KR20080092082A - Door open-close apparatus for burn-in tester - Google Patents

Abstract

A door open/close apparatus for a burn-in tester is provided to accurately open or close a door by firmly supporting upper and lower portions of the door, when left and right doors are moved in four directions. A burn-in chamber(100) includes left and right burn-in chambers with left and right doors, respectively. Left and right doors(200,300) include vertical shafts, which are moved in four directions to open the left and right doors, respectively. A guide plate(400) is fixed on the burn-in chamber and includes back/forth guiding holes and left/right guiding holes for guiding the movement of the vertical shafts. A back/forth moving member(500) selectively moves one of the vertical shafts back and forth along the back/forth guiding hole. A left/right moving member(600) selectively moves one of the vertical shafts left and right along the left/right guiding hole. A support member(700) is arranged under the burn-in chamber to support lower portions of the left and right doors, which are moved by respective transfer members.

Description

DOOR OPEN-CLOSE APPARATUS FOR BURN-IN TESTER}

1 is a front view according to an embodiment of the present invention.

2 is a plan view according to an embodiment of the present invention.

Figure 3 is a side view according to an embodiment of the present invention.

Figure 4 is a plan view showing a guide plate according to an embodiment of the present invention.

5 is a plan view showing a left and right moving member according to an embodiment of the present invention.

Figure 6a and Figure 6b is a plan view showing the operating state of the left door according to an embodiment of the present invention in a plane.

7a and 7b is a plan view showing the operating state of the right door according to an embodiment of the present invention in a plane.

8a and 8b is an operation diagram showing the operation state of each door according to an embodiment of the present invention from the side.

Figures 9a to 9c is an operation view showing the operating state of the support member according to an embodiment of the present invention in a plane.

♠ Explanation of symbols on the main parts of the drawing ♠

100: burn-in chamber 120: left chamber

122: left exit 130: right chamber

132: right entrance 200: left door

210, 310: vertical shaft 220, 320: joint assembly

212, 312: rolling bearing 214, 314: thrust bearing

216, 316: carriage bearing 400: guide plate

410: postwar guide 420: left and right guide

500: front and rear moving member 510: shaft carriage

520: carriage cylinder 600: left and right moving member

610: shaft slider 620: ball screw

630: drive motor 640: screw frame

700: support member 710: left support member

712: Left guide rail 714: Left support shaft

716: left support rail 718: left rail cylinder

720: right support member 722: right guide rail

724: Right support shaft 726: Right support rail

728: right rail cylinder SS: detection sensor

The present invention relates to a door opening and closing device of the burn-in tester, and more particularly to a door opening and closing device of the burn-in tester which can maintain the appropriate stress environment by selectively opening and closing the burn-in space partitioned on both sides of the burn intester.

As is well known, the burn-in test screens out initial defective devices before supplying the semiconductor integrated circuit devices to the consumer or before mounting them in the system. After packaging through the assembly process, a specific stress environment is created to select defective or defective devices.

In particular, the burn-in test exerts thermal stress on the device at a temperature of about minus 10 ° C. to 150 ° C. During the burn-in test, the semiconductor device forms an electric field in which electricity is applied at a specific temperature state. As a result, early defective devices with a long lifespan fail to overcome stress and fail during burn-in tests. That is, a high quality device that has passed these burn-in tests ensures a long life and improves the reliability of the mounted system.

Looking at a conventional burn-in tester (Burn-in Tester) for the burn-in test of the device, a burn-in chamber having an entrance to be connected to the burn-in space partitioned on both sides and a shutter door for opening and closing the door of the burn-in chamber do.

Here, the shutter door is automatically opened and closed by the opening and closing device, the opening and closing device is installed on both sides of the burn-in chamber to move the front and rear cylinders to move the shutter door back and forth, and to move the shutter door transferred to the front and rear cylinder up and down. It is composed of a connected upper and lower cylinder, and a motor connected to wind up the shutter door transported upward by the upper and lower cylinders.

Therefore, the conventional shutter door is moved forward by the front and rear cylinders, and then is moved upward by the upper and lower cylinders and wound up by the motor to open the entrance and exit of the burn-in chamber.

However, the door opener of the conventional burn-in tester described above has the following problems.

First, the conventional door opening and closing device has a problem in that the heat formed in the burn-in space leaks between the shutter doors closing the entrance and exit of the burn-in chamber and thus cannot maintain an appropriate stress environment.

