KR102023950B1 - Apparatus for treating waste gas - Google Patents

Abstract

According to the present invention, disclosed is a waste gas processing apparatus, which processes waste gas supplied from an outer waste gas source and discharges purified gas. The disclosed waste gas processing apparatus includes: a reactor firstly purifying waste gas introduced by heat reaction; and a wet corrosion scrubber secondarily processing the waste gas remaining after being processed in the reactor. The wet corrosion scrubber includes: a wet corrosion processing tank installed on a path through which the gas discharged from the reactor passes and reprocessing the waste gas in a wet corrosion environment; a water tank which stores water therein and in which the water discharged from the wet corrosion processing tank is introduced; and a water injector supplying the water in the water tank to the wet corrosion processing tank and injecting the water into the wet corrosion processing tank.

Description

Waste gas treatment unit {APPARATUS FOR TREATING WASTE GAS}

The present invention relates to a waste gas treatment apparatus, and more particularly, to a waste gas treatment apparatus using a pyrolysis reactor and a wet scrubber.

In general, the electronics industry, which manufactures semiconductors, LEDs, and LCDs, uses various kinds of gases. In the process of depositing a silica (SiO ₂ ) insulating film on a wafer in a semiconductor manufacturing process, a silica insulating film is formed by reacting silane (SiH ₄ ) and nitrous oxide (N ₂ O) gas in a high temperature environment. As a result, silane and nitrous oxide remain after the reaction. Nitrogen trifluoride (NF ₃ ) is also used in the semiconductor cleaning process.

In addition, the amount of nitrous oxide used as an oxidant is on the rise, and nitrous oxide is emitted from adipic acid, caprolactam, and nitric acid production plants.

Nitrous oxide is a gas that destroys the stratospheric ozone layer and causes the greenhouse effect, together with carbon dioxide (CO ₂ ), methane (CH ₄ ), sulfur hexafluoride (SF ₆ ), perfluorocarbons (PFCs), and hydrofluorocarbons (HFCs). It is classified into six greenhouse gases, which must be discharged to the atmosphere after being treated by waste gas treatment equipment.

Waste gas treatment apparatus for treating waste gas containing nitrous oxide is classified into combustion, plasma, pyrolysis method and the like according to the treatment method.

Combustion waste gas treatment system may generate additional nitrogen oxides due to the injection of air for oxidation. Plasma-type waste gas treatment apparatus dissociates waste gas in the form of ions in a high temperature environment, and consumes a lot of energy, such as high energy consumption for plasma generation and frequent maintenance costs such as frequent replacement of electrodes generating plasma. have.

The pyrolysis method is a method of heating the inside of a reactor using an electric heater instead of a burner, and is a method of decomposing waste gas using a catalyst in a high temperature environment. This pyrolysis waste gas treatment system can lower the production of nitrogen compounds and dioxins due to incomplete combustion.

On the other hand, the waste gas treatment device has a problem that the performance is reduced by the particulate by-products generated in the waste gas treatment process. That is, silane (SiH ₄ ) gas, which is one of the waste gases, is decomposed while reacting with oxygen (O ₂ ) in the process, and silicon oxide (SiO ₂ ) is produced. This silicon oxide is a particulate by-product, which is produced in large quantities in the course of treatment and sticks or precipitates inside the reactor, leading to performance degradation.

In view of such a point, Patent Literature 1 discloses a configuration in which a plurality of iron pieces in which powder is accumulated in contact with the exhaust gas is provided in a first space of a horizontal reaction tube in which the exhaust gas primarily stays. In this case, there is a problem that takes a lot of effort and time in the case of finally removing the powder accumulated on the plurality of iron pieces.

Patent Document 2 discloses a powder trap provided on the outside of a scrubber to collect powder. Here, the porous plates arranged up and down inside the powder trap are installed, nitrogen is injected to cool the waste gas into powder agglomerates, and power is applied to the porous plates to adsorb the powder by static electricity. In this case, there is an advantage in that the powder can be easily removed by replacing the external powder trap, but there is a problem in that the powder remains in the reactor and the performance of the reactor is lowered.

In addition, in the waste gas treatment apparatus, untreated waste gas remains in the waste gas treatment process. If this residual waste gas is discharged to the outside without aftertreatment, it may cause environmental pollution.

Republic of Korea Patent Publication No. 10-2004-0037809 Republic of Korea Patent Publication No. 10-2006-0079296

The present invention has been made in view of the above problems, to provide a waste gas treatment apparatus that can minimize the discharge of the waste gas to the outside by secondary removal of the waste gas remaining in the wet atmosphere during the primary treatment of waste gas in one aspect. There is a purpose.

