CN212963235U - Detection device - Google Patents
Detection device Download PDFInfo
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- CN212963235U CN212963235U CN202021785352.XU CN202021785352U CN212963235U CN 212963235 U CN212963235 U CN 212963235U CN 202021785352 U CN202021785352 U CN 202021785352U CN 212963235 U CN212963235 U CN 212963235U
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Abstract
The utility model discloses a detection device, include: an illumination assembly and an imaging assembly; the former comprises a first lighting assembly and a dome assembly; the latter includes an imaging lens and a detector. The first illumination assembly and the dome assembly are used for illuminating the object to be measured. The dome assembly is a portion of a sphere, the center of which is located on the optical axis of the imaging assembly. The first lighting assembly is located on the periphery of the sphere, and the lighting directions of the first lighting assembly point to the center of the sphere. The imaging lens collects the light reflected and/or scattered by the object to be detected to the detector; the detector forms a detection image of the object to be detected according to the light. The first illumination assembly and the dome assembly may be used independently or in combination. Thus meeting various lighting requirements for the object to be tested. The illumination direction that first lighting assembly provided all points to the centre of sphere, consequently need not adjust the position of determinand based on different lighting assembly's illumination direction is complicated, only needs place the position that awaits measuring of determinand in the centre of sphere or near the centre of sphere, promotes lighting efficiency and detection efficiency, reduces the operation complexity.
Description
Technical Field
The utility model relates to a detect and lighting technology field, especially relate to a detection device.
Background
In the technical fields of semiconductors, terminals and the like, the shape of a product has high requirements, so strict detection is required. When detecting the shape of an object to be detected, if the ambient light is weak, the object to be detected generally needs to be illuminated.
In the prior art, the same type of light source is generally used for illumination and detection, but bright field illumination is required for some areas of the object to be detected, and dark field illumination is required for other areas. There is currently no good solution for the different lighting needs of different areas.
SUMMERY OF THE UTILITY MODEL
Based on the problem, the utility model provides a detection device to through different lighting assemblies or its combination form, satisfy the multiple lighting needs to the determinand.
The embodiment of the utility model discloses following technical scheme:
in a first aspect, the present application provides a detection apparatus comprising: an illumination assembly and an imaging assembly; the lighting assembly includes: a first lighting assembly and a dome assembly; the imaging assembly includes: an imaging lens and a detector;
when the first illumination assembly is lightened, the first illumination assembly is used for illuminating the object to be measured; when the dome assembly is lighted, the dome assembly is also used for illuminating the object to be measured;
the dome assembly is a part of a sphere, and the spherical center of the dome assembly is positioned on the optical axis of the imaging assembly; the first lighting assembly is specifically positioned at the periphery of the sphere, and the lighting directions provided by the first lighting assembly are all directed to the center of the sphere;
the imaging lens is used for collecting light reflected and/or scattered by the object to be detected and providing the light to the detector, and an acute included angle is formed between the optical axis of the imaging component and the illumination direction of the first illumination component;
the detector is used for forming a detection image of the object to be detected according to the light collected by the imaging lens.
Optionally, the first lighting assembly is specifically adapted to provide at least two different lighting directions.
Optionally, the first lighting assembly comprises: a first subassembly and a second subassembly; the first subassembly and the second subassembly have different illumination directions; the illumination direction of the first sub-assembly and the illumination direction of the second sub-assembly form acute included angles with the optical axis of the imaging assembly respectively.
Optionally, the illumination direction of the first subassembly, the illumination direction of the second subassembly, and the optical axis of the imaging assembly are located in the same plane, and the illumination direction of the first subassembly and the illumination direction of the second subassembly are symmetric about the optical axis of the imaging assembly.
Optionally, the first sub-assembly and the second sub-assembly are both fibre optic light sources.
Optionally, the intersection point of the optical axis of the imaging assembly and the focal plane of the imaging assembly is the imaging field center of the imaging assembly; the distance between the imaging view field center and the sphere center is smaller than or equal to half of the thickness of the object to be detected.
Optionally, a dome assembly is located to one side of the optical axis of the imaging assembly, and the dome assembly is recessed away from the optical axis of the imaging assembly.
Optionally, a through hole is formed in the dome assembly, and the through hole is located between the imaging lens and the spherical center; the through hole is coaxial with the optical axis of the imaging component;
the imaging lens is specifically used for collecting the light reflected and/or scattered by the object to be detected through the through hole.
