KR20200137110A - In-line simulation system for in-line production system - Google Patents

Abstract

The present invention relates to an in-line simulation system for an in-line production system, including: a layout module for registering arrangement of ports on which a processing target object is loaded, arrangement of production facilities, properties of the production facilities, arrangement of transfer robots, and properties of the transfer robots; a recipe module for registering a work path according to the arrangements of the production facilities and the transfer robots registered by the layout module, and a work time of the production facility; a GUI module for providing, on a screen, a layout registration screen for registering the arrangement of the ports, the arrangement and the properties of the production facilities, and the arrangement and the properties of the transfer robots through the layout module, and a recipe registration screen for registering the work path and the work time through the recipe module; and a simulation module for simulating a production line registered through the layout module and the recipe module, and displaying a simulation process on the screen in association with the GUI module. Accordingly, the simulation is performed by arranging the ports, the production facilities, and the transfer robots in the same way as in a design of an actual in-line production line, and registering the properties of the ports, the production facilities, and the transfer robots and properties of an overall operation, so that sufficient review is possible before applying the design to the actual line.

Description

In-line simulation system for in-line production systems {IN-LINE SIMULATION SYSTEM FOR IN-LINE PRODUCTION SYSTEM}

The present invention relates to an in-line simulation system for an in-line production system, and more particularly, an in-line production system capable of simulating an in-line production system for processing glass in an LCD or OLED production process or wafer in a semiconductor production process as in real life. It relates to an in-line simulation system for a production system.

The general semiconductor device manufacturing process is a wafer manufacturing process, which is a process of making an integrated circuit on a single crystal silicon substrate in a wafer state, and a semiconductor package manufacturing process in which a unit semiconductor chip is separated from the semiconductor substrate on which the integrated circuit is made and manufactured in the form of a semiconductor package. It is largely divided. In addition, the semiconductor package manufacturing process includes a front-end process of processing a unit semiconductor chip in a wafer state, and a back-end process of processing a semiconductor chip with a sealing material covered. process).

The in-line production system for processing wafers in the semiconductor manufacturing process as described above is disposed between a production facility that performs a process on a wafer, a loading/unloading section for loading or unloading wafers, and a loading/unloading section and the production facility. It includes a transfer robot that moves the wafer between the loading/unloading unit and the production facility.

Wafers processed in one in-line production system are placed on a loading/unloading unit and transferred to another in-line production system where the next process is performed by a transfer robot. An example of such an in-line production system is disclosed in Korean Patent Publication No. 10-2016-0131434.

On the other hand, when designing a new in-line production system, the optimal design should be taken in consideration of the number of ports on which wafers are loaded, the type or processing speed of the production facility, and the specifications and performance of the transfer robot. Should be implemented.

However, when designing a new in-line production system, there is no way to check whether the designed in-line production system is the optimal design or if unexpected problems occur, so the processing speed of the system considered to be the optimal design after the actual in-line production system is manufactured If it does not come out as much as desired, or if an unexpected problem occurs, a problem may occur in which the device itself is discarded or modified to that state.

In addition, even when partial changes are made to further optimize the existing in-line production system, the same problems as when constructing a new in-line production system occur if there is no way to determine which system is more optimal between the existing system and the system to be changed. Is done.

The above problems occur in the same way in the process of processing glass in an in-line production system for the production of LCD or OLED.

Accordingly, the present invention was devised to solve the above problems, and an in-line production system capable of simulating an in-line production system for processing a wafer in a glass or semiconductor production process in an LCD or OLED production process as in reality Its purpose is to provide an inline simulation system for

The above object is, according to the present invention, in an inline simulation system for an inline production system, the arrangement of ports on which objects to be processed are loaded, arrangement of production facilities, properties of the production facilities, arrangement of transfer robots, and properties of the transfer robot A layout module for registering, a recipe module for registering a work path according to the arrangement of the production facility and the transfer robot registered by the layout module, and a working time of the production facility, and the layout module On the screen, a layout registration screen for registering the layout of ports, the layout and properties of the production facility, the layout and properties of the transfer robot, and a recipe registration screen for registering the work path and the work time through the recipe module are displayed on the screen. And a simulation module that simulates a production line registered through the layout module and the recipe module, and displays a simulation process on a screen in connection with the GUI module. Is achieved by an inline simulation system for

Here, the GUI module provides the layout registration screen so that the port, the production facility, and the port image, the facility image, and the robot image respectively corresponding to the transfer robot can be moved through a drag-and-drop method; The layout module may register the facility image and the robot image on the layout registration screen as an arrangement of the port, the production facility, and the transfer robot.

