KR20180121110A - Apparatus for sensing particle - Google Patents

Abstract

An apparatus for sensing particles according to embodiments comprises: a light emitting part emitting light; a first flow path part provided below the light emitting part to intersect the optical axis of the light emitting part and providing a first flow path through which first air which may contain particles flows; an air providing part supplying second air filtered by particles to a gap between the first flow path and the light emitting part and a gap between the first flow path and the light receiving part in the same direction as the first air flows; and a light receiving part disposed on the optical axis below the first flow path part and through which the light passing through the first flow path part is incident. An embodiment of the present invention is to provide the apparatus for sensing the particles, capable of accurately sensing the particles without being contaminated by dust and the like.

Description

Apparatus for sensing particle

An embodiment relates to a particle sensing device.

In a conventional dust sensing apparatus for sensing particles such as dust, light is irradiated toward the dust, and light scattered from the dust is sensed to obtain information on the dust.

When the dust to be sensed continuously flows into the inside of the dust sensing apparatus, the inside of the dust sensing apparatus is contaminated with dust, so that the dust can not be accurately sensed. Particularly, when the dust introduced into the dust sensing apparatus is accumulated in the optical system inside the dust sensing apparatus, the performance of the dust sensing apparatus may be deteriorated.

To overcome this, the user of the dust sensing device must manually clean the interior of the dust sensing device, in particular, the optical system periodically, for example, every 3 to 6 months. As a result, the user is frequently exposed to an unsanitary work environment in which dirt such as dust is put on the user's hand, dust can be scattered around the user during cleaning, and the user can be troublesome.

An embodiment of the present invention is to provide a particle sensing device capable of accurately sensing particles without being contaminated by dust or the like.

According to an embodiment of the present invention, there is provided a particle sensing apparatus including: a light emitting unit emitting light; A first flow path portion provided below the light emitting portion and crossing an optical axis of the light emitting portion to provide a first flow path through which first air that may contain particles flows; The air providing unit providing the second air filtered by the particles in the same direction as the first air flows between the first flow path and the light emitting unit and between the first flow path and the light receiving unit; And a light receiving portion disposed on the optical axis below the first flow path portion and through which light having passed through the first flow path portion is incident.

For example, the first flow path may include a first flow path inlet through which the first air flows; A first flow path outlet through which the first air flows; A scattering part located in the optical axis between the first flow path inlet part and the first flow path outlet part and between the light emitting part and the light receiving part and scattering the particles; A first-1 < th > flow path intermediate portion positioned between the first flow path inlet portion and the scattering portion; And a second flow path intermediate portion located between the scattering portion and the first flow path outlet portion, wherein the first flow path inlet portion, the first flow path intermediate portion, the scattering portion, The intermediate portion and the first flow path outlet portion may constitute the first flow path.

For example, the air providing unit may include a second flow path portion that is isolated from the first flow path before the scattering portion, comes in contact with the first flow path from the scattering portion, and provides a second flow path through which the second air flows can do.

For example, the second flow path may include a second flow path inlet through which the second air flows, the second flow path inlet being disposed around the first flow path inlet; A second flow path outlet portion through which the second air flows, the second flow path outlet portion being disposed around the first flow path outlet portion; An air curtain disposed around the scattering portion to separate the phase scattering portion and the light receiving portion and to separate the scattering portion and the light emitting portion; A second-1-channel intermediate portion disposed around the first-1-path middle portion; And a second-2 flow path intermediate portion disposed around the first-second flow path intermediate portion, wherein the second flow path inlet portion, the second-1 flow path intermediate portion, the air curtain portion, The middle portion and the second flow path outlet portion constitute the second flow path, the first and second flow path inlet portions are isolated from each other, the 1-1 and 2-1 flow path middle portions are isolated from each other, And the scattering portions are in contact with each other, and the intermediate portions of the first and second flow paths are in contact with each other, and the first and second flow path outlet portions are in contact with each other.