It is another object of the present invention to provide a waste gas treating apparatus which is capable of efficiently removing particulate by-products generated during pyrolysis of waste gas from inside a reactor.

In order to achieve the above objects, the present invention is a waste gas treatment apparatus for treating the waste gas supplied from an external waste gas source to discharge the purified gas, the reactor comprising: a reactor for primarily purifying the waste gas introduced by the thermal reaction; And a wet scrubber for secondarily treating the waste gas remaining after the treatment in the reactor.

Wherein the wet scrubber is installed on a path through which the gas discharged from the reactor passes, and at least one wet treatment tank for reprocessing waste gas in a wet environment; A water tank storing water therein and into which water discharged from the wet treatment tank is introduced; Supplying water in the tank to the wet treatment tank, it may include a water sprayer for spraying water in the wet treatment tank.

The present invention may further include a vortex tube installed in the wet treatment tank and cooling the compressed air input from the outside and supplying the compressed air into the wet treatment tank.

The wet treatment tank includes a first wet treatment tank installed between the reactor and the water tank; It may include a second wet treatment tank for treating the waste gas treated in the first wet treatment tank again.

The water injector is provided between the water tank and the wet treatment tank, and a water supply path for supplying water from the water tank to each of the first and second wet treatment tanks; A supply pump installed on the water supply path and providing a supply power of the water; A supply valve installed on the water supply path and configured to regulate a supply of water; It may be installed in the first and second wet treatment tank, and may include a nozzle for spraying the water supplied through the water supply path.

In addition, the wet scrubber and the water drainage path for draining the water in the tank; A drain pump installed on the water drain path and providing a drainage force of the water; Is installed on the water drainage path, may further include a drain having a drain valve for controlling the drainage of water.

The wet scrubber may further include a preliminary path connecting the water supply path and the water drainage path; It may further include a preliminary valve installed between any one of the water supply path and the water drainage path and the preliminary path to control the supply of water.

In another aspect, the present invention may further include a dry scrubber for tertiarily treating the waste gas remaining after the secondary treatment in the wet scrubber.

In addition, the reactor has a mixed gas inlet and purge gas outlet, the reaction chamber for purifying the waste gas by the thermal reaction; A heater installed in the reaction chamber to heat the waste gas introduced into the reaction chamber; A collecting part installed at a lower end of the reaction chamber to collect particulate byproducts remaining after the waste gas purification; It may include a drop induction guide for guiding the advancing direction of the particulate by-product rising in the direction of the purge gas discharge toward the collecting unit.

In addition, the reactor is installed in the reaction chamber, the separation unit for separating the space in the reaction chamber into the first space in communication with the mixed gas inlet and the heater is installed, and the second space in communication with the purge gas discharge port; ; A catalyst member installed in the second space and further purifying the waste gas heated by the heater by a catalytic reaction may be further included.

Herein, the collecting part includes an uneven portion formed on at least one of the lower inner side wall and the bottom surface of the reaction chamber, and the material of the same component as the particulate by-product is coated or formed in the groove of the uneven portion, so that the cohesion force with the particulate by-product is increased. It can be configured to capture the particulate by-products.

In addition, the particulate by-products have a negative charge, and the collecting part may include an electrode part capable of being collected at the lower end of the reaction chamber by electrical attraction or repulsive force with the particulate by-products.

The reactor may further include a transfer unit installed at a lower end of the reaction chamber and transferring the particulate by-product collected at the lower end of the reaction chamber to the outside of the reaction chamber.

The transfer unit and a drive source for providing a rotational driving force; It is installed at the bottom of the reaction chamber, including a screw ogre to transfer the particulate by-product to the outside of the reaction chamber while rotating by the power provided from the drive source, the particulate by-product collected at the bottom of the reaction chamber to the reaction chamber Transfer it to the collecting container installed outside. Here, the transfer part and the collecting container may be formed in a single cartridge shape, and may be detachably installed with respect to the lower transfer hole of the reaction chamber.

The waste gas treatment apparatus according to the present invention may primarily treat waste gas by a pyrolysis reaction, and may minimize the discharge of waste gas to the outside by secondaryly removing the waste gas remaining in the wet process in a wet atmosphere. Here, the wet scrubber can reduce the condensate by lowering the temperature of the exhaust gas discharged from the wet treatment unit using the vortex tube.

In addition, the present invention by spraying the water provided in the water treatment unit to the wet treatment, it is possible to effectively collect the waste gas while agglomerated with the provided water.

In addition, the present invention further comprises a dry scrubber, by treating the waste gas through a total of three times through the reactor, a wet scrubber and a dry scrubber, it is possible to minimize the remaining waste gas.

