 5 . The loading table ST may have a heater. A substrate G is held on the lower electrode 4 . RF power supply 6 and RF power supply 7 are coupled to the lower electrode 4, and other RF frequencies may be used. The upper electrode 3 is connected to ground potential. In another example, RF power source 6 and RF power source 7 may be coupled to different electrodes. A gas supply unit 8 is connected to the chamber 1 through a gas supply line 11 to supply a processing gas to the processing space. A flow controller MFC is connected to the gas supply line 11 . The process gas is supplied to the chamber 1 at a flow rate set in advance by controlling the flow rate by the flow controller MFC. An exhaust device 9 is connected to the bottom of the chamber 1 to exhaust the inside of the chamber 1 .

The substrate processing apparatus 10 has a control unit 20 including a processor and various storage areas, controls each element of the substrate processing apparatus 10, and performs plasma processing such as etching on the substrate G.

Chamber 1 is equipped with a pressure gauge CM. The pressure gauge CM measures the pressure in the chamber 1 while processing the substrate G. The pressure measurement value measured by the pressure gauge CM is transmitted to the controller 20 .

The flow controller MFC controls and measures the flow rate of each gas included in the process gas while processing the substrate G. The gas flow measurement value measured by the flow controller MFC is transmitted to the controller 20 .

The loading platform ST is equipped with a thermometer T. The thermometer T measures the temperature of the loading table ST while processing the substrate G. The temperature measurement value measured by the thermometer T is transmitted to the control unit 20 .

The pressure gauge CM, the thermometer T, and the flow controller MFC are examples of devices that measure information related to substrate processing, such as the state of the substrate G while processing the substrate G, the state of the process, or the state of the chamber 1. In addition, the pressure measurement value, the temperature measurement value, and the gas flow measurement value are examples of a plurality of parameters representing the state of the substrate G, the state of the process, or the state of the chamber 1, and a plurality of parameters representing information related to substrate processing. The measured value of is not limited to these.

The control unit 20 graphs a plurality of parameters representing the substrate processing performed by the substrate processing apparatus 10, and communicates with the display 36 (see FIG. 3) of the control unit 20 or the control unit 20. Execute the display method to display on another computer that can be used.

[Function configuration of the control unit]

Next, an example of the functional configuration of the control unit 20 will be described with reference to FIG. 2 . 2 is a diagram showing an example of a functional configuration of the control unit 20 according to an embodiment. The control unit 20 includes an acquisition unit 21, a storage unit 22, a process execution unit 23, a data processing unit 24, a drawing unit 25, a drawing request unit 26, and a display unit 27. .

The acquisition unit 21 acquires measured values of a plurality of parameters sampled at a preset cycle and information about the sampling time of the measured values. The information regarding the sampling time of the measurement value may be the sampling number of the measurement value or the sampling time itself. In this embodiment, the case where a sampling number is obtained is taken as an example and described.

Sampling numbers are numbered in ascending order for each period. In this way, the sampling time of the measurement value can be calculated by associating the measurement value measured for each period with the sampling number and storing it in the storage unit 22 . For example, assuming that the period is T and the sampling number is n (n is an integer greater than or equal to 1), the sampling time t of each measured value starting at the sampling start point can be calculated by equation (1).

For example, when the period T is 100 msec and all data of all parameters are sampled every period, the sampling time of each measured value is t = 100 (msec) x (n-1), based on the sampling number n Thus, the sampling time t can be calculated. For example, in the case of n = 11, it is the data sampled after 1 second (100 msec x 10) elapsed from the start of sampling.

In addition, when n is an integer greater than or equal to 0 and the sampling start point is set to n = 0, the sampling time t can be calculated by Formula (1').

Based on Expression (1) or Expression (1'), the data processing unit 24 calculates the sampling time of each measured value by multiplying an integer based on the sampling number n and a period T.

In the case of focusing only on the relative time between sampling, the above formula (1') can be applied also when n is an integer of 1 or more and the starting point of sampling is set to n = 1. In that case, however, each The numerical value of the sampling time corresponding to n itself has no meaning by itself.