Second, the conventional door opening and closing device opens the entrance to simultaneously open the burn-in space partitioned on both sides, even if each burn-in space is formed in a different stress environment or put a different semiconductor device, the shutter door is opened to both sides Since the burned-in spaces were simultaneously opened, the heat of each burn-in space leaked to the outside, and thus there was a problem that the proper stress environment could not be maintained.

Third, in the conventional door opening and closing device, when there is an object near the entrance when opening and closing the shutter door, the opening and closing of the shutter door is stopped by an overload signal detected by each cylinder, and each cylinder is momentarily stopped from the pressure action. It is difficult, i.e., because the instantaneous speed control is difficult, there is a problem that damage the object and the shutter door near the entrance.

The present invention has been made to solve the conventional problems as described above, the object of the present invention is to open and close the burn-in space partitioned on both sides of the burn-in tester door opening and closing device of the burn-in tester that can maintain an appropriate stress environment To provide.

Another object of the present invention, the door opening and closing device of the burn-in tester that can prevent the damage of the object and the door near the entrance by controlling the instantaneous speed at the time of opening and closing the door.

The present invention is a burn-in chamber consisting of a left burn-in chamber having a left exit and a right burn-in chamber provided with a right exit; A left door and a right door provided with vertical shafts which move back, forth, and left and right to open and close the left and right entrances, respectively; A guide plate provided with front and rear guide holes and left and right guide holes to guide the front, rear, and left and right movements of the vertical shafts and fixed to an upper portion of the burn-in chamber; A front and rear moving member for selectively moving one vertical shaft back and forth along the front and rear guide holes of the guide plate; A left and right moving member for moving the vertical shaft of the door moved by the front and rear moving member from side to side along the left and right guide holes of the guide plate; And a support member installed at a lower portion of the burn-in chamber to support lower portions of the left door and the right door moved by the respective moving members.

Here, the front and rear movement member, a shaft carriage is provided so that the vertical shaft guided by the left and right guide holes of the guide plate is slidable, the shaft carriage for moving back and forth along the front and rear guide holes of the guide plate, connected to operate the shaft carriage. It is configured to include a carriage cylinder.

And the left and right moving member, the shaft is provided with a coupling groove so that the vertical shaft guided by the front and rear guide hole of the guide plate is slidable, the shaft slider to move left and right along the left and right guide hole, the ball connected to move the shaft slider from side to side A screw, a screw frame installed in the burn-in chamber to rotatably support the ball screw, it is implemented by a drive motor connected to drive the ball screw.

The above-mentioned left and right moving member further includes a guide rail provided in the screw frame to guide the left and right movement of the shaft slider and a flow preventing rail provided in the shaft slider to prevent flow while sliding along the guide rail. Do.

The left and right moving members may further include a left limit switch and a right limit switch connected to the shaft slider to detect the left and right movements of the doors and switch the stop and the contact of the driving motor.

In addition, each of the vertical shaft, the rolling bearing is mounted so as to contact the clouds along the front and rear guide holes and the left and right guide holes of the guide plate, the carriage bearing is mounted so as to contact the clouds along the shaft rail of the shaft carriage, and the front and rear of the guide plate It is preferable to include a thrust bearing mounted to support the load of the door while being guided along the guide hole and the left and right guide hole.

On the other hand, the support member is composed of a left support member for supporting the lower portion of the left door and the right support member for supporting the lower portion of the right door.

The left support member is installed on the lower side of the left door to guide the left and right movement of the right door by the left and right moving member, a vertical left support shaft connected to the left guide rail, the left and right movement of the left support shaft The left support rail for guiding the left support rail is implemented as a left rail cylinder connected to operate back and forth.

And the right support member is installed on the lower side of the right door to guide the left and right movement of the left support shaft by the left and right moving member, a vertical right support shaft connected to the right guide rail, the left and right movement of the right support shaft The right support rail for guiding the right support rail is implemented as a right rail cylinder connected to operate back and forth.

Here, it is preferable that the support bearings are mounted on the respective support shafts so as to make rolling contact along the respective guide rails.

Hereinafter, the technical configuration of the present invention will be described in detail with reference to the accompanying drawings.

