KR20190030794A - Manifold integrated valve module and apparatus for analysing gas component having the same - Google Patents

Abstract

The present invention relates to a manifold integrated valve module and a gas component analyzing apparatus equipped with the same, wherein the manifold integrated valve module can conveniently and rapidly perform a correction work for enhancing accuracy and reliability with respect to measured values of the gas component analyzing apparatus. To this end, the manifold integrated valve module comprises: a manifold in which upper holes, middle holes and lower holes form a plurality of columns in a longitudinal direction while facing each other, both side upper holes communicate with each other through chambers with different volumes, front side lower holes and rear side middle holes communicate with each other through connection pipes, one side middle hole at a front end communicates with an entrance port, the other side middle hole at a front end communicates with an exit port, and both side lower holes at a rear end communicate with each other through a bypass pipe; a plurality of input side solenoid valves which are each connected to the upper holes, the middle holes and the lower holes on the same column formed at one side of the manifold, and selectively connect the middle holes to the upper holes or the middle holes to the lower holes; and a plurality of output side solenoid valves which are each connected to the upper holes, the middle holes and the lower holes on the same column formed at the other side of the manifold, and selectively connect the middle holes to the upper holes or the middle holes to the lower holes.

Description

TECHNICAL FIELD [0001] The present invention relates to a manifold integral valve module and a gas component analyzer having the manifold integral valve module.

The present invention relates to a manifold integral type valve module and a gas component analyzer having the same, and more particularly, to a gas component analyzer having a manifold integral valve module, To a manifold integral valve module and a gas component analyzer having the same.

Calibration refers to the process of quantifying the absolute value of the input signal versus the input signal of a gas component analyzer according to the standard signal.

A gas component analyzer that measures the concentration or composition of a gas using a gas sensor is configured to measure the concentration or composition of the gas through a gas sensor that senses the gas.

The gas sensor is a device for measuring the concentration or composition of a gas by using a chemical method. The gas sensor provided in the gas component analyzer is used for analyzing a component using a gas component analyzer Calibration is inevitable, and the calibration process corrects the measured value of the gas sensor so that the accuracy and reliability of the measured value can be increased.

In general, a calibration operation is performed by preparing a plurality of standard gases having different concentrations, and injecting the standard gas into the gas component analyzer as shown in Fig. 1 in order to measure a signal and compare it with a standard value.

For example, the above-described process is repeatedly performed according to the concentration of the standard gas, the measured signals are stored, the operator individually calculates the input-to-output signal to calculate the calibration equation, and based on the calculated calibration equation Calibrate the gas component analyzer.

Specifically, a calibration gas of 'X1' concentration is injected into the gas component analyzer to obtain an output signal of 'Y1' output from the gas sensor, and a calibration gas of 'X2' concentration is injected into the gas component analyzer, Y3 'outputted from the gas sensor is obtained by injecting a calibration gas of the concentration' X3 'into the gas component analyzer to obtain an output signal of' Y3 'outputted from the gas sensor, and a calibration gas of the concentration' X4 ' The output signal of Y5 output from the gas sensor is obtained by injecting a calibration gas of concentration X5 into the gas component analyzer.

Through this process, calibration data matching with 'X1-> Y1', 'X2-> Y2', 'X3-> Y3', 'X4-> Y4', 'X5-> Y5' The calibration data matching with 'X1-> Y1', 'X2-> Y2', 'X3-> Y3', 'X4-> Y4', 'X5-> Y5', 'XN-> YN' , And a correction equation such as Equation (1) is calculated through this.

However, since the process of repetitively injecting a plurality of standard gases having different concentrations into the gas component analyzer to obtain a measurement signal is performed manually by the operator, the calibration operation is troublesome, takes a long time, and is difficult to accurately correct .

Registration No. 10-0983827 (registered on September 16, 2010)

SUMMARY OF THE INVENTION An object of the present invention is to provide a manifold integral valve module capable of performing a calibration operation for improving the accuracy and reliability of a measured value of a gas component analyzer, And to provide a gas component analyzer.

It is another object of the present invention to provide a manifold integral type valve module capable of remarkably reducing the size of a calibrating device and constituting a calibrating device by constructing a calibrating device using a manifold integral valve module, And an apparatus for analyzing a gas component.

According to an aspect of the present invention, there is provided a manifold integral valve module comprising: an upper hole, a middle hole, and a lower hole facing each other and formed in a plurality of rows along a longitudinal direction, The other side middle hole communicates with the outlet port, and the other side middle hole communicates with the outlet port. The other side middle hole communicates with the outlet port, and the other side middle hole communicates with the outlet port. The holes being formed to communicate with each other through a bypass channel; A plurality of input side solenoid valves connected to upper, middle, and lower holes of the same row formed on one side of the manifold, respectively, and selectively connecting the center hole and the upper hole or the middle hole and the lower hole; And a plurality of output side solenoid valves connected to the upper holes, the middle holes, and the lower holes of the same row formed on the other side of the manifold, respectively, and selectively connecting the middle holes and the upper holes or the middle holes and the lower holes, Integral valve module.

Preferably, the chambers of different volumes may be formed to have a predetermined volume ratio.

Preferably, the volume between adjacent chambers may be formed to have a volume ratio of 1: 2.

Preferably, the chamber may include a connection tube formed in the manifold or connected to the manifold.

Preferably, the volume of the chamber having the largest volume among the chambers having different volumes may be configured to have the same volume as the volume of the sampling loop provided in the gas component analyzing apparatus.

Preferably, the volume of the chamber having the largest volume among the chambers having different volumes may be configured to have a volume larger than the volume of the sampling loop provided in the gas component analyzing apparatus.

The controller may further include a controller for controlling the plurality of input side solenoid valves and the plurality of output side solenoid valves.

Preferably, the control unit controls power to be applied to the plurality of input side solenoid valves and the plurality of output side solenoid valves so that the middle holes and the upper holes are connected to each other, or the plurality of input side solenoid valves and the plurality of output side solenoid valves It is possible to control the connection between the middle hole and the lower hole by releasing the power supply.

