KR20190137536A - Reference plate for controling the optical axis of up-look review camera with z-axis stage in the tension mask assembly - Google Patents

Abstract

The present invention relates to a standard plate for adjusting an optical axis of a review camera, which can be used for measuring and adjusting an optical axis of a review camera for measuring a position of a mask hole in an apparatus for manufacturing a tension mask frame assembly attached with an up-look review camera used in a manufacturing process of a display device, a semiconductor device, etc., and to a method for adjusting an optical axis using the same and, more particularly, to a standard plate for adjusting an optical axis which changes an optical central axis of a review camera attached to a z-axis stage for vertically moving the review camera to be 500 nm or less according as the z-axis stage is moved by 5 mm and to a method for adjusting an optical axis of the review camera attached to the z-axis stage to 500 nm or less using the same. According to the standard plate of the present invention, a bottom portion has a square surface and an upper surface portion includes first and second upper surfaces forming a step by an intermediate wall, wherein the first and second upper surfaces are rectangles having the same size.

Description

Reference plate for controling the optical axis of up-look review camera with z-axis stage in the tension mask assembly}

The present invention is to adjust the optical axis of the review camera used to measure and adjust the optical axis of the review camera for measuring the position of the mask hole in the apparatus for manufacturing a tension mask frame assembly with an uplook review camera used in the manufacturing process of display devices, semiconductor devices, etc. It relates to a standard plate and an optical axis adjustment method using the standard plate, more specifically, the optical center axis of the review camera attached to the z axis stage to move the review camera up and down, the optical center as the 5 mm movement of the z axis stage A standard plate for adjusting the optical axis to change the axis to 500 nm or less, and a method for adjusting the optical axis of the review camera attached to the z-axis stage to 500 nm or less using the standard plate.

In general, organic light emitting diodes (OLEDs) among display devices have advantages of wide viewing angle, excellent contrast, and fast response speed.

OLED refers to a display device that displays information necessary for humans by emitting light in the visible region when holes and electrons injected from an anode and a cathode meet and recombine in an organic emission layer. Unlike liquid crystal displays (LCDs), OLEDs, which are self-luminous devices, do not require a backlight unit (BLU) and have a simple structure and are thin and very light. In addition, it has faster response speed and wider viewing angle than LCD, enabling high contrast ratio and image quality at all angles. In addition, the light transmittance of the entire panel reaches 23%, which is three times that of LCD, and can be applied to flexible substrates, which is optimal for realizing transparent and flexible displays. Based on these advantages, OLEDs are in the spotlight as the next generation technology that will dominate the display industry after LCD. On the other hand, OLED is vulnerable to moisture and oxygen because organic material is used as a major component, and its life is fundamentally short. Currently, it is more expensive than LCD and has difficulty in high resolution and large area.

The electrodes of the OLED and the intermediate layer including the light emitting layer can be formed by various methods, one of which is a vapor deposition method. In order to manufacture an OLED using a deposition method, a fine metal mask (FMM) having the same pattern as a pattern of a thin film to be formed on a substrate is aligned, and a thin film having a desired pattern is deposited by depositing a raw material of the thin film. Will form.

As the fine metal mask has a large area, an etching error for pattern formation also increases, and thus, in recent years, a split mask type frame assembly that makes a mask into a plurality of stick shapes and attaches it to a frame has been preferred. The advantage of using this split mask is that if the split mask in the entire mask frame assembly fails, only the split mask needs to be replaced.

1 shows a conventional tension mask frame assembly manufacturing apparatus 10 for assembling a split mask into a frame as shown in FIG. 1 of Korean Laid-Open Patent Publication No. 10-2018-0042933.

