KR20190099736A - Clamping device capable of maintaining adsorption to deposition material - Google Patents

Abstract

Disclosed is a clamp device capable of maintaining adsorption. According to the present invention, the clamp device capable of maintaining adsorption is used to fix glass for display panel manufacture allowing deposition to be performed on one surface thereof on a transport frame, and comprises: a fixed unit fixed in the transport frame; an operating lever wherein a vertical unit on one end thereof is hinged on the fixed unit by a shaft pin to relatively rotate with respect to the fixed unit; a separable adsorption-maintaining lever detachably coupled to an upper portion of the vertical unit to expose a portion thereof through an operating hole of the transport frame to rotate with the vertical unit, and provided with a gripper unit on one end thereof to press and fix or release glass; and a magnet unit to rotate the gripper in a fixing direction by an action of a magnetic force. According to the present invention, the adsorption-maintaining lever for fixing glass supplied to a sputtering process for deposition during a manufacturing process of a display panel such as LCD or OLED on the transport frame is conveniently detached at the outside to quickly and easily perform maintenance and management such as washing and separation for removal of an attached deposition material at low costs. An embossing unit increasing an outer surface area is arranged on the exposed adsorption-maintaining lever to deposit and retain a large quantity of the deposition material and reduce separation of the deposited deposition material to improve the yield of the display panel.

Description

Adsorption holding clamp device {CLAMPING DEVICE CAPABLE OF MAINTAINING ADSORPTION TO DEPOSITION MATERIAL}

The present invention relates to an adsorption holding clamp device, and more particularly, to separate a gripper portion for fixing a glass, which is injected into a sputtering process, for deposition in a manufacturing process of a display panel such as an LCD or an OLED to a transfer frame. The present invention relates to a clamp device capable of stably maintaining a state of adsorption of deposits on a gripper portion.

FIG. 7A illustrates a state in which a panel glass such as an LCD is fixed to a transport frame, and FIG. 7B illustrates a conventional clamp device used to fix a panel glass such as an LCD.

Glass 1 used for manufacturing a panel such as an LCD is transported in a fixed state to the transfer frame 2, and various processes proceed sequentially. For example, in the sputtering process of depositing a metal thin film on the glass 1, the glass 1 is fixed to the transfer frame 2 in a vertical or vertical state and flows into the sputtering chamber.

In this case, as shown in Figure 7a, the transport frame 2 is a member made of a square frame so that the edge portion of the glass 1 is supported and fixed as a glass through a plurality of clamp devices (3) spaced apart along the square frame (1) is firmly fixed to the transfer frame (2).

The conventional clamping device 3 shown in FIG. 7B has a flat plate 4 fixed to the conveying frame 2, an L-shaped lever 5 that is rotated by an external force, and a torsion spring connected to apply elasticity to the L-shaped lever ( 6). The torsion spring 6 applies an elastic force in a direction opposite to the rotation direction as the lever 5 rotates at a predetermined angle about the plate and presses the edge of the glass 1 by the elastic force to the glass to the transfer frame 2. (1) is fixed.

However, when the clamp device 3 of the type shown in FIG. 7B is used, particles (metal powder) are easily generated due to contact friction caused by the operation of the torsion spring 6 and the rotating shaft. In particular, the process, in particular, sputtering process adversely affects the deposition quality, which acts as a problem of significantly lowering the yield.

In addition, since the upper end of the lever 5 to pressurize and fix the glass 1 is exposed to the space during the deposition process through the sputtering chamber due to protruding with the glass 1, the deposit is exposed to the upper end of the lever 5. There was a problem of being seated on the flat plate 4 below as well as around.

Particularly, in the sputtering process, the second process in which the material deposited by the first process is sequentially repeated, as well as weakening the physical properties of the lever 5 itself due to the fact that a chemically strong material is mainly used as a deposit. It affects the back and acts as a particle for the panel glass 1, such as LCD, thereby reducing the yield.

In order to solve such a problem, regular maintenance work on the clamp device 3 is being performed, but in the case of the conventional clamp device 3, the entire body is separated from the transfer frame 2 to be washed with a cylinder or the clamp device 3 ) Dismantles and removes only the lever 5, which is a single part, and then washes it, resulting in excessive maintenance, which inevitably leads to an increase in costs.

In addition, the operating hole formed in the transfer frame for the rotation operation in which the lever 5 fixes and releases the glass 1 is not particularly shielded and is in communication with the flat plate 4 inside the transfer frame 2 so that sputtering There was a problem in that deposits or particles in the process penetrate and degrade durability of the component.

An object of the present invention is to easily separate only the parts exposed to the deposit during the sputtering process of the clamp device configuration to enable efficient and rapid maintenance, while laminating the exposed parts and the like in the process of performing the repetitive process sequentially It is to provide an adsorption-holding clamp device that allows the adhesion is carried out in a long cycle rather than a short cycle by allowing a large amount of deposits to be attached while preventing the deposited deposit is to act as a particle in the next process.

