KR20200018915A - Cubic-type Electronic scanning equipment using terahertz wave - Google Patents

Abstract

The present invention relates to a cubic type electronic scanning apparatus using terahertz waves. According to the present invention, a plurality of beam inlets are formed on the outer surface of the body of a terahertz wave transceiving module, a TX device part generating a terahertz wave is installed on one side of the body to be slidable, an RX device part receiving the terahertz wave returned into the body is installed on the other side of the body to be slidable, and the terahertz wave is outputted by adjusting a gap in the beam inlets and the TX device part and the RX device part. Therefore, a terahertz wave output frequency range from the TX device part to a Galvano scanning module and a terahertz wave reflection wave input frequency range from the Galvano scanning module to the RX device part are adjusted, and thus, losses of the input and output of the terahertz wave can be prevented. According to the present invention, as the TX device part and the RX device part are horizontally moved, a range between the Galvano scanning module and the TX device part and the RX device part can be adjusted to prevent a loss of the output of terahertz waves inputted from the TX device part into the Galvano scanning module and a loss of the input of terahertz reflection waves inputted from the Galvano scanning module to the RX device part. Since a loss of the output of terahertz waves and a loss of the input of terahertz reflection waves are prevented, the condition of a specimen can be accurately checked through terahertz waves. Moreover, since a range in which a terahertz wave is inputted into a specimen is matched with a path in which the wave is returned after reflection from the specimen, whether the specimen is defective can be quickly imaged and checked.

Description

Cubic type electronic scanning equipment using terahertz wave

The present invention relates to an electronic scanning device, and more particularly, the TX device unit and the RX device unit are slidably installed on one side and the other side of the main body so that the distance between the TX unit and the beam entrance hole of the main unit and the RX unit It is to provide a cubic electronic scanning device using a terahertz wave that can adjust the distance between the beam entrance hole and the main body.

In general, semiconductor chips are the core components required by computers, all electronics and information products, and perform arithmetic operations, data storage and transmission, and control of other chips.

In particular, such a semiconductor chip is a semiconductor chip packaged in a plastic that is very small in size and about 10 × 10 mm 2, and it is almost impossible for an inspector to visually identify defects such as cracks, peeling, and voids of the packaged semiconductor chip. impossible.

Patent document 1 is a conventional inspection device using a terahertz wave, the inspection table for seating a semiconductor sample, and the terahertz wave radiated from the generator to the sample in the form of a spot (spot) installed in the upwardly inclined direction of the inspection table An optical waveguide focusing and a detector installed opposite to the optical waveguide and detecting a terahertz wave reflected from a sample are included.

At this time, the inspection table is moved in a predetermined direction by the X-axis drive unit and the Y-axis drive unit to position the sample in the correct position between the optical waveguide and the detector.

Then, the terahertz wave is focused on the sample through the lens of the optical waveguide, and then the terahertz wave reflected from the sample is reflected in the detector direction, and then enters another focusing lens and detects the terahertz wave through the detector. It will be.

Then, the terahertz wave detected by the detector is transmitted to the image processing unit through the signal processing unit, and the signal of the image output unit is output to the display unit to check the state of the sample through the display unit.

However, Patent Document 1 as described above is configured to separate the optical waveguide and the detector to check the reflection angle of the optical waveguide and the detector to be set one by one, the optical waveguide and the detector is fixed to a predetermined angle, the angle, the light guide tube and the sample The distance between and the distance between the detector and the sample cannot be adjusted.

On the other hand, it is difficult to accurately adjust the angle of reflection of terahertz waves because the optical waveguide and the detector are adjusted to an arbitrary angle at the same time as it is necessary to separate and separate the optical waveguide and the detector when the angle is adjusted, and the distance between the sample and the optical waveguide and Due to the non-adjustable distance between the detector and the sample, the terahertz wave reflection angular focus reflected by the sample is uneven.

In particular, the terahertz wave reflected from the semiconductor chip due to the reflection angle error is reflected toward the outside of the detector, so that the terahertz wave is not detected by the detector. In this case, it is difficult to determine whether the sample is normal or defective, thereby reducing the reliability of the equipment. A problem occurs.

KR 10-2015-0004146 A

The present invention is to solve the problems described above, an object of the present invention is to form a plurality of beam entrance holes on the outer surface of the main body of the terahertz wave transmission and reception module, the TX device unit for generating a terahertz wave on one side of the main body It is installed to be slidable, and the RX device part receiving the terahertz wave returned to the main body is slidably installed on the other side of the main body, and the terahertz wave is output by adjusting the distance between the TX device part and the RX device part and the beam entrance hole. By adjusting the terahertz wave output frequency distance reaching the galvano scanning from the TX unit and the terahertz reflected wave input frequency distance reaching the RX unit from the galvano scanning, the terahertz wave output and input loss are prevented. The present invention provides a cubic electronic scanning device using terahertz waves.

In order to achieve the object of the present invention as described above, the cubic-type electronic scanning device using a terahertz wave according to the present invention, the hollow body has a main body formed with a plurality of beam entrance holes on the outer surface, the main body on one side It is installed to be slidable and receives a laser signal to generate a terahertz wave, the terahertz wave is provided with a TX device that is incident to the outside through the beam entrance hole of the main body, the orthogonal to the TX device A terahertz wave transmission / reception module installed on the other side of the main body so as to be slidably movable and having an RX unit configured to receive terahertz reflected waves returned into the main body through the beam entrance hole; It is installed in close contact with the other surface of the main body facing the TX device unit, and receives the terahertz wave incident through the beam entrance hole or receives the terahertz reflection wave reflected in the terahertz wave transmission and reception module direction terahertz A galvano scanning module for changing the incident or reflective direction of the wave and the terahertz reflection wave; It is installed on the bottom of the galvano scanning module so as to be orthogonal to the terahertz wave transmission and reception module, and guides the terahertz wave to focus on a predetermined point of the sample by receiving the terahertz wave or the terahertz reflection wave reflected on the sample. An f-θ lens guiding reflection in the direction of the galvano scanning module; And a stage installed below the f-θ lens to fix the sample on the upper surface.