In addition, the present invention can efficiently remove the particulate by-products generated during the pyrolysis of the waste gas from the inside of the reactor. That is, by providing a drop induction part in the reaction chamber and directing the advancing direction of the particulate by-product that rises in the direction of the purge gas outlet toward the collecting part provided at the lower end of the reaction chamber, the collection efficiency of the particulate by-product can be improved.

In addition, the present invention includes a catalyst member for purifying the waste gas heated by the heater by the catalytic reaction, it is possible to further improve the waste gas purification performance. In this case, the drop induction part can be installed in the holder supporting the lower end of the catalyst member, so that the drop induction part can be easily installed.

In addition, the present invention includes an uneven portion in the bottom inner wall and / or bottom surface of the reaction chamber in forming the collecting portion, by collecting the material by cohesion with the particulate by-products by forming a material of the same component as the particulate material in the groove of the uneven portion Can improve.

In addition, the present invention may utilize the point that the particulate by-product has a negative charge, it is possible to improve the collection force by the electrical attraction or repulsive force.

In addition, the present invention includes a transfer unit for transferring the particulate by-products collected at the bottom of the reaction chamber to the outside of the reaction chamber, it is possible to discharge the by-products accumulated in the collecting portion to the outside without decomposition of the reaction chamber.

1 is a schematic view showing a waste gas treatment apparatus according to a first embodiment of the present invention.
Figure 2 is a schematic view showing a waste gas treatment apparatus according to a second embodiment of the present invention.
Figure 3 is a schematic view showing a waste gas treatment apparatus according to a third embodiment of the present invention.
Figure 4 is a schematic view showing a waste gas treatment apparatus according to a fourth embodiment of the present invention.
5 is a schematic view showing a waste gas treatment apparatus according to a fifth embodiment of the present invention.
Figure 6 is a schematic cross-sectional view showing a pyrolysis reactor of the waste gas treatment apparatus according to an embodiment of the present invention.
FIG. 7 is a partial perspective view of a portion of the collecting part of the reactor of FIG.
8 is a view showing a particulate by-product attached to the collecting portion of the reactor of FIG.
Figure 9 is a schematic cross-sectional view showing the transfer portion of the reactor of Figure 6;

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like elements throughout the specification.

1 is a schematic cross-sectional view showing a waste gas treatment apparatus according to a first embodiment of the present invention.

Referring to Figure 1, the waste gas treatment apparatus according to the first embodiment of the present invention is to discharge the purification gas by treating the waste gas supplied from the external waste gas source, the reactor for the first purification of the waste gas introduced by the thermal reaction And a wet scrubber 200 for secondarily treating the waste gas remaining after the first treatment in the reactor 100.

The wet scrubber 200 includes at least one wet treatment tank 210, a water tank 220 for storing water therein, and a water sprayer 230 for spraying water into the wet treatment tank 210. The wet treatment tank 210 is installed on a path through which the discharged gas passes after being primarily processed in the reactor 100, and reprocesses the waste gas in a wet environment. The wet treatment tank 210 is a first wet treatment tank 211 installed between the reactor 100 and the water tank 220, and a second wet treatment for further treating the waste gas treated in the first wet treatment tank 211. The treatment tank 215 may be included.

The water tank 220 is installed between the first wet treatment tank 211 and the second wet treatment tank 215, and supplies water to be sprayed to the wet treatment tank 210, the wet treatment tank 210 Intake and store water discharged from The water tank 220 is provided with a water supply port 221 for supplying water, and a water discharge port 225 for discharging water in the water tank 220 to the outside.

The water sprayer 230 receives the water in the water tank 220 and sprays the wet treatment tank 210. The water sprayer 230 is a water supply path 231, a supply pump 233, a supply valve 235, and a nozzle 237 installed between the water supply port 221 and the wet treatment tank 210 of the water tank 220. ).

The water supply path 231 is a path for supplying the water supplied from the water tank 220 into the first and second wet treatment tanks 211 and 215, respectively. The supply pump 233 is installed on the water supply path 231 and provides a supply force of water so that water is supplied through the water supply path 231. The supply valve 235 is installed on the water supply path 231, and is controlled to be opened and closed by a control signal input from a controller (not shown) to adjust the supply of water supplied through the water supply path 231. The nozzle 237 is installed in the first and second wet treatment tanks 211 and 215, and sprays the water supplied through the water supply path 231 into the wet treatment tank 210. Therefore, since the wet environment is formed in the wet treatment tank 210, the waste gas remaining after being first removed from the reactor 100 is aggregated or washed by the injected water. Accordingly, by the secondary purification, the waste gas remaining after the treatment in the reactor can be prevented from being discharged to the outside in an unpurified state as it is, and the purified gas FG after the secondary purification can be discharged to the atmosphere. .

