KR20190001992A - Ionizer having removable waterproof soft X-ray tube module - Google Patents

Abstract

The present invention relates to an ionizer having a removable, waterproof, and soft X-ray tube module. The ionizer comprises: a guide bar having a plurality of guide grooves formed in front of the guide bar; soft X-ray tubes inserted into the guide grooves at a predetermined distance from each other at the guide grooves and having a head protruding from the guide grooves; a tube body detachably coupled to the front of the guide bar to support the soft X-ray tube and having a body window through which the head is exposed in front of the tube body; a waterproof blocking film covering the body window and discharging X-rays generated in the head to the outside; and a tube cover detachably coupled to the front of the tube body to support the waterproof blocking film.

Description

[0001] The present invention relates to an ionizer having a removable waterproof soft X-ray tube module,

The present invention relates to an ionizer having a detachable waterproof soft X-ray tube module capable of discharging static electricity accumulated in an object.

In the process of manufacturing a semiconductor chip package, a process for separating a wafer into which electrical dies (EDS) has been completed into individual semiconductor chips is referred to as a wafer cutting process. The wafer cutting process is directly performed on a lead frame Bonding process, which is a process of attaching the semiconductor chip of the present invention.

More specifically, the wafer cutting process includes a first step of bonding an ultraviolet (UV) tape to the surface of the wafer, a second step of cutting the wafer into individual semiconductor chips by rotation of the blades, And a third step of removing the ultraviolet tape. In the second step, the cooling water is supplied to the blade for cooling the blade.

At this time, in the second step, static electricity is generated due to the friction between the blade and the ultraviolet ray tape in the process of cutting the wafer into the blades, so that the slag and the impurities generated by cutting the wafer adhere to the semiconductor chip.

When the semiconductor chip is assembled into the semiconductor chip package in a state where the semiconductor chip is attached to the slag and the impurity, the passivation layer on the surface of the semiconductor chip package is destroyed to cause a reliability failure. It is necessary to remove the static electricity generated when the wafer is cut into individual semiconductor chips because the electrical characteristics are deteriorated to cause defective assembling and defective characteristics, there was.

Methods for removing static electricity generated when a wafer is cut into individual semiconductor chips include a method of grounding, a method of humidifying, a method of using an antistatic agent or a charging device, or a method of using an ionizer.

At this time, ionizer is a device which sends out positive ions and negative ions obtained by discharging high voltage to the material to neutralize them with the polarity opposite to the charged static electricity, and a soft X-ray static eliminator can be used for removing the semiconductor chip static electricity.

The soft X-ray static eliminator is made by coating a bipolar tube with a metal material such as tungsten (W) on a thin beryllium plate.

A related art X-ray static eliminator includes an X-ray tube of Korean Patent No. 1656781, a first connector connected to the X-ray tube, and a second connector formed at a position facing the first connector with respect to the center, Ray tube module comprising: a plurality of X-ray tube modules which are selectively coupled to the X-ray tube and have concave and convex portions around the head and are manually turned by a worker; A mold having a voltage generating portion for receiving an external voltage and generating a high voltage, a mold having a module insertion groove formed therein for receiving the voltage generating portion and having the X-ray tube module inserted therein, A plurality of voltage generating assemblies having a second connector physically detachably attached to the first connector to transmit the high voltage and provide a physical coupling force; And a bar-shaped case accommodating the voltage generating assemblies spaced apart from each other, the body having a plurality of module through holes each of which penetrates a portion corresponding to the module insertion groove, the X- An x-ray ionizer is disclosed.

In this case, a beryllium plate for discharging the soft X-ray generated in the X-ray tube to the outside is installed. Such a beryllium plate has a problem in that it is corroded and oxidized by the cooling water supplied to the blade during the cutting process of the wafer, .

Korean Registered Patent No. 1656781 (2016.09.06)

SUMMARY OF THE INVENTION It is an object of the present invention to provide an ionizer having a detachable waterproof soft X-ray tube module capable of blocking the occurrence of leakage due to corrosion and oxidation will be.

Another object of the present invention is to provide an ionizer having a detachable waterproof type soft X-ray tube module which can prevent a deceleration performance from deteriorating.

The ionizer having the detachable watertight soft X-ray tube module according to the present invention comprises: a guide bar having a plurality of guide grooves formed in front thereof; A soft X-ray tube inserted into the plurality of guide grooves, the soft X-ray tube having a head protruding outside the guide groove; A tube body detachably coupled to the front of the guide bar to support the soft X-ray tube and having a body window through which the head is exposed in front; A waterproof type barrier film covering the exposed portion of the head and emitting X-rays generated from the head to the outside; And a tube cover detachably coupled to the front of the tube body to support the waterproof type shielding film.

Further, the waterproof type shielding film is a mica plate.

