KR20210084247A - A method for removing an end piece and an apparatus for processing a substrate - Google Patents

Abstract

Provided are a method for removing an end part and an apparatus thereof, which can inhibit the generation of scratches on a broken end surface or defective products. Provided is a method for removing, from a substrate (M), an edge part (2) recessed inward from an edge of the substrate. The method for removing an end part comprises: a first step for processing a boundary scribe line (S) which is a boundary line between a product part (1) and the edge part (2); a second step of allowing a pressing roller (4) having a flat circumferential surface to describe a trajectory (K) that repeatedly approaches and leaves the boundary scribe line (S) along the vicinity of the boundary scribe line (S) on a surface at a side of the edge part (2) while pressing the pressing roller (4) to advance so that the boundary scribe line (S) is pre-broken or fragile; and a third step of removing the edge part (2) by pulling the edge part (2) in the direction away from the product part (1).

Description

A method for removing the edge part and a substrate processing apparatus {A METHOD FOR REMOVING AN END PIECE AND AN APPARATUS FOR PROCESSING A SUBSTRATE}

The present invention relates to a method and a substrate processing apparatus for separating and removing a recessed edge portion from a substrate made of a brittle material such as glass.

Generally, when cutting the unit board|substrate used as a product from the board|substrate used as a base material, it is necessary to separate and remove an unnecessary end material part (for example, refer patent document 1). Usually, in order to separate the edge part, the scribe line serving as the boundary line between the substrate and the edge part is processed with a cutter wheel or a laser, and then the edge part is bent or pulled in the separation direction to separate it from the unit substrate.

As shown in Fig. 1, in a unit substrate used as a product (hereinafter referred to as a product portion), a trapezoidal depression 3 in which the width of the inner portion is sequentially narrowed is provided on the end edge 1a of the product portion 1 there is something In this case, conventionally, as shown in FIG. 6 , a trapezoidal scribe line S serving as an edge boundary line is processed with a cutter wheel on the substrate M before formation of the recess, and then the edge part 2 is applied to the substrate M with a chuck or the like. Many methods have been employed in which the end material part 2 is removed from the product part 1 by pulling it in the direction to be removed.

The scribe line S normally formed by the cutter wheel is formed by a lip mark appearing as a trace of the cutter wheel digging, and a vertical crack penetrating from the lip mark toward the thickness direction of the substrate. The depth of the vertical crack is usually 80 to 95% of the thickness of the substrate, and a part in the thickness direction remains unseparated. Therefore, when the end material portion 2 divided by the trapezoidal scribe line S is separated by the above-mentioned processing means such as pulling, the divided cross-section portion of the product portion 1 is distorted, missing, torn, etc. In some cases, there is a problem that the processing quality is greatly reduced. In particular, this phenomenon frequently occurs due to the rubbing between the divided end surfaces in the left and right side portions of the trapezoid shape.

Therefore, instead of the above means, as shown in Figs. 10 and 11, a scribe line S4 for dividing an edge extending obliquely into a trapezoidal edge part 2 is machined, and the edge part is divided into a plurality of parts and sequentially from the front edge part. There is also known a method of dispersing the stress at the time of division applied to the boundary scribe line of the substrate and the edge part by removing the scribe line, thereby alleviating the occurrence of scars in the divided section.

Moreover, in the product part, as shown in FIG. 2, there exists a thing which has the recessed part 23 opened in the end edge 21a of the product part 21 in a U-shape. In this case, as shown in FIG. 12 , a U-shaped scribe line S1 serving as an edge boundary line is processed with a cutter wheel on the substrate M before formation of the recess, and then the edge part 22 is removed, Since the left and right sides of the end material 22 are parallel, simply by grabbing the end material with a chuck or the like and removing it in the separation direction, the left and right sides of the end material and the dividing surface of the product portion 1 adjacent thereto rub against each other. In some cases, scars such as warping, missing, or irregular cracks in the horizontal direction may occur, and there is a problem that the yield is poor.

