TW201352069A - X-ray radiation source - Google Patents

Abstract

In an X-ray radiation source (2), a case (31) and a rail member (4) are coupled via coupling members (41) having insulating properties, and a first facing surface (P1) and the rail member (4) are electrically isolated from each other. Thus, the effects of an induced current that flows through the rail (4) can be prevented from reaching the first facing surface (P1) when the X-ray radiation source (2) is connected to external equipment, and an object to be processed can be adequately neutralized without causing an electrostatic induction phenomenon. Furthermore, in the X-ray radiation source (2), given that the first facing surface (P1) comprises a metal, the first facing surface (P1) can be prevented from being charged due to the effects of potential that exists externally or in a high-voltage power supply module (22) for driving an X-ray tube (21), and the effects of neutralizing the object to be processed can be improved.

Description

X-ray source

The present invention relates to an X-ray irradiation source including an X-ray tube in a casing.

Conventionally, there has been provided an X-ray irradiation apparatus including a plurality of X-ray irradiation sources having X-ray generation sources for generating X-rays. Such an X-ray irradiation device can be used as a static elimination device, that is, a manufacturing process such as an IC (integrated circuit), an LCD (liquid crystal display device), or a PDP (plasma display panel), for example, A gas-eliminating device that emits X-rays by air or the like to generate an ion gas, thereby removing the object.

The X-ray irradiation apparatus of the static elimination device includes, for example, the optical power removal device described in Patent Document 1. The light-removing device includes a soft X-ray generator, a high-voltage power supply circuit, and a control unit, and the control unit variably controls an electron generation voltage and an acceleration voltage generated by the high-voltage power supply circuit. Further, the soft X-ray generator is attached to the support member such as the curtain rail at regular intervals, and the soft X-rays can be irradiated once to the width direction of the object to be irradiated. The support member is used from the viewpoint of durability after installation of the device. A member such as metal is preferred.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-66075

In the X-ray irradiation source for the purpose of such light-removal, the surface on which the X-ray irradiation source is opposed to the object to be irradiated, that is, the surface on which the X-ray irradiation window is formed needs to be a conductive member. This is because when the opposing surface is formed by the insulating member, the high-voltage power source for driving the X-ray source, the potential existing outside, and the like are charged to cause the opposing surface to be charged, so that the electrostatic induction phenomenon occurs, and the object to be treated is removed. It becomes insufficient after it becomes insufficient. However, when the opposing surface is made into a conductive member without any countermeasures, the potential of the opposing surface is unstable due to the influence of the induced current flowing through the supporting member, and as a result, the electrostatic induction phenomenon is caused to be processed. The static elimination of the object becomes insufficient.

The present invention has been made in order to solve the above-mentioned problems, and an object of the invention is to provide an effect of suppressing an influence of an induced current flowing through a support member, thereby making the opposite surface electrically stable, and capable of sufficiently performing X removal of the workpiece. Radiation source.

The present invention has been developed in order to solve the above problems, and an object of the invention is to provide an induced current that can be prevented from flowing to a support member. With this effect, the opposite surface is electrically stabilized, and the X-ray irradiation source for removing the object to be processed can be sufficiently performed.

In order to solve the above problems, the X-ray irradiation source of the present invention includes an X-ray tube that outputs X-rays, and a housing that houses an X-ray tube and has an X-ray emission window that emits X-rays to the outside. In a state in which it is fixed to a holding member made of a metal, X-rays are irradiated onto the object to be irradiated, and the surface on which the X-ray emitting window is formed in the frame is the first opposing surface facing the object to be irradiated. At least the first opposing surface is made of a conductive member and held by the holding member via an insulating member.

In this X-ray irradiation source, the casing and the holding member are coupled via the insulating member, and the first opposing surface having conductivity and the holding member are electrically insulated from each other. Thereby, it is possible to suppress the influence of the current flowing on the support member over the first opposing surface, and it is possible to sufficiently perform the static elimination of the workpiece without causing an electrostatic induction phenomenon. Further, in the X-ray irradiation source, the first opposing surface is made of a metal, and it is possible to suppress the charging of the first opposing surface by the high-voltage power source for driving the X-ray source or the potential existing outside. Produced to improve the static elimination effect of the processed object.