In the cubic electronic scanning device using a terahertz wave according to the present invention, the terahertz wave transceiving module is formed to protrude in a direction orthogonal to each other on the upper surface of the main body, to guide the sliding movement of the TX unit and RX unit A guide rail formed in the main body to be inclined in one direction so as to partition the beam entrance holes facing each other, and to pass a terahertz wave generated in the beam entrance hole direction, A beam splitter for reflecting the reflected terahertz reflection wave toward the RX device part; It is fixed to each of the beam entrance hole of the main body corresponding to the TX device unit and the RX device unit, guides the terahertz wave to enter the galvano scanning module through the beam entrance hole or reflects the beam splitter. And a focusing lens for guiding the terahertz reflection wave into the RX device unit.

In the cubic-type electronic scanning device using a terahertz wave according to the present invention, the main body forms an insertion hole in the upper and lower surfaces, the beam splitter is provided in the main body to pass through the terahertz wave or terahertz A beam distribution lens for reflecting the reflected wave toward the RX device portion; And a fixed frame inserted into the insertion hole of the main body and closely attached to an outer surface of the beam distribution lens to fix the beam distribution lens to the main body.

In the cubic-type electronic scanning device using a terahertz wave according to the present invention, the TX unit, the first stationary body through which the center portion is located on one side of the main body, the terahertz transmission module is fixed to the center portion Wow; A first movable body provided at a rear end of the first fixed body and having a first guide part slidingly coupled to the guide rail on an upper surface thereof; A first angle control lever penetrating through each corner of the rear surface of the first moving body to be coupled to the first fixed body and rotating to adjust an angle of the first fixed body; And a first connection spring provided between an edge of the first fixed body and the first moving body to connect the first fixed body and the first moving body.

In the cubic-type electronic scanning device using a terahertz wave according to the present invention, the RX device portion is located on the other side of the main body so as to pass through the center portion and orthogonal to the TX device portion, and fix the terahertz receiving module at the center portion thereof. A second fixed body installed; A second moving body provided at a rear end of the second fixed body and having a second guide part slidingly coupled to the guide rail on an upper surface thereof; A second angle control lever penetrating through each corner of the rear surface of the second moving body to be fastened to the second fixed body and rotating to adjust an angle of the second fixed body; And a second connection spring provided between an edge of the second fixed body and the second moving body to connect the second fixed body and the second moving body.

In the cubic-type electronic scanning device using a terahertz wave according to the present invention, the main body, characterized in that the height adjustment support for further adjusting the height of the guide rail between the main body and the guide rail.

In the cubic electronic scanning device using a terahertz wave according to the present invention, the galvano scanning module is fixed at a predetermined angle therein, and the galvano reflector for changing the traveling direction of the terahertz wave or terahertz reflection wave. Characterized in that formed.

In the cubic-type electronic scanning device using a terahertz wave according to the present invention, the f-θ lens has a hollow shape, and an f-θ through-hole is formed at one side thereof, and is opposite to the f-θ through-hole. An f-θ barrel body having an f-θ barrel outlet on its side; A convex concave lens installed at an inner side corresponding to the f-θ barrel inlet of the f-θ barrel body; A planar convex lens provided on an inner side corresponding to an f-θ barrel outlet of the f-θ barrel body; A convex lens provided between the block concave lens and the planar convex lens; And a fixing ring installed between the convex concave lens, the planar convex lens, and the convex lens to fix the convex concave lens, the planar convex lens, and the convex lens in the f-θ barrel body. do.

In the cubic electronic scanning device using a terahertz wave according to the present invention, the stage is moved to the front, rear, left, right and up and down to change the position of the sample located directly below the f-θ lens. It is characterized by

According to the present invention, the TX unit and the RX unit are horizontally moved so that the distance between the TX unit and the RX unit and the galvano scanning module is adjusted, and the distance between the TX unit and the RX unit is adjusted from the TX unit to the galvano scanning module. Loss of incident terahertz wave output and loss of terahertz reflected wave input from the galvano scanning module to the RX unit section are prevented. There is an advantage that can be confirmed correctly.

In addition, without having to adjust the angle of the TX unit and the RX unit, the distance between the terahertz wave incident to the sample and the path reflected by the sample can be matched, thereby quickly imaging and inspecting whether the sample is defective.

In addition, since the incident path of the terahertz wave incident on the sample and the reflection path reflected by the sample are exactly matched by the galvano scanning module, no error occurs in the detection of the terahertz wave signal, and thus the error of the terahertz wave signal. It is possible to accurately check whether the target is defective through the prevention, and in particular, the terahertz wave is incident and reflected at a predetermined point of the target through the f-θ lens and is present inside the target by high-speed scanning by the galvano scanning module. There is an advantage in imaging and inspecting damage, breakage and scratches (eg, bonding of peeling, voids and cracks).