Therefore, as shown in Fig. 13, the present inventors divide the end material 22 into three end material members as follows by the division scribe lines S2 and S3, and sequentially separate and remove the end material member from the front end material member. method was tried.

That is, it is an isosceles triangle in which a part of the end edge 22a released from the edge part 22 is a bottom edge, the vertex angle is 90°, and the top of the triangle is in the inner part of the edge part 22 . The edge member 22A separated by the scribe line S1 for division formed so as to be positioned, and the edge member other than the triangular edge member are separated from the edge of the triangle by a boundary scribe line parallel to the edge 22a from the vicinity of the top of the triangle. It is divided into three end members of the left and right two end members 20B and 20C separated by a scribe line S3 for division extending obliquely to S1. Then, after pulling and removing the triangular edge member 22A on the front side, the edge member 22B on the left is pulled away from the product part 1, that is, in the direction of the arrow, and removed, and finally, the remaining edge member 22C ) was tried to remove by pulling in the direction of the arrow.

Japanese Patent Publication No. 5374545

However, even if the edge part is divided into a plurality of pieces as described above, since the penetration depth of the vertical crack in the boundary scribe line between the individual edge parts and the product part does not change, the same scars as described above may remain after the division.

Moreover, as shown in FIG. 13, generation|occurrence|production of the above-mentioned scars can be reduced by drawing out end material member 22B and 22C in the oblique direction so that it may become distant from a product part. However, when each end member is separated from each other, it is hard and may be accompanied by an impact. In particular, when the triangular end member 20A is pulled out, the other end members 22B and 22C are entangled and receive a force in the tensile direction. In some cases, it is partially separated from the product part 1, and scars, such as distortion or omission, remain on the product section after removal of the end material in many cases.

Then, in view of the said subject, an object of this invention is to provide the novel method and apparatus which can separate and remove the dented end material part from a product part in the state which suppressed generation|occurrence|production of scars, such as distortion and missing|missing.

In order to solve the above problems, in one aspect of the present invention, the following technical means have been devised. That is, the present invention is a method of removing a cut part recessed inward from an edge of a substrate from the substrate, comprising: a first step of processing a boundary scribe line that becomes a boundary line between a product part of the substrate and the edge part; A second step of pressing a pressing roller having a flat peripheral surface along the vicinity of the boundary scribe line on the surface while drawing a trajectory of repeating approach and separation with respect to the boundary scribe line; It was set as the structure including the 3rd process of removing the said end material part from the said product part by pulling in the distant direction.

Here, the waveform as the traveling trajectory of the pressing roller is a wavy curve having a pitch of 1 to 10 mm, and it is preferable that the interval with the boundary scribe line be 0.3 to 2.0 mm.

Further, it is preferable that the pressing roller has a diameter of 1 to 3 mm and a tip width of 0.1 to 0.7 mm, and travels at a speed of 5 to 20 mm/sec while pressing the edge portion surface under a load of 10 to 20 N.

Moreover, this invention is a board|substrate processing apparatus for removing from the said board|substrate the edge part recessed inward from the end edge of a board|substrate from another viewpoint, Comprising: A table which mounts and holds the board|substrate, and the board|substrate mounted on the said table. , a scribe line processing means for processing a boundary scribe line serving as a boundary line between the edge part and the product part, and on the surface of the edge part side, approach and separate the boundary scribe line along the vicinity of the boundary scribe line by repeating the approach and separation It is also characterized by a substrate processing apparatus provided with a pressing roller that pressurizes while drawing a trajectory.

