TWI710045B - Substrate container with improved substrate retainer and door latch assist mechanism - Google Patents

Abstract

A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.

Description

Substrate container with improved substrate holder and door latch assist mechanism

The present invention relates to devices for confining substrates (such as memory disks, silicon wafers, and the like) for transportation, storage, or processing. More specifically, the present invention relates to a substrate holding structure and door latch mechanism.

Specific containers are used to transport and store batches of substrates (such as silicon wafers or magnetic disks) before, during, and after the processing of the substrates. "Wafer" is used herein to refer to silicon wafers, magnetic substrates and the like. The substrate is processed as an integrated circuit and the magnetic disk is processed as a magnetic storage disk of the computer. Processing a wafer disk into an integrated circuit chip usually involves repeating several steps of processing, storing, and shipping the disk. Due to the fragile nature of the disk and its extreme value, it is important that it be properly protected and firmly maintained throughout this process. Therefore, the substrate container is generally configured to contain a carrier that supports the substrate in a slot near the peripheral edge of the substrate or on a support member.

Some conventional containers are configured to hold an H-shaped rod-type carrier, such as a standard mechanical interface (SMIF) cassette. The SMIF cassette usually has a bottom opening door at the base of a housing for accessing the H-shaped rod carrier with the substrate. The SMIF cassette generally includes a substrate holder that can be rotatably mounted to the actuating linkage group. The coupling of the bottom door and the housing exerts a force on the actuating link group, which causes the substrate holder to swing to contact with the peripheral edge of the substrate. When joining, the substrate holder prevents the substrate Sliding sideways for one of the vertical axis of the substrate. After the bottom door is removed from the housing, the linkage group is actuated to disengage (swing away) the substrate holder from the substrate, so that the substrate and the H-shaped rod carrier can be freely removed from the housing with the bottom door.

It is known that the substrate holder of the conventional SMIF cassette "hangs up" after the bottom door is removed. During an unexpected shutdown, when the door is removed, the actuation linkage group does not cause the substrate holder to swing away from the substrate. This unexpected shutdown of the substrate holder can result in the removal of the interference substrate, which can cause catastrophic loss of all substrates due to the interference during subsequent handling or mishandling by the robot end effector. A wafer container that prevents the substrate holder from unintentionally shutting down during operation would be welcome.

Various embodiments of the present invention provide for reliable and continuous biasing of the substrate holder from a substrate holding configuration to a substrate non-holding configuration. The continuous bias supplements, reduces or otherwise replaces the reliance on gravity to release the substrate holder from the substrates, thereby ensuring that the substrates are safely removed from the substrate container.

In conventional SMIF cassettes, the weight of the substrate holder (ie, gravity) provides the only driving force for detaching the substrate holder from the substrates after the door is removed. The substrate holder generally made of polymer can produce a surface with an adhesion quality especially after cleaning the substrate container in which the substrate holder resides. The adhesion quality imparts a "stickiness" to the mechanism, which has been observed to cause the substrate holder to stop unexpectedly and unsatisfactorily detach from the substrates. Various embodiments of the present invention provide for a continuous biasing of one of the actuating link sets so that the actuating link set overcomes any viscosity in the entire stroke of the actuating link set from fully engaged to fully unlocked. This continuous offset ensures that when the bottom door and accompanying H-shaped rod carrier are removed from the housing, the substrate holder will be emptied without wafers.

In some cases, a detrimental effect of applying a biasing force to the actuation linkage group may be that the actuation linkage group experiences a force greater than the original design criteria, so that the added force load cannot be maintained. For example, when the bottom door is in position and the actuating link set is compressed between the bottom door and the biasing force of the actuating link set, at a specific point on the link set The stress (for example, the clamp installation at the roller straddling along the inner surface of the bottom door during actuation and/or at the pivot between the actuation linkage group and the substrate holder) is comparable to gravity One system with offset design is several times larger. The extra force caused by the offset can be enough to disintegrate the addition of the actuation linkage assembly. For example, the roller can be detached from the substrate holder, and/or the substrate holder can become moved out of the pivots of the actuating linkage assembly. This disassembly of the actuation linkage assembly can cause catastrophic effects equivalent to the aforementioned unexpected shutdown of the substrate holder.

Therefore, various embodiments of the present invention include additional fixing components that are configured to mate with existing substrate holders and/or actuating link sets to ensure that they are under load due to increased bias The integrity of the system and generally increase the reliability of the actuation linkage group (regardless of whether it is biased or unbiased). In some embodiments, the fixing components are designed to require lateral force to be imposed (such as by a prying tool) in order to become separated. Because the actuation linkage group does not experience large lateral force during operation, the fixed components are not moved due to the biasing force or the operating positive force (their equivalent axial rather than lateral action) except.

Various embodiments of the present invention also reduce the torque requirements for installing a door assembly into the container portion. Conventional SMIF cassettes can also require more than 7 inch-pounds (in-lbf) of torque to latch a door to the dome and unlock the door from the dome. A spring-loaded configuration is disclosed that provides a force assist in the actuation of the door latch, which force assists in reducing the accompanying torque demand when the door is latched to the dome and the door assembly is unlocked from the dome. For example, tests have shown that during the latch operation of the door assembly in the dome, the torque requirements for the latch operation are reduced by more than 50%.

Structurally, in various embodiments of the present invention, a substrate container is disclosed, which includes: a container portion including a door frame defining an opening; and a door configured to be installed in the door frame. The actuating linkage assembly includes a frame, a base plate holder assembly, and a mandrel. The mandrel is pivotally mounted to the frame and to the base plate holder assembly, and the frame is mounted to the container portion An inner wall, the substrate holder assembly can extend into the opening of the door frame. The actuation linkage assembly can be selectively configured in a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the door and is actuated by the door . The actuating link assembly assembly can also be selectively configured in a base plate non-holding position, wherein when the door is not in the door frame, the base plate holder assembly extends into the opening of the door frame. A biasing component is operatively coupled to at least one of the frame, the mandrel and the substrate holder assembly, and the biasing component biases the actuating link assembly to the substrate non-holding position.

In various embodiments of the present invention, a door for a substrate container is disclosed, which includes a front plate and a back plate, which are joined to define an internal chamber. A latch cam is installed to the door in the internal cavity and can rotate around a cam axis. A latch arm is disposed in the internal cavity and operatively coupled to the latch cam. A bow spring includes a first end and a second end, the first end is pivotally coupled to the latch cam, and the second end is pivotally coupled to the latch arm. The latch cam can rotate from a first angular orientation in the door in an unlocked configuration to a second angular orientation in the door in a fully latched configuration. The bow spring is in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation.

In various embodiments of the present invention, a substrate container is disclosed that includes: a container portion including a door frame defining an opening; and a door configured to be installed in the door frame. The door includes: a front plate and a back plate, which are joined to define an internal cavity; a latch cam, which is installed to the door in the internal cavity and can rotate around a cam axis, the latch Convex The wheel can be rotated from the door in a first angular orientation in an unlocked configuration to the door in a second angular orientation in a latched configuration; a latch arm, which is arranged in the internal cavity and can be Operatively coupled to the latch cam; and a bow spring having a first end and a second end, the first end is pivotally coupled to the latch cam, and the second end is pivotally coupled to The latch arm and the bow spring are in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation. In one or more embodiments, the actuating link assembly includes a frame, a base plate holder assembly, and a mandrel, the mandrel is pivotally mounted to the frame and to the base plate holder assembly, The frame is installed to an inner wall of the container part, and the substrate holder assembly can extend into the opening of the door frame. In these embodiments, the actuating linkage assembly can be selectively configured in a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the door And actuated by the door. Also in these embodiments, the actuating link assembly assembly can be selectively configured in a substrate non-retaining position, wherein when the door is not in the door frame, the substrate holder assembly extends to the door frame It's in the opening. A biasing component is operatively coupled to at least one of the frame, the mandrel and the substrate holder assembly, and the biasing component biases the actuating link assembly to the substrate non-holding position.

