JP2021190674A - Heat treatment oven for substrate - Google Patents

Abstract

To provide a heat treatment oven for a substrate.SOLUTION: A heat treatment oven for a substrate includes: a heat treatment oven which comprises at least one door on a front surface and at least one shutter on a rear surface to take a substrate in a space arranged inside a chamber and to take the substrate applied with the heat treatment process out the chamber; a bearing shaft protruded in horizontal direction on both sides of the door; a vertical movement guide which comprises a vertical movement track which guides the bearing shaft to be coupled, and is installed in vertical direction on both sides of the door to guide the movement of the door to a vertical movement; and a door operation mechanism which comprises a movable cylinder which is coupled to a side surface of the door and opens and closes the door by a vertical movement along the vertical movement track.SELECTED DRAWING: Figure 6

Description

The present invention relates to a heat treatment oven for heat-treating a flat panel display, and more particularly to a door and a shutter constituting the heat treatment oven, and a heat treatment oven for a substrate for improving sealing performance.

Organic light emitting display devices and LCD glass substrates (hereinafter referred to as "flat panel displays") are used in various types of image devices such as image screens, TVs, mobile phones, and monitors. Organic light emitting display devices and LCD glass substrates are one of the next-generation displays and are applied to various fields. In recent years, flat panel display manufacturing technology in this field has been used to improve performance and yield. Technological development is continuing.

Temperature control and temperature uniformity in manufacturing typical organic light-emitting display devices for flat panel displays and LCD glass substrates (hereinafter referred to as "substrates" or "glass substrates") ensure the quality and yield of non-defective substrates. It is absolutely necessary for the maintenance of.

For example, in the manufacturing process of an organic light emitting display device, since an organic substance layer is formed on the surface of a substrate and can contain a certain amount of water, a drying step of evaporating the water is required.

In the manufacturing process of the LCD glass substrate, a cleaning process is performed before the surface of the substrate is coated with the photosensitive film, but after the cleaning process, a heating and drying process for removing water is performed.

Then, after the photosensitive film is coated on the LCD glass substrate, exposure and development steps are performed. A pre-baking step is performed before such an exposure and development step, and a post-baking step is sequentially performed after the exposure and development step.

As described above, most of the substrate manufacturing processes are performed by heating and drying to manufacture the substrate. Moisture generated in the substrate manufacturing process is removed by utilizing infrared rays or by heating and drying in a chamber of a heat treatment oven containing a heating element such as a heater (sheater).

It is proposed in Patent Document 1 in relation to a heat treatment oven for a substrate.

In order to heat-treat the flat panel display substrate through the chamber of the heat treatment oven, there are conditions required for each process. In order to satisfy all of these conditions, it is necessary to prevent the influence of the outside air on the chamber and minimize the heat release loss to the outside of the chamber, but it is possible to prevent the heat treatment performance of the substrate from deteriorating and to use a single process. It is possible to reduce the product defect rate of the above and satisfy the desired process conditions.

Further, in order to improve the yield of the finished product by using the heat treatment of the heat treatment oven, the smaller the in-plane variation of the substrate during the heat treatment, the better. Therefore, there is a continuous demand for a high-performance heat treatment oven. Heat treatment ovens do not meet that need.

On the other hand, in order to take the substrate into the chamber and take out the heat-treated substrate from the chamber before and after the heat treatment of the substrate using the heat treatment oven, and to block the inflow of outside air into the chamber and the release of the process gas in the chamber. It also has a door and a shutter.

Regarding the door and shutter of the heat treatment oven, Patent Document 2 proposes a "shutter device for a heat treatment oven", and Patent Document 3 proposes a "shutter drive device for a glass heat treatment oven".

For example, as the door and shutter of the conventional heat treatment oven, a type in which the door is installed outside the chamber and opened and closed to the left and right, a type in which the door is opened and closed to the left and right using a handle, and a type in which the door is fixed with a bolt are proposed.

However, the chamber door opening / closing type of the conventional heat treatment oven is not only cumbersome and complicated to open / close, but also causes heat loss in the chamber. In other words, in order to provide sealing performance by close contact between the door and the chamber, the surface of the door and the chamber do not adhere uniformly, so that heat inside the chamber is released or outside air flows in through the gap. Heat loss has occurred.

