KR20210129554A - Method for refairing display processing parts - Google Patents

Abstract

The present invention relates to a method for reproducing display manufacturing process parts, which corrects flatness while increasing the hardness of the display manufacturing process parts. To this end, the method comprises: a heat treatment and correction step of naturally cooling display manufacturing process parts while performing primary heat treatment and first correcting flatness along with the heat treatment; a hardening heat treatment step of increasing hardness by hardening heat treatment of the display manufacturing process parts after the heat treatment and correction step; a reproducing step of performing reproduction by removing a process film or process contaminants attached to the display manufacturing process parts; a step of secondarily correcting the flatness of the display manufacturing process parts without heat treatment; and a step of rinsing and drying the display manufacturing process parts.

Description

Method for refairing display processing parts

The present invention relates to a method for reproducing display manufacturing process components, and more particularly, to a method for reproducing display manufacturing process components for correcting flatness while improving hardness of display manufacturing process components.

When a diffuser is used in the CVD manufacturing process of manufacturing a display, it is generally manufactured in a large size using an aluminum material, and numerous internal through holes are formed. or sagging) or easily deformed, causing process failure of non-uniform deposition on the glass substrate.

While improving the strength or hardness of the diffuser used in the CVD manufacturing process of manufacturing a display, there is a demand for technology development regarding a regeneration method for correcting and reusing a diffuser that has been warped due to long-term use.

Republic of Korea Patent Publication No. 10-1852937 (Title of the invention: rapid cooling device and heat treatment oven system having the same) Japanese Patent Application Laid-Open No. 2010-236006 (Title of Invention: Regeneration heat treatment method of metal member)

Accordingly, the present invention was created to solve the above-described problems, and an object of the present invention is to provide an invention capable of correcting flatness while improving the strength of a diffuser that needs to be regenerated after long-term use.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

The above-described object of the present invention is to naturally cool the display manufacturing process parts while primary heat treatment, and after the heat treatment and calibration step, heat treatment and calibration step to first correct flatness along with heat treatment, hardening heat treatment for display manufacturing process parts A curing heat treatment step to improve hardness by It can be achieved by providing a method of regenerating a display manufacturing process component, characterized in that it comprises the steps of rinsing and drying.

In addition, the hardening heat treatment step,

The hardening heat treatment is performed by sequentially performing heat treatment and cooling according to preset temperature conditions and time conditions.

In addition, the hardening heat treatment step,

The first heat treatment of the display manufacturing process parts according to a higher temperature condition and a preset time condition than the temperature condition in the heat treatment and calibration step;

After the first heat treatment step, rapidly cooling the display manufacturing process parts according to a preset temperature condition and a time condition shorter than the time condition in the first heat treatment step;

After the rapid cooling step, a second heat treatment step of the display manufacturing process component according to a lower temperature condition and a longer time condition than the temperature condition in the first heat treatment step is included.

In addition, before the first heat treatment step,

The method further includes fixing the component to the upper surface of the thermal shock mitigating member made of a material stronger than the strength of the component so as to be able to flow in order to alleviate the thermal shock of the component in the display manufacturing process.

In addition, the heat treatment and calibration step naturally cools the parts while heat-treating them according to the temperature condition of 400 to 450 degrees Celsius,

In the first heat treatment step, the parts are first heat treated according to the temperature condition of 500 ~ 550 degrees Celsius and the time condition of 2 ~ 4 hours,

In the secondary heat treatment step, the parts are subjected to secondary heat treatment according to a temperature condition of 160 to 220 degrees Celsius and a time condition of 12 to 20 hours.

In addition, the rapid cooling step,

The parts are rapidly cooled by spraying nitrogen gas for 20 to 60 minutes under the control of the gas supply controller to the parts placed on the thermal shock mitigating member in the enclosed space.

In addition, the rapid cooling step,

The parts are rapidly cooled by spraying air for 30 minutes to 1 hour under the control of the air supply controller to the parts placed on the thermal shock mitigating member in the enclosed space.