In general, the conventional tension mask frame assembly manufacturing apparatus 10 is divided into a clamp 13 for tensioning the split mask 11, a review camera 14 for measuring the position of a hole in the split mask 11, and a frame 12. It consists of the laser welding machine 15 for welding the mask 11. As shown in FIG. 1, the tension mask frame assembly manufacturing apparatus 10 includes a pair of y-axis rails 22 and y-axis rails 22 facing each other with a frame 12 having a rectangular frame shape in the center thereof. A pair of y sliders 24 mounted on the y-axis rails 22 to move, an x-axis rail 26 disposed over the pair of sliders 24, and an x-axis to move along the x-axis rails 26 And an x slider 28 mounted on the rail 26. The review camera 14 and the laser welder 15 are fixed to the x slider 28 and move along the x axis rail. As a result, the review camera 14 may photograph the holes of the split mask 11 mounted on the frame 12 while moving along the x-axis and the y-axis.

In order to increase the productivity of OLED for smartphones, it is preferable that the deposition glass size is large. As the evaporation glass size increases, the size of the frame 12 increases. The tension mask frame assembly manufacturing apparatus 10 welds a large size frame 12 to which a plurality of split masks 11 are attached in a tensioned state for deposition on glass of sixth generation (GH) size or larger. At this time, the length of the x-slider assembly composed of the x-axis rail 26, the x-slider 28, the review camera 14, the laser welding machine 15, etc. is, for example, 3,275mm, the load is the weight of about 295Kg.

When looking at the gravity deformation of the x-axis rail in the tension mask frame assembly manufacturing apparatus, as shown in Figure 2, when the load of 295Kg is applied to the x-axis rail 26 by gravity, the x-axis rail 26 from the center to the downward direction 20.38um will sag. In this case, the review camera 14 moves the center position of the photographing to cause an error that the hole position of the division mask 12 moves.

Conventional tension mask frame assembly manufacturing apparatus 10 using this downward measurement method can not meet the measurement error of the mask hole within ± 1um, the industry requirement level when manufacturing a tension mask frame assembly having a size of 6GH or more.

In addition, the x slider 28 must be able to maintain a constant gap with the air bearing to drive the speed moving along the x-axis rail 26 at the maximum 200mm / sec. However, since the x slider 28 is difficult to maintain a constant gap due to gravity deformation of the x axis rail 26 and hardly achieves the maximum speed, there is a problem in that productivity due to a decrease in the measurement speed and the welding speed is reduced. In order to solve this problem, a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera may be used to reduce the hole measurement error of the tension mask and prevent a decrease in the measurement speed.

FIG. 3 is a view illustrating a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera for assembling a split mask to a frame as shown in FIG. 3 of Korean Laid-Open Patent Publication No. 10-2018-0042933. The tension mask frame assembly manufacturing apparatus 100 includes a base 110, a frame support 120, a weld 130, and a photographing unit 140.

The base 110 is a rectangular block having a flat plane and has a horizontal adjustment base 112 for horizontal adjustment at the bottom.

The frame support unit 120 is a means for supporting the tension mask frame assembly at a position spaced apart from the upper surface of the base 110, and a pair of longitudinal support blocks 122 arranged side by side at intervals on the base 110. And a pair of transverse support blocks 124 fixed at intervals to traverse the pair of longitudinal support blocks 122.

The welding unit 130 is a means for welding the tension mask to the long side of the frame at the upper part of the frame support. A welding machine for welding the tension mask to the long side of the frame, a welding slider for supporting the welder, and the welding slider to the long side of the frame. It is provided with a welding rail to guide along. That is, the welded part 130 includes a grid-like block support 131 disposed with the base 110 interposed therebetween, and a pair of rail supports arranged side by side along the long side of the base 110 on an upper surface of the block support 131. A pair of longitudinal axis welding sliders moving along the block 132, a pair of longitudinal axis welding rails 133 disposed on the upper surface of the pair of rail support blocks 132, and the pair of longitudinal axis welding rails 133. 134, a horizontal axis welding rail 135 disposed over the pair of longitudinal axis welding sliders 134, and a pair of welding machines 136 spaced apart from the horizontal axis welding rail 135.

