CN102944563B - There is the lighting device of transmission and reflection source, detection system and detection method thereof - Google Patents
There is the lighting device of transmission and reflection source, detection system and detection method thereof Download PDFInfo
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- CN102944563B CN102944563B CN201210372406.3A CN201210372406A CN102944563B CN 102944563 B CN102944563 B CN 102944563B CN 201210372406 A CN201210372406 A CN 201210372406A CN 102944563 B CN102944563 B CN 102944563B
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Abstract
The invention discloses and a kind of there is the lighting device of transmission and reflection source, the Systems for optical inspection applying this lighting device and detection method thereof.This Systems for optical inspection comprises reflection source, transmitted light source, image-generating unit, half-reflecting half mirror and completely reflecting mirror; Reflection source is arranged on the side of testee, half-reflecting half mirror is arranged between reflection source and testee, transmitted light source is arranged on the opposite side of testee, and completely reflecting mirror is arranged on the side of half-reflecting half mirror, in order to receive from half-reflecting half mirror reflection light and reflex to image-generating unit.This Systems for optical inspection is by arranging reflection source and transmitted light source, testee surface structure can fully be detected, open reflection source during surface structure before detection and close transmitted light source, open transmitted light source during surface structure after sensing and close reflection source, also can open reflection source and transmitted light source detects testee front and rear surfaces structure simultaneously simultaneously, improve the detection efficiency detecting object.
Description
Technical field
The present invention relates to a kind of Systems for optical inspection and detection method thereof, particularly relate to Systems for optical inspection and the detection method thereof of the front and rear surfaces of the testee for detecting transmissive, and be applied to the lighting device of this Systems for optical inspection.
Background technology
Usually, light transmission/semi-transparency the products such as sheet glass, touch-screen, light guide plate or liquid crystal panel need in the mill to carry out quality testing by Systems for optical inspection to it thus judge Product Process and processing procedure whether qualified, then on this basis technique and processing procedure are improved and product yield are improved to product reparation.Systems for optical inspection generally comprises light source and CCD test machine, by light source to testee emission of light, light arrives in CCD test machine through testee reflection, by CCD test machine digital signal be converted to optical image and carry out com-parison and analysis, thus judging that whether this testee surface is qualified.If when needing the second surface detecting testee, then need testee is inverted or places another Systems for optical inspection, by the analysis of CCD test machine, the light launched of another Systems for optical inspection to the second surface of testee and transmission or reflex in CCD test machine, judges that whether this testee surface is qualified.So, this kind detects the forward and backward surface of testee or the method by the testee that is inverted by two cover Systems for optical inspections, have impact on the efficiency of testee surface quality detection, and, add testing cost by two cover Systems for optical inspections, easily survey body surface is impacted owing to locating or putting by the method be inverted.
Summary of the invention
In view of the above, the present invention is necessary to provide that a kind of detection efficiency is high, cost is low and the Systems for optical inspection of not fragile testee in the detection.
In addition, there is a need to provide a kind of detection method.
In addition, there is a need to provide a kind of lighting device.
A kind of Systems for optical inspection, for detecting testee, Systems for optical inspection comprises reflection source, half-reflecting half mirror, image-generating unit and transmitted light source; Described reflection source and transmitted light source are arranged on the relative both sides of testee, described half-reflecting half mirror is arranged between reflection source and testee, described reflection source emit beam through half-reflecting half mirror expose to testee surface back reflection to half-reflecting half mirror, described transmitted light source emits beam through testee and exposes to half-reflecting half mirror, described half-reflecting half mirror by described reflection source emits beam and/or described transmitted light source sends light reflection to image-generating unit.
Wherein, described half-reflecting half mirror has incidence surface and exiting surface, and this incidence surface is towards reflection source, and the line of reflection source and testee and incidence surface are 45 degree of angles.