The wet scrubber 200 may further include a drainer 240 installed at the water outlet 225 of the water tank 220 to discharge the wastewater to the outside (D) after use. The drainer 240 may include a water drainage path 241 for draining the water in the water tank 220, a drain pump 243, and a drain valve 245. The drain pump 243 is installed on the water drainage path 241, and provides a drainage force of the water so that water is discharged to the outside through the water drainage path 241. The drain valve 245 is installed on the water drain path 241 and is controlled to open and close by a control signal input from a controller (not shown) to adjust the drainage of water.

The reactor 100 is to purify the waste gas (WG) introduced by the thermal reaction, the reaction chamber 110, the heater 120, the collecting unit 130 and the drop installed in the reaction chamber 110 Induction part 140 is included. Detailed description of the reactor 100 will be described later with reference to FIGS. 6 to 9.

The waste gas treating apparatus according to the first embodiment configured as described above may primarily treat waste gas by a pyrolysis reaction, and remove waste gas remaining in the wet process in a wet atmosphere to minimize the discharge of waste gas to the outside. Can be.

2 is a schematic cross-sectional view showing a waste gas treatment apparatus according to a second embodiment of the present invention.

Referring to FIG. 2, the waste gas treating apparatus according to the second exemplary embodiment of the present invention includes a reactor 100 for primarily purifying waste gas introduced by a thermal reaction and remaining after the first treatment in the reactor 100. The wet scrubber 200 for treating the waste gas to the secondary and the dry scrubber 300 for the third treatment of the waste gas remaining after the secondary treatment in the wet scrubber 200.

In the waste gas treating apparatus according to the present embodiment, other components other than the dry scrubber 300 perform substantially the same configuration and function as the components using the same reference numerals of the waste gas treating apparatus according to the first embodiment. . Therefore, detailed description of these configurations will be omitted.

The dry scrubber 300 may have a structure capable of combustion or adsorption treatment. For example, in the case of the combustion dry scrubber, the waste gas is burned by direct heating or indirect heating in a combustion tank to pyrolyze harmful components. When constituting the adsorption dry scrubber, the adsorbent is filled in the scrubber and the waste gas is passed therein, whereby the harmful component can be adsorbed and removed by the reaction between the harmful component and the adsorbent. Here, the adsorbents include inorganic adsorbents such as zeolite, alumina, slaked lime and alumina silicate, activated carbon, and inorganic adsorbents. Various kinds such as impregnated activated carbon may be used, and two or more kinds of adsorbents may be used as necessary.

The waste gas treating apparatus according to the second embodiment further includes a dry scrubber configured as described above, thereby treating waste gas three times, thereby minimizing waste gas remaining after purification.

3 is a schematic view showing a waste gas treatment apparatus according to a third embodiment of the present invention.

Referring to FIG. 3, the waste gas treating apparatus according to the third embodiment of the present invention includes a reactor 100 for primarily purifying waste gas introduced by a thermal reaction, and remaining after the first treatment in the reactor 100. It includes a wet scrubber 200 for secondary treatment of the waste gas. In addition, the wet scrubber 200 includes at least one wet treatment tank 210, a water tank 220 for storing water therein, a water sprayer 230 for spraying water into the wet treatment tank 210, and a vortex tube (vortex). tube) 250.

In the waste gas treating apparatus according to the present embodiment, other components other than the vortex tube 250 perform substantially the same configuration and function as the components using the same reference numerals of the waste gas treating apparatus according to the first embodiment. . Therefore, detailed description of these configurations will be omitted.

The vortex tube 250 is installed in the wet treatment tank 200 and cools the compressed air A input from the outside and supplies the vortex tube 250 into the wet treatment tank 200. In FIG. 3, the vortex tube 250 is installed in the second wet treatment tank 215 as an example. However, this is merely an example and may be installed in the first wet treatment tank 211.

The vortex tube 250 is composed of a tube body 251 having a rotating chamber in which vortices are generated. The tube main body 251 has a compressed air inlet 253 through which compressed air is introduced, a warm air outlet 255 through which warm air separated by a predetermined cooling principle is discharged, and a cold air outlet through which the separated cold air is discharged 257. ) Is formed.