In addition, the waterproof type shielding film is formed to have a thickness of 0.020 mm to 0.025 mm.

Further, the tube body and the tube cover are made of a metal material.

The apparatus may further include an O-ring disposed between the waterproof type shielding film and the tube body for air tightness.

And a silicone pad installed between the guide bar and the tube body for airtightness.

The soft X-ray tube can be detachably attached to the guide bar by a body bolt protruding from the guide bar and a body nut screwed to the end of the body bolt without an additional tool.

Further, the waterproof type shielding membrane and the O-ring provided between the tube body and the tube cover can be detachably attached to the tube body by cover bolts that screw the tube body and the tube cover together.

A main body having a main through hole formed in front of the ionizer having a detachable waterproof type soft X-ray tube module according to another example of the present invention; A soft X-ray tube inserted into the main through-hole and having a head projecting out of the guide groove; A tube body detachably coupled to the front of the guide bar to support the soft X-ray tube and having a body window through which the head is exposed in front; A waterproof type barrier film covering the exposed portion of the head and emitting X-rays generated from the head to the outside; And a tube cover detachably coupled to the front of the tube body to support the waterproof type shielding film.

Accordingly, the Ionizer having the detachable waterproof type X-ray tube module according to the present invention is sealed by the waterproof type barrier film, thereby maximizing the airtightness and waterproofness of the soft X-ray tube and causing leakage due to corrosion and oxidation It is possible to block the occurrence of the problem.

In addition, since the Ionai's waterproof type barrier membrane having the detachable waterproof type X-ray tube module according to the present invention is formed of a mica plate, it is possible to prevent the decontamination performance from being deteriorated even if the airtightness and the water resistance are maximized.

1 is a plan view of an ionizer with a detachable waterproof soft X-ray tube module according to the present invention;
2 is an exploded perspective view of an ionizer having a detachable waterproof soft X-ray tube module according to the present invention.
3 is a cross-sectional view of an ionizer with a detachable waterproof soft X-ray tube module in accordance with the present invention.
FIG. 4A is a photograph showing the surface state of the conventional ionizer beryllium plate before the wafer cutting process, FIG. 4B is a photograph of the waterproof barrier of the ionizer having the detachable waterproof type soft X-ray tube module of the present invention, Photograph of surface condition.
FIG. 5A is a photograph showing the surface state of the conventional ionizer beryllium plate after using the wafer cutting process, FIG. 5B is a photograph of the waterproof barrier film of the ionizer having the detachable waterproof type soft X-ray tube module of the present invention Photograph of surface condition.
FIG. 6 is an exploded view of a soft X-ray tube replacing state of an ionizer having a detachable waterproof soft X-ray tube module according to the present invention. FIG.
7 is a perspective view of a main body according to the present invention.

Hereinafter, the technical idea of the present invention will be described more specifically with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the technical concept of the present invention, are incorporated in and constitute a part of the specification, and are not intended to limit the scope of the present invention.

2 is an exploded perspective view showing an ionizer having a detachable waterproof type soft X-ray tube module according to the present invention, and Fig. 3 is an exploded perspective view showing an ionizer having a detachable waterproof soft X- ray tube module according to the present invention. Sectional view of an ionizer having a detachable waterproof soft X-ray tube module according to the present invention.

1 to 3, an ionizer 100 having a detachable waterproof type soft X-ray tube module according to the present invention includes a guide bar 10, a voltage generating module, a soft X-ray tube 20, (30), a waterproof type shielding film (40), and a tube cover (50).

The guide bar 10 may be fixed to a peripheral structure (for example, an inner wall of a building) as a basic body of the present invention, and may include a plurality of guide bars 10 recessed in a structure corresponding to the rear of the soft X- The guide groove 11 is formed.

The voltage generating module is housed in the guide bar 10 and generates a high voltage. The voltage generating module may include a control PCB (not shown) installed inside the guide bar 10 to control the degree of voltage of the high voltage, And a power PCB (not shown) for electrically connecting the first and second power supply units 100 and 200 to each other.

The soft X-ray tube 20 is inserted into the plurality of guide grooves 11 and has a head 21 protruding outside the guide groove 11 and generating x-rays, The X-ray is emitted by the high voltage delivered from the voltage generating module.

On the other hand, the soft X-ray tube 20 may generate soft X-rays at the head 21.

The tube body 30 is detachably coupled to the front of the guide bar 10 to support the soft X-ray tube 20 by fixing the soft X-ray tube 20 to the guide bar 10 A body window 31 through which the head 21 is exposed, and a plate structure.

The waterproof type shielding film 40 covers the body window 31 and radiates X-rays generated from the head 21 to the outside, and can be formed in a plate structure.