Wherein, described Systems for optical inspection also comprises completely reflecting mirror, completely reflecting mirror is arranged on the side of half-reflecting half mirror, in order to receive from half-reflecting half mirror reflection light and reflex to image-generating unit, described completely reflecting mirror has reflecting surface, and the reflecting surface of completely reflecting mirror is parallel with this exiting surface towards the exiting surface of half-reflecting half mirror.
Wherein, described Systems for optical inspection also comprises carrying platform, and described carrying platform is offered porose, and testee is arranged on carrying platform, and during detection, transmitted light source light is irradiated on testee through via hole.
Wherein, described transmitted light source is light source module, and this light source module comprises heat radiator, light source substrate, light source and diffuser plate, and described light source substrate is arranged on a heat sink, described light source is arranged on light source substrate, the light therethrough diffuser plate directive testee that described light source sends.
Wherein, described diffuser plate one surface or two relative surfaces are uneven surface.
Wherein, described diffuser plate one surface is the face of cylinder or elliptic cylinder.
Wherein, described light source module also comprises mechanical catch, and mechanical catch is arranged on above diffuser plate, and mechanical catch lateral surface is uneven surface, and medial surface is uneven surface or minute surface.
Wherein, described mechanical catch is a block cover, and block cover is horn-likely be located on diffuser plate, and one end of described block cover larger caliber contacts with diffuser plate, and relative one end is formed as the less opening of caliber size.
A kind of Systems for optical inspection, for detecting testee, Systems for optical inspection comprises reflection source, half-reflecting half mirror and transmitted light source, reflection source is arranged on the side of testee, half-reflecting half mirror is arranged between reflection source and testee, transmitted light source is arranged on the opposite side of testee, reflection source emit beam through half-reflecting half mirror expose to testee surface back reflection to half-reflecting half mirror, transmitted light source emits beam through testee and exposes to half-reflecting half mirror, described transmitted light source is light source module, this light source module comprises light source, diffuser plate and mechanical catch, machinery catch to be arranged on diffuser plate and to form light hole, light source is arranged on below described diffuser plate, the light that light source is sent converges to shed from light hole through the reflection of mechanical catch inside surface and exposes to object under test after diffuser plate, described reflection source is positioned at the top of mechanical catch, the light that reflection source is sent through outside surface reflection and reduce the light entering light hole.
A detection method for Systems for optical inspection, Systems for optical inspection comprises reflection source, half-reflecting half mirror, completely reflecting mirror, image-generating unit and transmitted light source;
When only checking the first surface of testee, open reflection source, close transmitted light source, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, the light reflection that testee reflects by half-reflecting half mirror to completely reflecting mirror, completely reflecting mirror by light reflection to image-generating unit, to detect the first surface of testee;
When only checking the second surface of testee, open transmitted light source, close reflection source, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, half-reflecting half mirror by the light reflection of testee transmission to completely reflecting mirror, completely reflecting mirror by light reflection to image-generating unit, to detect the second surface of testee;
When detecting testee front and rear surfaces simultaneously, reflection source and transmitted light source are opened simultaneously, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, now two-way light collection reflexes to completely reflecting mirror through half-reflecting half mirror together, completely reflecting mirror by light reflection to image-generating unit, to detect the front and rear surfaces of testee simultaneously.
A detection method for Systems for optical inspection, Systems for optical inspection comprises reflection source, half-reflecting half mirror, image-generating unit and transmitted light source;
When only checking the first surface of testee, open reflection source, close transmitted light source, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, the light reflection that testee reflects by half-reflecting half mirror to image-generating unit, to detect the first surface of testee;
When only checking the second surface of testee, open transmitted light source, close reflection source, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, half-reflecting half mirror by the light reflection of testee transmission to image-generating unit, to detect the second surface of testee;
When detecting testee front and rear surfaces simultaneously, reflection source and transmitted light source are opened simultaneously, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, now two-way light collection reflexes to image-generating unit through half-reflecting half mirror together, to detect first and second surface of testee simultaneously.