According to an aspect of the present invention, there is provided an apparatus for analyzing a gaseous component, wherein the manifold integral valve module is integrally built in or detachable.

The present invention as described above has an advantage that the size of the calibrating device can be drastically reduced and the production of the calibrating device can be facilitated by configuring the calibrating device using the manifold integral valve module.

Further, there is an advantage that the calibration work for improving the accuracy and reliability of the measured values of the gas component analyzer can be performed easily and quickly.

In addition, through the control of the control unit, there is an advantage that the accuracy of calibration can be improved by discharging and removing the gas except for a plurality of chambers filled with the calibration gas before the calibration process.

Also, as the volume ratio between the chamber with the largest volume and the sampling loop is appropriately adjusted, the calibration range that can be calibrated using the calibration gas can be selectively controlled. For example, according to the present invention, a range larger than the calibration gas concentration range used is not correctable. However, according to the present invention, there is an advantage that calibration for a concentration higher than the concentration used can be performed.

1 is a configuration diagram showing a configuration of a conventional gas component analyzing apparatus.
2 is a graph illustrating an example of a calibration equation for calibrating a gas component analyzer.
FIG. 3 is a configuration diagram of a gas component analyzing apparatus provided with a calibration apparatus according to an embodiment of the present invention.
4 to 9 are views showing a process of charging a calibration gas into a calibration apparatus according to an embodiment of the present invention.
10 to 14 illustrate a process of measuring a signal for calibration through a calibration apparatus according to an embodiment of the present invention.
15 is a configuration diagram showing a configuration of a gas component analyzing apparatus provided with a calibration apparatus according to another embodiment of the present invention.
16 is a graph showing a calibration equation obtained by using a gas component analyzer equipped with a calibration apparatus according to an embodiment of the present invention.
17 is a perspective view illustrating a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention.
18 is a partially sectional perspective view showing the inside of a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention.
19 is an exploded perspective view of a part of a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention.
20 is a side view showing one side of a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention.
21 is another side view showing another side surface of the manifold integral valve module constituting the calibration apparatus according to an embodiment of the present invention.
22 is a plan view showing a manifold of a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention.

The present invention may be embodied in many other forms without departing from its spirit or essential characteristics. Accordingly, the embodiments of the present invention are to be considered in all respects as merely illustrative and not restrictive.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms.

The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

And / or < / RTI > includes any combination of a plurality of related listed items or any of a plurality of related listed items.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, .

On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", "having", and the like are intended to specify the presence of stated features, integers, steps, operations, components, Steps, operations, elements, components, or combinations of elements, numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like or corresponding elements are denoted by the same reference numerals, and a duplicate description thereof will be omitted.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1, the gas component analyzer includes a filter 10, a sampling loop 20, a separation pipe 30, a gas sensor 40, a pump 50, a first solenoid valve V1, The third solenoid valve V4, the third solenoid valve V5, the first conduit L1, the second conduit L2, the third conduit L3, the fourth conduit L4, the fifth conduit L5 ), A sixth conduit (L6), and a seventh conduit (L7).

The filter 10 is configured to filter air, which is an external carrier gas, filled with a polar molecule such as silica gel or activated carbon and a material adsorbing non-polar molecules.

The sampling loop 20 is made of a material which is difficult to adsorb gas such as Teflon, and is formed in a structure in which the length of the sampling loop 20 is sufficiently long as compared with the diameter.

The sampling loop 20 is configured to sequentially push out the gas already existing in the gas collecting and sequentially supply the collected gas to the separation pipe 30 and the gas sensor 40 during the measurement.

The sampling loop 20 allows the gas collected for measurement to be collected at an accurate volume and is supplied to the sampling loop 20 having a constant volume during the collection time calculated in consideration of the suction speed of the pump 50 The gas is moved, and the gases exceeding the planned volume are closed by a predetermined time so that only the gas of the correct volume remains in the sampling loop 20.

The separation tube 30, also referred to as a column, is a portion that functions to separate the mixed gas into individual single compounds for chromatographic analysis.

The gas sensor 40 is a sensor for sequentially measuring a compound of gas separated and passed through the separation pipe 30.

The pump 50 functions to circulate gas or air through the channel.

On the other hand, for the flow of the gas or the air, the first pipe L1, the second pipe L2, the third pipe L3, the fourth pipe L4, the fifth pipe L5, the sixth pipe L6 ), And a seventh conduit (L7).

A first solenoid valve V1, a second solenoid valve V4 and a third solenoid valve V5 are provided for controlling the direction in which gas or air flows.

Since the specific configuration and operation of the gas component analyzer as described above are the same as or similar to the known gas component analyzer, a detailed description thereof will be omitted, and the calibration apparatus 100 will be described in detail below.

The calibration apparatus 100 according to an embodiment of the present invention is integrally built in or detachable from the gas component analyzer and specifically includes a calibration gas for calibration (hereinafter, referred to as calibration Gas "). ≪ / RTI >

The supply tube may be a tube corresponding to one point of a tube for supplying a calibration gas to the separation tube 30, such as a third tube L3, a fourth tube L4, a fifth tube L5, , And directly or indirectly connected to the separation pipe (30) to supply the calibration gas.

As shown in FIG. 3, the calibration apparatus 100 is configured to sequentially supply a plurality of calibration gases having different concentrations to the separation pipe 30 through the supply tube, and thus, So that calibration data for calibration of the gas sensor 40 can be obtained.

Specifically, the calibration apparatus 100 includes one side connection part (V100, L100) selectively connected to one point of the supply tube, another side connection part (V200, L300) selectively connected to another point of the supply tube, 110V1~150V1, 110V2~150V1, and 110V2~150V2 including a plurality of connection tubes 110~150 connecting the connection portions V100 and L100 and the other connection portions V200 and L300 in parallel by different paths, And the plurality of connection tubes 110 to 150 are configured to have different volumes. A control unit 60 for controlling the flow of calibration gas or air through the one side connections V100 and L100, the other side connections V200 and L300 and the calibration ducts 110 to 150, 110V1 to 150V1 and 110V2 to 150V2, .

