WO2021034085A1

WO2021034085A1 - Ionizer comprising easily detachable waterproof module

Info

Publication number: WO2021034085A1
Application number: PCT/KR2020/010993
Authority: WO
Inventors: 이동훈; 허시환
Original assignee: (주)선재하이테크
Priority date: 2019-08-19
Filing date: 2020-08-18
Publication date: 2021-02-25
Also published as: CN112703646A; CN112703646B; KR20210021669A

Abstract

The present invention relates to an ionizer which can fundamentally prevent a leakage from occurring due to corrosion and oxidation, which is used by being installed in a relatively narrow space, and to and from which a waterproof module can be easily attached and detached. The ionizer comprises: a case; a soft X-ray tube coupled to the case and including a head protruding to the outside of the case; a waterproof module comprising a body portion which is detachably coupled to the periphery of the soft X-ray tube and includes a window penetrating therethrough, and a waterproof blocking film which is disposed to cover the window from the outside of the body portion so as to transmit X-rays generated from the head to the outside while preventing moisture from flowing into the head from the outside; and a silicone pad detachably coupled to a side surface of the case so as to insulate the case.

Description

Ionizer including a waterproof module that is easy to attach and detach

The present invention relates to an ionizer comprising a waterproof module that is easily detachable.

In the semiconductor chip package manufacturing process, the process of separating the wafers that have undergone electrical die sorting (EDS) into individual semiconductor chips is called a wafer cutting process, and this wafer cutting process is directly on the lead frame. It is generally connected with the die bonding process, which is a process of attaching the semiconductor chip of

In more detail, the wafer cutting process includes a first step of attaching an ultraviolet tape to the surface of the wafer, a second step of cutting the wafer into individual semiconductor chips by rotation of the blade, and the ultraviolet light adhered to the wafer. It consists of a third step of removing the tape, and in the second step, cooling water is supplied to the blades for cooling the blades.

At this time, in the second step, static electricity is generated due to friction between the blade and the ultraviolet tape in the process of cutting the wafer with the blade, so that slag and impurities generated by the cutting of the wafer adhere to the semiconductor chip.

When assembled into a semiconductor chip package while being adhered to the slag and impurities on the semiconductor chip, the passivation layer on the surface of the semiconductor chip package is destroyed, resulting in poor reliability, and the metal wiring on the surface of the semiconductor chip package is connected or It is necessary to remove static electricity that occurs when cutting wafers into individual semiconductor chips, as the disconnection causes electrical properties to be defective, leading to assembly defects and properties, resulting in a significant obstacle to productivity improvement as well as a decrease in process yield. there was.

Methods for removing static electricity generated when a wafer is cut into individual semiconductor chips include a method of grounding, a method of humidification, a method of using an antistatic agent or charging product, or a method of using an ionizer. Among the above-described methods, the ionizer is a device for discharging positive and negative ions obtained by discharging a high voltage to a material, neutralizing and extinguishing charged static electricity and opposite polarity, and a soft X-ray antistatic device may be used to remove static electricity from a semiconductor chip.

Soft X-ray static eliminators are used by coating a metal material such as tungsten (W) on a thin beryllium plate on an anode-transmitting X-ray tube. As a technology related to such a soft X-ray static eliminator, the X-ray tube of Korean Patent No. 11656781, the first connector connected to the X-ray tube, and the female screw hole of the body are formed in a portion facing the first connector based on the center. A plurality of X-ray tube modules including fastening bolts that are selectively coupled to the head by forming an uneven portion around the head and rotated manually by an operator; A voltage generator for generating a high voltage by receiving an external voltage, a mold formed to receive the voltage generator therein, and having a module insertion groove into which the X-ray tube module is inserted, and exposed inside the module insertion groove A plurality of voltage generation assemblies having a second connector that is physically attached to and detached from the first connector to transmit the high voltage and provide a physical coupling force; And a body in which a plurality of module through-holes through which a portion corresponding to the module insertion groove is penetrated is formed as a bar-shaped case that accommodates the voltage generating assembly to be spaced apart from each other. It is easy to replace the soft X-ray tube including One X-ray ionizer is disclosed. In the above-described prior art, a beryllium plate that emits soft X-rays generated from an X-ray tube to the outside is installed, and the beryllium plate is corroded and oxidized by cooling water supplied to the blade during the cutting process of the wafer, thereby causing a problem.