The photographing unit 140 is a means for photographing the hole of the tension mask in the lower part of the frame support part, the camera photographing the hole of the tension mask in the lower part of the frame support part, a photographing slider supporting the camera, and a photographing slider in the longitudinal axis of the frame. And a camera rail for guiding along the horizontal axis direction.

Also, because of the thickness of the mask frame, the working distance of the review camera's lens should be at least 45 mm. With a conventional Infinite-type objective, the maximum working distance at 10x or 20x magnification is 30mm. Thus, lenses with a working distance of 45 mm or more and 10x are equivalent to telecentric lenses. For this reason, an autofocus device using a conventional laser cannot be used to focus using only image autofocus. In this case, a 10x telecentric lens is attached to the z-axis stage and the z-axis stage is moved up and down to focus. Accordingly, the vertical movement of the z-axis stage is required, and the precision required by the industry requires that the optical center axis of 5 mm movement of the z-axis stage be changed to 500 nm or less.

Accordingly, there is a demand for a standard plate for adjusting the optical axis such that the optical center axis of the z-axis stage is shifted to 500 nm or less upon vertical movement of the z-axis stage. In addition, a method of adjusting the optical axis of the review camera attached to the z-axis stage to 500 nm or less using the standard plate for adjusting the optical axis is also desired.

However, the standard plate for adjusting the optical axis and the optical axis adjusting method using the same cannot be found anywhere now.

The technical problem to be solved by the present invention, in the tension mask frame assembly manufacturing apparatus with an uplook review camera, the optical center axis of the review camera attached to the z-axis stage moving the review camera up and down, 5mm movement of the z-axis stage According to the present invention, a standard plate for adjusting the optical axis such that the optical center axis is changed to 500 nm or less, and a method of adjusting the optical axis of the review camera attached to the z axis stage to 500 nm or less using the same.

Another technical problem to be solved by the present invention, in the standard plate for measuring the optical axis of the review camera for measuring the position of the mask hole in the apparatus for manufacturing a tension mask frame assembly with an uplook review camera, the cross pattern and the circular mark is engraved A standard plate for adjusting an optical axis having an upper surface and a lower surface engraved with a cross pattern and a circular mark 5 mm below the upper surface is provided.

Another technical problem to be solved by the present invention, in the standard plate for measuring the optical axis of the review camera for measuring the position of the mask hole in the apparatus for manufacturing a tension mask frame assembly with an uplook review camera, the vertical right angle of the uplook review camera To provide a standard plate for adjusting the optical axis that can be adjusted to less than 500nm, to reduce the position error caused by the z-axis in measuring the position of the mask hole.

In order to solve the above problems, the present invention is a standard plate for adjusting the review camera optical axis, which is used to adjust the optical axis of the review camera for measuring the position of the mask hole in the tension mask frame assembly manufacturing apparatus with an uplook review camera, The portion is formed of a square surface, the upper surface portion has a first upper surface and a second upper surface formed by the intermediate wall step, characterized in that the first upper surface and the second upper surface is a rectangle of the same size.

The first upper surface has a first + cross (cross) pattern and the first circular pattern, the first + cross (cross) pattern and the first circular pattern is arranged in a line, the second upper surface has a second + ( (Cross) pattern and the second circular pattern, the first + cross (cross) pattern and the first circular pattern is arranged in a line, when looking down the standard plate for adjusting the optical axis of the review camera from above, The cross pattern and the second + cross pattern are located on a straight line, and the first circular pattern and the second circular pattern are located on a straight line.

The first upper surface further includes a first border pattern forming a 'c' shape, surrounding the first + cross pattern and the first circular pattern, and having an intermediate portion in an open portion of the first border pattern. The wall is located, and the second upper surface further includes a second border pattern forming a 'c' shape, surrounding the second + cross pattern and the second circular pattern, and opening the second border pattern. The middle wall is located at the part where).

When looking down from the standard plate for adjusting the optical axis of the review camera from above, the first border pattern and the second border pattern mesh with each other to form a rectangle.

The height of the intermediate wall is preferably 5 mm.

