TWI710045B - Substrate container with improved substrate retainer and door latch assist mechanism - Google Patents
Substrate container with improved substrate retainer and door latch assist mechanism Download PDFInfo
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本發明係關於用於限制基板(諸如記憶體磁碟、矽晶圓及類似物)以用於運送、儲存或處理之裝置。更特定言之,本發明係關於一種基板保持結構及門閂鎖機構。 The present invention relates to devices for confining substrates (such as memory disks, silicon wafers, and the like) for transportation, storage, or processing. More specifically, the present invention relates to a substrate holding structure and door latch mechanism.
特定容器用於在若干批基板(諸如矽晶圓或磁碟)之處理之前、期間及之後運送且儲存該等基板。「晶圓」在本文中用於指代矽晶圓、磁性基板及類似物。基板經處理為積體電路且磁碟經處理為電腦之一磁性儲存碟。將晶圓磁碟處理為積體電路晶片通常涉及重複處理、儲存且運送磁碟之若干步驟。歸因於磁碟之易碎性質及其等極端價值,其等在整個此程序期間經恰當保護且牢固地保持係重要的。因此,基板容器一般經構形以容納一載體,該載體在靠近基板之周邊邊緣之狹槽內或支架部件上支撐基板。 Specific containers are used to transport and store batches of substrates (such as silicon wafers or magnetic disks) before, during, and after the processing of the substrates. "Wafer" is used herein to refer to silicon wafers, magnetic substrates and the like. The substrate is processed as an integrated circuit and the magnetic disk is processed as a magnetic storage disk of the computer. Processing a wafer disk into an integrated circuit chip usually involves repeating several steps of processing, storing, and shipping the disk. Due to the fragile nature of the disk and its extreme value, it is important that it be properly protected and firmly maintained throughout this process. Therefore, the substrate container is generally configured to contain a carrier that supports the substrate in a slot near the peripheral edge of the substrate or on a support member.
一些習知容器經構形以固持一H型桿件式載體,諸如一標準機械介面(SMIF)卡匣。SMIF卡匣通常在一外殼之基座處具有一底開門以用於接達帶基板之H型桿件載體。SMIF卡匣一般包含可旋轉安裝至一致動連桿組之一基板保持件。底部門與外殼之耦合對致動連桿組施加一力,其使基板保持件擺動至與基板之周邊邊緣接觸。當接合時,基板保持件防止基板相 對於基板之一垂直軸側向滑動。在自外殼移除底部門之後,致動連桿組使基板保持件脫離(擺動遠離)基板,使得基板及H型桿件載體自具有底部門之外殼自由移除。 Some conventional containers are configured to hold an H-shaped rod-type carrier, such as a standard mechanical interface (SMIF) cassette. The SMIF cassette usually has a bottom opening door at the base of a housing for accessing the H-shaped rod carrier with the substrate. The SMIF cassette generally includes a substrate holder that can be rotatably mounted to the actuating linkage group. The coupling of the bottom door and the housing exerts a force on the actuating link group, which causes the substrate holder to swing to contact with the peripheral edge of the substrate. When joining, the substrate holder prevents the substrate Sliding sideways for one of the vertical axis of the substrate. After the bottom door is removed from the housing, the linkage group is actuated to disengage (swing away) the substrate holder from the substrate, so that the substrate and the H-shaped rod carrier can be freely removed from the housing with the bottom door.
已知習知SMIF卡匣之基板保持件在底部門移除後「意外停機(hang up)」。在一意外停機期間,當門被移除時,致動連桿組不使基板保持件擺動遠離基板。基板保持件之此意外停機可導致干擾基板移除,此可在後續藉由機器人末端作用器處置或誤處置期間歸因於該干擾而造成所有基板之一災難性損失。在操作期間防止基板保持件意外停機之一晶圓容器將係受歡迎的。 It is known that the substrate holder of the conventional SMIF cassette "hangs up" after the bottom door is removed. During an unexpected shutdown, when the door is removed, the actuation linkage group does not cause the substrate holder to swing away from the substrate. This unexpected shutdown of the substrate holder can result in the removal of the interference substrate, which can cause catastrophic loss of all substrates due to the interference during subsequent handling or mishandling by the robot end effector. A wafer container that prevents the substrate holder from unintentionally shutting down during operation would be welcome.
本發明之各種實施例提供將基板保持件從一基板保持構形可靠、連續偏置至一基板非保持構形中。連續偏置補充、降低或另外替換對重力之依賴以使該基板保持件從該等基板脫離,藉此確保該等基板從該基板容器安全移除。 Various embodiments of the present invention provide for reliable and continuous biasing of the substrate holder from a substrate holding configuration to a substrate non-holding configuration. The continuous bias supplements, reduces or otherwise replaces the reliance on gravity to release the substrate holder from the substrates, thereby ensuring that the substrates are safely removed from the substrate container.
在習知SMIF卡匣中,該基板保持件之重量(即,重力)提供用於在移除門之後使該基板保持件從該等基板脫離之唯一推動力。通常由聚合物製造之基板保持件可產生尤其在清洗該基板保持件所駐留之該基板容器之後具有一黏附品質之表面。該黏附品質賦予機構一「黏性」,該黏性已被觀察到使該基板保持件意外停機且不令人滿意地從該等基板脫離。本發明之各種實施例提供致動連桿組之一連續偏置,使得該致動連桿組克服該致動連桿組之從完全接合至完全解鎖的整個衝程中之任何黏性。此連續偏置確保,當該底部門及伴隨H型桿件載體自該外殼移除時,該基板保持件將清空而無晶圓。 In conventional SMIF cassettes, the weight of the substrate holder (ie, gravity) provides the only driving force for detaching the substrate holder from the substrates after the door is removed. The substrate holder generally made of polymer can produce a surface with an adhesion quality especially after cleaning the substrate container in which the substrate holder resides. The adhesion quality imparts a "stickiness" to the mechanism, which has been observed to cause the substrate holder to stop unexpectedly and unsatisfactorily detach from the substrates. Various embodiments of the present invention provide for a continuous biasing of one of the actuating link sets so that the actuating link set overcomes any viscosity in the entire stroke of the actuating link set from fully engaged to fully unlocked. This continuous offset ensures that when the bottom door and accompanying H-shaped rod carrier are removed from the housing, the substrate holder will be emptied without wafers.
在一些例項中,將一偏置力施加於該致動連桿組上之一有害效應可係該致動連桿組經受大於原始設計準則之力,以致無法維持所添加之力負載。舉例而言,當該底部門在適當位置中且該致動連桿組在該底部門與該致動連桿組之該偏置力之間壓縮時,在該連桿組上之特定點處之應力(例如,在致動期間沿著該底部門之內表面跨騎之滾輪處之夾安裝及/或在該致動連桿組與該基板保持件之間的樞軸處)可比針對重力偏置設計之一系統大幾倍。由該偏置造成之此等額外力可足夠使該致動連桿組總成之增加例項變為解體。舉例而言,該滾輪可從該基板保持件脫離,及/或該基板保持件可變得自該致動連桿組總成之該等樞軸移出。該致動連桿組總成之此解體可造成與該基板保持件之前述意外停機等同之災難性效應。 In some cases, a detrimental effect of applying a biasing force to the actuation linkage group may be that the actuation linkage group experiences a force greater than the original design criteria, so that the added force load cannot be maintained. For example, when the bottom door is in position and the actuating link set is compressed between the bottom door and the biasing force of the actuating link set, at a specific point on the link set The stress (for example, the clamp installation at the roller straddling along the inner surface of the bottom door during actuation and/or at the pivot between the actuation linkage group and the substrate holder) is comparable to gravity One system with offset design is several times larger. The extra force caused by the offset can be enough to disintegrate the addition of the actuation linkage assembly. For example, the roller can be detached from the substrate holder, and/or the substrate holder can become moved out of the pivots of the actuating linkage assembly. This disassembly of the actuation linkage assembly can cause catastrophic effects equivalent to the aforementioned unexpected shutdown of the substrate holder.
因此,本發明之各種實施例包含額外固定組件,該等固定組件經構形以與現有基板保持件及/或致動連桿組配接以保證在歸因於偏置之增大之負載下之該系統之完整性,且一般地增大致動連桿組之可靠性(不管係偏置或不偏置的)。在一些實施例中,該等固定組件經設計以需要強加一側向力(諸如藉由一撬動工具)以便變得分離。因為該致動連桿組在操作中不經受大的側向力,故該等固定組件不因該等偏置力或操作之正向力(其等軸向而非側向作用)而被移除。 Therefore, various embodiments of the present invention include additional fixing components that are configured to mate with existing substrate holders and/or actuating link sets to ensure that they are under load due to increased bias The integrity of the system and generally increase the reliability of the actuation linkage group (regardless of whether it is biased or unbiased). In some embodiments, the fixing components are designed to require lateral force to be imposed (such as by a prying tool) in order to become separated. Because the actuation linkage group does not experience large lateral force during operation, the fixed components are not moved due to the biasing force or the operating positive force (their equivalent axial rather than lateral action) except.
本發明之各種實施例亦降低對將一門總成安裝至該容器部分中之扭矩需求。習知SMIF卡匣亦可需要超過7英吋-磅(in-lbf)之扭矩來閂鎖一門至圓頂且從該圓頂解鎖該門。揭示一種彈簧加載配置,其提供對該門閂鎖的致動之一力協助,當閂鎖該門至該圓頂且從該圓頂解鎖該門總成時該力協助降低伴隨的扭矩需求。舉例而言,測試已表明,在該圓頂內之該門總成之閂鎖操作期間,對該閂鎖操作之該等扭矩需求減小超過50%。 Various embodiments of the present invention also reduce the torque requirements for installing a door assembly into the container portion. Conventional SMIF cassettes can also require more than 7 inch-pounds (in-lbf) of torque to latch a door to the dome and unlock the door from the dome. A spring-loaded configuration is disclosed that provides a force assist in the actuation of the door latch, which force assists in reducing the accompanying torque demand when the door is latched to the dome and the door assembly is unlocked from the dome. For example, tests have shown that during the latch operation of the door assembly in the dome, the torque requirements for the latch operation are reduced by more than 50%.