The present invention was conceived to solve the above problems, and an object of the ionizer including a waterproof module that is easily detachable according to the present invention is capable of fundamentally blocking the occurrence of leakage due to corrosion and oxidation. It is to provide an ionizer including a waterproof module that is easily detachable.

In addition, another object of the present invention is to provide an ionizer capable of easily attaching and detaching a waterproof module without requiring a separate bolting process in an ionizer installed and used in a relatively narrow space.

The ionizer including a waterproof module that is easily detachable according to the present invention for solving the above-described problems includes a case, a soft X-ray tube including a head that is coupled to the case and protrudes to the outside of the case, the It is detachably coupled to the periphery of the soft X-ray tube, the body portion through which a window is formed, and the body portion is disposed to cover the window from the outside of the body portion to emit X-rays generated from the head to the outside, and moisture is transferred to the head It is characterized in that it comprises a waterproof module including a waterproof blocking film to prevent inflow, and a silicone pad detachably coupled to a side surface of the case to insulate the case.

In addition, the waterproof blocking film is characterized in that the mica plate.

In addition, the waterproof blocking film is characterized in that it is formed to a thickness of 0.020mm to 0.025mm.

In addition, it characterized in that it further comprises a; side cover for fixing the silicone pad by being coupled to the side surface of the case with the silicone pad therebetween.

In addition, the waterproof module is disposed to surround the soft X-ray tube on the surface of the case, and further comprises a first O-ring disposed between the body part and the case.

In addition, the waterproof module is characterized in that it further comprises a second O-ring installed on the window.

In addition, the waterproof module may further include a cover coupled to the front of the body to cover the waterproof blocking film.

In addition, the waterproof module is characterized in that the case is bolted and coupled to each other.

In addition, a rail formed on the upper side of the case; A sliding part moving to the front or rear of the case along the rail; And a first extension member extending forward of the sliding part; wherein the waterproof module is extended upwardly from an upper end of the body part, and a second extension hinged with the front end of the first extension member It characterized in that it further comprises a member.

In addition, the waterproof module is removed from the front of the case, rotates the portion hinged to each other by the first extension member and the second extension member, and then moves to the rear of the case along the rail. , It characterized in that it can be accommodated in the rail.

In addition, the waterproof module may further include a sliding auxiliary member formed on a side surface and fitted to the rail.

In addition, the case is characterized in that it comprises a first coupling auxiliary portion formed around the soft X-ray tube and coupled to the waterproof module.

In addition, the first coupling auxiliary portion protrudes from the front of the front, a thread is formed on the inner circumferential surface, and the body portion is formed with a thread on the outer circumferential surface, characterized in that the first coupling auxiliary and screwed.

According to the ionizer including the waterproof module which is easy to attach and detach according to the present invention as described above, the soft X-ray tube is sealed by a waterproof barrier film, so that the airtightness and waterproofness of the soft X-ray tube are maximized, so that there is no leakage due to corrosion and oxidation. Can be fundamentally blocked from occurring.

In addition, according to the present invention, it is easy to attach and detach the waterproof module that waterproofs the soft X-ray tube, so that the waterproof module is installed in the process that requires waterproofing, and the process of removing the waterproof module in the process that does not require waterproofing is relatively easy. It can maximize the convenience of workers who need to attach and detach the waterproof module in a narrow space.

In addition, according to the present invention, in a non-waterproof process that does not require waterproofing, the waterproof module can be accommodated in the rail installed on the upper part of the case, thereby further maximizing the operator's convenience.

1 is a partial exploded perspective view of an ionizer including an easily detachable waterproof module according to a first embodiment of the present invention.

2 is a partially enlarged view of FIG. 1.