First, the one-side connectors V100 and L100 will be described.

The one side connection portions V100 and L100 may include one side valve V100 provided in the supply tube and an input tube L100 selectively connected to the supply tube via the one side valve V100 .

3, the one-way valve V100 is connected to the rear end of the third conduit L3, the tip of the sampling loop 20, and the three tubes connecting the input tube L100, respectively, as shown in FIG. A solenoid valve.

The one-way valve V100 selectively opens and closes the calibration loop so that calibration gas or air supplied through the third conduit L3 can be supplied to the sampling loop 20 or supplied to the input tube L100.

Next, the above-mentioned other side connections V200 and L300 will be described.

The other connections V200 and L300 may include an other valve V200 provided in the supply tube and an output tube L300 selectively communicated with the supply tube through the other valve V200 .

3, the other valve V200 is a three-way solenoid valve for connecting the rear end of the sampling loop 20, the fourth conduit L4, and the output tube L300, for example. Lt; / RTI >

The other valve V200 selectively opens and closes so that a calibration gas or air supplied through the output tube L300 or the rear end of the sampling loop 20 can be supplied to the fourth conduit L4.

Next, the calibration duct portions 110 to 150, 110V1 to 150V1, and 110V2 to 150V2 will be described.

The calibration conduits 110 to 150, 110V1 to 150V1 and 110V2 to 150V2 include a plurality of input side calibration valves 110V1 to 150V1 arranged in series on the input tube L100, A plurality of output side calibration valves 110V2 to 150V2 arranged in series with the plurality of input side calibration valves 110V1 to 150V1 and a plurality of connection tubes 110 to 150).

For example, as shown in FIG. 3, the plurality of input side calibration valves 110V1 to 150V1 may be composed of a three-way solenoid valve arranged in series on an input tube L100, One port is configured to be connected to a plurality of output side calibration valves 110V1 to 150V1 through a plurality of connection tubes 110 to 150, respectively.

The plurality of output side calibration valves 110V2 to 150V2 may be composed of a three-way solenoid valve arranged in series on an output tube L300, and one of the three ports is connected to a plurality of input side calibration valves (110V1 to 150V1) through a plurality of connection tubes (110 to 150).

On the other hand, the plurality of connection tubes 110 to 150, which connect the plurality of input side calibration valves 110V1 to 150V1 and the plurality of output side calibration valves 110V2 to 150V2 in parallel at a ratio of 1: 1, are configured to have different volumes, For example, the tubes of the same diameter may have different lengths so that the plurality of connecting tubes have different volumes.

The volume of the plurality of connection tubes may be configured to have the following ratios when `V` is a reference volume.

First connection tube 110: 1/16 x V

Second connection tube 120: 1/8 x V

Third connection tube 130: 1/4 x V

The fourth connection tube 140: 1/2 x V

Fifth connecting tube 150: 1 x V

As described above, the different volumes of the connection tubes 110 to 150 are used to generate a calibration gas having a plurality of concentrations by using a calibration gas having a single concentration. Specifically, And the concentration of the injected calibration gas according to the fraction is generated as the calibration gas of each intended concentration.

For example, when the volume of the sampling loop 20 is `V` and a calibrated gas having a concentration of 1,000 ppb is used in the measurement corresponding to the volume` V`, The fifth connection tube 150 has a volume of 1,000 ppb and the fourth connection tube 140 has a volume equal to 1000 ppb 1/2 of 500 ppb The third connection tube 130 is 250 ppb which is 1/4 of 1,000 ppb, the second connection tube 120 is 125 ppb which is 1/8 of 1,000 ppb, the first connection tube 110 is 1/16 of 1,000 ppb The calibration gas corresponding to the concentration of 62.5 ppb is generated, and the corresponding calibration equation can be calculated within 1000 ppb as shown in Fig. 16 (a).

This is because in the conventional technology, various volumes of calibration gas are produced by varying the ratio of the concentration of the calibration gas to that of the calibration gas, which is generally used in order to produce a calibration gas of various concentrations, The dilution ratio of the gas is the same, but the volume used as the calibration gas is adjusted so that the calibration gas of different concentration is obtained as a result, and the same effect as that of using the conventional diluted calibration gas is obtained.

On the other hand, when the volume of the sampling loop 20 is `V` and a calibration gas having a concentration of 1,000 ppb is used when measuring the volume` V`, the volume of the fifth connection tube 150 The volume of the second connection tube 150 is 2,000 ppb and the volume of the fourth connection tube 140 is 2,000 ppb 1 / 2, the third connection tube 130 is 500 ppb which is 1/4 of 2,000 ppb, the second connection tube 120 is 250 ppb which is 1/8 of 2,000 ppb, the first connection tube 110 is 2000 ppb And a calibration gas having a concentration of 125 ppb, which is 1/16 of that of the test gas, is generated. As shown in (b) of FIG. 16, the calibration equation corresponding to 2000 ppb can be calculated. The corresponding correction formula can be calculated.

The calibration equation corresponding to a wide section may be calculated using the low concentration calibration gas in consideration of the above points. For example, if the volume of the sampling loop 20 is `V` and the volume` A calibration gas having a concentration of 500 ppb is used for measurement in an amount corresponding to V` and a volume of the fifth connection tube 150 is set to 2 × V to correspond to twice the volume of the sampling loop 20 The calibration equation for the same section as shown in FIG. 16A can be calculated by using the calibration gas of low degree of freedom.

The volume ratio of the sampling loop 20 to the fifth connection tube 150 may be in the range of 1: 0.1 to 1:10, preferably in consideration of the diameter of the connecting tube or the concentration of the calibration gas A ratio of 1: 1 to 1: 3 is suitable.