1 to 5, the left burn-in chamber 120 having the left exit 122 at the front left side and the right burn-in chamber 140 having the right exit 142 at the front right side are provided. The left door 200 and the right side door 300 having the burn-in chamber 100 and the vertical shafts 210 and 310 which are moved back and forth and left and right so as to open and close the burn-in chamber 100 and the doors 122 and 142. A guide plate 400 provided with front and rear guide holes 410 and left and right guide holes 420 so as to guide each vertical shaft 210 and 310, and selectively back and forth one of the vertical shafts 210 and 310. And a support member 700 for supporting a lower portion of the front and rear moving member 500 and the left and right moving member 600 to move in the left and right directions, and the lower portions of the doors 200 and 300 to be moved to the respective moving members 500 and 600. It is composed of

The burn-in chamber 100 is composed of a left burn-in chamber 120 and a right burn-in chamber 140, the front of each chamber 120, 140, the left exit 122 to be adjacent to each other as shown in FIG. And the right exit 142 is provided, respectively. And a sealing (S) is mounted on the front edge of each doorway (122, 142) to hermetically close each doorway (122, 142) by closing the door (200,300).

The left door 200 opens and closes the left burn-in chamber 120, and the right door 300 opens and closes the right burn-in chamber 140, respectively. A plurality of vertical shafts 210 is disposed on the upper doors 200 and 300. ) 310 is connected to the joint assemblies 220 and 320 at regular intervals. And both ends of the left door 200 and the right door 300 is provided with a sensing sensor (SS) is electrically connected to the drive motor 630 of the left and right moving member 600 to be described later, such a detection sensor (SS) When the doors 200 and 300 are moved in the left and right directions, an object is detected to interrupt the driving of the driving motor 630. For example, when the left door 200 having the left door 122 opened is moved to the left side, when there is an object or a person at the left door 122, the detection sensor SS detects this and transfers the electric to the driving motor 630. When the signal is applied, the driving motor 630 is interrupted by the signal.

The joint assemblies 220 and 320 may be joint plates 222 and 322 which are installed by bolting to upper ends of the doors 200 and 300, and on the joint plates 222 and 322, respectively. It is fixed by the fixing bolt (B) is composed of a joint bracket (224, 324) connected to the vertical shaft (210, 310). In addition, vertical joint holes 224a and 324a are drilled in each of the joint brackets 224 and 324 to move up and down along the fixing bolt B, thereby enabling height adjustment of each door 200 and 300. do.

Each of the vertical shafts (210) and (310) is provided with a rolling bearing 212 as the shaft is in contact with the clouds along the front and rear guide hole 410 and the left and right guide hole 420 of the guide plate 400, accordingly The shafts 210 and 310 are smoothly clouded along each guide hole 410 and 420. In addition, thrust bearings 214 and 314 are installed on the vertical shafts 210 and 310 to support the loads of the doors 200 and 300. In addition, carriage bearings 216 and 316 are installed on the upper portions of the vertical shafts 210 and 310 so as to be in contact with each other along the shaft rails 512 of the shaft carriage 510 which will be described later. The shafts 210 and 310 slide smoothly along the shaft rails 512.

The guide plate 400 is installed on the upper surface of the burn-in chamber 100 as shown in Figure 1 and 3 to guide the front and rear and left and right movement of each door 200, 300, such a guide plate 400 ) Is connected to the left and right guide holes 410 for guiding the left and right movement of each vertical shaft 210 and 310 and the front and rear guide holes 410 to front and rear movement of each vertical shaft 210 and 310. Guide hole 410 is punctured.

Referring to FIG. 4 showing the guide plate 400 in a plan view, the left and right guide holes 410 of the guide plate 400 guide the left and right doors to guide the left and right movements of the vertical shafts 210 and 310. It is formed to a size similar to the width of the (200) (300), the front and rear guide hole 410 is connected to the rear of the left and right guide hole 410 to guide the front and rear movement of each vertical shaft (210, 310), such The front and rear guide hole 410 is composed of a plurality of guides each of the plurality of vertical shafts (210, 310).

The front and rear movement member 500 selects one of the doors 200 and 300 from the left and right doors 200 and 300 and moves them in the front and rear directions, and the front and rear movement member 500 includes a shaft rail ( 512 is provided with a shaft carriage 510 and a carriage cylinder 520 for operating the shaft carriage 510.