Further, the frame system has a second opposing surface that faces the holding member, and the holding member and the second opposing surface are preferably separated by an insulating member. By separating the holding member from the second opposing surface, the first opposing surface and the holding member can be more reliably insulated from each other, and can be sufficiently processed. The removal of electricity.

Also, the retaining member has a section a channel portion having a shape and a flange portion projecting from the channel portion to the side surface, the insulating member having a body portion fixed to the second opposing surface, and a body portion detachably fitted and slidably fitted It is preferable that the claw portion of the flange portion is preferable. Thereby, the frame body and the holding member can be combined with a simple structure. Further, by detachably attaching and detaching the frame to the holding member and slidable, it is possible to easily perform operations such as position adjustment and replacement, and it is possible to more efficiently perform static elimination of the workpiece.

Further, it is preferable that the holding member is formed by combining the divided members that are divided in the longitudinal direction. In this case, the holding member can be formed into a desired shape, size, and the like of the workpiece, and the static elimination of the workpiece can be performed more efficiently.

According to the present invention, by suppressing the influence of the induced current flowing through the supporting member, the opposing surface can be electrically stabilized, and the static elimination of the workpiece can be sufficiently performed.

2‧‧‧X-ray source

4‧‧‧ Track members (holding members)

4a‧‧‧Channel Department

4b‧‧‧Flange

21‧‧‧X-ray tube

31‧‧‧ frame

34‧‧‧X-ray window

41‧‧‧Connector components

41a‧‧‧ Body Department

41b‧‧‧ claws

P1‧‧‧1st opposite

P2‧‧‧2nd opposite

Fig. 1 is a perspective view showing an embodiment of an X-ray irradiation apparatus including the X-ray irradiation source of the present invention.

Fig. 2 is a block diagram showing the functional components of the X-ray irradiation apparatus shown in Fig. 1.

Figure 3 is a perspective view of the X-ray source shown in Figure 1.

Figure 4 is a plan view of Figure 3.

Figure 5 is a cross-sectional view taken along line V-V of Figure 4.

Fig. 6 is a view showing an example of a fixing structure of an X-ray tube and a first circuit board.

Fig. 7 is a view showing an example of a fixing structure of a frame body and a support member.

Fig. 8 is a perspective view showing an insulating member used in the fixing structure shown in Fig. 7.

Hereinafter, a preferred embodiment of the X-ray irradiation source of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an embodiment of an X-ray irradiation apparatus including the X-ray irradiation source of the present invention. As shown in the figure, the X-ray irradiation apparatus 1 is configured to process, for example, a manufacturing line of large glass, and is installed in a clean room or the like to constitute an optical static eliminator (light-irradiated static eliminator) for removing large glass by irradiation of X-rays. Device).

The X-ray irradiation apparatus 1 is configured to include a plurality of X-ray irradiation sources 2 that irradiate X-rays, a controller 3 that controls the X-ray irradiation sources 2, and a rail member that holds and holds the X-ray irradiation sources 2 (holding members) ) 4. The rail member 4 has a concave portion formed in a direction separated from the X-ray irradiation source 2 and has a slightly curved cross section. The channel portion 4a having a shape of a word and the flange portions 4b and 4b projecting from the end portion of the channel portion 4a toward the side surface. The rail member 4 is made of, for example, aluminum, an aluminum alloy, or a conductive metal such as iron or an iron alloy, and sufficient strength and durability are secured in order to hold a plurality of X-ray irradiation sources 2. Further, the rail member 4 is not limited to being integrally formed, and may be detachably coupled to a divided member that is divided along the longitudinal direction (extension direction). In this case, since the holding structure of a desired shape, size, and the like can be obtained in accordance with the size and the number of the objects to be processed, it is possible to more efficiently perform the static elimination by the X-ray irradiation.

Fig. 2 is a block diagram showing the functional components of the X-ray irradiation apparatus 1. As shown in the figure, the controller 3 is constituted by a control circuit 11. The control circuit 11 is configured to include, for example, a power supply circuit for supplying electric power to the X-ray tube 21 mounted in the X-ray irradiation source 2, a control signal transmission circuit for transmitting a control signal for controlling driving and stopping to the X-ray tube 21, and The life notification signal receiving circuit or the like which displays the life notification signal indicating that the X-ray tube 21 has reached the service life is received from the X-ray tube 21. The control circuit 11 can be externally connected to the X-ray irradiation unit 2 or the like via the input/output terminal 21.