In various embodiments of the present invention, a method for holding a substrate in a substrate carrier includes: configuring an actuating link assembly assembly in the substrate carrier in a substrate holding position for holding the substrate Selectively retained in the substrate carrier; and when the actuating link assembly is in the substrate holding position, the actuating link assembly is biased in a substrate non-holding position.

In various embodiments of the present invention, a substrate container includes a container portion including: a door frame that defines an opening; a door that is configured to be installed in the door frame; and an actuating linkage assembly. The actuation linkage assembly includes: a frame, which is mounted to an inner wall of the container part; a mandrel, which is pivotally mounted to the frame; a base plate holder assembly, which is pivoted Ground-mounted to the spindle, the substrate holder assembly can extend into the opening of the door frame. A wheel shaft can be mounted to a lower end of the substrate holder assembly, and the shaft is held to the substrate holder assembly by defining a clip-in structure at the lower end of the substrate holder assembly. In some embodiments, a wheel retaining clip is mounted to the substrate holder assembly and configured to prevent the shaft from being released from the substrate holder assembly, and the actuation linkage assembly can be selectively configured to In a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the wheel and is actuated by the door, the wheel is configured to roll along an inner surface of the door .

In some embodiments, the wheel holding clip includes a plurality of hook portions that are coupled with the substrate holder assembly to fix the wheel holding clip to the substrate holder assembly. The substrate holder assembly may include a base defining an aperture. In some embodiments, at least one of the hook portions of the wheel retaining clip is coupled to a periphery of the aperture. The wheel holding clip may include a registration structure for registering the wheel holding clip in the aperture. In some embodiments, a wheel yoke is disposed at the lower end of the base plate holder assembly, and the wheel axle is mounted to the wheel yoke. In some embodiments, the clip-in structure of the substrate holder assembly includes an elastic cantilever that applies a biasing force to the shaft to hold the shaft in the yoke, and the wheel holding clip It is configured to prevent the elastic cantilever of the clip-in structure from deflecting, thereby preventing the clip-in structure from releasing the shaft. In various embodiments, at least one of the plurality of hook portions of the wheel retaining clip is coupled with the wheel yoke. The wheel retaining clip can also be configured so that the at least one of the plurality of hook portions is elastically displaced around the yoke and clamped to the yoke when assembled. In some embodiments, at least one of the plurality of hook portions coupled to the yoke includes an introduction structure for sliding over the yoke during assembly.

In various embodiments of the present invention, a substrate container includes: a container portion including a door frame defining an opening; a door configured to be installed in the door frame; and an actuating linkage assembly. In some embodiments, the actuation linkage group includes: a frame installed to the container An inner wall of the device part; a spindle having a proximal side pivotally mounted to the frame and a distal side including a pivot rod; and a base plate holder assembly that can extend to the door frame In the opening and pivotally mounted to the pivot rod of the spindle, the substrate holder assembly defines a groove, and the pivot rod can rotate relative to the substrate holder assembly in the groove . In some embodiments, a pivotal locking clip is mounted to the substrate holder assembly to capture the pivot rod between the substrate holder assembly and the pivotal locking clip. The pivoting locking clip may include a plurality of hook parts that are coupled with the substrate holder assembly to fix the pivoting locking clip to the substrate holder assembly. In some embodiments, the substrate holder assembly includes an axially extending portion defining the groove, the axially extending portion defining opposite axially extending edges, wherein one of the plurality of hook portions of the pivotal locking clip At least some are coupled to the opposite axially extending edges of the axially extending portion.

The pivotal locking clip may include: an arcuate body portion including opposite ends; and a first pair of hook portions extending from a first end of the arcuate body portion, wherein the first pair of hook portions are coupled to The substrate holder assembly fixes the arcuate main body part by abutting against the pivot rod of the mandrel. In some embodiments, the substrate holder assembly includes an axially extending portion defining the groove, the axially extending portion defining opposite axially extending edges. The first pair of hook portions are configured to engage the opposite axially extending edges of the axially extending portion. The first pair of hook portions may be configured for elastic displacement around the axially extending portion of the substrate holder assembly and clamped to the axially extending portion during assembly. Likewise, the first pair of hook portions may include an introduction structure that is configured to deflect the first pair of hook portions away from each other during assembly.

In some embodiments, the pivotal locking clip includes a second pair of hook portions extending from a second end of the arcuate body portion, wherein the second pair of hook portions are coupled to the substrate holder assembly to abut The pivot rod of the spindle fixes the arcuate main body part. The second pair of hook portions may be configured to engage the opposite axially extending edges of the axially extending portion. Like the first pair of hooks In addition, the second pair of hook portions can be configured for elastic displacement around the axially extending portion of the substrate holder assembly and clamped to the axially extending portion during assembly. In some embodiments, each hook portion of the second pair of hook portions includes an introduction structure that is configured to deflect the second pair of hook portions away from each other during assembly.

10: Substrate container

12: Container part

14: Door assembly

14a: Door assembly

16: back wall

18: side wall

20: front wall

22: side wall

24: Top part

26: bottom assembly

27: Shell

28: door frame

29: substrate

29a: Edge

30: Actuation connecting rod assembly

30a: Actuation connecting rod assembly

30b: Actuation connecting rod assembly

30c: Actuation connecting rod assembly

30d: Actuation connecting rod assembly

30e: Actuation connecting rod assembly

30f: Actuation connecting rod assembly

31: inner surface

32: Frame

34: Upper spindle

36: Lower spindle

37: pivot seat

38: stay

39: pivot axis/rotation axis

40: Bias part

40a: coil spring

40b: Bias part

40c: Bias part

40d: offset parts

40e: offset part

41: proximal side

42: distal side

44: Cylindrical pivot rod

45: Upper cross member

46: Lower cross member

47: Lateral parts

50: substrate holder assembly

51: Backside

54: base part

56: Joint part

57: Overmolding part

58: Track part

59: Track part

61: Transverse parts

62: Transverse parts

63: Transverse parts

64: Transverse parts

65: Transverse parts

66: Transverse parts

67: central axis

68: Upper clamp assembly

74: Axial extension

75: Axial extension edge

76: Groove

77: Axial extension edge

87: Axial extension

88: Spacer

89: Pore

90: wheel yoke

92: free end

94: round

96: axis

98: Clamp-in structure

99: bottom

101: Flexible cantilever

102: Extension

104: Rotation stop

106: remote

122: spring arm

132: Continuous elastic belt

134: Installation structure

142: Wheel holding clip

144: pivot locking clip

146: board part

148: Internal mounting surface

152: Outer surface

153: bottom edge

154: arm part

156: Features

157: direction

158: hook part

162: Registration structure

164: hook part

165: Stop structure

166: Introducing structure

167: Remote

170: main part

172: hook part

174: Opposite end

176: Opposite End

178: The first pair of hooks

182: The second pair of hooks

184: Introducing structure

202: front panel

204: Backplane

206: Outer peripheral part

207: Latch tip aperture

208: Internal chamber

210: Latch Assembly

210a: Latch assembly

212: Latch Cam

214: Latch Arm

216: Bow Spring

216a: Bow spring

216b: Bow spring

216c: Bow spring

216d: Bow spring

218: Cam axis

222: front

224: Back

226: key hole

227: Bow Through Slot

228: Blade

232: cam surface

233: flat surface

234: Inclined surface

236: Tab

238: mounting hole

239: Cam Stop

242: Cam interface profile

244: proximal part

246: Latch Tip

248: distal part

252: Cam bearing

254: Long pore

255: longitudinal axis

256: mounting hole

262: first end

264: second end

266: bow section

268: free or no load operating length

268a: Operating length

268b: Operating length

268c: operating length

270: Wear pad

272: first corner orientation

273: Mid-angle orientation

274: second corner orientation

275: boot assembly

276: Shaft Hub

278: Bias part

279: guide

282: Bush

292: prediction

294: prediction

296: local maximum

298: local maximum

299: local minimum

312: test result

314: test result

320: Attach

322: Bush

324: Diameter shaft

326: Top bearing part

340: Attach

342: ring or eye circle

344: Hub

346: Cancellation

348: Top bearing part or wear pad

360: Attach

362: Bush

364: Larger Diameter Shaft

366: Top bearing part

368: slot

372: Pivot

FIG. 1 is a cross-sectional side view of a substrate container having an actuating linkage group in a substrate non-holding position according to an embodiment of the present invention.

