KR20190127244A - Apparatus for treating waste gas - Google Patents

Abstract

Disclosed by the present invention is a waste gas treatment device for treating waste gas supplied from an external waste gas source and discharging purified gas. The disclosed waste gas treatment device includes: a reaction chamber which has a mixed gas inlet and a purified gas outlet, purifies introduced waste gas by a thermal reaction, and discharges the purified gas; a heater which is installed in the reaction chamber and heats the waste gas introduced into the reaction chamber; and an ejector which is arranged between the external waste gas source and the reaction chamber, mixes a part of gas discharged from the reaction chamber with waste gas supplied from the external waste gas source, and supplies the mixed gas to the reaction chamber. The present invention is formed to preheat waste gas supplied from an external waste gas source by waste heat of gas discharged from a reaction chamber. The present invention is able to effectively remove waste gas and increase energy efficiency.

Description

Waste gas treatment unit {APPARATUS FOR TREATING WASTE GAS}

The present invention relates to a waste gas treatment apparatus, and more particularly, to a waste gas treatment apparatus of a pyrolysis method.

In general, the electronics industry, which manufactures semiconductors, LEDs, and LCDs, uses various kinds of gases. In the process of depositing a silica (SiO 2) insulating film on a wafer in a semiconductor manufacturing process, a silica insulating film is formed by reacting silane (SiH 4) and nitrous oxide (N 2 O) gas in a high temperature environment. As a result, silane and nitrous oxide remain after the reaction. In addition, nitrogen trifluoride (NF 3) is used in the semiconductor cleaning process.

In addition, the amount of nitrous oxide used as an oxidant is on the rise, and nitrous oxide is emitted from adipic acid, caprolactam, and nitric acid production plants.

Nitrous oxide is a gas that destroys the stratospheric ozone layer and causes the greenhouse effect. It is the sixth greenhouse with carbon dioxide (CO2), methane (CH4), perfluorocarbons (PFCs), hydrofluorocarbons (HFCs), and sulfur hexafluoride (SF6). It is classified as a gas and must be discharged to the atmosphere after it has been treated by a waste gas treatment system.

Waste gas treatment apparatus for treating waste gas containing nitrous oxide is classified into combustion, plasma, pyrolysis method and the like according to the treatment method. Combustion waste gas treatment system may generate additional nitrogen oxides due to the injection of air for oxidation. Plasma-type waste gas treatment apparatus dissociates waste gas in the form of ions in a high temperature environment, and consumes a lot of energy, such as high energy consumption for plasma generation and frequent maintenance costs such as frequent replacement of electrodes generating plasma. have.

The pyrolysis method is a method of heating the inside of a reactor using an electric heater instead of a burner, and is a method of decomposing waste gas using a catalyst in a high temperature environment. This pyrolysis waste gas treatment system can lower the production of nitrogen compounds and dioxins due to incomplete combustion. On the other hand, this pyrolysis waste gas treatment system needs to efficiently manage the temperature of the waste gas in accordance with the treatment process.

Republic of Korea Patent Publication No. 10-2013-0084981 Republic of Korea Patent Publication No. 10-2012-0084983 United States Patent Application Publication US2013 / 0064730A1

The present invention has been made in view of the above-described point, and an object thereof is to provide a waste gas treatment apparatus of a pyrolysis method to more effectively remove waste gas and to increase energy efficiency.

The present invention for achieving the above object is a waste gas treatment apparatus for treating the waste gas supplied from an external waste gas source to discharge the purification gas, having a mixed gas inlet and a purification gas outlet, the reaction for purifying the waste gas by thermal reaction A chamber; A heater installed in the reaction chamber to heat the waste gas introduced into the reaction chamber; A waste gas inlet provided between the external waste gas source and the reaction chamber, the waste gas inlet through which the waste gas supplied from the external waste gas source flows, and a circulating gas inlet and a waste gas inlet through which a portion of the purge gas discharged from the purge gas outlet flows; An ejector having a mixed gas outlet for discharging the gas introduced through the circulating gas inlet toward the reaction chamber, and preheating the gas introduced through the waste gas inlet by waste heat of the gas introduced through the circulating gas inlet; A first path connecting between the external waste gas source and the waste gas inlet; A second path connecting the mixed gas outlet and the mixed gas inlet; A gas circulating environment path connecting the purge gas discharge port and the circulating gas inlet port to recycle a part of the purge gas discharged from the reaction chamber; And a third path connected to the purge gas discharge port and discharging the purge gas discharged from the reaction chamber.