Optionally, the diameter size of the through hole is larger than or equal to the required clear aperture of the imaging lens.
Optionally, the lighting assembly further comprises: the coaxial assembly; the coaxial assembly includes: a coaxial light source; the imaging assembly further comprises a beam splitter, wherein light emitted by the coaxial light source reaches the surface of the object to be detected after being reflected by the beam splitter, and light returned by the object to be detected reaches the detector after being transmitted by the beam splitter; or, the light emitted by the coaxial light source reaches the surface of the object to be detected after being transmitted by the beam splitter, and the light returned by the object to be detected reaches the detector after being reflected by the beam splitter.
Optionally, an optical axis of the coaxial assembly is coplanar with an optical axis of the first illumination assembly.
Optionally, the coaxial light source is a fiber optic light source or an LED light source.
Optionally, the coaxial assembly further comprises: the light emitted by the coaxial light reaches the surface of the object to be detected after being reflected by the beam splitter, and the light returned by the object to be detected reaches the detector after being transmitted by the beam splitter; the coaxial assembly further comprises: and the extinction element is used for absorbing the light emitted by the coaxial light source and transmitted by the beam splitter.
Optionally, the fiber optic light source comprises: the device comprises a light box, a coupling optical fiber and a coupling lens, wherein the light emitting surface of the coupling optical fiber is located on a first focal plane of the coupling lens, and at least one point on the surface of the object to be detected is located on a second focal plane of the coupling lens.
Optionally, the focal length of the coupling lens is greater than the working distance of the imaging lens.
Optionally, the object to be measured is a wafer to be measured, the area to be measured of the object to be measured is an edge area of the wafer to be measured, and the edge area includes:
a flat region, a sloped region, and an open region;
when the coaxial assembly, the dome assembly and the first illumination assembly are lighted, the detection device is used for carrying out imaging detection on the flat area, the inclined area and the opening area, and acquiring bright field images of the flat area, the inclined area and the opening area;
when the coaxial assembly is lightened, the detection device is used for carrying out imaging detection on the flat area to obtain a bright field image of the flat area, and carrying out imaging detection on the inclined area and the opening area to obtain a dark field image of the inclined area and the opening area;
when the dome assembly is lightened, the detection device is used for detecting and imaging the inclined area and the opening area to obtain bright field images of the inclined area and the opening area, and imaging and detecting the flat area to obtain a dark field image of the flat area;
when the coaxial assembly and the first illuminating assembly are lightened, the detecting device is used for carrying out imaging detection on the inclined area and the opening area to obtain dark field images of the inclined area and the opening area;
when the dome assembly and the first illumination assembly are lightened, the detection device is used for carrying out imaging detection on the flat area and acquiring a dark field image of the flat area.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model provides a detection device includes: an illumination assembly and an imaging assembly; the lighting assembly includes: a first lighting assembly and a dome assembly; the imaging assembly includes: an imaging lens and a detector. When the first illumination assembly is lightened, the first illumination assembly is used for dark field illumination of the object to be measured. When illuminated, the dome assembly also serves to illuminate the test object. The dome assembly is a portion of a sphere, and the center of the dome assembly is located on the optical axis of the imaging assembly. The optical axis of the imaging assembly and the illumination direction of the first illumination assembly form an acute included angle. The first lighting assembly is specifically located on the periphery of the sphere, and the lighting directions provided by the first lighting assembly are all directed to the center of the sphere. The imaging lens is used for collecting the light reflected and/or scattered by the object to be detected and providing the light to the detector; the detector is used for forming a detection image of the object to be detected according to the light collected by the imaging lens. In the present invention, the first illumination assembly and the dome assembly can be used independently or in combination. Therefore, various lighting requirements for the object to be tested can be met. In addition, because the illumination direction that first lighting assembly provided all points to the centre of sphere, consequently need not adjust the position of determinand based on different lighting assembly's illumination direction is complicated, only need with the position of determinand place the centre of sphere or near the centre of sphere alright, so promoted lighting efficiency and detection efficiency, reduced the complexity of illumination and detection operation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a detection device in a meridian plane according to an embodiment of the present invention;
fig. 2 is a schematic view of a detection device in a sagittal plane according to an embodiment of the present invention;
fig. 3 is an internal structure diagram of a dark field optical fiber according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of another detecting device provided in an embodiment of the present invention in a meridian plane;
fig. 5 is a schematic view of another detection device provided in an embodiment of the present invention in a sagittal plane;
fig. 6A is a schematic structural diagram of another detection apparatus provided in an embodiment of the present application in a meridian plane;
FIG. 6B is a schematic view of a dome assembly and an object under test with a gap left therebetween;
fig. 7 is a schematic perspective view illustrating an edge of a wafer being detected by a detecting apparatus according to an embodiment of the present disclosure;
FIG. 8 is a top view of the three-dimensional structure shown in FIG. 7;
FIG. 9 is a schematic view of a wafer flat area, a bevel area, and an open area;
fig. 10 is a simulation diagram illustrating illumination and imaging of a flat area, an open area and a tilted area of a wafer by using the inspection apparatus according to the embodiment of the present disclosure.