2 is a cross-sectional side view of the actuating linkage group of FIG. 1 with a substrate holder in a substrate holding position according to an embodiment of the present invention.

FIG. 3 is a front view of the substrate container of FIG. 1 in which the rear wall is cut to expose the actuating linkage group according to an embodiment of the present invention.

Fig. 4 is a perspective view of a frame, a pair of spindles and a biasing member of the actuation linkage group in Fig. 1 according to an embodiment of the present invention.

Fig. 5 is an enlarged partial view of the biasing member of Fig. 4 according to an embodiment of the present invention.

Fig. 6 is a perspective view of the substrate holder assembly of Fig. 1 according to an embodiment of the present invention.

Fig. 7 is a perspective view of an actuating link set having a biasing member extending laterally from a mandrel of the actuating link set according to an embodiment of the present invention.

FIG. 8 is a front view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including a spindle of the actuating link group in sliding contact One of the spring arms.

FIG. 9 is a perspective view of the actuating linkage group in the substrate non-holding position of FIG. 8 according to an embodiment of the present invention.

Fig. 10 is a front view of the actuating link assembly of Figs. 8 and 9 in a substrate holding position according to an embodiment of the present invention.

FIG. 11 is a perspective view of the actuating linkage group in the substrate holding position of FIG. 10 according to an embodiment of the present invention.

Fig. 12 is a perspective view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including a substrate holding contact of the actuating link set One spring arm of the piece assembly.

FIG. 13 is a front view of an actuating link group in a substrate non-holding position with a biasing member according to an embodiment of the present invention, the biasing member including an elastic member.

FIG. 14 is a perspective view of the actuating link group in the substrate non-holding position of FIG. 13 according to an embodiment of the present invention.

15 is a front view of the actuating link group of FIGS. 13 and 14 in a substrate holding position according to an embodiment of the present invention.

FIG. 16 is a perspective view of the actuating linkage group in the substrate holding position of FIG. 15 according to an embodiment of the present invention.

Fig. 17 is a front perspective view of an actuating linkage group in a base non-retaining position with a wheel retaining clip and a pair of pivoting locking clips according to an embodiment of the present invention.

Figure 18 is a rear perspective view of one of the actuating linkage groups of Figure 17;

Figure 19 is a rear perspective view of the wheel retaining clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.

Fig. 20 is a front perspective view of the wheel retaining clip of Figs. 17 and 18 in a separated state according to an embodiment of the present invention.

FIG. 21 is the wheel insurance of FIG. 17 and FIG. 18 in a separated state according to an embodiment of the present invention Front view after holding one of the clips.

Figure 22 is a top view of the wheel retaining clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.

Fig. 23 is a rear perspective view of the wheel holding clip of Figs. 17 and 18 aligned with a substrate holder assembly according to an embodiment of the present invention.

Fig. 24 is a partial rear perspective view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.

Fig. 25 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.

Figure 26 is a bottom view of the wheel retaining clip of Figures 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.

Fig. 27 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly according to an embodiment of the present invention.

Figure 28 is a rear perspective view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.

Figure 29 is a front perspective view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.

Figure 30 is a side view of the pivotal locking clip of Figures 17 and 18 in a separated state according to an embodiment of the present invention.

Figure 31 is a partial rear perspective view of the pivot locking clip of Figures 17 and 18 aligned with a substrate holder assembly and a mandrel according to an embodiment of the present invention.

Fig. 32 is a partial rear perspective view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly and the spindle according to an embodiment of the present invention.

Fig. 33 is a front perspective view of a part of the wheel holding clip of Figs. 17 and 18 installed on the base plate holder assembly and the spindle according to an embodiment of the present invention.

Fig. 34 is a partial cross-sectional view of the wheel holding clip of Figs. 17 and 18 installed on the substrate holder assembly and the spindle according to an embodiment of the present invention.

35 is a partial perspective view of a latch mechanism installed in a door assembly of a substrate container according to an embodiment of the present invention.

Figure 36 is a perspective view of the latch cam of Figure 35 in a separated state according to an embodiment of the present invention.

Fig. 37 is a perspective view of the opposite side of the latch cam of Fig. 36 according to an embodiment of the present invention.

Fig. 38 is a plan view of the latch arm of Fig. 35 according to an embodiment of the present invention.

FIG. 39 is a partial plan view of the latch mechanism of FIG. 35 in a latch configuration and depicting the angular displacement of the latch cam according to an embodiment of the present invention.

40A to 40D are perspective views of the bow spring in a separated state in an embodiment of the present invention.

Fig. 41 is a partial perspective view of a latch mechanism according to an embodiment of the present invention. The latch mechanism has arch springs each defining an S-shaped section. The latch mechanism is installed in a door assembly of a substrate container.

Fig. 42 is an enlarged view of the latch mechanism of Fig. 41 according to an embodiment of the present invention, which shows a guide assembly for biasing the latch arm in the door assembly.

Figure 43A is a partial view of the latch mechanism of Figure 41 in an unlocked configuration.

FIG. 43B is a partial view of the latch mechanism of FIG. 41 according to an embodiment of the present invention, the latch mechanism being in an intermediate configuration between a latch configuration and an unlock configuration.

Figure 43C is a partial view of the latch mechanism of Figure 41 in a fully latched configuration.

Figure 44A is a cross-sectional view of the door assembly of Figure 35 with a latch cam and a latch arm in an unlocked configuration according to an embodiment of the present invention.

Figure 44B is a cross-sectional view of the door assembly of Figure 35 with the latch cam and the latch arm in a fully latched configuration according to one embodiment of the present invention.

FIG. 45A is a diagram depicting the diagonal orientation of the torque required to actuate the latch of the latch mechanism of FIG. 41 according to an embodiment of the present invention.

FIG. 45B is a diagram illustrating the diagonal orientation of the torque required to actuate the latch of the door assembly of FIG. 35 according to an embodiment of the present invention.

FIG. 46A is a diagram comparing the latch torque requirements of a latch mechanism of a conventional substrate carrier door and the latch mechanism of FIG. 41 according to an embodiment of the present invention.

FIG. 46B is a diagram comparing the unlocking torque requirements of a latch mechanism of a conventional substrate carrier door and the latch mechanism of FIG. 41 according to an embodiment of the present invention.

Figure 47 is a perspective cross-sectional view of a latch cam having a bush for coupling a bow spring to the latch cam according to an embodiment of the present invention.

Figure 48A is an enlarged, perspective and partially exploded view of a latch cam with a bush for coupling an arcuate spring to the latch cam according to an embodiment of the present invention.

Fig. 48B is a perspective view of the assembled latch cam and bushing of Fig. 48A.

Figure 49 is an enlarged, perspective view of a bush coupled to a latch arm and a bow spring according to an embodiment of the present invention.

Cross reference of related applications

This application claims to be filed on October 1, 2015 and the invention name is "Substrate "Container with Improved Wafer Retainer and Door Latch Assist Mechanism" in the U.S. Provisional Application No. 62/235,682 priority, and also claimed to be filed on May 20, 2016 and the title of the invention is "Substrate Container with Improved Substrate Retainer and Door Latch Assist" The priority of US Provisional Application No. 62/339,404 of Mechanism", the entire contents of which are incorporated herein by reference.

1 to 6, a substrate container 10 is depicted according to an embodiment of the present invention. The substrate container 10 includes: a dome or container portion 12 with actuating linkage assemblies 30, 30a mounted thereon; and a door assembly 14 for selectively influencing the closure of the substrate container 10. The specific embodiment depicted is a bottom-opening standard mechanical interface (SMIF) cassette, in which the container portion 12 has a generally three-dimensional shape and has a front wall 20, a rear wall 16, two side walls 18 and 22, and a top portion 24 and a bottom assembly 26. The bottom assembly 26 includes a door assembly 14 that can be seated in a door frame 28 of the container portion 12 to form a housing 27. A plurality of substrates 29 with edges 29a can be contained in the housing 27 and can be suspended by an H-shaped rod carrier (not shown).