The acquired measurement values of a plurality of parameters are stored in the data storage unit 28 of the storage unit 22 in association with information about the sampling time of the measurement values for each parameter. In the data storage unit 28, a plurality of monitor data files 128a, 128b... are stored.

3 is a diagram showing an example of measured values stored in the data storage unit 28 according to one embodiment. For example, in the monitor data file 128a stored in the data storage unit 28, all parameters (pressure measurement value, gas flow measurement value, temperature measurement value...) of sampling number 1 (n = 1) are stored. All parameters of sampling number 2 (n = 2) are stored in the monitor data file 128b. All parameters of sampling number 3 (n = 3) are stored in the monitor data file 128c.

In this way, the monitor data files 128a, 128b... are provided for each sampling number, and for a plurality of parameters, the measured value of each parameter is associated with the sampling number and stored. In Fig. 3, only three parameters are shown, but the number of parameters is not limited to three, and may be two or more. Also, the monitor data files 128a, 128b... are collectively referred to as the monitor data file 128.

The process execution unit 23 executes a desired process on the substrate G. The data processing unit 24 performs data processing (part of graphing processing) for graphing measurement values of a plurality of parameters based on the associated sampling number for each measurement value. Specifically, the data processing unit 24 searches for measured values for each parameter of a plurality of parameters in the order of sampling numbers, and extracts measured values that change over time. However, the data processing unit 24 may search for measured values for each parameter of a plurality of parameters in the order of sampling numbers, and extract the measured values at which time changes occur and the measured values immediately before that. The measured value extracted according to the predetermined rule determined as described above is stored in the memory unit 29, which is a temporary storage area of the storage unit 22. In the memory section 29, information about the sampling time of the measured value is stored in association with the extracted measured value.

The drawing unit 25 draws the corresponding measured value on a graph for each parameter based on the sampling time calculated from the sampling number stored in the memory unit 29 . The display unit 27 displays a graph depicting changes over time of measured values of a plurality of parameters.

In this embodiment, the control unit 20 first accumulates all of the sampled measurement values in the monitor data file 128 . In addition, when drawing the graph, the measured values of a plurality of parameters extracted based on the predetermined rule from the measured values of the plurality of parameters stored in the monitor data file 128 are associated with information about the sampling time of the extracted measured values stored in the memory unit 29.

However, the storage method of the measurement value is not limited to this, and the measurement value extracted by the data processing unit 24 from the sampled measurement value may be directly stored in the memory unit 29, for example. In this case, the process of first storing all of the sampled measured values in the monitor data file 128 can be omitted. In this way, the load of the processing can be reduced, and the memory usage for storing the sampled measurement values can be reduced.

In response to a graph drawing request, the data processing unit 24 extracts measured values of a plurality of parameters based on the predetermined rule from the sampled measurement values, and the drawing unit 25 extracts the plurality of values extracted according to this. The time change of the measured value of the parameter of may be plotted on a graph. The rendering request unit 26 may output an instruction signal instructing the start of a process of extracting a measured value in response to the display of a screen capable of requesting drawing of a graph (a rendering request screen). The rendering request unit 26 may output an instruction signal instructing the start of a rendering process (part of the graph rendering process) in response to an operation of a graph rendering request to the rendering request screen.

[Hardware configuration of the control unit]

Next, an example of the hardware configuration of the control unit 20 will be described with reference to FIG. 4 . 4 is a diagram showing an example of the hardware configuration of the control unit 20 according to one embodiment. The control unit 20 has an interface 31, an auxiliary storage device 32, a main memory 33, a CPU 34, a keyboard 35 and a display 36.

The interface 31 is an interface with a measuring unit such as pressure gauge CM. In this way, the control unit 20 can acquire measured values of a plurality of parameters sampled at a predetermined cycle through the interface 31 .

The auxiliary storage device 32 is a non-volatile storage device that stores measured values of a plurality of sampled parameters in association with sampling numbers of the measured values. The main memory 33 is a volatile semiconductor memory that temporarily retains measured values extracted from the measured values of a plurality of sampled parameters based on the predetermined rule in association with sampling numbers of the measured values.