In addition, the properties of the production facility registered through the layout registration screen may include a job name indicating a type of a job performed by a corresponding production facility and a facility name of a production facility that performs the job.

And, when the facility image is selected on the layout registration screen, a facility property setting window for setting the property of the production facility is displayed; A port selection unit for setting a port is provided in the facility property setting window, and when the port selection unit is selected, a corresponding facility image may be set as the port.

And, when the robot image arranged on the layout registration screen is selected, a robot property setting window for setting the property of the transfer robot for the corresponding robot image is displayed on the screen; In the robot property setting window, a self-property setting window for setting self-property of a corresponding transfer robot and a job property setting window for setting a property of a robot job to be performed by the transfer robot may be provided.

In addition, the recipe registration screen includes a port list selection button, a flow list selection button, and at least one port selection button; When the port list selection button is selected, a list of the ports registered through the layout module is displayed on the screen; When the flow list selection button is selected, a flow registration screen for registering the working time of the production facility registered through the layout module is displayed on the screen; The port selection button is provided corresponding to the number of the ports registered through the layout module; When the port selection button is selected, a work path registration screen for registering a work path for each object to be processed of a corresponding port may be displayed on the screen.

And, on the flow registration screen, a list of the job name and the facility name of the production facility registered through the layout registration screen is displayed; The working hours of the production facility can be entered in the list.

In addition, the work path registration screen is provided to enable registration of work paths for each object to be processed in the corresponding port, and production facilities and transfer robots for configuring the work paths are registered by the layout module and transfer. It is possible to link with the arrangement of the robot and to the working time of the production facility registered through the flow registration screen.

According to the above configuration, according to the present invention, it is possible to simulate by arranging ports, production facilities, and transfer robots in the same manner as the design of an actual in-line production line, and registering each attribute and attributes of the overall operation. Sufficient review will be possible before applying to the line.

In addition, by simulating various types of line designs, it is possible to derive an optimal line design.

1 is a view for explaining the configuration of an in-line simulation system for an in-line production system according to the present invention,
2 to 11 are views showing examples of screens provided by the inline simulation system for the inline production system according to the present invention.

In the present invention, various modifications may be made and various embodiments may be provided, and specific embodiments will be illustrated in the drawings and described in detail.

However, this is not intended to limit the present invention to a specific embodiment, it is to be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms as defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and should not be interpreted as an ideal or excessively formal meaning unless explicitly defined in the present application. Does not.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view for explaining the configuration of an in-line simulation system 100 for an in-line production system according to the present invention. Hereinafter, the in-line simulation system according to the present invention simulates an in-line production system for processing a wafer in a semiconductor production process as an example, and the object to be processed is a wafer, and the technical idea of the present invention is not limited thereto. , Of course, it is applied to an in-line production system for glass processing in an LCD or OLED production process, and the technical idea of the present invention is not limited to the name of the object to be processed.

Referring to FIG. 1, the inline simulation system 100 is installed in the computer system 200 and operates in conjunction with the operating system of the computer system 200.

The inline simulation system 100 according to the present invention includes a GUI module 110, a layout module 120, a recipe module 130, and a simulation module 140, as shown in FIG. 1.

The layout module 120 registers an arrangement of a port on which a wafer is loaded, an arrangement of a production facility, a property of a production facility, an arrangement of a transfer robot, and a property of a transfer robot. Here, the GUI module 110 displays on the screen of the monitor 300 a layout registration screen for registering the arrangement of ports, arrangements and properties of production facilities, arrangements and properties of the transfer robot through the layout module 120, and , The layout module 120 receives the arrangement or properties through the layout registration screen provided through the GUI module 110.

2 is a diagram showing an example of a layout registration screen provided through the GUI module 110 in the inline simulation system 100 according to the present invention. Referring to FIG. 2, the GUI module 110 provides a layout registration screen so that port images, facility images, and robot images respectively corresponding to ports, production facilities, and transfer robots can be moved through a drag-and-drop method, It allows users to design the arrangement of ports, production facilities, and transfer robots within an in-line production system by adjusting the position of the port image, facility image or robot image on the screen. At this time, the layout module 120 registers a port image, a facility image, and a robot image on the layout registration screen as arrangements of ports, production facilities, and transfer robots.