The diameter of the connection tubes 110 to 150 may be a diameter of the connection tubes 110 to 150, and the diameter of the connection tubes 110 to 150 may be a diameter of the connection tubes 110 to 150, Can be formed with a diameter sufficiently smaller than the entire length. For example, the diameters of the connecting tubes 110 to 150 may be 10 mm or less, and the length of the connecting tubes may be 10 times or more the diameter of the connecting tubes.

As described above, if the connecting tubes 110 to 150 are formed so that the calibration gas introduced first is discharged first, the plurality of connecting tubes 110 to 150 have the same length It is needless to say that the tubes may be formed to have different diameters or may be formed in various shapes such as to form enlarged portions having different volumes in the middle of tubes of the same length and same diameter.

The plurality of connecting tubes 110 to 150 may be formed in such a manner that the tubes of the same length have different diameters or that the tubes of different lengths have different volumes in the middle of the tubes of the same length and the same diameter, As shown in FIG.

The exhaust tube L200 further includes an end tube L100 connecting the ends of the output tube L300 constituting the other side connections V200 and L300 Specifically, the exhaust tube L200 is configured to bypass the fifth input side calibration valve 150V1 and the fifth output side calibration valve 150V2.

15, the calibration conduit may include one input port P1 communicated on the input tube L100 and a plurality of alternate input ports P1 and P1 alternately connected to the input port P1, Directional select valve 100V1 having an output port P2 of the output tube L300 and one output port P3 communicated on the output tube L300 and a plurality of inputs Directional select valve 100V2 having a port P4 and a plurality of input ports 4 of the output-side multi-directional select valve 100V2 are connected to a plurality of output ports P2 of the input- And a plurality of connection tubes 110 'to 150' for connecting the two tubes 1 to 1 in parallel at a ratio of 1: 1.

The input-side multi-directional selector valve 100V1 is a valve that is configured to selectively open one output port P2 of the plurality of output ports P2, and the output-side multi-directional selector valve 100V2 includes a plurality of inputs And is configured to selectively open one of the output ports P4 of the port P4.

The specific operation of the above-described calibration duct unit will be described together with the control operation of the control unit 60 described later.

Next, the control unit 60 will be described.

The control unit 60 controls the flow of gas or air through the one side connections V100 and L100, the other side connections V200 and L300 and the calibration ducts 110 to 150 and 110V1 to 150V1 and 110V2 to 150V2 Specifically, the flow direction of the one side valve V100, the other side valve V200, the input side calibration valves 110V1 to 150V1, and the output side calibration valves 110V2 to 150V2 are controlled.

First, the controller 60 controls the first and second valves V100 and V200 so that the gas can flow into the calibration conduits 110 to 150, 110V1 to 150V1 and 110V2 to 150V2, The calibration valves are sequentially controlled to charge the calibration gas for calibration by controlling the input side calibration valves 110V1 to 150V1 and the output side calibration valves 110V2 to 150V2.

The one side valve V100 and the other side valve V200 are connected to each other so that the third tube L3 is connected to the input tube L100 and the output tube L300 is connected to the fourth tube L4, Respectively, so as to allow the gas to flow into the calibration conduit sections 110 to 150, 110V1 to 150V1, and 110V2 to 150V2.

4, by controlling the first input side calibration valve 110V1 and the first output side calibration valve 110V2 to communicate with each other through the first connection tube 110, 110 to allow the calibration gas to be filled in the first connection tube 110.

5, the second input side calibration valve 120V1 is connected via the first input side calibration valve 110V1 and the second output side calibration valve 120V2 is connected via the first output side calibration valve 110V2. And the second input side calibration valve 120V1 and the second output side calibration valve 120V2 are communicated with each other through the second connection tube 120 so that the calibration gas is supplied to the second connection tube 120 So that the calibration gas is filled in the second connection tube 120.

6, the third input side calibration valve 130V1 is connected through the first and second input side calibration valves 110V1 and 120V1 and the first and second output calibration valves 110V2 and 120V2 are connected The third output side calibration valve 130V2 and the third output side calibration valve 130V2 are communicated with each other through the third connection tube 130. Accordingly, The calibration gas is allowed to flow through the third connection tube 130 so that the calibration gas is filled in the third connection tube 130.

7, the fourth input side calibration valve 140V1 is connected through the first, second, and third input side calibration valves 110V1, 120V1, and 130V1, and the first, second, and third output calibration valves The fourth output side calibration valve 140V1 and the fourth output side calibration valve 140V2 are connected to each other via the fourth connection tube 140 via the first output side calibration valves 110V2, 120V2, and 130V2, So that the calibration gas is allowed to flow through the fourth connection tube 140 so that the calibration gas is filled in the fourth connection tube 140.

Then, as shown in FIG. 8, the fifth input side calibration valve 150V1 is connected through the first, second, third and fourth input side calibration valves 110V1, 120V1, 130V1 and 140V1, The fifth output side calibration valve 150V1 and the fifth output side calibration valve 150V2 are connected through the third and fourth output side calibration valves 110V2, 120V2, 130V2 and 140V2 to the fifth output side calibration valve 150V2, So that the calibration gas is allowed to flow through the fifth connection tube 140 so that the calibration gas is filled in the fifth connection tube 140. [

When the above procedure is completed, the first connection tube 110, the second connection tube 120, the third connection tube 130, the fourth connection tube 140, The gas is charged.

9, the first, second, third, fourth and fifth input side calibration valves 110V1, 120V1, 130V1, 140V1 and 150V1, the first, second, third, fourth and fifth output side calibration valves The second connection tube 120, the third connection tube 130, and the third connection tube 130 by controlling the circulation of the air to the exhaust tube L200 through the first connection tube 110, the second connection tube 120, the third connection tube 130, The fourth connecting tube 140, and the fifth connecting tube 140 so that the calibration gas in the portion excluding the calibration gas filled therein can be discharged.

When the above process is completed, only the first connection tube 110, the second connection tube 120, the third connection tube 130, the fourth connection tube 140, and the fifth connection tube 140 The calibration gas can be charged.