The object of the present invention is a clamp device used to fix a display panel manufacturing glass, which is deposited on one surface, to a transport frame, the fixing part being fixed to the inside of the transport frame; An operating lever hinged to the fixed part by a shaft pin such that a vertical part provided at one end thereof rotates relative to the fixed part; The detachable suction oil retainer is detachably coupled to the upper portion of the vertical portion to expose a portion through the operation hole of the transfer frame, and rotates together with the vertical portion, and has a gripper at one end thereof to fix or release the glass. lever; And a magnet portion for rotating the gripper in a fixed direction by the action of a magnetic force.

The suction holding lever may include: an exposed body having a gripper detachably coupled to one end thereof, a part of which is exposed to the outside through the operation hole, and a lever detachable part detachably coupled to the vertical part at the other end thereof; And an embossing part in which irregularities are repeatedly protruded on the surface of the exposed body to increase the adsorption area for a large amount of deposits and prevent peeling of the adsorbed deposits.

The lever detachable portion is in contact with the upper surface of the vertical portion at the bottom of the operating hole in a bent form with respect to the exposed body, is penetrated in the vertical direction by a removable bolt introduced through the operating hole and detachable to the vertical portion Can be.

On the upper surface of the vertical portion and the lower surface of the lever detachable portion, a rail groove and a rail protrusion complementary to each other are formed, and on one exposed side of the exposed body, prevents deposits from penetrating into the transfer frame. In order to be able to rotate, the rotation blocking plate is configured to cover the upper portion of the operating hole while rotating in a limited angle range with respect to the exposed body.

The magnet part is coupled to the other end of the operating lever so that the attraction force between the magnet and the magnet is generated in the receiving space provided inside the fixing portion and the magnet to rotate the gripper in a fixed direction It includes a magnet plate, at least one of the fixing portion and the operating lever, may further include a magnetic force control unit for varying the magnetic force at various intensities according to the glass.

The magnetic force control unit, made of a plate-like ferromagnetic material to strengthen the magnetic force of the magnet, is selectively attached to the outer surface of the magnet, consisting of at least one magnetic amplification member configured to be accommodated with the magnet in the receiving space Can be.

The magnetic force control unit includes a fastening part selectively detachably coupled to the other end of the operating lever, and an attractive force working part which is formed to extend to have different lengths from the fastening part, respectively, so that the attraction force by the magnet acts differently. It may be composed of a plurality of the magnet plate.

The magnetic force control unit, a fastening portion selectively detachably coupled to the other end of the operation lever, and a manpower action portion extending from the fastening portion so that the attraction force by the magnet acts, the fastening portion and the attraction force operation portion It may be composed of the magnet plate including a length adjusting unit for stretching the length of the liver.

The length adjustment unit, the sliding bar consisting of a length bar protruding from any one of the fastening portion and the attraction action portion, and the engaging bar formed to extend left and right at the end of the length bar; And a length groove formed in the other one of the fastening portion and the attraction action portion so that the length bar is inserted to move along the length direction of the magnet plate, and formed to communicate with the length groove to guide the movement of the locking bar. It may include a sliding groove is configured.

According to the present invention, the adsorption holding lever for fixing the glass to the transfer frame for the deposition during the manufacturing process of the display panel such as LCD or OLED is easily detached from the outside, the separation for removal of the deposited deposits And maintenance, such as cleaning, can be carried out quickly and easily at low cost, and a large amount of deposits can be deposited and maintained as the exposed adsorption holding lever is provided with an increased external surface area, while peeling off the deposited deposits. The phenomenon can be reduced, so that the yield of the display panel can be improved.

In addition, the magnetic force control unit can be used to universally fix the glass to the transfer frame under optimum conditions without fear of positional deviation or damage, regardless of the type of glass, and by the magnetic force control unit corresponding to the glass to be changed Fast and easy magnetic control can be expected to increase productivity as the downtime of the manufacturing process is minimized.

Figure 1a and Figure 1b is a perspective view of the suction holding clamp device according to an embodiment of the present invention from the top and bottom, respectively.
FIG. 2 is an exploded perspective view of FIG. 1B. FIG.
3 is a view showing an operating state and a bush, respectively, the suction holding clamp device of FIG.
Figure 4 is a test picture of measuring the pressing fixed force (intensity of the magnetic force) that is changed in accordance with the replacement of the magnet plate (magnetic control unit) of different lengths shown in FIG.
5 is a perspective view and a partially exploded perspective view showing a suction holding clamp device according to a modification of the present invention, respectively.
Figure 6 is a state diagram showing the operation of each of the magnetic force control portion implemented by the magnetic plate having a length adjustment portion of Figure 5 (a).
7a and 7b is a view showing a conventional clamp device and a transfer frame for fixing the glass for the panel, such as LCD.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, in describing the present invention, descriptions of already known functions or configurations will be omitted to clarify the gist of the present invention.

Figure 1a and Figure 1b is a perspective view of the suction holding clamp device according to an embodiment of the present invention from the top and bottom, respectively, Figure 2 is an exploded perspective view of Figure 1b, Figure 3 is a suction holding clamp device of Figure 1a transfer frame Figure 2 is a view showing the operating state and the bush to be fixed to the glass is installed in, Figure 4 is a fixed pressing force (magnetic strength) that is changed according to the replacement of the magnet plate (magnetic control unit) of different length shown in FIG. 5 is a test photograph measured respectively, Figure 5 is a perspective view and a partially exploded perspective view showing a suction holding clamp device according to a modification of the present invention, respectively, Figure 6 is implemented as a magnet plate having a length adjusting part of Figure 5 (a) Figure 7a and Figure 7b is a state diagram showing the operation of each of the magnetic force control to distinguish the operation, Figure 7a and 7b is a view showing a conventional clamp device and a transfer frame for fixing the glass for the panel, such as LCD A.

