KR20200034514A - Heat treatment apparatus - Google Patents

Abstract

According to one embodiment, a heat treatment apparatus includes: a chamber unit having a frame part forming the entire external appearance; and a shutter unit opening or closing a front surface of the chamber unit, wherein the shutter unit includes: a shutter part positioned at the front surface of the chamber unit; vertical driving parts arranged on both side surfaces of the shutter part and vertically driving the shutter part; and a forward and backward driving part for a shutter unit mounted on a front surface of the shutter part and driving the shutter part forwards and backwards, wherein the forward and backward driving part for a shutter unit can be moved in a vertical direction with the shutter part by vertical driving by the vertical driving part.

Description

Heat treatment device {HEAT TREATMENT APPARATUS}

The present invention relates to a heat treatment device, and more particularly, to a heat treatment device capable of driving the shutter portion up and down, forward and backward, and tilting.

2. Description of the Related Art Recently, with the rapid development and dissemination of electric and electronic devices such as computers or TVs, display panel technology is also rapidly developing.

In light of today's situation in which the size and resolution of the display panel is rapidly progressing, the role played by the manufacturing apparatus is becoming more important.

In general, in order to manufacture a display panel, a photoresist is applied to form a pattern on the panel, and the display panel is heated to cure the photoresist film.

At this time, in order to form a precise pattern on the display panel, a heat treatment operation that raises the temperature uniformly over the entire area of the display panel is required.

The apparatus used for heat treatment of such a display panel must uniformly rise and fall in the temperature inside the heat treatment apparatus in order to manufacture a quality display panel.

If uniform temperature control is not performed for the entire area of the display panel in the heat treatment device, temperature variation may occur in the pattern or local shrinkage or expansion of the panel may occur due to thermal imbalance generated in the display panel itself. This thermal imbalance has become a major cause of the inability to form a uniform pattern on the display panel.

On the other hand, since the heating device disposed inside the heat treatment device of the display panel repeats heating and cooling, there is a problem that it is easily damaged by heat shrinkage and thermal expansion.

When the heating device inside the heat treatment device is damaged, the operation of the device must be stopped for maintenance, and thus the overall heat treatment yield is lowered, and there is also a problem that the surface of the display panel is contaminated or damaged due to impurities generated during the damage.

In Korean Patent Registration No. 10-1136892 and Korean Patent Registration No. 10-1479925, heating devices are disclosed to withstand thermal deformation or thermal shock caused by rapid temperature changes.

The above-described background art is possessed or acquired by the inventor during the derivation process of the present invention, and is not necessarily a known technology disclosed to the general public prior to the filing of the present invention.

An object according to an embodiment includes an up-and-down driving unit for the shutter unit and a forward-backward driving unit for the shutter unit, when opening the front surface of the frame unit, driving the shutter unit backward and driving in the vertical direction, and closing the open front surface of the frame unit In this case, it is to provide a heat treatment device capable of driving the shutter unit in the vertical direction and then driving it forward.

An object according to an embodiment is to provide a heat treatment device that is disposed on both sides of the shutter portion and the motors transmitting power to the upper and lower driving portions are synchronized with each other, so that the shutter portion can be driven up and down more stably.

An object according to an embodiment is to provide a heat treatment device in which the shutter unit is more stably driven forward and backward by being mounted on the front surface of the shutter unit for a plurality of shutter units.

An object according to an embodiment is to provide a heat treatment device capable of minimizing heat loss when the shutter unit is opened or closed by driving a plurality of shutter units to open any one of a plurality of open sections on the front surface of the frame unit.

An object according to an embodiment is to provide a heat treatment device capable of supplying heat from the front of the chamber unit, the heating unit is mounted on the inner surface of the shutter unit.

An object according to an embodiment is to provide a heat treatment device capable of tilting driving the shutter unit, thereby facilitating maintenance of a heating unit and an insulation material mounted on the inner surface of the shutter unit.

An object according to an embodiment is to provide a heat treatment device that is provided with a heat insulating material at various positions in the shutter unit, to prevent heat loss due to the opening or closing of the shutter unit and to preserve the heat amount of the shutter unit.

A heat treatment apparatus according to an embodiment for achieving the above object includes: a chamber unit including a frame part constituting the entire appearance; And a shutter unit that opens or closes the front surface of the chamber unit, wherein the shutter unit comprises: a shutter unit located on the front surface of the chamber unit; A vertical driving unit disposed on both sides of the shutter unit to drive the shutter unit up and down; And mounted on the front of the shutter unit, forward and backward driving unit for the shutter unit for driving the shutter unit forward and backward; including, the shutter unit forward and backward driving unit for up and down with the shutter unit by up and down driving by the up and down driving unit It can be moved in the direction.

According to one side, the upper and lower driving units, the screw jack member is installed to extend in the vertical direction on both sides of the shutter portion is rotated by a motor; And a vertical guide member that guides the vertical movement of the shutter unit while being moved in the vertical direction by the rotational driving of the screw jack member, and the motors are disposed on both side surfaces of the shutter unit and synchronized with each other.

According to one side, the forward and backward driving unit for the shutter unit, is mounted on the front of the shutter unit cylinder member for driving the shutter forward and backward by hydraulic pressure; And a forward-backward guide member disposed spaced apart from the cylinder member to guide forward-backward driving by the cylinder member, and a forward-backward driving unit for a plurality of shutter units spaced apart from the shutter unit.

According to one side, the shutter unit is provided in a plurality, the plurality of shutter units, the upper shutter unit located at the top of the front of the chamber unit; And a lower shutter portion located at the bottom of the front of the chamber unit; and the upper shutter portion and the lower shutter portion are selectively driven in the vertical direction to open one of the upper and lower portions at the front of the chamber unit. Can be.

According to one side, when the upper portion is opened from the front of the chamber unit, the upper shutter portion and the lower shutter portion are driven backward and far away from the chamber unit by the forward and backward driving unit for the shutter unit, and then driven downward by the upper and lower driving units. The lower shutter is closed at the front of the chamber unit by the upper shutter unit, and when the lower shutter is opened at the front of the chamber unit, the lower shutter unit is retracted away from the chamber unit by the forward / reverse driving unit for the shutter unit. The upper and lower driving units may move downward, and the upper shutter unit may be non-driving.

According to one side, further comprising a heating unit mounted on the inner surface of the shutter unit, the heating unit includes a plurality of heating modules, the plurality of heating modules to be mounted in a matrix form on the inner surface of the shutter unit You can.

A heat treatment apparatus according to an embodiment for achieving the above object includes: a chamber unit including a frame part constituting the entire appearance; A shutter unit that opens or closes the front surface of the chamber unit; And a heating unit provided in the chamber unit and the shutter unit to heat a heat treatment object disposed in the chamber unit, wherein the shutter unit includes: a shutter unit located in front of the chamber unit; And a tilting unit mounted on the shutter unit to tilt-drive the shutter unit.

According to one side, the tilting unit, a fixing member for fixing the upper end of the shutter unit to the shutter unit; And a hinge member provided at a lower end of the shutter unit, and the shutter unit may be tilted toward the front of the frame unit by the tilting unit.

According to one side, the shutter unit is provided with a heat insulating material, the heat insulating material is provided on the inner surface or the outer surface of the shutter unit, and the heat insulating material is in the space between the pipes through which cooling water passes from the top or bottom of the shutter unit. It may be further provided.

According to the heat treatment apparatus according to an embodiment, the shutter unit includes a vertical driving unit and a forward / reverse driving unit for the shutter unit, and when the front of the frame unit is opened, the shutter unit is driven backward and then driven in the vertical direction, and the frame unit is opened and opened. When closing the, the shutter unit may be driven forward and then forward.

According to the heat treatment apparatus according to an embodiment, the motors disposed on both sides of the shutter unit and transmitting power to the upper and lower driving units are synchronized with each other, so that the shutter unit can be driven up and down more stably.

According to the heat treatment apparatus according to an embodiment, a plurality of shutter unit forward and backward driving units are mounted on the front surface of the shutter unit, so that the shutter unit can be driven forward and backward more stably.

According to the heat treatment apparatus according to an embodiment, a plurality of shutter units are driven to open any one of a plurality of opening sections on the front surface of the frame unit, thereby minimizing heat loss when the shutter unit is opened or closed.

According to the heat treatment apparatus according to an embodiment, the heating unit is mounted on the inner surface of the shutter unit, and heat can be supplied from the front surface of the chamber unit.

According to the heat treatment apparatus according to an embodiment, the shutter unit can be tilted and driven, and maintenance of the heating unit and the heat insulating material mounted on the inner surface of the shutter unit can be facilitated.

According to the heat treatment apparatus according to an embodiment, a heat insulating material is provided at various positions in the shutter unit, thereby preventing heat loss due to opening or closing of the shutter unit and preserving the heat amount of the shutter unit.

1 is a perspective view of a heat treatment apparatus according to an embodiment.
2 is a perspective view of the frame unit.
3 is a perspective view of the chamber unit and the heating unit.
4 is a perspective view of the shutter unit.
5 is a perspective view of the support unit.
6 is a perspective view of the air supply and exhaust unit.
7 is a perspective view of a scaffolding / handrail unit.
8 is an exploded view of the chamber unit.
9 shows a state in which the panel portion is assembled to the frame portion.
10 is a rear view of the chamber unit.
11 shows a position where the shutter unit is assembled in the frame portion.
12 shows the configuration of the shutter unit.
13A to 13C show up and down driving of the shutter unit.
14 is a cross-sectional view along AA in FIG. 12.
Fig. 15 shows the tilting drive of the shutter unit.
16 (a) and (b) show a local exhaust portion provided in the shutter unit.
17 (a) and (b) show the operation of the local exhaust.
18 and 19 show the configuration of the heater unit.
20 shows the configuration of the heating zone by the heater unit.
21 (a) and (b) show the configuration of the heating unit provided in the panel unit.
22 (a) to 22 (c) show a fixing method of the heating module to the panel portion.
23 (a) and 23 (b) show the configuration of a heating unit provided in the shutter unit.
24 shows the configuration of the power connection unit.
25 shows the configuration of the support unit.
26A to 26D show the configuration of the rack portion.
27A to 27D show the configuration of a plurality of guide portions.
28 illustrates a state in which the muffle member is held in the rack portion by the side holding guide portion and the corner holding guide portion.
29 shows a monitoring unit and a first sealing unit.
30 (a) and (b) show the mounting positions of the monitoring unit.
31 shows a temperature measuring part and a second sealing part.
32 is a fluid flow diagram of a cooling regeneration unit.
Fig. 33 shows the arrangement of the supply and exhaust ports.
Fig. 34 shows the structure of the cooling regeneration unit.
35 shows a case where 27 glass substrates are accommodated.

Hereinafter, embodiments will be described in detail through exemplary drawings. It should be noted that in adding reference numerals to the components of each drawing, the same components have the same reference numerals as possible even though they are displayed on different drawings. In addition, in describing the embodiments, when it is determined that detailed descriptions of related well-known configurations or functions interfere with understanding of the embodiments, detailed descriptions thereof will be omitted.

In addition, in describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are only for distinguishing the component from other components, and the nature, order, or order of the component is not limited by the term. When a component is described as being "connected", "coupled" or "connected" to another component, the component may be directly connected to or connected to the other component, but another component between each component It should be understood that may be "connected", "coupled" or "connected".

Components included in any one embodiment and components including a common function will be described using the same name in other embodiments. Unless there is an objection to the contrary, the description in any one embodiment may be applied to other embodiments, and a detailed description will be omitted in the overlapping scope.

1 is a perspective view of a heat treatment apparatus according to an embodiment, FIG. 2 is a perspective view of a frame unit, FIG. 3 is a perspective view of a chamber unit and a heating unit, FIG. 4 is a perspective view of a shutter unit, and FIG. 5 is a support unit It is a perspective view, FIG. 6 is a perspective view of a supply / exhaust unit, and FIG. 7 is a perspective view of a scaffolding / railing unit.