Therefore, there is a demand for a heat treatment oven for a substrate having a sealed structure of a door and a shutter suitable for a chamber of a heat treatment oven and a type capable of ensuring a sealing performance suitable for high temperature specifications.

As a result, the present inventor uses a cylinder and bearings to open and close the door up and down in a form that opens and closes to the left and right, and uses a bracket and a sealing material to bring the door into close contact with the chamber and seal it. We try to propose a high-performance substrate heat treatment oven that reduces heat loss in the chamber by ensuring performance.

Korean Registered Patent No. 10-2094763 (Public Notice Date: March 31, 2020) Korean Registered Patent No. 10-1663262 (Public Notice Date: October 7, 2016) Korean Registered Patent No. 10-1327920 (Public Notice Date: November 20, 2013)

An object of the present invention is to change the door opening / closing method of a heat treatment oven to a vertical opening / closing operation type to provide operational stability and efficiency of installation space.

Another object of the present invention is to secure the sealing structure of the door and the shutter suitable for the chamber of the heat treatment oven and the sealing performance suitable for the high temperature specification, and to minimize the heat loss of the chamber.

According to the present invention, the above object is to have at least one door on the front surface and at least one door on the back surface in order to take the substrate into the space provided in the chamber and to take out the heat-treated substrate from the chamber. A heat treatment oven equipped with one shutter, bearing shafts projecting horizontally on both sides of the door, and a vertical movement truck to which the bearing shafts are connected are provided to guide the movement of the door to vertical movement. A door operating mechanism unit provided with a vertical movement guide installed vertically on both sides of the door and a movable cylinder coupled to the side surface of the door to move the door up and down along the vertical movement track. Can be configured to include.

According to the embodiment of the present invention, the bearing shaft can be coupled to the bearing shaft mounting block of the door.

According to the embodiment of the present invention, a support bracket is installed on the door, a moving screw is coupled to the supporting bracket, and the moving screw is rotated outside the chamber to bring the door into close contact with the chamber side. It can be provided with a knob for contacting the door.

According to the embodiment of the present invention, a silicone sealing member can be inserted between the door and the chamber.

According to the embodiment of the present invention, the silicone sealing member can be provided with an elastic deformation space formed so as to be biased toward the outside where the door is located.

According to the embodiment of the present invention, a silicone sealing member can be inserted between the shutter and the chamber.

According to the embodiment of the present invention, the silicone sealing member can be provided with an elastic deformation space formed so as to be biased toward the outside where the shutter is located.

According to the embodiment of the present invention, a cooling water line for cooling the silicone sealing member to prevent deterioration of the sealing performance due to curing can be provided in the peripheral portion where the silicone sealing member is located.

According to the embodiment of the present invention, the shutter can be provided with a plurality of shielding plates for shielding heat released from the inside of the chamber to the outside.

According to the embodiment of the present invention, the shielding plate is an inner shielding plate facing the chamber, an intermediate shielding plate placed at a position separated from the inner shielding plate, and an outer side placed at a position separated from the intermediate shielding plate. It can be composed of a shielding plate.

According to the embodiment of the present invention, a cooling water line through which the cooling water flows so as to pass through the intermediate shielding plate can be provided to lower the ambient temperature.

The heat treatment oven for the substrate according to the present invention minimizes wasted space as compared with the door opening / closing method for opening / closing left / right by changing the door opening / closing method of the heat treatment oven to a vertical opening / closing operation type using a cylinder. It has the effect of securing sufficient installation space and improving operational stability by opening and closing the door.

The heat treatment oven of the substrate according to the present invention has an effect of ensuring the sealing structure of the door and the shutter suitable for the chamber of the heat treatment oven and the sealing performance suitable for the high temperature specification, and minimizing the heat loss of the chamber.