A kind of lighting device, for providing illumination condition for detecting testee, this lighting device comprises reflection source, half-reflecting half mirror and transmitted light source; Described reflection source and transmitted light source are arranged on the relative both sides of testee, described half-reflecting half mirror is arranged between reflection source and testee, described reflection source emits beam and exposes to testee surface back reflection to half-reflecting half mirror through half-reflecting half mirror, and described transmitted light source emits beam and expose to half-reflecting half mirror through testee after strengthening.
Wherein, described transmitted light source comprises diffuser plate, at least one surface of described diffuser plate is uneven surface, described reflection source emits beam and to weaken at described uneven surface place through survey body surface through half-reflecting half mirror, and described transmitted light source emits beam and expose to half-reflecting half mirror through testee after uneven surface strengthens.
Wherein, described transmitted light source also comprises mechanical catch, described reflection source emits beam and to be blocked at mechanical catch place through survey body surface through half-reflecting half mirror, and described transmitted light source to emit beam after mechanical catch reflection enhancement through testee and exposes to half-reflecting half mirror.
Compared to prior art, Systems for optical inspection of the present invention is by arranging reflection source and transmitted light source, testee surface can fully be detected, open reflection source during surface before detection and close transmitted light source, open transmitted light source during surface after sensing and close reflection source, without the need to the front and rear surfaces by using two cover light irradiation apparatus to detect testee respectively, improve the detection efficiency detecting object, reduce testing cost, and without the need to again putting testee in testing process, not fragile testee in the detection.
Accompanying drawing explanation
Fig. 1 is the structural representation of Systems for optical inspection of the present invention;
Fig. 2 is the structural representation of the transmitted light source for the Systems for optical inspection shown in Fig. 1;
Fig. 3 is the light source module being applied to Systems for optical inspection.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, realized object and effect, accompanying drawing is coordinated to be explained in detail below in conjunction with embodiment.
Refer to Fig. 1, be depicted as a Systems for optical inspection 10, for detecting testee 20.Testee 20 can be the transparent/translucent objects such as liquid crystal panel, touch-screen, light guide plate, sheet glass.Systems for optical inspection 10 comprises reflection source 11, half-reflecting half mirror 12, completely reflecting mirror 13, image-generating unit 14 and transmitted light source 15.This Systems for optical inspection 10 may be used for detecting testee 20 surface or inner defect, such as, bubble, cut etc.
Reflection source 11 is arranged on the front of testee 20, and half-reflecting half mirror 12 is arranged between reflection source 11 and testee 20.This half-reflecting half mirror 12 can reflection and transmission light, and this half-reflecting half mirror 12 has incidence surface 121 and an exiting surface 122, and this incidence surface 121 is towards reflection source 11, and the light that reflection source 11 is sent arrives incidence surface 121.By arranging half-reflecting half mirror 12, namely adjusting the angle of half-reflecting half mirror 12 relative reflection light source 11, making reflection source 11 be incident to the light of transmission on half-reflecting half mirror 12 and be projected on testee 20.In the present embodiment, roughly arranged in miter angle by the light that the incidence surface 121 of half-reflecting half mirror 12 and reflection source 11 are sent, make light that reflection source 11 sends through light and the reflection source 11 of transmission on the same line, and be vertically fed into the front surface of testee 20.
Testee 20 is arranged on a platform 30, by reflection source 11 through the ray cast of transmission to testee 20 front surface through testee 20 front surface reflection, light is reflected onto on the exiting surface 122 of half-reflecting half mirror 12.Platform 30 offers light hole 32, the light sent for transmitted light source 15 passes the rear surface that this light hole 32 is irradiated to testee 20.
Completely reflecting mirror 13 is arranged on the side of half-reflecting half mirror 12, makes the light of the exiting surface 122 being incident to half-reflecting half mirror 12 to reflect through this exiting surface 122 and to expose on completely reflecting mirror 13.Completely reflecting mirror 13 has reflecting surface 131, the light being incident to this reflecting surface 131 all can be reflexed to image-generating unit 14.By arranging completely reflecting mirror 13, namely adjusting the reflecting surface 131 of completely reflecting mirror 13, the light of the reflecting surface 131 being incident to completely reflecting mirror 13 can be fully projected on image-generating unit 14.In the present embodiment, the reflecting surface 131 of described completely reflecting mirror 13 is parallel with this exiting surface 122 towards the exiting surface 122 of half-reflecting half mirror 12.Thus the light of testee 20 front surface reflection reflects through the exiting surface 122 of half-reflecting half mirror 12 and is projected on the reflecting surface 131 of completely reflecting mirror 13, then all reflexes on image-generating unit 14.