Top (top), bottom (bottom), left and right (side or side), front (front, front), back (fold, back), etc., which refer to directions in the description of the invention and claims, etc., are not intended to limit the right. For convenience of explanation, the relative positions between the drawings and the configurations are set as a reference, and each direction described below is based on this, except where specifically defined otherwise.

Adsorptive maintenance clamp device 100 according to the present invention, such as the separation and cleaning for the removal of the deposits attached to the components exposed to the deposition process is made quickly and easily at low cost, relatively large amount of deposits The present invention has been made to reduce the peeling phenomenon of the stacked deposits while stably permitting and maintaining the stack and to improve the yield of the display panel.

Adsorption holding clamp device 100 as described above, in manufacturing a display panel such as LCD or OLED, coupled to the transfer frame (2) to move between processes in a state that accommodates the glass (1) is deposited on one side of the glass It will perform the function of firmly fixing (1).

Here, the transfer frame (2) is formed in a generally rectangular shape, such as to move between the process in parallel with the horizontal plane or vertical plane as needed, a plurality of adsorption holding clamp device 100 installed along the rectangular frame is transferred The edge of the glass 1 supported by the support 2a inside the frame 2 is fixed by pressing with a predetermined pressing force (see FIG. 7A).

In order to implement the functions or functions as described above, the suction holding clamp device 100 according to the embodiment and the modification of the present invention, as shown in Figures 1a to 6, the fixing unit 110, the operating lever ( 120, the suction holding lever 160, the magnet 130, the magnetic force adjusting unit 140, and the bush 150 may be configured.

Hereinafter, each configuration described above will be described in more detail.

First, the fixing unit 110 is a component fixed to the inside of the transfer frame 2, as shown in Figure 1a to 2, the internal storage of the magnet 132 to be described later and the magnetic force change of the magnet 132 For example, the fixing body 112 and a cover 114 selectively detachably coupled thereto may be configured to form an accommodation space 111 therein.

At this time, the fixing body 112 is a component that is penetrated by a predetermined coupling means (bolts, etc.) to be tightly fixed to the conveying frame 2, and is penetrated by the shaft pin 121 to be described later for the operation lever 120. The first pin penetrating portion 116 to enable relative rotation of the fixed body 112 may be integrally formed at one end thereof.

The cover 114 is a component that is penetrated by a predetermined coupling means (such as a bolt) and coupled to the bottom surface of the fixed body 112, and is accommodated therebetween in a state in which the cover 114 is coupled to the fixed body 112. The space 111 is formed, and the magnet 132 and the plurality of magnetic amplification members 141a to 141e described later may be accommodated and supported in the accommodation space 111.

The fixing body 112 and the cover 114 as described above is made of a metal having excellent heat resistance, chemical resistance and rigidity, in particular a magnetic force to facilitate the separation and re-storage of the magnet 132 accommodated in the receiving space 111 It is preferable to manufacture each of STS304 which is stainless steel which is not.

The actuating lever 120 is a component that is hinged to the fixing part 110 by the shaft pin 121 so that the vertical part 122 provided at one end thereof rotates relative to the fixing part 110. As shown in FIG. 2, the shaft pin 121, the vertical part 122, the release part 124, and the second pin through part 126 are configured to include the vertical part 122 and the release part 124. And second pin penetrating portion 126 is preferably made of an L-shape as a whole.

The shaft pin 121 is a circular rod-shaped component, and all of the second pin penetrating portion 126 of the operating lever 120 arranged in line with the first pin penetrating portion 116 of the fixing portion 110. By penetrating and forming a hinge coupling, a relative rotation between the fixing part 110 and the operation lever 120 is made.

The release part 124 is formed in a bar shape extending in the opposite direction of the second pin penetrating part 126 at the lower end of the vertical part 122 to form an overall L-shape together with the vertical part 122. .

The release part 124 is caused by an external force (F, a force greater than the attractive force acting by the magnet part 130) applied from the opposite side to which the glass 1 is fixed to the transfer frame 2. It is pressed to rotate the operating lever 120 around the shaft pin 121, thereby the glass (1) can be separated from the transfer frame (2).

That is, as shown in FIG. 3, when the operation lever 120 rotates in the A direction (fixed direction), the gripper 162 of the suction holding lever 160, which will be described later, is pressed by pressing the edge of the glass 1. As a result, the glass 1 is fixed to the transfer frame 2. On the contrary, when the operation lever 120 rotates in the B direction (release direction), the gripper 162 of the suction holding lever 160 is separated from the glass 1 so that the glass 1 is separated from the transfer frame 2. It becomes possible.

The second pin penetrating part 126 is a component having a complementary shape that meshes with the first pin penetrating part 116 at a portion where the vertical part 122 and the release part 124 are connected as described above. It is penetrated by one shaft pin 121 to form a hinge coupling with the first pin penetrating portion 116.

The operation lever 120 as described above is preferably made of STS304, which is excellent in heat resistance, chemical resistance, and rigidity, and does not have a magnetic force, like the fixing part 110.