在結構上,在本發明之各種實施例中,揭示一種基板容器,其包含:一容器部分,其包含界定一開口之一門框;及一門,其經構形以安裝於該門框內。一致動連桿組總成包含一框架、一基板保持件總成及一心軸,該心軸經樞轉地安裝至該框架且至該基板保持件總成,該框架經安裝至該容器部分之一內壁,該基板保持件總成可延伸至該門框之開口中。該致動連桿組總成可選擇性地構形於一基板保持位置中,其中當該門座落在該門框內時,該基板保持件總成與該門接觸且藉由該門致動。該致動連桿組總成亦可選擇性地構形於一基板非保持位置中,其中當該門不在該門框內時,該基板保持件總成延伸至該門框之該開口中。一偏置部件經操作耦合至該框架、該心軸及該基板保持件總成之至少一者,該偏置部件將該致動連桿組總成偏置於該基板非保持位置中。 Structurally, in various embodiments of the present invention, a substrate container is disclosed, which includes: a container portion including a door frame defining an opening; and a door configured to be installed in the door frame. The actuating linkage assembly includes a frame, a base plate holder assembly, and a mandrel. The mandrel is pivotally mounted to the frame and to the base plate holder assembly, and the frame is mounted to the container portion An inner wall, the substrate holder assembly can extend into the opening of the door frame. The actuation linkage assembly can be selectively configured in a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the door and is actuated by the door . The actuating link assembly assembly can also be selectively configured in a base plate non-holding position, wherein when the door is not in the door frame, the base plate holder assembly extends into the opening of the door frame. A biasing component is operatively coupled to at least one of the frame, the mandrel and the substrate holder assembly, and the biasing component biases the actuating link assembly to the substrate non-holding position.
在本發明之各種實施例中,揭示一種用於一基板容器之門,其包含一前板及一背板,其等經接合以界定一內部腔室。一閂鎖凸輪經安裝至該內部腔室內之該門且可圍繞一凸輪軸線旋轉。一閂鎖臂經安置於該內部腔室內且可操作耦合至該閂鎖凸輪。一弓形彈簧包含一第一端及一第二端,該第一端經樞轉地耦合至該閂鎖凸輪,該第二端經樞轉地耦合至該閂鎖臂。該閂鎖凸輪可自該門處於一解鎖構形中之一第一角定向旋轉至該門處於一完全閂鎖構形中之一第二角定向。該弓形彈簧在介於該第一角定向與該第二角定向之間的一中間角定向處處於最大壓縮中。 In various embodiments of the present invention, a door for a substrate container is disclosed, which includes a front plate and a back plate, which are joined to define an internal chamber. A latch cam is installed to the door in the internal cavity and can rotate around a cam axis. A latch arm is disposed in the internal cavity and operatively coupled to the latch cam. A bow spring includes a first end and a second end, the first end is pivotally coupled to the latch cam, and the second end is pivotally coupled to the latch arm. The latch cam can rotate from a first angular orientation in the door in an unlocked configuration to a second angular orientation in the door in a fully latched configuration. The bow spring is in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation.
在本發明之各種實施例中,揭示一種基板容器,其包含:一容器部分,其包含界定一開口之一門框;及一門,其經構形以安裝於該門框內。該門包含:一前板及一背板,其等經接合以界定一內部腔室;一閂鎖凸輪,其經安裝至該內部腔室內之該門且可圍繞一凸輪軸線旋轉,該閂鎖凸 輪可自該門處於一解鎖構形中之一第一角定向旋轉至該門處於一閂鎖構形中之一第二角定向;一閂鎖臂,其經安置於該內部腔室內且可操作耦合至該閂鎖凸輪;及一弓形彈簧,其具有一第一端及一第二端,該第一端經樞轉地耦合至該閂鎖凸輪,該第二端經樞轉地耦合至該閂鎖臂,該弓形彈簧在介於該第一角定向與該第二角定向之間的一中間角定向處處於最大壓縮中。在一或多個實施例中,一致動連桿組總成包含一框架、一基板保持件總成及一心軸,該心軸經樞轉地安裝至該框架且至該基板保持件總成,該框架經安裝至該容器部分之一內壁,該基板保持件總成可延伸至該門框之該開口中。在此等實施例中,該致動連桿組總成可選擇性地構形於一基板保持位置中,其中當該門座落在該門框內時,該基板保持件總成與該門接觸且藉由該門致動。亦在此等實施例中,該致動連桿組總成可選擇性地構形於一基板非保持位置中,其中當該門不在該門框內時,該基板保持件總成延伸至該門框之該開口中。一偏置部件經操作耦合至該框架、該心軸及該基板保持件總成之至少一者,該偏置部件將該致動連桿組總成偏置於該基板非保持位置中。 In various embodiments of the present invention, a substrate container is disclosed that includes: a container portion including a door frame defining an opening; and a door configured to be installed in the door frame. The door includes: a front plate and a back plate, which are joined to define an internal cavity; a latch cam, which is installed to the door in the internal cavity and can rotate around a cam axis, the latch Convex The wheel can be rotated from the door in a first angular orientation in an unlocked configuration to the door in a second angular orientation in a latched configuration; a latch arm, which is arranged in the internal cavity and can be Operatively coupled to the latch cam; and a bow spring having a first end and a second end, the first end is pivotally coupled to the latch cam, and the second end is pivotally coupled to The latch arm and the bow spring are in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation. In one or more embodiments, the actuating link assembly includes a frame, a base plate holder assembly, and a mandrel, the mandrel is pivotally mounted to the frame and to the base plate holder assembly, The frame is installed to an inner wall of the container part, and the substrate holder assembly can extend into the opening of the door frame. In these embodiments, the actuating linkage assembly can be selectively configured in a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the door And actuated by the door. Also in these embodiments, the actuating link assembly assembly can be selectively configured in a substrate non-retaining position, wherein when the door is not in the door frame, the substrate holder assembly extends to the door frame It's in the opening. A biasing component is operatively coupled to at least one of the frame, the mandrel and the substrate holder assembly, and the biasing component biases the actuating link assembly to the substrate non-holding position.
在本發明之各種實施例中,一種用於將基板保持在一基板載體內之方法包含:將該基板載體內之一致動連桿組總成構形在一基板保持位置中以用於將基板選擇性地保持在該基板載體內;及當該致動連桿組總成處於該基板保持位置中時,將該致動連桿組總成偏置於一基板非保持位置中。 In various embodiments of the present invention, a method for holding a substrate in a substrate carrier includes: configuring an actuating link assembly assembly in the substrate carrier in a substrate holding position for holding the substrate Selectively retained in the substrate carrier; and when the actuating link assembly is in the substrate holding position, the actuating link assembly is biased in a substrate non-holding position.
在本發明之各種實施例中,一基板容器包含一容器部分,其包含:一門框,其界定一開口;一門,其經構形以安裝於該門框內;及一致動連桿組總成。該致動連桿組總成包含:一框架,其經安裝至該容器部分之一內壁;一心軸,其經樞轉地安裝至該框架;一基板保持件總成,其經樞轉 地安裝至該心軸,該基板保持件總成可延伸至該門框之該開口中。一輪軸可安裝至該基板保持件總成之一下端,藉由在該基板保持件總成之該下端處界定之一夾入式結構將該軸保持至該基板保持件總成。在一些實施例中,一輪保持夾經安裝至該基板保持件總成且經構形以防止該軸自該基板保持件總成釋放,該致動連桿組總成可選擇性地構形於一基板保持位置中,其中當該門座落在該門框內時該基板保持件總成與該輪接觸且藉由該門致動,該輪經構形以沿著該門之一內表面滾動。 In various embodiments of the present invention, a substrate container includes a container portion including: a door frame that defines an opening; a door that is configured to be installed in the door frame; and an actuating linkage assembly. The actuation linkage assembly includes: a frame, which is mounted to an inner wall of the container part; a mandrel, which is pivotally mounted to the frame; a base plate holder assembly, which is pivoted Ground-mounted to the spindle, the substrate holder assembly can extend into the opening of the door frame. A wheel shaft can be mounted to a lower end of the substrate holder assembly, and the shaft is held to the substrate holder assembly by defining a clip-in structure at the lower end of the substrate holder assembly. In some embodiments, a wheel retaining clip is mounted to the substrate holder assembly and configured to prevent the shaft from being released from the substrate holder assembly, and the actuation linkage assembly can be selectively configured to In a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the wheel and is actuated by the door, the wheel is configured to roll along an inner surface of the door .
在一些實施例中,該輪保持夾包含複數個鉤部分,其等與該基板保持件總成耦合以將該輪保持夾固定至該基板保持件總成。該基板保持件總成可包含界定一孔隙之一基座。在一些實施例中,該輪保持夾之該複數個鉤部分之至少一者經耦合至該孔隙之一周邊。該輪保持夾可包含用於將該輪保持夾配準在該孔隙內之配準結構。在一些實施例中,一輪軛經安置於該基板保持件總成之該下端處,該輪軸經安裝至該輪軛。在一些實施例中,該基板保持件總成之該夾入式結構包含一彈性懸臂,該彈性懸臂對該軸施加一偏置力以將該軸保持於該輪軛內,且該輪保持夾經構形以防止該夾入式結構之該彈性懸臂偏轉,藉此防止該夾入式結構釋放該軸。在各種實施例中,該輪保持夾之該複數個鉤部分之至少一者與該輪軛耦合。該輪保持夾亦可經構形以使該複數個鉤部分之該至少一者圍繞該輪軛彈性移位且在組裝時夾至該輪軛上。在一些實施例中,耦合至該輪軛之該複數個鉤部分之至少一者包含用於在組裝期間在該輪軛上方滑動之一引入結構。 In some embodiments, the wheel holding clip includes a plurality of hook portions that are coupled with the substrate holder assembly to fix the wheel holding clip to the substrate holder assembly. The substrate holder assembly may include a base defining an aperture. In some embodiments, at least one of the hook portions of the wheel retaining clip is coupled to a periphery of the aperture. The wheel holding clip may include a registration structure for registering the wheel holding clip in the aperture. In some embodiments, a wheel yoke is disposed at the lower end of the base plate holder assembly, and the wheel axle is mounted to the wheel yoke. In some embodiments, the clip-in structure of the substrate holder assembly includes an elastic cantilever that applies a biasing force to the shaft to hold the shaft in the yoke, and the wheel holding clip It is configured to prevent the elastic cantilever of the clip-in structure from deflecting, thereby preventing the clip-in structure from releasing the shaft. In various embodiments, at least one of the plurality of hook portions of the wheel retaining clip is coupled with the wheel yoke. The wheel retaining clip can also be configured so that the at least one of the plurality of hook portions is elastically displaced around the yoke and clamped to the yoke when assembled. In some embodiments, at least one of the plurality of hook portions coupled to the yoke includes an introduction structure for sliding over the yoke during assembly.