3 is a combined perspective view of an ionizer including an easily detachable waterproof module according to a first embodiment of the present invention.

4 is a perspective view of an ionizer including an easily detachable waterproof module according to a second embodiment of the present invention.

5 to 7 are perspective views illustrating a process of accommodating a waterproof module in an ionizer including an easily detachable waterproof module according to a second embodiment of the present invention.

8 is an exploded perspective view of an ionizer including an easily detachable waterproof module according to a third embodiment of the present invention.

9 is a combined perspective view of an ionizer including an easily detachable waterproof module according to a third embodiment of the present invention.

11, 12: thread

100: case

200: Soft X-ray tube

210: head

300: waterproof module

310: body

311: window

312: sliding auxiliary member

320: waterproof barrier film

321: first O-ring

322: second O-ring

330: cover

340: second extension member

400: silicone pad

500: side cover

610: rail

620: sliding part

630: first extension member

B1: Module bolt

B2: Cover bolt

Hereinafter, preferred embodiments of the ionizer including a waterproof module that is easily detachable according to the present invention will be described in detail with reference to the accompanying drawings.

[First embodiment]

1 is a diagram showing a disassembled configuration of an ionizer including a waterproof module that is easily detachable according to a first embodiment of the present invention.

As shown in Figure 1, the ionizer including a waterproof module that is easily detachable according to the first embodiment of the present invention includes a case 100, a soft X-ray tube 200, a waterproof module 300, a silicone pad ( 400) and a side cover 500 may be included.

The case 100 is a part corresponding to the basic body in the ionizer including the waterproof module, which is easily detachable according to the first embodiment of the present invention, and may be fixed to a surrounding structure (for example, an inner wall of a building). . A method of fixing the case 100 may include various means such as adhesive or bolting. Referring to FIG. 1, the case 100 may have other surfaces other than the front surface (the surface on which the soft X-ray tube 200 is installed) are combined with the surrounding structures, so that the case 100 may be fixed.

Although not shown in FIG. 1, a plurality of guide grooves may be formed on the front surface of the case 100, and a soft X-ray tube 200 to be described later may be installed in each guide groove. Therefore, the shape of the guide groove may be a shape corresponding to the rear of the soft X-ray tube 200.

A voltage generating module may be accommodated in the case 100. The voltage generation module is a type of electric device that generates a high voltage, and in addition to the voltage generation module inside the case 100, a control PCB (not shown) that controls the voltage generated by the voltage generation module and the voltage generation modules are electrically connected to each other. A power PCB (not shown) may be installed.

As described above, the soft X-ray tube 200 shown in FIG. 1 may be installed in a guide groove (not shown) formed on the front surface of the case 100.

2 is an enlarged view of the soft X-ray tube 200 of FIG. 1.

As shown in FIG. 2, the soft X-ray tube 200 includes a head 210 that is exposed to the outside to generate X-rays, and the head generates X-rays by a high voltage transmitted from the voltage generating module. X-rays generated from the head 210 may be soft X-rays. The soft X-ray tube 200 may be bolted to the front of the case 100 to be coupled.

The waterproof module 300 is installed in a form that covers the soft X-ray tube 200 as shown in FIG. 2 to prevent moisture or foreign matter from flowing into the soft X-ray tube 200, more specifically, the head 210. will be. The waterproof module 300 may include a body 310 coupled to each other, a waterproof blocking film 320, a cover 330, a first O-ring 321 and a second O-ring 322.

The body part 310 is a type of structure that forms most of the waterproof module 300 and is coupled to the front surface of the case 100 in a form that covers a part of the soft X-ray tube 200. Even if the body part 310 is coupled to the front of the case 100 in a form covering a part of the soft X-ray tube 200, the X-rays generated from the head 210 of the soft X-ray tube 200 must be emitted to the outside. Therefore, a window 311 is formed in the central portion of the body 310 so that the above-described head 210 can be exposed. As shown in Figure 2, the body portion 310 and the case 100 may be coupled to each other using a module bolt (B1), the present invention is a module in the coupling method of the body portion 310 and the case 100 The coupling method using the bolt B1 is not limited, and the body portion 310 and the case 100 may be coupled to each other through various methods. The body part 310 may be made of a material that is insulating, waterproof, easy to manufacture, and has a strength of a certain degree or more. As a representative material for forming the body portion 310, a synthetic resin such as plastic may be used.