10, by controlling the first input side calibration valve 110V1 and the first output side calibration valve 110V2 to communicate with each other through the first connection tube 110, 110 to allow measurement using the calibration gas in the first connection tube 110. The measured value using the calibration gas in the first connection tube 110 is transmitted to the controller 60 as 'Y1' and stored.

11, the second input side calibration valve 120V1 is connected via the first input side calibration valve 110V1 and the second output side calibration valve 120V2 is connected via the first output side calibration valve 110V2, And the second input side calibration valve 120V1 and the second output side calibration valve 120V2 communicate with each other through the second connection tube 120 to supply air to the second connection tube 120 The measurement using the calibration gas in the second connection tube 120 is made possible. The measured value using the calibration gas in the second connection tube 120 is transmitted to the controller 60 as 'Y2' and stored.

12, the third input side calibration valve 130V1 is connected via the first and second input side calibration valves 110V1 and 120V1 and the first and second output calibration valves 110V2 and 120V2 are connected The third output side calibration valve 130V2 and the third output side calibration valve 130V2 are controlled to communicate with each other through the third connection tube 130, So that the measurement using the calibration gas in the third connection tube 130 can be performed. The measured value using the calibration gas in the third connection tube 130 is transmitted to the controller 60 as 'Y3' and stored.

13, the fourth input side calibration valve 140V1 is connected through the first, second and third input side calibration valves 110V1, 120V1 and 130V1, and the first, second and third output calibration valves The fourth output side calibration valve 140V1 and the fourth output side calibration valve 140V2 are connected to each other via the fourth connection tube 140 via the first output side calibration valves 110V2, 120V2, and 130V2, So that the measurement using the calibration gas in the fourth connection tube 140 can be performed as the air is supplied to the fourth connection tube 140. The measured value using the calibration gas in the fourth connection tube 140 is transferred to the controller 60 as 'Y4' and stored.

Then, as shown in FIG. 14, the fifth input side calibration valve 150V1 is connected through the first, second, third and fourth input side calibration valves 110V1, 120V1, 130V1 and 140V1, The fifth output side calibration valve 150V1 and the fifth output side calibration valve 150V2 are connected through the third and fourth output side calibration valves 110V2, 120V2, 130V2 and 140V2 to the fifth output side calibration valve 150V2, The first connection tube 140 and the fifth connection tube 140 are connected to each other through the tube 140 so that air can be supplied to the fifth connection tube 140 so that measurement using the calibration gas in the fifth connection tube 140 can be performed. The measured value using the calibration gas in the fifth connection tube 150 is transmitted to the controller 60 as 'Y5' and stored.

When the above process is completed, the first connection tube 110, the second connection tube 120, the third connection tube 130, the fourth connection tube 140, and the fifth connection tube 140 are charged The calibration gas having different concentrations is successively sent to the detector so that detection can be performed so that five calibration data such as Y1, Y2, Y3, Y4, and Y5 corresponding to five detection operations can be obtained do.

15, the first connection tube 110 ', the second connection tube 120', and the second connection tube 120 'are formed in the case of the input side multi direction selector valve (' 100V1 ' ), The third connection tube 130 ', the fourth connection tube 140', and the fifth connection tube 140 ', the first connection tube 110' and the second connection tube 140 ' The fifth connecting tube 140 ', and the fifth connecting tube 140' in such a manner that the calibration gas in the tube 120 ', the third connecting tube 130', the fourth connecting tube 140 ', and the fifth connecting tube 140' Calibration data can be obtained.

In the above description, five connection tubes 110 to 150 and 110 'to 150' are used. However, it is needless to say that the number of connection tubes may be increased or decreased according to the number of calibration data to be obtained.

As described above, the process of calibrating the gas component analyzer using five calibration data obtained five times includes, for example, storing the five calibration data in a memory provided in the gas component analyzer, Calculating a correction formula by calculating a correction formula by calculating a data stored in the memory by a control unit provided in the gas component analyzer, generating a new firmware by a controller included in the gas component analyzer, And updating it.

As described above, the process of calibrating the gas component analyzer using the five calibration data obtained five times may be performed through the control unit 60. [

FIG. 17 is a perspective view showing a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention, FIG. 18 is a perspective view showing the inside of a manifold integral valve module constituting a calibration apparatus according to an embodiment of the present invention 19 is an exploded perspective view illustrating a part of a manifold integral valve module constituting a calibrating device according to an embodiment of the present invention, and FIG. 20 is an exploded perspective view of an embodiment of the present invention. FIG. 21 is a cross-sectional view of the manifold integral valve module constituting the calibration device according to the embodiment of the present invention. FIG. As another side view showing the other side surface of Fig.

With reference to Figs. 17 to 21, the manifold integral valve module for implementing the above-described calibration apparatus 100 will be described.

The manifold integral valve module includes a manifold 1000, a plurality of input side solenoid valves 2000, and a plurality of output side solenoid valves 3000, as shown in FIGS. 17 and 18.

First, the manifold 1000 will be described in detail.

The manifold 1000 includes an inlet port INP connected to the one side valve V100 and an outlet port OUTP connected to the other side valve V200 and a plurality of passages It is a block-shaped structure formed.

For example, as shown in FIGS. 18 and 19, an inlet port INP is formed on the uppermost surface of the manifold 1000, and an outlet port OUTP is formed on the front surface of the manifold 1000 .

On one side and the other side of the manifold 1000, an upper hole, a middle hole, and a lower hole face each other and are formed in a plurality of rows along the longitudinal direction.

19 to 21, the manifold 1000 includes a first upper hole 1130, a first middle hole 1110, a first lower hole 1110, 1150 are formed in one row and the second upper hole 1230, the second middle hole 1210 and the second lower hole 1250 are formed in two rows, and the third upper hole 1330, the third middle hole 1310 and the third lower hole 1350 are formed in three rows and the fourth upper hole 1430, the fourth central hole 1410 and the fourth lower hole 1450 are formed in four rows, The fifth central hole 1510 and the fifth lower hole 1550 are formed in five rows and the sixth upper hole 1630, the sixth central hole 1610 and the sixth lower hole 1650 are formed in six columns .

