CN212567282U - Detection device and detection equipment - Google Patents

Detection device and detection equipment Download PDF

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Publication number
CN212567282U
CN212567282U CN202021849561.6U CN202021849561U CN212567282U CN 212567282 U CN212567282 U CN 212567282U CN 202021849561 U CN202021849561 U CN 202021849561U CN 212567282 U CN212567282 U CN 212567282U
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detection
light
light source
detected
area
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陈鲁
方一
李青格乐
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Flying Test Technology Co ltd
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Abstract

The application provides a detection device, which comprises a light source device, a light source device and a light source control device, wherein the light source device is used for emitting detection light beams to a region to be detected and a peripheral area thereof, the detection light beams are incident to the region to be detected and the peripheral area thereof along a direction vertical to an object to be detected, and the detection light beams penetrate through the peripheral area to form recheck light beams; the reflecting element is provided with a reflecting surface, the reflecting surface is parallel to the object to be detected, the reflecting surface is used for reflecting at least part of the rechecking light beam to the peripheral area, and the rechecking light beam penetrates through the peripheral area to form first signal light; the detection device is used for receiving signal light, and the signal light comprises first signal light which is emitted from the peripheral area along the direction vertical to the object to be detected; through the arrangement, the detection light beam emitted by the light source device can form signal light after being reflected, refracted or scattered by the object to be detected, and the signal light is collected by the detection device to form a clear outline drawing, so that the detection precision is improved.