The tube cover 50 is detachably coupled to the front of the tube body 30 to support the waterproof type shielding film 40 and has a structure corresponding to the body window 31 at the center, 21 through which the X-rays generated are formed.

Accordingly, the ionizer 100 having the detachable waterproof type soft X-ray tube module according to the present invention is configured such that the soft X-ray tube 20 is sealed by the waterproof type shielding film 40 so that the airtightness of the soft X- It has an advantage that the waterproofing is maximized and the occurrence of leakage due to corrosion and oxidation can be originally blocked.

Meanwhile, the waterproof type shielding film 40 may be formed of a mica plate and may have a thickness of 0.020 mm to 0.025 mm. The critical significance of such numerical values will be described in more detail with reference to the following examples.

<Examples>

The conventional ionizer and the ionizer 100 of the present invention are used for 200 hours or more for removing static electricity generated in the cutting process of the wafer and then the surface state of the beryllium plate formed in the conventional ionizer, The surface condition of the waterproof type shielding film 40 (mica plate) formed in the ionizer 100 having the detachable waterproof type soft X-ray tube module was confirmed.

At this time, the thickness of the beryllium plate formed in the conventional ionizer was 0.08 mm, and the thickness of the waterproof type barrier film 40 formed in the ionizer 100 of the present invention was 0.025 mm.

FIG. 4A is a photograph showing the surface state of the conventional ionizer before the wafer cutting process of the beryllium plate of the ionizer, FIG. 4B is a view showing a waterproof type shielding film 40 of the ionizer 100 having the detachable waterproof soft X-ray tube module of the present invention, FIG. 5A is a photograph showing the surface state of the conventional ionizer beryllium plate after use of the wafer cutting process, FIG. 5B is a photograph showing the surface state of the beryllium plate of the ionizer with the detachable waterproof type soft X-ray tube module of the present invention 12 is a photograph showing the surface state of the waterproof type shielding film 40 of the ionizer 100 after the wafer cutting process is used.

As shown in FIGS. 4A and 4B, in the wafer cutting process of the conventional Ionizer beryllium plate, there was no deformation of the surface condition before use for static electricity removal, and the detachable waterproof type soft X-ray tube module of the present invention In the wafer cutting process of the waterproof type shielding film 40 of the ionizer 100, there was no deformation of the surface condition before use for static electricity removal.

As shown in FIGS. 5A and 5B, in the wafer cutting process of the beryllium plate of the conventional ionizer, the surface state was deformed by corrosion and oxidation after 200 hours or more of use for static elimination, but the detachable waterproof There was no deformation due to corrosion or oxidation in the surface state after 200 hours or more of use for static elimination in the wafer cutting process of the waterproof type shielding film 40 of the ionizer 100 having the type X ray tube module.

In addition, the ion balance of the soft X-ray emitted from the beryllium plate of the conventional ionizer was 1.9, and the ion balance of the water-proof barrier film 40 of the ionizer 100 having the detachable waterproof soft X-ray tube module of the present invention The ion balance of the soft X-ray to be emitted is 0.64, indicating that the ion balance and the discharge performance are superior to those of the soft X-ray emitted from the beryllium plate of the conventional ionizer. At this time, the closer the ion balance is to 0, the better the ion balance.

On the other hand, the waterproof type shielding film 40 of the ionizer 100 having the detachable waterproof type soft X-ray tube module of the present invention did not deteriorate ion balance and electrification performance at a thickness of 0.01 mm to 0.025 mm, The ion balance and the electrification performance were deteriorated.

Since the waterproof type shielding film 40 of the ionizer 100 having the detachable waterproof type soft X-ray tube module according to the present invention has a thickness less than 0.020 mm, deformation by peripheral vibration is relatively easy, 0.025 mm was determined as an optimized value.

Accordingly, the ionizer 100 having the detachable waterproof soft X-ray tube module according to the present invention is configured such that the waterproof type shielding film 40 is formed of a mica plate, thereby preventing the decontamination performance from being deteriorated even if the airtightness and waterproofing are maximized There is an advantage to be able to do.

In addition, the tube body 30 and the tube cover 50 are made of a metal material, thereby maximizing airtightness and waterproofness. At this time, the metal material may be aluminum or stainless steel.

In addition, the ionizer 100 having the detachable waterproof type soft X-ray tube module may further include an O-ring 60 and a silicon pad 70 for maximizing airtightness.

The O-ring 60 is provided for airtightness between the waterproof type shielding film 40 and the tube body 30 and the silicone pad 70 is hermetically sealed between the guide bar 10 and the tube body 30. [ . At this time, the soft X-ray tube 20 is inserted into the silicon pad 70.

FIG. 6 is an exploded view showing a state in which an ionizer having a detachable waterproof type soft X-ray tube module according to the present invention is replaced with a soft X-ray tube.