The CPU 34 executes graphing processing (data processing and drawing processing, etc.) based on the measured values stored in the auxiliary storage device 32 and the main memory 33 and the sampling numbers of the measured values.

The keyboard 35 is an example of an input device, and a predetermined operation is input. The display 36 is an example of a display device, and displays changes over time of measured values of a plurality of parameters graphed. Instead of the keyboard 35, a touch panel may be used as an input device.

2 is a block diagram focusing on the functions of the control unit 20. For example, the functions of the process execution unit 23, the data processing unit 24, and the drawing unit 25 are executed by the CPU 34. processing, data processing, and drawing processing.

The functions of the storage unit 22 can be realized by the auxiliary storage device 32 and the main memory 33 . The function of the display unit 27 can be realized by the display 36 . The functions of the acquisition unit 21 can be realized by the interface 31 . The function of the drawing request unit 26 can be realized by the keyboard 35 .

[Measurement value collection processing]

Next, the measurement value collection process executed by the control unit 20 will be described with reference to FIG. 5 . 5 is a diagram showing an example of a flow of measurement value collection processing according to an embodiment.

This collection process is a process of acquiring all measured values of a plurality of parameters at intervals of, for example, 100 msec while the process execution unit 23 is executing the substrate process, and storing them in the monitor data file 128 .

When substrate processing is started, the acquisition unit 21 samples measurement values of a plurality of parameters at a predetermined cycle, and acquires sampling numbers and measurement values of the plurality of parameters (step S1). Next, the acquisition unit 21 stores the acquired sampling number and measured value for each parameter in the monitor data file 128 of the data storage unit 28 (step S2).

Next, the acquisition unit 21 determines whether the process (substrate processing) has ended (step S3). Until the process ends, steps S1 to S3 are repeatedly executed, and the sampling number and measured value are accumulated in the monitor data file 128 for each sampled parameter. When the process ends, it is determined whether the next process has started (step S4), and waits until the next process starts. When the next process is started, while the next process is being executed, the acquisition unit 21 acquires sampling numbers and measured values of a plurality of parameters sampled again and stores them in the monitor data file 128 .

[Conventional graphing]

Next, a conventional processing of graphing measurement values will be described with reference to FIGS. 6 and 7 . Fig. 6 is a diagram showing an example of the flow of conventional measurement value graphing processing. Fig. 7 is a diagram for explaining conventional measurement value graphing processing and graph display. Further, in the conventional graphing process, measured values are accumulated in the order of sampling in the monitor data file 128, and when the sampling time of the measured value is obtained without using the sampling number, the sampling number is associated with the measured value You don't have to remember.

In the conventional graphing process of Fig. 6, first, it is determined whether or not it has transitioned to the drawing request screen (step S11). When the drawing request screen is displayed in this way, it is determined that the transition to the drawing request screen has been made, and the measured values of a plurality of parameters stored in the monitor data file 128 are stored in the memory unit 29 as they are (step S12). ).

For example, as shown in FIG. 7 , when the drawing request screen 136 is displayed on the display 36, each parameter (A: pressure measurement) stored in the monitor data file 128 shown in FIG. value, B: gas flow rate measurement value, C: temperature measurement value) is stored in the memory unit 29 as it is. That is, the data stored in the memory unit 29 is the same as the measured value of each parameter stored in the monitor data file 128 .

Next, it is determined whether there is a drawing request (step S13). For example, when the operator does not press the “Yes” button 136a of the drawing request screen 136 shown in FIG. 7 (Step S13 “No”) and the preset time elapses (Step S14), this process quit If the "Yes" button 136a on the drawing request screen 136 is pressed before the predetermined time elapses, it is determined that there has been a drawing request. In addition, you may make it return before step S13 in the case of "No" in step S13 so that a standby state may continue until the button 136a is pressed, without providing step S14.