The horizontal length (upper length) of the first top surface and the second top surface is half of the horizontal length (upper length) of the bottom surface portion, and the vertical length (side end length) of the first top surface and the second top surface is the vertical length (side length length) of the bottom surface portion. Is the same as

The thickness of the lines of the first + cross pattern and the second + cross pattern is 50 μm, and the diameters of the first circular pattern and the second circular pattern are 100 μm.

The present invention is provided with a first upper surface and a second upper surface, the upper surface of which is stepped by an intermediate wall, in order to adjust the optical axis of the review camera for measuring the position of the mask hole in the tension mask frame assembly manufacturing apparatus equipped with an uplook review camera, In the method for adjusting the optical axis of the review camera using a standard camera for adjusting the optical axis of the review camera having a cross pattern and a circular pattern on the first and second top surfaces, the first top surface is finely rotated the standard plate for adjusting the optical axis A rotating stage is attached, and the standard plate for adjusting the optical axis is placed on the plane on which the mask is manufactured, with the first top surface on the plane on which the mask is made and the second top surface on a position 5 mm above the first top surface. In the captured image, only the cross pattern and the circular pattern of the second upper surface are shown, and the cross pattern and the circle of the first upper surface are shown. Pattern is not visible, to adjust the focus of the camera eopruk, the first step; A second step of rotating the fine rotation stage attached to the first top surface such that the center of the cross pattern of the second top surface and the circular pattern are vertical after the first step; After the second step, after moving the z axis of the review camera below 5mm, only the cross pattern and the circular pattern of the first top surface are shown in the captured image, and the cross pattern and the circular pattern of the second top surface are not visible. And a third step of adjusting the focus.

In addition, the method of adjusting the optical axis of the review camera, after the third step, from the center position of the cross pattern of the second upper surface determined in accordance with the second step and the center position of the cross pattern of the first upper surface determined in accordance with the third step And a fourth step of adjusting by using a tilt adjuster attached to the uplook camera such that the x-axis value and the y-axis value of the focus of the review camera are out of the range.

After the third step, the distance between the cross pattern of the second top surface and the center of the circular pattern is 120 um, which is in the field of view (FOV) of the uplook review camera, and the cross pattern of the first top surface and the cross pattern of the second top surface are 120um. The distance between the centers is 100um, which is in the field of view (FOV) of the look review camera.

The present invention relates to a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera, wherein an optical center axis of a review camera attached to a z-axis stage moving the review camera up and down is moved by 5 mm of the z-axis stage. The optical axis adjusting standard plate and the optical axis adjusting method using the standard plate for adjusting the optical axis to change below 500nm is provided, and the optical axis of the review camera attached to the z-axis stage can be adjusted to 500 nm or less by using the optical axis adjusting standard plate.

That is, the present invention, in the standard plate for measuring the optical axis of the review camera for measuring the position of the mask hole in the manufacturing apparatus for the tension mask frame assembly with an uplook review camera, from the upper surface and the upper surface engraved with a cross pattern and a circular mark A standard plate for adjusting the optical axis is provided, which has a cross pattern with a cross mark and a round mark engraved below 5 mm.

Accordingly, the vertical perpendicularity of the uplook review camera can be adjusted to 500 nm or less, thereby reducing the position error caused by the z-axis in measuring the position of the mask hole.

When using the standard plate for adjusting the optical axis of the present invention, it is possible to satisfy the measurement error of the mask hole within ± 1um, the industry requirement level.

1 is a perspective view showing a tension mask frame assembly manufacturing apparatus of a conventional example in FIG. 1 of the Korean Patent Publication No. 10-2018-0042933.
FIG. 2 is a view illustrating gravity deformation of an x-axis rail in the tension mask frame assembly manufacturing apparatus of FIG. 1 as in FIG. 2 of Korean Laid-Open Patent Publication No. 10-2018-0042933.
FIG. 3 is a view illustrating a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera for assembling a split mask to a frame as shown in FIG. 3 of Korean Patent Publication No. 10-2018-0042933.
Figure 4 is a perspective view of a standard plate for adjusting the optical axis of the present invention.
5 is a plan view of the standard plate for adjusting the optical axis of FIG.
6 is a side view of the standard plate for adjusting the optical axis of FIG. 4.

Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment of the present invention.

In the present invention, the standard plate for adjusting the optical axis is a structure having a step, but may be referred to as a standard mechanism for adjusting the optical axis (apparatus, means, calibrator), etc., but serves as a compensating plate, so in the present invention, 'standard plate for adjusting the optical axis' Named as

4 is a perspective view of the standard plate for adjusting the optical axis of the present invention, Figure 5 is a plan view of the standard plate for adjusting the optical axis of Figure 4, Figure 6 is a side view of the standard plate for adjusting the optical axis of FIG.

As shown in FIG. 4, in the standard plate 700 for adjusting the optical axis, a bottom portion 780, which is the bottom surface, forms a square, and an upper surface portion 710, which is an upper surface, is formed of a rectangular first top surface 711 and a second top surface. 712 is provided, and an intermediate wall 730 is formed between the first upper surface 711 and the second upper surface 712 to form a step.

The standard plate 700 for adjusting the optical axis, as shown in FIG. 6, has a “b” shape when viewed from one side. In other words, one side 730 of the standard plate 700 for adjusting the optical axis is formed in the "b" shape.

The upper end length (width length) of the rectangle of the 1st top surface 711 and the 2nd top surface 712 is half of the top length of the square which the bottom part 780 makes. The rectangular side end length (vertical length) of the 1st top surface 711 and the 2nd top surface 712 is the same as the side end length of the bottom face part 780. As shown in FIG. Therefore, the area of the rectangle of the first upper surface 711 and the second upper surface 712 may be half of the area of the square of the bottom portion 780.

When viewed from above, the first upper surface 711 and the second upper surface 712 form the same square as the bottom portion 780.

For example, if the bottom portion 780 has a top length (width) of 20 mm and a side end length (length) of 20 mm, the first top surface 711 and the second top surface 712 have a top length (horizontal length). Is 10 mm, and the side length (vertical length) is 20 mm.

The first upper surface 711 includes a first + cross pattern 771, a first circular pattern 761, and a first border pattern 721, and includes a first + cross pattern 771. The first circular patterns 761 are arranged in a line, and the first edge pattern 721 surrounds the first + cross (cross) pattern 771 and the first circular pattern 761. The first border pattern 721 has a 'c' shape, and the intermediate wall 730 is positioned at an open portion of the first border pattern 721.

The second upper surface 712 includes a second + cross (cross) pattern 772, a second circular pattern 762, and a second edge pattern 722, and includes a second + cross (cross) pattern 772. The second circular pattern 762 is arranged in a line, and the second edge pattern 722 surrounds the second + cross (cross) pattern 772 and the second circular pattern 762. The second border pattern 722 has a 'c' shape, and the intermediate wall 730 is positioned at an open portion of the second border pattern 722.

Accordingly, as shown in FIG. 5, when viewed from above, the standard plate 700 for adjusting the optical axis has a first rectangle pattern 721 and a second border pattern 722 meshed with each other to form a regular rectangle, and a first + cross (cross). The pattern 771 and the second plus cross (cross) pattern 772 are positioned in a straight line, and the first circular pattern 761 and the second circular pattern 762 are located in a straight line.

Standard axis 700 for adjusting the optical axis is composed of a first top surface 711 and a second top surface 712, the first stage 711 is a rotating stage that can finely rotate the standard plate 700 for adjusting the optical axis (microscope) Is attached.

The first upper surface 711 is positioned on the plane where the mask, that is, the tension mask is manufactured, and the second upper surface 712 is positioned at a position 5 mm vertically downward from the mask. That is, the length (distance) from the first upper surface 711 to the second upper surface 712 is about 5 mm, which may be referred to as the height of the intermediate wall 730.