1 is a perspective view showing a cubic electronic scanning device using a terahertz wave according to the present invention.
2 is an exploded perspective view of FIG.
Figure 3 is an exploded perspective view of the terahertz wave transmission and reception module of the cubic-type electronic scanning device using a terahertz wave according to the present invention.
Figure 4 is a perspective view showing a state in which the beam splitter is disassembled in the main body of the cubic-type electronic scanning device using a terahertz wave according to the present invention.
Figure 5 is a side view showing a state in which a cubic electronic scanning device using a terahertz wave according to the present invention installed in the housing.
6 is a plan view showing a state in which a terahertz wave is incident to the galvano scanning module through the TX device unit of the cubic-type electronic scanning device using the terahertz wave according to the present invention.
Figure 7 is a plan view showing a state in which terahertz reflection wave is input to the RX unit of the cubic-type electronic scanning device using a terahertz wave according to the present invention.
Figure 8 is a side cross-sectional view showing an embodiment for changing the angle of the galvano reflector embedded in the galvano scanning module of the cubic-type electronic scanning device using a terahertz wave according to the present invention.

Hereinafter, with reference to the accompanying drawings an embodiment of the present invention will be described in more detail.

1 to 8, the terahertz wave transmission / reception module 100 includes a main body 110 having a plurality of beam entrance holes 111 formed on an outer surface thereof in a hollow shape, and sliding on one side of the main body 110. It is installed to be movable and generates a terahertz wave by receiving a laser signal, the terahertz wave is provided with a TX device unit 120 that enters the outside through the beam entrance hole 111 of the main body 110, RX device is installed so as to be slidably movable on the other side of the main body 110 so as to be orthogonal to the TX device 120, and receives the terahertz reflected wave returned into the main body 110 through the beam access hole 111. The unit 130 is formed.

The main body 110 is preferably a cubic (cubic) structure in which a plurality of beam entrance holes 111 are formed on an outer surface thereof.

The beam access hole 111 is formed in plural to be orthogonal to and opposed to each other along the outer surface of the main body 110, and incident the terahertz wave generated by the TX device 120 to the galvano scanning module 200. Alternatively, the terahertz reflection wave reflected by the galvano scanning module 200 may be input to the RX device unit 130.

Protruding in the direction perpendicular to each other on the upper surface of the main body 110, to form a guide rail 112 for guiding the sliding movement of the TX device unit 120 and the RX device unit 130, and in the main body 110 It is provided to be inclined in one direction so as to partition the beam entrance hole 111 opposed to each other, passing through the terahertz wave generated in the direction of the beam entrance hole 111, in the direction of the beam entrance hole 111 The main body 110 corresponding to the beam splitter 140 that reflects the reflected terahertz reflection wave toward the RX device unit 130, the TX device 120, and the RX device 130. It is fixed to each of the beam entrance hole 111 of the), guides the terahertz wave to enter the galvano scanning module 200 through the beam entrance hole 111 or reflected by the beam splitter 140 Even if terahertz reflection wave is input to the RX unit 130 Further it includes a condenser lens 150 for guiding.

The guide rail 112 of the TX device unit 120 and the RX device unit 130 so that the TX device unit 120 and the RX device unit 130 is spaced apart from the predetermined distance from the beam entrance hole 111 Guide the horizontal movement.

The main body 110 further forms a height adjustment base 110b for adjusting the height of the guide rail 112 between the main body 110 and the guide rail 112.

The height adjustment support 110b adjusts the height of the guide rail, so that the terahertz transmission module 123a of the TX device unit 120 or the terahertz reception module 131a of the RX device unit 130 is fixed. The central portion and the central portion of the beam entrance hole 111 are positioned on the same horizontal line.

The focusing lens 150 focuses the terahertz wave so that the terahertz wave generated by the TX device 120 moves in parallel to the galvanoscanning module 200, and further, to the beam splitter 140. The terahertz reflection wave which is reflected and has changed direction focuses on the terahertz reflection wave to move in parallel to the RX device unit 130.

The main body 110 forms insertion holes 110a on the upper and lower surfaces thereof.

The insertion hole 110a allows the beam splitting lens 141 to be inserted into the beam splitter 140 so that the beam splitting lens 141 is positioned in the main body 110.

The beam splitter 140 is provided in the main body 110 and includes a beam splitting lens 141 for passing a terahertz wave or reflecting the terahertz reflected wave in the direction of the RX device unit 130, and the main body 110. It is inserted into and fixed to the insertion hole (110a) of the), is in close contact with the beam distribution lens 141 is composed of a fixed frame 142 for fixing the beam distribution lens 141 in the main body 110.

The beam distribution lens 141 is formed to have a predetermined thickness, and the inner central portion of the main body 110 to partition the beam access hole 111 in which the TX device 120 and the RX device 130 are installed. It is installed to be inclined at a predetermined angle.

The fixing frame 142 is fitted into the insertion hole 110a and is inserted into the main body 110 to support and fix an outer surface of the beam distribution lens 141.

The end of the fixed frame 142 is formed to correspond to the outer surface shape of the beam distribution lens 141.

The TX device unit 120 has a first fixed body 123 having a central portion penetrated and positioned at one side of the main body 110 and having a terahertz transmission module 123a fixedly installed at a central portion thereof. The first movable body 124, which is provided at the rear end of the first fixed body 123, and has a first guide portion 124a that is slidingly coupled to the guide rail 112 on the upper surface, the first movable body 124 The first angle control lever 125 and the first end of the first fixed body 123 is fastened and the end thereof is fastened to the first fixed body 123 and rotated to adjust the angle of the first fixed body 123. It is provided between the fixed body 123 and the edge of the first movable body 124, consisting of a first connection spring 126 for connecting the first fixed body 123 and the first movable body 124 do.