Described image-generating unit 14 comprises camera 141 and camera lens 142.Image-generating unit 14 receives the light reflected from the reflecting surface 131 of completely reflecting mirror 13, and optical image can be converted to digital signal and be sent to graphical analysis machine and carry out com-parison and analysis by it, thus judges that whether this testee surface is qualified.
Described transmitted light source 15 is arranged on the rear of testee 20, the ray cast that transmitted light source 15 sends is to the rear surface of testee 20, and be projected on the exiting surface 122 of described half-reflecting half mirror 12 after testee 20 transmission, the exiting surface 122 of half-reflecting half mirror 12 reflects and is projected on the reflecting surface 131 of completely reflecting mirror 13, then all reflexes on image-generating unit 14.The optical image of the rear surface of testee 20 is converted to digital signal and is sent to graphical analysis machine and carries out com-parison and analysis by image-generating unit 14, thus judges that whether the rear surface of this testee 20 is qualified.In the present embodiment, testee 20 is arranged on described platform 30, and this platform 30 offers light hole 32, and the ray cast that transmitted light source 15 is sent is on the rear surface to be measured of testee 20.
When using this Systems for optical inspection 10 to detect testee 20, testee 20 is placed on platform 30; When checking testee 20 front surface, close transmitted light source 15, reflection source 11 emits beam to half-reflecting half mirror 12, be reflected back into the exiting surface 122 of half-reflecting half mirror 12 through testee 20 after exposing to the front surface of testee 20 from the light of half-reflecting half mirror 12 transmission, exiting surface 122 further by the light reflection of testee 20 front surface reflection to completely reflecting mirror 13, completely reflecting mirror 13 by light reflection to image-generating unit 14, to detect testee 20 front surface;
When checking testee 20 rear surface, close reflection source 11, transmitted light source 15 emits beam and is incident to the rear surface of testee 20, and be transmitted through half-reflecting half mirror 12 through testee 20, half-reflecting half mirror 12 by the light reflection of testee 20 transmission to completely reflecting mirror 13, completely reflecting mirror 13 by light reflection to image-generating unit 14, to detect the rear surface of testee 20.
Or when detecting testee 20 front and rear surfaces simultaneously, reflection source 11 and transmitted light source 15 are opened simultaneously, reflection source 11 emits beam to half-reflecting half mirror 12, half-reflecting half mirror 12 is reflexed to through testee 20 expose to the front surface of testee 20 from the light of half-reflecting half mirror transmission 12 after, transmitted light source 15 emits beam and is incident to the rear surface of testee 20, and be transmitted through half-reflecting half mirror 12 through testee 20, now two-way light collection reflexes to completely reflecting mirror 13 through half-reflecting half mirror 12 together, completely reflecting mirror 13 by light reflection to image-generating unit 14, to detect the front and rear surfaces of testee 20 simultaneously.
So, fully can detect the integral surface defect of testee 20, open reflection source 11 when detecting the front surface of testee 20 and close transmitted light source 15, open transmitted light source 15 when detecting testee 20 rear surface and close reflection source 11, without the need to such as traditional front and rear surfaces by using two cover Systems for optical inspections to detect testee respectively, improve the detection efficiency of inspected object, reduce testing cost, and without the need to again putting testee 20 in testing process, not fragile testee 20 in the detection.
