KR101436475B1 - Clamping apparatus for preventing particle generation - Google Patents

Clamping apparatus for preventing particle generation Download PDF

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Publication number
KR101436475B1
KR101436475B1 KR1020130050074A KR20130050074A KR101436475B1 KR 101436475 B1 KR101436475 B1 KR 101436475B1 KR 1020130050074 A KR1020130050074 A KR 1020130050074A KR 20130050074 A KR20130050074 A KR 20130050074A KR 101436475 B1 KR101436475 B1 KR 101436475B1
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South Korea
Prior art keywords
magnet
lever
rotary shaft
pin
frame
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KR1020130050074A
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Korean (ko)
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박기범
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(주)거성
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Priority to KR1020130050074A priority Critical patent/KR101436475B1/en
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Publication of KR101436475B1 publication Critical patent/KR101436475B1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Robotics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A clamp device for preventing particles is disclosed. The clamp device for preventing particles according to the present invention is a clamp device used for fixing an LCD glass to a transfer frame, the clamp device comprising: a frame fixing part fixed to a frame; A rotary shaft pin coupled to one side of the frame fixing part to form a rotary shaft; A lever coupled to the rotary shaft pin so as to rotate in an unlocking direction in which the gripper presses the end portion of the glass on one side and the gripper is in the fixing direction in which the glass is pressed; A magnet portion to which a magnetic force acts to rotate the lever in a fixed direction; And a bush which is made of engineering plastic and surrounds at least a part of the rotary shaft pin and prevents the rotary shaft pin from contacting the frame fixing part or the lever. According to the present invention, since a bush made of engineering plastic such as VESPEL is formed, when the lever is rotated on the rotary shaft pin, metallic friction and resistance are prevented from occurring between the frame fixing portion, the rotary shaft pin and the lever, It is possible to provide a clamping device capable of preventing generation of particles and improving the yield and smoothly rotating the lever.

Description

[0001] CLAMPING APPARATUS FOR PREVENTING PARTICLE GENERATION [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a clamp device for preventing particles, and more particularly, to a clamp device for preventing particles from being generated in fixing a glass for LCD to a transfer frame.

FIG. 1A shows a state in which a glass for LCD is fixed in a transfer frame, and FIG. 1B shows a conventional clamp device used for fixing a glass for an LCD.

In many processes during the manufacturing process of the LCD substrate, the glass 1 is transferred in a fixed state to the transfer frame 2. [ For example, in the sputtering process for depositing a metal thin film on the glass 1, the glass 1 is fixed to the transfer frame 2, and in particular enters the sputtering chamber in a standing state.

As shown in Fig. 1A, the transfer frame 2 is a member which is hollowed at the center so as to fix the glass 1 and formed as a support frame at the outer periphery thereof, and is clamped by a clamp device 3, 1 is fixed to the transfer frame 2.

The conventional clamping device 3 includes a flat plate 4 fixed to a transfer frame 2, a lever 5 rotated by an external force, and a torsion spring 6 connected to apply elasticity to the lever. The torsion spring 6 applies an elastic force in a direction opposite to the rotation direction as the lever 5 rotates at a predetermined angle about the flat plate and fixes the glass 1 to the transfer frame 2 by the elastic force. That is, the lever can apply a pressing force to the glass 1 by the elasticity of the twist.

However, when the clamping device 3 of the type shown in FIG. 1B is used, particles (metal powder) are easily generated on the friction surface according to the friction and resistance generated in the operation of the torsion spring 6, The time yield is significantly lowered. In addition, the generated particles can be easily exposed to the outside, which further increases the defect rate of the LCD.