The suction holding lever 160 is detachably coupled to the upper portion of the vertical portion 122 so that a part thereof is exposed to the outside through the operation hole 2b of the transfer frame 2, and rotates together with the vertical portion 122. As a possible rod-shaped component, one end thereof may be provided with a gripper 162 for pressing or releasing the glass 1.

Adsorption holding lever 160 according to an embodiment of the present invention, specifically as shown in Figures 1a to 3 may be configured to include an exposed body 166 and the embossed portion 168.

The exposed body 166 is partially exposed to the outside of the transfer frame 2, that is, the glass 1 is located through the operating hole (2b) to be laminated by the deposit with the glass (1) is formed As a component of, the gripper 162 is detachably coupled to one end, the other end may be made of a structure provided with a lever detachable portion 164 detachably coupled to the vertical portion 122.

Here, the gripper 162 directly presses and fixes the glass 1, and is a component that protrudes toward the glass 1 to be positioned with respect to the exposed body 166 to prevent its detachment. It may be formed integrally with the bar-shaped exposed body 166 to form a straight line with.

However, the gripper 162 is separated from the upper end of the exposed body 166 in order to easily adjust the position according to the thickness or position or type of the glass 1, and to prevent the shock and the stable support of the glass 1. After manufacturing the engineering plastic material it is preferable to be fixed to the exposed body 166 through the coupling means.

The lever detachable portion 164 is penetrated in the vertical direction by the detachable bolt 169 introduced through the operating hole 2b positioned upward as shown in FIG. 3, and detachable to the vertical portion 122. It is made of an L-shaped structure that is in close contact with the upper surface of the vertical portion 122 at the bottom of the operating hole (2b) in a state bent to the exposed body 166.

At this time, the operating hole (2b) is a component formed through the transfer frame (2) by a corresponding range to allow the operation of the suction holding lever 160 to be rotated together in accordance with the rotation of the vertical portion (122). .

As described above, the detachable bolt 169 is positioned below the operating hole 2b to be fastened and released, so that only the adsorption holding lever 160 having a large amount of deposition is deposited without disassembly or dismantling of the transfer frame 2 itself. It will be able to be easily attached to the vertical portion 122 for convenience.

On the upper surface of the vertical portion 122 and the lower surface of the lever detachable portion 164, rail grooves 122a and rail protrusions 164a which are complementarily engaged with each other shown in FIGS. 2 and 3 (b) are formed. Can be. That is, the rail groove 122a of the vertical portion 122 and the rail protrusion 164a of the lever detachable portion 164 fit together to fit each other, so that the registration between the vertical portion 122 and the lever detachable portion 164 is matched. Of course, the combination is made accurately and quickly, and through the fastening of the detachable bolt 169, both sides can maintain a firm coupling without play.

On the other hand, as shown in Figure 3 (a), on the exposed side of the exposed body 166, a rotational blocking made to rotate in a limited angle range with respect to the exposed body 166 to cover the upper portion of the operating hole (2b) Plate 167 may be further provided.

The rotation blocking plate 167 is a component provided to prevent the deposit from penetrating into the interior of the transfer frame 2, that is, the fixing unit 110 through the operation hole (2b) to act as a particle during the deposition process. The hinge coupling 167a of one side of the exposed body 166 positioned at the upper portion of the operating hole 2b may be formed of a plate-shaped member that shields the upper portion of the operating hole 2b.

At this time, the hinge coupling (167a) is formed in the portion is provided with a stopper (167b) bent downward from the rotation blocking plate 167, which suppresses the rotation blocking plate 167 is rotated downward, while the suction holding lever When the 160 is rotated in the release direction (B) to naturally rotate upward without interference with respect to the transfer frame (2) to be close.

A plurality of irregularities constituting the embossed portion 168 to be described later may be formed on the surface of the rotation blocking plate 167.

The embossing unit 168 is a component provided to increase the adsorption area of the exposed body 166 to a large amount of deposits during the deposition process and to structurally prevent or suppress the peeling of the adsorbed deposits (by the uneven structure). Unevenness may be repeatedly formed on the surface of the exposed body 166.

The embossed portion 168 is formed to reduce the surface area toward the lower end of the exposed body 166 having a low contact frequency with the deposit, in order to efficiently deposit and maintain the deposit through the exposed body 166, as shown. can do. That is, the surface area can be reduced by increasing the size of the unevenness toward the lower end of the exposed body 166 while reducing the number of unevennesses.

Adsorption holding lever 160 as described above can be manufactured integrally with a metal or engineering plastics with excellent heat resistance, chemical resistance and rigidity, but STS304 is a stainless steel that is easy to maintain and does not act on magnetic force. It is preferable to make a material.

As described above, since the adsorption holding lever 160, which continuously stacks deposits during the deposition process, can be easily detached from the outside through the operation hole 2b, maintenance for removing the deposited deposits can be performed at low cost. It can be done quickly and easily.

In addition, since the exposed adsorption holding lever 160 is provided with an embossing unit 168 having an increased external surface area, a large amount of deposits can be stacked and maintained, thereby increasing the maintenance cycle, and stacking the deposited deposits. Peeling phenomenon can be reduced so that the yield of the display panel can be improved.