Looking at the front and rear movement member 500 in detail with reference to Figures 1 and 3, the shaft carriage 510 is provided on both sides of the upper portion of each door 200, 300, the left and right guide hole 410 of the guide plate 400 By moving the vertical shafts 210 and 310 guided back and forth, such a shaft carriage 510 is provided with a shaft rail 512 connected to the left and right guides to the left and right guide holes 410 of the guide plate 400. It does not interfere with the left and right movement of the vertical shafts 210 and 310. And the shaft carriage 510 is provided on both sides of the upper portion of each door 200, 300 as shown in Figure 1 cooperates in the stable front and rear movement of each door 200,300. In addition, it is preferable that the carriage bearing 216 of the vertical shafts 210 and 310 described above is in rolling contact with the shaft rail 512.

The carriage cylinder 520 for operating the shaft carriage 510 is supported by the cylinder frame 530 fixed to the upper surface of the burn-in chamber 100, the operation rod 522 of the carriage cylinder 520 is shown in FIG. 2 and 3 are supported on the front and rear of the cylinder frame 530, the shaft carriage 510 is connected to the lower portion of the tube 524 of the carriage cylinder 520. Therefore, since the tube 524 of the carriage cylinder 520 moves in the front-back direction of the cylinder frame 530 by the operation rod 522, the shaft carriage 510 connected to the tube 524 is moved in the front-back direction.

Referring to the operation relationship of the front and rear movement member 500 configured as described above with reference to FIGS. 8A and 8B, the vertical shaft 210 guided to the shaft rail 510 by the left and right movement member 600 as shown in FIG. 8B. The shaft carriage 510 is moved forward by the operation of the carriage cylinder 520 to move the front 310, and thus the vertical shafts 210 and 310 are the front and rear guide holes of the guide plate 400 ( By moving along the 410, as shown in Figure 8a to move any one of the doors (200,300) forward.

The left and right moving members 600 select one of the doors 200 and 300 of the left and right doors 200 and 300 and move them in the left and right directions. Such a left and right moving member 600 is a coupling groove ( 612 is provided with a shaft slider 610, a ball screw 620 for moving the shaft slider 610 to the left and right, and a drive motor 630 for driving the ball screw 620.

Looking at the left and right moving member 600 in more detail with reference to Figures 1 to 3, both sides of the shaft slider 610 is provided with a coupling groove 612 opened along the rear and the front and rear guide hole of the guide plate 400 ( The vertical shafts 210 and 310 guided to 410 are slidably coupled to each other, and the upper portion of the shaft slider 610 is provided with a flow preventing rail 614 along the left and right directions of the screw frame 640 to be described later. Sliding along the rail 648 prevents the flow of the shaft slider 610 moved to the left and right, and the upper part of the shaft slider 610 is screwed to the ball screw 620 as shown in an enlarged elliptical dashed line in FIG. The nut member 616 is provided to be coupled to move the shaft slider 610 in the left and right directions according to the rotation of the ball screw 620.

The ball screw 620 is disposed along the left and right directions so as to be rotatably supported by the screw frame 640, which is perpendicular to both sides of the upper surface of the burn-in chamber 100 as shown in FIG. 1. Vertical frame 642 installed in the horizontal frame, horizontal frame 644 for connecting the upper end of the vertical frame 644 horizontally, and is provided on both lower sides of the horizontal frame 644, both ends of the ball screw 620 It is composed of a support bracket 646 rotatably supported, the lower portion of the horizontal frame 644 is provided with a guide rail 648 along the left and right direction to guide the sliding of the flow preventing rail 614. And the driven pulley 622 is installed on the left end of the ball screw 620 as a shaft.

The drive motor 630 is installed at the rear of the upper surface of the burn-in chamber 100, the drive pulley 632 is installed in the shaft, the drive pulley 632 and the driven pulley 622 is connected to the belt 634 to drive The driving force of the motor 630 is transmitted to the ball screw 620.

The left and right moving members 600 configured as described above further include a left limit switch LS and a right limit switch RS for detecting opening and closing of each door 200 and 300 which are moved left and right. The limit switches LS and RS are provided on both sides of the upper surface of the burn-in chamber 100 so as to be connected to the shaft slider 610, and the left and right limit switches LS are driven. It is electrically connected to the motor 630 to control the driving of the driving motor 630 according to the connection of the shaft slider 610.