Korean Patent No. 10-1117583, filed and registered by the present applicant, discloses a "magnetic clamping device for fixing an LCD glass to a transfer frame ", specifically, A hollow formed at the center of the flat plate; A hollow rotating shaft formed across the hollow; And a link stopper including a link stopper protruding downward from a lower surface of the flat plate; A vertical member, which is an L-shaped member, includes an upper end of a vertical portion which is a vertical portion of an L-shaped vertical shape and includes a gripper protruding so as to grip a glass, A rod portion; A rod-shaped member for converting a rotary motion of the rotary bar portion into a reciprocating motion, the magnetic link portion having one end hinged to the rotary bar portion and the other end passing through a link through hole formed in the link stopper; And a stationary magnetic block protruding downward from the frame connection base at a horizontal position opposed to the link through hole of the link stopper, wherein the magnetic link portion has a block shape having magnetism at the front end portion And a moving magnetic block which is a member of the moving magnetic block.

According to the clamping device disclosed in Korean Patent No. 10-1117583, the conventional torsion spring is excluded and operation is performed using a magnet, thereby suppressing the formation of particles due to friction of the torsion spring. However, there has been a problem in that collision and friction between metals occur at various portions during rotation of the rotation rod part, and particles are still formed thereby, and improvement is required.

(0001) Korean Patent No. 10-1117583 (Published on February 22, 2012)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a clamp device for preventing particles, which can ensure smooth operation of a clamping device, minimize particle formation, and mitigate impact upon operation in fixing a glass for LCD to a transfer frame.

The above object is achieved by a clamp device used for fixing an LCD glass to a transfer frame, the clamp device comprising: a frame fixing part fixed to the frame; A rotary shaft pin coupled to one side of the frame fixing part to form a rotary shaft; A lever which is coupled to the rotary shaft pin so as to rotate in a releasing direction, which is a fixing direction in which the gripper presses the glass, and an opposite direction, in which a gripper for pressing and holding the end portion of the glass is formed on one side; A magnet portion to which a magnetic force acts to rotate the lever in a fixed direction; And a bush which is made of an engineering plastic and surrounds at least a part of the rotary shaft pin and prevents the rotary shaft pin from coming into contact with the frame fixing section or the lever.

Here, the bush may include a body bushing interposed between the frame fixing part and the rotary shaft pin; And a hinge bush interposed between the rotary shaft pin and the lever.

The lever may have a first pin insertion portion into which the rotary shaft pin is inserted, and the hinge bushes may be provided in pairs so as to be closely attached to both ends of the first pin insertion portion.

The frame fixing portion is formed with a second pin insertion portion into which the rotary shaft pin is inserted, and the second pin insertion portion is divided into two portions and is positioned on both sides of the first pin insertion portion. The outer end portion of the hinge bush And may be made to be in close contact with the second pin inserting portion.

The frame fixing portion may have a second pin insertion portion into which the rotary shaft pin is inserted, and an inner diameter of the second pin insertion portion may be larger than an outer diameter of the rotary shaft pin.

Further, in the clamp device for preventing particles according to the present invention, the magnet portion may include: a magnet fixed to the frame fixing portion and generating a magnetic force; And a magnet plate fixed to the lever and having an attractive force acting between the lever and the magnet so that the lever rotates in a fixed direction.

Here, the frame fixing part may have a clamp body whose upper surface is flat and closely attached to the bottom surface of the frame; And a magnet cover fixed to the bottom surface of the clamp body and supporting the magnet plate.

Further, when the lever is fully rotated in the fixing direction, the magnet plate is positioned below the magnet, and a gap plate on which an attractive force acts between the magnet and the magnet is closely attached to the magnet.

In the clamp device for preventing particles according to the present invention, the first stopper is formed on the magnet plate, and when the lever rotates in the fixing direction, the first stopper is brought into close contact with the frame fixing portion or one side of the magnet, Thereby preventing the plate from directly coming into direct contact with the frame fixing portion or the magnet, and the first stopper can be made of engineering plastic.

Here, the magnet plate may have a function surface facing the magnet and flattened, and the first stopper may protrude at least a part from the action surface.