Description

Detection device and detection equipment
Technical Field
The utility model relates to an optical detection technical field, in particular to detection device and check out test set.
Background
With the rapid development of electronic information technology, the updating speed of mobile phones is faster and faster, including the change of software and hardware. For example, curved mobile phone screens are becoming a development trend, wherein hyper-curved circular screen screens are more and more concerned by mobile phone manufacturers.
Aiming at the development trend of mobile phone screens, the existing optical detection technology can not meet the requirements, and when the edge of a curved screen, especially a hyper-curved circular screen, is detected, the existing optical detection instrument can not clearly image the edge of the curved screen, so that the precision of an optical detection result is reduced.
How to accurately detect the curved screen of the mobile phone is a problem to be solved urgently at present.
SUMMERY OF THE UTILITY MODEL
To the unable clear shortcoming of formation of image in curved surface screen edge among the current optical detection technique, the utility model provides a detection device, include: the light source device is used for emitting detection light beams to an area to be detected and a peripheral area of the area to be detected, the detection light beams are incident to the area to be detected and the peripheral area of the area to be detected along a direction perpendicular to an object to be detected, the detection light beams penetrate through the peripheral area to form recheck light beams, and the area to be detected is used for changing the propagation direction of the detection light beams; the reflecting element is provided with a reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the reflecting surface is used for reflecting at least part of the rechecking light beam to the peripheral area, and the rechecking light beam passes through the peripheral area to form first signal light; and the detection device is used for receiving signal light, the signal light comprises first signal light which is emitted from the peripheral area along the direction vertical to the reflecting surface, and detection information is formed.
Through the arrangement, the detection light beam emitted by the light source device is incident to the area to be detected and the peripheral area thereof, part of the detection light is reflected by the surface of the object to be detected to form part of signal light, part of the detection light passes through the peripheral area to form the recheck light beam, the recheck light beam passes through the peripheral area to irradiate the reflecting surface to form the recheck light beam, part of the recheck light beam passes through the peripheral area to form the first signal light, and the detection device receives the signal light, particularly the first signal light emitted from the peripheral area along the direction vertical to the object to be detected, so that the contrast of images can be improved, and the detection accuracy is improved.
In one embodiment, the light source device includes a light source and a beam splitter, and the beam splitter is disposed on a light path between the light source and the object to be detected, and is used for enabling the detection light beam emitted by the light source to irradiate the edge of the object to be detected; through above setting, this detection device has small advantage.
In one embodiment, the light source is an array of LED light sources, and the beam splitter is a half mirror.
In one embodiment, the beam splitter is configured to reflect the detection light beam emitted from the light source and transmit the signal light; or, the spectroscope is used for transmitting the detection light beam emitted by the light source and reflecting the signal light.
In one embodiment, the detection device further comprises a bearing surface for placing the object to be detected; the light source device and the reflecting element are respectively positioned on two sides of the bearing surface, and the light source device and the detecting device are positioned on the same side of the bearing surface; the optical axis of the detection device is perpendicular to the reflecting surface, or the light emitting surface of the light source is parallel to the reflecting surface.
In one embodiment, the optical axis of the detecting device is perpendicular to the reflecting surface, the light source device is located between the detecting device and the reflecting element, the light source device has an end surface close to the bearing surface, the distance between the end surface and the bearing surface is 150-170 mm, and the distance between the bearing surface and the reflecting surface is 18-22 mm.
In one embodiment, the detection beam perpendicular to the reflective surface has a central beam in the center; the central light beam and the optical axis of the detection device pass through the same straight line.
In one embodiment, the region to be measured includes an edge line of the edge of the object or an edge line of the hole; the peripheral area comprises an area to be measured positioned on one side of the edge line or/and a space area positioned on the other side of the edge line.
In one embodiment, an angle between an outer normal line of the surface of the object to be measured and the reflecting surface at least one point is less than 20 degrees.
In one embodiment, the peripheral region includes an area to be detected, and the peripheral region is made of a light-transmitting material or a light-proof material relative to the detection beam.
In one embodiment, the reflective element is a specular mirror.
In one embodiment, the light source arrangement comprises a telecentric parallel light source; through the arrangement, the parallelism of the detection light beam emitted by the light source device is higher.
In one embodiment, the reflective element is annular.