In addition, the present invention for achieving the above object is a waste gas treatment apparatus for treating the waste gas supplied from the external waste gas source to discharge the purification gas, having a mixed gas inlet and a purification gas outlet, the waste gas introduced by the thermal reaction A reaction chamber for purifying and discharging the purge gas; A heater installed in the reaction chamber to heat the waste gas introduced into the reaction chamber; And an ejector provided between the external waste gas source and the reaction chamber, the ejector mixing part of the gas discharged from the reaction chamber with the waste gas supplied from the external waste gas source and supplying the reaction chamber to the reaction chamber. The waste gas supplied from the external waste gas source may be preheated by the waste heat of the gas. Here, the ejector may be made of a venturi tube for sucking a part of the gas discharged from the reaction chamber by the flow rate of the waste gas supplied from the external waste gas source.

Here, by connecting between the reaction chamber and the ejector, it may further include a gas circulation environment path for recycling a portion of the purge gas discharged from the reaction chamber. The reaction chamber may include: a first gas outlet formed at an upper portion of the reaction chamber and discharging most of the purified waste gas; It is formed in the lower portion of the reaction chamber, it may include a second gas outlet for discharging a portion of the gas in the reaction chamber to the gaseous environment.

The purge gas discharge port is formed in an upper portion of the reaction chamber, the first purge gas discharge port for discharging most of the purge gas to the third path; The waste gas may be disposed under the reaction chamber and include a second purified gas outlet configured to discharge a portion of the purified gas to the gas pure environment.

In another aspect, the present invention is installed in the reaction chamber, the separation unit for separating the space in the reaction chamber into a first space in communication with the mixed gas inlet and the heater is installed, and a second space in communication with the purge gas discharge port It may include.

In addition, the present invention may further include a catalyst member installed in the second space and purifying the waste gas heated by the heater by a catalytic reduction reaction.

In another aspect, the present invention may further include a guide part installed in the reaction chamber, the guide part communicating with the mixed gas inlet and guided while the gas flowing into the reaction chamber is rotated.

The ejector may be formed of a venturi tube that sucks purge gas into the ejector through the circulating gas inlet by the waste gas flow rate between the waste gas inlet and the mixed gas outlet.

The heater may be installed in the reaction chamber to separate the space in the reaction chamber into a first space communicating with the mixed gas inlet and a second space communicating with the purge gas discharge. The present invention may further include a catalyst member installed in the second space and purifying the waste gas heated by the heater by a catalytic reduction reaction.

In another aspect, the present invention may further include a dust collector installed in the reaction chamber and / or on the gaseous-environment furnace, and collects a by-product generated in a waste gas treatment process.

The present invention may further include a heat exchanger installed at a position where the first path and the third path cross each other to heat waste gas moving from the waste heat of the purge gas exhausted through the third path to the first path. Can be.

Waste gas treatment apparatus according to the present invention has the following effects.

First, by applying a dual waste heat recovery structure to improve the energy recovery rate, power consumption can be reduced to less than three quarters of the conventional device. Second, the gas can be stably processed by maintaining a negative pressure inside the reactor. Third, by using a reduction catalyst having a high corrosion resistance to the fluorine compound can lower the gas decomposition temperature, it is possible to minimize the by-products generated during the waste gas treatment. Fourth, the waste gas including nitrous oxide, silane, and nitrogen trifluoride used in the deposition process of the electronics industry can be integrated, and at least 90% of these waste gases can be removed.

1 is a schematic view showing a waste gas treatment apparatus according to a first embodiment of the present invention.
2 is a schematic cross-sectional view showing the ejector shown in FIG.
Figure 3 is a schematic view showing a waste gas treatment apparatus according to a second embodiment of the present invention.
Figure 4 is a schematic view showing a waste gas treatment apparatus according to a third embodiment of the present invention.
Figure 5 is a partial cross-sectional perspective view showing a reactor of the waste gas treatment apparatus according to the first to third embodiments of the present invention.
FIG. 6A is a schematic view for explaining the arrangement of the guide part of FIG. 5, and FIG. 6B is a schematic view for explaining the circulation structure of the waste gas by the guide part of FIG. 6A.
Figure 7 is a partial cross-sectional perspective view showing a reactor of the waste gas treatment apparatus according to the fourth embodiment of the present invention.
Figure 8 is a schematic cross-sectional view showing a modification of the reactor of the waste gas treatment apparatus according to the present invention.