In this case, in response to the drawing request, the measured values of each of the plurality of parameters stored in the memory unit 29 are plotted in the order in which they were stored, graphed (step S15), and a graph of the plurality of parameters is displayed. (Step S16), processing ends. As a result, as shown in FIG. 7(b) , changes over time of the measured values of a plurality of parameters stored in the memory unit 29 are displayed as a graph, and the substrate processing state can be confirmed.

In the conventional graphing process, the measured values stored in the memory unit 29 are the same as the measured values of each parameter stored in the monitor data file 128, and all of the sampled measured values are plotted on a graph. For this reason, the processing load of plotting and graphing in the order of sampling is high, and graphing takes time. Particularly, in recent years, the number of parameters is enormous, and the load of the graphing process is higher.

Further, in the conventional graphing process, since measured values of a plurality of parameters accumulated in the monitor data file 128 are stored in the memory unit 29 as they are, the memory usage is large. In particular, in recent years, the number of parameters is vast, and the amount of memory used is increasing. Since the memory is used not only for graph drawing but also for other processes, if the amount of memory consumed by the graphing process increases, other processes are also affected.

As described above, consumption of the CPU 34 and the main memory 33 used for graphing increases. In addition, since the load on the CPU 34 continues in the graphing process, the time required to display the graph on the screen also increases, resulting in degradation of the service.

Therefore, in the graphing process of the present embodiment, consumption of the CPU 34 and main memory 33 used to display graphs of a plurality of parameters is reduced, and the time until graphs are displayed on the screen is shortened. do. Further, graphing processing representing the display method according to the present embodiment includes collection processing shown in FIG. 5 and graphing processing (data processing, drawing processing, etc.) shown in FIG. 8 .

[Graphization of this embodiment]

Next, processing for graphing measured values according to the present embodiment will be described with reference to FIGS. 8 and 9 . 8 is a diagram showing an example of a flow of graphing processing of measured values according to an embodiment. Fig. 9 is a diagram for explaining graphing processing and graph display of measured values according to an embodiment.

In this process, first, it is determined whether the drawing request unit 26 has transitioned to the drawing request screen (step S21). When the rendering request unit 26 determines that it has transitioned to the rendering request screen, the data processing unit 24 determines the measured value for each parameter based on the predetermined rule for a plurality of parameters stored in the monitor data file 128. Extract points of change. The data processing unit 24 associates the extracted measurement value of the change point with the sampling number and stores it in the memory unit 29 (step S22). However, the data processing unit 24 may store the extracted measurement value of the change point and the measurement value sampled immediately before the measurement value in the memory unit 29 in association with the sampling number.

For example, as shown in FIG. 9 , when the drawing request screen 136 is displayed on the display 36, the drawing request unit 26 outputs an instruction signal instructing the start of the process of extracting the measurement value. do. When the data processing unit 24 receives an instruction signal instructing the start of the process of extracting the measurement values, each parameter (A: pressure measurement value, B) stored in the monitor data file 128 shown in FIG. : gas flow rate measurement value, C: temperature measurement value...), the change point of the measurement value is extracted. Then, the data processing unit 24 associates the extracted measured value of the change point with the sampling number and stores it in the memory unit 29. In addition, the first measurement value and the last measurement value of the sampling period composed of a plurality of cycles are unconditionally stored in the memory unit 29 . In this way, for example, in the pressure measurement value of A, the points of change with sampling numbers 1, 3, and 6 are extracted. Then, the measured values "7", "10", and "11" of the extracted points of change are stored in the memory unit 29 in association with the sampling numbers "1", "3", and "6". Further, in the present embodiment, the measured values "7" and "10" of the sampling numbers "2" and "5" immediately before the extracted change point are also associated with the sampling numbers "2" and "5", and the memory unit 29 ) is remembered. Measurement values are similarly extracted for the gas flow measurement value of B and the temperature measurement value of C.

As a result, as shown in (b) of FIG. 9 , the pressure measurement value and the temperature measurement value of sampling number “4” are substantially discarded and are not stored in the memory unit 29 . Therefore, the data stored in the memory unit 29 is smaller than the measurement values of each parameter stored in the monitor data file 128, and the amount of use of the memory unit 29 can be reduced.