Further, the first stopper is formed in a cylindrical shape, and coupling grooves for receiving the first stopper are formed on both sides of the ends of the magnet plate, and fastened to the magnet plate through the first stopper accommodated in the coupling groove Bolts may be provided.

In the clamp device for preventing particles according to the present invention, a second stopper is formed on the frame fixing part so as to be in close contact with one side of the lever when the lever rotates in the fixing direction, so that the magnet plate is fixed to the frame fixing part or the magnet And the second stopper may be made of engineering plastic.

Wherein the lever includes: a first pin insertion portion into which the rotary shaft pin is inserted; A gripper fixing part bent in a direction orthogonal to the first pin inserting part and having the gripper formed on an upper side thereof; And a pressing portion bent in a direction opposite to the first pin inserting portion at the lower end of the gripper fixing portion so that the upper surface of the first pin inserting portion is brought into close contact with the second stopper when the lever is completely rotated in the fixing direction Lt; / RTI >

According to the present invention, a bush made of an engineering plastic such as PEEK or VESPEL is formed to prevent metallic friction and resistance between the frame fixing portion, the rotary shaft pin and the lever when the lever is rotated on the rotary shaft pin, It is possible to provide a clamping device capable of preventing occurrence and improving the yield and smoothly rotating the lever.

In addition, the bushes may be divided into body bushes and hinge bushes, and a pair of hinge bushes may be in close contact with both ends of the first pin insertion portion, so that relative rotation of the rotary shaft pins within the first pin insertion portion is performed according to the rotation of the lever, It is possible to prevent the particles from being discharged to the outside even when friction occurs between the particles.

In addition, the magnet plate is moved in a position close to the magnet to secure a magnetic force between the magnet plate and the magnet plate, and a gap plate made of a ferromagnetic material in close contact with the magnet is provided on the opposite side of the magnet plate to strengthen the magnetic force of the magnet. .

Further, when the lever is fully rotated in the fixing direction, the first stopper is brought into close contact with the frame fixing portion or the magnet, or the lever is brought into close contact with the second stopper so that the metal generated when the lever is rotated as the magnet plate is pulled by the magnet It is possible not only to mitigate the impact between particles, but also to suppress the formation of particles which may be caused by the impact between the metals.

1A and 1B are diagrams showing a conventional clamping device for fixing a glass for an LCD,
FIGS. 2A and 2B are perspective views illustrating a clamp device for preventing particles according to an embodiment of the present invention;
FIG. 3 is a side view showing the clamp device for preventing particles shown in FIG.
FIG. 4 is a front sectional view showing the clamp device for preventing particles shown in FIG.
FIG. 5 is an exploded perspective view showing the clamp device for preventing particles shown in FIG.
Figs. 6A and 6B are side cross-sectional views showing the operating state of the clamp device for preventing particles shown in Fig. 2A,
7 is a cross-sectional side view of a clamp device for preventing particles according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, the well-known functions or constructions are not described in order to simplify the gist of the present invention.

2A and 2B are perspective views showing a clamp device 1 for preventing particles according to an embodiment of the present invention. FIG. 3 is a side view showing the clamp device 1 for preventing particles shown in FIG. Sectional view showing the clamp device 1 for preventing particles shown in Fig. 2A.

The clamp device 1 for preventing particles according to the present invention is used in connection with a frame used for fixing or transporting a glass for LCD in manufacturing an LCD, and a glass for LCD is fixed on the frame. The frame may be formed in the form of a rectangular frame, and a plurality of clamp devices 1 for preventing particles are fixed along the frame to fix the glass seated inside the frame.

To this end, the clamp device 1 for preventing particles includes a frame fixing part 10, a rotary shaft pin 20, a lever 30, a magnet part 40 and a bushing 50.

The clamp device 1 for preventing particles according to the present invention is fixed to a frame and can be oriented in various directions depending on the position and direction of the frame such as pressing or erecting the frame. The upper and lower sides will be described with reference to the particle prevention clamp device 1 shown in Fig.