Hereinafter, a waste gas treating apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic view showing a waste gas treatment apparatus according to a first embodiment of the present invention.

Referring to Figure 1, the waste gas treatment apparatus according to the first embodiment of the present invention is to discharge the purification gas by treating the waste gas supplied from the external waste gas source, the reactor 100 for purifying the waste gas introduced by the thermal reaction And an ejector 200 for mixing a part of the gas discharged from the reactor 100 with the waste gas supplied from the waste gas source and supplying the reactor 100 to the reactor 100.

The reactor 100 includes a reaction chamber 110 for purifying the incoming waste gas and a heater 120 installed in the reaction chamber 110. The reactor 100 includes a mixed gas inlet 111 through which the mixed gas flows from the ejector 200, and a purge gas outlet 115 through which the purge gas is discharged. The reaction chamber 110 is separated into a first space 110a and a second space 110b by a separation unit 130 installed therein. The first space 110a communicates with the mixed gas inlet 111, and a heater 120 is installed therein. The heater 120 may decompose the waste gas by thermal reaction by heating the gas introduced into the first space 110a to a high temperature. The second space 110b is a space in communication with the purge gas outlet 115, in which the treated waste gas is separated and discharged. As illustrated in FIG. 1, the separation unit 130 may include a first space 110a disposed at the center of the reaction chamber 110 and a narrow space between the separation unit 130 and the heater 120.

The ejector 200 is provided between the external waste gas source and the reaction chamber 110 and supplies a part of the gas discharged from the reaction chamber 110 with the waste gas supplied from the external waste gas source to the reaction chamber 110. Here, a first path 310 through which waste gas flows is formed between the external waste gas source and the ejector 200. A second path 320 may be formed between the ejector 200 and the reaction chamber 110, and the mixed gas moves to the reaction chamber 110 through the second path 320. In addition, a third path 340 for discharging the purge gas discharged from the reaction chamber 110 may be formed. A gaseous environment path 330 may be formed between the reaction chamber 110 and the ejector 200. The gas circulation environment path 330 recycles a part of the purification gas discharged from the reaction chamber 110 into the ejector 200. By providing the ejector 200, the waste gas supplied from the waste gas source can be directly preheated by the waste heat of the gas discharged from the reaction chamber 110. Can be reduced.

As shown in FIG. 2, the ejector 200 may include a venturi tube 201 that sucks a part of the gas discharged from the reaction chamber 110 by the flow rate of the waste gas supplied from an external waste gas source. That is, the ejector 200 is a tube in which a narrow portion is formed in a straight pipe, and has a structure in which the pressure in the narrow portion is lowered by the Venturi principle. The ejector 200 includes a waste gas inlet 210, a circulating gas inlet 220, and a mixed gas outlet 230. Waste gas supplied from an external waste gas source is introduced into the ejector 200 through the waste gas inlet 210. A part of the purge gas discharged from the purge gas discharge port (115 of FIG. 1) is introduced into the venturi tube 201 by the pressure difference between the purge gas discharge port and the circulating gas inlet port 220. The gases introduced through the waste gas inlet 210 and the circulating gas inlet 220 are mixed with each other, and the waste gas is preheated by the waste heat of the circulating gas. The mixed gas is discharged through the mixed gas outlet 230 and is introduced into the reaction chamber 110 through the mixed gas inlet 111.

The waste gas inlet 210 and the mixed gas outlet 230 are formed at both ends of the straight pipe. The circulating gas inlet 220 is formed in the concave portion of the venturi tube 201. The suction amount of the circulating gas introduced through the circulating gas inlet 220 is determined in conjunction with the flow rate of the waste gas flowing through the waste gas inlet 210.

As described above, by installing an ejector 200 in the form of a venturi tube 201 between the external waste gas source and the reactor 100, the reaction gas 110 is introduced into the reaction chamber 110 by the purification gas discharged from the reaction chamber 110. Waste gas can be preheated. As a result, the energy recovery rate may be increased to reduce power consumption of the heat source 120. Accordingly, by further improving the energy recovery rate, power consumption can be reduced to 3/4 or less as compared with the conventional apparatus.

3 is a schematic view showing a waste gas treatment apparatus according to a second embodiment of the present invention.