It is an example which shows the front surface part of the heat treatment oven of the substrate which concerns on one Embodiment of this invention. It is an example which shows the back part of the heat treatment oven of the substrate which concerns on one Embodiment of this invention. It is an example which shows the front surface of the heat treatment oven of the substrate which concerns on one Embodiment of this invention. It is an example of the cross-sectional view along the line AA of FIG. It is an example which shows the door up and down actuating part of the heat treatment oven of the substrate which concerns on one Embodiment of this invention. It is an example which excerpts and shows the door up / down movement guide part of the heat treatment oven of the substrate which concerns on one Embodiment of this invention. It is an example which excerpts part C of FIGS. 4 and 6 and shows in detail in the cross-sectional view. It is an example which excerpts part D of FIG. 4 and shows in detail in the cross-sectional view. It is an example which shows the cooling unit which prevents the heat curing of the silicone sealing member installed in the chamber and the shutter which concerns on one Embodiment of this invention. It is an example which shows the cooling unit installed in the shutter which concerns on one Embodiment of this invention.

Hereinafter, the contents of the "heat treatment oven for the substrate" according to the preferred embodiment of the present invention will be specifically described with reference to the accompanying drawings.

Generally, in a heat treatment oven for heat-treating a substrate, as shown in FIGS. 1 and 2, the substrate to be heat-treated is taken into each stage provided in the chamber, and the substrate that has been heat-treated is taken out from the chamber. In addition, a door can be provided on the front portion and a shutter can be provided on the back portion.

The door and shutter of the heat treatment oven of the substrate are required to have a closed structure during the heat treatment process, to have no problem in use at high temperature, and to have no interference and safety when opening and closing the door.

Also, when making a heat treatment oven for a substrate, the basic specifications of the equipment can be selected from various, but high performance sealing that can minimize the heat loss in the chamber during the heat treatment process. The structure is important.

However, the door of a conventional heat treatment oven is difficult to open and close because, for example, the door is installed outside the chamber and opened and closed by sliding left and right, or it is opened and closed left and right using a handle, and it is fixed with a bolt. Not only is it complicated, but there are restrictions on the placement space where sufficient space for opening and closing the door must be secured, and the heat loss in the chamber is not sufficiently controlled.

In other words, in order to provide sealing performance by close contact between the door and the chamber, the surface of the door and the chamber do not adhere uniformly, so that the heat inside the chamber is released or the outside air flows in through the gap. The heat loss is continuously occurring.

Therefore, in the present invention, the heat treatment oven that provides the operational stability of the door and the efficiency of the installation space by changing the door left / right opening / closing method of the conventional heat treatment oven to the vertical opening / closing operation method using a cylinder and a bearing is provided. Present.

Further, in the present invention, the door is brought into close contact with the chamber by using a bracket, and the sealing structure of the door and the shutter suitable for the chamber of the heat treatment oven and the sealing performance suitable for the high temperature specification are ensured to minimize the heat loss of the chamber. Present a heat treatment chamber that can be used.

That is, the present invention presents a high-performance heat treatment oven by opening and closing the door up and down using a cylinder and bearings and bringing the door into close contact with the chamber using brackets.

Next, more specific contents according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is an example showing a front surface portion of a heat treatment oven for a substrate according to an embodiment of the present invention. FIG. 2 is an example showing the back surface of the heat treatment oven of the substrate according to the embodiment of the present invention. FIG. 3 is an example showing the front surface of the heat treatment oven for the substrate according to the embodiment of the present invention.

As shown in FIGS. 1 to 3, the heat treatment oven 100 includes a chamber 110 provided with an inlet for passing a substrate (not shown) that requires heating or drying, and the chamber 110 includes a heater. A heating element is mounted to heat the substrate with the heat generated by the heater or to evaporate and dry the moisture. Then, the upper / lower heat transfer plate can be installed and configured so as to be in close contact with the upper and lower parts of the heater.

On one side of the chamber 110 of the heat treatment oven 100, an air supply port for inflowing a fluid containing a process gas and an exhaust port for exhausting the fluid in the chamber 110 are provided, and a frame 120 with a lug 121 for supporting and supporting the chamber 110 is provided. , And a conductive portion to which a large number of bus bars for connecting a heating wire of a heater to energize an electric current can be included.