Moreover, in order to solve the said subject, in another aspect of this invention, the following technical means were devised. That is, the present invention is a method of removing a cut part that is dented inward from an edge of a substrate from the substrate, a first step of processing a boundary scribe line that becomes a boundary line between a product part of the substrate and the edge part, and the edge part a second step of processing a scribe line for dividing into a plurality of edge members, wherein at least one of the plurality of edge members faces a part of the edge of the edge part released by the scribe line for division It is formed separately, and a pressing roller having a flat circumferential surface along the vicinity of the scribe line for division on the surface of the edge part is pressed while drawing a trajectory of repeating approach and separation with respect to the scribe line for division. A third step and a fourth step of pulling and removing the edge member facing a part of the end edge that is released from the edge part, and then pulling the remaining edge member sequentially from the front in a direction away from the product part to separate and remove it It was set as the structure containing.

In one aspect of the present invention, the boundary scribe line is pre-breaked by pressing the pressing roller along the vicinity of the boundary scribe line while drawing a trajectory of repeating approach and separation with respect to the boundary scribe line. The end material can be easily separated by force, whereby it is possible to suppress the occurrence of scars such as warpage and torn marks in the divided portion, and a high-quality product can be obtained.

Further, in another aspect of the present invention, in the end material removal step, by removing the end material facing a part of the end edge released from the end material portion, the next end material member is drawn out in an oblique direction, that is, in a direction away from the product portion. The space can be secured, whereby the next end member can be removed without rubbing the end surfaces with respect to the product part. Moreover, when removing an end material member, since the scribe line for division which divides the said end material member is pre-breaked in the previous process, it can separate and remove easily without affecting other end material members and a product part. Moreover, the part in contact with the boundary scribe line of the edge part can also be separated with a small force. By these synergistic effects, generation|occurrence|production of scars, such as distortion at the time of edge part removal, and a missing|missing, can be suppressed, and it becomes possible to obtain a high-quality product.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows the shape of the recessed part from which the edge part was removed.
It is a top view which shows the other shape of the recessed part from which the edge part was removed.
It is explanatory drawing which showed the edge part removal method of 1st Embodiment of this invention in process order.
Fig. 4 is an enlarged explanatory view showing the wavy travel trajectory of the pressing roller according to the first embodiment.
5 is a front view of the pressing roller.
6 is a schematic front view of the apparatus;
7 : is explanatory drawing which showed the edge part removal method of 2nd Embodiment of this invention in process order.
Fig. 8 is an enlarged explanatory view showing the wavy travel trajectory of the pressing roller according to the second embodiment.
9 : is explanatory drawing which shows the conventional end material part removal means.
It is explanatory drawing which shows the other conventional end material part removal means.
11 : is explanatory drawing which further shows the other conventional end material part removal means.
12 : is explanatory drawing which shows the other example of the edge part removal means.
13 : is explanatory drawing which shows the experimental example by this inventor.

(First embodiment)

EMBODIMENT OF THE INVENTION Below, 1st Embodiment of the edge part removal method which concerns on this invention is described in detail with reference to drawings.

3(a) shows the board|substrate M before edge part removal. The board|substrate M is a brittle material board|substrate, such as glass, and has the product part 1 and the end material part 2 separated by the boundary scribe line S. The edge part 2 is trapezoidal shape which narrowed the width|variety of the inside part, and is formed in the edge part 1a of the board|substrate M. Fig. 1 shows the product part 1 from which the end material part 2 was removed, and the trapezoidal recessed part 3 which narrowed the width|variety of the inside part by removing the end material part 2 is formed. In this embodiment, the length (H) of the depth of the trapezoid shape is 50 mm, the length L of the positive side is 50 mm, the inclination angle (α) of the side is 102°, the inner corner part (R1) and Although the edge part R2 of the opening edge was formed by the are of 2 mm, the numerical value is not specified, of course.

Below, the method of removing the said edge part 2 from the board|substrate M is demonstrated.

First, as shown in FIG.3(a), the boundary scribe line S which divides the product part 1 and the end material part 2 is processed in the board|substrate M (1st process).