Detailed Description
As described above, in the current technical solution for detecting the object to be detected, when the same type of light source is generally used to illuminate the object to be detected, different illumination requirements of different areas cannot be satisfied. Based on this, the inventors have studied and provided a novel detection device. In the device, include: an illumination assembly and an imaging assembly; wherein the lighting assembly comprises: a first lighting assembly and a dome assembly; the imaging assembly includes: an imaging lens and a detector. When the first illumination assembly is lightened, the first illumination assembly is used for dark field illumination of the object to be measured. When illuminated, the dome assembly also serves to illuminate the test object. The dome assembly is a portion of a sphere, and the center of the dome assembly is located on the optical axis of the imaging assembly. The first lighting assembly is specifically located on the periphery of the sphere, and the lighting directions provided by the first lighting assembly are all directed to the center of the sphere. The utility model discloses in, first lighting assembly and dome subassembly can the independent utility, also can the combined use, can satisfy the multiple lighting needs to the determinand.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides an among the detection device, include: an illumination assembly and an imaging assembly. The illumination assembly is used for illuminating the object to be detected, and the imaging assembly is used for imaging and detecting the object to be detected under the illumination condition provided by the illumination assembly. The detection device is described in detail below with reference to the accompanying drawings.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a detection device in a meridian plane according to an embodiment of the present invention, and fig. 2 is a schematic structural diagram of the detection device in a sagittal plane. In the detection device shown in fig. 1 and 2, the illumination assembly comprises: a dome assembly 100 and a first lighting assembly 400; the imaging assembly includes: an imaging lens 200 and a detector 300.
When the first illumination assembly 400 is lighted, dark field illumination is performed on the object to be measured; when the dome assembly 100 is illuminated, it is also used to illuminate the test object. The power of the first illumination assembly 400 may be greater than the power of the dome assembly 100, and thus the first illumination assembly 400 may provide a condition of high brightness dark field illumination.
As shown in fig. 1 and 2, the dome assembly 100 is a portion of a sphere, and the center of the dome assembly 100 is located on the optical axis of the imaging assembly. Since the dome assembly 100 is capable of providing light in a variety of illumination directions, various types of areas of the test object can be illuminated.
The first illumination assembly 400 is specifically located at the periphery of the sphere (i.e., the sphere in which the dome assembly 100 is located, the entirety of the sphere not shown, only the dome assembly 100 is shown), and the illumination directions provided by the first illumination assembly 400 are all directed toward the center of the sphere.
The imaging lens 200 is used to collect light reflected and/or scattered by the object to be measured and provide the light to the detector 300. In order to ensure the brightness uniformity of the image, the imaging lens 200 may specifically adopt an object-side telecentric lens. The optical axis is illustrated, and in this embodiment, the optical axis of the imaging assembly is at an acute angle to the first illumination assembly 400.
The detector 300 may particularly be a photo-detector device for performing a photo-electric conversion. I.e. converting the collected optical signal into an electrical signal. The electrical signals converted by the detector 300 can be further used to form an image of the detection of the analyte.
In the embodiment of the present invention, since the dome assembly 100 can provide a very rich lighting direction, it is possible to perform rich lighting on various types of regions of the object to be measured, and it is convenient to perform imaging detection on these various types of regions. Therefore, the detection accuracy of the object to be detected is improved, the angle of the object to be detected is prevented from being adjusted or the irradiation angle is prevented from being changed, and the detection efficiency and the detection amount are improved.
The first illumination assembly 400 includes various implementations. In one example implementation, to improve dark field illumination and detection efficiency, the first illumination assembly 400 is specifically configured to provide at least two different illumination directions.