In addition, the rapid cooling step,

The parts placed on the thermal shock absorbing member are immersed in water for 5 to 10 minutes to rapidly cool the parts.

On the other hand, it is an object of the present invention, in the display manufacturing process part curing heat treatment apparatus used in the display manufacturing process part reproduction method, the display manufacturing process part and the thermal shock mitigating member for alleviating the thermal shock of the component is disposed inside a sealed environment It includes a hardening heat treatment body to be cured, a heat treatment unit for heat-treating the parts under preset temperature conditions and time conditions, and a cooling unit for cooling the heat-treated parts under preset temperature conditions and time conditions, heat treatment according to preset temperature conditions and time conditions And it can be achieved by providing a hardening heat treatment apparatus for a display manufacturing process component, characterized in that the hardening heat treatment of the component by performing the cooling sequentially.

In addition, the heat treatment unit,

A heating wire portion provided on at least one surface of the hardening heat treatment body portion and heated to a predetermined temperature during heat treatment;

a heating wire controller for controlling the heating wire part;

It measures the heating time of the heating wire part, and includes a heating wire timer for transmitting the measurement time to the heating wire controller.

In addition, the cooling unit,

A gas cooling unit that cools the parts by spraying nitrogen gas,

An air cooling unit that cools the parts by spraying air, and

at least one cooling part of the water cooling part which cools the part by water.

In addition, the gas cooling unit,

A gas injection nozzle unit provided in the circumferential direction of the hardening heat treatment body so that nitrogen gas is injected inside when cooling;

a gas storage unit for storing nitrogen gas;

A gas supply control unit for controlling the injection amount or injection pressure of the nitrogen gas injected to the gas injection nozzle unit;

A gas line unit for supplying nitrogen gas by connecting and connecting the gas storage unit and the gas injection nozzle unit;

and a gas timer for measuring the supply time of nitrogen gas and transmitting the measured time to the gas supply control unit.

In addition, the air cooling unit,

An air spray nozzle part provided in the circumferential direction of the hardening heat treatment body so that air is sprayed inside when cooling;

Air storage for storing air,

an air supply control unit that adjusts the injection amount or injection pressure of the air injected into the air injection nozzle unit;

An air line unit for supplying air by connecting and connecting the air storage unit and the air jet nozzle unit,

It measures the air supply time, and includes an air timer unit for transmitting the measured time to the air supply control unit.

In addition, the water cooling unit,

A water tank in which a predetermined amount of water is stored and the upper part is opened and closed,

and a towing unit for pulling the parts and the thermal shock mitigating member from the upper side of the water tank to the lower side and immersing them in water.

In addition, the hot wire control unit controls the hot wire to perform the primary heat treatment of the parts according to a temperature condition of 500 to 550 degrees Celsius and a time condition of 2 hours to 4 hours,

After the primary heat treatment, the gas supply control unit rapidly cools the parts by spraying nitrogen gas into the hardening heat treatment body for 20 to 60 minutes through the gas injection nozzle unit,

After rapid cooling, the hot wire control unit controls the hot wire to perform secondary heat treatment of the parts according to a temperature condition of 160 to 220 degrees Celsius and a time condition of 12 hours to 20 hours.

In addition, the hot wire control unit controls the hot wire to perform the primary heat treatment of the parts according to a temperature condition of 500 to 550 degrees Celsius and a time condition of 2 hours to 4 hours,

After the primary heat treatment, the air supply control unit rapidly cools the parts by spraying air into the hardening heat treatment body for 30 minutes to 1 hour through the air injection nozzle unit,

After rapid cooling, the hot wire control unit controls the hot wire to perform secondary heat treatment of the parts according to a temperature condition of 160 to 220 degrees Celsius and a time condition of 12 hours to 20 hours.