1 to 7, the heat treatment apparatus 10 according to an embodiment includes a frame unit 100, a chamber unit 200, a shutter unit 300, a heating unit 400, a support unit 500, a grade It may include an exhaust unit 600 and a scaffolding / railing unit 700.

At this time, the heat treatment device 10 according to an embodiment refers to a device for heat-treating a semiconductor component such as a wafer or a glass substrate at a high temperature, for example, of the heat treatment device 10 according to an embodiment. Applications are not limited to this, and can be used to heat-treat or test various materials.

However, hereinafter, an example in which a semiconductor component such as a glass substrate is heat-treated in the heat treatment apparatus 10 according to an embodiment will be described.

In addition, the overall specification, ± X axis direction refers to the front and rear of the heat treatment device 10 according to an embodiment, ± Y axis direction refers to both sides of the heat treatment device 10 according to an embodiment, ± Z axis The direction may indicate an up-down direction of the heat treatment apparatus 10 according to an embodiment.

In particular, the X-axis direction refers to the front of the heat treatment apparatus 10 according to an embodiment, for example, the surface facing the X-axis direction in the chamber unit 200 and the shutter unit 300 may be the front surface, -X-axis direction refers to the rear of the heat treatment apparatus 10 according to an embodiment, for example, the surface facing the -X-axis direction in the chamber unit 200 and the shutter unit 300 may be a rear surface.

In addition, the Y-axis direction refers to the right side of the heat treatment apparatus 10 according to one embodiment, for example, the surface facing the Y-axis direction in the chamber unit 200 may be a right side, and the -Y-axis direction is The left side of the heat treatment apparatus 10 according to an embodiment is covered, and for example, a side facing the -Y axis direction in the chamber unit 200 may be a left side.

In addition, the Z-axis direction refers to the upper side of the heat treatment apparatus 10 according to an embodiment, for example, the surface facing the Z-axis direction in the chamber unit 200 may be an upper surface, and the -Z axis direction is one Pointing to the lower side of the heat treatment apparatus 10 according to the embodiment, for example, the surface facing the -Z axis direction in the chamber unit 200 may be a lower surface.

Schematically, the frame unit 100 may be provided to support the chamber unit 200.

Specifically, the chamber unit 200 is placed on the top of the frame unit 100, and the shutter unit 400 is disposed on the front of the frame unit 100 and the chamber unit 200 placed on the top of the frame unit 100. And, a scaffolding / railing unit 700 may be disposed on one side of the frame unit 100.

In this way, the frame unit 100 may be provided in any form as long as it can stably support the components placed on the frame unit 100 in the heat treatment apparatus 10 according to an embodiment.

In addition, a semiconductor component, such as a wafer or a glass substrate, may be accommodated inside the chamber unit 200.

In addition, a shutter unit 300 that opens or closes at least one open section provided on the front surface of the chamber unit 200 is disposed in front of the chamber unit 200 to load or unload a heat treatment target in the chamber unit 200. Can be loaded.

In addition, a heating unit 400 is mounted on the inner surface of the chamber unit 200 to heat-treat a heat treatment object disposed in the chamber unit 200 at a high temperature.

Although not specifically shown, the heating unit 400 may be mounted on the rear side of the shutter unit 300. Specifically, the heating unit 400 may be mounted on a surface facing the front surface of the chamber unit 200 in the shutter unit 300.

In addition, a support unit 500 in which a heat treatment target is accommodated may be disposed inside the chamber unit 200.

Meanwhile, the supply / exhaust unit 600 may be configured to adjust an internal environment or an internal temperature of the chamber unit 200 when heat treatment such as heating and cooling is performed on a heat treatment target in the chamber unit 200. . For example, the supply / exhaust unit 600 may be configured to supply external air to the chamber unit 200 or exhaust internal air of the chamber unit 200.

Finally, the scaffolding / railing unit 700 is disposed on one side of the frame unit 100 as described above, so that the operator can maintain the chamber unit 200 through the scaffolding / railing unit 700 for maintenance, etc. (200). Accordingly, the configuration of the scaffolding / railing unit 700 is not limited to that shown in FIG. 7, and may be in any form as long as the operator can access the chamber unit 200.

The configuration of the heat treatment apparatus 10 according to an embodiment has been described above, and detailed structures of various units included in the heat treatment apparatus 10 according to an embodiment will be described below.

FIG. 8 is an exploded view of the chamber unit, FIG. 9 shows a panel portion assembled to the frame portion, FIG. 10 is a rear view of the chamber unit, and FIG. 11 shows a position where the shutter unit is assembled in the frame portion, FIG. 12 shows the configuration of the shutter unit, FIGS. 13A to 13C show the up and down driving of the shutter unit, FIG. 14 is a sectional view along AA in FIG. 12, and FIG. 15 shows the tilting driving of the shutter unit, and FIG. 16 (a) and (b) show the local exhaust provided in the shutter unit, FIGS. 17 (a) and (b) show the operation of the local exhaust, and FIGS. 18 and 19 show the configuration of the heater unit. , FIG. 20 shows the configuration of the heating zone by the heater unit, FIGS. 21 (a) and (b) show the configuration of the heating unit provided in the panel unit, and FIGS. 22 (a) to (c) show the panel unit Shows the fixing method of the heating module for, Figure 23 (a) and (b) shows the configuration of the heating unit provided in the shutter unit 24, the configuration of the power connection unit, FIG. 25 shows the configuration of the support unit, FIGS. 26A to 26D show the configuration of the rack unit, and FIGS. 27A to 27D show the configuration of the plurality of guide units, 28 shows a state in which the muffle member is retained by the side holding guide portion and the corner holding guide portion, and FIG. 29 shows the monitoring portion and the first sealing portion, and FIGS. 30 (a) and (b) monitor FIG. 31 shows the mounting position of the negative, FIG. 31 shows the temperature measuring unit and the second sealing unit, FIG. 32 is a fluid flow diagram of the cooling regeneration unit, FIG. 33 shows the arrangement of the supply and exhaust ports, and FIG. Shows the configuration of, and Fig. 35 shows a case in which 27 glass substrates are accommodated.

In particular, referring to FIG. 8, the chamber unit 200 may include a frame portion 210, a panel portion 220, an additional frame portion 230 and a door portion 240.

The frame part 210 may constitute an entire exterior for accommodating a semiconductor component such as a heat treatment object, for example, a wafer or a glass substrate.

For example, the frame portion 210 may form a box structure (eg, a rectangular parallelepiped or a regular cube).

At this time, the inner space of the frame portion 210 may be provided in a size suitable for receiving the support unit 500 in which the heat treatment object is accommodated.

Hereinafter, a total of 10 glass substrates are accommodated in the upper portion of the inner space of the chamber unit 200, and a total of 10 glass substrates are accommodated in the lower portion of the inner space of the chamber unit 200, and thus, in the chamber unit 200. For example, a case where a total of 20 glass substrates are acceptable will be described as an example.

However, the total number of glass substrates that can be accommodated in the chamber unit 200 is not limited thereto, and it is natural that various numbers may be provided.

For example, a total of 9 glass substrates are accommodated in the upper portion of the interior space of the chamber unit 200, and a total of 9 glass substrates are accommodated in the center of the interior space of the chamber unit 200, and the chamber unit 200 ), A total of 9 glass substrates are accommodated in the lower portion of the interior space, and for example, a total of 27 glass substrates can be accommodated in the chamber unit 200.

In addition, the upper and lower sides of the frame portion 210 may be opened to assemble the panel portion 220, and the rear portion of the frame portion 210 may be equipped with a door portion 240 to be opened or closed.

On the other hand, at least one open section may be provided on the front surface of the frame portion 210, which is for loading and unloading heat treatment targets individually at upper and lower portions of the inner space of the chamber unit 200 later.

Although FIG. 8 shows that two open sections are provided on the front surface of the frame portion 210, it is natural that three or more open sections may be provided on the front surface of the frame portion 210 in some cases.

Further, the at least one open section may be selectively opened or closed by the shutter unit 300 disposed on the front surface of the frame portion 210.

For example, as shown in FIG. 8, when two open sections are provided on the front surface of the frame portion 210, any one of the two open sections can be selectively opened by the shutter unit 300, The other of the two open compartments can be closed. Accordingly, heat loss in the chamber unit 200 may be minimized when the shutter unit 300 is opened or when a heat treatment object is loaded or unloaded.

The panel unit 220 may be assembled to the aforementioned frame unit 210.

The panel portion 220 may be assembled to, for example, upper and lower surfaces and both sides of the frame portion 210.

Specifically, the panel unit 220 includes a first panel unit 222 assembled to the upper surface of the frame unit 210, a second panel unit 224 assembled to the lower surface of the frame unit 210, and a frame unit 210. It may include a third panel portion 226 assembled on the left side of the fourth panel portion 228 assembled on the right side of the frame portion 210.

At this time, the first panel portion 222, the second panel portion 224, the third panel portion 226 and the fourth panel portion 228 may be provided in a structure that can be assembled to the frame portion 210.

Specifically, referring to FIG. 9, after the first panel portion 222, the second panel portion 224, the third panel portion 226 and the fourth panel portion 228 are assembled to the frame portion 210, It can be fixed by a bolt (B).

As such, since the first panel portion 222, the second panel portion 224, the third panel portion 226, and the fourth panel portion 228 need not be welded to the frame portion 210, the chamber unit ( When manufacturing 200), thermal deformation may be minimized, the structure of the chamber unit 200 may be simplified, and structural stability of the chamber unit 200 may be secured.

In addition, if there is a panel portion requiring replacement among the first panel portion 222, the second panel portion 224, the third panel portion 226, and the fourth panel portion 228, the frame portion 210 is The first panel portion 222, the second panel portion 224, the third panel portion 226, and the fourth panel portion 228 can be easily replaced or maintained through bolt release.

In addition, referring to FIG. 9 further, a position where the frame part 210 and the panel part 220 are assembled, specifically, a position where the frame part 210 and the first panel part 222 are assembled, the frame part 210 ) And the position where the second panel unit 224 is assembled, the position where the frame unit 210 and the third panel unit 226 are assembled, and the position where the frame unit 210 and the fourth panel unit 228 are assembled. The sealing pad SP may be inserted in the.

The sealing pad SP may be made of, for example, silicon material, and any one can be used as long as the frame part 210 and the panel part 220 can be sealed.

In addition, the frame portion 210 has a sealing groove (G) is formed so that the sealing pad (SP) is inserted, the release preventing jaw (J) for preventing the separation of the sealing pad (SP) inserted in the sealing groove (G) It may be provided. For example, the sealing groove G is formed along the longitudinal direction of the frame portion 210, and on the sealing groove G on one side and the other side of the sealing groove G along the longitudinal direction of the sealing groove G. A departure preventing jaw J formed to protrude may be formed.

Additionally, a pipe through which the cooling water (PCW) passes may be positioned adjacent to a position where the frame portion 210 and the panel portion 220 are assembled, and the sealing pad (SP) adjacent to the pipe through which the cooling water (PCW) passes It can be positioned, the insulation portion (I) may be filled in the corner portion of the frame portion 210. Accordingly, heat loss at a position where the frame unit 210 and the panel unit 220 are assembled can be effectively prevented, and temperature control in the chamber unit 200 can be effectively performed.

At this time, although not specifically shown, a manifold for supplying cooling water (PCW) may be disposed under the chamber unit 200. For example, a plurality of manifolds are provided, one of the plurality of manifolds supplies cooling water (PCW) to the chamber unit 200, and the other of the plurality of manifolds provides cooling water (PCW) to the shutter unit 300. Can supply. Alternatively, cooling water (PCW) may be supplied to the chamber unit 200 and the shutter unit 300 through one manifold having an increased facility capacity.