In the following example, as shown in fig. 1, the first lighting assembly 400 specifically comprises: a first subassembly 401 and a second subassembly 402. The first sub-assembly 401 and the second sub-assembly 402 may be LED light sources or fiber optic light sources.
For example, one end of the optical fiber can be connected with a lamp box, and a dark field light source is provided by the combination of the lamp box and the optical fiber; the other end of the optical fiber is used for dark field illumination to the object to be measured.
The optical axes of the first subassembly 401 and the second subassembly 402 may be coplanar with the illumination optical axis of the coaxial assembly (or the optical axis of the imaging assembly, or the imaging optical path), respectively. Optionally, the optical axes of the first and second subassemblies 401, 402 are at an angle, for example 70 °, to the optical axis of the imaging assembly.
In the embodiment of the present invention, as shown in fig. 1, the first subassembly 401 and the second subassembly 402 can be symmetrically disposed about the optical axis of the imaging assembly, and the shadow can be reduced by the symmetrical disposition, thereby improving the imaging quality.
The implementation of a dark field fiber as the first illumination assembly is described below. The first lighting assembly includes: a first dark field optical fiber, a second dark field optical fiber and a dark field lamp box (not shown in the figure); the first dark field optical fiber and the second dark field optical fiber respectively provide two different illumination directions; the first end of the first dark field optical fiber and the first end of the second dark field optical fiber are both connected with the dark field lamp box in an optical mode; and the second end of the first dark field optical fiber and the second end of the second dark field optical fiber both emit light beams to the surface of the object to be measured. Here, two different dark field optical fibers are both connected to the same dark field light box, for example, the dark field light box includes two output ports, and the two output ports are respectively connected to different dark field optical fibers. In addition, different dark field optical fibers can be respectively connected with different dark field lamp boxes. For example, the dark field light box includes: a first light box and a second light box; the first end of the first dark field optical fiber is specifically optically connected with the first lamp box; the first end of the second dark field optical fiber is specifically optically connected with the second light box.
The light boxes to which the first and second dark field fibers are connected may have different spectral divisions, e.g. 1 for blue and 1 for green. And flexible adjustment is performed according to different wafer processes. Different wafer processes result in different optical reflection properties of the surface: spectral reflectance differences, surface roughness differences, overall reflectance, etc. That is to say, in practical application, a suitable processing technology can be selected to process the wafer according to the requirement of the optical reflection characteristic, or a lamp box with a suitable spectrum can be selected according to the processing technology of the wafer. Thereby, the desired illumination and detection effects are achieved.
Fig. 3 illustrates an internal structure of a dark field optical fiber. As can be seen from fig. 3, the dark field optical fiber includes a cylindrical mirror inside, and the light emitting surface of the optical fiber is imaged on the surface of an object to be measured (e.g., a wafer), so as to obtain the highest illumination. The fiber optic light source improves the dark field illumination brightness and thus improves the signal-to-noise ratio.
In other implementations, the first illumination assembly may also be an annular LED light source in the detection device. The specific form of the first lighting assembly and the number of lighting elements comprised are not limited herein.
In the present invention, the first illumination assembly 400 and the dome assembly 100 may be used independently (not illuminated at the same time) or may be used in combination (illuminated at the same time). Therefore, various lighting requirements for the object to be tested can be met. In addition, because the illumination direction that first lighting assembly 400 provided all points to the centre of sphere, consequently need not adjust the position of determinand based on different lighting assembly's illumination direction is complicated, only need with the position of determinand place the centre of sphere or near the centre of sphere alright, so promoted lighting efficiency and detection efficiency, reduced illumination and detection operation's complexity.
the center of the sphere of the dome assembly 100 is located on the optical axis of the imaging assembly, i.e., the optical axis of the imaging assembly passes through the center of the sphere in which the dome assembly 100 is located.
When the object to be detected is detected, an intersection point exists between the optical axis of the imaging assembly and the focal plane of the imaging assembly. The intersection point is located at the center of the imaging field of view of the imaging assembly.
In practical application, the distance between the center of the imaging field of view and the center of the sphere is very close, and for a thin object to be measured, the center of the sphere and the center of the imaging field of view may coincide. For an object to be measured with a certain thickness, the center of sphere can be located at the center of the thickness of the object to be measured, that is, the distance between the center of sphere and the center of the imaging view field is half of the thickness of the object to be measured. Therefore, in practical application, the distance between the center of the sphere and the center of the imaging field of view is less than or equal to half of the thickness of the object to be measured.