Looking at the operation relationship of the left door 200 to open and close the left entrance 122 to the left and right moving member 600 with reference to Figures 6a and 6b, the vertical shaft 210 is guide plate by the front and rear moving member 500 Guided to the left and right guide hole 420 of 400 is slidingly coupled to the coupling groove 612 of the shaft slider 610. Subsequently, when the driving motor 630 is driven, the driving force is transmitted to the driven pulley 622 by the belt 634 while the driving pulley 632 is rotated, so that the ball screw 620 is rotated, and the ball screw 620 is rotated. The screwed nut member 616 is moved in the right direction, and thus, the shaft slider 610 is moved and the vertical shaft 210 guided by the left and right guide holes 420 is moved in the right direction. Is to open it completely. At this time, the shaft slider 610 is connected to the right limit switch (RS) as shown by the phantom line (single dashed line) of FIG. 1 to control the driving of the driving motor 630, and thus the movement of the left door 200 is stopped. do.

Looking at the operation relationship of the right door 300 to open and close the right entrance 142 to the left and right moving member 600 with reference to Figure 7a and 7b, the coupling groove 612 of the shaft slider 610 as shown in Figure 7a Sliding the vertical shaft 310, the ball screw 620 is rotated by the drive of the drive motor 630 to move the nut member 616 and the shaft slider 610 to the left direction, by this movement vertical The shaft 310 is guided to the left side of the left and right guide holes 420 as shown in FIG. 7B to completely open the right entrance 142. At this time, the shaft slider 610 is connected to the left limit switch (LS) as shown in Figure 1 to interrupt the driving of the drive motor 630, the movement of the right door 300 is stopped.

The support member 700 supports a lower portion of the left and right doors 200 and 300 which are moved by the front and rear movement member 500 and the left and right movement member 600, and the support member 700 is a left door. The left support member 710 supporting the lower portion of the 200 and the right support member 720 supporting the lower portion of the right door 300.

Looking at the left support member 710 with reference to Figures 3 and 9a, the left guide rail is installed on the lower side of the left door 200 to guide the left and right movement of the right door 300 by the left and right moving member 600 ( 712, a vertical left support shaft 714 connected to the left guide rail 712 by a support bracket 713, a left support rail 716 for guiding the left and right support shafts 714 to move left and right, and the left support It consists of a left rail cylinder 718 that operates the rail 716 back and forth.

As shown in FIGS. 3 and 9a, the left guide rail 712 is formed to be connected to the lower side and is opened to the lower surface of the left door 200. The left guide rail 712 is described later. The right support shaft 724 of the right door 300 is guided.

The left support shaft 710 is connected to a plurality of support brackets 713 installed at regular intervals along the rear surface of the left guide rail 712. The left support shaft 714 has a support bearing 715 as an axis. It is installed and is in contact with the cloud along the left support rail 716, accordingly the left support shaft 714 is smoothly moved along the left support rail (716).

As shown in FIGS. 3 and 9A, the left support rail 716 is formed such that the lower part is opened while being connected to the left and right to guide the left and right movement of the left support shaft 714.

The tube 718b of the left rail cylinder 718 is supported by the cylinder bracket 719 on both sides of the lower surface of the left burn-in chamber 120, and the operating rod 718a of the left rail cylinder 718 is the left support rail 716. Because it is connected to the rear of the), by moving the left support rail 716 in the front and rear direction by the operation of the operation rod 718a, thereby moving the left door 200 with the front and rear moving member 500 in the front and rear direction. . That is, the front and rear movement member 500 simultaneously moves in the front and rear directions at the upper side of the left door 200 and the left support member 710 at the lower side of the left door 200. As such, the left rail cylinder 718 and the carriage cylinder 520 of the front and rear moving member 500 are electrically connected to allow the simultaneous movement of the left door 200.

Referring to FIGS. 3 and 9A, the right support member 720 is installed at a lower side of the right door 300 to guide the right and left movement of the left support shaft 714 by the left and right moving member 600. 722, a right right support shaft 724 connected to the right guide rail 722 by a support bracket 723, a right support rail 726 for guiding the left and right movement of the right support shaft 724, and the right side. It consists of a right rail cylinder 728 for operating the support rail 726 back and forth.

As shown in FIGS. 3 and 9A, the right guide rail 722 is formed so as to be connected to the lower side and is opened to the lower surface of the right door 300. The right guide rail 722 is left Guide shaft 714 is guided.

The right support shaft 724 is connected to a plurality of support brackets 723 installed at regular intervals along the rear surface of the right guide rail 722. The right support shaft 724 has a support bearing 725 on its axis. It is installed in contact with the cloud along the right support rail 726, accordingly the right support shaft 724 is smoothly moved along the right support rail 726.