In addition, the hot wire control unit controls the hot wire to perform the primary heat treatment of the parts according to a temperature condition of 500 to 550 degrees Celsius and a time condition of 2 hours to 4 hours,

After the first heat treatment, the parts are rapidly cooled by immersing them in a water bath for 5 to 10 minutes,

After rapid cooling, the hot wire control unit controls the hot wire to perform secondary heat treatment of the parts according to a temperature condition of 160 to 220 degrees Celsius and a time condition of 12 hours to 20 hours.

In addition, in order to alleviate the thermal shock of the component, the component is fixed to the upper surface of the thermal shock mitigating member made of a material having a strength stronger than the strength of the component so as to be able to flow.

According to the present invention as described above, it is possible to provide an invention capable of correcting flatness while improving the strength of a diffuser that needs to be regenerated after long use.

The following drawings attached to this specification illustrate a preferred embodiment of the present invention, and serve to further understand the technical spirit of the present invention together with the detailed description of the present invention, so the present invention is limited to the matters described in those drawings It should not be construed as being limited.
1 is a view sequentially showing the overall procedure for a diffuser reproduction method according to an embodiment of the present invention,
2 is a view sequentially showing the hardening heat treatment step in more detail according to an embodiment of the present invention,
3 is a block diagram showing the configuration of a hardening heat treatment unit capable of simultaneously implementing heat treatment and rapid cooling according to an embodiment of the present invention, and is a view showing the supply of _{N 2 gas;}
4 is a block diagram showing the configuration of a hardening heat treatment unit capable of simultaneously implementing heat treatment and rapid cooling according to an embodiment of the present invention, and is a view showing the supply of air;
5 is a diagram illustrating cooling using water during rapid cooling according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, one embodiment described below does not unreasonably limit the content of the present invention described in the claims, and it cannot be said that the entire configuration described in the present embodiment is essential as a solution for the present invention. In addition, descriptions of the prior art and matters obvious to those skilled in the art may be omitted, and the description of the omitted components (methods) and functions may be sufficiently referenced within the scope not departing from the technical spirit of the present invention.

(How to play the diffuser)

A diffuser regeneration method according to an embodiment of the present invention relates to a regeneration method for correcting and reusing a diffuser that has been warped due to long-term use while improving the strength or hardness of a diffuser used in a CVD manufacturing process. When a diffuser is used in the CVD manufacturing process of manufacturing a display, it is generally manufactured in a large size using an aluminum material. Therefore, when used for a long time, as the strength of aluminum gradually decreases, bending (or sagging) occurs, resulting in a glass substrate. On the non-uniform deposition causes process defects. Therefore, a regeneration method for reusing the diffuser causing such a process defect will be described in detail below with reference to the accompanying drawings. However, in the present invention, the regeneration of the diffuser will be described as an embodiment, but it may be applied to all parts for improving hardness and improving flatness as a part used for display or semiconductor manufacturing process as well as for regeneration of the diffuser.

First, referring to FIG. 1 , a heat treatment and a first calibration step of first correcting flatness are performed while naturally cooling the diffuser 11 to be reused by heat treatment. In the case of heat treatment, stress relief heat treatment is performed to relieve the stress of the diffuser under temperature conditions of 400 to 450 degrees Celsius and preset time conditions, and at the same time as heat treatment, the flatness of the diffuser is first corrected using a press. At this time, the cooling method is natural cooling. However, after the heat treatment, the hardness of the diffuser deteriorates, so the following hardening heat treatment step is performed.