Referring to FIG. 3, the waste gas treating apparatus according to the second embodiment of the present invention supplies a reactor 100 for purifying waste gas introduced by a thermal reaction and a portion of the gas discharged from the reactor 100 from a waste gas source. And an ejector 200 which is mixed with the used waste gas and supplied to the reactor 100. The waste gas treating apparatus according to the present embodiment is distinguished in that the purge gas outlet 115 and the exhaust path are changed in comparison with the waste gas treating apparatus according to the first embodiment.

The purge gas outlet 115 may include first and second purge gas outlets 116 and 117 formed in the second space 110b. The first purge gas outlet 116 is formed at an upper portion of the reaction chamber 110 and discharges most of the purge gas to the outside. Here, the third path 340 is connected to the first purge gas outlet 116. The second purge gas outlet 117 is formed in the lower portion of the reaction chamber 110 and discharges a part of the purge gas to the gaseous environment path 330. As such, the second purified gas outlet 117 is provided under the reaction chamber 110, and the by-products remaining after the treatment by the suction force and gravity at the circulating gas inlet 220 of the ejector 200 are discharged to the second purified gas outlet. Move to (117). Accordingly, by-products remaining in the reaction chamber 110 may be prevented from being scattered, and thus, it may be prevented from being directly discharged to the outside through the first purification gas outlet 116.

In addition, the present invention may further include a dust collecting unit 350 for collecting the by-products generated in the waste gas treatment process. The dust collecting unit 350 may be installed on the gaseous environment path 330, and collects a by-product moving together with the gas supplied in the direction of the ejector 300. In addition, the dust collecting unit 350 may be installed under the reaction chamber 110.

In addition, in the waste gas treating apparatus according to the present exemplary embodiment, a third path 340 for discharging the purge gas discharged from the reaction chamber 110 may be installed to intersect the first path 310. Here, the heat exchanger 400 may be further included at a position where the first path 310 and the third path 340 cross each other. Therefore, the waste gas supplied to the first path 310 may be preheated primarily by the waste heat of the purification gas moving to the third path 340. By providing the heat exchanger in this manner, a double waste heat recovery structure can be applied.

4 is a schematic view showing a waste gas treatment apparatus according to a third embodiment of the present invention.

Referring to FIG. 4, the waste gas treating apparatus according to the third embodiment of the present invention includes a reactor 100 and an ejector 200. The waste gas treating apparatus according to this embodiment is distinguished in that it further includes a catalyst member 140 in the reaction chamber 110 as compared with the waste gas treating apparatus according to the second embodiment.

The catalyst member 140 is installed in the second space 110b and finally purifies the waste gas heated by the heater 120 by a catalytic reduction reaction. The catalyst member 140 may be installed in a space between the first purified gas outlet 116 and the second purified gas outlet 117 of the second space 110b. The catalyst member 140 may be composed of a reduction catalyst having a high corrosion resistance to the fluorine compound, thereby reducing the gas decomposition temperature and minimizing the by-products generated during the waste gas treatment.

In addition, according to the present invention, by using an electric heater as a heat source and applying a reduction catalyst, the waste gas can be treated by a flameless reduction catalyst reaction. Accordingly, the waste gases including nitrous oxide, silane, and nitrogen trifluoride used in the deposition process of the electronics industry can be integrated, and at least 90% of these waste gases can be removed.

5 is a partial cross-sectional perspective view showing a reactor of the waste gas treatment apparatus according to the first to third embodiments of the present invention, Figure 6a is a schematic view for explaining the arrangement of the guide of Figure 5, Figure 6b It is a schematic diagram for demonstrating the waste gas circulation structure by the guide part of 6a.

Referring to FIG. 5, the reactor 100 of the waste gas treating apparatus according to the present invention includes a reaction chamber 110, a heater 120, and a separation unit 130. The purge gas outlet 115 is formed in the reaction chamber 110. Separation unit 130 is to be fastened to the reaction chamber 110, the cross-sectional shape may have a funnel shape. The heater 120 is located in the separation unit 130, and separates the internal space of the reaction chamber 110 into the first space 110a and the second space 110b. The fixing plate 151 may be coupled to the separation unit 130. The fixed plate 151 has a mixed gas inlet 111 is formed, the heater 120 is coupled to the center thereof.