The first fixed body 123 is horizontally moved integrally with the first moving body 124.

The first moving body 124 moves the terahertz transmission module 123a installed in the first fixed body while moving along the guide rail 112 to be spaced apart from the beam access hole 111 by a predetermined distance. The distance between the hertz transmission module 123a and the galvano scanning module 200 is adjusted.

The first guide part 124a moves along the guide rail 112 to guide the horizontal movement of the first moving body 124.

The first angle control lever 125 is fastened to the first moving body 124 in a spiral manner, the end of which presses the edge of the first fixed body 123 to press the first fixed body 123 Make sure to twist it at a fixed angle.

The first connection spring 126 is connected between the first fixed body 123 and the first moving body 124, the first fixed body being pressed by the first angle control lever 125 ( 123 is tensioned as the angle is distorted.

The RX device unit 130 is located on the other side of the main body 110 so as to be orthogonal to the TX device unit 120 through the central portion, the second fixed body fixed to the terahertz receiving module installed in the center ( 131, a second movable body 132 provided at a rear end of the second fixed body 131, and having a second guide part 132 a slidingly coupled to the guide rail 112 on an upper surface thereof. The second angle control lever 133 through the corners of the rear of the moving body 132 is fastened to the second fixed body 131 and rotated to adjust the angle of the second fixed body 131. And a second connection spring provided between the edges of the second fixed body 131 and the second movable body 132 to connect the second fixed body 131 and the second movable body 132. 134.

The second fixed body 131 is horizontally moved integrally with the second moving body 132.

The second moving body 124 moves along the guide rail 112 and spaces the terahertz receiving module 131a installed in the second fixed body 131 at a predetermined distance from the beam access hole 111. The orthogonal distance between the terahertz receiving module 131a and the galvano scanning module 200 is adjusted.

The second guide part 132a moves along the guide rail 112 to guide the horizontal movement of the second moving body 132.

The second angle control lever 133 is fastened to the second moving body 132 in a spiral manner, the end of which presses the edge of the second fixed body 131 to press the second fixed body 131. Make sure to twist it at a fixed angle.

The second connection spring 134 is connected between the second fixed body 131 and the second moving body 132, the second fixed body pressed by the second angle control lever 133 ( 131 is tensioned as the angle is distorted.

The galvano scanning module 200 is installed in close contact with the other surface of the main body 110 facing the TX device unit 120 and receives the terahertz wave incident through the beam entrance hole 111 or the The terahertz wave transmits and receives a terahertz reflection wave reflected in the direction of the module 100 to change the incident or reflection direction of the terahertz wave and terahertz reflection wave.

The galvano scanning module 200 is fixed at a predetermined angle therein to form a galvano reflector 201 that changes the traveling direction of the terahertz wave or terahertz reflection wave.

The galvano reflector 201 is preferably formed in a pair.

The galvano reflector 201 is adjusted by the user, the angle is fixed at a predetermined angle.

The galvano reflector 201 guides the terahertz wave to enter a predetermined point of the f-θ lens 300, or the terahertz reflection wave is reflected from the sample T through the f-θ lens 300. To the beam splitter 140.

It is preferable that the path of the terahertz wave incident on the galvano reflector 201 and the path of the terahertz reflection wave reflected and returned match each other.

The galvano reflector 201 guides the terahertz waves to converge at different points of the sample T according to the angle and the path of the beam.

The f-θ lens 300 is installed on the bottom surface of the galvano scanning module 200 to be orthogonal to the terahertz wave transmission / reception module 100, and receives the terahertz wave to determine the terahertz wave of the sample T. It is guided to focus to a point or guided so that the Terahertz reflection wave reflected by the sample (T) is reflected toward the galvano scanning module (200).

The f-θ lens 300 guides the terahertz wave to be focused at a predetermined point of the sample T.

The f-θ lens 300 has a hollow shape with an f-θ through-hole inlet 311 formed on one side thereof, and an f-θ through-hole on another side opposite to the f-θ through-hole 311. The f-θ barrel body 310 having the 312 formed therein, the convex concave lens 320 installed on the inner side corresponding to the f-θ barrel inlet 311 of the f-θ barrel body 310, and the f-θ barrel A planar convex lens 330 installed in the inner side corresponding to the f-θ light exit port 312 of the main body 310, a convex lens 340 provided between the block concave lens 320 and the planar convex lens 330, and The convex concave lens 320, the planar convex lens 330, and the convex lens 340 are installed between the convex concave lens 320, the planar convex lens 330, and the convex lens 340. It is composed of a fixing ring 350 to be fixed in the f-θ barrel body 310.

The terahertz wave incident through the f-θ barrel inlet 311 of the f-θ barrel body 310 sequentially passes through the convex concave lens 320, the convex lens 340, and the planar convex lens 330. It is focused, and in that state is incident to a predetermined point of the sample (T), and is reflected by the same path on the target (T).

The fixing ring 350 spaces the convex concave lens 320, the planar convex lens 330, and the convex lens 340 by a predetermined interval.

The stage 400 is installed below the f-θ lens 300 to fix the sample T on the upper surface.

The stage 400 is moved up, down, left, right, up, and down to change the position of the sample T positioned directly below the f-θ lens 300.

The scale 400 may be manually manipulated before, after, left, right, up, and down by a user to adjust the sample T to be located at the center of the f-θ lens 300.