The present invention discloses several embodiments of the actuation linkage assembly, which are generally or collectively referred to by the symbol 30 (for example, the actuation linkage assembly 30), and are individually followed by the symbol 30 followed by a letter The suffix refers to (eg, actuation linkage assembly 30a, as discussed above). The various actuating link assembly 30 include many components and attributes that are the same as the actuating link assembly 30, which are indicated by similarly numbered component symbols.

In the depicted embodiment, an inner surface 31 of the actuating linkage assembly 30a proximate to the rear wall 16 hangs down from the top portion 24. Alternatively or additionally, the actuation linkage assembly 30a may be operatively coupled to one of the walls 16, 18, 20, or 22, or to the door assembly 14. The actuating linkage assembly 30a may include a frame 32 that includes an upper transverse member 45 and a lower transverse member 46, They separate a pair of side members 47 (Figures 3 and 4). The frame 32 is supported and pivotally mounted to an upper spindle 34 and a lower spindle 36 of the frame 32 at a pivot seat 37 defined in the lateral part 47 of the frame 32. The pivot seat 37 further defines a pivot axis or rotation axis 39 extending laterally through the frame 32. The upper mandrel 34 and the lower mandrel 36 may each include a stay 38 extending therefrom, and each stay 38 includes a proximal side 41 and a distal side 42. The proximal side 41 is pivotally mounted to the frame 32. The distal sides 42 each support a cylindrical pivot rod 44.

In certain embodiments, a biasing member 40 is operatively coupled to the frame 32 and the lower spindle 36. For the depicted embodiment of the actuating linkage assembly 30a, the biasing member 40 is connected to a coil spring 40a of the lower spindle 36, and the coil spring 40a is concentric around the rotation axis 39 of the lower spindle 36. Additionally or in the alternative, the biasing member 40/coil spring 40a may be coupled to the upper spindle 34.

Herein, the biasing components are collectively or generally referred to by the element symbol 40, and individually identified by the element symbol 40 followed by a letter suffix (eg, coil spring 40a, as discussed above).

In various embodiments, the actuation linkage assembly 30a includes a substrate holder assembly 50 that includes a base portion 54 and one of which is operably coupled to the cylindrical pivot rod 44连接部56。 Bonding part 56. The substrate holder assembly 50 may include an overmold portion 57 to prevent chipping, depression, or abrasion due to contact with the substrate 29, such as in International Publication No. WO 2007 of Smith et al. owned by the applicant of this application /146019, the entire disclosure of the case (except for the clear definition contained therein and the scope of the patent application) is incorporated herein by reference.

The base portion 54 of the substrate holder assembly 50 may include a pair of rail portions 58 and 59 separated by transverse members 61 to 66 (FIG. 6). A center or longitudinal axis 67 is defined at the midpoint of the span of the transverse members 61-66. An upper clamp assembly 68 can extend from the transverse members 62 and 63. An axially extending portion 74 (such as a central bridging member) may extend between the transverse members 62 and 63, and between the transverse members 64 and 65, and may be defined to be shaped as the substrate holder assembly 50 And to The movable link group is operatively coupled to receive a groove 76 of the cylindrical pivot rod 44. Each axially extending portion 74 may be characterized by having opposite axially extending edges 75 and 77.

An axially extending portion 87 (such as a bridge plate extending between the transverse members 65 and 66) may cooperate with the track portions 58 and 59 and the transverse members 65 and 66 to define a pair of apertures 89. A spacer 88 may protrude from the back side 51 of the substrate holder assembly 50. The spacer 88 is depicted as extending from the transverse member 65. More than one spacer 88 can be used. A yoke 90 having a free end 92 extends from the transverse member 66 along the central axis 67, wherein a wheel 94 and shaft 96 are operatively coupled with the yoke 90. In this configuration, the shaft 96 is mounted to the yoke 90 near the free end 92 such that the outer radius of the wheel 94 protrudes beyond the free end 92 of the yoke 90. In various embodiments, a clip-in structure 98 is defined at a lower end 99 of the substrate holder assembly 50 and the clip-in structure 98 is configured to hold the shaft 96 to the substrate holder assembly 50. In some embodiments, the clip-in structure 98 includes an elastic cantilever 101 that applies a biasing force to the shaft 96 to hold the shaft 96 in the yoke 90.

In various embodiments, the actuating link assembly 30a can be selectively configured in a base plate holding position, as depicted in FIG. 2, where the base plate is held when the door assembly 14 is seated in the door frame 28 The piece assembly 50 is in contact with the door assembly 14 and is actuated by the door assembly 14. In this embodiment, the actuating link assembly 30a can also be selectively configured in a substrate non-retaining position, as depicted in FIG. 1, wherein when the door assembly 14 is not in the door frame 28, the substrate The holder assembly extends into an opening of the door frame 28.

Functionally, the biasing member 40 (coil spring 40a) acts to bias the actuation linkage assembly 30a in the non-holding position of FIG. 2. This bias helps actuate the linkage assembly 30a to overcome any friction between the moving components so that after the door assembly 14 is removed from the substrate container 10, the substrate holder assembly 50 is detached from the substrate 29.

Referring to FIG. 7, an actuating link assembly 30b is depicted according to an embodiment of the present invention. Actuate The linkage assembly 30b includes a biasing member 40b that includes an extension portion 102 that extends laterally beyond the spindle 36 under the pivot seat 37, and the extension portion 102 includes a rotation at a distal end 106 Stop file 104. In the depicted embodiment, the extension portion 102 extends laterally beyond the frame 32 such that the rotation stop 104 engages the inner surface 31 of the rear wall 16. The extension portion 102 may extend laterally along the pivot axis 39, as depicted in FIG. 7.

In various embodiments, the rotation stop 104 is configured to extend perpendicular to the pivot axis 39 and in a plane parallel to the stay 38 to bias the actuation linkage assembly 30b. Therefore, the actuation linkage assembly 30b is biased in the substrate non-retaining configuration.

Functionally, after the door assembly 14 is seated in the door frame 28, the substrate holder assembly 50 rotates and translates into the substrate container 10 to rotate the lower spindle 36, and the rotation stop 104 prevents the extension of the lower spindle 36 The rotation of the distal end 106 of 102. At least when the door assembly 14 is seated in the door frame 28, the differential rotation along the lower spindle 36 produces a twist. The torsion generates a biasing torque that biases the actuation linkage assembly 30b toward the non-retaining configuration of the substrate, but this is overcome by the door assembly 14 being seated in the door frame 28. After the door assembly 14 is unsold from the door frame 28, the biasing torque returns the actuation linkage assembly 30b to the base non-retaining configuration.

An embodiment in which the rotation stop 104 engages the frame 32 instead of the inner surface 31 is also conceivable. Likewise, it should be understood that the contact inner surface is not limited to the inner surface 31 of the rear wall 16 but may be any inner surface positioned adjacent to the rotation stop 104. In addition, an embodiment in which one of the biasing members 40b extends from the upper spindle 34 is also conceivable.

With reference to Figures 8 to 11, an actuating linkage assembly 30c is depicted according to an embodiment of the present invention. A biasing member 40c of the actuation linkage assembly 30c includes a pair of spring arms 122 extending from the frame 32 to contact the stay 38 of the upper spindle 34. In the depicted embodiment, when the actuating link assembly 30c moves from the substrate non-retaining configuration (Figures 8 and 9) to the substrate retaining configuration (Figures 10 and 11), The spring arm 122 slidably contacts the upper spindle 34. In this context, "sliding contact" means that when a second component moves relative to a first component, the first component can remain in contact with the second component, so that the second component is above a surface of the first component slide. The spring arm 122 may be formed substantially parallel to the frame 32, which is depicted in dashed lines in FIG. 8.