In addition, the X-ray irradiation source 2 is configured to include: an X-ray tube 21 for generating X-rays; a high voltage generating module 22 for boosting a voltage from a power supply circuit; and for driving the X-ray tube 21 and the high voltage generating mode The drive circuit 23 of the group 22. The main wiring 24 is connected to the drive circuit 23, and the main wiring 24 is externally connected to the other X-ray irradiation unit 2, the controller 3, etc. by the input terminal 25 and the output terminal 26 provided at both ends.

Further, in the X-ray irradiation apparatus 1, as shown in FIGS. 1 and 2, the output terminal 26 of one X-ray irradiation source 2 is via a relay cable. C is detachably connected to the input terminal 25 of the adjacent other X-ray irradiation source 2. The X-ray irradiation units 2 are connected to each other in the same manner as the X-ray irradiation unit 2 that has reached the tip end, and the input/output terminal 12 of the controller 3 is detachably connected to the X-ray irradiation source 2 at the base end via the relay cable C. Input terminal 25. Thereby, the main wiring 24 of each X-ray irradiation source 2 is connected in series to the control circuit 11, and the drive circuit 23 of each X-ray irradiation source 2 is connected in parallel to the control circuit 11.

With this configuration, the voltage value input from the input terminal 25 of one X-ray irradiation unit 2 is equal to the voltage value output from the output terminal 26, and the voltage output from the output terminal 26 of one X-ray irradiation unit 2 is equal. The value is equal to the voltage value input to the input terminal 25 of the other X-ray irradiation unit 2 electrically connected to one X-ray irradiation unit 2 and the voltage value output from the output terminal 26. Therefore, even when a plurality of X-ray irradiation units 2 are connected in a single row, voltages of the same value can be supplied to all of the X-ray irradiation units 2. Therefore, in the case where the X-ray irradiation units 2 are electrically connected to each other, it is not necessary to connect the control circuit 11 of the controller 3 including the power supply circuit to each of the X-ray irradiation units 2, and the wiring can be complicated without being complicated. The increase or decrease in the number of connections of the X-ray irradiation unit 2.

Next, the structure of the aforementioned X-ray irradiation source 2 will be described in detail.

Figure 3 is a perspective view of the X-ray source shown in Figure 1. 4 is a plan view of FIG. 3, and FIG. 5 is a cross-sectional view taken along line V-V of FIG. As shown in Figures 3 to 5, the X-ray source 2 is used in stainless steel. The frame 31 having a substantially rectangular parallelepiped shape made of a metal such as steel or aluminum has the X-ray tube 21 and the high-voltage generating module 22 described above, and the first circuit in which at least a part of the X-ray tube 21 and the drive circuit 23 are mounted. The substrate 32 and the second circuit substrate 33 on which the high voltage generating module 22 is mounted.

As shown in FIG. 3, the housing 31 is formed with a ground potential and includes a rectangular wall portion 31a formed with an X-ray emission window 34 for emitting X-rays generated from the X-ray tube 21 to the outside, and a main body portion 35. The side wall portion 31b provided on each side of the wall portion 31a is open on one surface side, and the lid portion 31c is opposed to the wall portion 31a and is attached to block the opening portion of the body portion 35. The X-ray emission window 34 is formed in a substantially central portion of the wall portion 31a, and is formed in a rectangular opening portion along the longitudinal direction of the casing 31. The outer surface of the wall portion 31a is opposed to the X-ray object to be irradiated (first facing surface) P1, and the outer surface of the lid portion 31c is opposed to the rail member 4 (the second pair) Face to face) P2.