Next, the drawing request unit 26 determines whether or not there is a drawing request (step S23). For example, when the operator does not press the “Yes” button 136a of the drawing request screen 136 shown in FIG. 9 (Step S23 “No”) and the preset time elapses (Step S24), this process quit If the “Yes” button 136a on the drawing request screen 136 is pressed before the predetermined time elapses, the drawing request unit 26 determines that there has been a drawing request, and instructs the start of the drawing process of the extracted measurement values. outputs an instruction signal. In addition, you may make it return before step S23 in the case of "No" in step S23 so that a standby state may continue until the button 136a is pressed, without providing step S24.

When the drawing unit 25 receives an instruction signal instructing the start of the rendering process, the measured value extracted by the data processing unit 24 is sampled from the sampling number calculated based on equation (1) or equation (1'). It is plotted according to time and made into a graph (step S25). The display unit 27 displays graphs of a plurality of parameters (step S26) and ends the processing. For example, plot the measured value for each parameter according to the sampling time calculated from the sampling number associated with the measured value in the memory unit 29 of FIG. do. Accordingly, as shown in (c) of FIG. 9 , measured values of a plurality of parameters stored in the memory unit 29 are displayed as a graph, and the state of substrate processing or the like can be confirmed. The graph shown in Fig. 9(c) has the same display as the graph of the conventional example shown in Fig. 7(c).

As described above, in the graphing process of measured values according to the present embodiment, points of change in the measured values of each parameter stored in the monitor data file 128 are extracted, and the measured values of the points of change are stored in the memory unit 29. remember Alternatively, the point of change of the measured value of each parameter stored in the monitor data file 128 is extracted, and the measured value of the point of change and the measured value sampled immediately before that point are stored in the memory unit 29 .

In this way, while the measured values do not change, the measured values during that time can be discarded without being stored in the memory unit 29 as data unnecessary for graphing. That is, since the sampled measurement value is displayed as a horizontal straight line on the graph while the same value continues, the measurement value other than the measurement value at the change point or the measurement value other than the measurement value at the change point and the measurement value immediately before it is displayed on the graph. It becomes redundant data. Therefore, in the present embodiment, measurement values for graphing are reduced by not storing measurement values determined as unnecessary data in the memory unit 29 . As a result, memory usage for graphing can be reduced.

In addition, compared to the prior art, by reducing the number of measurement values stored in the memory unit 29, the number of points of measurement values plotted in the graph is reduced, and the load on the CPU 34 that performs processing for graphing can be reduced. , the time required to draw and display the graph can be shortened. Further, in order to calculate the time at which the measured value was sampled, a sampling number is stored in the memory unit 29 in association with the measured value. In this way, for example, the sampling time of the measuring unit stored in the memory unit 29 can be calculated, and the measured value can be plotted according to the sampling time, so that the time change of the measured value can be graphed.

In addition, the measurement value immediately before the measurement value of the change point may be memorized or may not be memorized. In the case of storing the measured value immediately before the change point in the memory unit 29 together with the measured value at the point of change, a graph may be formed according to a graphing rule in which plotted adjacent measured values are connected with a straight line.

In the case of storing only the measured values of the changing point in the memory unit 29, a horizontal straight line is drawn from the measured value of the immediately preceding changing point to the measured value of the next changing point without connecting the plotted adjacent measured values with a straight line, , a graphing rule in which the measured value increases or decreases step by step from the measured value of the next change point may be used. However, the graphing rule is not limited to this, and other rules may be used.

According to the display method according to the present embodiment described above, the measured values stored in the memory unit 29 can be compressed. This makes it possible to reduce the number of points to be plotted in graphing measurement values, reduce the load of processing for graphing, and shorten the time required for graphing.

In addition, since measured values of a plurality of parameters accumulated in the monitor data file 128 are compressed and stored in the memory unit 29, the amount of memory used can be reduced.