In Figure 2, four ports (PORT-1, PORT-2, PORT-3, PORT-4), a transfer robot (TRANSFER) as a loader (LOADER1), an ultrasonic cleaner (USC) as a production facility, an inspection machine (INSPECTION), and rubbing It shows an example in which units (RUB_A, RUB_B), UP-TURN and DOWN-TURN that change the direction of the wafer, and a transfer robot (TRANSFER) operating together with a buffer are arranged.

Here, the properties of the production facility registered through the layout registration screen may include a job name indicating the type of work performed by the production facility and a facility name of the production facility that performs the job. When the placed facility image is double-clicked or the right button of the mouse is clicked, a facility property setting window for the input may be displayed on the screen in the form of a pop-up. Here, the work name and the facility name will be described later.

3 is a diagram illustrating an example of a facility property setting window provided through the GUI module 110 in the inline simulation system 100 according to the present invention. As shown in FIG. 3, the facility property setting window is provided to enable setting of a facility name (Unit Name) and a work name (Flow Name). In addition, the port selection unit'Use as Port' is provided for setting the port in the property setting, and when the port selection unit is selected, the port can be placed on the layout registration screen in a form in which the corresponding facility image is set as a port. do.

Likewise, a'use as buffer' item for setting as a buffer is provided, and when the item is selected, the corresponding facility image on the layout registration screen is registered as a buffer.

The'Flow direction' item shown in FIG. 3 shows an example of setting'FromTop' when slot 1 is the top end, and the number of slots is input in the'Number of Sub Units' item. In addition, the'Glass Display Size' item is provided to set the size of the facility image on the layout registration screen, and the'Pre Unload Request Time' item is a place to set how many msec before the end of the process whether to issue the PUR signal, and waits for receipt of the transfer robot. It can be used for positioning.

Meanwhile, FIG. 4 is a diagram showing an example of a robot property setting window provided through the GUI module 110 in the inline simulation system 100 according to the present invention. When the user double-clicks the robot image arranged on the layout registration screen or clicks the right button of the mouse, it may be displayed on the robot property setting difference screen in a pop-up form.

Referring to FIG. 4, a self-property setting window (Robot property) and a work property setting window (command list) may be provided in the robot property setting window. In the self-property setting window, the transfer robot's own properties are set. 5 shows an example of the properties of the transfer robot set through its property setting window in the in-line simulation system 100 according to the present invention.

As shown in Fig. 4, in the self-property setting window, the robot's armpit maximum extension distance, the maximum travel distance of the driving axis, the position at which the robot cannot rotate, and the time it takes to reach the maximum speed from the stop state, etc. Various properties can be set, and the working speed of the transfer robot can be determined in a simulation process based on these setting values.

In addition, in the job property setting window located on the right side of the robot property setting window of FIG. 4, properties of the robot job to be performed by the transfer robot are set. 6 and 7 are diagrams showing examples of properties of a robot job set in a job property setting window.

Through the above process, when the layout module 120 completes the arrangement of ports, the arrangement and properties of production facilities, and the arrangement and properties of the transfer robot, the layout module 120 may store this as a new layout file. .

Then, the recipe module 130 registers the work path according to the arrangement of the production equipment and the transfer robot registered by the layout module 120 and the working time of the production equipment. 8 to 10 are diagrams showing examples of recipe registration screens provided by the GUI model.

Referring to FIGS. 8 to 10, the recipe registration screen includes a port list selection button, a flow list selection button, and at least one port selection button. When the port list selection button is selected, a list of ports registered through the layout module 120 is displayed, as shown in FIG. 8.

Then, when the flow list selection button is selected, a flow registration screen for registering the working time of the production facility registered through the layout module 120 is displayed on the screen, as shown in FIG. 9. The user can adjust the working time of the production facility displayed on the flow registration screen, that is, registered through the layout module 120. Here, as described above, in the production facility, the job name (Flow name) and the facility name (Unit name) are registered through the layout module 120, and the job name indicates the name of the job actually performed by the production facility, The facility name indicates the name of the facility.

In more detail with reference to FIG. 9, the facility names'OST1' and'OST2' are separated in the same work name'OST', which indicates that two facilities performing the same work are arranged. .