The processing of the boundary scribe line S is performed by, for example, a cutter wheel 8 on a scribe head 7 installed so as to move freely with respect to a horizontal guide 6 of a scribe device 5 as shown in FIG. 6 . It can be carried out by attaching the cutter wheel to the surface of the substrate M held on the table 9, lowering it, and moving the cutter wheel 8 and the table 9 relative to each other while pressing. In addition, the table 9 is formed rotatably in a horizontal posture centering on a vertical axis by the rotation mechanism 12, and is also formed by the rail 13 in the direction orthogonal to the said guide 6 It is made to be movable.

Next, as shown in Fig. 3(b), using a pressure roller having a flat peripheral surface, on the surface of the edge part 2 side, along the vicinity of the boundary scribe line S, the boundary scribe line S While drawing a trajectory (K) that repeats approach and separation in the , pressurization is carried out (second step).

As shown in enlarged FIG. 4 , the running trajectory K of the pressing roller 4 is a wavy curve with a pitch P of 1 to 10 mm, and the interval W1 with the boundary scribe line S is It is preferable to set it as 0.3-2.0 mm. The amplitude width W may be 1 mm or more and may be appropriately adjusted according to the size of the end material portion 2 so as to satisfy the numerical range of the pitch P described above. In this embodiment, the amplitude width W at the time of approach and departure to the boundary scribe line S is 1 mm, the pitch P is 4 mm, and the interval W1 with the boundary scribe line S is 0.75. It was set as the continuous curve of the circular arc used as mm.

Moreover, as shown in FIG. 5, the diameter D is 1-3 mm, and the width|variety in the outermost periphery which contacts a board|substrate is 0.1-0.7 mm, and the pressure roller 4 is cut with a load of 10-20N. It was made to travel at a speed of 5 to 20 mm/sec while pressing the sub-surface. In this example, the diameter D was 2 mm and the width T was 0.65 mm using the pressing roller 4, the load was 16 N, and the traveling speed was 10 mm/sec.

In addition, in the running of the pressing roller 4, it is good not to approach as much as possible to trapezoid-shaped corner|angular part R1, R2.

The pressing roller 4 can be mounted on the scribe head 10 movably installed by the guide 6 of the scribe device 5 and driven, similarly to the cutter wheel. In this case, by providing the scribe head 10 with a mechanism 11 that linearly moves along the guide and moves left and right with respect to the traveling direction, or by relative motion with the table 9, the trajectory of the waveform can draw Here, as the traveling trajectory K of the pressing roller 4, a wavy shape with a continuous arc and a sine curve are exemplified. Moreover, as long as approach and separation are repeated to the boundary scribe line S, a part or all of a trajectory may be comprised in a straight line, and a continuous trajectory may be sufficient, or an intermittent trajectory may be sufficient.

In this way, by pressing the pressing roller 4 along the vicinity of the boundary scribe line S and drawing a trajectory K that repeats the approach and separation to the boundary scribe line S, the pressing roller 4 moves the boundary The movement toward or away from the scribe line S is repeated. When the pressing roller 4 approaches the scribe line S while pressing the substrate surface, a force to compress the substrate acts between the pressing roller 4 and the scribe line S, and as it moves away, the tensile force is repeated to work As a result, the crack in the substrate thickness direction of the scribe line S progresses, and the connected part (non-separated part) decreases. This is called a free break (preceding division) of the scribe line S.

Next, the end material part 2 is segregated and removed by holding the end material part 2 with a gripping tool (not shown), such as a chuck, and pulling in the direction away from the product part 1 (3rd process). Here, the end material part 2 may be curved or the end material part may be pulled while displacing it in the thickness direction of a board|substrate.

At this time, since the boundary scribe line (S) is pre-breaked in the previous step, the end material portion (2) can be easily separated from the product portion (1) with a small force, thereby causing distortion, omission, tearing, etc. It is possible to suppress the occurrence of scars and to obtain a high-quality product.

(Second Embodiment)

EMBODIMENT OF THE INVENTION Below, the edge part removal method which concerns on 2nd Embodiment of this invention is demonstrated in detail with reference to drawings. In addition, about the part common to 1st Embodiment, the same code|symbol is attached|subjected and the description is abbreviate|omitted.