19 to 21, the first 'upper hole 1130', the first 'middle hole 1110', the first 'upper hole 1130' A second 'upper hole 1230', a second 'middle hole 1210' and a second 'lower hole 1250' are formed in two rows, and a third 'lower hole 1250' A third 'middle hole 1310' and a third 'lower hole 1350' are formed in three rows, and a fourth 'upper hole 1430', a fourth 'middle hole 1410' And a fourth 'lower hole 1450' are formed in four rows, and a fifth 'upper hole 1530', a fifth 'middle hole 1510', and a fifth 'lower hole 1550' A sixth 'upper hole 1630', a sixth 'middle hole 1610' and a sixth 'lower hole 1650' are formed in six rows.

On the other hand, the upper holes on the opposite sides are configured to communicate with each other through chambers C1 to C6 of different volumes at a ratio of 1: 1.

Specifically, the first upper hole 1130 and the first 'upper hole 1130' are formed to communicate with the first chamber C1, and the second upper hole 1230 and the second 'upper hole 1230' The third upper hole 1330 and the third upper hole 1330 are formed to communicate with the third chamber C3 and the fourth upper hole 1430 is formed to communicate with the second chamber C2, And the fourth upper hole 1430 'are formed to communicate with the fourth chamber C4 so that the fifth upper hole 1530 and the fifth upper hole 1530' are communicated with the fifth chamber C5 And a sixth upper hole 1630 and a sixth upper hole 1630 'are formed to communicate with the sixth chamber C6.

The manifold 1000 is connected to the outside of the manifold 1000. The chamber TU1 is connected to the outside of the manifold 1000, , TU2, TU3).

19, the first chamber C1, the second chamber C2, and the third chamber C3 are formed inside the manifold 1000, and the fourth chamber C1, The fourth chamber C4, the fifth chamber C5 and the sixth chamber C6 may include connecting tubes TU1, TU2 and TU3 connected to the manifold 1000.

The fourth chamber C4 includes a first upper port communicating with the fourth upper hole 1430 and a first connection tube connecting the fourth upper port communicating with the fourth upper hole 1430 ' TU1).

The fifth chamber C5 includes a second upper port communicating with the fifth upper hole 1530 and a second connection tube connecting the fifth upper port communicating with the fifth upper hole 1530 ' TU2). ≪ / RTI >

The sixth chamber C6 includes a third upper port communicating with the sixth upper hole 1630 and a third connection tube connecting the sixth upper port communicating with the sixth upper hole 1630 ' TU3).

The first chamber C1, the second chamber C2, the third chamber C3, the fourth chamber C4, the fifth chamber C5, and the sixth chamber C6 are formed to have different volumes , For example, the volume between adjacent chambers is formed to have a volume ratio of 1: 2.

For example, when the volume of the first chamber C1 is 'V', the volume of the second chamber C2 is formed to be 2 × V, and the volume of the third chamber C3 is 4 × The volume of the fourth chamber C4 is formed to be 8 x V and the volume of the fifth chamber C5 is formed to be 16 x V and the volume of the sixth chamber C6 Quot; 32 x V ".

It is preferable that the volume of the sixth chamber C6 having the largest volume among the chambers having different volumes is equal to or greater than the volume of the sampling loop 20 provided in the gas component analyzing apparatus.

On the other hand, in order to make the volumes of the first chamber C1, the second chamber C2, and the third chamber C3 have the above-described proportions, a step may be formed at a portion corresponding to the neighboring chamber .

Specifically, a step is formed such that the width of the portion corresponding to the manifold where the first chamber C1 is formed is greater than the width of the portion corresponding to the manifold where the second chamber C2 is formed, and the second chamber C2 A step may be formed such that the portion corresponding to the manifold where the third chamber C3 is formed is wider than the width of the formed manifold corresponding portion.

In the case of the fourth chamber C4, the fifth chamber C5 and the sixth chamber C6, since the volume ratio can be set by the volume of the connection tubes TU1, TU2, TU3, .

Meanwhile, the manifold 1000 is formed such that a lower hole located on the side of the manifold and a center hole located on the rear side are connected to each other through a connection pipe.

Specifically, the first lower hole 1150 and the second middle hole 1210 are formed to communicate with each other through the first connection pipe (P1) when one side is referred to.

In addition, the second lower hole 1250 and the third middle hole 1310 are formed to communicate with each other through the second connection pipe (P2).

The third lower hole 1350 and the fourth middle hole 1410 are formed to communicate with each other through the third connection pipe P3.

The fourth lower hole 1450 and the fifth middle hole 1510 are formed to communicate with each other through the fourth connection pipe P4.

The fifth lower hole 1550 and the sixth middle hole 1610 are formed to communicate with each other through the fifth connection pipe P5.

The first 'lower hole 1150' and the second 'middle hole 1210' are formed to communicate with each other through the first connection pipe P 1 'on the other side.

In addition, the second 'lower hole 1250' and the third 'middle hole 1310' are formed to communicate with each other through the second connection pipe P2 '.

Also, the third 'lower hole 1350' and the fourth 'middle hole 1410' are formed to communicate with each other through the third connection pipe P3 '.

In addition, the fourth 'lower hole 1450' and the fifth 'central hole 1510' are formed to communicate with each other through the fourth connection pipe P4 '.

Further, the fifth 'lower hole 1550' and the sixth 'middle hole 1610' are formed to communicate with each other through the fifth connection pipe P5 '.

The sixth lower hole 1650 and the sixth lower hole 1650 'are formed so as to communicate with each other through the right pipe line P6. And is communicated through a right whisplash path P6 formed in the direction facing the inside of the manifold 1000. [

The inlet port INP of the manifold 1000 communicates with the first center hole 1110 and the outlet port OUTP of the manifold 1000 communicates with the first center hole 1110 ' do.

Next, the plurality of input side solenoid valves 2000 will be described in detail.