Further, in the present embodiment, in the monitor data file 128, all measurement values obtained by sampling all parameters are stored, and measurement values of each parameter after changing point extraction are stored in the memory unit 29. However, when the measurement value of each parameter after the change point extraction is stored in the monitor data file 128 and an instruction signal instructing the start of the process of extracting the measurement value is received, the change point stored in the monitor data file 128 The measured value of each parameter after extraction may be graphed and displayed. Alternatively, the data in the monitor data file 128 may be updated based on the measured values stored in the memory unit 29. In this way, it is possible to compress and store the sampled measurement values and reduce the amount of data storage unit 28 used to store the monitor data file 128 .

It should be considered that the display method and substrate processing apparatus according to the disclosed embodiments are examples in all respects and are not restrictive. The embodiment can be modified and improved in various forms without departing from the appended claims and their main points. The matters described in the above plurality of embodiments can also take other configurations within a range that is not contradictory, and can be combined within a range that is not contradictory.

The substrate processing apparatus of the present disclosure includes an Atomic Layer Deposition (ALD) apparatus, Capacitively Coupled/EPlasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), Helicon Wave Plasma (HWP) is applicable to any type of device.

In addition, although a plasma processing device has been described as an example of a substrate processing device, the substrate processing device may be any device that performs predetermined processing (eg, film forming processing, etching processing, etc.) on a substrate, and is limited to the plasma processing device. it is not going to be

Claims (6)

A display method for displaying a plurality of parameters indicating information related to substrate processing,
acquiring measured values of a plurality of the parameters sampled at a preset cycle and information about a sampling time of the measured values, and storing the information in a data storage unit;
Based on the information on the sampling time of the measured values, measured values in which time changes occurred in the measured values of the plurality of parameters are extracted from the data storage unit in the order of sampling, or the measured values where the time changes occurred and their a step of extracting a measurement value sampled immediately before from the data storage unit;
a step of associating the extracted measured values of a plurality of the parameters with information about sampling time of the measured values and storing them in a memory unit;
a step of drawing measured values of a plurality of the parameters in a graph based on information related to a sampling time of the measured values stored in a memory unit;
Step of displaying the drawn graph
Display method with . The method of claim 1, wherein the information about the sampling time of the acquired measured value is a sampling number of the acquired measured value,
In the step of plotting the graph, the sampling time of the measured values is calculated by multiplying the period by an integer based on the sampling number, and the measured values of a plurality of the parameters are calculated corresponding to the sampling times of the measured values. plotted on a graph,
display method. The method according to claim 1 or 2, comprising a step of associating acquired measured values of a plurality of the parameters with information about sampling times of the measured values and storing them in a data file;
The step of storing in the memory unit associates the measured values of a plurality of the parameters extracted from the measured values of the plurality of parameters stored in the data file with information about the sampling time of the measured values and stores them in the memory unit.
display method. 4. The method according to claim 3, wherein the step of obtaining the measured values samples the measured values of a plurality of the parameters at the cycle during the processing of the substrate, associates a sampling number indicating an order of the sampling, and stores the measured values in the data file. doing,
display method. The method according to claim 1 or 2, further comprising: displaying a screen on which a request for drawing the graph can be made;
and a step of outputting an instruction signal instructing the start of the step of extracting the measured value in response to display on a screen capable of requesting drawing of the graph.
display method. A substrate processing apparatus that performs substrate processing,
an acquisition unit that acquires measurement values of a plurality of parameters sampled at a preset cycle and information about a sampling time of the measurement values;
a data storage unit configured to store measurement values of the plurality of parameters acquired by the acquisition unit and information about a sampling time of the measurement values;
Based on the information on the sampling time of the measured values, measured values in which time changes occurred in the measured values of the plurality of parameters are extracted from the data storage unit in the order of sampling, or the measured values where the time changes occurred and their a data processing unit for extracting a measurement value sampled immediately before from the data storage unit;
a storage unit for associating and storing in a memory unit the extracted measured values of the plurality of parameters and information on the sampling time of the measured values;
a drawing unit that draws measured values of a plurality of the parameters on a graph based on information related to a sampling time of the measured values stored in a memory unit;
Display unit for displaying the drawn graph
Having a substrate processing apparatus.

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