7(a) shows the board|substrate M1 before the edge part removal. The board|substrate M1 consists of brittle material board|substrates, such as glass, and has the product part 21 and the edge part 22 separated by the boundary scribe line S1. The end material part 22 is formed in the end edge 21a of the board|substrate M1 in the U-shaped shape with one end opened. The left and right edges of the KO shape are parallel 2 : shows the product part 21 from which the edge part 22 was removed, and the U-shaped recessed part 23 is formed by removing the edge part 22. As shown in FIG. In this embodiment, the length H of the depth of the recess 23 is 60 mm, the bottom side length L is 120 mm, the inner corner R1 and the corner R2 of the opening edge are 2 mm. are formed as are, but the figures are not specific, of course.

Hereinafter, the method of removing the said edge part 22 from the board|substrate M is demonstrated.

First, as shown to Fig.7 (a), the boundary scribe line S1 which divides the product part 21 and the end material part 22 is processed in the board|substrate M1 (1st process).

The processing of the boundary scribe line S1 can be implemented by the method similar to 1st Embodiment.

Next, the scribe lines S2 and S3 for division which divide the end material part 2 into three end material members 22A, 22B, 22C are processed using the said cutter wheel (2nd process).

The first end member 22A is formed in a triangle with a bottom edge of a part of the end edge 22a released from the end member, and the top of the triangle is the inner side of the end member 22, preferably the depth length of the end member. about 2/3 of the In this embodiment, the triangle is formed as an isosceles triangle with a right angle of 90°.

The second end member 22B and the third end member 22C are obliquely from the vicinity of the top of the triangle of the first end member to the boundary scribe line S1 parallel to the end edge 22a of the end member 12. It is formed to be divided by a scribe line for division (S3) that extends. The inclined division scribe line (S3) extending from the vicinity of the top of the triangle avoids the inner corner portion (R1) and reaches the boundary scribe line (S) in the vicinity thereof. Thereby, it is trying not to interfere with the comparatively weak edge part R1 at the time of processing of the scribe line S3 for division.

Then, as shown in Fig. 7(b) and the enlarged view of Fig. 8, using a pressing roller having a flat peripheral surface, along the vicinity of the dividing scribe line (S2, S3) of the end material (2) Press travel while drawing the trajectory K (3rd process).

Although either the left or right side of the scribe line for division|segmentation may be sufficient as running of the pressure roller 4, it is preferable to set it as the edge part extraction direction side.

The pressing roller 4 was the same as that of the first embodiment, and the same was applied to the traveling load and speed. Moreover, the running trajectory K1 of the pressing roller 4 is a corrugated curve with a pitch P of 1-10 mm similarly to 1st Embodiment, The space|interval W1 with the scribe line for division|segmentation is 0.3-2.0 mm. It is better to do it with The amplitude width W may be 1 mm or more and may be appropriately adjusted according to the size of the end material portion 2 so as to satisfy the numerical range of the pitch P described above. Also in this embodiment, the amplitude width W was 1 mm, the pitch P was 4 mm, and the interval W1 with the scribe lines S2 and S3 for division was set to a continuous curve of an arc of 0.75 mm.

In this way, by moving the pressing roller 4 along the vicinity of the division scribe line S2, S3 to the division scribe line S2, S3 while drawing a trajectory K that repeats the approach and separation, pressing The movement of the roller 4 approaching or moving away from the scribe lines S2 and S3 for division is repeated. When the pressing roller 4 approaches the scribe line while pressing the substrate surface, the substrate is compressed between the pressing roller 4 and the scribe line, and as it moves away, the tensile force repeatedly acts. As a result, cracks in the substrate thickness direction of the scribe line progress, and the number of connected portions (non-separated portions) decreases. This is called a free break (preceding division) of the scribe line.