In one possible implementation, the dome assembly 100 has a light emitting spherical radius between 40mm-60mm, for example 50 mm; the dome assembly 100 is angled between 90 deg. and 150 deg. in the sagittal plane, for example 120 deg., as shown in figure 2.
The location and configuration of the dome assembly 100 can have a variety of different implementations. Two implementation forms are described below with reference to the drawings.
In an exemplary implementation, as shown in fig. 1 and 2, a through hole 101 is formed in the dome assembly 100, and the through hole is located between the imaging lens 200 and the center of the sphere. The through hole 101 is coaxial with the optical axis of the imaging assembly. The imaging lens 200 is specifically configured to collect light reflected and/or scattered by the object to be measured through the through hole 101. In this implementation, the diameter of the through hole 101 is greater than or equal to the clear aperture required by the imaging lens 200. As an example, the diameter of the through-hole 101 is 16mm or 30 mm.
In another exemplary implementation, a detection apparatus is shown in fig. 4 and 5, wherein the dome assembly 100 is specifically located on one side of the optical axis of the imaging assembly, and the dome assembly 100 is recessed in a direction away from the optical axis of the imaging assembly. In this manner, light may enter imaging lens 200 unimpeded without requiring an opening to dome assembly 100. The imaging lens 200 can image the object to be measured within the field of view of the imaging lens 200 without interference and obstruction of the dome assembly 100.
In the detection apparatus provided in the embodiment of the present application, the illumination assembly may further include, on the basis of including the dome assembly 100 and the first illumination assembly 400: a coaxial assembly. The coaxial assembly includes: a coaxial light source, the imaging assembly further comprising a beam splitter. The following two use possibilities are included:
(1) light emitted by the coaxial light source reaches the surface of the object to be detected after being reflected by the beam splitter, and light returned by the object to be detected reaches the detector 300 after being transmitted by the beam splitter.
(2) Light emitted by the coaxial light source reaches the surface of the object to be detected after being transmitted by the beam splitter, and light returned by the object to be detected reaches the detector 300 after being reflected by the beam splitter.
The two cases (1) and (2) can be regarded as the respective optical path transmission directions after the positions of the coaxial light source and the imaging component are mutually replaced. The drawing only illustrates the device layout of the case (1). The optical axis of the imaging assembly refers specifically to the central axis of the light beam collected by the imaging assembly. The components on the collection path between the detector 300 and the object are part of the imaging assembly, and thus the beam splitter is also part of the imaging assembly.
In the step (1), the object to be measured is illuminated by the reflected light beam, and in the scene, the reflected light beam split by the beam splitter is coaxial with the optical axis of the imaging component.
In the step (2), the object to be measured is illuminated by the transmitted light beam, and in the scene, the transmitted light beam split by the beam splitter is coaxial with the optical axis of the imaging component.
The coaxial assembly may also be referred to as an outer coaxial light source, also for illumination. When the coaxial assembly is lighted, the coaxial assembly is particularly used for bright field illumination of an object to be measured.
Two implementations of the coaxial assembly are described below in conjunction with the figures. In both implementations, the coaxial light source is a fiber light source or an LED light source, respectively.
Referring to fig. 1 and 4, a first implementation of a coaxial assembly is shown. In a first implementation, a coaxial assembly includes: a light box (not shown), a coupling fiber 410, a coupling lens 500, a first light splitting element 600, and a first light extinction element 700.
One end of the coupling fiber 410 is optically connected to the light box, and the other end is optically connected to the coupling lens 500. The coupling optical fiber 410 transmits the light provided from the lamp box to the coupling lens 500.
The first beam splitting element 600 is used for receiving the light beam passing through the coupling lens 500. The first light splitting element 600 is used for reflecting and transmitting the received light beam, the reflected light is emitted to the object to be measured, and the transmitted light is emitted to the first light extinction element 700. The first extinction element 700 is located on a side of the first light splitting element 600 through which the light beam is transmitted, and specifically, the first extinction element 700 may be closely attached to the side of the first light splitting element 600 through which the light beam is transmitted. The first light extinction element 700 is used to absorb and eliminate the received light (i.e., the transmitted light of the first light splitting element 600).