The stage 400 may be inclined at an angle determined by a user to adjust the terahertz reflected wave angle reflected by the f-θ lens 300.

The cubic-type electronic scanning apparatus using the terahertz wave according to the present invention configured as described above is used as follows.

First, provided with a main body 110 of the terahertz wave transmission and reception module 100, the TX coupling unit 120 and the RX unit 130 to the guide rail 112 of the main body 110 so as to cross orthogonal to each other do.

At this time, each focusing lens 150 is installed in the beam entrance hole 111 of the main body 110 in which the TX device 120 and the RX device 130 are installed.

Here, the first fixed body 123 of the TX device unit 120 is located on one side of the main body 110, and provided with a first moving body 124 at the rear end of the first fixed body 123. In this state, the first connection spring 126 is installed at each corner between the first fixed body 123 and the first moving body 124, so that the first fixed body 123 and the first Connect between the moving body (124).

Subsequently, the first guide part 124a of the first moving body 124 is coupled to the guide rail 112 of the main body 110 by sliding.

At this time, the terahertz transmission module 123a for generating a terahertz wave to the beam access hole 111 of the main body 110 is installed in the central portion of the first fixed body 123.

In addition, a second fixed body 131 of the RX device unit 130 is provided on the other side of the main body 110 orthogonal to the TX device unit 120, and is provided at the rear end of the second fixed body 131. The terahertz receiving module 131a installed at the center of the second fixed body 131 by slidingly coupling the second moving body 132 to the second connection spring 134 in the same manner as described above. It is horizontally moved by the second moving body 132.

In particular, first and second angle adjustment levers that enable angle adjustment of the first and second fixed bodies 123 and 131 at corners of the first moving body 124 and the second moving body 132. 126 and 134 are provided.

Thereafter, the beam distribution lens 141 of the beam splitter 140 is inserted through the insertion hole 110a of the main body 110 so that the beam distribution lens 141 is positioned inside the main body 110. .

In this case, the beam distribution lens 141 is installed in the main body 110 and is turned at a predetermined angle so as to partition the beam entrance hole 110 in which the RX device 130 and the TX device 120 are installed. It is installed, the outer surface is supported in the end of the fixing frame 142 that is inserted into the insertion hole (110a) is fixedly installed in the main body (110).

Subsequently, the galvano scanning module 200 is tightly fixed to the beam entrance hole 111 side of the main body 110 opposite to the RX device 130 of the terahertz wave transmission / reception module 100, and the galvano The f-θ lens 300 is installed on the bottom surface of the scanning module 200.

Here, by connecting an external device to the input and output terminal (unsigned) of the galvano scanning module 200, by operating the external device in the state to adjust the angle of the galvano reflector 201 of the galvano scanning module 200 The path of the terahertz wave reflected by the galvano reflector 201 and incident in the direction of the f-θ lens 300 is controlled.

Subsequently, the f-θ lens 300 of the cubic-type electronic scanning apparatus using the terahertz wave coupled as described above is installed on a predetermined height of the housing H so as to face downward, and the f-θ lens 300 is provided. Place the sample (T) to be inspected on the stage 400 installed in the lower portion.

When the laser signal is input through the TX optical fiber cable 123a-1 of the terahertz transmission module 123a of the TX device unit 120, terahertz waves are generated from the terahertz transmission module 123a. The terahertz wave passes through the focusing lens 150 to abut the surface of the beam splitter 141 of the beam splitter 140.

Then, some of the terahertz waves contacting the beam splitting lens 141 pass through the beam splitter 140 and enter the galvano scanning module 200 through the beam entrance hole 111 of the main body 110. The other terahertz wave is reflected at a 90 degree angle with respect to the contact point with the beam distribution lens 141 and is emitted to the outside through the other beam entrance hole 111.

In this case, the terahertz wave reflected by the beam splitter lens 141 of the beam splitter 140 through the beam entrance hole 111 is emitted to the outside of the main body 110, whereby the beam is provided within the main body 110. The terahertz wave reflected by the distribution lens 141 is prevented from being diffusely reflected. Accordingly, the terahertz wave can be incident to the galvano scanning module 200 continuously through the beam entrance hole 111.

In addition, the focusing lens 150 focuses the terahertz wave and guides the terahertz wave to enter the beam entrance hole 111 in a focused state.

Thereafter, the terahertz wave incident through the beam entrance hole 111 of the main body 110 is reflected by the galvano reflector 201 while passing through the galvano scanning module 200, wherein the galvano reflector ( The terahertz wave reflected by 201 is changed in the incident direction thereof and is incident on the f-θ lens 300.

In addition, the terahertz wave introduced into the f-θ tube body 310 of the f-θ lens 300 is introduced into the f-θ tube body 310 through the f-θ tube inlet 311. After sequentially passing through the convex concave lens 320, the convex lens 340, and the planar convex lens 330, the sample is incident on the surface of the sample T through the f-θ mirror outlet 312, thereby (T) The terahertz wave is focused at a fixed point on the surface.

Here, the convex concave lens 320, the convex lens 340, and the planar convex lens 330 are fixed to be spaced apart from each other in the f-θ barrel body 310 by the ring-shaped fixing ring 350. Is installed.

In particular, the fixing ring 350 is made of aluminum and is fitted between the convex concave lens 320 and the convex lens 340 and between the convex lens 340 and the planar convex lens 330.

At this time, the point of the terahertz wave focused on the sample T is changed and scanned according to the reflection angle of the galvano reflector 201, and the predetermined point of the sample T is inspected by a scan method. .