Next, each end member 22A, 22B, and 22C of the end material portion 22 is grabbed from the front with a gripping tool such as a chuck (not shown) and pulled in a direction away from the product portion 1 to be separated and removed (fourth step) .

That is, as shown in Fig. 7(c) , first, the triangular first end member 22A is pulled out in the direction of the arrow to secure a space for drawing out the next end member obliquely.

Next, as shown in Fig. 7(d) , among the remaining end member members, the left end member 22B on the lead-out front side is pulled away from the product part 1, that is, in the direction of the arrow, and removed, and finally , As shown in Fig. 7(e) , the remaining end member 22C is pulled out in the direction of the arrow and removed. Here, the first end member, the second end member, and the third end member may be bent or stretched while displaced in the thickness direction of the substrate.

In the fourth step of removing the end member, the first end member 22A is first removed to draw the next end member 22B, 22C in an oblique direction, that is, in a direction away from the product part 1. A space can be secured, and the end surfaces of the product part and the end member can be removed without rubbing each other at the time of separation. In addition, when the triangular first end member 22A is removed, the division scribe line S2 that separates the member is pre-breaked in the previous step, so it does not affect the other end members 22B and 22C. and can be easily separated and removed. Therefore, the case of being separated along with the other end members 22B and 22C is eliminated. Moreover, since the scribe line S3 for division|segmentation is pre-breaking also when pulling and separating and removing the next 2nd end member 22B, it can take out without affecting 22 C of adjacent 3rd end material members. In addition, since the portion of the end material 22 in contact with the boundary scribe line S12 can be divided into two end material members 22B and 22C, the tensile force at the time of removal of the end material 22 is dispersed and separated with a small force. can Thereby, generation|occurrence|production of scars, such as distortion and missing|missing, can be suppressed and it becomes possible to obtain a high-quality product.

As mentioned above, although typical embodiment of this invention was described, this invention is not necessarily specific to said embodiment. For example, in the said 1st Embodiment, although the case where the shape of the end material part 2 was trapezoid shape was described, the case of an arc shape or a V shape is also applicable. In addition, the boundary scribe line which separates the product part and the end material part can also be processed with a laser instead of a cutter wheel.

For example, in the second embodiment, the shape of the end material portion 22 is a U-shape in which the left and right sides are parallel, but it is also applicable to a shape in which the opening is narrowed. Further, in the above embodiment, the first end member is a triangle, and the remaining parts are divided into a second end member and a third end member separated by a scribe line S3 for division, but at least one of the plurality of end members is , which may be a shape facing a part of the free end edge of the end material part 2 . For example, it is also possible to form 2 A of 1st end material members in a semicircular shape. Moreover, also about the number of scribe lines for division|segmentation, it can be set as 1 or more arbitrary numbers according to the shape and size of an edge part. Further, by pressing the pressing roller while drawing a trajectory (K) that repeats the approach and separation of the boundary scribe line (S) along the vicinity of the boundary scribe line (S), in addition to the division scribe line, the boundary scribe line is also free You may brake. In addition, the boundary scribe line and the scribe line for cutting edge material can also be processed with a laser instead of a cutter wheel. In addition, in this invention, it is possible to correct and change suitably within the range which achieves the objective and does not deviate from a claim.

INDUSTRIAL APPLICABILITY The present invention can be applied to separating and removing unnecessary end material portions when cutting out a unit substrate used as a product from a brittle material substrate serving as a base material.

