KR20200035943A - 편광 광 조사 장치 - Google Patents

편광 광 조사 장치 Download PDF

Info

Publication number
KR20200035943A
KR20200035943A KR1020207001133A KR20207001133A KR20200035943A KR 20200035943 A KR20200035943 A KR 20200035943A KR 1020207001133 A KR1020207001133 A KR 1020207001133A KR 20207001133 A KR20207001133 A KR 20207001133A KR 20200035943 A KR20200035943 A KR 20200035943A
Authority
KR
South Korea
Prior art keywords
light
lamp
region
approximately
area
Prior art date
Application number
KR1020207001133A
Other languages
English (en)
Korean (ko)
Inventor
카즈시게 하시모토
토시나리 아라이
Original Assignee
브이 테크놀로지 씨오. 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 브이 테크놀로지 씨오. 엘티디 filed Critical 브이 테크놀로지 씨오. 엘티디
Priority claimed from PCT/JP2018/027692 external-priority patent/WO2019035321A1/ja
Publication of KR20200035943A publication Critical patent/KR20200035943A/ko

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020207001133A 2017-08-14 2018-07-24 편광 광 조사 장치 KR20200035943A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2017-156565 2017-08-14
JP2017156565 2017-08-14
JP2017182602A JP2019035930A (ja) 2017-08-14 2017-09-22 偏光光照射装置
JPJP-P-2017-182602 2017-09-22
PCT/JP2018/027692 WO2019035321A1 (ja) 2017-08-14 2018-07-24 偏光光照射装置

Publications (1)

Publication Number Publication Date
KR20200035943A true KR20200035943A (ko) 2020-04-06

Family

ID=65655667

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207001133A KR20200035943A (ko) 2017-08-14 2018-07-24 편광 광 조사 장치

Country Status (3)

Country Link
JP (1) JP2019035930A (zh)
KR (1) KR20200035943A (zh)
CN (1) CN110892319A (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815995B1 (zh) 1970-08-10 1973-05-18

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3458477B2 (ja) * 1994-08-16 2003-10-20 株式会社ニコン 露光装置および露光方法
JP4815995B2 (ja) * 2005-10-24 2011-11-16 ウシオ電機株式会社 光配向用偏光光照射装置
JP4493697B2 (ja) * 2006-01-26 2010-06-30 シャープ株式会社 液晶表示装置の製造方法及び液晶表示装置
JP5400176B2 (ja) * 2010-01-25 2014-01-29 シャープ株式会社 露光装置及び液晶表示装置の製造方法
CN103782230B (zh) * 2011-08-29 2017-03-01 夏普株式会社 液晶显示装置的制造方法
US11209700B2 (en) * 2016-01-21 2021-12-28 Sharp Kabushiki Kaisha Method for manufacturing liquid crystal panel, method for manufacturing retardation plate, and wire grid polarizing plate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815995B1 (zh) 1970-08-10 1973-05-18

Also Published As

Publication number Publication date
CN110892319A (zh) 2020-03-17
JP2019035930A (ja) 2019-03-07

Similar Documents

Publication Publication Date Title
JP5756813B2 (ja) 基板露光方法
KR102272435B1 (ko) 편광광 조사장치
CN106125407B (zh) 光配向装置
KR20150035992A (ko) 광배향 노광방법 및 광배향 노광장치
KR101205521B1 (ko) 포토마스크 및 그것을 사용한 노광 방법
KR101780368B1 (ko) 포토마스크 및 그것을 사용하는 레이저 어닐링 장치 및 노광 장치
US9360777B2 (en) Apparatus and method for alignment processing
KR100875361B1 (ko) 패턴 묘화 장치 및 패턴 묘화 방법
KR20200035943A (ko) 편광 광 조사 장치
JP6660144B2 (ja) 光照射装置
KR101899107B1 (ko) 광 조사 장치
WO2019035321A1 (ja) 偏光光照射装置
KR101941987B1 (ko) 노광 장치
KR20180114021A (ko) 편광 광조사 장치
KR20150041778A (ko) 광배향 노광장치 및 광배향 노광방법
WO2018003585A1 (ja) 偏光光照射装置
CN109387897B (zh) 线栅组件、起偏照明装置及光配向设备
KR102297923B1 (ko) 테두리경화기
JP7008916B2 (ja) 照明装置
WO2017145975A1 (ja) 偏光光照射装置
JP2021144112A (ja) 偏光光照射装置
KR20170117071A (ko) 주사 노광 장치
JP6919425B2 (ja) 光処理装置
CN115586673A (zh) 偏振光照射装置、具备其的曝光装置以及偏振光照射方法
JP5709495B2 (ja) 露光装置