Subsequently, the terahertz wave incident on the surface of the sample T is reflected on the surface of the sample T to generate terahertz reflection waves. In this case, the terahertz reflection wave is reflected toward the f-θ lens 300. .

Here, the terahertz reflection wave reflected in the direction of the f-θ lens 300 is the plane through the f-θ transmissive exit 312 of the f-θ barrel body 310 to correspond to the incident angle of the terahertz wave After sequentially passing through the convex lens 330, the convex lens 340, and the convex concave lens 320, the convex lens 330 is led back into the galvano scanning module 200 through the f-θ tube inlet 311.

In addition, the terahertz reflection wave introduced into the galvano scanning module 200 is reflected by the galvano reflector 201 and its reflection direction is changed, and the beam entrance hole 111 of the main body 110 is changed. After being introduced into the main body 110, the light is reflected by the beam distribution lens 141 of the beam splitter 140 and is changed in the direction of the RX device unit 130.

In this case, the terahertz reflection wave reflected by the beam splitter 140 changes its reflection path at an angle of 90 degrees to face the RX device unit 130.

Here, a part of the terahertz reflection wave which is in contact with the surface of the beam splitter lens 141 of the beam splitter 140 is reflected by the beam splitter 140 and the terahertz through the beam entrance hole 111 of the main body 110. A 90-degree angle opposite to the terahertz reflection wave inputted toward the receiving module 131a and the other part of the terahertz reflecting wave inputted toward the terahertz receiving module 131a based on a contact point with the beam distribution lens 141. Reflected to and is emitted to the outside through the other beam entrance hole 111.

In this case, the terahertz reflection wave reflected by the beam splitting lens 141 of the beam splitter 140 through the beam entrance hole 111 is emitted to the outside of the main body 110, thereby causing the beam to be in the main body 110. The terahertz reflection wave reflected by the distribution lens 141 is prevented from being diffusely reflected. Accordingly, the terahertz reflection wave can be continuously inputted in the direction of the terahertz receiving module 131a through the beam entrance hole 111. .

In addition, the terahertz reflection wave whose movement path is changed in the direction of the RX device unit 130 maintains the focused state while passing through the focusing lens 150 and is input to the terahertz receiving module 131a. .

Then, a terahertz reflection wave signal is detected by an external device connected to the terahertz receiving module 131a through the RX optical fiber cable 131a-1 of the terahertz receiving module 131a. Imaging the signal, to check whether the sample (T) is defective.

In this case, the incident path of the terahertz wave reaching the sample T from the beam entrance hole 111 of the main body 110 in which the TX apparatus 120 is installed, the RX apparatus part ( 130 corresponds to the reflection path of the terahertz reflection wave reaching the beam entrance hole 111 of the main body 110 is installed.

In the above description, the scanning device using the terahertz wave is installed on the housing H as an example. However, according to the user's selection, the conveying conveyor (automatically conveying the sample T) is used for the electronic scanning device using the terahertz wave. The sample T, which is installed on a predetermined position of time, can be continuously inspected.

Here, the sample (T) is preferably located directly below the f-θ lens 300 so as to correspond to the f-θ light exit port 312, if the sample (T) is the f-θ When positioned so as to deviate from the barrel outlet 312, the stage 400 is moved forward and rearward and left and right to adjust, so that the sample T outputs terahertz waves, and It can be located on the same vertical line.

In addition, the distance between the f-θ lens 300 and the sample is spaced more than a predetermined distance, the terahertz wave output amount reaching the sample T is lowered below a predetermined amount, or the terahertz wave output amount is a predetermined amount or more When rising to, the stage 400 may be vertically moved up and down to adjust the distance between the f-θ lens 300 and the sample T.

Here, the terahertz reflection wave reflected in the direction of the f-θ lens 300 is the plane through the f-θ transmissive exit 312 of the f-θ barrel body 310 to correspond to the incident angle of the terahertz wave After sequentially passing through the convex lens 330, the convex lens 340, and the convex concave lens 320, the convex lens 330 is led back into the galvano scanning module 200 through the f-θ tube inlet 311.

On the other hand, the distance between the TX device unit 120 and the galvano scanning module 200 is spaced more than a predetermined distance, generated in the TX device unit 120 to reach the galvano scanning module 200 When the incident amount of the terahertz wave rises above a predetermined amount or falls below a predetermined amount, the first guide part is held in a state in which the first moving body 124 of the TX device part 120 is held. By horizontally moving along the guide rails 112 of the main body 110, the first moving body 124 is slidably moved to integrally horizontally move the first fixed body 131. Accordingly, the terahertz transmission module 123a is close to the beam entrance hole 111 of the main body 110 or spaced apart from the beam entrance hole 111 by a predetermined distance, so that the TX device unit 120 and the galva are separated. The distance between the furnace scanning module 200 is adjusted will be.

In addition, when adjusting the distance between the terahertz wave transmission module 123a of the TX device unit 120 and the galvanos scanning module 200, the second of the RX device unit 130 is the same as described above. While holding the movable body 132, the second guide portion 132a is horizontally moved along the guide rail 112 of the main body 110, so that the second movable body 132 is slidingly moved. The second fixed body 131 is integrally horizontally moved, and accordingly, the terahertz receiving module 131a is close to the beam entrance hole 111 of the main body 110 or at the beam entrance hole 111. The distance between the RX device unit 130 and the galvano scanning module 200 is adjusted by a predetermined distance, and accordingly, the RX device unit 130 is input to the RX device unit 130 through the galvano scanning module 200. Input quantity of terahertz reflection wave is input more than fixed quantity Is input to the ryeokryang below is prevented.