In one possible implementation, the light emitting surface of the coupling fiber 410 is located in a first focal plane of the coupling lens 500, and at least one point on the surface of the dut is located in a second focal plane of the coupling lens 500. The first focal plane is a front focal plane of the coupling lens 500, and the second focal plane is a rear focal plane of the coupling lens 500. By adopting the Kohler illumination mode, higher illumination uniformity can be obtained, and the illumination uniformity is not influenced by the dirt or processing flaws on the light emitting surface of the optical fiber.
The focal length of the coupling lens 500 is greater than the working distance of the imaging lens 200, and the difference between the focal length of the coupling lens 500 and the working distance of the imaging lens 200 is smaller than a preset second threshold. This facilitates the layout of the components within the inspection device.
Fig. 6A is a schematic structural diagram of another detection apparatus provided in the embodiment of the present application in a meridian plane. This figure illustrates a second implementation of a coaxial assembly. As shown, the coaxial assembly includes: a bright field light emitting diode 800, a second light splitting element 900 and a second light extinction element 1000. The second light splitting element 900 has substantially the same function as the first light splitting element 600, and both have reflection and refraction functions.
The light beam emitted from the bright field led 800 is split by the second light splitting element 900, wherein the reflected light is provided to the object to be measured, and the transmitted light is provided to the second light extinction element 1000. The second extinction member 1000 functions substantially the same as the first extinction member 700. Specifically, the second extinction element 1000 may be attached to a surface of the second beam splitting element 900 through which the light beam is transmitted. The second extinction element 1000 is used to absorb and eliminate the received light (i.e., the transmitted light of the second light splitting element 900). The extinction coefficient of extinction component requires the high energy as far as possible, the embodiment of the utility model provides an extinction component's extinction coefficient who uses is greater than 99.8%, avoids influencing the contrast of formation of image through the extinction.
The first light splitting element 600 and the second light splitting element 900 may be a light splitting prism or a light splitting sheet. The splitting ratio of the first and second splitting elements 600 and 900 may be 50%: 50%, i.e., semi-reflective and semi-transmissive. Thus, a high light efficiency can be obtained.
As mentioned previously, the optical axis of the coaxial assembly is coaxial with the optical axis of the imaging assembly. In the first and second implementations of the coaxial assembly, since the respective light reflecting and transmitting actions of the first light splitting element 600 and the second light splitting element 900 are known, the reflected light is specifically provided to the object to be measured for illumination, and the coaxial optical axis specifically means that the optical axis of the reflection light path from the coaxial assembly to the object to be measured is coaxial with the optical axis of the imaging assembly. That is, in the first implementation, the optical axis of the optical path from the first light splitting element 600 to the object to be measured is coaxial with the optical axis of the imaging component; in the second implementation, the optical axis of the optical path from the second light splitting element 900 to the object to be measured is coaxial with the optical axis of the imaging component.
In the second implementation manner of the coaxial assembly, the bright field light emitting diode 800 is used as a light source in the coaxial assembly, so that in the provided detection device, the integration level of the illumination assembly is improved, and the reduction of the overall volume of the detection device is facilitated.
In various embodiments of the present invention, the optical axis of the coaxial assembly may be coplanar with the optical axis of the first illumination assembly 400. Because the optical axis of the coaxial assembly is coplanar with the optical axis of the first illumination assembly 400, illumination control is made easier and easier.
In one possible implementation, the imaging lens 200 is at a working distance of 110mm, and the overall dimension of the coaxial assembly and the dome assembly in the direction of the optical axis is no more than 110 mm. Meanwhile, in consideration of the safety of the upper and lower sheets of the object to be tested (e.g., wafer), a 10mm gap may be left between the dome assembly 100 and the object to be tested. Referring to fig. 6B, the gap between the dome assembly 100 and the test object is shown. As shown in fig. 6, the light emitted by the first illumination assembly 400 may also pass below the bottom of the dome assembly 100 to the object to be measured.
The first illumination assembly 400 has an illumination distance of 70mm each, and the minimum distance of the structures of the first and second subassemblies 401 and 402 from the object to be measured is greater than 24 mm. If the object to be measured is a wafer, the center of the field of view of the imaging lens 200 is located at a distance of 147.5mm from the center of the wafer in this embodiment.