The X-ray tube 21 is provided in a vacuum vessel 51 having a substantially rectangular parallelepiped shape which is much smaller than the casing 31, and includes: a filament 52 for generating an electron beam; a grid 53 for accelerating the electron beam; and a beam corresponding to the electron beam Into the target 54 for X-ray generation. The vacuum container 51 is provided with a rectangular wall portion 51a made of a conductive material (for example, a metal plate such as stainless steel) provided with an output window 57 to be described later, and a rectangular insulating body facing the wall portion 51a. A wall portion 51b composed of a material (for example, glass); and a side wall portion 51c made of an insulating material (for example, glass) along the outer edge of the wall portions 51a and 51b. The height of the side wall portion 51c is smaller than the length of the wall portions 51a and 51b in the short-side direction. That is, the vacuum container 51 is formed to have a height The length of the side is the shortest, and the wall portions 51a and 51b can be regarded as a flat rectangular shape having a flat plate shape. In the slightly central portion of the wall portion 51a, the opening portion 51d which is smaller than the X-ray exit window 34 is formed in a rectangular shape along the longitudinal direction of the vacuum vessel 51 (the longitudinal direction of the wall portions 51a and 51b). This opening 51d constitutes an output window 57 which will be described later.

The filament 52 is disposed on the side of the wall portion 51b, and the gate 53 is disposed between the filament 52 and the target 54. A plurality of power supply pins 55 are connected to the filaments 52 and the gate electrodes 53 (see FIG. 4). The power supply pin 55 is in a state of being protruded toward both sides in the width direction of the vacuum container 51 between the side wall portion 51c and the wall portion 51b. In the outer surface side of the wall portion 51a, as shown in Fig. 5, a material having excellent X-ray permeability and conductivity, such as tantalum, niobium, or titanium, is adhered and fixed so as to close the opening 51d. The rectangular window member 56 constitutes an output window 57 for outputting X-rays generated by the target 54 from the X-ray tube 21 to the outside. Further, a target 54 made of, for example, tungsten or the like is formed on the inner surface of the window member 56.

When the X-ray tube 21 and the first circuit board 32 are fixed, as shown in FIGS. 6(a) and 6(b), only the X-ray is formed in a slightly central portion of the first circuit board 32. A rectangular through hole 32a having a slightly larger planar shape formed on the outermost side of the wall portion 51b side of the tube 21 is formed. The depth of the through hole 32a, that is, the thickness of the first circuit board 32 is substantially the same as the thickness of the wall portion 51b of the vacuum container 51. Further, the X-ray tube 21 wall portion 51b is located in the through hole 32a, and each of the power supply pins 55 is connected to the edge portion around the through hole 32a on the one surface side of the first circuit board 32 by a conductive member such as a brazing material. This is held on the first circuit substrate 32, Further, it is electrically connected to the circuit on the first circuit board 32. Further, in order to cover the connection portion between the power supply pins 55 and the first circuit board 32, a sealing portion 58 made of an insulating resin is provided. The sealing portion 58 is formed over the entire circumference of the vacuum container 51 in a state in which the vacuum container 51 and the first circuit board 32 are placed, and serves as an auxiliary for fixing the first circuit board 32 by the X-ray tube 21. When the high voltage generating module 22 and the second circuit board 33 are fixed, as shown in FIG. 5, a through hole or the like is not formed in the second circuit board 33, and the high voltage generating module 22 is attached to the second circuit board 33. It is fixed to one surface side facing the first circuit board 32 by adhesion or the like.

When the X-ray tube 21, the high-voltage generating module 22, the first circuit board 32, and the second circuit board 33 in the housing 31 are fixed, as shown in FIGS. 4 and 5, the spacer member 61 is used. The two-stage structure formed by 62. The spacer members 61 and 62 are formed into a rod shape by various resin materials such as ceramic, polyimide, nylon, epoxy, etc., and are non-conductive. The spacer members 61 and 62 are disposed at two locations for holding the vacuum container 51 in the longitudinal direction.

The spacer member 61 of the first layer is erected on the inner surface side of the lid portion 31c of the frame body 31 by the fastening of the screw 63, and the second layer spacer member 62 is the second unit on which the high pressure generating module 22 is mounted. The circuit board 33 is connected to the front end of the spacer member 61 of the first layer while being fixed. Further, at the front end of the spacer member 62 of the second layer, the first circuit board 32 on which the X-ray tube 21 is mounted is fixed in parallel with the second circuit board 33 by the fastening of the screw 64.