The cooling principle of the vortex tube 250 will be described. When the compressed air (A) is injected into the tube body 251 through the compressed air inlet 253, the compressed air is injected into the rotating chamber that generates the vortex, that is, the vortex. At this time, the air in the rotating chamber is rotated at very high speed (for example, several hundred thousand RPM to millions of RPM). The rotary air (primary vortex) is directed toward the warm air outlet 255, some of which are discharged through the warm air outlet 255, the remaining air is returned to form the secondary vortex toward the cold air outlet 257 Proceed. This secondary vortex flow is formed through the inside of the primary vortex flow. That is, the secondary vortex is cooled while losing heat while passing through a region having a lower pressure than the primary vortex, and is discharged through the cold air outlet 257. That is, in the flow of the first and second vortices rotating at the same angular velocity, the air particles of the inner flow (second vortex) have the same rotational time as the air particles of the outer flow (first vortex), so that the actual motion The speed is slower than the outer flow. This difference in speed means that the kinetic energy has decreased. This reduced kinetic energy is converted into thermal energy, which raises the temperature of the first vortex and lowers the temperature of the second vortex.

By providing the vortex tube 250 as described above, the internal temperature of the wet processing unit 210 may be lowered. Therefore, by lowering the temperature of the exhaust gas discharged from the wet processing unit 210, it is possible to reduce the generation of condensed water.

4 is a schematic view showing a waste gas treatment apparatus according to a fourth embodiment of the present invention.

Referring to FIG. 4, the waste gas treating apparatus according to the fourth embodiment of the present invention includes a reactor 100 for primarily purifying waste gas introduced by a thermal reaction, and remaining after the first treatment in the reactor 100. It includes a wet scrubber 200 for secondary treatment of the waste gas. In addition, the wet scrubber 200 includes at least one wet treatment tank 210, a water tank 220 for storing water therein, a water sprayer 230 for spraying water into the wet treatment tank 210, and a preliminary water supply unit ( 270). In addition, the waste gas treatment apparatus according to the present embodiment may include a vortex tube 250 installed in the wet treatment tank 200.

In the waste gas treatment apparatus according to the present embodiment, the configuration other than the preliminary water supply unit 270 is substantially the same configuration and function as the components using the same reference numerals of the waste gas treatment apparatus according to the first to third embodiments. Do this. Therefore, detailed description of these configurations will be omitted. The preliminary water supply unit 270 includes a preliminary path 271 and a preliminary valve 273. The preliminary path 271 is a path connecting the water supply path 231 and the water drainage path 241. The preliminary path 271 is a path for injecting water in the water tank 220 through the water drainage path 241 in an emergency situation such as a failure of the supply pump 233 and / or the supply valve 235. The preliminary valve 273 is installed between any one of the water supply path 231 and the water drainage path 241 and the preliminary path 271 to regulate the supply of water.

4 illustrates that the preliminary valve 273 is installed at a portion where the water drainage path 241 and the preliminary path 271 are connected.

Referring to FIG. 4, when the water sprayer 230 does not operate normally due to a failure of the supply pump 233 and / or the supply valve 235, in order to supply emergency water to the nozzle 237, the drain valve 245 is provided. The drainage pump 243 operates in the opened state. At this time, the preliminary valve 273 is opened so that the water drainage path 241 communicates with the preliminary path 271, and communication with the outside is blocked. Therefore, the water moving through the water drainage path 241 is supplied to the nozzle 237 through the preliminary path 271 and the nozzle side water supply path 231. Therefore, even in an emergency, water may be injected into the wet treatment tank 210 through the nozzle 237.

On the other hand, in the normal operation or drainage operation, the preliminary valve 273 is arranged such that the water drainage path 241 communicates with the outside, and communication in the direction of the preliminary path 271 is blocked.

By including the preliminary water supply unit 270 as described above, even when the supply pump 233 and / or the supply valve 235 fails, water can be supplied to the nozzle 237 normally.

5 is a schematic view showing a waste gas treatment apparatus according to a fifth embodiment of the present invention.

Referring to FIG. 5, the waste gas treating apparatus according to the fifth embodiment of the present invention includes a reactor 100 for primarily purifying waste gas introduced by a thermal reaction and remaining after the first treatment in the reactor 100. It includes a wet scrubber 200 for secondary treatment of the waste gas. In addition, the wet scrubber 200 has at least one wet treatment tank 210, a water tank 220 for storing water therein, a water sprayer 230 for spraying water in the wet treatment tank 210 and preventing the connection pipe clogging. A portion 290 is included. In addition, the waste gas treatment apparatus according to the present embodiment may include a vortex tube 250 and / or a preliminary water supply unit 270 installed in the wet treatment tank 200. In the waste gas treating apparatus according to the present embodiment, the configuration other than the connection pipe blockage preventing unit 290 is substantially the same as the component using the same reference numerals of the waste gas treating apparatus according to the first to fourth embodiments. And perform a function. Therefore, detailed description of these configurations will be omitted.