2 and 6, the ionizer 100 having the detachable waterproof soft X-ray tube module may further include a body bolt 81, a body nut 82, and a cover bolt 83. At this time, the body bolt 81 and the body nut 82 are provided for facilitating the replacement of the soft X-ray tube 20, and the cover bolt 83 facilitates the replacement of the waterproof type shielding film 40 .

Referring to FIG. 6, the body bolts 81 are coupled to both sides of the front side of the guide bar 10, and the silicone pad 70 and the tube body 30 are penetrated. At this time, the silicon pad 70 may have a pad cut-out portion 71 formed at both ends thereof in a plate-like shape so as to allow the body bolt 81 to pass therethrough.

The body nut 82 is screwed to an end of the body bolt 81 to detachably fix the silicone pad 70 and the tube body 30 penetrating the body bolt 81.

When the body nut 82 is separated from the body bolt 81, the tube body 30, the silicone pad 70, and the soft X-ray tube 20 are sequentially separated, Can be replaced.

The soft X-ray tube 20 includes a body bolt 81 for screwing the guide bar 20, the silicone pad 70 and the tube body 30 to each other and a body bolt 81 screwed to the end of the body bolt 81 The body nut 82 can be detached and attached without additional tools.

The cover bolt 83 is screwed to the tube body 30 and the tube cover 50 so that the threaded engagement of the tube body 30 of the cover bolt 83 with the tube cover 50 is released The waterproof type shielding film 40 provided between the tube body 30 and the tube cover 50 can be replaced.

That is, the waterproof type shielding film 40 and the O-ring 60 can be attached and detached without additional tools by the cover bolts 83 screwing the tube body 30 and the tube cover 50 together.

7 is a perspective view illustrating a main body according to the present invention.

As shown in FIG. 7, the ionizer 100 having the detachable waterproof type soft X-ray tube module according to an exemplary embodiment of the present invention may be replaced with the main body 90 of the guide 10.

At this time, the main body 90 has a main through hole 91 corresponding to the soft X-ray tube 20 in front, and only one soft X-ray tube 20 can be installed.

On the other hand, the soft X-ray tube module is an assembly of the tube cover, the barrier film, the O-ring, the tube body, the soft X-ray tube, and the silicon pad.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: Ionizer with detachable waterproof soft X-ray tube module according to the present invention
10: Guide Bar
11: Guide groove
20: soft X-ray tube
21: Head
30: tube body
31: Body window
40: Waterproof type shielding film
50: tube cover
51: Cover window
60: O ring
70: Silicone pad
71: pad incision part
81: Body bolt
82: Body nut
83: Cover bolt
90: Main body
91: Main through hole

Claims (9)

A guide bar having a plurality of guide grooves formed in front thereof;
A soft X-ray tube inserted into the plurality of guide grooves, the soft X-ray tube having a head protruding outside the guide groove;
A tube body detachably coupled to the front of the guide bar to support the soft X-ray tube and having a body window through which the head is exposed in front;
A waterproof type barrier film covering the exposed portion of the head and emitting X-rays generated from the head to the outside; And
And a tube cover detachably coupled to the front of the tube body to support the waterproof type shielding membrane.
The method according to claim 1, wherein the waterproof type shielding film
Ionizer with detachable watertight soft X-ray tube module characterized in that it is a mica plate.
The method according to claim 2, wherein the waterproof type shielding film
Wherein the Ionizer is formed with a thickness of 0.020 mm to 0.025 mm.
2. The apparatus of claim 1, wherein the tube body and the tube cover
Ionizer having detachable watertight soft X-ray tube module, characterized in that it is made of a metal material.
The method according to claim 1,
And an O-ring installed for airtightness between the waterproof type shielding film and the tube body.
6. The method of claim 5,
And a silicone pad installed between the guide bar and the tube body for airtightness. &Lt; RTI ID = 0.0 &gt; Ionizer &lt; / RTI &gt;
7. The apparatus according to claim 6, wherein the soft X-ray tube
And a body bolt protruding from the guide bar and a body nut screwed to an end of the body bolt, wherein the body bolt is detachably attachable and detachable without additional tools.
The method according to claim 6,
Wherein the waterproof type shielding film and the O-ring provided between the tube body and the tube cover are removable by a cover bolt that screws the tube body and the tube cover to each other.
A main body having a main through hole formed at a front side thereof;
A soft X-ray tube inserted into the main through-hole and having a head projecting out of the guide groove;
A tube body detachably coupled to the front of the guide bar to support the soft X-ray tube and having a body window through which the head is exposed in front;
A waterproof type barrier film covering the exposed portion of the head and emitting X-rays generated from the head to the outside; And
And a tube cover detachably coupled to the front of the tube body to support the waterproof type shielding membrane.

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