The frame fixing part 10 is a part fixed to the frame and can be integrally formed as a whole but is divided into a clamp body 11 and a magnet cover 12 for easy fixing of the magnet 41, .

The clamp body 11 is a portion where the upper surface is flat and closely attached to the bottom surface of the frame, and is directly fixed to the frame. In order to fix the clamp body 11, at least one through hole 11a is formed on one side of the clamp body 11 and a body fixing means (bolt, rivet or the like) is inserted into the through hole 11a, So that the clamp body 11 can be fastened to the frame.

In the clamp device 1 for preventing particles according to the present invention, the frame fixing portion 10 is provided with a second pin insertion portion 13. In particular, the second pin insertion portion 13 is integrally formed with the clamp body 11 . The second pin inserting portion 13 is formed at both ends of the clamp body 11 on the side facing the lever 30 and is inserted through the inside so that the rotary shaft pin 20 can be inserted.

It is preferable that the clamp body 11 is made of a metal and is made of stainless steel STS304 so that the magnetic force of the magnet 41 does not act.

The magnet cover 12 is coupled to the bottom surface of the clamp body 11 and can fix the magnet cover 12 to the clamp body 11 by using cover fastening means (bolts, rivets, etc.). In the state where the magnet cover 12 is coupled to the clamp body 11, a receiving space is formed between the two. The magnet 41 and the gap plate 80 described later are received and supported in the receiving space.

The magnet cover 12 is also preferably made of STS 304 like the clamp body 11.

The rotary shaft pin 20 is formed in a substantially circular bar shape and is coupled to the frame fixing portion 10 and particularly inserted into the second pin insertion portion 13 and coupled to the clamp body 11. [

The lever 30 is hinge-coupled to the frame fixing part 10 via the rotary shaft pin 20 and includes a first pin insertion part 32, a gripper fixing part 33 and a pressing part 34, Respectively. It is preferable that the first pin insertion portion 32, the gripper fixing portion 33, and the pressing portion 34 are integrally formed.

The first pin insertion portion 32 is protruded toward the frame fixing portion 10 and is located between the second pin insertion portions 13. The first pin inserting part 32 penetrates the inside of the first pin inserting part 32 so that the rotating shaft pin 20 can be inserted therein and the rotating shaft pin 20 is inserted into the second pin inserting part 13 and the first pin inserting part 32 So that the lever 30 is hinged to the frame fixing portion 10.

The gripper fixing part 33 is bent upward from the first pin inserting part 32, and the gripper 31 is formed on the upper side. The gripper 31 may be integrally formed with the gripper fixing portion 33. The gripper 31 may be integrally formed with the gripper fixing portion 33 for easy positioning of the gripper 31, It is preferable that the fixing portion 33 is fixed to the fixing portion 33 using a separate fixing means.

The pressing portion 34 is bent at a lower end of the gripper fixing portion 33 in a direction opposite to the first pin insertion portion 32 and is formed in a generally flat plate shape. For example, when the bottom surface of the pressing portion 34 is pressed upward, the lever 30 is rotated with respect to the rotary shaft pin 20 as the pressing portion 34 is pressed by using external force.

3, when the lever 30 is rotated in the counterclockwise direction, the gripper 31 formed at the end of the lever 30 presses the corner portion of the glass to constrain the glass to be fixed to the frame do. The rotational direction of the lever 30 is defined as a 'fixed direction A'.

Conversely, when the lever 30 rotates clockwise, the lever 30 does not constrain the glass and can separate the glass from the frame. The rotational direction of the lever 30 is defined as the "release direction B".

The lever 30 is preferably made of STS 304 like the frame fixing part 10 so that magnetic force by the magnet 41 does not act while forming the lever 30 having excellent abrasion resistance.