Meanwhile, an additional frame part 230 may be disposed outside the panel part 220.

Specifically, the additional frame portion 230 may be provided to be inserted toward the front of the frame portion 210 from the rear side of the frame portion 210 that is not assembled by the panel portion 220. Accordingly, if the frame portion 210 forms a complete box structure, the additional frame portion 230 may form an incomplete box structure.

The door unit 240 may be mounted on the additional frame unit 230 described above.

The door part 240 may be arranged to open or close the rear surface of the frame part 210.

Specifically, the door unit 240 is for maintenance of the chamber unit 200, and may be mounted on an additional frame unit 230 provided separately from the frame unit 210 so as not to affect deformation of the chamber unit 200. have. Thereby, the sealing force of the chamber unit 200 can be further improved.

In particular, referring to FIG. 10, the door part 240 may be hinged to one side of the additional frame part 230.

For example, a hinge base may be mounted on one side of the additional frame part 230 and a hinge pin may be mounted on the door part 240. At this time, a plurality of hinge bases and hinge pins may be mounted at positions corresponding to each other in the additional frame unit 230 and the door unit 240, and the plurality of hinge bases may be disposed along one side of the additional frame unit 230. Spaced apart, the plurality of hinge pins may be spaced apart from each other along one side of the door portion 240.

The door part 240 may be opened or closed up to a range of 90 ° by the hinge connection structure of the additional frame part 230 and the door part 240.

In addition, the chamber unit 200 may further include a clamp portion 250 for clamping the door portion 240 to the frame portion 210.

A plurality of clamp parts 250 may be provided, and the plurality of clamp parts 250 may be spaced apart from each other along the rear edge of the frame part 210.

Specifically, the clamp part 250 may include a base member 252, a nut member 254, a bolt member 256 and a washer member 258.

The base member 252 may be mounted outside the frame portion 210.

For example, the base member 252 may have a 'c' cross-sectional shape.

The nut member 254 may be fixed in the base member 252.

The nut member 254 may be arranged to open toward the door portion 240 in the base member 252.

At this time, a bolt groove is formed on the upper surface of the base member 252, and after placing the nut member 254 in the base member 252, the nut member 254 is inserted into the bolt groove by inserting the bolt B into the base member. Can be fixed to 252.

The bolt member 256 may be arranged to be fastened with the nut member 254.

Specifically, the bolt member 256 is arranged to extend in the direction from the frame portion 210 toward the door portion 240, the fastening direction of the bolt member 256 and the nut member 254 is from the door portion 240 The direction toward the frame portion 210 may be, and the fastening release direction of the bolt member 256 and the nut member 254 may be a direction toward the door portion 240 from the frame portion 210.

A washer member 258 may be mounted outside the bolt member 256.

Further, a spring 2562 may be applied to the washer member 258.

The spring 2562 may be wrapped around the outer surface of the bolt member 256 and connected to the washer member 258.

Accordingly, when the door portion 240 is clamped by the clamp portion 250, the washer member 258 is framed on the bolt member 256, specifically when the bolt member 256 is fastened to the nut member 254. It may limit the movement toward the portion 210, specifically toward the nut member 254 or the base member 252.

Meanwhile, a clamp groove 242 may be formed in the door part 240 for clamping the door part 240.

The clamp groove 242 may be formed at a position corresponding to the clamp portion 250, for example, a plurality of clamp grooves 242 may be formed to be spaced apart from each other along the border of the door portion 240.

In addition, although not specifically shown in the drawings, the bolt member 256 is inserted through one open side of the clamp groove 242, so that the bolt member 256 has the door portion 240 through the clamp groove 242. It can protrude in the open direction.

Specifically, the door part 240 may be clamped to the frame part 210 by the clamp part 250 as follows.

First, the rear surface of the additional frame part 230 is closed by the door part 240.

At this time, the bolt member 256 protrudes outward from the door part 240 through the clamp groove 242.

Then, by clamping the bolt member 256 in the nut member 254, the door portion 240 is clamped to the frame portion 210.

On the other hand, by loosening the bolt member 256, the bolt member 256 is released from the clamp groove 242 of the door part 24, and then the door part 240 is opened from the rear side of the additional frame part 230. You can.

At this time, a plurality of clamp portions 250 are spaced apart from the rear of the frame portion 210 along the edge, and a plurality of clamp grooves 242 are spaced from the rear side of the door portion 240 along the edge, so that the frame portion The sealing force of the 210 and the door part 240 may be further improved.

In addition, FIG. 11 shows a state in which the sealing pad SP is applied to a position where the frame unit 210 and the shutter unit 400 are assembled, and the additional frame unit 230 and the door unit 240 are assembled. The same can be applied to.

Specifically, the sealing pad SP may be made of, for example, silicone material, and any one can be used as long as the additional frame portion 230 and the door portion 240 can be sealed.

In addition, a groove G is formed in the additional frame portion 230 so that the sealing pad SP is inserted, and a release preventing jaw J is provided to prevent separation of the sealing pad SP inserted in the groove G. Can be. For example, a groove G is formed along the longitudinal direction of the additional frame portion 230, and protrudes on the groove G from one side and the other side of the groove G along the longitudinal direction of the groove G. Departure preventing jaw (J) can be welded. At this time, in order to prevent the thermal deformation of the additional frame portion 230 as much as possible when welding the departure preventing jaw J, the departure preventing jaw J may be spot welded.

In this way, as well as preventing leakage from the assembly portion of the door portion 240 by the sealing pad SP, the release preventing jaw J is welded to the groove G, due to frequent opening or closing of the door portion 240. It is possible to effectively prevent the separation of the sealing pad SP from being generated.

In addition, as described above with reference to FIG. 9, a pipe through which the coolant (PCW) passes may be positioned adjacent to a position where the additional frame unit 230 and the door unit 240 are assembled, and the sealing pad SP The cooling water (PCW) may be located adjacent to the pipe through which the heat insulating material (I) may be filled in a corner portion of the additional frame part (230). Accordingly, it is possible to effectively prevent heat loss at a position where the additional frame unit 230 and the door unit 240 are assembled, and to effectively perform temperature control in the chamber unit 200. At this time, as described above, a manifold for supplying cooling water (PCW) may be disposed under the chamber unit 200.

On the other hand, the shutter unit 300 may be mounted on the front surface of the frame unit 210 described above.

Hereinafter, the chamber unit 200 and the shutter unit 300 are described as separate components, but it is natural that the shutter unit 300 may be included as a shutter unit in the chamber unit 200.

The shutter unit 300 may be configured to open or close the front surface of the frame portion 210, particularly at least one open section.

At this time, the shutter unit 300 may be provided to be slidingly driven in the vertical direction.

Specifically, referring to FIG. 13, the shutter unit 300 may include a plurality of shutter units, and the plurality of shutter units may include an upper shutter unit 310 and a frame unit ( 210 may include a lower shutter portion 320 located at the bottom of the front.

In addition, the shutter unit 300 may further include an upper and lower driving unit 330 for driving the upper shutter unit 310 and the lower shutter unit 320, and a forward and backward driving unit 340 for the shutter unit.

Specifically, the upper and lower driving units 330 may drive the upper shutter unit 310 and the lower shutter unit 320 in the vertical direction.

The upper and lower driving parts 330 are installed to extend in the vertical direction on one side of the upper shutter part 310 and the lower shutter part 320, and the screw jack member 332 which is rotationally driven by a motor member (not shown) and the While driving in the vertical direction by the rotation drive of the screw jack member 332 may include an upper and lower guide member 334 for guiding the upper and lower driving of the upper shutter unit 310 and the lower shutter unit 320.

Specifically, a set of screw jack members 332 and upper and lower guide members 334 are disposed on one side from the front surface of the upper shutter unit 310, and a set of other sets are formed on the other side from the front surface of the upper shutter unit 310. A screw jack member 332 and an upper and lower guide member 334 may be disposed.

Similarly, a set of screw jack members 332 and upper and lower guide members 334 are disposed on one side from the front of the lower shutter unit 320, and a set of other sets are formed on the other side from the front of the lower shutter unit 320. A screw jack member 332 and an upper and lower guide member 334 may be disposed.

At this time, the motor member for driving the screw jack member 332 mounted on one side from the front of the upper shutter unit 310, and the screw jack member 332 mounted on the other side from the front surface of the first shutter unit 310 The motor members for driving are synchronized with each other, and the screw jack member 332 mounted on one side from the front of the upper shutter part 310 and the screw jack member 332 mounted on the other side from the front of the upper shutter part 310. ) Can be rotated in the same direction.

Similarly, the motor member for driving the screw jack member 332 mounted on one side from the front of the lower shutter part 320 and the screw jack member 332 mounted on the other side from the front surface of the lower shutter part 320 The motor members for driving are synchronized with each other, and the screw jack member 332 mounted on one side from the front of the lower shutter part 320 and the screw jack member 332 mounted on the other side from the front of the lower shutter part 320. ) Can be rotated in the same direction.

In this way, the upper and lower guide members 334 are included in the upper and lower driving parts 330, and the motor members mounted on both sides of the upper shutter part 310 and the lower shutter part 320 are synchronized with each other, so that the upper shutter part 310 and Driving up and down of the lower shutter unit 320 may be more stably implemented.

Meanwhile, the forward-backward driving unit 340 for the shutter unit may include a cylinder member 342 and a forward-backward guide member 324.

The cylinder member 342 is mounted on the front surface of the shutter unit 300 to drive the shutter unit 300 forward and backward by hydraulic pressure or pneumatic pressure.

At this time, the forward drive of the shutter unit 300 indicates that the shutter unit 300 is driven toward the chamber unit 200, and the reverse drive of the shutter unit 300 is the shutter unit 300 and the chamber unit 200 Points to driving in a distant direction.

The forward-backward guide member 344 may be spaced apart from the cylinder member 342 at the front of the shutter unit 300 to guide the forward-backward driving of the shutter unit 300.

For example, the forward-backward guide member 344 may include a shaft element 3442 and a bush element 3444 through which the shaft element 3442 is moved.

At this time, the upper shutter unit 310 and the lower shutter unit 320 may be equipped with a cylinder member 342 and a forward and backward guide member 344, respectively, and further, the upper shutter unit 310 and the lower shutter unit 320 ) May be equipped with a plurality of cylinder members 342 and a plurality of forward and backward guide members 344, respectively.

For example, a total of six sets of cylinder members 342 and a forward and backward guide member 344 may be mounted on the upper shutter part 310, and a total of six sets of cylinder members 342 may also be installed on the lower shutter part 320. And a forward-backward guide member 344 may be mounted.

As described above, a plurality of cylinder members 342 and a plurality of forward and backward guide members 344 are mounted on the upper shutter part 310 and the lower shutter part 320, thereby increasing the size of the chamber unit to accommodate a large amount of heat treatment target ( 200), the forward / backward driving of the shutter unit 300 may be more stably implemented.

13A to 13C, the upper shutter part 310 and the lower shutter part 320 may be driven as follows by the upper and lower driving parts 330 and the forward and backward driving parts 340 for the shutter unit.

13A, when a process (eg, a heat treatment process) is in progress in the heat treatment apparatus 10 according to an embodiment, the up and down driving unit 330 and the forward and backward driving unit 340 for the shutter unit are provided. All may not be driven. Accordingly, the upper shutter unit 310 and the lower shutter unit 320 are not driven, and the upper and lower portions of the frame unit 210 may be closed.

13B, after the lower shutter unit 320 is driven backward by the forward / reverse driving unit 340 for the shutter unit mounted on the front surface of the lower shutter unit 320, both side surfaces of the lower shutter unit 320 Sliding downward by the up and down driving unit 330 disposed in, the lower portion may be opened from the front of the frame unit 210.