In this case, the distance between the TX device unit 120 and the galvanos scanning module 200 and the distance between the RX device unit 130 and the galvanos scanning module 200 are preferably adjusted to have the same distance. Do.

In addition, between the main body 110 and the guide rail 112 is installed a height adjustment support 110b for adjusting the height of the guide rail 112, the TX device unit 120 and the RX device unit ( The terahertz transmission and reception modules 123a and 131a of 130 may be positioned on the same vertical line as the central portion of the beam entrance hole 110 of the main body 110.

In addition, when the terahertz wave firing direction generated in the TX device unit 120 is displaced in the up, down, left, or right directions of the beam access hole 110, the first moving body of the TX device unit 120. (124) When the first angle control lever 125 is installed at each corner to rotate, and presses each corner of the first fixed body 123 to the end of the first angle control lever 125, the pressing force The first fixed body 123 is twisted at a predetermined angle so that the terahertz wave firing direction generated from the terahertz transmission module 123a is directed to the galvano scanning module 200 through the center portion of the beam entrance hole 111. It is incident.

Subsequently, when the terahertz reflected wave input direction reflected by the beam splitter 140 and input to the terahertz receiving module 131a of the RX device unit 130 is twisted in the up, down, left, or right directions, the RX When the second angle control lever 134 of the device unit 130 is rotated and each corner of the second fixed body 131 is pressed to the end of the second angle control lever 134, the pressing force is applied. The second fixing body 131 is twisted at a predetermined angle so that the terahertz receiving module 131a is inclined at a predetermined angle, so that the second fixed body 131 is reflected by the beam splitter 140 and then the terahertz through the focusing lens 150. The terahertz reflected wave input to the receiving module 131a is input to the center of the terahertz receiving module 131a.

In this case, a first connection spring 126 connecting between the first fixed body 123 and the first moving body 124 and a connection between the second fixed body 131 and the second moving body 132 are provided. The second connection spring 134 is pressed and bent to correspond to the angles of the first and second fixed bodies 123 and 131 that are pressed and deformed at a predetermined angle, and are tensioned to move the first fixed body 123 and the first movement. It is to maintain the state connected between the body 124 and between the second fixed body 131 and the second moving body 132.

On the other hand, in case of malfunction due to the damage or the scratch of the beam distribution lens 141 installed in the main body 110, the fixed frame 142 inserted into the insertion hole (110a) of the main body 110 In this state, the beam distribution lens 141 installed in the main body 110 is separated to the outside through the insertion hole 110a.

The other beam splitting lens 141 is inserted into the main body 110 through the insertion hole 110a, and then the fixing frame 142 is inserted and coupled to the fixing frame 142 through the insertion hole 110a. An end of the frame 142 enters the main body 110 through the insertion hole 110a to fix and support an outer surface of the beam split lens 141. Accordingly, the beam split lens 141 is connected to the main body 110. It is firmly fixed in).

As described above, by adjusting the distance between the TX device unit 120 that generates the terahertz wave and the RX device unit 130 that receives the terahertz wave and the galvano scanning module 200, the terahertz wave output loss and the input amount loss. To prevent the structure, the terrarium incident from the TX device unit 120 to the galvano scanning module 200 by adjusting the distance between the TX device unit 120 and the RX device unit 130 and the galvano scanning module 200. Loss of hertz wave output and loss of terahertz reflected wave input from the galvano scanning module 200 to the RX device unit 130 are prevented, and through terahertz wave due to the loss of terahertz wave output and loss of terahertz reflected wave input The state of the sample can be accurately confirmed, and the terahertz wave is reflected back to the sample T and reflected back to the sample T without the need to adjust the angle between the TX unit 120 and the RX unit 130. Upon matching the coming path , To quickly visualize the defects if the sample (T) can be inspected.

The cubic-type electronic scanning device using the terahertz wave according to the present invention described above is not limited to the above-described embodiment, and is conventional in the field of the present invention without departing from the gist of the present invention as claimed in the following claims. Anyone with knowledge has the technical spirit to the extent that various changes can be made.

100: terahertz wave transmission and reception module 110: main body
110a: insertion hole 110b: height adjustment
111: beam entrance hole 112: guide rail
120: TX unit 123: first fixed body
123a: terahertz transmission module 123a-1: TX optical fiber cable
124: first moving body 124a: first guide part
125: first angle control lever 126: first connection spring
130: RX unit 131: second fixed body
131a: terahertz receiving module 131a-1: RX fiber optic cable
132: second moving body 132a: second guide portion
133: second angle control lever 134: second connection spring
140: beam splitter 141: beam split lens
142: fixed frame 150: focusing lens
200: galvano scanning module 201: galvano reflector
300 f-θ lens 310 f-θ barrel body
311: f-θ barrel exit 312: f-θ barrel exit
320: convex convex lens 330: planar convex lens
340: convex lens 350: fixing ring
400: stage T: sample

Claims (9)