The magnet unit 40 causes a magnetic force to act on the lever 30 so as to rotate in a fixing direction A. The magnet unit 40 includes a magnet 41 and a magnet plate 42. When either one of the magnet 41 and the magnet plate 42 is fixed to the frame fixing portion 10, the other is fixed to the lever 30 so that the force of the lever 30 rotating in the fixing direction A Lt; / RTI >

The magnet 41 may be made of a normal magnet, and is preferably made of a samarium cobalt-type magnet so as to compensate for magnetic decay due to high temperature even in a chamber in which a glass for an LCD is housed. The magnet 41 is formed in a rectangular block shape and is fixed to the frame fixing portion 10 and particularly supported by the magnet cover 12 and positioned between the clamp body 11 and the magnet cover 12.

A gap plate 80 is closely attached to the upper side of the magnet 41 and the gap plate 80 is made to act on the magnet 41 with an attractive force. By providing the gap plate 80 above the magnet 41, the magnetic force can be enhanced and the magnetic force acting between the magnet plate 42 and the magnet plate 42 can be sufficiently exerted. For this purpose, the gap plate 80 is preferably plated with nickel plated steel plate cold commercia (SPCC), which is cold rolled steel.

Since the gap plate 80 is positioned above the magnet 41, the heat transmitted to the magnet 41 from above the frame fixing portion 10 can be blocked. Thus, in the manufacturing process of the LCD, It is possible to mitigate the reduction in the magnetic force of the magnet 41.

The magnet plate 42 is fixed to the lever 30 so that an attractive force acts between the magnet plate 42 and the magnet 41 so that the lever 30 rotates in the fixing direction A. [ It is preferable that the magnet plate 42 is formed in a substantially flat plate shape and the material is made of STS420.

The magnet plate 42 is coupled to the bottom surface of the lever 30 and extends from the lower side of the first pin insertion portion 32 to the opposite side of the pressing portion 34. The magnet plate 42 is positioned below the magnet 41 and the magnet 41 and the magnet plate 42 are in parallel with each other while the lever 30 is fully rotated in the fixing direction A. The upper surface of the magnet plate 42 (the surface facing the magnet 41) is referred to as the action surface 42a.

The magnet plate 42 of the clamp device 1 for preventing particles according to the present invention is formed such that the portion of the magnet plate 42 located on the bottom surface of the magnet 41 is wider than the side of the magnet plate 42 that is coupled to the lever 30 The portion of the magnet plate 42 to which a first stopper 60 to be described later is coupled is formed to be wider and a stronger magnetic force can be applied between the magnet plate 41 and the magnet plate 41. [

The magnet plate 42 can be coupled to the lever 30 using conventional fastening means (bolts, rivets, etc.).

The magnet 41 and the magnet plate 42, which are attracted to each other, are kept in close proximity to or close to each other, and an external force for pressing the bottom surface of the pressing portion 34 upward The lever 30 is rotated in the release direction B and the magnet 41 and the magnet plate 42 are separated from each other. The rotation of the lever 30 in the disengaging direction B is performed within a range where an attractive force acts between the magnet 41 and the magnet plate 42. When the lever 30 is rotated in the disengaging direction B, the magnet 41 pulls the magnet plate 42 to rotate the lever 30 in the fixing direction A when the external force is removed. For this purpose, the rotation of the lever 30 is preferably within a range of about 22 degrees.

It is preferable that the bushing 50 is made of engineering plastics not only having excellent heat resistance and chemical resistance but also having a lubricating property so that when the lever 30 rotates about the frame fixing portion 10 It is possible to prevent the friction between the metals to smoothly rotate the lever 30 and to suppress the formation of particles due to wear, thereby increasing the yield in the LCD manufacturing process.

The bush 50 is formed in a cylindrical shape so as to surround at least a part of the rotary shaft pin 20 and is fitted to the rotary shaft pin 20 so that the rotary shaft pin 20 contacts the frame fixing part 10 or the lever 30 ≪ / RTI > That is, when the rotary shaft pin 20 is integrally formed with the frame fixing portion 10, the bushing 50 prevents the rotary shaft pin 20 from contacting the lever 30, The bush 50 prevents the rotation shaft pin 20 and the frame fixing part 10 from contacting each other.