In this embodiment, the detector 300 of the detecting apparatus may be a 3-line true color line scan detector, the length of the line scan array is perpendicular to the plane shown in fig. 1, and the scanning direction is the horizontal direction shown in fig. 1. The wafer rotates by taking the center of the wafer as the center, and the line scanning camera can image the whole edge of the wafer. Therefore, the effect of high-speed acquisition can be achieved, and the obtained image is a true color RGB image, so that multispectral defect identification can be conveniently carried out in the later period, and the identification rate is improved. According to the scanning direction of the line-scan camera, the meridional plane of bright field illumination is preferably coincident with the cross section of the dome assembly in the embodiment, so that the imaging uniformity is ensured.
Fig. 7 is a schematic perspective view illustrating an edge of a wafer being detected by a detecting apparatus according to an embodiment of the present disclosure. Fig. 8 is a top view of the three-dimensional structure shown in fig. 7.
For a scene using a wafer as a to-be-detected object, the to-be-detected wafer includes: flat area, sloped area, and open area. FIG. 9 is a schematic view of a wafer flat area, a bevel area, and an open area. In order to realize the illumination and detection of various types of areas, different illumination component combinations can be adopted for illumination respectively.
The detection device is used for bright field illumination and imaging detection of the flat area, the inclined area and the opening area when the coaxial assembly, the dome assembly and the first illumination assembly are simultaneously lighted;
when only the coaxial assembly is lighted, the detection device is used for carrying out bright field illumination and imaging detection on the flat area and carrying out dark field illumination and imaging detection on the inclined area and the opening area;
when only the dome assembly is lighted, the detection device is used for carrying out bright field illumination and imaging detection on the inclined area and the opening area and carrying out dark field illumination and imaging detection on the flat area;
when the coaxial assembly and the first illumination assembly are simultaneously lightened, the detection device is used for carrying out dark field illumination and imaging detection on the inclined area and the opening area;
the detection apparatus is used for dark field illumination and imaging detection of the flat zone when the dome assembly and the first illumination assembly are illuminated simultaneously.
According to the illumination and detection requirements of different areas of the detected object, the 5 illumination working schemes are adjusted according to the actual situation, the combination scheme is optimized, and the effects of fastest detection speed and highest defect detection sensitivity can be achieved. Fig. 10 is a simulation diagram illustrating illumination and imaging of a flat area, an open area and a tilted area of a wafer by using the inspection apparatus according to the embodiment of the present disclosure. As can be seen from fig. 10, illumination performed by the above illumination assembly combination can cover illumination of various areas of the wafer, thereby realizing effective detection of the wafer.
The above description is only one specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (16)
1. A detection device, comprising: an illumination assembly and an imaging assembly; the lighting assembly includes: a first lighting assembly and a dome assembly; the imaging assembly includes: an imaging lens and a detector;
when the first illumination assembly is lightened, the first illumination assembly is used for illuminating an object to be measured; when the dome assembly is lighted, the dome assembly is also used for illuminating the object to be measured;
the dome assembly is a part of a sphere, and the spherical center of the dome assembly is positioned on the optical axis of the imaging assembly; the first lighting assembly is specifically positioned at the periphery of the sphere, and the lighting directions provided by the first lighting assembly are all directed to the center of the sphere;
the imaging lens is used for collecting light reflected and/or scattered by the object to be detected and providing the light to the detector, and an acute included angle is formed between the optical axis of the imaging component and the illumination direction of the first illumination component;
the detector is used for forming a detection image of the object to be detected according to the light collected by the imaging lens.
2. The detection apparatus according to claim 1, wherein the first illumination assembly is specifically configured to provide at least two different illumination directions.
3. The detection apparatus of claim 1, wherein the first illumination assembly comprises: a first subassembly and a second subassembly; the first subassembly and the second subassembly have different illumination directions; the illumination direction of the first sub-assembly and the illumination direction of the second sub-assembly form acute included angles with the optical axis of the imaging assembly respectively.
4. The detection apparatus of claim 3, wherein the illumination direction of the first sub-assembly, the illumination direction of the second sub-assembly, and the optical axis of the imaging assembly are located in a same plane, and the illumination direction of the first sub-assembly and the illumination direction of the second sub-assembly are symmetric about the optical axis of the imaging assembly.
5. The detection device of claim 3, wherein the first and second subassemblies are each a fiber optic light source.
6. The detection apparatus according to any one of claims 1 to 5, wherein the intersection point of the optical axis of the imaging assembly and the focal plane of the imaging assembly is the imaging field center of the imaging assembly; the distance between the imaging view field center and the sphere center is smaller than or equal to half of the thickness of the object to be detected.