As a result, the upper portion of the interior space of the chamber unit 200 is closed by the upper shutter unit 310, and the lower shutter unit 320 is detached from the front surface of the frame unit 210. Accordingly, the heat treatment object may be loaded in the lower portion of the interior space of the chamber unit 200, or the heat treatment object disposed in the lower portion of the interior space of the chamber unit 200 may be unloaded.

In addition, after the heat treatment object is loaded or unloaded with respect to the lower portion of the inner space of the chamber unit 200, the lower shutter portion 320 is moved upward and downward by the upper and lower driving portions 330 disposed on both sides of the lower shutter portion 320. After being slidably driven, while being driven forward by the forward / backward driving unit 340 for the shutter unit mounted on the front side of the lower shutter unit 320, the lower portion may be closed on the front side of the frame unit 210.

13C, the upper shutter unit 310 is driven backward by the forward / reverse driving unit 340 for the shutter unit mounted on the front side of the upper shutter unit 310, and the lower shutter unit 320 is the lower shutter unit. After being driven backward by the forward / backward driving unit 340 for the shutter unit mounted on the front side of the unit 320, the upper shutter unit 310 is disposed by the upper and lower driving units 330 disposed on both sides of the upper shutter unit 310. Sliding downward, and the lower shutter unit 320 is slidingly driven downward by the upper and lower driving units 330 disposed on both sides of the lower shutter unit 320, the upper portion of the frame unit 210 may be opened. .

Here, the upper shutter unit 310 and the lower shutter unit 320 have been described as individually and simultaneously driving backward and downward, but the lower shutter unit 320 is first driven backward and then driven downward, and then the upper shutter It is natural that the unit 310 can be driven backward and downward.

As a result, the lower portion of the interior space of the chamber unit 200 is closed by the upper shutter unit 310, and the lower shutter unit 320 is released from the front surface of the frame unit 210. Accordingly, the heat treatment object may be loaded on the upper portion of the interior space of the chamber unit 200, or the heat treatment object disposed on the upper portion of the interior space of the chamber unit 200 may be unloaded.

In addition, after the heat treatment object is loaded or unloaded with respect to the upper portion of the interior space of the chamber unit 200, the upper shutter portion 310 is moved upward and downward by the upper and lower driving portions 330 disposed on both sides of the upper shutter portion 310. Is driven by sliding, the lower shutter unit 320 is slidingly driven upward by the up and down driving unit 330 disposed on both sides of the lower shutter unit 320, and then the upper shutter unit 310 is the upper shutter unit 310 Driven forward by the forward / reverse driving unit 340 for the shutter unit mounted on the front side, and the lower shutter unit 320 is driven forward by the forward / reverse driving unit 340 for the shutter unit mounted on the front side of the lower shutter unit 320. As it is, the upper portion of the frame portion 210 may be closed.

Specifically, a total of 10 glass substrates are accommodated in the upper portion of the inner space of the chamber unit 200, and a total of 10 glass substrates are accommodated in the lower portion of the inner space of the chamber unit 200, so that the chamber unit 200 is For example, when a total of 20 glass substrates can be accommodated therein, when the lower shutter unit 320 is driven backward and slidingly driven, a total of 10 glass substrates are disposed in the lower portion of the interior space of the chamber unit 200 ( For example, when loading or unloading may be performed by a transfer robot, and the upper shutter unit 310 and the second shutter unit 320 are driven backward and slidingly driven, in the interior space of the chamber unit 200 A total of 10 glass substrates can be loaded or unloaded (eg, by a transport robot) on the top.

Here, the upper shutter unit 310 is slidingly driven downward, thereby opening the upper part of the front of the frame part 210, and the lower shutter part 320 is slidingly driven downward, thereby lowering the front part of the frame part 210. For example, the case of opening is described, but the opening method on the front of the frame part 210 by the upper shutter part 310 and the upper shutter part 320 is not limited thereto, and the upper shutter part 310 is directed upward. By being driven by sliding, the upper part is opened on the front surface of the frame part 210, and the lower shutter part 320 is slidingly driven upward, so that it is possible to open the lower part on the front surface of the frame part 210.

As described above, the above-described upper and lower driving units 330 selectively drive the upper shutter unit 310 and the lower shutter unit 320 in the vertical direction, thereby selectively opening at least one opening section provided on the front surface of the frame unit 210. Or it can be closed. In addition, the upper shutter unit 310 and the lower shutter unit 320 have a two-stage configuration, and some of the front surfaces of the chamber unit 200 are at least one of the upper shutter unit 310 and the lower shutter unit 320. Since it remains closed, it is possible to minimize heat loss inside the chamber unit 200 when the shutter unit 300 is opened or closed.

On the other hand, the shutter unit 300 may be arranged insulators in various positions.

In particular, referring to FIG. 14, the first heat insulating material I1 may be mounted between the inner surface of the upper shutter part 310, that is, between the upper shutter part 310 and the heating unit 400, and the second heat insulating material I2 ) May be mounted on the outer surface of the upper shutter unit 310.

In addition, the third heat insulating material (I3) may be mounted on the top and bottom of the upper shutter portion (310). At this time, a pipe through which the cooling water PCW passes may be positioned adjacent to the third heat insulating material I3. For example, a third insulating material I3 may be filled in a space between the upper and lower ends of the upper shutter part 310 and the pipe through which the cooling water PCW passes.

Although not specifically illustrated in FIG. 14, it is natural that the first insulating material I1, the second insulating material I2, and the third insulating material I3 may also be disposed in the lower shutter part 320.

In addition, although not specifically shown, a manifold for supplying cooling water (PCW) may be disposed under the chamber unit 200.

In this way, since the heat insulating material is positioned at various positions of the shutter unit 300, heat loss in the shutter unit 300 can be effectively prevented, and temperature control in the chamber unit 200 can be effectively performed.

Meanwhile, referring to FIG. 11 again, the position where the frame unit 210 and the shutter unit 300 are assembled, specifically, the position where the frame unit 210 and the upper shutter unit 310 are assembled and the frame unit 210 The sealing pad SP may be inserted at a position where the and the lower shutter unit 320 are assembled.

The sealing pad may be made of, for example, silicone material, and any one can be used as long as the frame portion 210 and the shutter unit 300 can be sealed.

In addition, a groove G is formed in the frame portion 210 so that the sealing pad SP is inserted, and a release preventing jaw J is provided to prevent separation of the sealing pad SP inserted in the groove G. You can. For example, a groove G is formed along the longitudinal direction of the frame portion 210, and is formed to protrude on the groove G on one side and the other side of the groove G along the longitudinal direction of the groove G. The departure preventing jaw J may be welded. At this time, in order to prevent the thermal deformation of the frame portion 210 as much as possible when welding the departure preventing jaw J, the departure preventing jaw J may be spot welded.

In this way, as well as preventing leakage from the assembly portion of the shutter unit 300 by the sealing pad SP, the release preventing jaw J is welded to the sealing groove G, resulting in frequent opening or closing of the shutter unit 300. It is possible to effectively prevent the separation of the sealing pad SP, which may be caused.

In particular, referring to FIG. 15, the shutter unit 300 may further include a tilting unit 350 for tilting the upper shutter unit 310 or the lower shutter unit 320.

For example, the tilting part 350 is detachably attached to the upper part of the upper shutter part 310 or the lower shutter part 320 to the basic frame of the shutter unit 300 or the frame part 210 of the chamber unit 200. The configured fixing member (not shown) and the lower end of the upper shutter unit 310 or the lower shutter unit 320 are configured to be tiltable with respect to the basic frame of the shutter unit 300 or the frame unit 210 of the chamber unit 200 A hinge member 352 may be included.

In addition, the tilting unit 350 may further include a gas spring member 354 mounted on the lower end of the first shutter unit 310 or the second shutter unit 320. At this time, the gas spring member 354 may help smooth the tilting driving of the upper shutter portion 310 or the lower shutter portion 320.

However, the configuration of the tilting unit 350 is not limited to this, and any one is possible as long as the upper shutter unit 310 or the lower shutter unit 320 can be tilted.

Specifically, when the maintenance of the heating unit 400 and the heat insulating material (I1, I2, I3 in FIG. 14) is mounted on the inner surface of the upper shutter unit 310 or in the upper portion of the interior space of the chamber unit 200 When maintenance of the accommodated support unit 500 is required, the upper shutter unit 310 may be manually tilted by 90 ° toward the front of the frame unit 210.

Alternatively, when maintenance of the heating unit 400 and the heat insulating material (I1, I2, I3 of FIG. 14) mounted on the inner surface of the lower shutter unit 320 is required or accommodated in the lower portion of the interior space of the chamber unit 200 When maintenance of the support unit 500 is required, the second shutter unit 320 may be manually tilted by 90 ° toward the front of the frame unit 210.

Or, if the heating unit 400 and the heat insulating material (I1, I2, I3 of FIG. 14) mounted on the inner surface of the upper shutter unit 310 and the inner surface of the second shutter unit 320 are required or the chamber When maintenance of the support unit 500 accommodated in the interior space of the unit 200 is required, the upper shutter unit 310 and the lower shutter unit 320 are manually tilted by 90 ° toward the front of the frame unit 210. I can do it.

In this way, the upper shutter part 310 and the lower shutter part 310 may be manually opened or closed by selectively tilting the upper shutter part 310 and the lower shutter part 320, so that the upper shutter part 310 and the lower shutter part It is possible to facilitate maintenance of a heating unit mounted on the inner surface of 320, for example, the sixth heating unit 460 and the heat insulating material.

Also, referring to FIGS. 16A and 16B, the shutter unit 300 may further include a local exhaust unit 360.

Although it has been described herein that the shutter unit 300 includes a local exhaust unit 360, the local exhaust unit 360 may be included in the heat treatment apparatus 10 as a local exhaust unit separately from the shutter unit 300. Of course it is.

The local exhaust portion 360 may include a frame member 362, a forward-backward driving member 364 for local exhaust, and an exhaust member 366.

The frame member 362 may be formed to surround the outer rims of the upper shutter portion 310 and the lower shutter portion 320, and may form an exhaust space.

A tube or a cooling line (not shown) through which cooling water (PCW) passes may be installed inside the frame member 362 to prevent deformation of the frame member 362 itself during the heat treatment process. For example, a manifold for supplying cooling water (PCW) may be disposed under the chamber unit 200.

In addition, the frame member 362 may be individually driven back and forth with the upper shutter portion 310 and the lower shutter portion 320.

Specifically, the forward-backward driving member 364 for local exhaust may be connected to the outside of the frame member 362.

The forward-backward driving member 364 for local exhaust may be driven, for example, in a cylinder manner. At this time, the frame member 362 is driven forward and backward by the forward and backward driving member 364 for local exhaust, whereby local exhaust through the local exhaust unit 360 may be performed.

In addition, the exhaust member 366 is mounted on both sides of the frame member 362, it is possible to discharge the heat in the chamber unit 200 transmitted through the interior space of the frame member 366.

Specifically, referring to FIGS. 17 (a) and 17 (b), the local exhaust unit 360 may be operated as follows in cooperation with the forward / reverse driving unit 340 for the shutter unit.

In particular, as shown in FIG. 17 (a), the upper shutter unit 310 is driven forward toward the chamber unit 200 by the forward / reverse driving unit 340 for the shutter unit, and is localized in the local exhaust unit 360. When the frame member 362 is driven backward by the forward-backward driving member 364 for exhaust, the exhaust member 366 may be closed by the upper shutter unit 310. In this case, particularly during the heat treatment process, local exhaust may not be performed through the local exhaust unit 360.