在本發明之各種實施例中,一基板容器包含:一容器部分,其包含界定一開口之一門框;一門,其經構形以安裝於該門框內;及一致動連桿組總成。在一些實施例中,該致動連桿組包含:一框架,其經安裝至該容 器部分之一內壁;一心軸,其具有樞轉地安裝至該框架之一近端側及包含一樞軸桿之一遠端側;及一基板保持件總成,其可延伸至該門框之該開口中且經樞轉地安裝至該心軸之該樞軸桿,該基板保持件總成界定一凹槽,該樞軸桿可在該凹槽內相對於該基板保持件總成旋轉。在一些實施例中,一樞轉鎖定夾安裝至該基板保持件總成以將該樞軸桿捕捉在該基板保持件總成與該樞轉鎖定夾之間。該樞轉鎖定夾可包含複數個鉤部分,其等與該基板保持件總成耦合以將該樞轉鎖定夾固定至該基板保持件總成。在一些實施例中,該基板保持件總成包含界定該凹槽之一軸向延伸部分,該軸向延伸部分界定相對的軸向延伸邊緣,其中該樞轉鎖定夾之該複數個鉤部分之至少一些經耦合至該軸向延伸部分之該等相對之的軸向延伸邊緣。 In various embodiments of the present invention, a substrate container includes: a container portion including a door frame defining an opening; a door configured to be installed in the door frame; and an actuating linkage assembly. In some embodiments, the actuation linkage group includes: a frame installed to the container An inner wall of the device part; a spindle having a proximal side pivotally mounted to the frame and a distal side including a pivot rod; and a base plate holder assembly that can extend to the door frame In the opening and pivotally mounted to the pivot rod of the spindle, the substrate holder assembly defines a groove, and the pivot rod can rotate relative to the substrate holder assembly in the groove . In some embodiments, a pivotal locking clip is mounted to the substrate holder assembly to capture the pivot rod between the substrate holder assembly and the pivotal locking clip. The pivoting locking clip may include a plurality of hook parts that are coupled with the substrate holder assembly to fix the pivoting locking clip to the substrate holder assembly. In some embodiments, the substrate holder assembly includes an axially extending portion defining the groove, the axially extending portion defining opposite axially extending edges, wherein one of the plurality of hook portions of the pivotal locking clip At least some are coupled to the opposite axially extending edges of the axially extending portion.
該樞轉鎖定夾可包含:一弓形主體部分,其包含相對兩端;及一第一對鉤部分,其自該弓形主體部分之一第一端延伸,其中該第一對鉤部分經耦合至該基板保持件總成以抵靠該心軸之該樞軸桿固定該弓形主體部分。在一些實施例中,該基板保持件總成包含界定該凹槽之一軸向延伸部分,該軸向延伸部分界定相對的軸向延伸邊緣。該第一對鉤部分經構形以接合該軸向延伸部分之該等相對的軸向延伸邊緣。該第一對鉤部分可經構形用於圍繞該基板保持件總成之該軸向延伸部分之彈性移位且在組裝時夾至該軸向延伸部分上。同樣地,該第一對鉤部分可包含經構形以在組裝期間使該第一對鉤部分遠離彼此偏轉之引入結構。 The pivotal locking clip may include: an arcuate body portion including opposite ends; and a first pair of hook portions extending from a first end of the arcuate body portion, wherein the first pair of hook portions are coupled to The substrate holder assembly fixes the arcuate main body part by abutting against the pivot rod of the mandrel. In some embodiments, the substrate holder assembly includes an axially extending portion defining the groove, the axially extending portion defining opposite axially extending edges. The first pair of hook portions are configured to engage the opposite axially extending edges of the axially extending portion. The first pair of hook portions may be configured for elastic displacement around the axially extending portion of the substrate holder assembly and clamped to the axially extending portion during assembly. Likewise, the first pair of hook portions may include an introduction structure that is configured to deflect the first pair of hook portions away from each other during assembly.
在一些實施例中,該樞轉鎖定夾包含自該弓形主體部分之一第二端延伸之一第二對鉤部分,其中該第二對鉤部分經耦合至該基板保持件總成以抵靠該心軸之該樞軸桿固定該弓形主體部分。該第二對鉤部分可經構形以接合該軸向延伸部分之該等相對的軸向延伸邊緣。如同該第一對鉤部 分,該第二對鉤部分可經構形用於圍繞該基板保持件總成之該軸向延伸部分之彈性移位且在組裝時夾至該軸向延伸部分上。在一些實施例中,該第二對鉤部分之各鉤部分包含經構形以在組裝期間使該第二對鉤部分遠離彼此偏轉之引入結構。 In some embodiments, the pivotal locking clip includes a second pair of hook portions extending from a second end of the arcuate body portion, wherein the second pair of hook portions are coupled to the substrate holder assembly to abut The pivot rod of the spindle fixes the arcuate main body part. The second pair of hook portions may be configured to engage the opposite axially extending edges of the axially extending portion. Like the first pair of hooks In addition, the second pair of hook portions can be configured for elastic displacement around the axially extending portion of the substrate holder assembly and clamped to the axially extending portion during assembly. In some embodiments, each hook portion of the second pair of hook portions includes an introduction structure that is configured to deflect the second pair of hook portions away from each other during assembly.
10:基板容器 10: Substrate container
12:容器部分 12: Container part
14:門總成 14: Door assembly
14a:門總成 14a: Door assembly
16:後壁 16: back wall
18:側壁 18: side wall
20:前壁 20: front wall
22:側壁 22: side wall
24:頂部部分 24: Top part
26:底部總成 26: bottom assembly
27:殼體 27: Shell
28:門框 28: door frame
29:基板 29: substrate
29a:邊緣 29a: Edge
30:致動連桿組總成 30: Actuation connecting rod assembly
30a:致動連桿組總成 30a: Actuation connecting rod assembly
30b:致動連桿組總成 30b: Actuation connecting rod assembly
30c:致動連桿組總成 30c: Actuation connecting rod assembly
30d:致動連桿組總成 30d: Actuation connecting rod assembly
30e:致動連桿組總成 30e: Actuation connecting rod assembly
30f:致動連桿組總成 30f: Actuation connecting rod assembly
31:內表面 31: inner surface
32:框架 32: Frame
34:上心軸 34: Upper spindle
36:下心軸 36: Lower spindle
37:樞軸座 37: pivot seat
38:撐條 38: stay
39:樞軸線/旋轉軸線 39: pivot axis/rotation axis
40:偏置部件 40: Bias part
40a:線圈彈簧 40a: coil spring
40b:偏置部件 40b: Bias part
40c:偏置部件 40c: Bias part
40d:偏置部件 40d: offset parts
40e:偏置部件 40e: offset part
41:近端側 41: proximal side
42:遠端側 42: distal side
44:圓柱形樞軸桿 44: Cylindrical pivot rod
45:上橫向部件 45: Upper cross member
46:下橫向部件 46: Lower cross member
47:側向部件 47: Lateral parts
50:基板保持件總成 50: substrate holder assembly
51:背側 51: Backside
54:基座部分 54: base part
56:接合部分 56: Joint part
57:覆模部分 57: Overmolding part
58:軌道部分 58: Track part
59:軌道部分 59: Track part
61:橫向部件 61: Transverse parts
62:橫向部件 62: Transverse parts
63:橫向部件 63: Transverse parts
64:橫向部件 64: Transverse parts
65:橫向部件 65: Transverse parts
66:橫向部件 66: Transverse parts
67:中心軸 67: central axis
68:上夾總成 68: Upper clamp assembly
74:軸向延伸部分 74: Axial extension
75:軸向延伸邊緣 75: Axial extension edge
76:凹槽 76: Groove
77:軸向延伸邊緣 77: Axial extension edge
87:軸向延伸部分 87: Axial extension
88:間隙器 88: Spacer
89:孔隙 89: Pore
90:輪軛 90: wheel yoke
92:自由端 92: free end
94:輪 94: round
96:軸 96: axis
98:夾入式結構 98: Clamp-in structure
99:下端 99: bottom
101:彈性懸臂 101: Flexible cantilever
102:延伸部分 102: Extension
104:旋轉止檔 104: Rotation stop
106:遠端 106: remote
122:彈簧臂 122: spring arm
132:連續彈性帶 132: Continuous elastic belt
134:安裝結構 134: Installation structure
142:輪保持夾 142: Wheel holding clip
144:樞轉鎖定夾 144: pivot locking clip
146:板部分 146: board part
148:內安裝表面 148: Internal mounting surface
152:外表面 152: Outer surface
153:底部邊緣 153: bottom edge
154:臂部分 154: arm part
156:特徵 156: Features
157:方向 157: direction
158:鉤部分 158: hook part
162:配準結構 162: Registration structure
164:鉤部分 164: hook part
165:止檔結構 165: Stop structure
166:引入結構 166: Introducing structure
167:遠端 167: Remote
170:主體部分 170: main part
172:鉤部分 172: hook part
174:相對端 174: Opposite end
176:相對端 176: Opposite End
178:第一對鉤部分 178: The first pair of hooks
182:第二對鉤部分 182: The second pair of hooks
184:引入結構 184: Introducing structure
202:前板 202: front panel
204:背板 204: Backplane
206:外周邊部分 206: Outer peripheral part
207:閂鎖尖端孔隙 207: Latch tip aperture
208:內部腔室 208: Internal chamber
210:閂鎖總成 210: Latch Assembly
210a:閂鎖總成 210a: Latch assembly
212:閂鎖凸輪 212: Latch Cam
214:閂鎖臂 214: Latch Arm
216:弓形彈簧 216: Bow Spring
216a:弓形彈簧 216a: Bow spring
216b:弓形彈簧 216b: Bow spring
216c:弓形彈簧 216c: Bow spring
216d:弓形彈簧 216d: Bow spring
218:凸輪軸線 218: Cam axis
222:正面 222: front
224:背面 224: Back
226:鍵孔隙 226: key hole
227:弓形貫穿狹槽 227: Bow Through Slot
228:葉片 228: Blade
232:凸輪表面 232: cam surface
233:平坦表面 233: flat surface
234:傾斜表面 234: Inclined surface
236:突片 236: Tab
238:安裝孔 238: mounting hole
239:凸輪止檔 239: Cam Stop
242:凸輪介面輪廓 242: Cam interface profile
244:近端部分 244: proximal part
246:閂鎖尖端 246: Latch Tip
248:遠端部分 248: distal part
252:凸輪軸承 252: Cam bearing
254:長形孔隙 254: Long pore
255:縱向軸 255: longitudinal axis
256:安裝孔 256: mounting hole
262:第一端 262: first end
264:第二端 264: second end
266:弓形段 266: bow section
268:自由或無負載操作長度 268: free or no load operating length
268a:操作長度 268a: Operating length
268b:操作長度 268b: Operating length
268c:操作長度 268c: operating length
270:耐磨墊 270: Wear pad
272:第一角定向 272: first corner orientation
273:中間角定向 273: Mid-angle orientation
274:第二角定向 274: second corner orientation
275:引導總成 275: boot assembly
276:軸轂 276: Shaft Hub
278:偏置部件 278: Bias part
279:引導件 279: guide
282:襯套 282: Bush
292:預測 292: prediction
294:預測 294: prediction
296:局部極大值 296: local maximum
298:局部極大值 298: local maximum
299:局部極小值 299: local minimum
312:測試結果 312: test result
314:測試結果 314: test result
320:附接 320: Attach
322:襯套 322: Bush
324:直徑軸 324: Diameter shaft
326:頂部軸承部分 326: Top bearing part
340:附接 340: Attach
342:環或眼圈 342: ring or eye circle
344:軸轂 344: Hub
346:蓋銷 346: Cancellation
348:頂部軸承部分或耐磨墊 348: Top bearing part or wear pad
360:附接 360: Attach
362:襯套 362: Bush
364:更大直徑之軸 364: Larger Diameter Shaft
366:頂部軸承部分 366: Top bearing part
368:狹槽 368: slot
372:樞軸線 372: Pivot
圖1係根據本發明之一實施例之具有處於一基板非保持位置中之一致動連桿組之一基板容器之一剖視側視圖。 FIG. 1 is a cross-sectional side view of a substrate container having an actuating linkage group in a substrate non-holding position according to an embodiment of the present invention.