7. The sensing device of any one of claims 1-5, wherein the dome assembly is located to one side of the optical axis of the imaging assembly and the dome assembly is recessed in a direction away from the optical axis of the imaging assembly.
8. The detecting device for detecting the rotation of the motor rotor as claimed in any one of claims 1 to 5, wherein a through hole is formed in the dome assembly and is located between the imaging lens and the spherical center; the through hole is coaxial with the optical axis of the imaging component;
the imaging lens is specifically used for collecting the light reflected and/or scattered by the object to be detected through the through hole.
9. The detection device according to claim 8, wherein the diameter of the through hole is greater than or equal to the required clear aperture of the imaging lens.
10. The detection apparatus of any one of claims 1-5, wherein the illumination assembly further comprises: a coaxial assembly; the coaxial assembly includes: a coaxial light source; the imaging assembly further comprises a beam splitter, wherein light emitted by the coaxial light source reaches the surface of the object to be detected after being reflected by the beam splitter, and light returned by the object to be detected reaches the detector after being transmitted by the beam splitter; or, the light emitted by the coaxial light source reaches the surface of the object to be detected after being transmitted by the beam splitter, and the light returned by the object to be detected reaches the detector after being reflected by the beam splitter.
11. The detection apparatus of claim 10, wherein an optical axis of the coaxial assembly is coplanar with an optical axis of the first illumination assembly.
12. The detection device of claim 10, wherein the coaxial light source is a fiber optic light source or an LED light source.
13. The detection device according to claim 10, wherein the light emitted from the coaxial light is reflected by the beam splitter and reaches the surface of the object to be detected, and the light returned from the object to be detected is transmitted by the beam splitter and reaches the detector; the coaxial assembly further comprises: and the extinction element is used for absorbing the light emitted by the coaxial light source and transmitted by the beam splitter.
14. The detection apparatus of claim 12, wherein the fiber optic light source comprises: the device comprises a light box, a coupling optical fiber and a coupling lens, wherein the light emitting surface of the coupling optical fiber is located on a first focal plane of the coupling lens, and at least one point on the surface of the object to be detected is located on a second focal plane of the coupling lens.
15. The detection apparatus of claim 14, wherein the focal length of the coupling lens is greater than the working distance of the imaging lens.
16. The apparatus according to claim 10, wherein the object to be tested is a wafer to be tested, the region to be tested of the object to be tested is an edge region of the wafer to be tested, and the edge region includes:
a flat region, a sloped region, and an open region;
when the coaxial assembly, the dome assembly and the first illumination assembly are lighted, the detection device is used for carrying out imaging detection on the flat area, the inclined area and the opening area, and acquiring bright field images of the flat area, the inclined area and the opening area;
when the coaxial assembly is lightened, the detection device is used for carrying out imaging detection on the flat area to obtain a bright field image of the flat area, and carrying out imaging detection on the inclined area and the opening area to obtain a dark field image of the inclined area and the opening area;
when the dome assembly is lightened, the detection device is used for detecting and imaging the inclined area and the opening area to obtain bright field images of the inclined area and the opening area, and imaging and detecting the flat area to obtain a dark field image of the flat area;
when the coaxial assembly and the first illuminating assembly are lightened, the detecting device is used for carrying out imaging detection on the inclined area and the opening area to obtain dark field images of the inclined area and the opening area;
when the dome assembly and the first illumination assembly are lightened, the detection device is used for carrying out imaging detection on the flat area and acquiring a dark field image of the flat area.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113218961A (en) * | 2021-04-21 | 2021-08-06 | 中国科学院光电技术研究所 | Substrate defect detection device and method |
| CN114791430A (en) * | 2022-06-23 | 2022-07-26 | 广州粤芯半导体技术有限公司 | Wafer gap detection device and detection method thereof |
-
2020
- 2020-08-24 CN CN202021785352.XU patent/CN212963235U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113218961A (en) * | 2021-04-21 | 2021-08-06 | 中国科学院光电技术研究所 | Substrate defect detection device and method |
| CN113218961B (en) * | 2021-04-21 | 2023-08-11 | 中国科学院光电技术研究所 | Substrate defect detection device and method |
| CN114791430A (en) * | 2022-06-23 | 2022-07-26 | 广州粤芯半导体技术有限公司 | Wafer gap detection device and detection method thereof |
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