The cover portion 31c having such a configuration is exposed to the X-ray emitting window 34 of the housing 31, and is exposed to the X-ray emitting window 34 of the housing 31, and is fixed to the main body portion 35 by fastening of the screw 65. By the fastening of the screw 65, the X-ray tube 21 is in a state in which the first circuit board 32 is pressed against the inner surface of the wall portion 31a of the casing 31. Further, the length of the spacer member 62 of the second layer is about several times the length of the spacer member 61 of the first layer, and the first circuit board 32 and the high voltage generating module 22 are separated from each other. The connection between the first circuit board 32 and the high voltage generating module 22 may be a wired connection or a wireless connection.

Further, as shown in FIG. 4 and FIG. 5, between the X-ray tube 21 and the wall portion 31a, a cushioning member 67 having electrical conductivity and cushioning properties such as a steel wool, a conductive pad, and a conductive rubber is disposed. The cushion member 67 is provided with an opening that exposes the output window 57, and a rectangular frame-shaped portion that surrounds the periphery of the output window 57 so as to be in contact with the peripheral edge portion of the window member 56, and electrically connects the frame 31 and the output window 57. connection. Further, the X-ray emission window 34 provided in the casing 31 is slightly larger than the output window 57 of the X-ray tube 21, and when viewed from the opposite surface P1 side, the entire output window 57 is exposed. Therefore, it is possible to suppress the X-rays emitted from the output window 57 at a diverging angle from being interrupted by the edge of the X-ray emitting window 34. Further, all of the materials such as the window member 56, the wall portion 51a, the cushioning member 67, and the like which are exposed from the X-ray emission window 34 are electrically conductive and electrically connected to the frame body 31.

Next, the fixing structure of the frame body 31 and the rail member 4 will be described.

The installation of the frame 31 and the rail member 4 is as shown in FIG. A plurality of joint members (insulating members) 41 are used. The joint member 41 is formed of, for example, a resin material having insulation and elasticity, and is disposed at both end portions of the frame body 31 in the longitudinal direction. As shown in FIG. 7 and FIG. 8 , the joint member 41 further includes a rod-shaped body having substantially the same length as the width direction of the rail member 4 (the direction in which the rail member 4 extends and the direction orthogonal thereto) and a rectangular cross section. The portion 41a; and the claw portions 41b and 41b formed at both ends of the main body portion 41a. In the slightly central portion of the body portion 41a, an insertion hole 43 into which the screw 42 is inserted is formed. The main body portion 41a is fixed to the lid portion 31c by screwing the screw 42 into the insertion hole 43, and attaching the nut 44 to the screw 42 inside the lid portion 31c. Further, as a method of fixing the lid portion 31c as the main body portion 41a, in addition to the screwing of the screw, adhesion, welding, or the like may be employed.

Further, the front end of the claw portion 41b is formed thick, and is bent from the end portion of the main body portion 41a to the back side of the flange portion 4b. The base end of the claw portion 41b is formed to be thinner than the front end, and the elasticity of the claw portion 41b is allowed. Deformation. The claw portions 41b and 41b are respectively engaged with the flange portions 4b and 4b of the rail member 4, and the X-ray irradiation source 2 is detachably attached to the rail member 4 and slidably attached thereto, and the frame body 31 and the rail member are slidably attached. 4 Electrically insulated from each other.

Further, in a state where the claw portion 41b is engaged with the flange portion 4b, the end portion of the main body portion 41a abuts against the flange portion 4b. Thereby, the second opposing surface P2 of the frame body 31 is separated from the rail member 4 by the thickness corresponding to the thickness of the main body portion 41a, and only the main body portion of the joint member 41 is provided in the lid portion 31c of the casing 31. 41a contact. Furthermore, as shown in FIG. 1, the joint member 41 may be further installed between the X-ray irradiation sources 2, 2 by the joint member 41. The intermediate portion of the relay cable C connecting the X-ray irradiation sources 2 and 2 is bundled with the rail member 4.