10 is a view showing an example of a work path registration screen for registering a work path for each wafer of a corresponding port when a port selection button is clicked. In the present invention, it may be provided to enable registration of a work path for each wafer of a corresponding port through a work path registration screen. For example, GLASS01 in FIG. 10 is an example in which PORT1 -> USC -> TURN_1 -> RUB_A -> TURN_A -> PORT1 is set to move to the work path.

Through the process as described above, when the registration of the work path according to the arrangement of the production facility and the transfer robot and the work time of the production facility is completed by the recipe registration module, the recipe registration module may store it in the form of a recipe file.

And, as described above, when registration of all settings by the layout module 120 and the recipe module 130 is completed, the simulation module 140 cooperates with the GUI module 110 to display the simulation process on the screen while simulating And output the result.

FIG. 11 is a diagram showing an example of outputting a simulation result, and working hours at each production facility may be displayed for each wafer, and such results may be provided to a user in the form of an Excel file.

Through the above process, ports, production facilities, and transfer robots are arranged in the same way as the design of an actual in-line production line, and each property and properties of the overall operation can be registered and simulated. There is enough review.

In addition, by simulating various types of line design, it is possible to derive an optimal line design.

Although some embodiments of the present invention have been shown and described, those skilled in the art of ordinary skill in the art to which the present invention pertains will appreciate that the present embodiments can be modified without departing from the principles or spirit of the present invention. . The scope of the invention will be determined by the appended claims and their equivalents.

100: inline simulation system
110: GUI module 120: layout module
130: recipe module 140: simulation module
200: computer system 300: monitor

Claims (8)

In the in-line simulation system for the in-line production system,
A layout module for registering an arrangement of a port on which an object to be processed is loaded, an arrangement of production equipment, an attribute of the production equipment, an arrangement of a transfer robot, and an attribute of the transfer robot,
A recipe module for registering a work path according to the arrangement of the production equipment and the transfer robot registered by the layout module, and a working time of the production equipment,
A layout registration screen for registering the arrangement of the ports, the arrangement and properties of the production facility, and the arrangement and properties of the transfer robot through the layout module, and for registering the work path and the work time through the recipe module. GUI module that provides a recipe registration screen on the screen,
And a simulation module that simulates a production line registered through the layout module and the recipe module, and displays a simulation process on a screen in connection with the GUI module.
The method of claim 1,
The GUI module provides the layout registration screen so that the port, the production facility, and the port image, the facility image, and the robot image respectively corresponding to the transfer robot can be moved through a drag and drop method;
The layout module registers the facility image and the robot image on the layout registration screen as an arrangement of the port, the production facility, and the transfer robot.
The method of claim 2,
The properties of the production facility registered through the layout registration screen include a job name indicating a type of job performed by the corresponding production facility, and a facility name of a production facility that performs the job. For inline simulation system.
The method of claim 3,
When the facility image is selected on the layout registration screen, a facility property setting window for setting the property of the production facility is displayed;
In the facility property setting window, a port selection unit for setting a port is provided, and when the port selection unit is selected, a corresponding facility image is set to the port.
The method of claim 4,
When the robot image arranged on the layout registration screen is selected, a robot property setting window for setting a property of a transfer robot for the robot image is displayed on the screen;
In the robot property setting window,
A self-property setting window to set its own properties of the transfer robot,
An in-line simulation system for an in-line production system, characterized in that a job property setting window for setting properties of a robot job to be performed by the transfer robot is provided.
The method of claim 5,
The recipe registration screen includes a port list selection button, a flow list selection button, and at least one port selection button;
When the port list selection button is selected, a list of the ports registered through the layout module is displayed on the screen;
When the flow list selection button is selected, a flow registration screen for registering the working time of the production facility registered through the layout module is displayed on the screen;
The port selection button is provided corresponding to the number of the ports registered through the layout module;
When the port selection button is selected, a work path registration screen for registering a work path for each object to be processed of a corresponding port is displayed on the screen.
The method of claim 6,
A list of the job name and the facility name of the production facility registered through the layout registration screen is displayed on the flow registration screen;
In-line simulation system for an in-line production system, characterized in that the work time of the production facility is input to the list.
The method of claim 5,
The work path registration screen is provided to enable registration of work paths for each object to be processed of the corresponding port,
The production facility and the transfer robot for configuring the work path are interlocked with the arrangement of the production facility and the transfer robot registered by the layout module, and link with the working time of the production facility registered through the flow registration screen Inline simulation system for inline production systems.

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