As shown in FIG. 2, a first O-ring 321 may be disposed between the body portion 310 and the front surface of the case 100. The first O-ring 321 is formed of a material that has elasticity and can be used for waterproofing, such as rubber or silicone, and may be disposed on the front surface of the case 100 so as to surround the soft X-ray tube 200. As described above, the body portion 310 is coupled to the front surface of the case 100 using the module bolt B1, in this process, the first O-ring 321 is between the body portion 310 and the case 100 By being compressed, a watertight structure is formed, and thus moisture can be prevented from flowing into the interior of the head 210 or the interior of the case 100.

In FIG. 2, the first O-ring 321 is disposed on the flat front surface of the case 100, but the present invention does not limit the portion in which the first O-ring 321 is disposed to the plane, and is provided on the front surface of the case 100. 1 A seating groove corresponding to the shape of the O-ring 321 is formed, or a seating groove corresponding to the shape of the first O-ring 321 is formed on the rear surface of the body part 310, and the first O-ring 321 is formed in the seating groove. There may also be embodiments of this arrangement. The depth of the seating groove formed on the front surface of the case 100 or formed on the rear surface of the body portion 310 (when the seating groove is formed only on either side of the case and body portion) is the cross-section of the first O-ring 321 It may be formed to be smaller than the diameter, and when the seating grooves are formed on both sides of the front and the rear of the body part 310 of the case 100, the sum of the depths of the seating grooves is the diameter of the cross section of the first O-ring 321 It can be formed to be smaller.

As shown in FIG. 2, a waterproof blocking film 320 may be disposed on the front surface of the body part 310. In more detail, the waterproof blocking film 320 may be disposed on the front surface of the body 310 to block the window 311. As the name suggests, the waterproof blocking film 320 serves to prevent moisture from flowing into the interior of the head 210 or the case 100 through the window 311 formed on the body 310, and the mica plate (Mica sheet). The waterproof blocking film 320 may be formed to a thickness of 0.020mm to 0.025mm.

As shown in FIG. 2, a cover 330 on the front surface of the waterproof blocking film 320 may be coupled to the body 310 with the waterproof blocking film 320 interposed therebetween. The cover 330 is coupled to the body part 310 using a cover bolt B2. However, the present invention is not limited to the method of coupling the cover 330 and the body portion 310 to the method using the cover bolt (B2), and the cover 330 and the body portion 310 may be coupled using various methods. I can. As shown in FIG. 2, a second O-ring 322 may be disposed on an inner circumferential surface of the window 311 in the window 311 formed on the body 310. This is to further improve the airtightness and waterproofness of the waterproof module 300.

The waterproof module 300 is coupled to the front surface of the case 100 to cover the soft X-ray tube 200 while having the configuration as described above to maximize airtightness and waterproofness, thereby preventing malfunction of the soft X-ray tube 200. I can.

As shown in FIG. 1, the silicone pad 400 is coupled to the side surface of the case 100 to improve insulation, airtightness and waterproofness of the case 100. The silicon pad 400 may be coupled to both sides of the case 100 by the side cover 500, and the case 100, the silicon pad 400, and the side cover 500 may be joined by bolting to each other.

3 is a diagram showing a case 100, a soft X-ray tube 200, a waterproof module 300, a silicon pad 400, and a side cover 500 that have been disassembled from each other in FIGS. will be.

As shown in FIG. 3, the soft X-ray tube 200 is not exposed to the outside by the waterproof module 300, so airtightness and waterproofness may be improved.