Referring to Fig. 12, an actuating link assembly 30d is depicted according to an embodiment of the present invention. A biasing member 40d of the actuating link assembly 30d also includes a pair of spring arms 122 extending from the frame 32. However, for the actuating link assembly 30d and the biasing member 40d, the spring arm 122 extends toward the substrate holder assembly 50 and is connected to the substrate holder assembly 50.

Functionally, for both the actuating linkage assembly 30c and 30d, the spring arms 122 of the biasing members 40c and 40d are elastically displaced by the stay 38 of the upper spindle 34. The elastic displacement exerts a biasing force on the upper spindle 34 or the substrate holder assembly 50 to bias the upper spindle 34 or the substrate holder assembly 50 toward the frame 32. The biasing force is overcome by the door assembly 14 being seated in the door frame 28 and the force exerted by the door assembly 14 on the substrate holder assembly 50. This biasing force effectively biases the actuation linkage assembly 30c and 30d in the non-retaining configuration of the substrate (FIGS. 8, 9 and 12).

It is also conceivable to use a single spring arm 122 or more than two spring arms 122 for the actuating linkage assembly 30c or 30d. In addition, an embodiment in which one of the biasing members 40c or 40d acts on the lower spindle 36 is also conceivable.

Referring to FIGS. 13 to 16, an actuating linkage assembly 30e is depicted according to an embodiment of the present invention. A biasing member 40e of the actuating linkage assembly 30e includes a continuous elastic band 132 extending from the frame 32 to the substrate holder assembly 50. In the depicted embodiment, the continuous elastic band 132 is connected to the lower transverse member 46 of the frame 32. Also in this embodiment, the substrate holder assembly 50 includes a mounting structure 134 for mounting the continuous elastic band 132.

Functionally, as the actuating linkage assembly 30e moves from the non-retaining configuration of the substrate (Figure 13 and Figure 14) Move to the substrate holding configuration (FIGS. 15 and 16), the elastically displaced continuous elastic band 132 applies a biasing force to bias the substrate holder assembly 50 toward the frame 32. This force causes the door assembly to 14 is seated in the door frame 28 and overcome by the force exerted by the door on the substrate holder assembly 50. This biasing force effectively biases the actuating link assembly 30e in the non-retaining configuration of the substrate (Figure 15 and Figure 16).

An embodiment using a non-continuous elastic member and an embodiment using a plurality of elastic members (continuous or discontinuous) are also conceivable. In addition, it is also conceivable that one of the biasing members 40e acts on one or more spindles 34, 36 instead of the substrate holder assembly 50 and/or is coupled to the frame at positions other than the lower transverse member 46 example.

Referring to Figs. 17 to 18, an actuating link assembly 30f is depicted according to an embodiment of the present invention. The actuating link assembly 30f includes many components and attributes that are the same as the actuating link assembly 30c, which are indicated by the same numbered component symbols. In addition, the actuating link assembly 30f includes a wheel retaining clip 142 and a pivoting locking clip 144. The wheel retention clip 142 is mounted to the substrate holder assembly 50 and is configured to prevent the clip-in structure 98 from accidentally releasing the shaft 96. The pivot locking clip 144 is mounted to the substrate holder assembly 50 to capture the cylindrical pivot rod 44 between the substrate holder assembly 50 and the pivot locking clip 144, thereby locking the substrate holder assembly 50 to each The cylindrical pivot rod 44 of the spindle 34. Although the actuating link assembly 30f includes many of the same components and attributes as the actuating link assembly 30c, the wheel retaining clip 142 and the pivot locking clip 144 can use any of the link assembly 30 of the present invention. One implementation.

Referring to Figures 19-22, a wheel retaining clip 142 is depicted according to one embodiment of the present invention. The wheel retaining clip 142 includes a plate portion 146 having an inner mounting surface 148 and an outer surface 152 opposite to the inner mounting surface 148. A pair of arm portions 154 extend from the outer surface 152 and beyond a bottom edge 153 of the plate portion 146. The inner mounting surface 148 may include a plurality of features 156 extending in a direction 157 that is perpendicular to the inner mounting surface 148. The features 156 include hook portions 158 and registration Structure 162. Each arm portion 154 includes a hook portion 164 also extending in the direction 157. In some embodiments, each arm portion 154 includes a stop structure 165 at a distal end 167.

Referring to FIGS. 23-27, the installation of a wheel retaining clip 142 is depicted according to an embodiment of the present invention. During assembly, the features 156 of the inner mounting surface 148 are aligned with the apertures 89 of the substrate holder assembly 50. The wheel retaining clip 142 is mounted to the substrate holder assembly 50 so that each hook portion 158 extending from the plate portion 146 is coupled to one of the perimeters of each of the apertures 89 of the substrate holder assembly 50, and makes the registration structure 162 is placed in the aperture 89. The arm portion 154 is configured to span the wheel 94 and the hook portion 164 spans and engages the opposite side of the yoke 90.

In some embodiments, each hook portion 164 includes an introduction structure 166 to facilitate the sliding of the hook portion 164 over the opposite side of the yoke 90 during assembly. When the hook portion 164 slides over the yoke 90, the introduction structure 166 deflects the hook portion 164. The deflection of the hook portion 164 is caused by the elastic torsion of the arm portion 154, the elastic bending of the hook portion 164, or a combination thereof. Once the wheel retaining clip 142 is installed, the elasticity of the arm portion 154 and/or the hook portion 164 causes the hook portion 164 to snap into place, thereby capturing the yoke 90 between the hook portions 164.

Functionally, in the depicted embodiment, the wheel retention clip 142 prevents the wheel 94 and shaft 96 from becoming accidentally removed from the clip-in structure 98 of the substrate holder assembly 50. In some embodiments, the fixing of the shaft 96 is accomplished by preventing the deflection of the elastic cantilever portion 101 of the clip-in structure 98 so that the shaft 96 cannot be released from the clip-in structure 98 unless the wheel retaining clip 142 is removed. The wheel holding clip 142 is fixed to the base plate holder assembly 50 by the hook portion 158 of the plate portion 146 engaged at the periphery of the aperture 89 and by the hook portion 164 clipped to the yoke 90. The registration structure 162 helps to align the plate portion 146 with the aperture 89 and maintains the stability and a substantial amount between the wheel holding clip 142 and the substrate holder assembly 50 when subjected to axial and/or lateral forces during operation. On a fixed relationship. As depicted in FIGS. 26 and 27, the stop structure 165 cooperates with the yoke 90 to provide additional capture of the shaft 96.

Referring to FIGS. 28-30, a pivoting locking clip 144 is depicted according to an embodiment of the present invention. The pivot locking clip 144 includes a main body portion 170 and a plurality of hook portions 172 extending from the main body portion 170. The main body 170 includes opposite ends 174 and 176. In the depicted embodiment, the plurality of hook portions 172 include a first pair of hook portions 178 extending from one of the opposite ends 174 and a second pair of hook portions 182 extending from the other of the opposite ends 176. The main body portion 170 may be arcuate. In various embodiments, some or all of the plurality of hook portions 172 are configured to have an introduction structure 184.

Referring to FIGS. 31 to 34, the assembly of the pivot locking clip 144 to the substrate holder assembly 50 is depicted according to an embodiment of the present invention. When assembled, the first pair of hook portions 178 are coupled to the substrate holder assembly 50 to fix the main body portion 170 against the cylindrical pivot rod 44 of the spindle 34 or 36. In the depicted embodiment, a plurality of hook portions 172 are coupled to opposite axially extending edges 75 and 77 of the axially extending portion 74. Some or all of the plurality of hook portions 172 may be configured for elastic displacement around the axially extending portion 74 of the substrate holder assembly 50 for clamping to the axially extending portion 74.