On the other hand, as shown in Figure 17 (b), the upper shutter unit 310 is driven backward by far from the chamber unit 200 by the forward / reverse driving unit 340 for the shutter unit, and the local of the local exhaust unit 360 When the frame member 362 is driven forward and backward by the forward and backward driving member 364 for exhaust, the exhaust member 366 may be opened by the upper shutter unit 310. In this case, particularly during the cooling process, local exhaust may be made through the local exhaust unit 360.

Although not specifically shown, the lower shutter unit 320 is driven forward toward the chamber unit 200 by the forward / reverse driving unit 340 for the shutter unit, and the forward / backward driving member for local exhaust of the local exhaust unit 360 When the frame member 362 is driven backward by 364, the exhaust member 366 may be closed by the lower shutter unit 320. In this case, particularly during the heat treatment process, local exhaust may not be performed through the local exhaust unit 360.

On the other hand, the lower shutter unit 320 is driven back and forth away from the chamber unit 200 by the forward / backward driving unit 340 for the shutter unit, and is driven by the forward / backward driving member 364 for local exhaust of the local exhaust unit 360. When the frame member 362 is driven forward, the exhaust member 366 may be opened by the lower shutter unit 320. In this case, particularly during the cooling process, local exhaust may be made through the local exhaust unit 360.

In addition, the local exhaust unit 360 is mounted on the upper shutter unit 310 and the lower shutter unit 320, respectively, so that the local exhaust unit 360 is driven when the upper shutter unit 310 and the lower shutter unit 320 are driven up and down. ) It can also be driven up and down.

Thus, before the temperature inside the chamber unit 200 becomes 150 degrees, the upper shutter unit 310 and the lower shutter unit 320 are reversed, and the frame member 362 is advanced to allow the chamber unit (through the exhaust member 366) to 200) It is possible to shorten the cooling time of the chamber unit 200 by exhausting the heat therein, thereby increasing the facility capacity.

The heating unit 400 may be mounted on the chamber unit 200 and the shutter unit 300 described above.

The heating unit 400 is for heating a heat treatment object disposed in the chamber unit 200, and may include a plurality of heating units.

In particular, referring to FIGS. 18 and 19, the plurality of heating units include a first heating unit 410 mounted on the first panel unit 222 of the chamber unit 200, and a second panel unit of the chamber unit 200 ( 224), the second heating unit 420, the third panel unit 430 of the chamber unit 200 (226 in FIG. 8), the third heating unit 430, the chamber unit 200, the fourth panel unit The fourth heating unit 440 mounted on (228 of FIG. 8), the fifth heating unit 450 mounted on the door unit 240 of the chamber unit 200, and the sixth heating mounted on the shutter unit 300 It may include a portion 460.

Specifically, the first heating unit 410 may be mounted on the inner surface of the first panel unit 222. At this time, the first heating unit 410 is divided into 16 heating modules 412, so that each heating module 412 can be detachably mounted on the first panel unit 222. In addition, a plurality of heater members may be detachably attached to each heating module 412. At this time, the heater member may be provided with, for example, a Kantal Wire ceramic heater.

In addition, the second heating unit 420 may be mounted on the inner surface of the second panel unit 224. At this time, the second heating unit 420 is divided into 16 heating modules 422, so that each heating module 422 can be detachably mounted on the second panel unit 224. In addition, a plurality of heater members may be detachably attached to each heating module 422. At this time, the heater member may be provided with, for example, a Kantal Wire ceramic heater.

In addition, the third heating unit 430 may be mounted on the inner surface of the third panel unit 226. At this time, the third heating unit 430 is divided into 20 heating modules 432, so that each heating module 432 can be detachably mounted on the third panel unit 226. In addition, a plurality of heater members may be detachably attached to each heating module 432. At this time, the heater member may be provided with, for example, a Kantal Wire ceramic heater.

In addition, the fourth heating unit 440 may be mounted on the inner surface of the fourth panel unit 228. At this time, the fourth heating unit 440 is divided into 20 heating modules 442, so that each heating module 442 can be detachably mounted on the fourth panel unit 228. In addition, a plurality of heater members may be detachably attached to each heating module 442. At this time, the heater member may be provided with, for example, a Kantal Wire ceramic heater.

In addition, the fifth heating unit 450 may be mounted on the inner surface of the door unit 240. At this time, the fifth heating unit 450 is divided into 15 heating modules 452 so that each heating module 452 can be detachably mounted on the door unit 240. In addition, a plurality of heater members may be detachably attached to each heating module 452. At this time, the heater member may be provided with, for example, a Kantal Wire ceramic heater.

In addition, the sixth heating unit 460 may include a plurality of heating modules 462 mounted on inner surfaces of the upper shutter unit 310 and the lower shutter unit 320. At this time, the sixth heating unit 460 is divided into 15 heating modules 462 so that each heating module 462 can be detachably mounted on the upper shutter unit 310 and the lower shutter unit 320. have. For example, six heating modules 462 may be mounted on the upper shutter unit 310, and nine heating modules 462 may be mounted on the lower shutter unit 320, and an upper portion of the upper shutter unit 310 may be mounted. The heating module 462 may not be mounted. In addition, a plurality of heater members may be detachably attached to each heating module 462. At this time, the heater member may be provided with, for example, a Kantal Wire lamp heater.

Additionally, the sixth heating unit 460 may further include a plurality of heating wires 464 mounted on an edge portion of the chamber unit 200. In this case, the plurality of heating wires 464 may be spaced apart from each other, for example, along the lower side and both sides of the chamber unit 200. In FIG. 19, six heating wires 464 are disposed on the lower side of the chamber unit 200 facing the lower portion of the shutter unit 300, and on both sides of the chamber unit 200 facing both sides of the shutter unit 300. Although seven heating wires 464 are illustrated as being arranged, it is natural that the number of the plurality of heating wires 464 is not limited thereto, and may be provided in various numbers.

In addition, the plurality of heating wires 464 may be connected in series with the second heating unit 420, the third heating unit 430, and the fourth heating unit 440 without supplying a separate power. Specifically, a plurality of heating wires 464 disposed on the upper portion of the plurality of heating wires 464 are connected in series with the second heating unit 420, and a plurality of heating wires 464 disposed on the left side of the plurality of heating wires 464 ) Is connected in series with the third heating unit 430, and a plurality of heating wires 464 disposed on the right side of the plurality of heating wires 464 may be connected in series with the fourth heating unit 440.

As described above, heat loss in the edge portion of the shutter unit 300 may be prevented by the plurality of heating wires 464 mounted on the edge portion of the chamber unit 200. Specifically, the temperature in the shutter unit 300 may be compensated to prevent the temperature from falling at the edge of the shutter unit 300 by the plurality of heating wires 464.

In addition, here, the first heating unit 410, the second heating unit 420, the third heating unit 430, the fourth heating unit 440, the fifth heating unit 450 and the sixth heating unit 460 ) Has been described as an example in which it is divided into 15 to 20 heating modules, but the number of heating modules is not limited thereto, and it can be provided that various numbers can be provided.

Referring again to FIG. 19, the plurality of heating units may include a seventh heating unit 470 formed to extend from at least one of the panel units 220 toward the center of the chamber unit 200.

The seventh heating unit 470 may be provided with, for example, a Kantal Wire rod heater.

Specifically, one end of the seventh heating unit 470 is mounted on the third panel unit 226 assembled on the left side of the frame unit 210, and the other end of the seventh heating unit 470 is the frame unit 210. It can be mounted on the fourth panel portion 228 assembled on the right side of the. At this time, the seventh heating unit 470 may penetrate the third heating unit 430 mounted on the third panel unit 226 and the fourth heating unit 440 mounted on the fourth panel unit 228. .

As described above, the seventh heating unit 470 may be disposed to cross the center in the interior space of the chamber unit 200, evenly with respect to the heat treatment object accommodated adjacent to the center in the interior space of the chamber unit 200. Heat treatment can be performed.

In FIG. 19, four seventh heating units 470 are provided, and four seventh heating units 470 are shown to be spaced apart from each other, but the number of seventh heating units 470 is not limited thereto, and the chamber Various numbers may be provided depending on the capacity of the heat treatment object accommodated in the unit 200 or the size of the chamber unit 200.

In particular, referring to FIG. 20, the first heating unit 410 to the sixth heating unit 460 may include a plurality of heating modules to form a plurality of heating zones.

At this time, it is natural that the number of the plurality of heating modules and the number of the plurality of heating regions may be the same or different.

For example, the first heating unit 410 may be configured with 16 heating zones identical to 16 heating modules, and the second heating unit 420 may be configured with 16 heating zones identical to 16 heating modules. 6 heating zones different from 20 heating modules may be configured in the third heating unit 430, 6 heating zones different from 20 heating modules may be configured in the fourth heating unit 440, Six heating regions different from 15 heating modules may be configured in the fifth heating unit 450, and fifteen heating regions identical to fifteen heating modules may be configured in the sixth heating unit 460.

Meanwhile, the 16 heating zones Z # 1, ..., Z # 16 configured by the second heating unit 420 may be independently controlled (control or crtl) main areas.

In addition, some of the six heating zones (Z # 17, Z # 18, Z # 19) constituted by the third heating unit 430 may be independently controlled main zones.

In addition, some of the six heating regions (Z # 20, Z # 21, Z # 22) formed by the fourth heating unit 440 may be independently controlled main regions.

In addition, some of the six heating zones (Z # 19, Z # 22, Z # 23) formed by the fifth heating unit 450 may be independently controlled main areas. At this time, Z # 19 and Z # 22 are arranged adjacent to Z # 22 in the heating zone formed by the third heating unit 430 and Z # 19 and the fourth heating unit 440 to be identical to each other. Can be controlled. Accordingly, in the table at the bottom of FIG. 20, only Z # 23 is counted in the number of main regions constituted by the fifth heating unit 450 and described as one.

In addition, some of the 15 areas (Z # 24, ..., Z # 33) constituted by the sixth heating unit 460 may be independently controlled lamp areas. At this time, Z # 24, Z # 26, Z # 28, Z # 30, and Z # 32 are described on both sides of the shutter unit 300 in the same manner, which means that the heating areas arranged on both sides of the shutter unit 300 are It means that it can be controlled equally to each other, whereby the number of lamp regions configured by the sixth heating unit 460 in the table at the bottom of FIG. 20 is described as ten.

On the other hand, sixteen heating zones Z # 1S, ..., Z # 16S formed by the first heating unit 410 are six heating zones Z # 1,. .., Z # 16) can be a proportionately (or dependently) controlled slave area.

In addition, the remaining portions (Z # 17S, Z # 18S, Z # 19S) of the six heating regions constituted by the third heating unit 430 are partially (Z # 17, Z # 18, Z # 19) can be a proportionately (or dependent) controlled slave area.

In addition, the remaining portions (Z # 20S, Z # 21S, Z # 22S) of the six heating regions formed by the fourth heating unit 440 are some of the adjacent heating regions (Z # 20, Z # 21, Z # 22) can be a slave area controlled proportionately (or dependently).

In addition, the remaining portions (Z # 19S, Z # 22S, Z # 23S) of the six heating regions formed by the fifth heating unit 450 are a portion of the adjacent heating regions (Z # 19, Z # 22, Z # 23) can be a proportionately (or dependently) controlled slave region.

At this time, Z # 19S and Z # 22S are arranged adjacent to Z # 22S among the heating zones formed by the third heating unit 430 and Z # 19S and the fourth heating unit 440 to be identical to each other. Can be controlled. Accordingly, in the table at the bottom of FIG. 20, only Z # 23S is counted and described as one in the number of slave regions constituted by the fifth heating unit 450.

As described above, the heating unit 400 is composed of a plurality of heating zones, and a plurality of heating zones are divided into a main zone, a ramp zone, and a slave zone to control the temperature, thereby effectively controlling the temperature of the interior space of the chamber unit 200. Can be adjusted.