In addition, the height from the bottom portion 780 to the second upper surface 712 is preferably about 2mm.

In addition, the thickness of the pattern lines such as the first + cross pattern 771, the second + cross pattern 772, the first border pattern 721, and the second border pattern 722 is 50 μm. The diameter of the circular pattern of the first circular pattern 761 and the second circular pattern 762 is preferably 100um.

Hereinafter, a process of adjusting the optical axis of the uplook review camera will be described.

The first upper surface is attached with a rotating stage for finely rotating the standard plate for adjusting the optical axis, and the first upper surface 711 is positioned on the plane on which the mask is manufactured, and the second upper surface 712 is positioned at a position 5 mm above it. do.

 In order to align the optical axis of the uplook review camera vertically, using a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera, the uplook review camera finds the position of the mask hole when welding the mask to the mask frame and matches the design value. The tension mask frame assembly manufacturing apparatus to which the uplook review camera is attached is operated.

At this time, the mask sags downward due to gravity, and the maximum sag is 1mm based on 6GH glass. Therefore, the height difference between the first upper surface 711 and the second upper surface 712 of the standard plate for adjusting the optical axis is sufficient within 5mm.

 In order to align the optical axis of the uplook review camera vertically, first, the standard plate 700 for adjusting the optical axis is placed on the plane on which the mask is made, and while the uplook review camera is used, the uplook camera is focused on the lower surface of the uplook review camera. Only the pattern of the second top surface 712 can be seen, and the pattern on the first top surface 711 cannot be seen. The micro-rotation stage (not shown) attached to the first upper surface 711 is rotated so that the center of the second cross pattern 772 and the second circular pattern 762 on the second upper surface 712 are vertical.

The distance between the center of the second cross pattern 772 and the center of the second circular pattern 762 on the second upper surface 712 is 200 um, and the field of view (FOV) of the uplook review camera 10x is observed. ) inside. In addition, the distance between the centers of the cross patterns 771 and 772 on the first top surface 711 and the second top surface 712 is 100 um, and is within the field of view (FOV) of the look review camera 10x.

When the center of the second cross pattern 772 and the center of the second circular pattern 762 are perpendicular to each other on the second upper surface 712, the z-axis of the uplook review camera is moved below 5 mm. Fine tune. The image shown at this time is the patterns 771 and 761 of the first upper surface 711, and the patterns 762 and 772 of the second upper surface 712 may not be seen. Since the center positions of the cross patterns 771 and 772 of the first upper surface 711 and the second upper surface 712 are known, a tilt controller attached to the uplook camera is used so that the x and y values out of the center position become zero. To adjust.

In the present invention, the top length (length) and the side end length (length) of the bottom portion, the height of the middle wall, the height from the bottom portion 780 to the second upper surface 712, etc. are indicated by a predetermined value. It is not intended to limit the scope of the invention, but it is to be understood that the numerical values may change depending on the situation.

As described above, the present invention has been described by way of limited embodiments and drawings, but the present invention is not limited to the above-described embodiments, which can be variously modified and modified by those skilled in the art to which the present invention pertains. Modifications are possible Accordingly, the spirit of the present invention should be understood only by the claims set forth below, and all equivalent or equivalent modifications thereof will fall within the scope of the present invention.

700: standard plate for adjusting the optical axis 710: upper surface
711: first top 712: second top
721: first border pattern 722: second border pattern
730: middle wall 730: side (9P20 rows)
761: first circular pattern 762: second circular pattern
771: first + character pattern 772: second + character pattern
780: bottom part

Claims (10)