In one embodiment, the test object comprises: the area to be measured is positioned at the periphery of the central area; further comprising: a platform; and the support piece is positioned on the platform and used for supporting the central area of the object to be measured, the reflecting element is fixed on the platform, and the support piece penetrates through the hollow area of the reflecting element.
In one embodiment, the detection information includes one or more of location, shape or size information of the region to be detected.
The utility model also provides a detection device, including the aforesaid arbitrary detection device, it is right still including being used for the determinand carries out the detection part that detects.
In one embodiment, the detection component is at least one of a chromatic confocal detection portion, an interference detection component, a color camera, or a reflectance spectrum detection portion.
The utility model discloses technical scheme's beneficial effect includes: in the process, the detection light beam emitted by the light source device is incident to the area to be detected and the peripheral area thereof, part of the detection light is reflected by the surface of an object to be detected to form part of signal light (second signal light), and part of the detection light beam passes through the peripheral area to form a re-detection light beam and passes through the peripheral area to irradiate the reflection surface; the detection device can receive the signal light twice, so that the image contrast of the peripheral area and the area to be detected can be increased, and the detection precision is improved. Meanwhile, the detection light is used for receiving the signal light, the signal light comprises a first signal light which is emitted from the peripheral area along the direction perpendicular to the reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the parallelism of the detection light beam of the signal light is good, and the light beam after the propagation direction of the detection light beam is changed in the area to be detected and is not easy to be received by the detection device, so that the contrast of the formed image can be further improved, and the detection accuracy is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a structural transmission diagram of an embodiment of a detection apparatus provided in the present application;
FIG. 2 is a schematic structural diagram of another embodiment of a detection apparatus provided in the present application;
fig. 3 is a schematic structural diagram of another embodiment of the detection apparatus provided in the present application.
Detailed Description
The core of the utility model is to provide a detection device, the improvement determinand edge definition and the contrast that this detection device can show improve the detection precision to the determinand.
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
Referring to fig. 1 and fig. 2, fig. 1 is a light transmission diagram of an embodiment of a detection device provided by the present invention, and fig. 2 is a schematic structural diagram of an embodiment of a detection device provided by the present invention.
In this embodiment, the detection device includes: the device comprises a detection device 110, a light source device 120 and a reflection element 130, wherein the light source device 120 is used for emitting detection light beams to an area to be detected and a peripheral area thereof, the detection light beams are incident to the area to be detected and the peripheral area thereof along a direction perpendicular to an object to be detected, the detection light beams penetrate through the peripheral area to form recheck light beams, and the area to be detected is used for changing the propagation direction of the detection light beams; the reflecting element 130 has a reflecting surface, the central axis of the detection beam is perpendicular to the reflecting element, the reflecting surface is used for reflecting at least part of the review beam to the peripheral area, and the review beam passes through the peripheral area to form a first signal light; the detecting device 110 is configured to receive signal light, which includes first signal light emitted from the peripheral area in a direction perpendicular to the reflecting surface of the reflecting element 130, to form detection information.
The utility model discloses technical scheme's beneficial effect includes: in the process, the detection light beam emitted by the light source device is incident to the area to be detected and the peripheral area thereof, part of the detection light is reflected by the surface of an object to be detected to form part of signal light (second signal light), and part of the detection light beam passes through the peripheral area to form a re-detection light beam and passes through the peripheral area to irradiate the reflection surface; the detection device can receive the signal light twice, so that the image contrast of the peripheral area and the area to be detected can be increased, and the detection precision is improved. Meanwhile, the detection light is used for receiving the signal light, the signal light comprises a first signal light which is emitted from the peripheral area along the direction perpendicular to the reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the parallelism of the detection light beam of the signal light is good, and the light beam after the propagation direction of the detection light beam is changed in the area to be detected and is not easy to be received by the detection device, so that the contrast of the formed image can be further improved, and the detection accuracy is improved.
In this embodiment, an included angle between an outer normal at least one point of the surface of the object to be measured and the reflection surface is less than 20 °.
Specifically, in this embodiment, as shown in fig. 2, the object 150 to be measured is 2.5D or 3D glass, such as a mobile phone screen or a mobile phone shell.