In the ionizer including the waterproof module which is easily detachable according to the first embodiment of the present invention shown in FIGS. 1 to 3, when the waterproofing operation is performed, the waterproof module 300 is coupled to the front of the case 100, When the waterproofing operation is not performed, that is, when the non-waterproofing operation is performed, the waterproof module 300 is removed from the case 100, and when the waterproof module 300 is installed, the X-rays generated in the soft X-ray tube 200 Problems such as weakening of strength can be solved.

[Second Example]

Hereinafter, an ionizer including a waterproof module that is easily detachable according to a second embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In the ionizer including the waterproof module that is easily detachable according to the first embodiment of the present invention described above, the waterproof module 300 is detachable from the front of the case 100, so that the operator can use the waterproof module in the non-waterproof process. 300 had to be stored in a separate place. Due to the nature of the static electricity removal process, since a plurality of soft X-ray tubes 200 are installed in the front of the case 100, a plurality of waterproof modules 300 are also required, and accordingly, there is a problem that a considerable volume of waterproof module storage space is required. . In addition, there may be cases where different waterproof modules 300 are used depending on the type of the soft X-ray tube 200 installed in front of the case 100, and the operator is a waterproof module that matches the soft X-ray tube 200. There was a problem to find (300) then. The ionizer including a waterproof module that is easily detachable according to the second embodiment of the present invention is devised to accommodate the waterproof module 300 in a specific part of the case 100 in order to solve the above-described problem. will be.

4 is a view showing a state in which the waterproof module 300 is coupled to the front surface of the case 100 in the ionizer including the waterproof module that is easily detachable according to the second embodiment of the present invention.

As shown in Fig. 4, the ionizer including the waterproof module which is easily detachable according to the second embodiment of the present invention is an ionizer including the waterproof module which is easily detachable according to the first embodiment of the present invention described above. Additional components were added in Niger. Therefore, only the additional configuration and the configuration related thereto will be described, and other configurations are considered to be the same as the first embodiment and the second embodiment.

The ionizer including a waterproof module that is easily detachable according to the second embodiment of the present invention further includes a rail 610, a sliding part 620, and a first extension member 630, and a waterproof module 300 May further include a second extension member 340.

As shown in FIG. 4, the rail 610 may be formed on the upper side of the case 100. In more detail, two rails 610 may be disposed on the upper side of the case 100 to be spaced apart from each other by a certain distance, and the sliding part 620 is inserted into a pair of rails 610 at both ends of the case 100. Can move forward or backward. The first extension member 630 extends from the central portion of the sliding portion 620 to the front of the case 100 and moves together along the sliding portion 620.

As shown in FIG. 4, the second extension member 340 is formed to extend upward from the upper end of the body part 310. The upper end of the second extension member 340 is hinged to the front end of the first extension member 630 described above. That is, after the waterproof module 300 is removed in front of the case 100, the first extension member 630 and the second extension member 340 may rotate around a hinged portion of each other.

As shown in FIG. 4, a sliding auxiliary member 312 may be formed on the side surface of the body 310, and the sliding auxiliary member 312 is the rail 610 described above when accommodating the waterproof module 300. It can be inserted into the body portion 310 to slide more easily.

5 to 7 illustrate a process of receiving the waterproof module 300 shown in FIG. 4 in the rail 610 installed on the upper part of the case 100 after being removed from the front surface of the case 100.

First, as shown in FIG. 5, the module bolt B1 that was coupled to the body part 310 is released, and the waterproof module 300 is moved forward. In this process, the sliding part 620 and the first extension member 630 connected to the waterproof module 300 also move forward together. Thereafter, as shown in FIG. 6, the waterproof module 300 is rotated 90 degrees around a hinged portion of the first extension member 630 and the second extension member 340. Thereafter, as shown in FIG. 7, the waterproof module 300 and the sliding part 620 are moved to the rear of the case 100 together. In this process, the sliding auxiliary member 312 formed on the side of the body part 310 is fitted into the rail 610, so that the body part 310 can move more easily along the rail 610, and the above-described process Through this, the waterproof module 300 may be accommodated in the rail 610 formed on the upper side of the case 100.