The bush 150 is made of engineering plastic having excellent lubricity as well as heat resistance and chemical resistance, and surrounds at least a part of the shaft pin 121, and the shaft pin 121 is in direct contact with the fixing part 110 and the operating lever 120. It is a component provided to prevent it.

Since the bush 150 is provided, the rotation of the operating lever 120 can be smoothly guided while the friction between the metals is prevented when the operating lever 120 rotates relative to the fixed part 110 in the forward and reverse directions. In addition, by suppressing the particle (particle) formed by the friction operation between the parts it is possible to further increase the yield in the manufacturing process of the display panel.

Bush 150 according to an embodiment of the present invention, as shown in Figure 2 and 3 (b), the shaft pin 121, the fixing portion 110 and the operating lever 120 are all made of a separate assembly In this case, the body bush 152 and the hinge bush 154 to prevent contact between the shaft pin 121 and the fixing part 110, as well as to prevent all contact between the shaft pin 121 and the operation lever 120. It is divided into two.

The body bush 152 is provided in a pair so as to be interposed between the fixing part 110 and the shaft pin 121, and at the outer end of the first pin penetrating portion 116 in a state of being fitted to both ends of the shaft pin 121. Will be located. At this time, the inner diameter of the first pin through portion 116 is larger than the outer diameter of the shaft pin 121 at the position where the body bush 152 is coupled so that there is no contact between the first pin through portion 116 and the shaft pin 121. do.

The hinge bush 154 is provided as a pair so as to be interposed between the shaft pin 121 and the operation lever 120 so that a part of the hinge bush 154 is fitted into both ends of the second pin penetrating portion 126 and penetrates by the shaft pin 121. In this case, the inner diameter of the second pin through portion 126 is larger than the outer diameter of the shaft pin 121 so that there is no contact or interference between the second pin through portion 126 and the shaft pin 121.

In this way, the hinge bush 154 is fitted to the shaft pin 121, the outer end of the hinge bush 154 is in close contact with the first pin through portion 116, and accordingly the first pin through portion 116 and The separation distance between the two pin penetrating parts 126 may be kept constant, as well as smooth rotation of the shaft pin 121 inside the second pin penetrating part 126, and inside the second pin penetrating part 126. Although the particles are partially formed due to the friction with the shaft pin 121, as the external outflow path is sealed, the particles may be prevented from accessing the glass 1 to which the metal thin film is deposited.

As described above, the bush 150, which is divided into the body bush 152 and the hinge bush 154, is formed between the fixing part 110, the operating lever 120, and the shaft pin 121 having a structure minimized as a source of particles. Since the relative rotation between the fixing part 110 and the operation lever 120 is made to minimize friction or resistance, the yield of the display panel may be improved.

The magnet part 130 is a component that exerts a driving force to rotate the gripper 162 in the fixed direction A by the action of a magnetic force. As shown in FIGS. 1B to 3, the magnet 132 and the magnet plate are shown. 134, 145a, 145b, stopper 136, and the like.

The magnet 132 and the magnet plates 134, 145a and 145b are rotated in the fixed direction A by the action of relative magnetic force, that is, the attraction force, and seated on the transfer frame 2. The grip of the gripper 162 against the glass 1 is made.

The magnet 132 is a component for generating magnetic force by being accommodated in the accommodation space 111 provided inside the fixing part 110, but may be made of a normal permanent magnet, but may be formed in the panel glass 1 such as an LCD. In the high temperature sputtering chamber in which the deposition of the thin metal film is performed, it is preferable that the magnetism of the samarium cobalt-based magnet has a small amount of magnetic attenuation.

The magnet 132 has a rectangular block shape as shown in FIG. 2 and is fixed to the fixing unit 110, and in particular, is supported by the cover 114 to accommodate the receiving space between the fixing body 112 and the cover 114 ( 111).

The magnet plates 134, 145a and 145b are coupled to the other end of the actuating lever 120 so as to attract a force between the magnet 132 and the magnet plate 132 to rotate the gripper 162 in the fixed direction A. FIG. As an element, it will be generally flat.

The magnet plates 134, 145a and 145b are made of STS420 series stainless steel, which is a ferromagnetic material having excellent mechanical properties such as corrosion resistance, strength and hardness, and reacts to magnetic force, or is a cold rolled steel SPCC (steel plate cold commercial) Nickel plating can be produced (maintaining ferromagneticity and increasing gloss and corrosion resistance).

The magnet plates 134, 145a and 145b are provided in the form of extending from the other end of the operation lever 120, that is, the lower side of the second pin through portion 126 to the opposite side of the release portion 124, thereby fixing the operation lever 120. In the state fully rotated in the direction (A) is positioned directly below the magnet 132 and is in a state parallel to the magnet 132.

At this time, one end of the magnet plate (134, 145a, 145b) is coupled to the operating lever 120 through a predetermined coupling means (bolts, rivets, etc.) to form a narrower width than the other end of the far side and the width of the other end side This is to form a wider, it is to increase the area that is subjected to the magnetic force by the lines of magnetic force (lines of magnetic force) radiated from the magnet 132 so that a greater attraction force can interact with each other.