Next, a curing heat treatment step of improving the hardness of the diffuser is performed by curing and heat treating the reusable diffuser that has been heat treated and the first calibration is completed. In the hardening heat treatment step, a first heat treatment step (solution heat treatment step), a rapid cooling step, and a second heat treatment step (aging treatment step) are sequentially performed. When the hardening heat treatment step is described in more detail with reference to FIG. 2,

In the curing heat treatment step, first, a step of fixing the reusable diffuser 11 so as to be movable on the diffuser pedestal (thermal shock mitigating member 12) supporting the reusable diffuser 11 is performed. The diffuser pedestal 12 supports and supports the diffuser to prevent sagging of the diffuser during heat treatment and cooling. it is for At this time, the diffuser pedestal 12 is preferably made of a special steel material or steel material that is insensitive to thermal deformation, which has better strength than an aluminum diffuser, and the flatness before heat treatment is close to "0", that is, a reusable diffuser ( It is preferable to use a diffuser stand with better flatness than 11). On the other hand, it is preferable that the reusable diffuser 11 is fixed to the diffuser pedestal 12 so as to be movable. If it is fixed so that it does not flow, there is a problem in that bending or deformation occurs in the diffuser due to thermal expansion due to heat treatment and cooling treatment.

After the curing heat treatment step, after the reuse diffuser 11 is movably fixed to the diffuser pedestal 12, the primary curing heat treatment is performed under a temperature condition of 500 to 550 degrees Celsius and a time condition of 2 hours to 4 hours. do. In this case, it is preferable to maintain it for 3 hours. In the primary hardening heat treatment, a uniform single-phase solid solution is obtained by heating the diffuser to a temperature above the solrus line for a sufficient time while dissolving the diffuser into a solid solution.

After the curing heat treatment step, a step of rapidly cooling the reuse diffuser 11 under a preset temperature condition and time condition is performed after the primary curing heat treatment is performed. Rapid cooling in this step means rapid cooling relatively faster than the natural cooling heat treatment and the first calibration step described above, and rapid cooling is performed in three ways. The first rapid cooling method is a method of cooling the diffuser 11, which has been subjected to primary curing heat treatment, by immersing it in water for 5 to 10 minutes. The second rapid cooling method is a method of cooling by spraying air for 30 minutes to 1 hour. The third rapid cooling method is a method of cooling by spraying _{N 2 gas for 20 to 60 minutes.} A detailed description of each rapid cooling method will be described later. According to each rapid cooling method, the diffuser is cooled to 40 to 100°C, preferably to 50°C or less. A reusable diffuser that has completed rapid cooling is called a supersaturated solid solution.

After the hardening heat treatment step, a secondary hardening heat treatment is performed under a temperature condition of 160 to 220°C and a time condition of 12 hours to 20 hours. When the supersaturated solid solution is heated to a temperature below the solid solution limit line and maintained for a certain period of time, a precipitate is formed.

As described above, there is an advantage that the hardness of 200HL level can be improved up to 350HL by hardening the diffuser with lower hardness after the heat treatment and the first calibration step.

Next to the curing heat treatment step, a step of detaching the reuse diffuser 11 from the diffuser pedestal 12 is performed.

Continuing the description with reference to FIG. 1 , after performing the curing heat treatment step, a regeneration treatment step of removing the process film (AlF) or process contaminants attached to the reuse diffuser 11 or a peeling and cleaning process step is performed.

Next, without heat treatment, using a press to straighten the bending of the reused diffuser to perform a second correction of flatness.

Next, the steps of rinsing and drying the reusable diffuser 11 are performed.

(Configuration and function of the diffuser playback device)

A curing heat treatment apparatus for performing the curing heat treatment step described in the above-described diffuser regeneration method will be described below with reference to the accompanying drawings 3 to 5 .

FIG. 3 illustrates the _{use of N 2} gas during rapid cooling, and FIG. 4 illustrates the use of air during rapid cooling. _{Therefore, only the N 2} gas of FIG. 3 will be described and the air of FIG. 4 will be replaced therewith.

As shown in FIG. 3 , the hardening heat treatment apparatus is a device for implementing the hardening heat treatment method described above, and the diffuser 11 and the diffuser pedestal 12 are placed in the sealed hardening heat treatment unit 100 and the diffuser 110 Heat treatment and rapid cooling are all done in one space. The diffuser 11 is preferably fixed by the flow fixing part 12a on the diffuser pedestal 12 to prevent deformation even by thermal expansion.