圖2係根據本發明之一實施例之具有處於一基板保持位置中之基板保持件之圖1之致動連桿組之一剖視側視圖。 2 is a cross-sectional side view of the actuating linkage group of FIG. 1 with a substrate holder in a substrate holding position according to an embodiment of the present invention.
圖3係根據本發明之一實施例之其中切除後壁以曝露致動連桿組之圖1之基板容器之一正視圖。 FIG. 3 is a front view of the substrate container of FIG. 1 in which the rear wall is cut to expose the actuating linkage group according to an embodiment of the present invention.
圖4係根據本發明之一實施例之圖1中之致動連桿組之一框架、一對心軸及一偏置部件之一透視圖。 Fig. 4 is a perspective view of a frame, a pair of spindles and a biasing member of the actuation linkage group in Fig. 1 according to an embodiment of the present invention.
圖5係根據本發明之一實施例之圖4之偏置部件之一放大部分圖。 Fig. 5 is an enlarged partial view of the biasing member of Fig. 4 according to an embodiment of the present invention.
圖6係根據本發明之一實施例之圖1之一基板保持件總成之一透視圖。 Fig. 6 is a perspective view of the substrate holder assembly of Fig. 1 according to an embodiment of the present invention.
圖7係根據本發明之一實施例之具有從一致動連桿組之一心軸側向延伸之一偏置部件之一致動連桿組之一透視圖。 Fig. 7 is a perspective view of an actuating link set having a biasing member extending laterally from a mandrel of the actuating link set according to an embodiment of the present invention.
圖8係根據本發明之一實施例之具有一偏置部件之處於一基板非保持位置中之一致動連桿組之一正視圖,該偏置部件包含滑動接觸一致動連桿組之一心軸之一彈簧臂。 FIG. 8 is a front view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including a spindle of the actuating link group in sliding contact One of the spring arms.
圖9係根據本發明之一實施例之圖8之處於基板非保持位置中之致動連桿組之一透視圖。 FIG. 9 is a perspective view of the actuating linkage group in the substrate non-holding position of FIG. 8 according to an embodiment of the present invention.
圖10係根據本發明之一實施例之處於一基板保持位置中之圖8及圖9之致動連桿組之一正視圖。 Fig. 10 is a front view of the actuating link assembly of Figs. 8 and 9 in a substrate holding position according to an embodiment of the present invention.
圖11係根據本發明之一實施例之圖10之處於基板保持位置中之致動連桿組之一透視圖。 FIG. 11 is a perspective view of the actuating linkage group in the substrate holding position of FIG. 10 according to an embodiment of the present invention.
圖12係根據本發明之一實施例之具有一偏置部件之處於一基板非保持位置中之一致動連桿組之一透視圖,該偏置部件包含接觸一致動連桿組之一基板保持件總成之一彈簧臂。 Fig. 12 is a perspective view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including a substrate holding contact of the actuating link set One spring arm of the piece assembly.
圖13係根據本發明之一實施例之具有一偏置部件之處於一基板非保持位置中之一致動連桿組之一正視圖,該偏置部件包含一彈性部件。 FIG. 13 is a front view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including an elastic member.
圖14係根據本發明之一實施例之圖13之處於基板非保持位置中之致動連桿組之一透視圖。 FIG. 14 is a perspective view of the actuating link group in the substrate non-holding position of FIG. 13 according to an embodiment of the present invention.
圖15係根據本發明之一實施例之處於一基板保持位置中之圖13及圖14之致動連桿組之一正視圖。 15 is a front view of the actuating link group of FIGS. 13 and 14 in a substrate holding position according to an embodiment of the present invention.
圖16係根據本發明之一實施例之圖15之處於基板保持位置中之致動連桿組之一透視圖。 FIG. 16 is a perspective view of the actuating linkage group in the substrate holding position of FIG. 15 according to an embodiment of the present invention.
圖17係根據本發明之一實施例之具有一輪保持夾及一對樞轉鎖定夾之處於一基板非保持位置中之一致動連桿組之一前透視圖。 Fig. 17 is a front perspective view of an actuating linkage group in a base non-retaining position with a wheel retaining clip and a pair of pivoting locking clips according to an embodiment of the present invention.
圖18係圖17之致動連桿組之一後透視圖。 Figure 18 is a rear perspective view of one of the actuating linkage groups of Figure 17;
圖19係根據本發明之一實施例之處於分離狀態之圖17及圖18之輪保持夾之一後透視圖。 Figure 19 is a rear perspective view of the wheel retaining clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.
圖20係根據本發明之一實施例之處於分離狀態之圖17及圖18之輪保持夾之一前透視圖。 Fig. 20 is a front perspective view of the wheel retaining clip of Figs. 17 and 18 in a separated state according to an embodiment of the present invention.
圖21係根據本發明之一實施例之處於分離狀態之圖17及圖18之輪保 持夾之一後正視圖。 FIG. 21 is the wheel insurance of FIG. 17 and FIG. 18 in a separated state according to an embodiment of the present invention Front view after holding one of the clips.
圖22係根據本發明之一實施例之處於分離狀態之圖17及圖18之輪保持夾之一俯視圖。 Figure 22 is a top view of the wheel retaining clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.
圖23係根據本發明之一實施例之與一基板保持件總成對準之圖17及圖18之輪保持夾之一後透視圖。 Fig. 23 is a rear perspective view of the wheel holding clip of Figs. 17 and 18 aligned with a substrate holder assembly according to an embodiment of the present invention.
圖24係根據本發明之一實施例之安裝於基板保持件總成上之圖17及圖18之輪保持夾之一部分、後透視圖。 Fig. 24 is a partial rear perspective view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.
圖25係根據本發明之一實施例之安裝於基板保持件總成上之圖17及圖18之輪保持夾之一部分、前透視圖。 Fig. 25 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.
圖26係根據本發明之一實施例之安裝於基板保持件總成上之圖17及圖18之輪保持夾之一仰視圖。 Figure 26 is a bottom view of the wheel retaining clip of Figures 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.
圖27係根據本發明之一實施例之安裝於基板保持件總成上之圖17及圖18之輪保持夾之一部分、前透視圖。 Fig. 27 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.
圖28係根據本發明之一實施例之處於分離狀態之圖17及圖18之樞轉鎖定夾之一後透視圖。 Figure 28 is a rear perspective view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.
圖29係根據本發明之一實施例之處於分離狀態之圖17及圖18之樞轉鎖定夾之一前透視圖。 Figure 29 is a front perspective view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.
圖30係根據本發明之一實施例之處於分離狀態之圖17及圖18之樞轉鎖定夾之一側視圖。 Figure 30 is a side view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.
圖31係根據本發明之一實施例之與一基板保持件總成及心軸對準之圖17及圖18之樞轉鎖定夾之一部分、後透視圖。 Figure 31 is a partial rear perspective view of the pivot locking clip of Figures 17 and 18 aligned with a substrate holder assembly and a mandrel according to an embodiment of the present invention.
圖32係根據本發明之一實施例之安裝於基板保持件總成及心軸上之圖17及圖18之輪保持夾之一部分、後透視圖。 Fig. 32 is a partial rear perspective view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly and the spindle according to an embodiment of the present invention.
圖33係根據本發明之一實施例之安裝於基板保持件總成及心軸上之圖17及圖18之輪保持夾之一部分、前透視圖。 Fig. 33 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the base plate holder assembly and the spindle according to an embodiment of the present invention.
圖34係根據本發明之一實施例之安裝於基板保持件總成及心軸上之圖17及圖18之輪保持夾之一部分、橫截面視圖。 Fig. 34 is a partial cross-sectional view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly and the spindle according to an embodiment of the present invention.
圖35係根據本發明之一實施例之安裝於一基板容器之一門總成內之一閂鎖機構之一部分透視圖。 35 is a partial perspective view of a latch mechanism installed in a door assembly of a substrate container according to an embodiment of the present invention.
圖36係根據本發明之一實施例之處於分離狀態之圖35之一閂鎖凸輪之一透視圖。 Figure 36 is a perspective view of the latch cam of Figure 35 in a separated state according to an embodiment of the present invention.
圖37係根據本發明之一實施例之圖36之閂鎖凸輪之相對側之一透視圖。 Fig. 37 is a perspective view of the opposite side of the latch cam of Fig. 36 according to an embodiment of the present invention.
圖38係根據本發明之一實施例之圖35之一閂鎖臂之一平面圖。 Fig. 38 is a plan view of the latch arm of Fig. 35 according to an embodiment of the present invention.
圖39係根據本發明之一實施例之處於一閂鎖構形中且描繪閂鎖凸輪之角移位之圖35之閂鎖機構之一部分平面圖。 FIG. 39 is a partial plan view of the latch mechanism of FIG. 35 in a latch configuration and depicting the angular displacement of the latch cam according to an embodiment of the present invention.
圖40A至圖40D係本發明之實施例中之處於分離狀態之弓形彈簧之透視圖。 40A to 40D are perspective views of the bow spring in a separated state in an embodiment of the present invention.
圖41係根據本發明之一實施例之一閂鎖機構之一部分透視圖,該閂鎖機構具有各界定一S形段之弓形彈簧,該閂鎖機構安裝於一基板容器之一門總成內。 Fig. 41 is a partial perspective view of a latch mechanism according to an embodiment of the present invention. The latch mechanism has arch springs each defining an S-shaped section. The latch mechanism is installed in a door assembly of a substrate container.
圖42係根據本發明之一實施例之圖41之閂鎖機構之一放大圖,其繪示用於偏置門總成內之閂鎖臂之一引導總成。 Fig. 42 is an enlarged view of the latch mechanism of Fig. 41 according to an embodiment of the present invention, which shows a guide assembly for biasing the latch arm in the door assembly.
圖43A係在一解鎖構形中之圖41之閂鎖機構之一部分視圖。 Figure 43A is a partial view of the latch mechanism of Figure 41 in an unlocked configuration.
圖43B係根據本發明之一實施例之圖41之閂鎖機構之一部分視圖,該閂鎖機構處於介於一閂鎖構形與一解鎖構形之間的一中間構形。 FIG. 43B is a partial view of the latch mechanism of FIG. 41 according to an embodiment of the present invention, the latch mechanism being in an intermediate configuration between a latch configuration and an unlock configuration.
圖43C係在一完全閂鎖構形中之圖41之閂鎖機構之一部分視圖。 Figure 43C is a partial view of the latch mechanism of Figure 41 in a fully latched configuration.