As described above, the magnet 132 and the magnet plates 134, 145a, and 145b are maintained in close or close contact with each other by the attraction force when no external force is applied thereto, and the release part 124 When an external force (greater than the attraction force acting by the magnet portion 130) acts to press the bottom of the upward action, the operating lever 120 is moved away from each other while rotating in the release direction (B).

At this time, the rotation of the operation lever 120 in the release direction B is made within a range in which a attraction force acts between the magnet 132 and the magnet plates 134, 145a, 145b, and the operation lever 120. Is rotated completely in the release direction (B), when the external force is removed, the operating lever 120 is rotated in the fixed direction (A) by the attraction force between the magnet 132 and the magnet plate (134, 145a, 145b) of the fixed position To return to its original position. In order to smoothly return the operation lever 120, the operation lever 120 may be rotated within a range of about 25 °.

The stopper 136 is configured to prevent a direct collision between the magnet plates 134, 145a and 145b and the cover 114 receiving the magnet 132 when the operation lever 120 rotates in the fixed direction A. FIG. As an element, this can suppress the formation of particles by collisions.

The stopper 136 is formed in a cylindrical shape of an engineering plastic such as polyetheretherketone (PEEK) or VESPEL and is coupled to the ends of the magnet plates 134, 145a and 145b through the fastening bolt 135.

The stopper 136 is provided as a pair as shown in Figure 2 is coupled in a symmetrical form on both sides of the magnet plate (134, 145a, 145b) or consists of a single end portion of the magnet plate (134, 145a, 145b) Can be.

In this case, the stopper 136 is coupled to the magnet plates 134, 145a and 145b, and is formed to protrude upward from a top surface of the magnet plates 134, 145a and 145b, thereby operating lever 120. Is completely rotated in the fixed direction A, a slight gap is formed between the top surfaces of the magnet plates 134, 145a and 145b and the bottom of the cover 114, thereby preventing collision between both sides.

The magnetic force adjusting unit 140 is provided on at least one of the fixing unit 110 and the operating lever 120, and is a component that varies the magnetic force at various intensities according to the glass 1 (type or weight). Without the partial or full replacement of the clamp device 100 itself, it is possible to quickly and easily adjust the magnetic force of the various glass 1 to the transfer frame (2) under optimum conditions.

In order to concretely implement the functions or functions as described above, the magnetic force control unit 140 is a means that can be provided on the fixing unit 110, the magnetic amplification members (141a to 141e) and the operating lever 120 side As a means that can be provided may be divided into the magnet plate (145a, 145b).

Here, the magnetic amplification members 141a to 141e are magnetic force adjusting units 140 provided on the fixing part 110 side, and are made of a plate-like ferromagnetic material as shown in FIG. 2 and selectively on the outer surface of the magnet 132. On the other hand, the accommodating space 111 may be accommodated together with the magnet 132 and may include at least one.

At this time, as the magnetic amplification members 141a to 141e are attached to the magnet 132, the strength of the magnetic force (magnetic field) is gradually strengthened, which is replaced by the volume of the ferromagnetic material as the ferromagnetic material is attached to the magnet 132. This is because the surrounding magnetic field (B = μH) is relatively strengthened (where H is the magnetic field strength irrelevant to the medium).

In other words, a ferromagnetic material having a magnetic permeability (μ _iron ≒ 200,000) that is much larger than the permeability of _air (μ _air ≒ 1) is attached to the magnet 132 and replaces the air around the magnet 132 by the volume thereof. 132) because the surroundings are strongly magnetized.

Magnetic amplification members (141a to 141e) according to an embodiment of the present invention is a hexahedron made of a ferromagnetic material, that is, iron, cobalt or alloys thereof, such as the magnet 132 and attraction force as shown in Figure 2 A plurality of plates may be individually manufactured in a plate shape corresponding to each surface of the in magnet 132. In addition, the magnetic amplification members 141a to 141e may be manufactured by nickel plating a steel plate cold commercial (SPCC), which is a cold rolled steel, to increase gloss and corrosion resistance.

By attaching the magnetic amplification members 141a to 141e thus manufactured in various ways with respect to the magnet 132, the magnetic force can be strengthened to various strengths than the magnet 132 alone, and thus the magnet plates 134, 145a and 145b. The attraction force acting between and the pressure holding force of the gripper 162 against the glass 1 can also be varied.

Each of the plurality of magnetic amplification members 141a to 141e as shown in FIG. 2 is configured to increase the pressure holding force within the range of 5% to 15% per piece through the adjustment of the volume (thickness of the member). It is preferable to produce.

As the magnetic amplification members 141a to 141e as described above are positioned around the magnet 132, heat transmitted from the fixing part 110 to the magnet 132 can be effectively blocked, so that sputtering at high temperature is performed. Even in the chamber, the magnetic force reduction of the magnet 132 can be alleviated to some extent, so that the stable pressing of the glass 1 can be maintained.

Magnet plate 145a, 145b as the magnetic force control unit 140 according to an embodiment of the present invention, consisting of a plurality of sets of different lengths from each other through a predetermined coupling means (bolts, rivets, etc.) operating lever 120 By selectively detaching and replacing the side, the magnetic force is adjusted.