The connection pipe blockage preventing unit 290 prevents the bent connection pipe 280 installed between the reactor 100 and the wet scrubber 200 by the waste gas being transported. To this end, the connector clogging prevention portion 290 is the air flow portion 281 formed on the inner wall of the connection pipe 280 and the air to inject the compressed air (A) supplied from the outside into the air flow portion 281 Injection path 291. The connection pipe 280 is provided with an air inlet 283 and an air outlet 285 communicating with the air flow unit 281. Therefore, the compressed air moving along the air injection path 291 is injected into the air flow unit 281 through the air inlet 283, the injected air in the connection pipe 280 along the air flow unit 281 Move toward the air outlet 285. In this case, by injecting air into the inner wall of the connection pipe 280 through the air flow unit 281, it is possible to prevent the waste gas transported through the connection pipe 280 to stick to the connection pipe 280. Here, the air discharged through the air outlet 285 may be injected into the reactor through the air movement path (295).

6 to 9, the reactor of the pyrolysis method of the waste gas treatment apparatus according to an embodiment of the present invention will be described in detail.

Figure 6 is a schematic cross-sectional view showing a pyrolysis reactor of the waste gas treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 6, the reactor 100 primarily purifies waste gas supplied from an external waste gas source by a thermal reaction, and includes a reaction chamber 110 for purifying incoming waste gas, and the reaction chamber 110. And a heater 120 installed therein, a collecting unit 117 for collecting particulate by-products remaining in the reaction chamber 110 after the waste gas purification, and a drop inducing unit 1140 for changing the moving direction of the particulate by-products.

The reaction chamber 110 includes a mixed gas inlet 111 through which the mixed gas exhausted in the pretreatment process is introduced, and a purification gas outlet 113 for discharging the purified gas. Here, as shown in FIG. 6, each of the mixed gas inlet 111 and the purification gas outlet 113 is installed at an upper portion of the reaction chamber 110.
The reaction chamber 110 may be separated into a first space A1 and a second space A2 by a separation unit 115 installed therein. The first space A1 communicates with the mixed gas inlet 111 and a heater 120 is installed therein. The heater 120 heats the gas introduced into the first space A1 to a high temperature, thereby allowing the waste gas to be decomposed by the thermal reaction. The second space A2 is a space in which the treated waste gas WG is separated and discharged as a space communicating with the purification gas discharge port 113.

The collecting unit 117 is installed at the lower end of the reaction chamber 110, and collects particulate by-products such as silicon oxide (SiO 2) generated during decomposition of waste gas by thermal reaction. The collecting part 117 may be integrally formed at the lower end of the reaction chamber 110.

The drop induction part 130 is installed at a predetermined position in the second space A2, and at least a part of particulate by-products rising in the direction of the purge gas outlet 113 through the second space A2 is collected in the collecting part 117. Guide them back towards you. To this end, the drop induction part 130 may include at least one guide part 131.

In addition, the present invention may further include a catalyst member 140 installed in the second space A2 and purifying the waste gas heated by the heater 120 by a catalytic reaction. The catalyst member 140 may be installed above the drop induction part 130 of the second space A2, and a catalyst carrier 141 and a holder for fixing the catalyst carrier 141 in the reaction chamber 110. 145.

The catalyst member 140 may be composed of a reduction catalyst or an oxidation catalyst having high corrosion resistance to fluorine compounds. By further including the catalyst member 140, the gas decomposition temperature can be lowered, and by-products generated during waste gas treatment can be minimized. In addition, according to the present invention, by using an electric heater as the heater 120 and applying a reduction catalyst or an oxidation catalyst, the waste gas may be treated by a flameless reduction catalyst or an oxidation catalyst reaction. Accordingly, the waste gases including nitrous oxide, silane, and nitrogen trifluoride used in the deposition process of the electronics industry can be integrated, and at least 90% of these waste gases can be removed. Here, in the case of further including the catalyst member 140 without the installation of the drop induction unit 130, the particulate by-products are blocked while passing through the catalyst member 140 to block the passage in the catalyst member 140. Accordingly, the life of the catalyst member 140 can be shortened. On the other hand, when the drop induction unit 130 is provided at the lower end of the catalyst member 140, that is, the holder 145, as in the embodiment of the present invention, the catalyst member 140 after the first filtering by the drop induction unit 130 By permeating through, the clogging problem of the catalyst member 140 can be alleviated.