K, K1: Running trajectory of the pressing roller
M, M1: Substrate before removal of end material
P: the pitch of the trajectory
S, S1: boundary scribe line
S2: Scribing line for cutting edge
S3 : Scribing line for cutting edge
W: amplitude width of the trajectory
W1: spacing between trajectory and scribe line
1, 21: Product Department
2, 22: end material part
3, 23: dimples
4: pressure roller
6: Guide
7: scribe head
8: cutter wheel (scribe line machining member)
9: table
10: scribe head
22A: first end member
22B: second end member
22C: third end member

Claims (12)

A method of removing an end material dented inward from the end edge of the substrate from the substrate,
A first step of processing a boundary scribe line that becomes a boundary line between the product portion and the edge portion of the substrate;
A second step of pressing a pressing roller having a flat peripheral surface along the vicinity of the boundary scribe line on the surface of the edge portion side while drawing a trajectory of repeating approach and separation with respect to the boundary scribe line;
and a third step of removing the end material by pulling the end material in a direction away from the product portion. The method of claim 1,
The running trajectory of the pressing roller is a wavy curve having a pitch of 1 to 10 mm, and the distance from the boundary scribe line is 0.3 to 2.0 mm. The method of claim 1,
The pressing roller has a diameter of 1 to 3 mm, a tip width of 0.1 to 0.7 mm, and a method for removing an edge portion in which it travels at a speed of 5 to 20 mm/sec while pressing the surface of the edge portion under a load of 10 to 20 N. 4. The method according to any one of claims 1 to 3,
The edge part is a trapezoidal edge part removal method in which the width of the inner part is narrowed. A substrate processing apparatus for processing an end material recessed inward from the end edge of the substrate,
a table for holding the substrate;
a scribe line processing means for processing a boundary scribe line serving as a boundary line between the edge portion and the product portion with respect to the substrate placed on the table;
A substrate processing apparatus provided with a pressing roller which carries out pressing while drawing a wavy trajectory along the vicinity of the boundary scribe line on the surface of the edge part side. A method of removing the edge portion dented inward from the edge of the substrate from the substrate,
A first step of processing a boundary scribe line that becomes a boundary line between the product portion and the edge portion of the substrate;
and a second step of processing a scribe line for dividing the edge part into a plurality of edge members, wherein at least one of the plurality of edge members faces a part of the free end edge of the edge part and the scribe for partitioning separated by a line,
In addition, a third step of pressing a pressing roller having a flat peripheral surface along the vicinity of the scribe line for division on the surface of the edge part while drawing a trajectory of repeating approach and separation with respect to the scribe line for division;
A fourth step of separating and removing the edge member by pulling the edge member facing a part of the edge of the edge part released from the edge part, and then pulling the remaining edge member sequentially from the front in a direction away from the product part to separate and remove the edge member. Way. 7. The method of claim 6,
The plurality of end members includes a first end member, a second end member, and a third end member, wherein the first end member faces a part of the end edge of the end member released by the dividing line by the scribe line The second end member and the third end member are divided by a scribe line for division extending obliquely from the inner side of the first end member to a boundary scribe line parallel to the end edge of the end member, and are divided into a triangle. A method of removing the formed edge part. 8. The method of claim 7,
The running trajectory of the pressing roller is a wavy curve having a pitch of 1 to 10 mm, and the distance from the dividing scribe line is 0.3 to 2.0 mm. 9. The method according to any one of claims 6 to 8,
The pressing roller has a diameter of 1 to 3 mm, a tip width of 0.1 to 0.7 mm, and a method for removing an edge portion in which it travels at a speed of 5 to 20 mm/sec while pressing the surface of the edge portion under a load of 10 to 20 N. 9. The method according to any one of claims 6 to 8,
The said edge part is a U-shape which has parallel side edges, The edge part removal method. 9. The method according to any one of claims 6 to 8,
The third step further includes a step of pressing the pressing roller on the surface of the edge part side while drawing a trajectory of repeating approach and separation with respect to the boundary scribe line. A substrate processing apparatus for processing an end material recessed from the end edge of the substrate toward the inside, comprising:
a table for holding the substrate;
A scribe line processing means for processing a boundary scribe line serving as a boundary line between the edge part and the product part with respect to the substrate held on the table, and processing a scribe line for dividing the edge part into a plurality of edge parts;
A substrate processing apparatus provided with a pressing roller that presses while drawing a trajectory of repeating approach and separation with respect to the scribe line for division along the vicinity of the scribe line for division.

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