As shown in FIGS. 3 and 9A, the right support rail 726 is formed to be connected to the lower side while opening to the left and right to guide the left and right movement of the right support shaft 724.

The tube 728b of the right rail cylinder 728 is supported by cylinder brackets 729 on both sides of the lower surface of the right burn-in chamber 140, and the operating rod 728a of the right rail cylinder 728 is the right support rail 726. Because it is connected to the rear of the), by moving the right support rail 726 in the front and rear direction by the operation of the operating rod 728a, thereby moving the right door 300 together with the front and rear movable member 500 in the front and rear directions. . That is, the front and rear movement member 500 simultaneously moves in the front and rear directions at the upper side of the right door 300 and the right support member 720 at the lower side of the right door 300. As such, the right rail cylinder 728 and the carriage cylinder 520 of the front and rear moving member 600 are electrically connected to allow the right door 300 to move simultaneously.

Among the left and right support members 710 and 720 configured as described above, the operation relationship of the left support member 710 will be described in detail with reference to FIGS. 9A to 9C, and the left side of the left burn-in chamber 120 as shown in FIG. 9A. In order to open the doorway 122, the left door 200 is operated by the front and rear movement member 500 to move the left door 200 forward. At the same time, the left rail cylinder 718 is operated to support the left support rail 716. ) And the left support shaft 714 and the left guide rail 712 to move forward, and cooperate with the front and rear movable member 500 to move the left door 200 forward.

Subsequently, the left door 200 is moved to the right by the operation of the left and right moving member 600, in which the left support shaft 714 slides along the right guide rail 722 as shown in FIG. The lower part of the door 200 is firmly supported by the left support member 710 while preventing the flow.

Here, since the operation relationship of the right support member 720 is the same as the left support member 710, a detailed description thereof will be omitted.

If described in detail according to the accompanying drawings the overall operating relationship of the present invention configured as follows.

First, as shown in FIG. 5, in order to move one door 200 or 300 back and forth in a state in which the doors 122 and 142 of the left and right burn-in chambers 120 and 140 are closed, a carriage cylinder ( When the 520 is operated, the shaft carriage 510 moves in the direction of the arrow shown in FIG. 8A, which causes the vertical shafts 210 and 310 to move forward along the front and rear guide holes 410 of the guide plate 400. Is moved.

As such, when the carriage cylinder 520 for moving any one door 200 or 300 forward, the left or right rail cylinders 718 and 728 are operated simultaneously to the left as shown in FIG. 9B. Alternatively, the right guide rails 712 and 722 are moved forward, and thus, lower portions of the doors 200 and 300 are firmly supported to prevent flow.

Subsequently, the shaft slider 610 is disposed as shown in FIG. 6A and vertical shafts 210 and 310 that are moved forward are slidably coupled to the coupling groove 612 of the shaft slider 610, and thus the vertical shaft 210 is disposed. The shaft slider 610 to which the 310 is coupled is moved to the left or the right as shown in FIGS. 6B and 7B by the rotation of the ball screw 620 by the driving of the driving motor 630.

At this time, each of the support shafts 714 and 724 installed under the doors 200 and 300 is slid along the neighboring guide rails 712 and 722 to move each door 200 to the left or right. While firmly supporting the lower portion of 300) to prevent the flow.

The foregoing descriptions are merely illustrative of preferred embodiments of the present invention, and it is apparent that the present invention is not limited to the above-described embodiments and can be modified in various ways within the scope of the appended claims.

As described above, the present invention has a very useful effect of selectively opening and closing the left and right exits to maintain a suitable stress environment for the burn-in test.

In addition, the present invention has the effect that when moving the left and right doors in the front and rear and left and right directions, it is firmly supported at the upper and lower portions so that each door can be accurately opened and closed without malfunction.

In particular, the present invention uses a drive motor that is easy to instantaneous speed control compared to the conventional cylinder, it is possible to prevent damage to the object or damage to each door while in contact with the object near each doorway There is.