The above-described process shown in FIGS. 5 to 7 is a process of removing and receiving the waterproof module 300 in order to use the present invention in a non-waterproof process, and the worker uses the waterproof module 300 for use in the waterproofing process. When mounting on the front of the case 100, the above-described process is performed in reverse order.

[Third Example]

Hereinafter, an ionizer including a waterproof module that is easily detachable according to a third embodiment of the present invention will be described in detail with reference to the accompanying drawings.

8 illustrates an ionizer including a waterproof module that is easily detachable according to a third embodiment of the present invention.

An ionizer including an easily detachable waterproof module according to the third embodiment of the present invention shown in FIG. 8 and an ionizer including an easily detachable waterproof module according to the first embodiment of the present invention include a case ( 100) and the waterproof module 300 are the same as each other, except that the shape of the soft X-ray tube 200 is partially changed and the portion to which the waterproof module 300 is coupled to each other, so that the configuration not described below is the same as the first embodiment of the present invention, It is assumed that the third embodiment is identical to each other.

As shown in FIG. 8, a first coupling auxiliary part 220 protrudes in the direction of the waterproof module 300, that is, the direction of the waterproof module 300 on the front surface of the case 100. The first coupling aid 220 is for facilitating coupling with the waterproof module 300, has an annular cross section, and a thread 11 may be formed on the inner circumferential surface.

As shown in FIG. 8, the body part 310 of the waterproof module 300 includes a body part 310 in the ionizer including the waterproof module which is easily detachable according to the first embodiment of the present invention described above. Alternatively, the cross-sectional shape may be circular, and a screw thread 12 may be formed on the outer circumferential surface. Other than that, the waterproof blocking film 320 and the cover 330 are the same as the first embodiment described above. Is combined in front of. When the combination of the waterproof module 300 is necessary, the operator may connect the waterproof module 300 in a state in which the body part 310, the waterproof blocking film 320 and the cover 330 are combined with the first coupling assistant 220 By screwing, the waterproof module 300 can be coupled to the front surface of the case 100 without a separate tool.

9 shows a state in which the waterproof module 300 and the case 100 are combined with each other in this embodiment.

As shown in FIG. 9, the front length of the waterproof module 300 may be longer than the depth of the first coupling aid 220. This is because when the front length of the waterproof module 300 and the depth of the first coupling auxiliary part 220 are the same, the waterproof module 300 may be completely inserted into the first coupling auxiliary part 220 and cannot be removed again. . And although not shown in the drawings, in this embodiment, the auxiliary member protrudes toward the front of the waterproof module 300 in order to facilitate removal/combination through screwing of the waterproof module 300 and the first coupling auxiliary unit 220 It is formed so that the user can more easily combine or remove the waterproof module 300. In addition, the body part 310 extends to the rear and a second coupling aid is formed, a thread is formed on the outer circumferential surface of the second coupling aid, and a second coupling aid is inserted into the first coupling aid 220 to screw each other. There may also be an embodiment. In the case of the embodiment in which the second coupling aid is formed on the body portion 310, the user only needs to hold and rotate the body portion 310, not the second coupling aid, so that the waterproof module 300 is more easily moved in the case 100. Can be removed/combined.

In this embodiment, the first coupling aid 220 is formed to protrude from the front of the case 100, but the present invention is not limited thereto, and the first coupling aid is formed by being recessed in the case 100, and on the recessed inner circumferential surface. There may also be an embodiment in which a thread is formed, and the second coupling aid of the body portion is inserted into the first coupling aid to be screwed.