It is provided with a main body 110 having a plurality of beam entrance holes 111 formed on the outer surface in a hollow shape, the main body 110 is provided to be slidably movable, and generates a terahertz wave by receiving a laser signal. The terahertz wave is provided to the outside through the beam entrance hole 111 of the main body 110, TX device portion 120, and the other side of the main body 110 to be orthogonal to the TX device portion 120 A terahertz wave transmitting / receiving module (100) formed to be slidably movable and having an RX device unit (130) for receiving terahertz reflected waves returned into the main body (110) through the beam access hole (111);
It is installed in close contact with the other surface of the main body 110 facing the TX device unit 120, and receives the terahertz wave incident through the beam entrance hole 111 or the terahertz wave transmission and reception module 100 A galvano scanning module 200 which receives the terahertz reflection wave reflected in the direction and changes the incident or reflection direction of the terahertz wave and the terahertz reflection wave;
It is installed on the bottom surface of the galvano scanning module 200 to be orthogonal to the terahertz wave transmission / reception module 100, and receives the terahertz wave to guide the terahertz wave to a predetermined point of the sample T or the A f-θ lens (300) for guiding the Terherz reflection wave reflected by the sample (T) to be reflected toward the galvano scanning module (200); And
A stage 400 installed below the f-θ lens 300 to fix the sample T on an upper surface thereof;
Cubic-type electronic scanning device using a terahertz wave, characterized in that consisting of. The method of claim 1,
The terahertz wave transmission and reception module 100,
Protruding in the direction perpendicular to each other on the upper surface of the main body 110, to form a guide rail 112 for guiding the sliding movement of the TX device unit 120 and RX device unit 130,
Is provided in the main body 110, is formed to be inclined in one direction so as to partition the beam entrance hole 111 facing each other, passing through the terahertz wave generated in the beam entrance hole 111 direction, the beam entry A beam splitter 140 for reflecting the terahertz reflection wave reflected in the direction of the ball 111 toward the RX device 130;
It is fixed to each of the beam entrance hole 111 of the main body 110 corresponding to the TX device unit 120 and the RX device unit 130, the terahertz wave through the beam entrance hole 111 A focusing lens 150 for guiding the galvano scanning module 200 to be incident or to guide the terahertz reflection wave reflected by the beam splitter 140 to the RX device unit 130;
Cubic-type electronic scanning device using a terahertz wave, characterized in that it further comprises. The method of claim 2,
The main body 110 forms an insertion hole 110a on the upper and lower surfaces,
The beam splitter 140,
A beam distribution lens 141 provided in the main body 110 to pass through the terahertz wave or reflect the terahertz reflection wave toward the RX device unit 130;
A fixed frame 142 which is inserted and fixed into the insertion hole 110a of the main body 110 and is in close contact with the outer surface of the beam distribution lens 141 to fix the beam distribution lens 141 in the main body 110;
Cubic-type electronic scanning device using a terahertz wave, characterized in that consisting of. The method of claim 2,
The TX device unit 120,
A first fixed body 123 having a central portion penetrated and positioned at one side of the main body 110, and having a terahertz transmission module 123a fixedly installed at a central portion thereof;
A first movable body 124 provided at a rear end of the first fixed body 123 and having a first guide part 124a slidingly coupled to the guide rail 112 on an upper surface thereof;
The first angle control for penetrating the respective corners of the rear surface of the first moving body 124 and the end thereof is fastened to the first fixed body 123, rotates to adjust the angle of the first fixed body 123 Lever 125; And
A first connection spring 126 provided between an edge of the first fixed body 123 and the first moving body 124 to connect the first fixed body 123 and the first moving body 124 to each other; );
Cubic-type electronic scanning device using a terahertz wave, characterized in that consisting of. The method of claim 2,
The RX device unit 130,
A second stationary body 131 which is positioned at the other side of the main body 110 so as to be orthogonal to the TX device unit 120 and fixedly installs a terahertz receiving module at a central portion thereof;
A second movable body 132 provided at a rear end of the second fixed body 131 and having a second guide part 132a slidingly coupled to the guide rail 112 on an upper surface thereof;
The second angle adjustment for penetrating the respective corners of the rear surface of the second moving body 132 and the end thereof is fastened to the second fixed body 131, rotates to adjust the angle of the second fixed body 131 Lever 133; And
A second connection spring 134 provided between an edge of the second fixed body 131 and the second moving body 132 to connect the second fixed body 131 and the second moving body 132 to each other; );
Cubic-type electronic scanning device using a terahertz wave, characterized in that consisting of. The method of claim 2,
The main body 110,
Cubic-type electronic scanning device using a terahertz wave, characterized in that further formed between the main body 110 and the guide rail 112, the height adjustment base (110b) for adjusting the height of the guide rail (112). The method of claim 1,
The galvano scanning module 200,
A cubic electronic scanning device using a terahertz wave, which is fixed at a predetermined angle therein and forms a galvano reflector 201 that changes a traveling direction of the terahertz wave or terahertz reflection wave. The method of claim 1,
The f-θ lens 300,
The f-θ barrel body 311 is formed in a hollow shape at one side thereof, and the f-θ barrel outlet 312 is formed at the other side opposite to the f-θ barrel inlet 311 ( 310;
A convex concave lens 320 installed at an inner side corresponding to the f-θ barrel inlet 311 of the f-θ barrel body 310;
A planar convex lens 330 installed at an inner side corresponding to the f-θ barrel outlet 312 of the f-θ barrel body 310; And
A convex lens 340 disposed between the block concave lens 320 and the planar convex lens 330;
The convex concave lens 320, the planar convex lens 330, and the convex lens 340 are installed between the convex concave lens 320, the planar convex lens 330, and the convex lens 340. a fixing ring 350 to be fixed in the f-θ barrel body 310;
Cubic-type electronic scanning device using a terahertz wave, characterized in that consisting of. The stage 400,
A cubic-type electronic scanning device using terahertz waves, which is moved to the front, rear, right, up, and down to change the position of the sample T positioned directly below the f-θ lens 300.

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