Systems for optical inspection 10 of the present invention further improves, because testee 20 is transparent/translucent object, reflection source 11 is arranged on the front of testee 20, transmitted light source 15 is arranged on the rear of testee 20, when use reflection source 11 and close transmitted light source 15 pairs of testees 20 detect time, some light transmission testee 20 and be projected to the surface of transmitted light source 15, the surface of transmitted light source 15 can be reflected and produce spurious rays, spurious rays is projected to half-reflecting half mirror 12, thus harmful effect is caused to the detection of testee 20 front surface, to the precision detected, there is certain influence.
Refer to Fig. 2, provide a transmitted light source 15, transmitted light source 15 comprises luminophor 150, baffle plate 151 and diffusing panel 152.Baffle plate 151 offers porose 1511, and diffusing panel 152 is arranged in hole 1511.The upper and lower surface of this diffusing panel 152 is uneven surface, make the light being projected to testee 20 that reflection source 11 sends, be projected on diffusing panel 152 transmitted through testee 20, diffusing panel 152 pairs of light diffusion, decrease the light being transmitted through transmitted light source 15 surface, the reflection decreasing transmitted light source 15 surface is accordingly fed into half-reflecting half mirror 12.So, can improve testee 20 front surface accuracy of detection.Be appreciated that diffusing panel 152 also can be its upper surface be uneven surface.Diffusing panel 152 also can be arranged on baffle plate 151, is positioned at above hole 1511.
Further, in order to strengthen the light intensity of transmitted light source 15, improve the utilization factor of transmitted light source 15, and avoid the spurious rays that diffusing panel 152 produces except extra-regional other regions of corresponding testee 20 to be projected to half-reflecting half mirror 12 causes the impact on surveying object 20 rear surface accuracy of detection, diffusing panel 152 is also provided with block cover 153.Block cover 153 is located on diffusing panel 152 in horn-like, and wherein bell-mouthed one end of larger caliber contacts with diffusing panel 152, and relatively bell-mouthed one end is formed as the less opening of caliber size 1531.The size of light hole 32 on the corresponding platform 30 of the size of this opening 1531, the light that luminophor 150 is sent is through diffusing panel 152, opening 1531 and light hole 32, testee 20 and being projected on half-reflecting half mirror 12.Block cover 153 is reflecting surface towards the medial surface of diffusing panel 152, and as uneven surface or minute surface, block cover lateral surface can be uneven surface.When the light therethrough diffusing panel 152 that transmitted light source 15 sends is put on block cover 153 medial surface, to be reflected by this medial surface and again be projected to diffusing panel 152, diffusing panel 152 reflects or this light of transmission, so after multiple reflections or transmission, light can converge and penetrate from described opening 1531, so, this block cover 153 drastically increases the utilization factor of the light of transmitted light source 15, also improves the light intensity of transmitted light source 15.Meanwhile, by arranging block cover 153, the spurious rays that diffusing panel 152 produces except testee 20 other regions extra-regional can not be projected on half-reflecting half mirror 12, avoid the impact on testee 20 rear surface accuracy of detection.
To sum up, by arranging diffusing panel 152 also by arranging block cover 153 in diffusing panel 152 periphery on platform 30, there is diffuse reflection in the ray cast through testee 20 in the light that diffusing panel 152 can make reflection source 11 send, and directly can not be projected to generation reflection on transmitted light source 15 and cause the accuracy of detection of testee 20 front surface not high to diffusing panel 152.By arranging light collection that block cover 153 can make transmitted light source 15 send and penetrating from the opening 1531 of corresponding testee 20 size, improve the utilization factor of the light of transmitted light source 15, also improve the light intensity of transmitted light source 15; And the spurious rays that diffusing panel 152 produces except corresponding testee 20 other regions extra-regional can not be projected on half-reflecting half mirror 12, avoids the impact on testee 20 rear surface accuracy of detection.