2 to 4, when the rotary shaft pin 20, the frame fixing part 10 and the lever 30 are assembled separately, the bushing 50 is mounted on the rotary shaft pin 20, And prevents the contact between the pivot pin (20) and the lever (30).

In the clamp device 1 for preventing particles according to the present invention, the bush 50 is divided into a body bush 51 and a hinge bush 52.

The body bushes 51 are interposed between the frame fixing portion 10 and the rotary shaft pin 20 and are provided in pairs so as to be biased to both ends of the rotary shaft pin 20. At this time, the body bush 51 is located at the outer end of the second pin insertion portion 13.

The inner diameter of the second pin insertion portion 13 is larger than the outer diameter of the rotary shaft pin 20 at the point where the body bushing 51 is engaged, No contact is made.

The hinge bushes 52 are fitted to the rotary shaft pins 20 so as to be in close contact with the both ends of the first pin insertion portions 32. When the rotary shaft pins 20 and the lever 30 are assembled, 20 and the lever 30. As shown in Fig. That is, the hinge bushing 52 supports the rotation shaft pin 20 to rotate smoothly within the first pin insertion portion 32, and the friction with the rotation axis pin 20 in the first pin insertion portion 32 Even when the particles are formed, the paths exposed to the outside are closed to prevent the particles from approaching the glass for LCD.

However, it is more preferable that the outer diameter of the rotary shaft fin 20 is made slightly smaller than the inner diameter of the first pin insertion portion 32 so that friction between the two is not generated.

The outer end of the hinge bushing 52 is in close contact with the second pin insertion portion 13 in a state where the hinge bush 52 is fitted in the rotary shaft pin 20, The spacing between the two pin insertion portions 13 is kept constant and the hinge bushes 52 help smooth rotation between the second pin insertion portion 13 and the rotary shaft pin 20. [

As described above, in the clamp device 1 for preventing particles according to the present invention, the bushes 50 are divided into the body bushes 51 and the hinge bushes 52, and a pair of hinge bushes 52 are inserted into the first pin- Even when the rotating shaft pin 20 is relatively rotated inside the first pin inserting portion 32 in accordance with the rotation of the lever 30 to cause friction between the both ends of the pin 30, To the outside.

Fig. 5 is an exploded perspective view showing the clamp device 1 for preventing particles shown in Fig. 2a, and Figs. 6a and 6b are side cross-sectional views showing an operating state of the clamp device 1 for preventing particles shown in Fig.

The first stopper 60 is formed in the magnet plate 42 and the magnet plate 42 is fixed to the frame fixing portion 10 in the clamping device 1 for preventing particles according to the preferred embodiment of the present invention. ) Or the magnet (41). That is, the first stopper 60 prevents the collision between the metals when the lever 30 rotates in the fixing direction A, thereby suppressing the formation of particles.

The first stopper 60 is made of engineering plastic such as PEEK (Polyetheretherketone) or VESPEL, and is formed into a cylindrical shape and is coupled to the end of the magnet plate 42. It is preferable that the first stoppers 60 are provided in a pair and are coupled symmetrically on both sides of the magnet plate 42. At this time, the magnet plate 42 is provided with the engaging groove 42b for engaging the first stopper 60. When the first stopper 60 is placed in the engaging groove 42b, 1 stopper 60 and is fastened to the magnet plate 42 so that the first stopper 60 is engaged with both ends of the magnet plate 42. [

The first stopper 60 is formed in such a manner that the first stopper 60 partially protrudes upward from the action surface 42a when the magnet 30 is engaged with the magnet plate 42, The working surface 42a of the magnet plate 42 does not touch the bottom surface of the magnet 41 cover of the frame fixing portion 10 but the working surface 42a of the magnet plate 42 contacts the working surface 42a of the magnet plate 42 and the bottom surface of the magnet 41 cover A slight gap is formed and the first stopper 60 comes into contact with the magnet 41 cover.