Functionally, a plurality of hook portions 172 are coupled with the substrate holder assembly 50 to fix the pivot locking clip 144 to the substrate holder assembly 50 so that the cylindrical pivot rod 44 of the respective spindle 34 or 36 is positively locked In the groove 76 of the axial extension 74. The introduction structure 184 is configured when adopted so that when the pivot locking clip 144 is pressed onto the axial extension 74 during assembly, the hook portions 172 of a given pair of hook portions 178 and 182 deflect away from each other. The pivot locking clip 144 cannot be moved out of the axial extension portion 74 by the axial force applied to the wheel 94. In fact, removing the pivot locking clip 144 from the axial extension 74 requires (such as using a prying tool) to deflect the first pair of hook portions 178 and/or the second pair of hook portions 182 outwardly.

Referring to FIGS. 35 to 40D, a door assembly 14 is depicted according to an embodiment of the present invention. General manager The component 14 includes a front plate 202 (FIG. 1) and a back plate 204. In various embodiments, the back plate 204 includes an outer peripheral portion 206; the outer peripheral portion 206 may also be formed as part of the front plate 202, or may be defined by a combination of the front plate 202 and the back plate 204. The outer peripheral portion 206 also defines a latch tip aperture 207 through the outer peripheral portion 206 (Figure 35). The front plate 202 and the back plate 204 are joined to define an internal cavity 208 of the door assembly 14.

The door assembly 14 includes a latch assembly 210. In various embodiments, the latch assembly 210 includes a latch cam 212, a latch arm 214, and an arcuate spring 216 connected to the latch cam 212 and the latch arm 214. The latch cam 212 is installed to the door assembly 14 in the internal cavity 208 and can rotate about a cam axis 218. The latch cam 212 includes a front surface 222 (FIG. 36) and a back surface 224 (FIG. 37). The front surface 222 may include key apertures 226 defined thereon, and the key apertures 226 may be accessed through arcuate through slots 227 (FIG. 41) formed on the front plate 202. In the depicted embodiment, the back surface 224 includes vanes 228 arranged concentrically about the cam axis 218. The back surface 224 may also include a cam surface 232 that defines a flat surface 233 leading to the slope or inclined surface 234, and the cam surface 232 is also arranged concentrically around the cam axis 218. In some embodiments, the latch cam 212 also includes a radially protruding tab 236. Each of the radially protruding tabs 236 can define a mounting hole 238 through which the bow spring 216 is installed.

In some embodiments, the door assembly 14 includes one or more cam stops 239 that are positioned to engage the latch cam 212 and prevent the latch cam 212 from rotating beyond a specific angle. For example, the cam stop 239 may extend from the back plate 204 and be positioned to engage one or more of the radially projecting tabs 236, such as depicted in FIGS. 35 and 39.

The latch arms 214 are disposed in the internal cavity 208, and the latch arms 214 each include a cam interface profile 242 at a proximal portion 244 and a latch tip 246 at a distal portion 248. The latch arm 214 is aligned so that the latch tip 246 passes through the latch tip aperture of the outer peripheral portion 206 207 extends and retracts laterally. In various embodiments, the latch arm 214 is fitted with a cam bearing 252 at the proximal portion 244. The latch arm 214 may also define an elongated aperture 254 having a longitudinal axis 255 extending in a direction between the proximal portion 244 and the distal portion 248. The latch arm 214 may also include a mounting hole 256 through which the bow spring 216 is mounted to the latch arm 214.

Various bow springs 216 can be used, for example, the bow springs 216a to 216d described in FIGS. 40A to 40D, respectively. Bow springs are generally and collectively referred to as bow spring(s) 216, and are individually indicated by a symbol 216 followed by a letter suffix (eg, bow spring 216a in FIG. 40A). The bow spring 216 is configured to surround various spacers and other structures that make up the door assembly 14 while still exerting a complementary force between the latch cam 212 and the latch arm 214. The arcuate springs 216 each include a first end 262 and a second end 264, and each defines at least one arcuate section 266 between the first end 262 and the second end 264 above at least a portion of the arcuate spring 216. In the depicted embodiment, the first end 262 of each bow spring 216 is pivotally coupled to each of the tabs 236 of the latch cam 212, wherein the second end is pivotally coupled to the latch arm 214 One of them. The bow spring 216 also defines a free or no-load operating length 268, which is defined as a straight line between the first end 262 and the second end 264. The bow spring 216 may be formed of an elastic metal wire material (such as stainless steel). A polymer bow spring 216 is also conceivable.

Referring to FIGS. 41 and 42, a door assembly 14a is depicted according to an embodiment of the present invention, which is equipped with a latch assembly 210a having an S-shaped bow spring 216d in FIG. 40D. The door assembly 14a and the latch assembly 210a include many components and attributes that are the same as the door assembly 14 and the latch assembly 210, and they are indicated by the same numbered component symbols. The front panel 202 is depicted as transparent or translucent in FIGS. 41 and 42 to show the inner workings of the door assembly 14a. In addition, the door assembly 14a includes a wear pad 270 adhered to the inner side of the front plate 202, and the S-shaped bow spring 216d can be used during the actuation of the latch assembly 210a. Lean against these wear pads.

Similarly, the door assembly 14a includes a guide assembly 275 (FIG. 42) coupled to the latch arm 214 at the elongated aperture 254 and includes a hub 276 and an offset member 278. The specific biasing member 278 is depicted as a coil spring, but the skilled person anticipates and readily understands other biasing members. The guide assembly 275 may also include a washer or bushing 282 disposed between the biasing member 278 and the latch arm 214.

Functionally, in the depicted embodiment, the guide assembly maintains the alignment of the latch arm 214 such that the latch tip 246 extends and retracts through the latch tip aperture 207 in a desired manner. The hub 276 and the elongated aperture 254 maintain the necessary alignment in the extension and retraction directions, and the biasing member 278 biases the latch arm 214 (FIG. 44A and FIG. 44B) against the guide 279, so that the latch tip 246 is positioned The front plate 202 and the back plate 204 pass through the aperture at a desired distance. A washer or bushing 282 made of a low-friction or self-lubricating material slidably contacts the latch arm 214, so that the latch arm 214 can translate laterally while being biased by the abutment guide 279.

Referring to FIGS. 43A to 43C, FIG. 44A and FIG. 44B, the operation of the latch assembly 210a is depicted in the embodiment of the present invention. FIGS. 43A to 43C illustrate the operation of the bow spring 216, and FIGS. 44A and 44B illustrate the interaction between the latch cam 212 and the latch arm 214. Although the particular bow spring 216 depicted is an S-shaped bow spring 216d, any of the bow springs 216 of the present invention will function in a similar manner.

The latch cam 212 can be rotated from the door in a first angular orientation 272 in an unlocked configuration through the actuation angle θ (FIGS. 39 and 43C) to the door in a fully latched configuration in a second angular orientation 274 (Figure 39). During this rotation, the bow spring 216 undergoes a change in one of the free or no-load operating lengths 268 depicted as operating lengths 268a, 268b, and 268c in FIGS. 43A, 43B, and 43C, respectively. The operating lengths 268a to 268c are determined by the orientation of the latch cam 212 relative to the cam interface profile 242 of the latch arm 214. That is, the bow spring 216 follows the distance between the mounting holes 238 and 256 And defined by this distance. Therefore, the bow spring 216 can be maintained in a compressed state in which the operating lengths 268a, 268b, and 268c are shorter than the free or no-load operating length 268.

In various embodiments, the operation of the latch assembly 210, 210a is as follows: the operating length 268a is shorter than the free or unloaded operating length 268 of the bow spring 216 in the unlocked configuration (ie, in the first angular orientation 272) (FIG. 43A), so that the bow spring 216 exerts a compressive force between the latch cam 212 and the latch arm 214. As the latch cam 212 rotates through actuation, the latch cam 212 passes through an intermediate angular orientation 273 (FIG. 43B), where the bow spring 216 is in a state of maximum compression (FIG. 43B), and the operating length 268b is in actuation The process is at a minimum length (that is, where the mounting holes 238 and 256 are closest to each other). As the latch cam 212 continues to pass through the intermediate angular orientation 273 to the fully latched configuration (second angular orientation 274) (FIG. 43C), the bow spring 216 assumes an operating length 268c, which still maintains a compression load on the bow spring 216 , But not as large as the compression load in one of the mid-angle orientations 273.