Please consult Fig. 3 further, utilize another light source module 40 of the diffusing panel structure fabrication of the transmitted light source shown in Fig. 2 further, this light source module 40 comprises heat radiator 41, light source substrate 42, LED chip 43, diffuser plate 44 and mechanical catch 45.Described light source substrate 42 is arranged on heat radiator 41, described LED chip 43 is arranged on light source substrate 42, described diffuser plate 44 is arranged on the top of LED chip 43, this diffuser plate 44 is the diffusing panel 152 described in Fig. 2 quite, described mechanical catch 45 is equivalent to the block cover 153 described in Fig. 2, and mechanical catch 45 to be arranged on diffuser plate 44 and to surround a light hole 452.This light source module 40 can be used as the transmitted light source 15 in Fig. 1, forms Systems for optical inspection with reflection source 11, half-reflecting half mirror 12, completely reflecting mirror 13, image-generating unit 14.Being appreciated that the light sent to increase LED chip 43 is irradiated to the intensity of testee 20 rear surface, solar panel (not shown) can also being set bottom diffuser plate 44, to increase intensity of illumination.Certain described diffuser plate 44 also can be designed to the plate with optically focused effect.Upper surface as diffuser plate 44152 can be curved surface, and as the face of cylinder or elliptic cylinder, lower surface is uneven surface, and upper surface is designed to the optically focused effect that curved surface can increase diffusing panel 152, improves diffused ray intensity.
In addition, described LED chip 43 can replace for other light sources, such as xenon lamp, and xenon lamp can improve the brightness of illumination further.
Systems for optical inspection of the present invention is integrated in same set of imaging system by transmitted light source and reflection source, when ensureing that illumination spot brightness and homogeneity meet the demands, can not cause interference, provide cost savings detection during the positive light of application.
In addition, described completely reflecting mirror 13 can omit, and by the adjustment of image-generating unit 14 position, as lateral inversion, the light direct irradiation that half-reflecting half mirror 12 is reflected receives to image-generating unit 14.
Above-described embodiment is the present invention's preferably embodiment; but embodiments of the present invention are not restricted to the described embodiments; change, the modification done under other any does not deviate from Spirit Essence of the present invention and principle, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (10)
1. there is a Systems for optical inspection for transmission and reflection source, for detecting testee, it is characterized in that: Systems for optical inspection comprises reflection source, half-reflecting half mirror, image-generating unit and transmitted light source, described reflection source and transmitted light source are arranged on the relative both sides of testee, described half-reflecting half mirror is arranged between reflection source and testee, described reflection source emit beam through half-reflecting half mirror expose to testee surface back reflection to half-reflecting half mirror, described transmitted light source emits beam through testee and exposes to half-reflecting half mirror, described half-reflecting half mirror by described reflection source emits beam and/or described transmitted light source sends light reflection to image-generating unit, described transmitted light source is light source module, this light source module comprises heat radiator, light source substrate, light source and diffuser plate, described light source substrate is arranged on a heat sink, described light source is arranged on light source substrate, the light therethrough diffuser plate directive testee that described light source sends, described diffuser plate one surface or two relative surfaces are uneven surface, described light source module also comprises mechanical catch, machinery catch is arranged on above diffuser plate, machinery catch lateral surface is uneven surface, medial surface is uneven surface or minute surface.
2. Systems for optical inspection according to claim 1, is characterized in that: described half-reflecting half mirror has incidence surface and exiting surface, and this incidence surface is towards reflection source, and the line of reflection source and testee and incidence surface are 45 degree of angles.
3. Systems for optical inspection according to claim 2, it is characterized in that: described Systems for optical inspection also comprises completely reflecting mirror, completely reflecting mirror is arranged on the side of half-reflecting half mirror, in order to receive from half-reflecting half mirror reflection light and reflex to image-generating unit, described completely reflecting mirror has reflecting surface, and the reflecting surface of completely reflecting mirror is parallel with this exiting surface towards the exiting surface of half-reflecting half mirror.
4. Systems for optical inspection according to claim 1, it is characterized in that: described Systems for optical inspection also comprises carrying platform, described carrying platform is offered porose, and testee is arranged on carrying platform, and during detection, transmitted light source light is irradiated on testee through via hole.
5. Systems for optical inspection according to claim 1, is characterized in that: described diffuser plate one surface is the face of cylinder or elliptic cylinder.