In this embodiment, the peripheral region of the detection area includes the region of the object 150 to be detected, and the peripheral region is made of a transparent material or an opaque material relative to the detection beam. In addition, the dut 150 includes a central region, and the region to be tested is located at the periphery of the central region.
The area to be detected comprises an edge line of the edge of the object to be detected or an edge line of the hole; the peripheral area comprises an area to be measured positioned on one side of the edge line or/and a space area positioned on the other side of the edge line.
In this embodiment, the region to be measured is an edge line of the object to be measured; the peripheral region comprises an area to be measured on one side of the edge line and a space region on the other side of the edge line.
The spatial region refers to a portion not belonging to the object to be measured, for example, air near the edge line of the object to be measured in this embodiment.
The detection device further comprises a bearing surface, and the bearing surface is used for placing an object to be detected.
In this embodiment, the light source device 120 includes a light source 121 and a beam splitter 122, wherein the beam splitter 122 is disposed on a light path between the light source 121 and the object 150 to be measured, and is configured to separate the detection light beam emitted from the light source 121 from the signal light. Through the arrangement, the detection device has the advantage of small volume.
Specifically, the light source 121 is an LED light source array, which may be white light, blue light or light with other wavelengths, and may emit parallel detection light beams; the beam splitter 122 is a half mirror, which can transmit part of the light and reflect part of the light.
In the present embodiment, the light source 121 is configured to emit a detection light beam to the beam splitter 122, and the detection light beam is reflected or transmitted by the beam splitter and then enters the region to be measured and the peripheral region thereof along a direction perpendicular to the object 150 to be measured.
In this embodiment, as shown in fig. 1, the beam splitter 122 may be configured to reflect the detection light beam emitted from the light source 121 and transmit the signal light. In another embodiment, as shown in fig. 3, a beam splitter 122 may be used to transmit the detection light beam emitted from the light source 121 and reflect the signal light.
In another embodiment, the light source device 120 comprises a telecentric parallel light source, and the detection light beam emitted by the light source device has higher parallelism.
In this embodiment, the detection beam emitted from the light source device 120 and perpendicular to the reflection surface of the reflection element 130 has a central beam at the center, and the central beam and the optical axis of the detection device 110 pass through the same straight line. The central light beam and the optical axis of the detection device 110 pass through the same straight line, which can increase the maximum intensity of the signal light parallel to the optical axis of the detection device detected by the detection device 110, reduce the intensity of the light beam with a divergence angle, and further increase the contrast of the acquired image.
For example: in this embodiment, the light source device 120 forms a solid light spot on the plane of the bearing surface, and the center of the field area of the detecting device 110 on the plane of the bearing surface coincides with the solid light spot.
In other embodiments, the cross-section of the detection beam on the bearing surface and the center of the detection device in the field of view of the bearing surface are offset from each other.
In this embodiment, the light source device 120 and the reflective element 130 are respectively located at two sides of the bearing surface, and the light source device 120 and the detecting device 110 are located at the same side of the bearing surface; and the optical axis of the detecting device 110 is perpendicular to the reflecting surface of the reflecting element 130.
In this embodiment, the detecting device 110 directly detects the signal light transmitted by the beam splitter 122; the probe light emitted from the light source is directly incident on the beam splitter 122. The detection equipment has compact structure and small volume.
In another embodiment, referring to fig. 3 again, a light emitting surface of the light source 121 is parallel to the reflecting surface of the reflecting element 130. The detection device 110 directly detects the signal light reflected by the beam splitter 122; the probe light emitted from the light source is directly incident on the beam splitter 122.
Both the detection devices shown in fig. 1 and 3 have the advantages of compact structure and small volume.
In other embodiments, the light reflected or projected by the beam splitter may be received by the detection device after being reflected by one or more mirrors. And/or the detection light emitted by the light source reaches the spectroscope after being reflected by one or more reflectors. In the present embodiment, the detecting device 110 includes a detector 111 and a lens 112, and an industrial camera is adopted, so that the material is easy to obtain and the cost is low. The optical axis of the detection device 110 is perpendicular to the reflection surface of the reflection element 130, and the light source device 120 is located between the detection device 110 and the reflection element 130; specifically, the light source device 120 has an end surface close to the bearing surface, and the distance between the end surface and the bearing surface is 150-170 mm, preferably 160 mm; the distance between the support surface and the reflection surface of the reflection element is 18mm to 22mm, preferably 20 mm. Through the arrangement, after the detection light beam emitted by the light source device 120 is reflected by the object to be detected and/or the reflecting surface, more light rays can be collected by the detection device, so that the contour diagram signal output by the detection device is stronger, and the signal-to-noise ratio of the detection device is further reduced.