A standard plate for adjusting a review camera optical axis, which is used to adjust an optical axis of a review camera for measuring a position of a mask hole in a tension mask frame assembly manufacturing apparatus equipped with an uplook review camera,
The bottom part is composed of square faces,
The upper surface portion has a first upper surface and a second upper surface formed by the intermediate wall, the first upper surface and the second upper surface, characterized in that the rectangular shape of the same size, the review camera optical axis adjustment standard plate.
The method of claim 1,
The first upper surface has a first + cross (cross) pattern and the first circular pattern, the first + cross (cross) pattern and the first circular pattern is arranged in a line,
The second upper surface has a second + cross (cross) pattern and a second circular pattern, the first + cross (cross) pattern and the first circular pattern is arranged in a line,
When looking down at the standard plate for adjusting the review camera optical axis from above,
The first + cross pattern and the second + cross pattern are located on a straight line.
A standard plate for adjusting a review camera optical axis, characterized in that the first circular pattern and the second circular pattern are located in a straight line.
The method of claim 2,
The first upper surface further includes a first border pattern forming a 'c' shape, surrounding the first + cross pattern and the first circular pattern, and having an intermediate portion in an open portion of the first border pattern. The wall is located,
The second upper surface further includes a second border pattern forming a 'c' shape, surrounding the second plus cross (cross) pattern and the second circular pattern, and having an intermediate portion in an open portion of the second border pattern. A standard plate for adjusting the review camera optical axis, characterized in that the wall is located.
The method of claim 3,
When looking down at the standard plate for adjusting the review camera optical axis from above,
Standard frame for adjusting the review camera optical axis, characterized in that the first border pattern and the second border pattern is meshed with each other to form a square.
The method of claim 3,
The height of the middle wall is 5mm, standard plate for adjusting the review camera optical axis.
The method of claim 2,
The horizontal length (upper length) of the first and second upper surfaces is half of the horizontal length (upper length) of the bottom portion,
The vertical length (side end length) of a 1st upper surface and a 2nd upper surface is the same as the longitudinal length (side end length) of a bottom part, The review camera optical axis adjustment standard plate.
The method of claim 6,
The thickness of the first + cross pattern and the second + cross pattern is 50 um,
Standard diameter of the review camera optical axis adjustment, characterized in that the diameter of the first circular pattern and the second circular pattern is 100um.
In order to adjust the optical axis of the review camera for measuring the position of the mask hole in the apparatus for manufacturing a tension mask frame assembly with an uplook review camera, the upper surface part includes a first upper surface and a second upper surface which are stepped by an intermediate wall. In the method of adjusting the optical axis of the review camera by using a standard plate for review camera optical axis adjustment, the upper surface and the second upper surface having a cross pattern and a circular pattern,
The first upper surface is attached with a rotation stage for finely rotating the standard plate for adjusting the optical axis, and the first upper surface is positioned on the plane where the mask is manufactured, and the second upper surface is positioned 5 mm away from the first upper surface.
The standard plate for adjusting the optical axis is placed on the plane on which the mask is manufactured, and only the cross pattern and the circular pattern of the second top surface are visible in the captured image, and the crosshair and the circular pattern of the first top surface are not visible. The first step, adjusting
A second step of rotating the fine rotation stage attached to the first top surface such that the center of the cross pattern of the second top surface and the circular pattern are vertical after the first step;
After the second step, after moving the z axis of the review camera below 5mm, only the cross pattern and the circular pattern of the first top surface are shown in the captured image, and the cross pattern and the circular pattern of the second top surface are not visible. Adjusting a focus;
Method for adjusting the optical axis of the review camera, comprising a.
The method of claim 8,
After the third step, the x-axis value and the y-axis of the focal point of the review camera deviate from the center position of the cross pattern of the second upper surface determined according to the second step and the center position of the cross pattern of the first upper surface determined according to the third step Adjusting by using a tilt controller attached to the uplook camera such that the value is 0;
Further comprising a, How to adjust the optical axis of the review camera.
The method of claim 8,
After the third step, the distance between the cross pattern of the second upper surface and the center of the circular pattern is 120um, which is in the field of view (FOV) of the Uplook review camera.
The distance between the cross pattern of the first top surface and the center of the cross pattern of the second top surface is 100um, which is in the field of view (FOV) of the look review camera.

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