In the above-described embodiments of the present invention, the waterproof module is coupled to the front surface of the case through screwing. However, the present invention is not limited thereto, and an operator may more easily couple the waterproof module to the case through a predetermined other means, and as some examples thereof, the waterproof module 300 is connected to the case 100 using a magnet. The waterproof module 300 may be detached or detached to the front of the case 100 using a slot-hook structure. In the case of the slot-hook structure, the outer circumferential surface of the body part 310 and the inner circumferential surface of the first coupling auxiliary part 220 in the ionizer including the waterproof module according to the third embodiment of the present invention shown in FIG. A thread is not formed in the body part 310, a protrusion protruding outward is formed on the outer circumferential surface of the body part 310, and a groove may be formed in the inner circumferential surface of the first coupling auxiliary part 220 so that the protrusion can be inserted. The groove can be divided into a total of three sections, the first section of the groove is formed in the direction of the rotation axis of the first coupling auxiliary unit 220, the second section is connected to the first section, It may be a type of inclined section that rotates in the circumferential direction and moves in the rotation axis direction, and the third section is connected to the end of the second section, but may be formed in the circumferential direction. That is, after the protrusion is inserted into the first section of the groove, the body part 310 presses the first O-ring while moving in the direction of the case 100 while rotating along the second section, and is seated in the third section. As a result, it is possible to couple the waterproof module 300 to the case 100 without a separate screw connection or a separate tool.

The present invention is not limited to the above-described embodiments, and of course, various modifications can be made without departing from the gist of the present invention as claimed in the claims.

Claims

case;

A soft X-ray tube including a head coupled to the case and protruding to the outside of the case;

It is detachably coupled to the periphery of the soft X-ray tube, the body portion through which a window is formed, and the body portion is disposed to cover the window from the outside of the body portion to emit X-rays generated from the head to the outside, and moisture from the outside of the head A waterproof module including a waterproof blocking film that prevents flowing into the water; And

A silicone pad detachably coupled to a side surface of the case to insulate the case;

Ionizer comprising a waterproof module that is easily detachable, characterized in that it comprises a.
The method of claim 1,

The ionizer comprising a waterproof module that is easily detachable, wherein the waterproof blocking film is a mica plate.
The method of claim 2,

The ionizer comprising a waterproof module that is easily detachable, characterized in that the waterproof blocking film is formed to a thickness of 0.020mm to 0.025mm.
The method of claim 1,

An ionizer comprising a waterproof module that is easily detachable, characterized in that it further comprises a side cover coupled to a side surface of the case and fixing the silicon pad with the silicon pad therebetween.
The method of claim 1,

The waterproof module includes an easily detachable waterproof module, further comprising a first O-ring disposed between the body part and the case and disposed to surround the soft X-ray tube on the surface of the case. Ionizer.
The method of claim 1,

The waterproof module is an ionizer comprising a waterproof module that is easily detachable, characterized in that it further comprises a second O-ring installed on the window.
The method of claim 1,

The waterproof module further comprises a cover coupled to the front of the body portion so as to cover the waterproof blocking film. The ionizer further comprises a waterproof module that is easily detachable.
The method of claim 1,

The waterproof module is an ionizer including an easily detachable waterproof module, characterized in that bolted to the case and coupled to each other.
The method of claim 1,

A rail formed on the upper side of the case;

A sliding part moving to the front or rear of the case along the rail; And

A first extension member extending forward of the sliding part;

It further includes,

The waterproof module is formed to extend upward from the upper end of the body, and further comprises a second extension member hingedly coupled to the front end of the first extension member. Niger.
The method of claim 9,

The waterproof module is removed from the front of the case, rotates a portion hinged to each other by the first extension member and the second extension member by an axis, and then moves to the rear of the case along the rail, Ionizer comprising a waterproof module that is easily detachable, characterized in that it can be accommodated in the rail.
The method of claim 9,

The waterproof module is formed on the side of the sliding auxiliary member to be fitted to the rail; Ionizer comprising a waterproof module that is easily detachable, characterized in that it further comprises.
The method of claim 1,

The case, the ionizer comprising a waterproof module that is easily detachable, characterized in that it is formed around the soft X-ray tube and includes a first coupling auxiliary unit coupled to the waterproof module.
The method of claim 12,

The first coupling auxiliary part protrudes forward from the front of the case, and a thread is formed on the inner circumferential surface,

The ionizer comprising a waterproof module that is easily detachable, characterized in that the body portion has a thread formed on an outer circumferential surface thereof and is screwed with the first coupling aid.