The plurality of input side solenoid valves 2000 are three-way valves arranged on one side of the manifold 1000 in the longitudinal direction. Each of the plurality of input side solenoid valves 2000 includes a gasket G on the mounting surface side to firmly close the manifold 1000, .

Specifically, the first input side solenoid valve 2100 is connected to the first upper hole 1130, the first middle hole 1110, and the first lower hole 1150 formed in the first row, The solenoid valve 2100 operates to selectively connect the first central hole 1110 and the first upper hole 1130 or the first central hole 1110 to the first lower hole 1150.

The second input side solenoid valve 2200 is connected to the second upper hole 1230, the second middle hole 1210 and the second lower hole 1250 formed in the second row, The valve 2200 operates to selectively connect the second middle hole 1210 and the second upper hole 1230 or the second middle hole 1210 and the second lower hole 1250.

The third input side solenoid valve 2300 is connected to the third upper hole 1330, the third middle hole 1310 and the third lower hole 1350 formed in the third row, The valve 2300 operates to selectively connect the third middle hole 1310 and the third upper hole 1330 or the third middle hole 1310 and the third lower hole 1350.

The fourth input side solenoid valve 2400 is connected to the fourth upper hole 1430, the fourth middle hole 1410 and the fourth lower hole 1450 formed in the fourth row, The valve 2400 operates to selectively connect the fourth central hole 1410 and the fourth upper hole 1430 or the fourth central hole 1410 and the fourth lower hole 1450.

The fifth input side solenoid valve 2500 is connected to the fifth upper hole 1530, the fifth middle hole 1510 and the fifth lower hole 1550 formed in the fifth row, The valve 2500 operates to selectively connect the fifth central hole 1510 and the fifth upper hole 1530 or the fifth central hole 1510 and the fifth lower hole 1550.

The sixth input side solenoid valve 2600 is connected to the sixth upper hole 1630, the sixth middle hole 1610 and the sixth lower hole 1650 formed in the sixth row, The valve 2600 operates to selectively connect the sixth central hole 1610 and the sixth upper hole 1630 or the sixth central hole 1610 and the sixth lower hole 1650.

The plurality of input side solenoid valves 2000 operate to connect the center hole and the upper hole when power is applied, and operate to connect the middle hole and the lower hole when the power source is released.

Next, the plurality of output side solenoid valves 3000 will be described in detail.

The plurality of output side solenoid valves 3000 are three-way valves arranged along the longitudinal direction on the other side of the manifold 1000. The plurality of output side solenoid valves 3000 include a gasket G on the mounting surface side to firmly close the manifold 1000, .

Specifically, the first output side solenoid valve 3100 is connected to the first 'upper hole 1130', the first 'middle hole 1110', and the first 'lower hole 1150' formed in the first row, respectively The first output side solenoid valve 3100 includes a first middle hole 1110 'and a first upper hole 1130' or a first middle hole 1110 'and a first lower hole 1150' As shown in Fig.

The second output side solenoid valve 3200 is connected to the second 'upper hole 1230', the second 'middle hole 1210', and the second lower hole 1250 'formed in the second row, respectively , The second output side solenoid valve 3200 includes a second 'middle hole 1210' and a second 'upper hole 1230' or a second 'middle hole 1210' and a second lower hole 1250 ' Lt; / RTI >

The third output side solenoid valve 3300 is connected to the third 'upper hole 1330', the third 'middle hole 1310', and the third lower hole 1350 'formed in the third row, respectively , The third output side solenoid valve 3300 includes a third middle hole 1310 'and a third upper hole 1330' or a third middle hole 1310 'and a third lower hole 1350' Lt; / RTI >

The fourth output solenoid valve 3400 is connected to the fourth 'upper hole 1430', the fourth 'middle hole 1410', and the fourth lower hole 1450 'formed in the fourth row, respectively The fourth output solenoid valve 3400 includes a fourth 'middle hole 1410', a fourth 'upper hole 1430' or a fourth 'middle hole 1410' and a fourth 'lower hole 1450' Lt; / RTI >

The fifth output solenoid valve 3500 is connected to the fifth 'upper hole 1530', the fifth 'middle hole 1510', and the fifth 'lower hole 1550' formed in the fifth row, respectively , The fifth output side solenoid valve 3500 includes a fifth 'middle hole 1510', a fifth 'upper hole 1530' or a fifth 'middle hole 1510' and a fifth 'lower hole 1550' Lt; / RTI >

The sixth output solenoid valve 3600 is connected to the sixth 'upper hole 1630', the sixth 'middle hole 1610', and the sixth lower hole 1650 'formed in the sixth column, respectively , The sixth output side solenoid valve 3600 includes a sixth 'middle hole 1610', a sixth 'upper hole 1630' or a sixth 'middle hole 1610' and a sixth 'lower hole 1650' Lt; / RTI >

The plurality of output side solenoid valves 3000 operate to connect the center hole and the upper hole when power is applied, and operate to connect the middle hole and the lower hole when the power source is released.

The first input side solenoid valve 2100 constituting the manifold integral valve module constructed as described above corresponds to the first input side calibration valve 110V1.

The second input side solenoid valve 2200 corresponds to the second input side calibration valve 120V1.

The third input side solenoid valve 2300 corresponds to the third input side calibration valve 130V1.

The fourth input side solenoid valve 2400 corresponds to the fourth input side calibrating valve 140V1.

The fifth input side solenoid valve 2500 corresponds to the fifth input side calibration valve 150V1.

The sixth input side solenoid valve 2600 may be further extended above the fifth input side calibrating valve 150V1.

On the other hand, the first output side solenoid valve 3100 constituting the manifold integral valve module corresponds to the first output side calibration valve 110V2.

The second output side solenoid valve 3200 corresponds to the second output side calibration valve 120V2.

The third output-side solenoid valve 3300 corresponds to the third output-side calibration valve 130V2.

Further, the fourth output side solenoid valve 3400 corresponds to the fourth output side correcting valve 140V2.