Claims (11)

A burn-in chamber 100 including a left burn-in chamber 120 having a left entrance 122 and a right burn-in chamber 140 having a right entrance 142; A left door 200 and a right door 300 having vertical shafts 210 and 310 which are moved back and forth and left and right to open and close the left and right entrances 122 and 142, respectively; A guide plate 400 provided with front and rear guide holes 410 and left and right guide holes 420 to guide the front, rear, and left and right movements of the vertical shafts 210 and 310 and fixed to an upper portion of the burn-in chamber 100; Front and rear movement member 500 for selectively moving back and forth any one vertical shaft 210, 310 along the front and rear guide hole 410 of the guide plate 400; Left and right to move the vertical shaft 210, 310 of any one door 200, 300 moved by the front and rear movable member 500, left and right along the left and right guide holes 420 of the guide plate 400 Moving member 600; A support member 700 installed at a lower portion of the burn-in chamber 100 to support lower portions of the left door 200 and the right door 300 which are moved by the moving members 500 and 600; Door opening and closing device of the burn-in tester comprising a. The method of claim 1, The front and rear movement member 500, Any one of the vertical shafts 210 and 310 guided to the left and right guide holes 420 of the guide plate 400 is provided with a shaft rail 512 so that the front and rear guide holes 410 of the guide plate 400. The door opening and closing device of the burn-in tester, characterized in that it comprises a carriage carriage (510) for moving back and forth along the), the carriage cylinder (520) for operating the shaft carriage (510). The method of claim 1, The left and right moving member 600, Any one of the vertical shafts 210 and 310 guided by the front and rear guide holes 410 of the guide plate 400 is provided with a coupling groove 162 so as to be slidable, and moves left and right along the left and right guide holes 420. Shaft slider 610, A ball screw 620 connected to move the shaft slider 410 from side to side, Screw frame 640 installed in the burn-in chamber 100 to rotatably support the ball screw 620, A drive motor 630 connected to drive the ball screw 620 rotatably installed on the screw frame 640, Door opening and closing device of the burn-in tester comprising a. The method of claim 3, wherein The left and right moving member 600, the guide rail 648 provided in the screw frame 640 to guide the left and right movement of the shaft slider 610, so as to slide along the guide rail 648 to prevent flow. The door opening and closing device of the burn-in tester, characterized in that it further comprises a flow preventing rail (614) provided in the shaft slider (614). The method according to claim 3 or 4, Further comprising a left limit switch (LS) and a right limit switch (RS) connected to the shaft slider 610 to detect the left and right movement of the door (200) (300) to control the driving of the drive motor (630). Door opener of the burn-in tester, characterized in that. The method according to claim 3 or 4, Detection sensors (SS) are provided at both ends of each of the doors (200, 300) to detect objects near each of the doors (122) and (142) when opening and closing, and the detection sensor (SS) is a driving motor (630). Door opening and closing device of the burn-in tester, characterized in that it is electrically connected to control the driving. The method of claim 1, Each vertical shaft (210, 310), characterized in that the rolling bearings (212, 312) are mounted so as to contact the clouds along the front and rear guide hole 410 and the left and right guide hole 420 of the guide plate 400 Door opener of burn-in tester. The method according to claim 1 or 7, Each vertical shaft (210) (310), the door opening and closing device of the burn-in tester, characterized in that the carriage bearings (216, 316) are mounted so as to make a rolling contact along the shaft rail (512) of the shaft carriage (510). The method according to claim 1 or 7, Each of the vertical shafts (210) and (310), guide bearings along the front and rear guide hole 410 and the left and right guide hole 420 of the guide plate 400 to support the load of each door 200,300 Door opening and closing device of the burn-in tester, characterized in that the (214) (314) is mounted. The method of claim 1, The support member 700 is composed of a left support member 710 supporting the lower portion of the left door 200 and a right support member 720 supporting the lower portion of the right door 300, The left support member 710 is installed at the lower side of the left door 200 to guide the left and right movement of the right door 300 by the left and right moving member 600, 712, the left guide rail ( A vertical left support shaft 714 connected to 712, a left support rail 716 for guiding the left and right movement of the left support shaft 714, and a left rail cylinder connected to operate the left and right support rails 716 back and forth ( 718), The right support member 720 is installed at the lower portion of the right door 300 to guide the left and right movement of the left support shaft 714 by the left and right moving member 600, the right guide rail 722, the right guide rail ( A vertical right support shaft 724 connected to the 722, a right support rail 726 for guiding the left and right movement of the right support shaft 724, and a right rail cylinder connected to operate the right support rail 726 back and forth ( 728) door opening and closing device of the burn-in tester comprising a. The method of claim 10, The support shafts (710) (720), the door opening and closing device of the burn-in tester, characterized in that the support bearings (715, 725) are mounted so as to contact the rolling along the respective guide rails (712, 722).

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