In the hardening heat treatment unit 100, the hot wire parts 111 are arranged at regular intervals in the circumferential direction, and the hot wire part 111 is controlled by the hot wire control unit 112 to generate heat, so that the temperature in the hardening heat treatment unit 100 is adjusted. do. The hot wire control unit 112 adjusts the hot wire unit 111 so that the temperature in the hardening heat treatment unit 100 is 500 to 550 degrees Celsius during the primary hardening heat treatment, and 160 to 220 degrees Celsius during the secondary hardening heat treatment. Adjust the heating wire part 111 so that the temperature of The hot wire timer unit 113 measures the first and second hardening heat treatment times, and when a preset time has come, it notifies the hot wire control unit 112 .

A plurality of gas injection nozzle units 121a, 121b, 121c, and 121d are disposed in the circumferential direction of the hardening heat treatment unit 100 for rapid cooling, and the N ₂ gas supplied from the gas storage unit 123 is supplied to each gas injection nozzle. A plurality of gas line parts 122a, 122b, 122c, and 122d supplied to the part are connected and connected to each gas injection nozzle part. The gas storage unit 123 adjusts and supplies a gas supply amount to each of the plurality of gas line units according to the control of the gas supply control unit 124 . At this time, it is preferable that the N ₂ gas and to be injected from all directions at the same time the same amount of N ₂ gas to the same pressure from the spray nozzle unit in the hardening heat treatment section 100 is to be supplied to the interior. Accordingly, each of the gas injection nozzle unit and the gas line unit preferably has the same configuration. The gas timer unit 125 _{measures the supply time of the N 2} gas, and when the preset time is reached, the gas timer unit 125 transmits it to the gas supply control unit 124 to stop the supply of _{the N 2 gas.}

Meanwhile, if necessary, the injection direction and the injection amount of the gas injection nozzle unit may be controlled by the gas supply control unit 124 .

A temperature measuring unit 101 capable of measuring an internal temperature may be disposed in the above-described hardening heat treatment unit 100 , and the temperature measuring unit 101 is configured to mutually interact with the hot wire control unit 112 and the gas supply control unit 124 . A more precise temperature control may be possible by connecting and connecting to measure the heat treatment temperature and the rapid cooling temperature and provide them.

In _{addition to the method of rapid cooling with N 2} gas or air, as shown in FIG. 5 , the diffuser 11 heat-treated in the water of the water tank 141 may be cooled by immersion using the traction wires 142a and 142b. A certain amount of water is stored in the water tank 141 shown in FIG. 5 , and after the first curing heat treatment is performed in the curing heat treatment unit 100 described above, the diffuser 11 and the diffuser stand 12 are immersed in water to rapidly Cool down. At this time, it is preferable to first immerse the diffuser pedestal 12 in water in order to alleviate the thermal shock to alleviate the thermal shock, and secondarily so that the diffuser 11 is immersed in water.

In the description of the present invention, the description may be omitted for matters obvious to those skilled in the art and those skilled in the art, and the description of these omitted components (methods) and functions will be sufficiently referenced within the scope not departing from the technical spirit of the present invention. will be able In addition, the above-described components of the present invention have been described for convenience of description of the present invention, and components not described herein may be added within a range that does not depart from the technical spirit of the present invention.

The description of the configuration and function of each part has been described separately for convenience of description, and if necessary, any configuration and function may be implemented by being integrated into other components, or may be implemented in more subdivision.

As mentioned above, although it has been described with reference to one embodiment of the present invention, the present invention is not limited thereto, and various modifications and applications are possible. That is, those skilled in the art will readily understand that many modifications are possible without departing from the gist of the present invention. In addition, if it is determined that the detailed description of the known functions related to the present invention and its configuration or the coupling relationship for each configuration of the present invention may unnecessarily obscure the gist of the present invention, it should be noted that the detailed description is omitted. something to do.