As described above, in the X-ray irradiation source 2, the frame body 31 and the rail member 4 are coupled via the insulating joint member 41, and the first opposing surface P1 and the rail member 4 are electrically insulated from each other. In this way, when the external device is connected, it is possible to suppress the influence of the current flowing on the rail member 4 on the first opposing surface P1 of the casing 31, and it is possible to sufficiently perform the static elimination of the workpiece without causing an electrostatic induction phenomenon. . Further, in the X-ray irradiation source 2, the first opposing surface P1 is made of metal, and it is possible to suppress the first pair of the high-voltage power source module 22 for driving the X-ray tube 21 and the potential existing outside. The case where the surface P1 is charged is generated, and the static elimination effect of the processed object can be improved. Further, in the present embodiment, in addition to the first opposing surface P1, all of the materials which are likely to be exposed from the X-ray emitting window 34, such as the window member 56, the wall portion 51a, and the cushioning member 67, are electrically conductive and framed. The body 31 forms an electrical connection. That is, all of the opposing surfaces P1 side of the X-ray irradiation unit 2 are electrically conductive members and have the same potential. Thereby, the static elimination effect of the processed object can be further improved.

Further, in the present embodiment, the rail member 4 has a section The tongue-shaped channel portion 4a and the flange portion 4b protruding from the channel portion 4a toward the side surface, the joint member 41 has a body portion 41a fixed to the second opposing surface P2 of the frame body 31, and is detachable and freely The claw portion 41b of the flange portion 4b is slidably fitted. Thereby, the frame body 31 and the rail member 4 can be combined with a simple structure. In addition, since the frame member 31 can be detachably attached to the rail member 4 and can be slidably slid, the position adjustment and replacement of the X-ray irradiation source 2 can be easily performed. Therefore, the workpiece can be more efficiently executed. In addition to electricity. Further, since the contact portion between the joint member 41 and the rail member 4 can be reduced, more reliable insulation can be performed.

Further, by using the joint member 41, the second opposing surface P2 of the casing 31 is separated from the rail member 4 by the thickness of the main body portion 41a. By separating the second opposing surface P2 from the rail member 4, the first opposing surface P1 and the rail member 4 can be more reliably insulated from each other. Therefore, it is possible to sufficiently perform the static elimination of the workpiece.

The present invention is not limited to the above-described embodiment. When the first opposing surface P1 of the casing 31 and the rail member 4 are electrically insulated from each other by an insulating member, various modifications can be made. For example, in the above-described embodiment, the main body portion 35 and the lid portion 31c of the casing 31 are each formed of metal. However, the lid portion 31c may be formed of an insulating resin material (or the joint portion 41 may be joined to the lid portion 31c). In part, the insulation of the first opposing surface P1 and the rail member 4 is achieved. In this case, the joint member 41 may be made of resin or metal.

2‧‧‧X-ray source

4‧‧‧ Track members (holding members)

4a‧‧‧Channel Department

4b‧‧‧Flange

25‧‧‧Input terminal

31‧‧‧ frame

31a‧‧‧Rectangular wall

31b‧‧‧ Sidewall

31c‧‧‧ Cover

34‧‧‧X-ray window

35‧‧‧ Body Department

41‧‧‧Connector components

41a‧‧‧ Body Department

41b‧‧‧ claws

57‧‧‧Output window

P1‧‧‧1st opposite

P2‧‧‧2nd opposite

Claims (4)

An X-ray irradiation source that irradiates an X-ray to an object to be irradiated while being fixed to a holding member made of a metal, and includes an X-ray tube that outputs X-rays; and houses the X-ray tube therein and forms a frame body of the X-ray emission window that emits the X-rays to the outside, wherein the surface of the frame body on which the X-ray emission window is formed is a first opposing surface facing the object to be irradiated, At least the first opposing surface is made of a conductive member and held by the holding member via an insulating member. The X-ray irradiation source according to claim 1, wherein the frame system has a second opposing surface facing the holding member, and the holding member and the second opposing surface are provided by the insulating member Separation. The X-ray irradiation source of claim 2, wherein the holding member has a cross section a channel portion having a shape and a flange portion protruding toward the side from the channel portion, wherein the insulating member has a body portion fixed to the second opposing surface; and the main body portion is detachably attachable and freely The claw portion of the flange portion is slidably fitted. The X-ray irradiation source according to any one of claims 1 to 3, wherein the holding member is configured by combining divided members that are divided in the longitudinal direction.