In addition, the reactor 100 may further include a guide unit 155 installed in the reaction chamber 110 to guide the traveling direction of the introduced gas. The guide part 155 is coupled to the fixed plate 151 so as to communicate with the mixed gas inlet 111. The guide part 155 guides the waste gas flowing into the reaction chamber 110 to be supplied while rotating. For this purpose, as shown in FIG. 6A, the mixed gas inlet 111 and the guide part 155 may be provided in plural positions corresponding to each other, and may be spaced apart from the fixing plate 151 at predetermined intervals. In addition, the guide part 155 may be formed to be inclined in one rotation direction under the fixing plate 151. Therefore, as illustrated in FIG. 6B, when the waste gas is injected into the separating part 130, it may be supplied while rotating in one rotation direction as indicated by arrow A. FIG. Therefore, since the injected waste gas increases the time to stay around the heater 120, it is possible to further improve the waste gas heating efficiency. In addition, since the injected gas does not directly go to the lower portion of the reaction chamber 110, it is possible to prevent the by-products remaining under the reaction chamber 110 from being scattered by the injected gas.

7 is a schematic view showing a waste gas treatment apparatus according to a fourth embodiment of the present invention.

Compared to the waste gas treatment apparatus according to the second embodiment, the waste gas treatment apparatus according to the present embodiment has a flow meter to detect the flow rate of the waste gas introduced into the reactor 100 and the temperature inside the reactor 100. 510 and the temperature sensor 520 are further distinguished. The flow meter 510 is installed in the second path 320 and detects the flow rate of the waste gas that is discharged from the mixed gas outlet 230 of the ejector 300 and moves to the mixed gas inlet 111. The flow meter 510 may be installed in the first path 310 or may be additionally installed on the gaseous environment path 330. In addition, the temperature sensor 520 is installed in at least one place in the reaction chamber 110, it is possible to check the temperature in the reaction chamber 110, it is possible to control the heater 120 according to the temperature conditions. In addition, the temperature sensor 520 may be additionally installed at the first purified gas outlet 116 to detect a temperature condition of the waste heat. By further including the flow meter 510 and the temperature sensor 520, it is possible to grasp the internal conditions of the reactor 100 in real time, and to control the flow rate of the waste gas supplied to the inside and the temperature of the heater 120 based on this By this, the reaction conditions can be optimized.

8 is a schematic cross-sectional view showing a modification of the reactor of the waste gas treatment apparatus according to the present invention.

Referring to FIG. 8, the reactor 100 includes a reaction chamber 160 for purifying incoming waste gas, and a heater 170 installed in the reaction chamber 160, wherein the heater 170 includes the reaction chamber 160. It performs the function of the separating part that separates the space in) into two parts. The reactor 100 includes a mixed gas inlet 161 through which the mixed gas is introduced and a purified gas outlet 165 for discharging the purified gas. The purge gas outlet 165 may include a first purge gas outlet 166 positioned at an upper portion of the heater 170, and a second purge gas outlet 167 positioned at a lower portion of the reaction chamber. In addition, the catalyst member 180 may be installed in the heater 170.

By separating the space using the heater 170 in this way, there is an advantage that the configuration can be simplified more than the configuration using a separate separator.

The above embodiments are merely exemplary, and various modifications and equivalent other embodiments are possible to those skilled in the art to which the present invention pertains. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the invention described in the claims.

100: reactor
110, 160: reaction chamber 110a: first space
110b: second space 111, 161: mixed gas inlet
115, 165: purge gas outlet 120, 170: heater
130: separation unit 140, 180: catalyst member
151: fixing plate 155: guide portion
200: ejector
201: Venturi Tube 210: Waste gas inlet
220: circulating gas inlet 230: mixed gas outlet
310: first path 320: second path
330: gas net environment path 340: third path
350: dust collector
400: heat exchanger
510: flow meter 520: temperature sensor

Claims (19)