圖44A係根據本發明之一實施例之具有處於一解鎖構形中之閂鎖凸輪及閂鎖臂之圖35之門總成之一截面視圖。 Figure 44A is a cross-sectional view of the door assembly of Figure 35 with a latch cam and a latch arm in an unlocked configuration according to an embodiment of the present invention.
圖44B係根據本發明之一實施例之具有處於一完全閂鎖構形中之閂鎖凸輪及閂鎖臂之圖35之門總成之一截面視圖。 Figure 44B is a cross-sectional view of the door assembly of Figure 35 with the latch cam and the latch arm in a fully latched configuration according to one embodiment of the present invention.
圖45A係繪製根據本發明之一實施例致動圖41之閂鎖機構之閂鎖所需之扭矩對角定向之一圖。 FIG. 45A is a diagram depicting the diagonal orientation of the torque required to actuate the latch of the latch mechanism of FIG. 41 according to an embodiment of the present invention.
圖45B係繪製根據本發明之一實施例致動圖35之門總成之閂鎖所需之扭矩對角定向之一圖。 FIG. 45B is a diagram illustrating the diagonal orientation of the torque required to actuate the latch of the door assembly of FIG. 35 according to an embodiment of the present invention.
圖46A係根據本發明之一實施例之比較一習知基板載體門之一閂鎖機構與圖41之閂鎖機構之閂鎖扭矩需求之一圖。 FIG. 46A is a diagram comparing the latch torque requirements of a latch mechanism of a conventional substrate carrier door and the latch mechanism of FIG. 41 according to an embodiment of the present invention.
圖46B係根據本發明之一實施例之比較習知基板載體門之一閂鎖機構與圖41之閂鎖機構之解鎖扭矩需求之一圖。 FIG. 46B is a diagram comparing the unlocking torque requirements of a latch mechanism of a conventional substrate carrier door and the latch mechanism of FIG. 41 according to an embodiment of the present invention.
圖47係根據本發明之一實施例之具有一襯套之一閂鎖凸輪之一透視截面圖,該襯套用於將一弓形彈簧耦合至該閂鎖凸輪。 Figure 47 is a perspective cross-sectional view of a latch cam having a bush for coupling a bow spring to the latch cam according to an embodiment of the present invention.
圖48A係根據本發明之一實施例之具有一襯套之一閂鎖凸輪之一放大、透視及部分分解視圖,該襯套用於將一弓形彈簧耦合至該閂鎖凸輪。 Figure 48A is an enlarged, perspective and partially exploded view of a latch cam with a bush for coupling an arcuate spring to the latch cam according to an embodiment of the present invention.
圖48B係圖48A之經組裝閂鎖凸輪及襯套之一透視圖。 Fig. 48B is a perspective view of the assembled latch cam and bushing of Fig. 48A.
圖49係根據本發明之一實施例之耦合至一閂鎖臂及一弓形彈簧之一襯套之一放大、透視圖。 Figure 49 is an enlarged, perspective view of a bush coupled to a latch arm and a bow spring according to an embodiment of the present invention.
此申請案主張2015年10月1日申請且發明名稱為「Substrate Container with Improved Wafer Retainer and Door Latch Assist Mechanism」之美國臨時申請案第62/235,682號之優先權,且亦主張2016年5約20日申請且發明名稱為「Substrate Container with Improved Substrate Retainer and Door Latch Assist Mechanism」之美國臨時申請案第62/339,404號之優先權,該等案之全部內容以引用之方式併入本文中。 This application claims to be filed on October 1, 2015 and the invention name is "Substrate "Container with Improved Wafer Retainer and Door Latch Assist Mechanism" in the U.S. Provisional Application No. 62/235,682 priority, and also claimed to be filed on May 20, 2016 and the title of the invention is "Substrate Container with Improved Substrate Retainer and Door Latch Assist" The priority of US Provisional Application No. 62/339,404 of Mechanism", the entire contents of which are incorporated herein by reference.
參考圖1至圖6,根據本發明之一實施例描繪一基板容器10。基板容器10包含:一圓頂或容器部分12,其具有安裝至其上之一致動連桿組總成30、30a;及一門總成14,其用於選擇性影響基板容器10之閉合。所描繪之特定實施例係一底開式標準機械介面(SMIF)卡匣,其中容器部分12大致具有立體形狀且具有一前壁20、一後壁16、兩個側壁18及22、一頂部部分24及一底部總成26。底部總成26包含門總成14,該門總成14可座落在容器部分12之一門框28內以形成一殼體27。具有邊緣29a之複數個基板29可容納於殼體27內且可藉由一H型桿件載體(未描繪)懸吊。
1 to 6, a
本發明揭示致動連桿組總成之若干實施例,其等一般或共同藉由元件符號30指代(例如,致動連桿組總成30),且個別藉由元件符號30接著一字母後綴指代(例如,致動連桿組總成30a,如上文討論)。各種致動連桿組總成30包含許多與致動連桿組總成30相同之組件及屬性,其等藉由類似編號之元件符號指示。 The present invention discloses several embodiments of the actuation linkage assembly, which are generally or collectively referred to by the symbol 30 (for example, the actuation linkage assembly 30), and are individually followed by the symbol 30 followed by a letter The suffix refers to (eg, actuation linkage assembly 30a, as discussed above). The various actuating link assembly 30 include many components and attributes that are the same as the actuating link assembly 30, which are indicated by similarly numbered component symbols.
在所描繪實施例中,致動連桿組總成30a靠近於後壁16之一內表面31從頂部部分24下垂。替代地或另外地,致動連桿組總成30a可與壁16、18、20或22之一者可操作地耦合,或耦合至門總成14。致動連桿組總成30a可包含一框架32,該框架32包含一上橫向部件45及一下橫向部件46,
其等分隔開一對側向部件47(圖3及圖4)。框架32支撐在界定於框架32之側向部件47中之樞軸座37處樞轉地安裝至框架32之一上心軸34及一下心軸36。樞軸座37進一步界定側向延伸穿過框架32之樞軸線或旋轉軸線39。上心軸34及下心軸36可各包含自其延伸之一撐條38,各撐條38包含一近端側41及一遠端側42。近端側41經樞轉地安裝至框架32。遠端側42各支撐一圓柱形樞軸桿44。
In the depicted embodiment, an
在特定實施例中,一偏置部件40經可操作耦合至框架32及下心軸36。針對致動連桿組總成30a之描繪實施例,偏置部件40係連接至下心軸36之一線圈彈簧40a,線圈彈簧40a圍繞下心軸36之旋轉軸線39同心。另外或在替代例中,偏置部件40/線圈彈簧40a可耦合至上心軸34。
In certain embodiments, a biasing
在本文中,偏置部件藉由元件符號40共同或一般地指代,且個別藉由元件符號40接著一字母後綴識別(例如,線圈彈簧40a,如上文討論)。
Herein, the biasing components are collectively or generally referred to by the
在各種實施例中,致動連桿組總成30a包含一基板保持件總成50,該基板保持件總成50包含一基座部分54及與圓柱形樞軸桿44可操作地耦合之一接合部分56。基板保持件總成50可包含覆模部分57來防止歸因於與基板29接觸之碎裂、壓陷或磨損,諸如在本申請案之申請人擁有之Smith等人之國際公開案第WO 2007/146019號中描述,該案之全部揭示內容(除其中含有之明確定義及申請專利範圍外)以引用之方式併入本文中。
In various embodiments, the actuation linkage assembly 30a includes a
基板保持件總成50之基座部分54可包含藉由橫向部件61至66分隔開之一對軌道部分58及59(圖6)。一中心或縱向軸67經界定於橫向部件61至66之跨距中點處。一上夾總成68可自橫向部件62及63延伸。一軸向延伸部分74(諸如一中心橋接部件)可在橫向部件62及63之間延伸,以及在橫向部件64及65之間延伸,且可界定經塑形以當該基板保持件總成50與致
動連桿組可操作地耦合時容納圓柱形樞軸桿44之一凹槽76。各軸向延伸部分74之特徵可為具有相對的軸向延伸邊緣75及77。
The
一軸向延伸部分87(諸如在橫向部件65及66之間延伸之一橋接板)可與軌道部分58及59及橫向部件65及66協作以界定一對孔隙89。一間隙器88可從基板保持件總成50之背側51凸出。間隙器88經描繪為自橫向部件65延伸。可利用超過一個間隙器88。具有一自由端92之一輪軛90沿著中心軸67自橫向部件66延伸,其中一輪94及軸96與輪軛90可操作地耦合。在此構形中,軸96在靠近自由端92處安裝至輪軛90,使得輪94之外半徑凸出超越輪軛90之自由端92。在各種實施例中,一夾入式結構98經界定於基板保持件總成50之一下端99,夾入式結構98經構形以將軸96保持至基板保持件總成50。在一些實施例中,夾入式結構98包含一彈性懸臂101,該彈性懸臂101對軸96施加一偏置力以將軸96保持於輪軛90內。
An axially extending portion 87 (such as a bridge plate extending between the
在各種實施例中,致動連桿組總成30a可選擇性地構形於一基板保持位置中,如在圖2中描繪,其中當門總成14座落在門框28內時,基板保持件總成50與門總成14接觸且藉由門總成14致動。在此實施例中,致動連桿組總成30a亦可選擇性地構形於一基板非保持位置中,如在圖1中描繪,其中當門總成14不在門框28內時,該基板保持件總成延伸至門框28之一開口中。