In the present embodiment, the reflection surface of the reflection element 130 is a mirror reflection surface, which can make the detection light beam irradiated thereon, especially the review light beam, maintain the parallel characteristic after being reflected by the reflection surface, so that the review light beam is irradiated to the edge of the object 150 to be measured in parallel.
The reflective element 130 is ring-shaped, i.e. the middle region of the reflective element 130 is hollow. Referring to fig. 1 again, the detecting apparatus further includes a platform 140, and a supporting member 141 disposed on the platform 140, wherein the supporting member 141 is used for supporting a central region of the object 150 to be detected, the reflective element 130 is fixed on the platform 140, and the supporting member 141 passes through a hollow region of the reflective element 130.
The surface of the supporting member 141 contacting the object 150 to be tested is the bearing surface; the bearing surface is parallel to the reflecting surface.
When the object 150 to be tested is placed on the bearing surface, the main plane of the object 150 to be tested is parallel to the bearing surface. For example, the major plane of the handset housing contacts the bearing surface.
In this embodiment, the supporting member 141 includes a plurality of suckers, and the suckers are used for directly contacting with the object 150 to be tested, so as to support the object 150 to be tested. The detection device 110 is configured to obtain images of a region to be detected and a peripheral region according to the signal light; and acquiring the detection information of the region to be detected according to the image.
The detection information includes one or more combinations of location, shape, or size information of the region-to-be-detected.
Specifically, in this embodiment, the detection information includes an edge profile of the 2.5D or 3D glass. In other embodiments, the detection information includes a location of an edge line of the hole.
Referring to fig. 1 again, parallel detection light beams emitted from the light source 121 are reflected by the beam splitter 122 after passing through the beam splitter 122, the detection light beams are incident to the region to be detected and the peripheral region thereof along a direction perpendicular to the bearing surface, a part of the detection light beams are reflected by the surface of the object to be detected 150 to form a part of signal light (second signal light), the detection light beams reaching the region to be detected are scattered or diffracted by the region to be detected to change the propagation direction and are not easy to be detected by the detection device, so that the image gray value of the region to be detected; the second signal light enters the detecting device 110 after passing through the spectroscope 122, so that the gray value of the image formed by the object to be detected in the peripheral area is higher; part of the detection light beam passes through the object to be detected and the space in the peripheral area to form a recheck light beam, the recheck light beam is reflected by the reflecting surface of the reflecting element 130 and then irradiates the peripheral area again, the recheck light beam passing through the peripheral area forms first signal light, the first signal light is received by the detecting device 110 after passing through the spectroscope 122, and the gray value of the image in the peripheral area to be detected is further increased by the part of the first signal light passing through the object to be detected in the peripheral area, so that the contrast is improved. Because the change of the space area of the peripheral area to the light propagation direction is small, the reinspection light incident perpendicular to the reflecting surface is received by the detection device after being emitted perpendicular to the reinspection light, and therefore the image gray value of the space area of the peripheral area is higher. In conclusion, through the arrangement, the contrast of the acquired image can be improved, and the detection device can form a clear outline of the object to be detected. In the embodiment, the parallel detection light beams provided by the light source are reflected by the surface of the object to be detected, and are transmitted by the object to be detected and collected by the detection device after being reflected by the reflecting surface, so that a profile diagram of the object to be detected is formed, and the definition of edge imaging of the object to be detected is improved.
In this embodiment, the detecting device further includes a moving stage 140 for moving and/or rotating the object 150 with respect to the detecting device 110 and the light source device 120; specifically, the object 150 is disposed on the moving stage 140, and the object 150 can be positioned within the irradiation range of the light source device 120 by moving the moving stage 140. In other embodiments, the object 150 and the reflective element 130 may be disposed on the moving stage 140 at the same time, so that the moving stage 140 drives the object 150 and the reflective element 130 to move at the same time.
The present application further provides a detection apparatus, which includes the above detection device, and further includes: and a detecting member for optically detecting the object 150. The detecting component may be at least one of a chromatic confocal detecting portion, an interference detecting component, a color camera, or a reflection spectrum detecting portion.
While the present invention has been described with reference to specific examples, which are intended to be illustrative only and not to be limiting of the invention, it will be apparent to those of ordinary skill in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the invention.