In addition, referring to FIGS. 21 (a) and 21 (b), the first heating unit 410 to the fifth heating unit 450 may be integrally formed with the heat insulating material (I).

Specifically, after forming a groove in the heat insulating material (I), each heater member (HP) constituting the first heating part (410) to the fifth heating part (450) is mounted, and the heater from one side of the heat insulating material (I) The member HP may be open. Thereby, the heating capability of the first heating unit 410 to the fifth heating unit 450 may be maximized, and maintenance of the heater member HP may be facilitated.

Additionally, a plate (P; safty plate) and a reinforcing bar (R) are mounted on the other side of the heat insulating material (I) opposite to one side of the heat insulating material (I), so that each heater member (HP) and heat insulating material (I) is a panel part ( 220) and the door part 240 can be stably fixed.

In addition, referring to FIGS. 22A to 22C, the heating unit 400 may be fixed to the chamber unit 200 as follows.

For example, when a heating module 432 of one of the third heating units 430 is fixed to a part of the third panel unit 226, fixing the heating module 432 to the third panel unit 226 is performed. For the shaft HS may be mounted protruding toward the outside, the heating module 432 may be fixed to the shaft HS. At this time, a plurality of shafts HS on the third panel unit 226 may be mounted at positions corresponding to corner portions of the heating module 432. After the heating module 432 is fixed to the shaft HS, by assembling the nut N to the shaft HS projecting to the outside through the heating module 432, a part of the third panel portion 226 is attached. One heating module 432 of the third heating unit 430 may be fixed.

In addition, when a plurality of heating modules 432 are assembled to the third panel unit 226, after mounting the fixing block HB to each shaft HS for fixing the plurality of heating modules 432, A plurality of heating modules 432 may be fixed to each other by assembling the nut N to the shaft HS protruding outside through the fixing block HB. At this time, for example, two through holes may be formed in the fixing block HB to pass through two adjacent shafts HS.

Here, the case where the third heating unit 430 is fixed to the third panel unit 226 is described as an example, but when the first heating unit 410 is fixed to the first panel unit 222, the second panel When fixing the second heating unit 420 to the unit 224, when fixing the fourth heating unit 440 to the fourth panel unit 228, and the fifth heating unit 450 to the door unit 240 Similarly, in the case of fixing), it is natural that the heating module can be fixed to the panel using a shaft (HS) and a nut (N), and additionally, a plurality of heating modules can be fixed together using a fixing block (HB). Do.

As described above, the heating modules 412, 422, 432, 442, and 452 are fixed to the panel 220 using the shaft HS and the nut N, and a plurality of heating modules are fixed together using a fixing block HB. By fixing, the separation of the heating modules 412, 422, 432, 442, 452 with respect to the panel portion is easy, and a failure occurs when any one of the heating modules 412, 422, 432, 442, 452 later fails. The heater modules 412, 422, 432, 442, 452 can be easily replaced.

In addition, as shown in Figure 22 (c), a plurality of heating modules (412, 422, 432, 442, 452) is formed in the step where the assembly, a plurality of heating modules (412, 422, 432, 442) , 452 is not only easy to assemble, but also reduces heat loss in the chamber unit 200.

In particular, referring to FIG. 23, the sixth heating unit 460 may include 15 heating modules 462, and each heating module 462 may include a plurality of heater members HP, for example 10 A lamp heater may be provided.

Specifically, six heating modules 462 may be arranged in the first shutter unit 310 in two rows and three columns, and nine heating modules 462 in the second shutter unit 320 may be arranged in three rows and three columns. It can be spaced apart from each other.

At this time, 15 heating modules 462 are configured in three rows (one side, center, and other side) in the shutter unit 300, so that the shutter unit 300 can effectively perform heat preservation (or temperature maintenance) and temperature control. have.

In addition, a plurality of heater members (HP) is provided with a quartz rod heater to maximize the heating capability, includes a plurality of heating modules 462, and each of the heating modules 462 is equipped with a plurality of lamp heaters. Maintenance of the heater member HP may also be facilitated.

In addition, as described above, the heat insulating materials (I1, I2, and I3 in FIG. 14) are mounted at various positions in the shutter unit 300, so that the heat generated by the sixth heating unit 460 can be more effectively preserved.

In particular, referring to FIG. 24, the chamber unit 200 may be provided with a power connection unit 260 in connection with the heating unit 400.

The power connection unit 260 may separately supply power to a plurality of heating modules included in the plurality of heating units 410 to 450.

In addition, the power connection unit 260 may be mounted on the outer surface of the panel unit 220 or the outer surface of the door unit 240.

Specifically, the power connection unit 260 may include a connection block 261, a cover block 262, a sealing pad 263, a connection shaft 264, and a through-type connector 265.

The connection block 261 may be provided to support the end of the power line PL of the heating unit 400 exposed to the outside through the outer surface of the panel portion 220 or the door portion 240. In addition, the connection block 261 may be provided to support the connection shaft 264.

At this time, the power line PL of the heating unit 400 and the connection shaft 264 may be electrically connected by the connection block 261.

The cover block 262 may be provided such that the power line PL and the connection block 261 of the heating module are accommodated therein.

At this time, a plurality of power lines PL may be accommodated in the cover block 262.

For example, the cover block 262 may include a first cover block 2622 and a second cover block 2624, and the first cover block 2622 is fixed to the outer surface of the panel portion 220 , The second cover block 2624 can be fixed to the outer surface of the first cover block 2622 for simple safety purposes.

In addition, the first cover block 2622 may have a larger cross-sectional area than the second cover block 2624, and the power line PL and connection block of the heating unit 400 may be formed in the first cover block 2622. 261 is received, the connection shaft 264 and the through-type connector 265 are accommodated in the second cover block 2624, so that the connection shaft 264 and the through-type connector 265 are not exposed to the outside. You can.

The sealing pad 263 may be disposed between the outer surface of the panel portion 220 and the cover block 262.

Accordingly, leakage by the cable or power line PL of the heating unit 400 that penetrates through the outer surface of the panel 220 or the door 240 can be prevented.

Specifically, the sealing pad 263 improves the airtightness of the hole formed to be penetrated by the cable 220 or the power line PL of the heating unit 400 to the panel portion 220 or the door portion 240, thereby processing through the hole The leakage of gas N ₂ can be prevented.

The connection shaft 264 may be spaced apart from the power line PL of the heating unit 100 and supported on the connection block 261 and penetrate the cover block 262.

At this time, the connection shaft 264 may be formed to protrude more than the power line PL of the heating unit 400 from the outer surface of the panel unit 220.

Specifically, a portion adjacent to the outer surface of the panel portion 220 in the connection shaft 264 may be supported on the connection block 261, and may penetrate the cover block 262 to protrude to the outside.

The through-type connector 265 is provided with a through-type male connector, and may be coupled to the cover block 262.

In addition, a connection shaft 264 penetrating the connection block 261 may be penetrated through the through-type connector 265.

At this time, the through-type connector 265 improves the airtightness of the hole formed to be penetrated by the cable 220 or the power line PL of the heating unit 400 to the panel portion 220 or the door portion 240, thereby processing through the hole To prevent leakage of gas N ₂ , a connection shaft 264 may be installed to install the through-type connector 265.

In this way, the power connection unit 260 supplies power to the heating unit 400 and leaks through the cable or power line PL of the heating unit 400 exposed to the outside through the chamber unit 200. Can be prevented.

The support unit 500 may be disposed inside the chamber unit 200 described above.

The support unit 500 may be provided to receive a heat treatment object inside the chamber unit 200.

Here, a case where 10 glass substrates are accommodated in the upper portion and 10 glass substrates are stored in the lower portion in the support unit 500 will be described as an example.

In particular, referring to FIG. 25, the support unit 500 may include a base portion 510, a rack portion 520 and a muffle portion.

The base unit 510 may be disposed on the lower surface of the chamber unit 200. In addition, a rack portion 520 may be disposed on an upper portion of the base portion 510.

In addition, a plurality of base parts 510 may be provided, and a plurality of base parts 510 may be spaced apart from each other.

At this time, the base portion 510 may be provided with, for example, a ceramic plate, and may be made of a high-strength material for supporting the rack portion 520.

The rack part 520 may be disposed on the base part 510 described above.

The rack unit 520 may include a plurality of post members 522 and a plurality of support members 524.

At this time, the overall shape of the rack portion 520 may correspond to the shape of the frame portion 210.

The plurality of post members 522 may be disposed to correspond to the plurality of base parts 510, and may be formed to extend along the stacking direction of the heat treatment object in the support unit 500.

At this time, an additional frame member 522a may be connected to the top of the plurality of post members 522. For example, four additional frame members 522a may be coupled to the tops of the plurality of post members 522.

In addition, the plurality of post members 522 may be made of quartz to minimize thermal expansion or thermal mass during heat treatment.

On the other hand, the lower end of the plurality of post members 522 may be disposed on the upper surface of the base portion 510, for example, the lower portion of the post member 522 on the upper surface of the base portion 510 by a fixing pin 5222. This can be fixed. Specifically, after the post member 522 is placed on the upper surface of the base portion 510, a plurality of fixing pins 5222 may be coupled to the lower end of the post member 522 with the post member 522 therebetween. .

At this time, in order to facilitate the coupling of the fixing pin 5222, a plate 5224 may be provided at the bottom of the post member 522, and the fixing pin 5222 may be coupled to the plate 5224. In addition, the cross-sectional area of the upper surface of the base portion 510 may be larger than that of the plate 5224.

In addition, it is natural that the post member 522 with respect to the base portion 510, and further, the rack portion 520 may be disassembled by disassembling the fixing pin 5222.

The upper surface of the post member 522 in the corner portion of the rack 520 may be assembled with an additional frame member 522a. At this time, the assembled state of the post member 522 and the additional frame member 522a may be fixed by the fixing bar 5226. For example, the post member 522 and the post member 522 by inserting the fixing bar 5226 into the top of the post member 522 and the additional frame member 522a while the post member 522 and the additional frame member 522a are assembled. The assembled state of the additional frame member 522a can be maintained.

As described above, the lower end of the post member 522 may be fixed to the base portion 510 by the fixing pin 5222, and the upper end of the post member 522 may be further frame member ( 522a), it is possible to improve the structural stability of the rack portion 520, it is easy to combine or disassemble to facilitate maintenance.

In addition, a plurality of support members 524 may be spaced apart from each other along the longitudinal direction of the plurality of post members 522 so that the heat treatment objects are spaced apart in the vertical direction within the support unit 500.

The plurality of support members 524 may support the glass substrate GS as a heat treatment target.

For example, in the support unit 500, 10 support members 524 are disposed so that 10 glass substrates GS are stored at the top, and 10 glass substrates GS are stored at the bottom. The support member 524 may be disposed.

At this time, a buffer space may be formed between the 10-speed support member 524 and the 11-speed support member 524 within the support unit 500. This is for insertion of the seventh heating unit 470 arranged to penetrate the center of the chamber unit 200 as described above.

In particular, referring to FIGS. 26A to 26C, each support member 524 may include a plurality of tube elements 5252 and a plurality of support pin elements 5244.

The plurality of tube elements 5242 may be made of quartz material to minimize thermal mass.

Further, the plurality of tube elements 5242 may be assembled with each other to correspond to the shape of the glass substrate GS. For example, the plurality of tube elements 5242 can be arranged in a grid shape.

In particular, two tube elements 5252 may be coupled to each other in a position corresponding to the center of the glass substrate GS, and the support member 524 may have a two-part structure.

Further, a plurality of support fin elements 5244 may be coupled on the plurality of tube elements 5242.

At this time, contact portions 5244a may be detachably mounted to the ends of the plurality of support pin elements 5244 respectively. Since the glass substrate GS is directly supported on the contact portion 5244a, the contact portion 5244a may be made of a material that does not damage the glass substrate GS.