Functionally, the compressed state of the bow spring 216 acts when the door assembly 14a is latched to force the actuation of the latch assemblies 210, 210a. During actuation, the compression of the bow spring 216 pushes the latch arm toward the latch configuration, thereby providing force assistance. That is, the compression of the bow spring 216 forces the latch cam 212 to rotate toward the fully latched configuration and the interaction between the cam blade 228 (FIG. 37) and the cam interface profile 242 (FIG. 38) drives the latch arm 214 to the second The angular orientation 274 is the latch configuration. In addition, configuring the latch assembly 210, 210a so that the bow spring 216 is under a maximum compressive force in the intermediate angular orientation 273 also helps to fix the latch mechanism in the unlocked configuration of the first angular orientation 272 or the second angular orientation 274 The fully latched configuration. That is, because the bow spring 216 exerts a maximum compressive force at the intermediate angular orientation 273, the bow spring 216 is believed to force or assist in forcing the latch cam 212 into an eccentric orientation (ie, toward the first angular orientation 272 or the second Angular orientation 274). The eccentric force also helps prevent false rotation of the latch cam 212.

Meanwhile, in various embodiments and with further reference to FIGS. 44A and 44B, the latch cam 212 and the latch arm 214 interact as follows: In the unlocked configuration of the first angular orientation 272, the cam bearing 252 and the latch cam 212 The flat surface 233 of the cam surface 232 engages with the latch tip 246 retracted (Figure 44A). In the depicted embodiment, the flat surface 233 is sized so that when the latch cam 212 reaches or passes through the mid-angle orientation 273 of FIG. 43B, the cam bearing 252 remains on the flat surface 233. It should be further noted that in the depicted embodiment, the latch tip 246 extends after reaching the intermediate angular orientation 273, as depicted in FIG. 43B. After passing through the intermediate angle orientation 273, the cam bearing 252 rides on the inclined surface 234 of the cam surface 232, which causes the latch arm 214 to become inclined within the internal cavity 208 of the door assembly 14a. The tilt of the latch arm 214 deflects the extended latch tip 246 toward the front panel 202 of the door assembly 14a. The deflected latch tip 246 engages the door frame 28 to apply a drop force on the door assembly 14 a to better seal the door assembly 14 a in the bottom assembly 26. The configuration of FIGS. 43C and 44B (in which the latch tip 246 extends laterally and deflects toward the front plate 202) is referred to herein as a "fully latched" configuration.

With reference to FIGS. 45A and 45B, predictions 292 and 294 of the torque demand of the actuation latch assemblies 210a and 210 are presented for an embodiment of the present invention, respectively. The prediction of FIG. 45A is used to actuate the latch assembly 210a with the S-shaped bow spring 216d. The prediction of FIG. 45B is used to actuate the latch assembly 210 shown in FIG. 35, which includes the bow spring 216 approximately corresponding to the bow spring 216b of FIG. 40B. As the latch mechanism is actuated from the first angular orientation 272 to the second angular orientation 274 (ie, from an unlocked to a fully latched configuration), it is predicted that both 292 and 294 exhibit discrete angular orientations in Newton- Meter (Nm) is the predicted torque in units. Similarly, the respective door assemblies 14a and 14 are not seated in a container portion 12; that is, the torque requirements of the door assemblies 14a and 14 are predicted to be presented separately, without the latch tip 246 seated in the bottom assembly 26 Any additional torque requirements required.

The predictions presented in FIGS. 45A and 45B predict at the end of cam rotation (ie, at the second Angular orientation 274) is one of the maximum torques, and one of the peak torques during spring compression increases significantly. That is, for the prediction 292 of FIG. 45A representing the S-shaped bow spring 216d, the torque in the second angular orientation 274 is within 20% of the maximum predicted torque (local maximum 296). For the prediction 294 of FIG. 45B, which represents a bow spring 216 similar to the bow spring 216b, the torque in the second angular orientation 274 is within 50% of the maximum predicted torque (local maximum 296). These characteristics are attributed to the fact that one end of the spring is mounted to the moving latch arm 214, which directly acts on the latch arm 214 and assists the rotation of the latch cam 212. Therefore, although the bow springs 216, 216d do store some energy to provide an effective eccentric effect, some of the energy imparted to the springs 216, 216d acts on the latch arm 214 during the rotation of the latch cam 212, so the provision ratio will be increased by Only a spring acting on the cam will provide a more uniform torque profile.

Each group of predictions 292 and 294 are characterized by two local maxima 296 and 298, with a local minima 299 defined between them. The local minima approximately corresponds to the intermediate angular orientation 273 (e.g., Figure 43B). The portion of predictions 292 and 294 from θ=0° to about θ=50° passing through the local maximum 296 represents actuation of the latch arm 214 from a retracted configuration (eg, FIG. 43A) to an extended configuration (For example, Figure 43B) Required torque. The portion of predictions 292 and 294 from about θ=50° to about θ=86° passing through the local maximum 298 represents the torque required to tilt the latch arm 214 (eg, FIGS. 43C and 44B). The local minimum value 299 indicates the force assistance provided by the approximate maximum compression of the bow springs 216d, 216 (e.g., FIG. 43B).

Referring to FIGS. 46A and 46B, test results 312 and 314 comparing the torque requirement of operating the door assembly 14a with the torque requirement of operating a conventional SMIF cassette are presented. In FIGS. 46A and 46B, "Conv" indicates the conventional SMIF cassette, and "Prototype" indicates the door assembly 14a of the present invention. "Door Only" refers to an independent door (ie, not seated in a substrate container) and "(in the dome) In Dome" refers to a door seated in a substrate container. Test Results 312 shows the torque demand for latching the conventional door and door assembly 14a, and the test result 314 shows the torque demand for unlocking the conventional door and door assembly 14a. The torque unit in Figure 46A and Figure 46B is inch-pound force (in-lbf).

For the "single door" configuration, compared with the "Conv" conventional door, both the latching torque and the unlocking torque are slightly higher for the "prototype" (door assembly 14a). However, for the "in the dome" configuration, compared with conventional doors, both the latching torque and the unlocking torque are significantly smaller for the "prototype" door assembly 14a. This unexpected result can be attributed to the force assistance provided by the bow spring 216d coupled to the latch cam 212 and the latch arm 214. That is, due to the increase in the work required to compress the bow springs 216, 216d, the torque can increase during the first half of the cam rotation, and then the maximum torque decreases. This is because the torque provided by the spring during the second half of the rotation already includes another The stored energy will be needed without bow springs 216, 216d.

Referring to FIG. 47, a modified attachment 320 for one of the bow springs 216 is depicted in accordance with an embodiment of the invention. For the depicted embodiment, a bushing 322 is connected to the first end 262 of the bow spring 216 and to the radially projecting tab 236 of the latch cam 212. The bushing 322 provides a larger diameter shaft 324 relative to the wire diameter of the bow spring 316, and the bushing 322 can rotate within the radially protruding tab 236. The bushing 322 may also be configured to provide a top bearing portion 326 protruding above the radially protruding tab 236 and the front face 222 of the latch cam 212.

Referring to FIGS. 48A and 48B, another modified attachment 340 of the bow spring 216 according to an embodiment of the present invention is depicted. In the depicted embodiment, the first end 262 of the bow spring 216 defines a ring or eye ring 342 that is sized to rotate around a hub 344 extending from the radially projecting tab 236. In one or more embodiments, a cap pin 346 is sized to pass through the eye ring 342 and snap into the hub 344 to capture the first end 262 of the bow spring 216. The cover pin 346 may also include a top bearing portion or wear pad 348, which is convex The protrusion 236 and the front surface 222 of the latch cam 212 protrude from the radial direction.