In the waste gas treatment apparatus for treating the waste gas supplied from the external waste gas source to discharge the purification gas,
A reaction chamber having a mixed gas inlet port and a purification gas outlet port, and configured to purify the waste gas by thermal reaction;
A heater installed in the reaction chamber to heat waste gas introduced into the reaction chamber;
A waste gas inlet provided between the external waste gas source and the reaction chamber, the waste gas inlet through which the waste gas supplied from the external waste gas source flows, and a circulating gas inlet and a waste gas inlet through which a portion of the purge gas discharged from the purge gas outlet flows; An ejector having a mixed gas outlet for discharging the gas introduced through the circulating gas inlet toward the reaction chamber, and preheating the gas introduced through the waste gas inlet by waste heat of the gas introduced through the circulating gas inlet;
A first path connecting the external waste gas source and the waste gas inlet;
A second path connecting between the mixed gas outlet and the mixed gas inlet;
A gas circulating environment path connecting the purge gas discharge port and the circulating gas inlet port to recycle a part of the purge gas discharged from the reaction chamber;
And a third path connected to the purge gas discharge port and discharging the purge gas discharged from the reaction chamber. The method of claim 1,
The purge gas outlet,
A first purge gas outlet formed at an upper portion of the reaction chamber and discharging most of the purge gas to the third path;
And a second purge gas outlet formed at a lower portion of the reaction chamber and discharging a portion of the purge gas to the gas pure environment. The method of claim 2,
And a dust collecting unit installed in the reaction chamber and / or on the gas pure environment furnace, and collecting a by-product generated in a waste gas treatment process. The method of claim 1,
Installed in the reaction chamber,
And a separation unit configured to separate the space in the reaction chamber into a first space in communication with the mixed gas inlet and a second space in communication with the purge gas discharge port. The method of claim 4, wherein
And a catalyst member installed in the second space and purifying the waste gas heated by the heater by a catalytic reduction reaction. The method of claim 1,
And a guide part installed in the reaction chamber, the guide part communicating with the mixed gas inlet and guiding the gas flowing into the reaction chamber while being rotated. The method of claim 1,
The ejector,
And a venturi tube for sucking purge gas into the ejector through the circulating gas inlet by the waste gas flow rate between the waste gas inlet and the mixed gas outlet. The method of claim 1,
The heater,
And a space within the reaction chamber so as to be separated into a first space communicating with the mixed gas inlet and a second space communicating with the purge gas discharge. The method of claim 8,
And a catalyst member installed in the second space and purifying the waste gas heated by the heater by a catalytic reduction reaction. The method according to any one of claims 1 to 9,
And a heat exchanger disposed at a position where the first path and the third path cross each other, and configured to heat a waste gas moving from the waste heat of the purge gas exhausted through the third path to the first path. In the waste gas treatment apparatus for treating the waste gas supplied from the external waste gas source to discharge the purification gas,
A reaction chamber having a mixed gas inlet port and a purge gas outlet, purifying the waste gas introduced by the thermal reaction and discharging the purge gas;
A heater installed in the reaction chamber to heat the waste gas introduced into the reaction chamber;
Including an ejector provided between the external waste gas source and the reaction chamber, a portion of the gas discharged from the reaction chamber is mixed with the waste gas supplied from the external waste gas source to supply to the reaction chamber,
Waste gas treatment apparatus, characterized in that for preheating the waste gas supplied from the external waste gas source by the waste heat of the gas discharged from the reaction chamber. The method of claim 11,
The ejector,
And a venturi tube for sucking a part of the gas discharged from the reaction chamber by the flow rate of the waste gas supplied from the external waste gas source. The method of claim 11,
By connecting between the reaction chamber and the ejector, waste gas treatment apparatus further comprising a gas circulation environment for recirculating a portion of the purge gas discharged from the reaction chamber. The method of claim 13,
The reaction chamber,
A first gas outlet formed at an upper portion of the reaction chamber and discharging most of the purified waste gas;
And a second gas outlet formed under the reaction chamber and discharging a portion of the gas in the reaction chamber to the gaseous environment. The method of claim 14,
And a dust collecting unit installed in the reaction chamber and / or on the gas pure environment furnace, and collecting a by-product generated in a waste gas treatment process. The method of claim 11,
Installed in the reaction chamber, the waste gas treatment further comprises a separation unit for separating the space in the reaction chamber into the first space in communication with the mixed gas inlet and the heater and the second space in communication with the purge gas discharge port Device. The method of claim 11,
The heater,
And a space within the reaction chamber so as to be separated into a first space communicating with the mixed gas inlet and a second space communicating with the purge gas discharge. The method according to claim 16 or 17,
And a catalyst member installed in the second space and purifying the waste gas heated by the heater by a catalytic reduction reaction. The method according to any one of claims 11 to 17,
And a guide part installed in the reaction chamber, the guide part communicating with the mixed gas inlet and guiding the gas flowing into the reaction chamber while being rotated.

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