Specifically, the plurality of support fin elements 5244 may be arranged to be spaced apart from each other along the longitudinal direction of the plurality of tube elements 5242. At this time, a plurality of support fin elements 5244 may be inserted on the plurality of tube elements 5242.

As described above, since the plurality of tube elements 5242 are positioned at positions corresponding to the center of the glass substrate GS, the glass substrate GS as well as the rim of the glass substrate GS by the plurality of support fin elements 5244 are provided. ) Can also be more stably supported by a plurality of support pin elements 5244 and contact portions 5244a.

Further, since both sides of the center of the glass substrate GS are supported by the auxiliary contact portion 5244b, the weight of the temperature sensor (not shown) mounted on the glass substrate GS during the temperature increase test of the glass substrate GS It is possible to prevent the glass substrate GS from being broken due to deflection at both sides of the center.

Meanwhile, as illustrated in FIG. 26B, the auxiliary contact portion 5244b may be removed in some cases. For example, when mass production of the glass substrate GS, it is not necessary to mount a temperature sensor on the glass substrate GS, so the auxiliary contact portion 5244b may be removed. In other words, the plurality of support pin elements mounted on the two tube elements 5252 extending in the crossing direction with respect to the two tube elements 5252 installed in combination with each other at positions corresponding to the center of the glass substrate GS ( 5244) may not be equipped with the auxiliary contact portion 5244b.

As such, the auxiliary contact portion 5244b may be mounted or removed from the plurality of support pin elements 5244 in some cases. Here, the case where only the contact portion 5244b is mounted or removed on the plurality of support pin elements 5244 is described as an example, but the support pin element 5244 itself equipped with the auxiliary contact portion 5244b itself is a tube element 5242. It is natural that it can be mounted or removed.

In particular, referring to FIG. 26C, an assembly portion 5222a provided to be assembled to the post member 522 may be connected to an end of the tube element 5242. For example, an assembly portion 5222a may be connected to both ends of the tube element 5222, and a groove may be formed in the post member 522 to allow the assembly portion 5222a to be inserted.

As such, assembly and disassembly of the support member 524 with respect to the post member 522 can be facilitated by the assembly portion 5222a provided in the tube element 5252.

Meanwhile, referring to FIGS. 27A to 27D, a muffle unit may be coupled to the rack unit 520.

The muffle unit may include a plurality of muffle members 530 provided in a plate shape, configure an overall shape of the support unit 500, and prevent particles from entering the rack unit 520 from the outside.

At this time, the muffle member 530 may not be mounted to the rack unit 520 at the front of the support unit 500 to which the heat treatment target is loaded or unloaded.

For example, the muffle member 530 may be made of Neoceram material.

Further, the plurality of muffle members 530 may be provided to be assembled or disassembled. For example, six muffle members 530 may be assembled on the upper and lower surfaces of the rack unit 520, and eight muffle members 530 may be assembled on the side surfaces of the rack unit 520.

In this case, the support unit 500 may further include a plurality of guide parts in order to stably maintain the muffle part, particularly the plurality of muffle members 530 in the rack part 520.

The plurality of guide parts may include a stacked guide part 540, a side holding guide part 550, and a corner holding guide part 560.

The stacking guide portion 540 may be coupled between a plurality of muffle members 530 on the side of the rack portion 520 to prevent separation when stacking the plurality of muffle members 530.

At this time, a plurality of stacked guide portions 540 may be provided, and the plurality of stacked guide portions 540 may be disposed at various positions where a plurality of muffle members 530 are stacked.

In particular, referring to FIG. 27B, the stacking guide portion 540 may include an inner plate member 542, a through plate member 544, and an outer plate member 546.

The inner plate member 542 may be disposed to contact the inner surface of the plurality of muffle members 530 through through holes 5302 formed by grooves provided in each of the plurality of muffle members 530. At this time, the cross-sectional area of the inner plate member 542 is formed to be larger than the area of the through hole 5302, so that the inner plate member 542 of the plurality of muffle members 530 in a state in which a plurality of muffle members 530 are assembled It can be kept in contact with the inner surface.

The through plate member 544 may be connected to one surface of the inner plate member 542 and disposed in a through hole 5302 formed by grooves provided in the plurality of muffle members 530, respectively. At this time, the thickness of the through plate member 544 may be provided to correspond to the thickness of the muffle member 530, and the cross-sectional area of the through plate member 544 may be provided to correspond to the area of the through hole 5302. Accordingly, the through plate member 544 may be maintained in the through hole 5302 in a state where the plurality of muffle members 530 are assembled.

The outer plate member 546 may be connected to one surface of the through plate member 544 and disposed to face the inner plate member 542. In addition, the outer plate member 546 may be disposed to contact the outer surfaces of the plurality of muffle members 530. At this time, the cross-sectional area of the outer plate member 546 is formed larger than the area of the through-hole 5302, so that the outer plate member 546 of the plurality of muffle members 530 in a state where the plurality of muffle members 530 are assembled It can be kept in contact with the outer surface.

The stacked guide portion 540 configured as described above is inserted into the through hole 5302 by inserting the inner plate member 542 from the outside of the support unit 500 in a state where a plurality of muffle members 530 are assembled. The lamination guide portion 540 may be easily coupled to 5302. In addition, the cross-sectional areas of the inner plate member 542 and the outer plate member 546 are formed to be larger than the cross-sectional area of the through-hole 5302 to prevent foreign matter from entering the support unit 500 through the through-hole 5302 or heat loss. You can.

The side holding guide portion 550 may keep the muffle member 530 in place on the side of the rack portion 520.

Specifically, the side holding guide part 550 may be disposed on the inner surface of the plurality of muffle members 530 or the rear surfaces of the plurality of muffle members 530 to keep the plurality of muffle members 530 in place. .

In addition, a plurality of side holding guide portions 550 may be provided, and a plurality of side holding guide portions 550 may be spaced apart along the longitudinal direction of the post member 522 on the side surface of the rack portion 520.

In particular, referring to FIG. 27C, the side holding guide portion 550 may include a holder member 552 and a coupling member 554.

The holder member 552 may be provided in a bar shape, for example, and may be installed through the post member 522 disposed on the side of the rack 520, and the coupling member 554 may be, for example, 'c' It may be provided in a cross-sectional shape of the ruler to penetrate the post member 522 and be coupled to the holder member 552 protruding outside. For example, the holder member 552 can be inserted through the open side of the coupling member 554.

In particular, referring to FIG. 28, a muffle member 530 is disposed outside the side holding guide part 550, and a part of the post member 522 is formed to contact the muffle member 530, so that the holder member 552 ) And the muffle member 530 may be held in the space between the coupling member 554 and the post member 522.

At this time, a plurality of fixing pins 5222 for fixing the post member 522 on the base portion 510 may also be disposed inside the muffle member 530.

In addition, the tube element 5222 may be assembled to the post member 522 through the post member 522 in a direction perpendicular to the direction in which the holder member 552 and the engagement member 554 engage.

Referring again to FIG. 27A, the corner holding guide unit 560 may keep the muffle member 530 in place at the corner of the rack unit 520.

In addition, a plurality of corner holding guide portions 560 may be provided, and a plurality of corner holding guide portions 560 may be spaced apart along the longitudinal direction of the post member 522 at the corner of the rack portion 520.

Specifically, a part of the corner holding guide part 560 is disposed on the inner surface of the muffle member 530 or the back of the muffle member 530, and the other part of the corner holding guide part 560 is of the muffle member 530. It may be disposed on the outer surface or the front surface of the muffle member 530.

In particular, referring to FIG. 27D, the corner holding guide portion 560 may include a holder member 562 and a coupling member 564 and an additional coupling member 566.

The holder member 562 may be provided in a bar shape, for example, and installed through a post member 522 disposed at a corner of the support unit 500, and the coupling member 564 may be, for example, 'c 'It is provided in a cross-sectional shape can be coupled to the holder member 562 projecting to the outside through the post member 522, the additional coupling member 566 also, for example, provided in a' c 'cross-sectional shape It can be coupled to the coupling member 564. For example, the holder member 562 can be inserted through the open side of the coupling member 564, and the coupling member 564 can be inserted through the open side of the additional coupling member 566.

Referring again to FIG. 28, the coupling member 564 and the additional coupling member 566 in the holder member 562 in the corner holding guide part 560 are arranged outside the end of the end where the coupling member 566 is not coupled, A portion of the post member 522 is formed to be in contact with the muffle member 530, so that the muffle member 530 may be fixed in a space between the holder member 562 and the post member 522.

On the other hand, in the corner holding guide portion 560, an end to which the coupling member 564 and the additional coupling member 566 are coupled to the holder member 562 may be disposed outside the muffle member 530.

Thereby, the inner surface or the rear surface of the muffle member 530 is in contact with a part of the corner holding guide part 560, and the outer surface or the front surface of the muffle member 530 is in contact with the other part of the corner holding guide part 560, The muffle member 530 may be held in place at a corner of the rack 520.

In this case, it is natural that a through hole may be formed in the muffle member 530 fixed by the corner holding guide part 560 so that the holder member 562 penetrates.

Space is secured by integrating the rack part 520 and the muffle part (or a plurality of muffle members 530) through the lamination guide part 540, the side holding guide part 550, and the corner holding guide part 560 as described above. In addition, it can reduce thermal mass and be useful for maintenance.

Meanwhile, referring to FIG. 29, a monitoring unit 570 for sensing the temperature in the support unit 200 by the heating unit 400 may be disposed in the support unit 500.

In particular, the monitoring unit 570 may measure the heating temperature of the glass substrate heated by the heating unit 400.

The monitoring unit 570 may be provided with, for example, a temperature sensor, and may be arranged to be inserted in the rack unit 520, particularly in a plurality of tube elements 5222.

Specifically, the monitoring unit 570 may extend to penetrate the plurality of tube elements 5222 and the post member 522 to be exposed to the outside of the chamber unit 200.

In this case, the sleeve element 570a may be disposed in the space between the post member 522 and the panel unit (not shown) of the chamber unit 200 to surround the outside of the monitoring unit 570.

Specifically, a total of three measurement points may be built in one monitoring unit 570 installed to penetrate one tube element 5242.

In particular, with reference to FIGS. 30 (a) and (b), nine measurement points are built in per support member 524 or per slot, and the upper (19-stage support) in the height direction of the support unit 500 If measured at the member 524), the center (11-stage support member 524) and the bottom (2-stage support member 524), for 27 points in the support unit 500 by the monitoring unit 570 The temperature can be measured.

In addition, the first sealing portion 270 may be disposed in the chamber unit 200 to prevent heat loss due to the mounting of the monitoring unit 570 in the chamber unit 200. The first sealing part 270 may include a gasket 272 and an O-ring 274 disposed outside the chamber unit 200.

At this time, the monitoring unit 570 may be exposed to the outside through the gasket 272 and the O-ring 274, and heat despite the penetration of the monitoring unit 570 to the panel unit of the chamber unit 200. Loss can be prevented.

Meanwhile, referring to FIG. 31, a temperature measurement unit 280 may be disposed in the chamber unit 200.

The temperature measuring unit 280 may extend through the heating unit 400 from the interior space of the chamber unit 200 to the outside of the chamber unit 200, for example.

At this time, the temperature measuring unit 280 may also be provided as a temperature sensor, and may measure temperature generated in the heating unit 400 and use it as data for controlling the operation of the heating unit 400.

Specifically, two measurement points may be built in one temperature measurement unit 280, and a plurality of temperature measurement units 280 may be penetrated in the heating unit 400.