The replaceable magnet plate 145a, 145b, as shown in Figure 2 may be configured to include a fastening portion 142 and the attraction force portion 143, the fastening portion 142 is the operating lever 120 It is a component that is selectively detachably coupled to the other end of the), the attraction force portion 143 is formed to extend from the fastening portion 142 to different lengths so that the attraction force by the magnet 132, respectively, the magnet 132 Is the component that will be placed underneath.

At this time, the magnet plate 145b provided with a long attraction force portion 143 has a magnet having a short attraction force portion 143 which acts by a magnetic force line radiated from the magnet 132. Receiving over a longer length (L ₂ ) or larger area than the plate 145a (the number of magnetic force lines acting increases), a relatively large attraction force (F ₂ ) is applied (see Fig. 6 (b)).

On the contrary, when the magnet plate 145a having the short attraction force unit 143 is replaced, the magnetic force action by the magnetic force line radiated from the magnet 132 is relatively short in length L ₁ or As it is received over a narrow area (the number of magnetic field lines acting), a relatively small attraction force F ₁ acts on the magnet plate 145a (see Fig. 6 (a)).

As described above, as shown in FIG. 4, an experiment in which the short-length magnet plate 145a and the long-length magnet plate 145b were replaced (length difference: 8 mm) and the pressing fixation force (magnetic strength) were measured, respectively This can be easily confirmed through the formula related to the magnetic field, B (magnitude of magnetic force) = φ (number of magnetic field lines) / A (cross-section).

As described above, the magnetic amplification members 141a to 141e provided on the fixing part 110 side and a plurality of replaceable magnet plates 145a and 145b of different lengths, which are selectively detached to the operating lever 120 side, are separated from each other. When the magnetic force is finely adjusted in a combination manner, the glass 1 can be quickly and easily used on the transport frame 2 in an optimum condition regardless of the type of the glass 1 without fear of positional deviation or damage. It can be fixed.

On the other hand, the suction holding clamp device 100 according to a modification of the present invention, as shown in Figure 5, the magnet plate consisting of a fastening portion 142, attraction force portion 143, length adjustment unit 144, etc. It may include a magnetic force control unit 140 implemented by (134,146).

Here, the fastening part 142 and the attraction force operation part 143 are functionally identical to the above-described contents, so a detailed description thereof will be omitted, and only the length adjusting part 144 that is a differential configuration will be described in detail. .

The length adjusting part 144 is different from the replaceable magnet plates 145a and 145b of the above-described embodiment, and the fastening part 142 and the attraction force part 143 as they are fastened to the operating lever 120. As a component specially prepared to allow the length between the body to be extended or reduced as needed, the addition of this elastic structure allows the magnetic force to be adjusted more quickly, as shown in FIG. 5. Can be implemented respectively.

First, the length adjusting unit 144 illustrated in FIG. 5A may have a structure including a sliding rod 144a and a sliding groove 144b.

At this time, the sliding bar 144a is a length bar 144a1 protruding from the attraction force portion 143 (and any one of the fastening portion 142), and the engaging bar (expanded left and right formed at the end of the length bar 144a1) 144a2) to form a 'T' shape as a whole.

And the sliding groove 144b is a length groove formed in the fastening portion 142 (and the other one of the attraction force portion 143) so that the above-described length bar (144a1) is fitted to move along the longitudinal direction of the magnet plate 146. 144b1 and the length groove 144b1 may be formed to communicate with the locking groove 144b2 to guide the movement of the locking bar (144a2).

In addition, although not shown, the fastening portion 142 around the sliding groove 144b may be provided with grid lines (not shown) spaced apart along the longitudinal direction of the sliding groove 144b so that the expansion and contraction length of the magnet plate 146 may be confirmed. It may be provided.

The sliding rod 144a of the 'T' shape described above with respect to the sliding groove 144b is inserted in the lower portion of the fastening portion 142 and then guides the length of the magnet plate 146 by the guide of the sliding groove 144b. Move along.

Due to the length adjusting part 144 composed of the sliding rod 144a and the sliding groove 144b as described above, the operator separates the magnet plates 145a and 145b as in the embodiment, and then selects one of different lengths. It is possible to adjust the strength of the magnetic force acting on the magnet plate 146 by expanding and contracting the attraction force portion 143 appropriately quickly and easily without the hassle of recombination.

And the length adjustment unit 144 shown in Figure 5 (b), may be configured to include a length adjustment bolt (144c) and the guide portion (144d).

At this time, the length adjustment bolt (144c) is fixed through the attraction action part 143 is screwed with the fastening portion 142, and the attraction force portion 143 is stretched relative to the fastening portion 142 according to the forward and reverse rotation Component.

The guide part 144d may include one or more guide bars 144d1 protruding from the attraction action part 143 (and any one of the engagement parts 142) and the engagement part 142 (and the attraction action part 143). The other one) may be provided with a guide groove 144d2 for receiving and guiding the guide bar 144d1 according to the expansion and contraction of the attraction force unit 143.

Due to the length adjusting portion 144 consisting of the length adjusting bolt 144c and the guide portion 144d as described above, the operator likewise removes the magnet plates 145a and 145b as in the embodiment, whichever is different in length. It is possible to adjust the strength of the magnetic force acting on the magnet plate 146 simply by rotating the length adjustment bolt (144c) forward and reverse without the hassle to select and recombine.