11: Reusable Diffuser
12 : Reusable Diffuser Base
12a: floating fixing part
100: hardening heat treatment unit
101: temperature measurement unit
110: heat treatment unit
111: heated wire
112: heating wire control unit
113: hot wire timer unit
120: gas cooling unit
121a: first gas injection nozzle unit
121b: second gas injection nozzle unit
121c: third gas injection nozzle unit
121d: fourth gas injection nozzle unit
122a: first gas line part
122b: second gas line part
122c: third gas line part
122d: fourth gas line part
123: gas storage unit
124: gas supply control unit
125: gas timer unit
130: air cooling unit
131a: first air injection nozzle unit
131b: second air injection nozzle unit
131c: third air injection nozzle unit
131d: fourth air injection nozzle unit
132a: first air line unit
132b: second air line unit
132c: third air line unit
132d: fourth air line unit
133: air storage unit
134: air supply control unit
135: air timer unit
140: water cooling unit
141: water tank
142a: first traction wire
142b: second traction wire

Claims (8)

Heat treatment and calibration step of naturally cooling the display manufacturing process parts while primary heat treatment, and first correcting flatness along with heat treatment;
After the heat treatment and calibration step, a hardening heat treatment step of improving hardness by hardening heat treatment of the display manufacturing process part;
Recycling by removing the process film or process contaminants attached to the display manufacturing process parts;
Secondary calibration of flatness of display manufacturing process parts without heat treatment;
and rinsing and drying the display manufacturing process component.
The method of claim 1,
The curing heat treatment step,
A method of reproducing display manufacturing process components, characterized in that curing heat treatment is performed by sequentially performing heat treatment and cooling according to preset temperature conditions and time conditions.
3. The method of claim 2,
The curing heat treatment step,
The first heat treatment of the display manufacturing process parts according to a higher temperature condition and a preset time condition than the temperature condition in the heat treatment and calibration step;
After the first heat treatment step, rapidly cooling the display manufacturing process part according to a preset temperature condition and a time condition shorter than the time condition in the first heat treatment step;
After the rapid cooling step, the display manufacturing process component comprising the step of secondary heat treatment of the display manufacturing process component according to a lower temperature condition and a longer time condition than the temperature condition in the first heat treatment step. How to play.
4. The method of claim 3,
Before the first heat treatment step,
Display manufacturing process part characterized in that it further comprises the step of fixing the component to the upper surface of the thermal shock mitigating member made of a material stronger than the strength of the component so as to be able to flow in order to alleviate the thermal shock of the component in the display manufacturing process How to play.
5. The method of claim 4,
The heat treatment and calibration step naturally cools the parts while heat-treating them according to a temperature condition of 400 to 450 degrees Celsius,
In the first heat treatment step, the parts are subjected to a first heat treatment according to a temperature condition of 500 to 550 degrees Celsius and a time condition of 2 hours to 4 hours,
The secondary heat treatment step is a method of reproducing display manufacturing process parts, characterized in that the secondary heat treatment of the parts according to a temperature condition of 160 ~ 220 ℃ and a time condition of 12 hours ~ 20 hours.
5. The method of claim 4,
The rapid cooling step is
A method of reproducing a display manufacturing process component, characterized in that the component is rapidly cooled by spraying nitrogen gas for 20 to 60 minutes under the control of the gas supply control unit to the component placed on the thermal shock mitigating member in an enclosed space.
5. The method of claim 4,
The rapid cooling step is
A method for reproducing a display manufacturing process component, characterized in that the component is rapidly cooled by spraying air to the component placed on the thermal shock mitigating member in an enclosed space for 30 minutes to 1 hour under the control of the air supply control unit.
5. The method of claim 4,
The rapid cooling step is
A method of reproducing a display manufacturing process component, characterized in that the component placed on the thermal shock mitigating member is immersed in water for 5 to 10 minutes to rapidly cool the component.

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