The first stopper 60 comes into contact with the magnet 41 so that the working surface 42a of the magnet plate 42 is pressed against the magnet 41 So that it can be prevented from reaching.

When the first stopper 60 is damaged or abraded by repetitive use of the particle clamping clamp device 1 so that the action surface 42a of the magnet plate 42 comes into contact with the bottom surface of the clamp body 11 , The fastening bolt (43) can be released to easily replace the first stopper (60).

7 is a cross-sectional side view of the clamp device 1 for preventing particles according to another embodiment of the present invention.

The clamp device 1 for preventing particles according to the present invention may be configured to prevent collision between metals by forming a second stopper 70 that is separate from the first stopper 60 described above.

The second stopper 70 is made of engineering plastic such as VESPEL, and may be formed in a flat plate shape. The second stopper 70 is tightly fixed to the bottom surface of the clamp body 11 adjacent to the second pin insertion portion 13. When the lever 30 is rotated completely in the fixing direction A, The upper surface of the second stopper 32 is brought into close contact with the bottom surface of the second stopper 70.

At this time, the magnet plate 42 is not directly brought into close contact with the frame fixing portion 10 or the magnet 41.

As described above, in the clamp device 1 for preventing particles according to the present invention, when the lever 30 is completely rotated in the fixing direction A, the first stopper 60 is engaged with the frame fixing portion 10 or the magnet 41, And the lever 30 is brought into close contact with the second stopper 70 so that the magnet plate 42 is pulled by the magnet 41 to alleviate the impact between the metals generated when the lever 30 rotates It is possible to suppress the formation of particles which may be caused by the impact between metals as well.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It is obvious to those who have. Accordingly, it should be understood that such modifications or alterations should not be understood individually from the technical spirit and viewpoint of the present invention, and that modified embodiments fall within the scope of the claims of the present invention.

1: Clamping device for preventing particles 10: Frame fixing part
11: Clamp body 12: Magnet cover
13: second pin insertion portion
20: rotating shaft pin 30: lever
31: gripper 32: first pin insertion portion
33: gripper fixing portion 34: pressing portion
40: Magnet part 41: Magnet
42: magnet plate 42a: working surface
42b: coupling groove 43: fastening bolt
50: Bush 51: Body Bush
52: Hinge bushing 60: First stopper
70: second stopper 80: gap plate

Claims (13)