In addition, the collecting unit 117 may include an electrode unit 160 to be collected at the lower end of the reaction chamber 110 by electrical attraction or repulsive force with particulate by-products. Here, the electrode unit 160 may collect the particulate byproduct P in the lower end of the reaction chamber 110, that is, the collecting unit 117, by electrical attraction or repulsive force with the particulate byproduct P. That is, the particulate by-product has a negative (-) charge on the property, the polarity of the electrode unit 160 can be both positive (+) or negative (-). For example, the electrode unit 160 may be formed of a positive electrode having a positive polarity. In this case, by attracting the particulate by-product P by the electrical attraction, it is possible to suppress the scattering of the particulate by-product P and to collect it into the collecting unit 117. On the other hand, the mounting position of the electrode unit 160 may be installed not only on the inner wall of the collecting unit 117 as shown in FIG. 6, but also on the inner wall of the reaction chamber 110 of the upper end of the collecting unit 117. It is possible. In this case, the electrode unit 160 may be formed as a negative (-) electrode, and by the electric repulsive force, it may be to move the particulate by-product (P) having a polarity in the direction of the collecting unit 117. By further including the electrode unit, the present invention can improve the collection force by the electric attraction or repulsive force.

In addition, the present invention is installed at the lower end of the reaction chamber 110, and further includes a transfer unit 170 for transporting the particulate by-product (P) collected at the lower end of the reaction chamber 110 to the outside of the reaction chamber 110. can do. This transfer unit 170 will be described later with reference to FIG.

7 is a partial perspective view showing a part of the collecting portion of the waste gas treatment apparatus according to an embodiment of the present invention, Figure 8 is a particulate by-product attached to the collecting portion of the waste gas treatment apparatus according to an embodiment of the present invention Drawing.

7 and 8, the collecting unit 117 of the waste gas treating apparatus according to the embodiment of the present invention may include a plurality of uneven parts 150 formed on at least one of the lower inner side wall and the bottom of the reaction chamber. Can be. The groove (1groove) of the concave-convex portion 150 may be kept in an open state without any other configuration. In this case, the contact area with the particulate by-products in the collecting portion 117 may be relatively increased, thereby increasing the collection probability. Can be. FIG. 7 illustrates that the uneven portion 150 includes grooves having a right-angled shape as an example, which is exemplary, and the width of the grooves and the shape of the sidewalls may be variously modified. For example, the formation of the side walls can be modified into inclined surfaces, curved shapes, and the like.

In addition, the material 155 having the same component as the particulate byproduct may be coated or formed in the groove of the uneven portion. In this case, the collection efficiency of the particulate by-products may be further improved by the cohesion between the particulate by-products and the material 155. That is, as shown in FIG. 8, particulate byproduct P may be collected around the material 155. Thus collected foreign matter can be removed by using a scraper, etc. in the decomposition and cleaning of the reaction chamber, in this case, since most of the material 155 located in the groove of the uneven portion 150 is not removed, the same effect when repeated use Can make

9 is a schematic cross-sectional view showing a transfer unit of a waste gas treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 9, the transfer unit 170 transfers the particulate by-product 1P collected at the lower end of the reaction chamber 110, that is, the collecting unit 117, to a collecting container 1T installed outside the reaction chamber. To this end, the transfer unit 170 includes a drive source 173 and a screw ogre 175 to provide a rotational driving force. The screw ogre 175 is installed at the bottom of the reaction chamber, and rotates by the power provided from the driving source 175 to transfer the particulate by-product P to the outside of the reaction chamber 117. In addition, the transfer unit 170 may be formed in the form of a single cartridge 171 including the collecting container (T). The cartridge 171 may be detachably installed at the transfer hole 117a formed at the lower end of the reaction chamber 117. To this end, an installation guide part 117b in which the cartridge 171 is slidably installed may be installed at the lower end of the reaction chamber 117. The cartridge 171 has an open position corresponding to the transfer hole 117a, and may include a cartridge mounting portion 171a that is slidably coupled to the installation guide portion 117b. In this case, when the collecting container 1T is full, the cartridge 171 can be removed from the reaction chamber 117 and then remounted after the contents are removed, or it can be easily replaced with a new cartridge.

As described above, by including a transfer unit for transferring the particulate by-products collected at the bottom of the reaction chamber to the outside of the reaction chamber, it is possible to discharge the by-products accumulated in the collecting unit to the outside without decomposition of the reaction chamber.

The above embodiments are merely exemplary, and various modifications and equivalent other embodiments are possible to those skilled in the art to which the present invention pertains. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the invention described in the claims.