The fifth output side solenoid valve 3500 corresponds to the fifth output side calibration valve 150V2.

Further, the sixth output side solenoid valve 3600 may be further expanded on the fifth output side calibrating valve 150V2.

The first connection pipe P1 corresponds to the input tube L100 between the first input side calibration valve 110V1 and the second input side calibration valve 120V1.

The second connection pipe P2 corresponds to an input tube L100 between the second input side calibration valve 120V1 and the third input side calibration valve 130V1.

The third connection pipe P3 corresponds to the input tube L100 between the third input side calibration valve 130V1 and the fourth input side calibration valve 140V1.

The fourth connection conduit P4 corresponds to the input tube L100 between the fourth input side calibration valve 140V1 and the fifth input side calibration valve 150V1.

The fifth connection conduit P5 is connected between a fifth input side calibration valve 140V1 and a sixth input side calibration valve (not shown) that is further expandable above the fifth output side calibration valve 150V2 It can be understood that it corresponds to the input tube L100.

The first connection pipe P1 'corresponds to the input tube L100 between the first output side calibration valve 110V2 and the second output side calibration valve 120V2.

The second connection pipe P2 'corresponds to the input tube L100 between the second output side calibration valve 120V2 and the third output side calibration valve 130V2.

The third connection pipe P3 'corresponds to the corresponding input tube L100 between the third output side calibration valve 130V2 and the fourth output side calibration valve 140V2.

The fourth connection pipe P4 'corresponds to the input tube L100 between the fourth output side calibration valve 140V2 and the fifth output side calibration valve 150V2.

The fifth connection pipe P5 'is connected between the fifth output side calibrating valve 150V2 and a sixth output side calibrating valve (not shown) that can be further extended above the fifth output calibrating valve 150V2 It can be understood that it corresponds to the corresponding input tube L100.

The right pipe line P6 may be regarded as corresponding to the exhaust pipe L200, but the right pipe line P6 may be further extended on the upper portion of the fifth output side calibrating valve 150V2. And the sixth output side solenoid valve 3600 further extended on the sixth output side solenoid valve 3600 and on the fifth output side calibrated valve 150V2.

The first chamber C1 corresponds to the first connection tube 110, the second chamber C2 corresponds to the second connection tube 120, the third chamber C3 corresponds to the second connection tube 120, The fourth chamber C4 corresponds to the fourth connection tube 140 and the fifth chamber C5 corresponds to the fifth connection tube 150. The fifth chamber C5 corresponds to the third connection tube 130, And the sixth chamber C6 corresponds to a sixth connection tube (not shown) that can be further extended on the upper portion of the fifth connection tube 150. [

Although the present invention has been described with reference to the preferred embodiments thereof with reference to the accompanying drawings, it will be apparent to those skilled in the art that many other obvious modifications can be made therein without departing from the scope of the invention. Accordingly, the scope of the present invention should be interpreted by the appended claims to cover many such variations.

10: air filter 20: sampling loop
30: Separator tube 40: Gas sensor
50: pump 60:
100: calibration device 110: first connection tube
120: second connection tube 130: third connection tube
140: fourth connection tube 150: fifth connection tube
110V1 ~ 150V1: Input side calibration valve 110V2 ~ 150V2: Output side calibration valve
L1: first conduit L2: second conduit
L3: third pipe L4: fourth pipe
L5: fifth pipe L6: sixth pipe
L7: Line 7 L100: Input tube
L200: exhaust tube L300: output tube
1000: Manifold
1110, ... , 1610, 1110 ', ... , 1610 ': upper hole
1130, ... , 1630, 1130 ', ... , 1630 ': Central Hall
1150, ... , 1650, 1150, ... , 1650 ': Lower hole
2100, 2200, 2300, 2400, 2500, 2600: Input side solenoid valve
3100, 3200, 3300, 3400, 3500, 3600: Output side solenoid valve
C1, C2, C3, C4, C5, C6:
P1, ... , P5, P1 ', ... , P5 ': connection pipe
P6: To the hall
INP: inlet port
OUTP: exit port

Claims (9)

The upper hole, the middle hole, and the lower hole are formed in a plurality of rows along the longitudinal direction facing each other. The upper holes are communicated through chambers having different volumes, and the lower side holes and the middle holes are connected through a connecting pipe A manifold in communication with the outlet port, and a manifold in which the both lower holes are communicated with each other through a bypass conduit;
A plurality of input side solenoid valves connected to upper, middle, and lower holes of the same row formed on one side of the manifold, respectively, and selectively connecting the center hole and the upper hole or the middle hole and the lower hole; And
And a plurality of output side solenoid valves connected to upper holes, middle holes, and lower holes of the same row formed on the other side of the manifold, respectively, and selectively connecting the middle holes and the upper holes or the middle holes and the lower holes. Valve module. The method according to claim 1,
Wherein the chambers having different volumes are formed to have a predetermined volume ratio. 3. The method of claim 2,
And a volume between adjacent chambers is formed to have a volume ratio of 1: 2. The method according to claim 1,
Wherein the chamber includes a connection tube formed in the manifold or connected to the manifold. The method according to claim 1,
Wherein the volume of the chamber having the largest volume among the chambers having different volumes is configured to have the same volume as the volume of the sampling loop provided in the gas component analyzing apparatus. The method according to claim 1,
Wherein the volume of the chamber having the largest volume among the chambers having different volumes is configured to have a volume larger than the volume of the sampling loop provided in the gas component analyzing apparatus. The method according to claim 1,
And a control unit for controlling the plurality of input side solenoid valves and the plurality of output side solenoid valves. 8. The method of claim 7,
Wherein,
Side solenoid valve and the plurality of output-side solenoid valves to supply power to the plurality of input-side solenoid valves and the plurality of output-side solenoid valves to control connection between the center holes and the upper holes, or to release power to the plurality of input- And the lower hole is connected to the manifold. An apparatus for analyzing a gaseous component, wherein the manifold integral valve module according to any one of claims 1 to 8 is integrally built in or detachable.

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