CLAIMS 1. A clamping device used for fixing an LCD glass to a transfer frame,
A frame fixing part fixed to the frame;
A rotary shaft pin coupled to one side of the frame fixing part to form a rotary shaft;
A lever which is coupled to the rotary shaft pin so as to rotate in a releasing direction in which the gripper presses the glass in the fixing direction and the opposite direction in which the glass is pressed;
A magnet portion to which a magnetic force acts to rotate the lever in a fixed direction; And
And a bush which is made of engineering plastic and surrounds at least a part of the rotary shaft pin and prevents the rotary shaft pin from contacting the frame fixing section or the lever,
The magnet unit includes:
A magnet fixed to the frame fixing portion and generating a magnetic force; And
And a magnet plate fixed to the lever and having an attractive force acting between the lever and the magnet so that the lever rotates in a fixed direction,
The frame fixing portion includes:
A clamp body whose upper surface is flat and closely attached to the bottom surface of the frame; And
And a magnet cover fixed to a bottom surface of the clamp body and supporting the magnet plate. The bush according to claim 1,
A body bushing interposed between the frame fixing portion and the rotary shaft pin; And
And a hinge bush interposed between the rotary shaft pin and the lever. 3. The method of claim 2,
The lever includes a first pin insertion portion into which the rotary shaft pin is inserted,
Wherein the hinge bushes are provided in pairs and are closely attached to both ends of the first pin insertion portion. The method of claim 3,
A second pin insertion portion into which the rotary shaft pin is inserted is formed in the frame fixing portion,
Wherein the second pin insertion portion is divided into two portions and is positioned on both sides of the first pin insertion portion,
And the outer end of the hinge bush is in close contact with the second pin inserting portion. The method of claim 3,
A second pin insertion portion into which the rotary shaft pin is inserted is formed in the frame fixing portion,
Wherein the inner diameter of the second pin inserting portion is larger than the outer diameter of the rotary shaft pin. delete delete The method according to claim 1,
The magnet plate is positioned below the magnet when the lever is fully rotated in the fixed direction,
Wherein a gap plate on which an attractive force acts is closely attached to the magnet on the upper side of the magnet. The method according to claim 1,
A first stopper is formed on the magnet plate,
The first stopper is brought into close contact with the frame fixing portion or one side of the magnet when the lever rotates in the fixing direction to prevent the magnet plate from directly coming into close contact with the frame fixing portion or the magnet,
Wherein the first stopper is made of engineering plastic. 10. The method of claim 9,
Wherein the magnet plate has an action surface flattened toward the magnet,
Wherein the first stopper protrudes at least partially from the action surface. 11. The method of claim 10,
Wherein the first stopper is cylindrical,
Wherein engaging grooves for receiving the first stoppers are formed on both sides of the ends of the magnet plate,
And a fastening bolt penetrating through the first stopper received in the coupling groove and fastened to the magnet plate. The method according to claim 1,
And a second stopper is formed on the frame fixing portion so as to be in close contact with one side of the lever when the lever rotates in a fixing direction, thereby preventing the magnet plate from directly coming into close contact with the frame fixing portion or the magnet,
Wherein the second stopper is made of engineering plastic. 13. The method of claim 12,
The lever
A first pin insertion portion into which the rotary shaft pin is inserted;
A gripper fixing part bent in a direction orthogonal to the first pin inserting part and having the gripper formed on an upper side thereof; And
And a pressing portion bent at a lower end of the gripper fixing portion in a direction opposite to the first pin insertion portion,
Wherein the upper surface of the first pin insertion portion is brought into close contact with the second stopper when the lever is rotated completely in the fixing direction.
KR1020130050074A 2013-05-03 2013-05-03 Clamping apparatus for preventing particle generation KR101436475B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000988B1 (en) * 2018-02-01 2019-07-17 주식회사 태성 Thin film transfering apparatus
KR20200078443A (en) * 2020-06-21 2020-07-01 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate
KR20200118392A (en) * 2020-10-05 2020-10-15 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006049597A (en) 2004-08-05 2006-02-16 Jel:Kk Substrate transport device
KR20080060784A (en) * 2006-12-27 2008-07-02 세메스 주식회사 Chuck assembly for supporting substrate having low friction and high sealing structure
KR101117583B1 (en) 2011-06-28 2012-02-24 (주)거성 An magnetic apparatus for clamping a glass substrate of lcd to transmission-frame

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006049597A (en) 2004-08-05 2006-02-16 Jel:Kk Substrate transport device
KR20080060784A (en) * 2006-12-27 2008-07-02 세메스 주식회사 Chuck assembly for supporting substrate having low friction and high sealing structure
KR101117583B1 (en) 2011-06-28 2012-02-24 (주)거성 An magnetic apparatus for clamping a glass substrate of lcd to transmission-frame

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000988B1 (en) * 2018-02-01 2019-07-17 주식회사 태성 Thin film transfering apparatus
KR20200078443A (en) * 2020-06-21 2020-07-01 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate
KR102164768B1 (en) 2020-06-21 2020-10-14 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate
KR20200118392A (en) * 2020-10-05 2020-10-15 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate
KR102214306B1 (en) 2020-10-05 2021-02-10 주식회사 야스 Clamping Unit With Magnet For Clamping Substrate

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