In various embodiments, the actuating link assembly 30a can be selectively configured in a base plate holding position, as depicted in FIG. 2, where the base plate is held when the
功能上,偏置部件40(線圈彈簧40a)作用以將致動連桿組總成30a偏置於圖2之非保持位置中。此偏置幫助致動連桿組總成30a克服移動組件之間的任何摩擦,使得在門總成14自基板容器10移除之後,基板保持件總成50從基板29脫離。
Functionally, the biasing member 40 (coil spring 40a) acts to bias the actuation linkage assembly 30a in the non-holding position of FIG. 2. This bias helps actuate the linkage assembly 30a to overcome any friction between the moving components so that after the
參考圖7,根據本發明之一實施例描繪一致動連桿組總成30b。致動
連桿組總成30b包含一偏置部件40b,該偏置部件40b包含側向延伸超越樞軸座37之下心軸36之一延伸部分102,延伸部分102包含在一遠端106處之一旋轉止檔104。在所描繪實施例中,延伸部分102側向延伸超越框架32,使得旋轉止檔104接合後壁16之內表面31。延伸部分102可沿著樞軸線39側向延伸,如在圖7中描繪。
Referring to FIG. 7, an
在各種實施例中,旋轉止檔104經配置以垂直於樞軸線39且在平行於撐條38之一平面中延伸以偏置致動連桿組總成30b。因此,致動連桿組總成30b被偏置在基板非保持構形中。
In various embodiments, the rotation stop 104 is configured to extend perpendicular to the
功能上,在使門總成14座落在門框28內之後,基板保持件總成50旋轉且平移至基板容器10中,使下心軸36旋轉,而旋轉止檔104防止下心軸36之延伸部分102之遠端106之旋轉。至少當門總成14座落在門框28內時,沿著下心軸36之差分旋轉產生一扭轉。扭轉產生一偏置扭矩,該偏置扭矩將致動連桿組總成30b朝向基板非保持構形偏置,但此藉由門總成14座落在門框28內而克服。在門總成14自門框28離座之後,偏置扭矩使致動連桿組總成30b返回至基板非保持構形。
Functionally, after the
亦可設想其中旋轉止檔104接合框架32而非內表面31之一實施例。同樣地,應理解,接觸內表面不限於後壁16之內表面31,但可係經定位鄰近於旋轉止檔104之任何內表面。此外,亦可設想其中一偏置部件40b自上心軸34延伸之實施例。
An embodiment in which the rotation stop 104 engages the
參考圖8至圖11,根據本發明之一實施例描繪一致動連桿組總成30c。致動連桿組總成30c之一偏置部件40c包含自框架32延伸以接觸上心軸34之撐條38之一對彈簧臂122。在所描繪實施例中,當致動連桿組總成30c自基板非保持構形(圖8及圖9)移動至基板保持構形(圖10及圖11)時,
彈簧臂122滑動接觸上心軸34。在本文中,「滑動接觸」係當一第二組件相對於一第一組件移動時使該第一組件能夠保持與該第二組件接觸,使得該第二組件在該第一組件之一表面上方滑動。彈簧臂122可大致平行於框架32而形成,其在圖8中以虛線描繪。
With reference to Figures 8 to 11, an
參考圖12,根據本發明之一實施例描繪一致動連桿組總成30d。致動連桿組總成30d之一偏置部件40d亦包含自框架32延伸之一對彈簧臂122。然而,針對致動連桿組總成30d及偏置部件40d,彈簧臂122朝向基板保持件總成50延伸且連接至基板保持件總成50。
Referring to Fig. 12, an
功能上,針對致動連桿組總成30c及30d兩者,偏置部件40c及40d之彈簧臂122藉由上心軸34之撐條38彈性移位。彈性移位在上心軸34或基板保持件總成50上施加一偏置力以將上心軸34或基板保持件總成50朝向框架32偏置。藉由使門總成14座落在門框28內而藉由由門總成14在基板保持件總成50上施加之力而克服偏置力。此偏置力有效地將致動連桿組總成30c及30d偏置於基板非保持構形中(圖8、圖9及圖12)。
Functionally, for both the
亦可設想針對致動連桿組總成30c或30d利用一單一彈簧臂122或超過兩個彈簧臂122之實施例。此外,亦可設想其中一偏置部件40c或40d作用於下心軸36上之實施例。
It is also conceivable to use a
參考圖13至圖16,根據本發明之一實施例描繪一致動連桿組總成30e。致動連桿組總成30e之一偏置部件40e包含自框架32延伸至基板保持件總成50之一連續彈性帶132。在所描繪實施例中,連續彈性帶132經連接至框架32之下橫向部件46。亦在此實施例中,基板保持件總成50包含用於安裝連續彈性帶132之安裝結構134。
Referring to FIGS. 13 to 16, an
功能上,隨著致動連桿組總成30e自基板非保持構形(圖13及圖14)移
動至基板保持構形(圖15及圖16),經彈性移位之連續彈性帶132施加一偏置力以將基板保持件總成50朝向框架32偏置,該力藉由使門總成14座落在門框28內而藉由由門在基板保持件總成50上施加之力而克服。此偏置力有效地將致動連桿組總成30e偏置於基板非保持構形中(圖15及圖16)。
Functionally, as the
亦可設想利用一非連續彈性部件之實施例以及利用複數個彈性部件(連續或非連續)之實施例。此外,亦可設想其中一偏置部件40e作用於一或多個心軸34、36上而非基板保持件總成50上及/或在除下橫向部件46外之位置處耦合至框架之實施例。
An embodiment using a non-continuous elastic member and an embodiment using a plurality of elastic members (continuous or discontinuous) are also conceivable. In addition, it is also conceivable that one of the biasing
參考圖17至圖18,根據本發明之一實施例描繪一致動連桿組總成30f。致動連桿組總成30f包含許多與致動連桿組總成30c相同之組件及屬性,其等使用相同編號之元件符號指示。另外,致動連桿組總成30f包含一輪保持夾142及一樞轉鎖定夾144。輪保持夾142安裝至基板保持件總成50且經構形以防止夾入式結構98意外釋放軸96。樞轉鎖定夾144安裝至基板保持件總成50以將圓柱形樞軸桿44捕捉於基板保持件總成50與樞轉鎖定夾144之間,藉此將基板保持件總成50鎖定至各自心軸34之圓柱形樞軸桿44。雖然致動連桿組總成30f包含許多與致動連桿組總成30c相同之組件及屬性,但輪保持夾142及樞轉鎖定夾144可使用本發明之連桿組總成30之任一者實施。
Referring to Figs. 17 to 18, an
參考圖19至圖22,根據本發明之一實施例描繪一輪保持夾142。輪保持夾142包含一板部分146,其具有一內安裝表面148及與內安裝表面148相對之一外表面152。一對臂部分154自外表面152延伸且超越板部分146之一底部邊緣153。內安裝表面148可包含在一方向157上延伸之複數個特徵156,該方向157垂直於內安裝表面148,特徵156包含鉤部分158及配準
結構162。各臂部分154包含亦在方向157上延伸之一鉤部分164。在一些實施例中,各臂部分154包含在一遠端167處之一止檔結構165。
Referring to Figures 19-22, a
參考圖23至圖27,根據本發明之一實施例描繪一輪保持夾142之安裝。在組裝時,內安裝表面148之特徵156與基板保持件總成50之孔隙89對準。輪保持夾142經安裝至基板保持件總成50,使得自板部分146延伸之各鉤部分158經耦合至基板保持件總成50之孔隙89之一各自者之一周邊,且使得配準結構162經安置於孔隙89內。臂部分154經配置以橫跨輪94,且鉤部分164橫跨且接合輪軛90之相對側。
Referring to FIGS. 23-27, the installation of a
在一些實施例中,各鉤部分164包含一引入結構166以促進組裝期間鉤部分164在輪軛90之相對側上方之滑動。當鉤部分164在輪軛90上方滑動時,引入結構166使鉤部分164偏轉。鉤部分164之偏轉由臂部分154之彈性扭轉、鉤部分164之彈性彎曲或其等之一組合造成。一旦輪保持夾142之安裝完成,則臂部分154及/或鉤部分164之彈性使鉤部分164按扣於適當位置中,藉此將輪軛90捕捉於鉤部分164之間。
In some embodiments, each
功能上,在所描繪實施例中,輪保持夾142防止輪94及軸96變為從基板保持件總成50之夾入式結構98意外移出。在一些實施例中,軸96之固定藉由阻止夾入式結構98之彈性懸臂部分101之偏轉,使得軸96無法從夾入式結構98釋放,除非移除輪保持夾142而完成。輪保持夾142藉由在孔隙89之周邊處接合之板部分146之鉤部分158且藉由夾至輪軛90之鉤部分164固定至基板保持件總成50。配準結構162幫助將板部分146與孔隙89對準,且當在操作期間經受軸向及/或側向力時維持輪保持夾142與基板保持件總成50之間的穩定性及一實質上固定關係。如在圖26及圖27中描繪,止檔結構165與輪軛90協作以提供軸96之額外捕捉。
Functionally, in the depicted embodiment, the
參考圖28至圖30,根據本發明之一實施例描繪一樞轉鎖定夾144。樞轉鎖定夾144包含一主體部分170及從主體部分170延伸之複數個鉤部分172。主體部分170包含相對端174及176。在所描繪之實施例中,複數個鉤部分172包含自相對端174之一者延伸之一第一對鉤部分178及自相對端176之另一者延伸之一第二對鉤部分182。主體部分170可係弓形的。在各種實施例中,複數個鉤部分172之一些或全部經構形為具有引入結構184。
Referring to FIGS. 28-30, a
參考圖31至圖34,根據本發明之一實施例描繪將樞轉鎖定夾144組裝至基板保持件總成50。在組裝時,第一對鉤部分178經耦合至基板保持件總成50以抵靠心軸34或36之圓柱形樞軸桿44固定主體部分170。在所描繪之實施例中,複數個鉤部分172經耦合至軸向延伸部分74之相對的軸向延伸邊緣75及77。複數個鉤部分172之一些或全部可經構形用於圍繞基板保持件總成50之軸向延伸部分74之彈性移位以用於夾至軸向延伸部分74上。
Referring to FIGS. 31 to 34, the assembly of the
功能上,複數個鉤部分172與基板保持件總成50耦合以將樞轉鎖定夾144固定至基板保持件總成50,使得各自心軸34或36之圓柱形樞軸桿44經確實地鎖定於軸向延伸部分74之凹槽76內。引入結構184在被採用時經構形使得當在組裝期間將樞轉鎖定夾144按壓至軸向延伸部分74上時,一給定對之鉤部分178及182之鉤部分172遠離彼此偏轉。樞轉鎖定夾144無法藉由施加於輪94上之軸向力而從軸向延伸部分74移出。實情係,自軸向延伸部分74移除樞轉鎖定夾144需要(諸如使用一撬動工具)使第一對鉤部分178及/或第二對鉤部分182向外側向偏轉。
Functionally, a plurality of
參考圖35至圖40D,根據本發明之一實施例描繪一門總成14。門總
成14包含一前板202(圖1)及一背板204。在各種實施例中,背板204包含一外周邊部分206;外周邊部分206亦可經形成為前板202之部分,或可藉由前板202與背板204之組合而界定。外周邊部分206亦界定穿過外周邊部分206之閂鎖尖端孔隙207(圖35)。前板202及背板204經接合以界定門總成14之一內部腔室208。
Referring to FIGS. 35 to 40D, a
門總成14包含一閂鎖總成210。在各種實施例中,閂鎖總成210包含一閂鎖凸輪212、閂鎖臂214及經連接至閂鎖凸輪212及閂鎖臂214之弓形彈簧216。閂鎖凸輪212經安裝至內部腔室208內之門總成14,可圍繞一凸輪軸線218旋轉。閂鎖凸輪212包含一正面222(圖36)及一背面224(圖37)。正面222可包含經界定於其上之鍵孔隙226,該等鍵孔隙226可透過形成於前板202上之弓形貫穿狹槽227(圖41)接達。在所描繪實施例中,背面224包含圍繞凸輪軸線218同心安置之葉片228。背面224亦可包含界定通向斜坡或傾斜表面234之平坦表面233之凸輪表面232,凸輪表面232亦圍繞凸輪軸線218同心安置。在一些實施例中,閂鎖凸輪212亦包含徑向凸出之突片236。徑向凸出之突片236之各者可界定一安裝孔238,弓形彈簧216穿過該安裝孔238而安裝。