Claims (17)

1. A detection device, comprising: the light source device is used for emitting detection light beams to an area to be detected and a peripheral area of the area to be detected, the detection light beams are incident to the area to be detected and the peripheral area of the area to be detected along a direction perpendicular to an object to be detected, the detection light beams penetrate through the peripheral area to form recheck light beams, and the area to be detected is used for changing the propagation direction of the detection light beams;
the reflecting element is provided with a reflecting surface, the central axis of the detection light beam is perpendicular to the reflecting element, the reflecting surface is used for reflecting at least part of the rechecking light beam to the peripheral area, and the rechecking light beam passes through the peripheral area to form first signal light;
and the detection device is used for receiving signal light, the signal light comprises first signal light which is emitted from the peripheral area along the direction vertical to the reflecting surface, and detection information is formed.
2. The detecting device according to claim 1, wherein the light source device includes a light source and a beam splitter, the beam splitter being disposed on a light path between the light source and the object to be detected, for separating the detection light beam emitted from the light source from the signal light.
3. The detecting device for detecting the rotation of a motor rotor as claimed in claim 2, wherein the light source is an LED light source array, and the spectroscope is a half-transparent half-reflecting mirror.
4. The detecting device for detecting the rotation of a motor rotor as claimed in claim 2, wherein the beam splitter is used for reflecting the detecting light beam emitted by the light source and transmitting the signal light; or, the spectroscope is used for transmitting the detection light beam emitted by the light source and reflecting the signal light.
5. The inspection device of claim 1, further comprising a carrying surface for placing the object to be inspected;
the light source device and the reflecting element are respectively positioned on two sides of the bearing surface, and the light source device and the detecting device are positioned on the same side of the bearing surface;
the optical axis of the detection device is perpendicular to the reflecting surface, or the light emitting surface of the light source is parallel to the reflecting surface.
6. The detecting device for detecting the rotation of a motor rotor as claimed in claim 5, wherein the optical axis of the detecting device is perpendicular to the reflecting surface, the light source device is located between the detecting device and the reflecting element, the light source device has an end surface close to the bearing surface, the distance between the end surface and the bearing surface is 150-170 mm, and the distance between the bearing surface and the reflecting surface is 18-22 mm.
7. The detector apparatus of claim 1, wherein the detection beam normal to the reflective surface has a central beam at the center; the central light beam and the optical axis of the detection device pass through the same straight line.
8. The detecting device according to claim 1, wherein the region to be detected includes an edge line of the edge of the object or an edge line of the hole; the peripheral area comprises an area to be measured positioned on one side of the edge line or/and a space area positioned on the other side of the edge line.
9. The detecting device for detecting the rotation of a motor rotor as claimed in claim 6, wherein an included angle between an outer normal line and a reflecting surface at least one point of the surface of the object to be detected is less than 20 degrees.
10. The inspection device of claim 1, wherein the peripheral region comprises an area under inspection, the peripheral region being transparent or opaque to the inspection beam.
11. The detection device of claim 1, wherein the reflective element is a specular mirror.
12. The inspection apparatus of claim 1 wherein said light source means comprises a telecentric parallel light source.
13. The sensing device of claim 1, wherein the reflective element is annular.
14. The test device of claim 13, wherein the test object comprises: the area to be measured is positioned at the periphery of the central area;
further comprising: a platform; and the support piece is positioned on the platform and used for supporting the central area of the object to be measured, the reflecting element is fixed on the platform, and the support piece penetrates through the hollow area of the reflecting element.
15. The detection apparatus of claim 1, wherein the detection information comprises one or more combinations of location, shape, or size information of the region-to-be-detected.
16. An inspection apparatus comprising the inspection device according to any one of claims 1 to 15, and an inspection unit for inspecting the object to be inspected.
17. The inspection apparatus of claim 16, wherein the inspection component is at least one of a chromatic confocal inspection portion, an interference inspection component, a color camera, or a reflectance spectrum inspection portion.
CN202021849561.6U 2019-10-22 2020-08-31 Detection device and detection equipment Active CN212567282U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201921780838 2019-10-22
CN2019217808381 2019-10-22

Publications (1)

Publication Number Publication Date
CN212567282U true CN212567282U (en) 2021-02-19

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Country Status (1)

Country Link
CN (1) CN212567282U (en)

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Address after: 518109 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province

Patentee after: Shenzhen Zhongke feice Technology Co.,Ltd.

Address before: 518109 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province

Patentee before: Shenzhen Zhongke Flying Test Technology Co.,Ltd.