KR20210102478A - 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법 - Google Patents

진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법 Download PDF

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Publication number
KR20210102478A
KR20210102478A KR1020217025124A KR20217025124A KR20210102478A KR 20210102478 A KR20210102478 A KR 20210102478A KR 1020217025124 A KR1020217025124 A KR 1020217025124A KR 20217025124 A KR20217025124 A KR 20217025124A KR 20210102478 A KR20210102478 A KR 20210102478A
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KR
South Korea
Prior art keywords
vacuum pump
pump
pumping
pumping system
auxiliary
Prior art date
Application number
KR1020217025124A
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English (en)
Korean (ko)
Inventor
디디에 뮐러
장-에릭 라르쉐
테오도르 일쉐브
Original Assignee
아뜰리에 부쉬 에스.아.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51627293&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR20210102478(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 아뜰리에 부쉬 에스.아. filed Critical 아뜰리에 부쉬 에스.아.
Publication of KR20210102478A publication Critical patent/KR20210102478A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F04C11/003—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/16—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
KR1020217025124A 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법 KR20210102478A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020177011372A KR20170063839A (ko) 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법
PCT/EP2014/070691 WO2016045753A1 (fr) 2014-09-26 2014-09-26 Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020177011372A Division KR20170063839A (ko) 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법

Publications (1)

Publication Number Publication Date
KR20210102478A true KR20210102478A (ko) 2021-08-19

Family

ID=51627293

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020177011372A KR20170063839A (ko) 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법
KR1020217025124A KR20210102478A (ko) 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020177011372A KR20170063839A (ko) 2014-09-26 2014-09-26 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법

Country Status (15)

Country Link
US (1) US20170298935A1 (fr)
EP (1) EP3198148B1 (fr)
JP (1) JP2017531125A (fr)
KR (2) KR20170063839A (fr)
CN (1) CN107002680A (fr)
AU (1) AU2014406724B2 (fr)
BR (1) BR112017005927B1 (fr)
CA (1) CA2961977A1 (fr)
DK (1) DK3198148T3 (fr)
ES (1) ES2780873T3 (fr)
PL (1) PL3198148T3 (fr)
PT (1) PT3198148T (fr)
RU (1) RU2670640C9 (fr)
TW (1) TWI725943B (fr)
WO (1) WO2016045753A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
BE1027005B9 (nl) 2019-01-30 2020-10-19 Atlas Copco Airpower Nv Werkwijze voor de sturing van een compressor naar een onbelaste toestand
FR3094762B1 (fr) 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8816875U1 (fr) * 1987-12-21 1991-04-11 Werner Rietschle Maschinen- Und Apparatebau Gmbh, 7860 Schopfheim, De
DE3842886A1 (de) * 1987-12-21 1989-07-06 Rietschle Masch App Vakuumpumpstand
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JP3723987B2 (ja) * 1992-09-03 2005-12-07 松下電器産業株式会社 真空排気装置及び方法
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
DE10131516B4 (de) * 2001-07-02 2004-05-06 Boehringer Ingelheim Pharma Gmbh & Co. Kg Steuereinheit zur Flussregulierung
JP4045362B2 (ja) * 2001-09-06 2008-02-13 株式会社アルバック 多段式容積移送型ドライ真空ポンプ
KR100876318B1 (ko) 2001-09-06 2008-12-31 가부시키가이샤 아루박 진공배기장치 및 진공배기장치의 운전방법
JP3992176B2 (ja) 2001-10-26 2007-10-17 株式会社アルバック 真空排気方法および真空排気装置
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
JP4745779B2 (ja) * 2005-10-03 2011-08-10 神港精機株式会社 真空装置
JP5438279B2 (ja) * 2008-03-24 2014-03-12 アネスト岩田株式会社 多段真空ポンプ及びその運転方法
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
GB2509182A (en) * 2012-12-21 2014-06-25 Xerex Ab Vacuum ejector with multi-nozzle drive stage and booster

Also Published As

Publication number Publication date
RU2670640C1 (ru) 2018-10-24
AU2014406724A1 (en) 2017-04-13
TW201623801A (zh) 2016-07-01
RU2670640C9 (ru) 2018-12-04
CA2961977A1 (fr) 2016-03-31
WO2016045753A1 (fr) 2016-03-31
EP3198148A1 (fr) 2017-08-02
CN107002680A (zh) 2017-08-01
PL3198148T3 (pl) 2020-08-10
EP3198148B1 (fr) 2020-02-26
JP2017531125A (ja) 2017-10-19
TWI725943B (zh) 2021-05-01
US20170298935A1 (en) 2017-10-19
KR20170063839A (ko) 2017-06-08
DK3198148T3 (da) 2020-04-06
AU2014406724B2 (en) 2019-09-19
BR112017005927A2 (pt) 2017-12-19
BR112017005927B1 (pt) 2022-07-12
ES2780873T3 (es) 2020-08-27
PT3198148T (pt) 2020-04-02

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