100: reactor 110: reaction chamber
111: mixed gas inlet 113: purge gas outlet
115: separator 117: collector
120: heater 130: drop induction part
131: guide portion 140: catalyst member
141: catalyst carrier 145: holder
150: uneven portion 160: electrode portion
170: transfer unit 171: cartridge
173: drive source 175: screw ogre
200: wet scrubber 210: wet treatment tank
211: first wet treatment tank 215: second wet treatment tank
220: water tank 221: water supply port
225: water outlet 230: water sprayer
231: water supply path 233: supply pump
235: supply valve 237: nozzle
240: drainer 241: water drainage path
243: drain pump 245: drain valve
250: Vortex tube 251: tube body
253: compressed air inlet 255: warmth outlet
257: cold air outlet 270: spare water supply
273: preliminary valve 280: connector
281: air flow part 283: air inlet
285: air outlet 290: connector clogging prevention
291: air injection path 295: air movement path
300: dry scrubber

Claims (14)

In the waste gas treatment apparatus for treating the waste gas supplied from the external waste gas source to discharge the purification gas,
A reactor for firstly purifying the waste gas introduced by the thermal reaction;
It comprises a wet scrubber for secondary treatment of the waste gas remaining after the treatment in the reactor,
The reactor,
A reaction chamber for purifying the waste gas by thermal reaction, the reaction chamber having a mixed gas inlet and a purification gas outlet formed at an upper portion thereof;
A heater installed in the reaction chamber to heat the waste gas introduced into the reaction chamber;
A collecting part installed at a lower end of the reaction chamber to collect particulate byproducts remaining after the waste gas purification;
Installed in the reaction chamber, located between the collecting unit and the purge gas discharge port, and includes a drop induction guide for guiding at least a portion of the particulate by-product that rises in the direction of the purge gas discharge back to the collecting unit direction and,
The wet scrubber,
At least one wet treatment tank installed on a path through which the gas discharged from the reactor passes and reprocessing the waste gas in a wet environment;
A water tank storing water therein and into which water discharged from the wet treatment tank is introduced;
And a water injector for supplying water in the water tank to the wet treatment tank and injecting water into the wet treatment tank. The method of claim 1, wherein the wet scrubber,
Installed in the wet treatment tank, and further comprises a vortex tube for cooling the compressed air input from the outside to supply in the wet treatment tank. The method of claim 1, wherein the wet treatment tank,
A first wet treatment tank disposed between the reactor and the water tank;
And a second wet treatment tank for treating the waste gas treated in the first wet treatment tank again. The water sprayer of claim 3, wherein
A water supply path disposed between the water tank and the wet treatment tank and supplying water to the inside of the first and second wet treatment tanks from the water tank;
A supply pump installed on the water supply path and providing a supply power of the water;
A supply valve installed on the water supply path and configured to regulate a supply of water;
Installed in the first and the second wet treatment tank, characterized in that it comprises a nozzle for injecting water supplied through the water supply path. The method of claim 4, wherein the wet scrubber,
A water drainage path for draining the water in the tank;
A drain pump installed on the water drain path and providing a drainage force of the water;
It is installed on the water drainage path, waste gas treatment apparatus further comprising a drain having a drain valve for controlling the drainage of water. The method of claim 5, wherein the wet scrubber,
A preliminary path connecting the water supply path and the water drainage path;
And a preliminary valve installed between any one of the water supply path and the water drainage path and the preliminary path to control the supply of water. The method according to any one of claims 1 to 6,
Waste gas treatment apparatus further comprises a dry scrubber for tertiarily treating the waste gas remaining after the secondary treatment in the wet scrubber. delete The method of claim 1, wherein the reactor,
A separation unit installed in the reaction chamber and separating a space in the reaction chamber into a first space communicating with the mixed gas inlet and installed with the heater, and a second space communicating with the purge gas outlet;
And a catalyst member installed in the second space and configured to purify the waste gas heated by the heater by a catalytic reaction. The method of claim 1, wherein the collecting unit,
It includes an uneven portion formed on at least one of the lower inner side wall and the bottom surface of the reaction chamber,
The material of the same component as the particulate byproduct is coated or formed in the groove of the uneven portion, so that the particulate byproduct can be collected by the cohesive force with the particulate byproduct. The method of claim 1,
The particulate byproduct has a negative charge,
The collecting unit,
And an electrode part configured to be collected at the lower end of the reaction chamber by electrical attraction or repulsive force with the particulate by-products. The method of claim 1, wherein the reactor,
The waste gas treatment apparatus is installed at the lower end of the reaction chamber, the transfer unit for transferring the particulate by-products collected at the lower end of the reaction chamber to the outside of the reaction chamber. The method of claim 12, wherein the transfer unit,
A drive source for providing a rotational driving force;
It is installed at the bottom of the reaction chamber, including a screw ogre to transfer the particulate by-product to the outside of the reaction chamber while rotating by the power provided from the drive source,
Waste gas treatment apparatus characterized in that the transfer of the particulate by-product collected at the lower end of the reaction chamber to a collecting vessel provided outside the reaction chamber. The method of claim 13,
The transfer unit and the collecting container is formed in the form of a single cartridge, waste gas processing apparatus, characterized in that detachably installed with respect to the lower transfer port of the reaction chamber.

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