The
在一些實施例中,門總成14包含一或多個凸輪止檔239,其等經定位以接合閂鎖凸輪212且防止閂鎖凸輪212旋轉超越一特定角旋轉。舉例而言,凸輪止檔239可自背板204延伸且經定位以接合徑向凸出之突片236之一或多者,諸如在圖35及圖39中描繪。
In some embodiments, the
閂鎖臂214經安置於內部腔室208內,該等閂鎖臂214各包含在一近端部分244處之一凸輪介面輪廓242及在一遠端部分248處之閂鎖尖端246。閂鎖臂214經對準使得閂鎖尖端246穿過外周邊部分206之閂鎖尖端孔隙
207側向延伸且縮回。在各種實施例中,閂鎖臂214與在近端部分244處之一凸輪軸承252配裝。閂鎖臂214亦可界定具有一縱向軸255之一長形孔隙254,該軸在近端部分244與遠端部分248之間的方向上延伸。閂鎖臂214亦可包含一安裝孔256,弓形彈簧216穿過該安裝孔256安裝至閂鎖臂214。
The
可利用各種弓形彈簧216,例如,在圖40A至圖40D分別描述之弓形彈簧216a至216d。弓形彈簧一般地且共同稱為(諸)弓形彈簧216,且個別藉由元件符號216接著一字母後綴(例如,圖40A之弓形彈簧216a)指示。弓形彈簧216經構形以圍繞各種間隙器及組成門總成14之其他結構佈置,同時仍在閂鎖凸輪212與閂鎖臂214之間施加一補充力。弓形彈簧216各包含一第一端262及一第二端264,且各在弓形彈簧216之至少一部分上方界定第一端262及第二端264之間的至少一個弓形段266。在所描繪實施例中,各弓形彈簧216之第一端262經樞轉地耦合至閂鎖凸輪212之突片236之一各自者,其中第二端經樞轉地耦合至閂鎖臂214之一各自者。弓形彈簧216亦界定一自由或無負載操作長度268,其經定義為第一端262與第二端264之間的一直線。弓形彈簧216可由一彈性金屬線材料(諸如不銹鋼)形成。亦可設想聚合物弓形彈簧216。
Various bow springs 216 can be used, for example, the
參考圖41及圖42,根據本發明之一實施例描繪一門總成14a,其配備具有圖40D之S形弓形彈簧216d之一閂鎖總成210a。門總成14a及閂鎖總成210a包含許多與門總成14及閂鎖總成210相同之組件及屬性,其等使用相同編號之元件符號指示。前板202在圖41及圖42中經描繪為透明或半透明的以展示門總成14a之內部運作。另外,門總成14a包含經黏附至前板202之內側之耐磨墊270,在閂鎖總成210a之致動期間S形弓形彈簧216d可
抵靠於該等耐磨墊上。
Referring to FIGS. 41 and 42, a
同樣地,門總成14a包含在長形孔隙254處與閂鎖臂214耦合之一引導總成275(圖42)且包含一軸轂276及偏置部件278。特定偏置部件278經描繪為一線圈彈簧,但技術人員預期且容易瞭解其他偏置部件。引導總成275亦可包含安置於偏置部件278與閂鎖臂214之間的一墊圈或襯套282。
Similarly, the
功能上,在所描繪實施例中,引導總成維持閂鎖臂214之對準,使得閂鎖尖端246以一所需方式穿過閂鎖尖端孔隙207延伸且縮回。軸轂276及長形孔隙254維持延伸及縮回方向上之必要對準,而偏置部件278抵靠引導件279偏置閂鎖臂214(圖44A及圖44B),使得閂鎖尖端246在前板202與背板204之間的一所需距離處穿過孔隙。可由一低摩擦或自潤滑材料製成之墊圈或襯套282滑動接觸閂鎖臂214,從而使閂鎖臂214能夠在被抵靠引導件279偏置的同時側向平移。
Functionally, in the depicted embodiment, the guide assembly maintains the alignment of the
參考圖43A至圖43C、圖44A及圖44B,在本發明之實施例中描繪閂鎖總成210a之操作。圖43A至圖43C繪示弓形彈簧216之操作,而圖44A及圖44B繪示閂鎖凸輪212與閂鎖臂214之間的相互作用。雖然所描繪之特定弓形彈簧216係S形弓形彈簧216d,但本發明之弓形彈簧216之任一者將以一類似方式起作用。
Referring to FIGS. 43A to 43C, FIG. 44A and FIG. 44B, the operation of the
閂鎖凸輪212可自門處於一解鎖構形中之一第一角定向272旋轉過一致動角θ(圖39及圖43C)至門處於一完全閂鎖構形中之一第二角定向274(圖39)。在此旋轉期間,弓形彈簧216經受在圖43A、圖43B及圖43C中分別描繪為操作長度268a、268b及268c之自由或無負載操作長度268之一變化。操作長度268a至268c藉由閂鎖凸輪212相對於閂鎖臂214之凸輪介面輪廓242之定向判定。即,弓形彈簧216遵循安裝孔238與256之間的距離
且藉由該距離界定。因此,弓形彈簧216可維持於一壓縮狀態中,其中操作長度268a、268b及268c比自由或無負載操作長度268短。
The
在各種實施例中,閂鎖總成210、210a之操作如下:操作長度268a比處於解鎖構形中(即,在第一角定向272下)之弓形彈簧216之自由或無負載操作長度268短(圖43A),使得弓形彈簧216在閂鎖凸輪212與閂鎖臂214之間施加一壓縮力。隨著閂鎖凸輪212透過致動旋轉,閂鎖凸輪212穿過一中間角定向273(圖43B),其中弓形彈簧216處於最大壓縮之一狀態中(圖43B),其中操作長度268b在致動之進程內處於一最小長度(即,其中安裝孔238及256彼此最接近)。隨著閂鎖凸輪212繼續穿過中間角定向273至完全閂鎖構形(第二角定向274)(圖43C),弓形彈簧216呈現操作長度268c,其仍維持弓形彈簧216上之一壓縮負載,但並非與在中間角定向273中之一壓縮負載一樣大。
In various embodiments, the operation of the
功能上,弓形彈簧216之壓縮狀態在閂鎖門總成14a時作用以迫使閂鎖總成210、210a之致動。致動期間,弓形彈簧216之壓縮將閂鎖臂朝向閂鎖構形推進,藉此提供力協助。即,弓形彈簧216之壓縮迫使閂鎖凸輪212朝向完全閂鎖構形旋轉且凸輪葉片228(圖37)與凸輪介面輪廓242(圖38)之間的相互作用將閂鎖臂214驅動至第二角定向274之閂鎖構形。此外,配置閂鎖總成210、210a使得弓形彈簧216在中間角定向273中處於一最大壓縮力下亦幫助將閂鎖機構固定於第一角定向272之解鎖構形中或第二角定向274之完全閂鎖構形中。即,因為弓形彈簧216在中間角定向273下施加一最大壓縮力,故弓形彈簧216據信可迫使或協助迫使閂鎖凸輪212進入一偏心定向中(即,朝向第一角定向272或第二角定向274)。偏心力亦幫助防止閂鎖凸輪212之假性旋轉。
Functionally, the compressed state of the
同時,在各種實施例中且進一步參考圖44A及圖44B,閂鎖凸輪212及閂鎖臂214如下相互作用:在第一角定向272之解鎖構形中,凸輪軸承252與閂鎖凸輪212之凸輪表面232之平坦表面233接合,其中閂鎖尖端246縮回(圖44A)。在所描繪實施例中,平坦表面233經定大小使得當閂鎖凸輪212到達或穿過圖43B之中間角定向273時,凸輪軸承252保留於平坦表面233上。進一步應注意,在所描繪實施例中,閂鎖尖端246在到達中間角定向273後延伸,如在圖43B中描繪。在穿過中間角定向273後,凸輪軸承252跨騎在凸輪表面232之傾斜表面234上,其使閂鎖臂214變為在門總成14a之內部腔室208內係傾斜的。閂鎖臂214之傾斜使延伸之閂鎖尖端246朝向門總成14a之前板202偏轉。偏轉之閂鎖尖端246接合門框28以施加一座落力於門總成14a上以將門總成14a更佳地密封於底部總成26內。圖43C及圖44B之構形(其中閂鎖尖端246側向延伸且朝向前板202偏轉)在本文中稱為一「完全閂鎖」構形。
Meanwhile, in various embodiments and with further reference to FIGS. 44A and 44B, the
參考圖45A及圖45B,分別針對本發明之實施例呈現對致動閂鎖總成210a及210之扭矩需求之預測292及294。圖45A之預測係用於致動具有S形弓形彈簧216d之閂鎖總成210a。圖45B之預測係用於致動在圖35中繪示之閂鎖總成210,其包含近似對應於圖40B之弓形彈簧216b之弓形彈簧216。隨著閂鎖機構從第一角定向272被致動至第二角定向274(即,從一解鎖至一完全閂鎖構形),預測292及294兩者呈現離散角定向下之以牛頓-米(N-m)為單位之預測扭矩。同樣地,各自門總成14a及14未座落於一容器部分12內;即,預測單獨呈現門總成14a及14之扭矩需求,而無使閂鎖尖端246座落在底部總成26內所需之任何額外扭矩需求。
With reference to FIGS. 45A and 45B,
圖45A及圖45B中呈現之預測預測在凸輪旋轉之結尾時(即,在第二
角定向274下)之一最大扭矩,而無彈簧壓縮期間之峰值扭矩之一顯著增大。即,針對表示S形弓形彈簧216d之圖45A之預測292,第二角定向274下之扭矩係在最大預測扭矩(局部極大值296)之20%內。針對表示類似於弓形彈簧216b之一弓形彈簧216之圖45B之預測294,第二角定向274下之扭矩係在最大預測扭矩(局部極大值296)之50%內。此等特性歸因於彈簧之一個端經安裝至移動之閂鎖臂214,其直接作用於閂鎖臂214上以及協助閂鎖凸輪212之旋轉。因此,雖然弓形彈簧216、216d確實儲存一些能量以提供一有效偏心效應,但賦予彈簧216、216d之能量之一些在閂鎖凸輪212旋轉期間作用於閂鎖臂214上,因此提供比將藉由僅作用於凸輪上之一彈簧將提供之更均勻之一扭矩輪廓。
The predictions presented in FIGS. 45A and 45B predict at the end of cam rotation (ie, at the second
Angular orientation 274) is one of the maximum torques, and one of the peak torques during spring compression increases significantly. That is, for the
各組預測292及294之特徵為兩個局部極大值296及298,具有界定於其等之間之一局部極小值299。局部極小值近似對應於中間角定向273(例如,圖43B)。從θ=0°至約θ=50°且穿過局部極大值296之預測292及294之部分表示將閂鎖臂214從一縮回構形(例如,圖43A)致動至一延伸構形(例如,圖43B)所需之扭矩。從約θ=50°至約θ=86°且穿過局部極大值298之預測292及294之部分表示使閂鎖臂214(例如,圖43C及圖44B)傾斜所需之扭矩。局部極小值299指示經提供近似於弓形彈簧216d、216(例如,圖43B)之最大壓縮之力協助。
Each group of
參考圖46A及圖46B,呈現比較操作門總成14a之扭矩需求與操作一習知SMIF卡匣之扭矩需求之測試結果312及314。在圖46A及圖46B中,「Conv」指示習知SMIF卡匣,而「原型(Prototype)」指示本發明之門總成14a。「單獨門(Door Only)」係指一獨立門(即,未座落在一基板容器內)且「(在圓頂中)In Dome」係指座落在一基板容器內之一門。測試結果
312呈現對閂鎖習知門及門總成14a之扭矩需求,而測試結果314呈現對解鎖習知門及門總成14a之扭矩需求。圖46A及圖46B之扭矩單位係英吋-磅力(in-lbf)。
Referring to FIGS. 46A and 46B,
針對「單獨門」構形,與「Conv」習知門相比,閂鎖扭矩及解鎖扭矩兩者對「原型」(門總成14a)略高。然而,針對「在圓頂中」構形,與習知門相比,閂鎖扭矩及解鎖扭矩兩者對「原型」門總成14a明顯小。此出乎意料的結果可歸因於藉由耦合至閂鎖凸輪212及閂鎖臂214之弓形彈簧216d提供之力協助。即,歸因於壓縮弓形彈簧216、216d所需之功增大,在凸輪旋轉之前一半期間扭矩可增大,接著最大扭矩減小,此係因為旋轉之後一半期間由彈簧提供之扭矩已包含另將在無弓形彈簧216、216d之情況下需要之儲存能量。
For the "single door" configuration, compared with the "Conv" conventional door, both the latching torque and the unlocking torque are slightly higher for the "prototype" (
參考圖47,根據本發明之一實施例描繪針對弓形彈簧216之一經修改附接320。針對所描繪實施例,一襯套322經連接至弓形彈簧216之第一端262且連接至閂鎖凸輪212之徑向凸出突片236。襯套322提供相對於弓形彈簧316之線直徑之更大直徑軸324,襯套322可在徑向凸出突片236內旋轉。襯套322亦可經構形以提供一頂部軸承部分326,該頂部軸承部分326凸出於徑向凸出突片236及閂鎖凸輪212之正面222上方。
Referring to FIG. 47, a modified