On the other hand, referring to FIGS. 1 to 3, the basic configurations constituting the heat treatment oven, for example, the heater, the upper / lower heat transfer plate, the process gas air supply and exhaust system, and the conductive portion for supplying power to the heater are described. The configuration of the power supply system including is not directly related to the present invention. Since the basic applicable configuration of the heat treatment oven has nothing to do with the gist of the present invention and is a known configuration, the illustration thereof will be omitted in the drawings for explaining the present invention.

As shown in FIGS. 1 to 3, the heat treatment oven 100 for the substrate according to the present invention is for taking the substrate to be heat-treated into each stage provided in the chamber 110 and taking out the substrate that has been heat-treated from the chamber 110. In addition, at least one door 200 can be provided on the front surface portion, and a shutter 300 can be provided on the back surface portion.

The configuration of the main part of the heat treatment oven 100 of the substrate according to the present invention is as shown in FIGS. 4 to 8.

FIG. 4 is an example of a cross-sectional view taken along the line AA of FIG. FIG. 5 is an example showing a door vertical actuating portion of a heat treatment oven of a substrate according to an embodiment of the present invention. FIG. 6 is an example showing an excerpt of a door vertical movement guide portion of the heat treatment oven of the substrate according to the embodiment of the present invention. FIG. 7 is an example in which the C portion of FIGS. 4 and 6 is excerpted and shown in detail in a cross-sectional view. FIG. 8 is an example in which the D portion of FIG. 4 is excerpted and shown in detail in a cross-sectional view.

The heat treatment oven 100 for the substrate according to the present invention includes bearing shafts 210 projecting horizontally on both sides of the door 200.

Further, a vertical movement track 230 to which the bearing shaft 210 is connected is provided, and vertical movement guides 220 installed vertically on both sides of the door 200 are configured to guide the movement of the door 200 to the vertical movement.

Further, a movable cylinder 410 coupled to the side surface of the door 200 can be provided to include a door operating mechanism portion 400 for vertically moving and opening and closing the door 200 along the vertically moving truck 230.

Further, the bearing shaft 210 can be configured by being coupled to the bearing shaft mounting block 240 of the door 200.

Further, a support bracket 260 is installed on the door 200, a screw 251 is coupled to the support bracket 260, and the screw 251 is rotated outside the chamber to bring the door 200 into close contact with the chamber 110 side. 250 can be installed and configured.

Further, by inserting a silicone sealing member 500 between the door 200 and the chamber 110, the contact surfaces of the door 200 and the chamber 110 are maintained in a tightly sealed state, and the heat inside the chamber 110 is externally generated. It can be controlled so that it is not released to the chamber.

Further, by inserting a silicone sealing member 500 between the shutter 300 and the chamber 110, the contact surfaces of the shutter 300 and the chamber 110 are maintained in a tightly sealed state, and the heat inside the chamber 110 is discharged to the outside. It can be controlled so that it is not released.

Further, the silicone sealing member 500 can be configured to include an elastic deformation space 510 formed unevenly in the outward direction in which the door 200 is located.

As a result, when the door 200 is closed, the elastic deformation space 510 of the silicone sealing member 500 closes the gap between the contact surfaces of the door 200 and the chamber 110 while being deformed first at the same time as closing the door 200, and is in a tight state. By forming the contact surface, the airtightness between the contact surfaces of the door 200 and the chamber 110 is maintained.

Further, the silicone sealing member 500 can be configured to include an elastic deformation space 510 formed unevenly in the external direction in which the shutter 300 is located.

As a result, when the shutter 300 is closed, the elastic deformation space 510 of the silicone sealing member 500 closes the gap between the contact surfaces of the shutter 300 and the chamber 110 while being deformed first at the same time as closing the shutter 300, and is in a tight state. By forming the contact surface, the airtightness between the contact surfaces of the shutter 300 and the chamber 110 is maintained.

Here, the silicone sealing member 500 is inserted between the chamber 110 and the door 200 side and between the chamber 110 and the shutter 300 side, and can exhibit preferable performance as a sealing material. The silicone sealing member can be selected as a preferable sealing material having abundant tensile force and elasticity as compared with the chamber and surrounding structures and having physical properties that can withstand high temperature specifications.

As shown in FIGS. 9 and 10, the heat treatment oven for the substrate according to the embodiment of the present invention can be configured to include a cooling unit.