6. Systems for optical inspection according to claim 1, it is characterized in that: described mechanical catch is a block cover, block cover is horn-likely be located on diffuser plate, and one end of described block cover larger caliber contacts with diffuser plate, and relative one end is formed as the less opening of caliber size.
7. there is a detection system for transmission and reflection source, for detecting testee, it is characterized in that: described detection system comprises reflection source, half-reflecting half mirror and transmitted light source, reflection source is arranged on the side of testee, half-reflecting half mirror is arranged between reflection source and testee, transmitted light source is arranged on the opposite side of testee, reflection source emit beam through half-reflecting half mirror expose to testee surface back reflection to half-reflecting half mirror, transmitted light source emits beam through testee and exposes to half-reflecting half mirror, described transmitted light source is light source module, this light source module comprises light source, diffuser plate and mechanical catch, machinery catch to be arranged on diffuser plate and to form light hole, light source is arranged on below described diffuser plate, the light that light source is sent converges to shed from light hole through the reflection of mechanical catch inside surface and exposes to object under test after diffuser plate, described reflection source is positioned at the top of mechanical catch, the light that reflection source is sent through outside surface reflection and reduce the light entering light hole.
8. the detection method of a Systems for optical inspection, for detecting testee, it is characterized in that: Systems for optical inspection comprises reflection source, half-reflecting half mirror, completely reflecting mirror, image-generating unit and transmitted light source, described transmitted light source is light source module, this light source module comprises heat radiator, light source substrate, light source and diffuser plate, described light source substrate is arranged on a heat sink, described light source is arranged on light source substrate, the light therethrough diffuser plate directive testee that described light source sends, described diffuser plate one surface or two relative surfaces are uneven surface;
When only checking the first surface of testee, open reflection source, close transmitted light source, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, the light reflection that testee reflects by half-reflecting half mirror to completely reflecting mirror, completely reflecting mirror by light reflection to image-generating unit, to detect the first surface of testee;
When only checking the second surface of testee, open transmitted light source, close reflection source, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, half-reflecting half mirror by the light reflection of testee transmission to completely reflecting mirror, completely reflecting mirror by light reflection to image-generating unit, to detect the second surface of testee;
When detecting testee front and rear surfaces simultaneously, reflection source and transmitted light source are opened simultaneously, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, now two-way light collection reflexes to completely reflecting mirror through half-reflecting half mirror together, completely reflecting mirror by light reflection to image-generating unit, to detect the front and rear surfaces of testee simultaneously;
Described transmitted light source also comprises mechanical catch, described reflection source emits beam and to be blocked at mechanical catch place through testee surface through half-reflecting half mirror, and described transmitted light source to emit beam after mechanical catch reflection enhancement through testee and exposes to half-reflecting half mirror.
9. the detection method of a Systems for optical inspection, for detecting testee, it is characterized in that: Systems for optical inspection comprises reflection source, half-reflecting half mirror, image-generating unit and transmitted light source, described transmitted light source is light source module, this light source module comprises heat radiator, light source substrate, light source and diffuser plate, described light source substrate is arranged on a heat sink, described light source is arranged on light source substrate, the light therethrough diffuser plate directive testee that described light source sends, described diffuser plate one surface or two relative surfaces are uneven surface;
When only checking the first surface of testee, open reflection source, close transmitted light source, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, the light reflection that testee reflects by half-reflecting half mirror to image-generating unit, to detect the first surface of testee;
When only checking the second surface of testee, open transmitted light source, close reflection source, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, half-reflecting half mirror by the light reflection of testee transmission to image-generating unit, to detect the second surface of testee;
When detecting testee front and rear surfaces simultaneously, reflection source and transmitted light source are opened simultaneously, reflection source emits beam to half-reflecting half mirror, half-reflecting half mirror is reflexed to through testee expose to the first surface of testee from the light of half-reflecting half mirror transmission after, transmitted light source emits beam and is incident to the second surface of testee, and be transmitted through half-reflecting half mirror through testee, now two-way light collection reflexes to image-generating unit through half-reflecting half mirror together, to detect first and second surface of testee simultaneously;
Described transmitted light source also comprises mechanical catch, described reflection source emits beam and to be blocked at mechanical catch place through testee surface through half-reflecting half mirror, and described transmitted light source to emit beam after mechanical catch reflection enhancement through testee and exposes to half-reflecting half mirror.