Functionally, the larger diameter shaft 324 of the bushing 322 or the larger diameter of the hub 344 relative to the wire diameter of the bow spring 216 spread the applied load over a larger area, thereby reducing stress and reducing particle generation. The top bearing portions 326 and 348 provide a large surface area that can contact the front plate 202 during actuation and reduce wear and accompanying particle generation relative to direct contact with the bow spring 216.

Referring to FIG. 49, a modified attachment 360 to one of the second ends 264 of the bow spring 216 is depicted in accordance with an embodiment of the present invention. For the depicted embodiment, a bushing 362 is connected to the second end 264 of the bow spring 216 and to the latch arm 214. The bushing 362 provides a larger diameter shaft 364 ("larger" with respect to the wire diameter of the bow spring 216), which extends into the latch arm 214 and can rotate within it. The bushing 362 may also be configured to provide a top bearing portion 366. The top bearing portion 366 may also define a laterally extending slot 368 that extends from the center of the top bearing portion 366 to the edge thereof. The bushing defines a pivot axis 372 around which the second end 264 of the bow spring 216 rotates.

Functionally, the larger diameter shaft 364 of the bushing 362 spreads the applied load over a larger area relative to the wire diameter of the bow spring 216, thereby reducing stress and accompanying particle generation. The top bearing portion 366 provides a large surface area that can contact the front plate 202 during actuation and reduces wear and accompanying particle generation relative to direct contact with the bow spring 216. The laterally extending slot 368 enables the second end 264 of the bow spring 216 to be easily snapped into the bushing 362 during assembly, and also makes the bow spring 216 bend when the latch arm 214 is tilted during actuation (FIG. 44B) The second end 264 can tilt from being parallel to the pivot axis 372 (FIG. 44A) to be non-parallel to the pivot axis 372.

Each of the additional features and methods disclosed herein can be used alone or in combination with other features and methods to provide improved devices and methods for manufacturing and using them. Therefore, the combination of features and methods disclosed herein may not necessarily practice the present invention in the broadest sense of the present invention, and instead It is only disclosed to specifically describe the representative and preferred embodiments.

Those skilled in the art can understand various modifications to the embodiments after reading the present invention. For example, those of ordinary skill in the related art will recognize that various features described for different embodiments can be appropriately combined, not combined, and then combined with other features individually or in different combinations. Similarly, the various features described above should be regarded as example embodiments, rather than limiting the scope or spirit of the present invention.

Those of ordinary skill in the relevant art will recognize that various embodiments may include fewer features than those depicted in any of the individual embodiments described above. The embodiments described herein are not intended to be exhaustively presented as one of the ways in which various features can be combined. Therefore, these embodiments are not mutually exclusive combinations of features; instead, as those skilled in the art should understand, the scope of patent application may include a combination of different individual features selected from different individual embodiments.

Any incorporation by way of citing the above documents is restricted so as not to incorporate any object that violates the explicit disclosure of this article. Any incorporation by way of citing the above documents is further restricted so that the claims contained in the documents are not incorporated into this article by way of reference. It is further restricted to any incorporation by way of citing the above documents so that any definitions provided in the documents are not incorporated into this document by way of reference unless it is clearly included in this document.

References to "embodiment(s)", "disclosure", "invention", "embodiments of the present invention", "embodiments (embodiments)" and the like contained herein are not considered A description of this patent application of the prior art (including text and diagrams of the scope of the patent application).

For the purpose of explaining the scope of the patent application, it is clearly hoped that the provisions of 35 USC112(f) will not be cited, unless the specific term "...component" or "... step" is in the respective claims statement.

10‧‧‧Substrate container

12‧‧‧Container part

14‧‧‧Door assembly

16‧‧‧Back Wall

18‧‧‧Wall

20‧‧‧Front wall

22‧‧‧Wall

24‧‧‧Top part

26‧‧‧Bottom assembly

27‧‧‧Shell

28‧‧‧Door frame

29‧‧‧Substrate

29a‧‧‧Edge

30‧‧‧ Actuating connecting rod assembly

30a‧‧‧ Actuating connecting rod assembly

31‧‧‧Inner surface

34‧‧‧Upper spindle

36‧‧‧Lower spindle

38‧‧‧ stay

40‧‧‧Offset parts

40a‧‧‧coil spring

42‧‧‧Distal side

50‧‧‧Substrate holder assembly

54‧‧‧Base part

57‧‧‧Overmolded part

59‧‧‧Track part

90‧‧‧Yoke

94‧‧‧round

202‧‧‧Front Panel

204‧‧‧Back plate

206‧‧‧Outer peripheral part

Claims (10)

A substrate container includes a container portion including a door frame that defines an opening; a door configured to be installed in the door frame; an actuating linkage assembly including a frame and a substrate holder assembly And a mandrel, the mandrel is pivotally mounted to the frame and to the substrate holder assembly, the frame is mounted to an inner wall of the container portion, the substrate holder assembly can extend to the door frame In the opening, the actuation linkage assembly can be selectively configured in a substrate holding position, wherein when the door is seated in the door frame, the substrate holder assembly contacts the door and The door is actuated, the actuating link assembly assembly can be selectively configured in a substrate non-holding position, wherein when the door is not in the door frame, the substrate holder assembly extends to the opening of the door frame And a biasing component, which is operatively coupled to at least one of the frame, the spindle and the substrate holder assembly, the biasing component biases the actuating link assembly to the substrate non Keep it in position. The substrate container of claim 1, wherein the biasing member includes a spring arm extending from the frame and contacting one of the mandrel and the substrate holder assembly. The substrate container of claim 1, wherein the biasing member includes a coil spring connected to the mandrel, and the coil spring is concentric about a rotation axis of the mandrel. The substrate container of claim 1, wherein the biasing member includes an elastic member extending from the frame to one of the mandrel and the substrate holder assembly. The substrate container of claim 1, wherein: the mandrel is mounted to the frame at a pivot that defines a pivot axis; the biasing member includes an extension of the mandrel extending laterally beyond the pivot, the The extension includes a rotation stop that engages one of the frame and an inner surface of the container to impart a biasing torque between the rotation stop and the spindle. A substrate container, which includes a container part that includes a door frame that defines an opening; a door that is configured to be installed in the door frame; an actuating linkage assembly, which includes: a frame that is installed to An inner wall of the container part; a mandrel which is pivotally mounted to the frame; a base plate holder assembly which is pivotally mounted to the mandrel, the base plate holder assembly can extend to the door frame In the opening; a wheel axle, which is mounted to a lower end of the substrate holder assembly, by defining a clip-in structure at the lower end of the substrate holder assembly to hold the shaft to the substrate holder Component assembly; and a wheel retaining clip, which is mounted to the substrate holder assembly and configured to prevent the shaft from being released from the substrate holder assembly, The actuating link assembly assembly can be selectively configured in a base plate holding position, wherein when the door is seated in the door frame, the base plate holder assembly is in contact with the wheel and passes through the door Actuated, the wheel is configured to roll along an inner surface of the door. Such as the substrate container of claim 6, wherein the wheel holding clip includes a plurality of hook parts, which are coupled with the substrate holding member assembly to fix the wheel holding clip to the substrate holding member assembly. The substrate container of claim 7, wherein: the substrate holder assembly includes a base defining an aperture; at least one of the plurality of hook portions of the wheel holding clip is coupled to a periphery of the aperture; and the The wheel holding clip includes a registration structure for registering the wheel holding clip in the aperture. For example, the substrate container of claim 6, which includes a yoke at the lower end of the substrate holder assembly, and the axle is mounted to the yoke, wherein: the wheel holding clip includes a plurality of hook parts, which are similar to the The substrate holder assembly is coupled to fix the wheel holding clip to the substrate holder assembly; the clip-in structure of the substrate holder assembly includes an elastic cantilever that applies a biasing force to the shaft to Holding the shaft in the wheel yoke; and the wheel holding clip is configured to prevent the elastic cantilever of the clip-in structure from deflecting, thereby preventing the clip-in structure from releasing the shaft. The substrate container of claim 9, wherein at least one of the plurality of hook portions of the wheel holding clip is coupled with the wheel yoke.

Images