FIG. 9 is an example showing a cooling unit for preventing thermosetting of the silicone sealing member installed in the chamber and the shutter according to the embodiment of the present invention.

As shown in FIG. 9, it is preferable to install a cooling water line 520 in the peripheral portion where the silicone sealing member 500 is located. FIG. 9 is an example for explaining the cooling structure of the silicone sealing member 500 installed on the shutter side, but the cooling unit may be installed on the door side by the same principle and structure.

As a result, it is possible to cool the sealing silicone sealing member 500 installed on the door side and the shutter side, respectively, and effectively prevent deterioration of the sealing performance due to curing.

FIG. 10 is an example showing a cooling unit installed in a shutter according to an embodiment of the present invention.

As shown in FIG. 10, it is preferable that the shutter is configured to include a plurality of shielding plates 310 for shielding heat released from the inside of the chamber to the outside.

The shielding plate 310 is preferably an inner shielding plate 311 facing the chamber 110, an intermediate shielding plate 312 placed at a position separated from the inner shielding plate 311 and an outer shielding plate 313 placed at a position separated from the intermediate shielding plate 312. It is preferable to configure from.

Further, the cooling water line 320 through which the cooling water flows with reference to the intermediate shielding plate 312 can be provided.

As a result, the ambient temperature of the shutter 300 can be lowered, the heat curing of the silicone sealing member 500 installed in the peripheral portion can be prevented, the deterioration of the sealing performance can be prevented, and the sealing performance can be stably maintained. ..

Next, the operation of the heat treatment oven 100 for the substrate according to the present invention will be described with reference to FIGS. 4 to 8.

First, in the operation of opening the door 200, when the movable cylinder 410 of the door operating mechanism portion 400 is operated, the movable rod 420 of the movable cylinder 410 pushes up the door 200 upward.

At this time, the bearing shaft 210 protruding from the door 200 moves upward along the vertical movement track 230 of the vertical movement guide 220, and when the operation of the movable cylinder 410 is stopped, the door 200 is opened at the current position. stand by.

Next, conversely, in the operation of closing the door 200, when the movable cylinder 410 of the door operating mechanism 400 is operated and the movable rod 420 of the movable cylinder 410 is returned in the direction of the original position, the door 200 is returned in the direction of the original position. Pull to.

At this time, the bearing shaft 210 protruding from the door 200 moves downward along the vertical movement track 230 of the vertical movement guide 220, and when the operation of the movable cylinder 410 is stopped, the door 200 is closed at the current position. Be maintained.

Here, the bearing shaft 210 is coupled to the bearing shaft mounting block 240 of the door 200 to prevent damage, and helps a safe and smooth opening / closing action of the door 200.

On the other hand, a support bracket 260 is installed on the door 200, a moving screw 251 is coupled to the supporting bracket 260, and the moving screw 251 is rotated outside the chamber to bring the door 200 into close contact with the chamber 110 side. Can be configured by installing a knob 250.

When the door contact knob 250 is held and rotated by hand, the moving screw 251 moves in a linear direction along the support bracket 260, and the door 200 is moved so as to be in close contact with the contact surface of the chamber 110.

As a result, floating and gaps are reduced between the contact-corresponding surfaces of the door 200 and the chamber 110 to maintain a close close contact state.

Further, a silicone sealing member 500 is inserted between the door 200 and the chamber 110. When the door 200 is closed, the silicone sealing member 500 has an action of bringing the contact surfaces of the door 200 and the chamber 110 into close contact with each other in a tightly sealed state to control the heat inside the chamber 110 from being released to the outside of the door 200. Is shown.

Further, when the shutter 300 is closed by inserting the silicone sealing member 500 between the shutter 300 and the chamber 110, the silicone sealing member 500 tightly seals between the contact surfaces of the shutter 300 and the chamber 110. It shows an action of controlling the heat in the chamber 110 so as not to be released to the outside of the shutter 300 by bringing them into close contact with each other in the state.