參考圖48A及圖48B,描繪根據本發明之一實施例之弓形彈簧216之另一經修改附接340。在所描繪實施例中,弓形彈簧216之第一端262界定一環或眼圈342,該環或眼圈342經定大小以圍繞自徑向凸出突片236延伸之一軸轂344旋轉。在一或多個實施例中,一蓋銷346經定尺寸以穿過眼圈342且按扣於軸轂344中,藉此捕捉弓形彈簧216之第一端262。蓋銷346亦可包含一頂部軸承部分或耐磨墊348,該頂部軸承部分或耐磨墊348凸
出於徑向凸出突片236及閂鎖凸輪212之正面222上方。
Referring to FIGS. 48A and 48B, another modified
功能上,襯套322之更大直徑軸324或軸轂344之更大直徑相對於弓形彈簧216之線直徑將所賦予負載散佈遍及一更大面積,藉此減小應力且減小顆粒產生。頂部軸承部分326及348提供可在致動期間接觸前板202之一大表面面積且相對於直接接觸弓形彈簧216減小磨損及伴隨顆粒產生。
Functionally, the
參考圖49,根據本發明之一實施例描繪針對弓形彈簧216之第二端264之一經修改附接360。針對所描繪實施例,一襯套362經連接至弓形彈簧216之第二端264且連接至閂鎖臂214。襯套362提供一更大直徑之軸364(相對於弓形彈簧216之線直徑「更大」),更大直徑之軸364延伸至閂鎖臂214中且可在其內旋轉。襯套362亦可經構形以提供一頂部軸承部分366。頂部軸承部分366亦可界定一側向延伸狹槽368,該側向延伸之狹槽368自頂部軸承部分366之中心延伸至其邊緣。襯套界定一樞軸線372,弓形彈簧216之第二端264圍繞該樞軸線372旋轉。
Referring to FIG. 49, a modified
功能上,襯套362之更大直徑之軸364相對於弓形彈簧216之線直徑將所賦予負載散佈遍及一更大面積,藉此減小應力及伴隨顆粒產生。頂部軸承部分366提供可在致動期間接觸前板202之一大表面面積且相對於直接接觸弓形彈簧216減小磨損及伴隨顆粒產生。側向延伸狹槽368使弓形彈簧216之第二端264能夠在組裝期間輕易按扣至襯套362中,且亦當閂鎖臂214在致動期間傾斜時(圖44B)使弓形彈簧216之第二端264能夠自平行於樞軸線372(圖44A)傾斜成不平行於樞軸線372。
Functionally, the
本文揭示之額外特徵及方法之各者可單獨或結合其他特徵及方法使用以提供改良式裝置及用於製造且使用其等之方法。因此,本文揭示之特徵及方法之組合可能未必在本發明之最廣泛意義上實踐本發明,且取而代 之僅經揭示以具體描述代表性及較佳實施例。 Each of the additional features and methods disclosed herein can be used alone or in combination with other features and methods to provide improved devices and methods for manufacturing and using them. Therefore, the combination of features and methods disclosed herein may not necessarily practice the present invention in the broadest sense of the present invention, and instead It is only disclosed to specifically describe the representative and preferred embodiments.
熟習此項技術者在閱讀本發明之後可瞭解對實施例之各種修改。舉例而言,相關領域之一般技術者將認識到,針對不同實施例描述之各種特徵可單獨或以不同組合與其他特徵適當組合、不組合且再組合。類似地,上文描述之各種特徵皆應視為實例實施例,而非對本發明之範疇或精神之限制。 Those skilled in the art can understand various modifications to the embodiments after reading the present invention. For example, those of ordinary skill in the related art will recognize that various features described for different embodiments can be appropriately combined, not combined, and then combined with other features individually or in different combinations. Similarly, the various features described above should be regarded as example embodiments, rather than limiting the scope or spirit of the present invention.
相關領域之一般技術者將認識到,各種實施例可包含比在上文描述之任何個別實施例中繪示更少之特徵。本文中描述之實施例並不意在作為可組合各種特徵之方式之一窮舉性呈現。因此,該等實施例並非特徵之相互排斥之組合;而是,如一般技術者應理解,申請專利範圍可包含選自不同個別實施例之不同個別特徵之一組合。 Those of ordinary skill in the relevant art will recognize that various embodiments may include fewer features than those depicted in any of the individual embodiments described above. The embodiments described herein are not intended to be exhaustively presented as one of the ways in which various features can be combined. Therefore, these embodiments are not mutually exclusive combinations of features; instead, as those skilled in the art should understand, the scope of patent application may include a combination of different individual features selected from different individual embodiments.
限制以引用以上文件之方式之任何併入使得不併入違反本文之明確揭露之標的。進一步限制以引用以上文件之方式之任何併入使得不以引用之方式將包含於文件中之請求項併入本文中。又進一步限制以引用以上文件之方式之任何併入使得不以引用之方式將文件中提供之任何定義併入本文中,除非在本文中清楚包含。 Any incorporation by way of citing the above documents is restricted so as not to incorporate any object that violates the explicit disclosure of this article. Any incorporation by way of citing the above documents is further restricted so that the claims contained in the documents are not incorporated into this article by way of reference. It is further restricted to any incorporation by way of citing the above documents so that any definitions provided in the documents are not incorporated into this document by way of reference unless it is clearly included in this document.
對本文包含之「(諸)實施例」、「揭示內容」、「本發明」、「本發明之(諸)實施例」、「(諸)揭示實施例」及類似物之參考係指不認為先前技術之此專利申請案之說明書(包含申請專利範圍之文字及圖)。 References to "embodiment(s)", "disclosure", "invention", "embodiments of the present invention", "embodiments (embodiments)" and the like contained herein are not considered A description of this patent application of the prior art (including text and diagrams of the scope of the patent application).
為解釋申請專利範圍之目的,明確期望不援引35 U.S.C.112(f)之規定,除非特定術語「......之構件」或「......之步驟」在各自請求項中陳述。 For the purpose of explaining the scope of the patent application, it is clearly hoped that the provisions of 35 USC112(f) will not be cited, unless the specific term "...component" or "... step" is in the respective claims statement.
10‧‧‧基板容器 10‧‧‧Substrate container
12‧‧‧容器部分 12‧‧‧Container part
14‧‧‧門總成 14‧‧‧Door assembly
16‧‧‧後壁 16‧‧‧Back Wall
18‧‧‧側壁 18‧‧‧Wall
20‧‧‧前壁 20‧‧‧Front wall
22‧‧‧側壁 22‧‧‧Wall
24‧‧‧頂部部分 24‧‧‧Top part
26‧‧‧底部總成 26‧‧‧Bottom assembly
27‧‧‧殼體 27‧‧‧Shell
28‧‧‧門框 28‧‧‧Door frame
29‧‧‧基板 29‧‧‧Substrate
29a‧‧‧邊緣 29a‧‧‧Edge
30‧‧‧致動連桿組總成 30‧‧‧ Actuating connecting rod assembly
30a‧‧‧致動連桿組總成 30a‧‧‧ Actuating connecting rod assembly
31‧‧‧內表面 31‧‧‧Inner surface
34‧‧‧上心軸 34‧‧‧Upper spindle
36‧‧‧下心軸 36‧‧‧Lower spindle
38‧‧‧撐條 38‧‧‧ stay
40‧‧‧偏置部件 40‧‧‧Offset parts
40a‧‧‧線圈彈簧 40a‧‧‧coil spring
42‧‧‧遠端側 42‧‧‧Distal side
50‧‧‧基板保持件總成 50‧‧‧Substrate holder assembly
54‧‧‧基座部分 54‧‧‧Base part
57‧‧‧覆模部分 57‧‧‧Overmolded part
59‧‧‧軌道部分 59‧‧‧Track part
90‧‧‧輪軛 90‧‧‧Yoke
94‧‧‧輪 94‧‧‧round
202‧‧‧前板 202‧‧‧Front Panel
204‧‧‧背板 204‧‧‧Back plate
206‧‧‧外周邊部分 206‧‧‧Outer peripheral part
Claims (10)
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TW200733289A (en) * | 2005-07-11 | 2007-09-01 | Brooks Automation Inc | Load port module |
TW200843018A (en) * | 2006-12-22 | 2008-11-01 | Asyst Technologies | Loader and buffer for reduced lot size |
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TW200733289A (en) * | 2005-07-11 | 2007-09-01 | Brooks Automation Inc | Load port module |
TW200843018A (en) * | 2006-12-22 | 2008-11-01 | Asyst Technologies | Loader and buffer for reduced lot size |
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