10. there is a lighting device for transmission and reflection source, for providing illumination condition for detecting testee, it is characterized in that: this lighting device comprises reflection source, half-reflecting half mirror and transmitted light source, described reflection source and transmitted light source are arranged on the relative both sides of testee, described half-reflecting half mirror is arranged between reflection source and testee, described reflection source emit beam through half-reflecting half mirror expose to testee surface back reflection to half-reflecting half mirror, described transmitted light source emits beam and expose to half-reflecting half mirror through testee after strengthening, described transmitted light source comprises diffuser plate, at least one surface of described diffuser plate is uneven surface, described reflection source emit beam through half-reflecting half mirror through survey body surface weaken at described uneven surface place, described transmitted light source emits beam and expose to half-reflecting half mirror through testee after uneven surface strengthens,
Described transmitted light source also comprises mechanical catch, described reflection source emits beam and to be blocked at mechanical catch place through testee surface through half-reflecting half mirror, and described transmitted light source to emit beam after mechanical catch reflection enhancement through testee and exposes to half-reflecting half mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210372406.3A CN102944563B (en) | 2012-09-28 | 2012-09-28 | There is the lighting device of transmission and reflection source, detection system and detection method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210372406.3A CN102944563B (en) | 2012-09-28 | 2012-09-28 | There is the lighting device of transmission and reflection source, detection system and detection method thereof |
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| DE102014115317A1 (en) | 2014-10-21 | 2016-04-21 | cibite AG | Method and device for determining the transmittance of a flat glass substrate |
| CN104550051A (en) * | 2014-12-23 | 2015-04-29 | 山东明佳科技有限公司 | Empty bottle sorting system for glass bottle |
| CN106644989B (en) * | 2017-01-26 | 2023-08-01 | 夏明亮 | Absorbance detection system |
| CN106874903A (en) * | 2017-02-20 | 2017-06-20 | 湖南大学 | The device and method that a kind of article profile is obtained and recognized |
| CN107870511B (en) * | 2017-12-04 | 2021-07-20 | 江苏维普光电科技有限公司 | Double-optical-path-based rapid scanning device and scanning method using same |
| CN109813720B (en) * | 2019-02-21 | 2024-04-02 | 苏州市安派精密电子有限公司 | CCD detection device |
| CN110596114B (en) * | 2019-07-24 | 2024-02-13 | 无锡奥特维科技股份有限公司 | Detection device and silicon wafer sorting equipment |
| CN111272769A (en) * | 2020-04-07 | 2020-06-12 | 深圳回收宝科技有限公司 | Bottom shell detection device of electronic product |
| CN113933319A (en) * | 2021-09-01 | 2022-01-14 | 郑州旭飞光电科技有限公司 | Glass defect detection device |
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Address after: 526238 first floor, two storey and first floor of B building, C industrial complex, Zhaoqing hi tech Zone, Guangdong Patentee after: ZHONGDAO OPTOELECTRONIC EQUIPMENT CO.,LTD. Address before: 526238 first floor, two storey and first floor of B building, C industrial complex, Zhaoqing hi tech Zone, Guangdong Patentee before: ZHAOQING 3I SYSTEMS Corp. |
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Denomination of invention: Lighting device with transmission and reflection light source, detection system and detection method thereof Effective date of registration: 20211014 Granted publication date: 20160224 Pledgee: Zhaoqing Rural Commercial Bank Co.,Ltd. Xinqiao sub branch Pledgor: ZHONGDAO OPTOELECTRONIC EQUIPMENT Co.,Ltd. Registration number: Y2021440000315 |
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