As a result, when the door 200 and the shutter 300 are closed, the elastic deformation space 510 of the silicone sealing member 500 closes the door 200 and the shutter 300 and at the same time deforms first, and the contact surfaces of the chambers 110 of the door 200 and the shutter 300 are brought into contact with each other. By closing the gap between them to form a close contact surface, the airtightness between the contact surfaces of the shutter 300 and the chamber 110 is maintained.

The heat treatment oven according to the present invention can effectively maintain a closed structure during the heat treatment process, has no problem in use at high temperatures, and the door can be operated by opening and closing the door up and down. No additional working space is required for the door and there is no interference due to door working. Since the door can be opened and closed via the movable cylinder, work safety can be improved.

The heat treatment oven for the substrate according to the present invention minimizes wasted space as compared with the door opening / closing method for opening / closing left / right by changing the door opening / closing method of the heat treatment oven to a vertical opening / closing operation method using a cylinder. There is an advantage that a sufficient space for installation is secured and the operation stability is improved by opening and closing the door.

The substrate heat treatment oven according to the present invention provides a highly reliable heat treatment oven that minimizes heat loss in the chamber by ensuring the sealing structure of the door and shutter suitable for the chamber of the heat treatment oven and the sealing performance that meets the high temperature specifications. There is an advantage to do.

Although the present invention has been described with reference to the illustrated embodiment, the present invention is not limited to one embodiment, and can be modified and modified without departing from the gist of the present invention, and modifications thereof can be made. And changes should be understood to be included in the technical idea of the present invention.

100 Heat treatment oven 110 Chamber 200 Door 210 Bearing shaft 220 Vertical movement guide 230 Vertical movement truck 240 Bearing shaft mounting block 250 Door contact knob 251 Moving screw 260 Support bracket 300 Shutter 310 Shielding plate 311 Inner shielding plate 312 Intermediate shielding plate 313 Outer shield 320 Cooling pipe
400 Door actuating mechanism 410 Movable cylinder 420 Movable rod 500 Silicone sealing member 510 Elastic deformation space 520 Cooling pipe

Claims (11)

A heat treatment oven with at least one door on the front and at least one shutter on the back to take the substrate into the space provided in the chamber and to remove the heat treated substrate from the chamber.
Bearing shafts protruding horizontally on both sides of the door,
A vertical movement guide installed vertically on both sides of the door to guide the movement of the door to the vertical movement, provided with a vertical movement track to which the bearing shaft is coupled.
A heat treatment oven for a substrate comprising a movable cylinder coupled to the side surface of the door and a door actuating mechanism for opening and closing the door up and down along the up and down moving track. The heat treatment oven for a substrate according to claim 1, wherein the bearing shaft is coupled to a bearing shaft mounting block of the door. A support bracket is installed on the door, and the support bracket is provided with a door contact knob to which a moving screw is coupled and the moving screw is rotated outside the chamber to bring the door into close contact with the chamber side. The heat treatment oven for the substrate according to claim 1, as a feature. The heat treatment oven for a substrate according to claim 1, wherein a silicone sealing member is inserted between the door and the chamber. The heat treatment oven for a substrate according to claim 4, wherein the silicone sealing member includes an elastic deformation space formed unevenly in the outward direction in which the door is located. The heat treatment oven for a substrate according to claim 1, wherein a silicone sealing member is inserted between the shutter and the chamber. The heat treatment oven for a substrate according to claim 6, wherein the silicone sealing member includes an elastic deformation space formed unevenly in the outward direction in which a shutter is located. The peripheral portion where the silicone sealing member is located is provided with a cooling water line for cooling the silicone sealing member to prevent deterioration of the sealing performance due to curing, according to any one of claims 4 to 7. Heat treatment oven for the described substrate. The heat treatment oven for a substrate according to claim 1, wherein the shutter includes a plurality of shielding plates for shielding heat released from the inside of the chamber to the outside. The shielding plate is characterized in that it is composed of an inner shielding plate facing the chamber, an intermediate shielding plate placed at a position separated from the inner shielding plate, and an outer shielding plate placed at a position separated from the intermediate shielding plate. The heat treatment oven for the substrate according to claim 9. The heat treatment oven for a substrate according to claim 10, further comprising a cooling water line through which cooling water flows so as to pass through the intermediate shielding plate and configured to lower the ambient temperature.

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