In the case of the modified example described above, the magnetic force is finely combined by combining the magnetic amplification members 141a to 141e provided on the fixing part 110 side with the magnet plate 146 provided with the length adjusting part 144. When adjusted, the glass 1 can be universally fixed to the transfer frame 2 quickly and easily under optimum conditions regardless of the kind of the glass 1 without fear of positional deviation or damage.

While specific embodiments of the invention have been described and illustrated above, it is to be understood that the invention is not limited to the described embodiments, and that various modifications and changes can be made without departing from the spirit and scope of the invention. It is self-evident to those who have. Therefore, such modifications or variations are not to be understood individually from the technical spirit or point of view of the present invention, the modified embodiments will belong to the claims of the present invention.

1: glass 2: transfer frame
2a: support 2b: working hole
3: conventional clamping device
100: suction holding clamp device
110: fixed portion 111: accommodation space
112: fixed body 114: cover
116: first pin through portion 120: operating lever
121: shaft pin 122: vertical portion
122a: rail groove 124: release portion
126: second pin through portion
160: suction holding lever 162: gripper
164: lever detachable portion 164a: rail protrusion
166: exposed body 167: rotation blocking plate
168: embossed portion 169: removable bolt
130: magnet 132: magnet
134,145a, 145b, 146: Magnet plate 135: Fastening bolt
136: stopper 140: magnetic control unit
141a to 141e: magnetic amplification member 142: fastening portion
143: attraction unit 144: length adjustment unit
144a: Sliding bar 144a1: Length bar
144a2: hanging bar 144b: sliding groove
144b1: Length Groove 144b2: Hanging Groove
144c: Length adjusting bolt 144d: Guide part
144d1: guide bar 144d2: guide groove
150: bush 152: body bush
154: hinged bush

Claims (9)

In the clamp device used to fix the glass for display panel manufacturing is deposited on one side to the transfer frame,
A fixed part fixed to the inside of the transfer frame;
An operating lever hinged to the fixed part by a shaft pin such that a vertical part provided at one end thereof rotates relative to the fixed part;
The detachable suction oil retainer is detachably coupled to the upper portion of the vertical portion to expose a portion through the operation hole of the transfer frame, and rotates together with the vertical portion, and has a gripper at one end thereof to fix or release the glass. lever; And
And a magnet part for rotating the gripper in a fixed direction by the action of a magnetic force. The method of claim 1,
The suction holding lever,
An exposed body having a gripper detachably coupled to one end, a part exposed to the outside through the operating hole, and a lever detachable part detachably coupled to the vertical part at the other end; And
Adsorption holding clamp device, characterized in that it comprises an embossing portion protruding irregularities repeatedly on the surface of the exposed body in order to increase the adsorption area for a large amount of deposits and to prevent the detachment of the adsorbed deposits. The method of claim 2,
The lever detachable portion,
It is in contact with the upper surface of the vertical portion in the state bent to the exposed body, the penetrating in the vertical direction by a detachable bolt introduced through the operating hole, characterized in that the vertical portion detachable Absorption holding clamp device. The method of claim 3,
On the upper surface of the vertical portion and the lower surface of the lever detachable portion,
Rail grooves and rail projections that are complementary to each other are formed,
On one side of the exposed body,
In order to prevent the deposit from penetrating into the transfer frame,
Adsorption holding clamp device, characterized in that the rotation blocking plate is further provided to rotate in a limited angle range with respect to the exposed body to cover the upper portion of the operating hole. The method of claim 1,
The magnet part,
And a magnet plate accommodated in an accommodation space provided inside the fixing part to generate a magnetic force, and a magnet plate coupled to the other end of the operating lever to rotate the gripper in a fixed direction so that an attraction force acts between the magnet. and,
At least one of the fixing portion and the operating lever,
Adsorption holding clamp device characterized in that it further comprises a magnetic force control unit for varying the magnetic force at various intensities according to the glass. The method of claim 5,
The magnetic force control unit,
In order to reinforce the magnetic force of the magnet, it is made of a plate-like ferromagnetic material is selectively attached to the outer surface of the magnet, characterized in that it is composed of at least one magnetic amplification member configured to be accommodated with the magnet in the receiving space Absorption holding clamp device. The method of claim 6,
The magnetic force control unit,
A plurality of magnet plates including a fastening part selectively detachably coupled to the other end of the operation lever, and an attractive force action part formed to extend to have different lengths from the fastening part so that the attraction force by the magnet acts differently; Adsorption holding clamp device, characterized in that consisting of. The method of claim 5,
The magnetic force control unit,
A fastening part selectively detachably coupled to the other end of the operation lever, a manpower action part extending from the fastening part so that the attraction force by the magnet acts, and a length between the fastening part and the force action part Adsorption holding clamp device, characterized in that consisting of the magnet plate comprising a length adjusting portion. The method of claim 8,
The length control unit,
A sliding bar comprising a length bar protruding from one of the fastening part and the attraction force part, and a locking bar extended from side to side at an end of the length bar; And
The length bar is inserted into a length groove formed in the other one of the fastening portion and the attraction action portion to move along the longitudinal direction of the magnet plate, and formed in communication with the length groove is composed of a locking groove for guiding the movement of the locking bar Adsorption holding clamp device, characterized in that it comprises a sliding groove.

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