In addition, the second sealing unit 290 may be mounted on the chamber unit 200 to prevent heat loss due to the attachment of the temperature measurement unit 280 to the chamber unit 200. The second sealing portion 290 is a gasket 292 disposed outside the chamber unit 200, a fixing block 294 disposed on the gasket 292, and a through-type connector mounted on the fixing block 294 (296).

Although not specifically shown, it is natural that the temperature measuring unit 280 may be mounted on the shutter unit 300 and the second sealing unit 290 may be mounted on the shutter unit 300.

Meanwhile, referring to FIGS. 32 to 34, the heat treatment apparatus 10 according to an embodiment may further include a cooling and regeneration unit 800 in connection with the air supply and exhaust unit 600.

Referring to FIG. 32, the cooling regeneration unit 800 may schematically cool the inside and outside of the support unit 500 separately.

Specifically, the internal heat of the support unit 500 in the chamber unit 200 is transmitted from the heat exchanger 810 through the first line (C1), the heat cooled by the cooling fluid in the heat exchanger 810 is It can be transferred to the interior of the support unit 500 again.

In addition, the external heat of the support unit 500 in the chamber unit 200 is transferred from the heat exchanger 810 through the second line C2, and the heat cooled by the cooling fluid in the heat exchanger 810 is again It can be transferred to the interior of the support unit 500.

At this time, a plurality of second lines C2 may be provided, and accordingly, a plurality of heat exchangers 810 may also be provided.

In particular, the flow of heat or the flow of fluid in the first line C1 and the second line C2 may be in opposite directions.

For example, in FIG. 32, the internal heat of the support unit 500 is exhausted through the upper end of the chamber unit 200, and the lower end of the chamber unit 200 is passed through the heat exchanger 810 through the first line C1. Through the heat exchanger 810 through the second line (C2) through the heat exchanger 810, the air is supplied to the interior of the support unit 500, and the external heat of the support unit 500 is exhausted through the lower end of the chamber unit 200. Although shown as being supplied to the outside of the support unit 500 through the upper end of the 200), it is natural that the flow direction of the heat or the flow direction of the fluid may be reversed in the first line C1 and the second line C2. .

In addition, the temperature of the internal heat and the temperature of the external heat exhausted from the support unit 500 may be, for example, 365 ° C, and the temperature of the heat supplied to the chamber unit 200 again through the heat exchanger 810 may be, for example. For example, it may be 200 ° C.

Thus, by cooling the inside and the outside of the support unit 500 separately, and the flow of heat or the flow of fluid in the first line (C1) and the second line (C2) in opposite directions, the support unit 500 It is possible to reduce the temperature deviation inside and outside, and to prevent the temperature at the inlet side from becoming lower than the temperature at the outlet side.

In particular, referring to FIG. 33, a plurality of external ports OP of the supply / exhaust unit 600 may be disposed outside the support unit 500 within the chamber unit 200, and inside the support unit 500 A plurality of internal ports (IP) of the air supply and exhaust unit 600 may be arranged.

At this time, the plurality of external ports OP may be provided in a larger number than the plurality of internal ports IP, and when viewed from the top, the plurality of internal ports IP are disposed inside the glass substrate GS, The plurality of external ports OP may be disposed outside the glass substrate GS.

In addition, referring to FIG. 34, the cooling regeneration unit 800 may include a heat exchanger 810, a blower 820, a filter 830, and a PCW manifold 840.

At this time, a plurality of heat exchangers 810 and blowers 820 may be provided, which may be provided to correspond to the number of lines shown in FIG. 32.

For example, the heat exchanger 810 in the cooling regeneration unit 800 after the fluid is transferred from the chamber unit 200 to the first line C1 or the second line C2 by the operation of the blower 820 and The filter 830 may be heat-exchanged and cleaned through the filter 830 to be supplied to the chamber unit 200 again.

At this time, the PCW manifold 840 is disposed in the cooling regeneration unit 800, and may be utilized to exchange heat in the heat exchanger 810.

As described above, a case in which a total of 20 glass substrates can be accommodated in the chamber unit 200 in the heat treatment apparatus 10 according to an embodiment is described as an example, but as described above, the total of glass substrates accommodated in the chamber unit 200 The purchase is not limited to this, and it is natural that various purchases can be made.

In particular, referring to FIG. 35, when a total of 27 glass substrates can be accommodated in the chamber unit 200, the structure of the heat treatment apparatus 10 according to an embodiment may be modified as follows.

Descriptions similar to the case in which a total of 20 glass substrates are accommodated in the chamber unit 200 will be omitted below, and differences will be described.

Although not specifically shown, three open sections may be formed at the top, center, and bottom of the chamber unit 200 at the front.

In addition, the shutter unit 300 may include an upper shutter unit 310, a lower shutter unit 320 and an additional shutter unit 320a. At this time, it is natural that the lower shutter unit 320 may be the central shutter unit, and the additional shutter unit 320a may be the lower shutter unit.

The upper shutter part 310 is located at the upper part of the front of the frame part 210 to open or close the upper open section at the front of the frame, and the lower shutter part 320 is located at the front of the frame part 210. Located in the lower portion of the upper shutter unit 310 to open or close the central opening section in the front of the frame, the additional shutter unit 320a is located in the lower portion of the lower shutter unit 320 in front of the frame unit 210 Located to open or close the lower opening section at the front of the frame.

At this time, a total of 9 glass substrates are accommodated in the upper portion of the interior space of the chamber unit 200, and a total of 9 glass substrates are accommodated in the center of the interior space of the chamber unit 200, and In the lower portion of the interior space, a total of 9 glass substrates are accommodated, for example, a total of 27 glass substrates can be accommodated in the chamber unit 200.

In this case, the shutter unit 300 may be driven as follows.

When a process (for example, a heat treatment process) is in progress in the heat treatment apparatus 10 according to an embodiment, the upper shutter part 310, the lower shutter part 320 and the additional shutter part 320a are closed. Can be as

When the upper shutter unit 310 is driven backward and then slidingly driven upward, when the upper part is opened from the front of the frame part 210, the heat treatment object disposed on the upper part of the interior space of the chamber unit 200 is unloaded or , In the interior space of the chamber unit 200, a heat treatment target may be loaded. At this time, the center and the lower part of the inner space of the chamber unit 200 are closed by the lower shutter part 320 and the additional shutter part 320a, respectively.

When the lower shutter unit 320 is driven backward and then slidingly driven downward, when the center is opened from the front of the frame unit 210, the heat treatment target disposed in the center of the interior space of the chamber unit 200 is unloaded or , In the center of the interior space of the chamber unit 200, a heat treatment target may be loaded. At this time, the upper and lower portions of the inner space of the chamber unit 200 are closed by the upper shutter portion 310 and the lower shutter portion 320, respectively.

When the additional shutter unit 320a is driven backward and then slidingly driven downward, when the lower portion is opened from the front of the frame unit 210, the heat treatment target disposed in the lower portion of the interior space of the chamber unit 200 is unloaded or , The heat treatment target may be loaded in the lower portion of the interior space of the chamber unit 200. At this time, the upper and center of the interior space of the chamber unit 200 is closed by the upper shutter unit 310 and the lower shutter unit 320, respectively.

As such, the upper shutter unit 310, the lower shutter unit 320, and the additional shutter unit 320a may be individually driven to selectively open or close the front surface of the chamber unit.

On the other hand, between the 9th support member 524 and the 10th support member 524 where the seventh heating parts 470 and 470a are disposed in the chamber unit 200, and the 18th support member 524 and the 19th support member 524 may be inserted through. Thereby, a more uniform heat distribution can be obtained in the chamber unit 200 or in the support unit 500, and the set temperature can be effectively maintained.

As such, a large amount of capacity can be accommodated in one chamber unit 200 to further improve heat treatment efficiency.

As described above, although the embodiments have been described by the limited drawings, those skilled in the art can make various modifications and variations from the above description. For example, the described techniques may be performed in a different order than the described method, and / or components such as the structure, device, etc. described may be combined or combined in a different form from the described method, or may be applied to other components or equivalents. Even if replaced or substituted by, appropriate results can be achieved.

10: heat treatment device
100: frame unit
200: chamber unit
210: frame
300: shutter unit
310: upper shutter portion
320: lower shutter portion
330: up and down driving unit
340: forward / backward driving unit for shutter unit
350: tilting unit
400: heater unit
500: support unit
600: air supply and exhaust unit
700: scaffolding / railing unit

Claims (9)

A chamber unit including a frame part constituting the entire appearance; And
A shutter unit that opens or closes the front surface of the chamber unit;
Including,
The shutter unit,
A shutter unit located on the front side of the chamber unit;
A vertical driving unit disposed on both sides of the shutter unit to drive the shutter unit up and down; And
A forward and backward driving unit for a shutter unit mounted on the front surface of the shutter unit and driving the shutter unit forward and backward;
Including,
The front-rear driving unit for the shutter unit is a heat treatment apparatus that is moved in the vertical direction together with the shutter unit by vertical driving by the vertical driving unit.
According to claim 1,
The upper and lower driving unit,
Screw jack members are installed to extend in the vertical direction on both sides of the shutter portion is rotated by a motor; And
An up-and-down guide member that guides the up-and-down driving of the shutter unit while being moved up and down by rotational driving of the screw jack member;
Including,
The motors are disposed on both sides of the shutter portion, respectively, and are heat-treated.
According to claim 1,
The forward-backward driving unit for the shutter unit,
A cylinder member mounted on the front surface of the shutter portion to drive the shutter portion forward and backward by hydraulic pressure; And
A forward-backward guide member disposed spaced apart from the cylinder member to guide forward-backward driving by the cylinder member;
Including,
A heat treatment apparatus in which a plurality of forward and backward driving units for a plurality of shutter units are spaced apart and mounted on the front surface of the shutter unit.
According to claim 1,
The shutter unit is provided in a plurality,
The plurality of shutter parts,
An upper shutter portion located at an upper portion in front of the chamber unit; And
A lower shutter portion located at a lower portion from the front of the chamber unit;
Including,
The upper shutter unit and the lower shutter unit are heat-treating devices that are selectively driven in the vertical direction to open any one of the upper and lower portions in the front of the chamber unit.
According to claim 4,
When the upper opening from the front of the chamber unit,
The upper shutter portion and the lower shutter portion are driven back and forth away from the chamber unit by the forward and backward driving portion for the shutter unit, and then driven downward by the upper and lower driving portions, thereby being lowered from the front of the chamber unit by the upper shutter portion. Is closed,
When the lower opening from the front of the chamber unit,
A heat treatment apparatus in which the lower shutter portion is moved away from the chamber unit by the forward and backward driving portion for the shutter unit, and then moved downward by the upper and lower driving portions, and the upper shutter portion is not driven.
According to claim 1,
Further comprising a heating unit mounted on the inner surface of the shutter portion,
The heating unit includes a plurality of heating modules,
The plurality of heating modules is a heat treatment device mounted in a matrix form on the inner surface of the shutter portion.
A chamber unit including a frame part constituting the entire appearance;
A shutter unit that opens or closes the front surface of the chamber unit; And
A heating unit provided in the chamber unit and the shutter unit to heat a heat treatment object disposed in the chamber unit;
Including,
The shutter unit,
A shutter unit located on the front side of the chamber unit; And
A tilting unit mounted on the shutter unit to tilt-drive the shutter unit;
Heat treatment device comprising a.
The method of claim 7,
The tilting portion,
A fixing member fixing the upper end of the shutter unit to the shutter unit; And
A hinge member provided at the bottom of the shutter unit;
Including,
A heat treatment apparatus in which the shutter unit is tilted to the front of the frame unit by the tilting unit.
The method of claim 7,
The shutter unit is provided with a heat insulating material,
The heat insulating material is provided on the inner surface or the outer surface of the shutter unit,
The heat insulating device is further provided in the space between the pipes through which cooling water passes from the top or bottom of the shutter unit.

Images