For example, the first-1-channel middle part is disposed in the second-1-channel middle part, the inner wall of the first-1-channel middle part forms a part of the first channel, And a part of the second flow path may be formed between the outer wall of the middle part and the inner wall of the second-1 flow path middle part.

For example, the first flow path end face of the first 1-1 intermediate flow path portion and the second flow end face portion of the second 1 flow path intermediate portion may be concentric.

For example, the air curtain part may include a first air curtain part positioned between the light emitting part and the scattering part; And a second air curtain part located between the scattering part and the light receiving part and spaced apart from the first air curtain part.

For example, the second-1-channel middle part may include an upper-side second-1-channel middle part in contact with the first air curtain part; And a lower second-1 flow path intermediate portion in contact with the second air curtain portion and spaced apart from the upper second-1 flow path intermediate portion.

For example, the light emitting unit may include a light source unit; And a first opening disposed in the optical axis to emit light emitted from the light source toward the scattering portion.

For example, the flow path cross-sectional area of the first flow path may be smaller than the area of the first opening.

For example, the sum of the flow path cross-sectional area of the first flow path and the flow path cross-sectional area of the second flow path may be smaller than the area of the first opening.

For example, when driving the particle sensing device, the first flow rate of the first air may be less than the second flow rate of the second air.

For example, the flow path cross-sectional area of the second flow path portion may be constant at any point on the second flow path.

For example, the particle sensing device may further include a fan disposed adjacent to the first and second flow path outlets for directing flow of at least one of the first or second air.

For example, the air supply unit may further include an air filtering unit that filters the particles in the first air to generate the second air.

The air purifier according to another embodiment includes the particle sensing device; And an air filtering unit for filtering the particles in the first air to generate the second air.

The particle sensing apparatus according to the embodiment can prevent the light emitting portion or the light receiving portion from being contaminated by the particles by using the second air, thereby eliminating the necessity of cleaning and thereby accurately sensing the particles.

1 is a schematic block diagram for explaining the concept of a particle sensing apparatus according to an embodiment.
Figure 2 shows an exemplary profile of scattered light scattered by particles.
Figure 3 shows a cross-sectional view of one embodiment of the particle sensing device shown in Figure 1;
FIG. 4A is a sectional side view of the first and second-1 flow path middle parts in the first and second flow paths shown in FIG. 3, and FIG. 4B is a cross- &Quot; is an enlarged cross-sectional view.
Figure 5 shows a cross-sectional view of another embodiment of the particle sensing device shown in Figure 1;
FIG. 6A is a side sectional view of the first and second-1 flow path middle parts in the first and second flow paths shown in FIG. 5, and FIG. 6B is a cross- &Quot; is an enlarged cross-sectional view.
Figure 7 shows a cross-sectional view of another embodiment of the particle sensing device shown in Figure 1;
8 is an enlarged cross-sectional view of the portion 'A3' to illustrate the first and second flow paths shown in FIG.
9 is an enlarged cross-sectional view of the portion 'B' shown in FIG.
FIG. 10A shows a plan view of an embodiment of the light sensing unit shown in FIG. 9, and FIG. 10B is a cross-sectional view of the light sensing unit shown in FIG. 10A taken along line JJ '.
FIG. 11 shows a plan view of another embodiment of the light sensing unit shown in FIG.
12 is a block diagram of an embodiment of the information analysis unit shown in FIG.
13 is a schematic sectional view of the air cleaner according to the embodiment.
FIG. 14 is a photograph showing a state in which the first air flows in the first flow path portion in the particle sensing apparatus according to the comparative example. FIG.
FIG. 15 is a photograph of the first and second air flowing in the first and second flow paths in the particle sensing apparatus according to the embodiment; FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to facilitate understanding of the present invention. However, the embodiments according to the present invention can be modified into various other forms, and the scope of the present invention should not be construed as being limited to the embodiments described below. Embodiments of the invention are provided to more fully describe the present invention to those skilled in the art.

In the description of the present embodiment, in the case of being described as being formed "on or under" of each element, the upper (upper) or lower (lower) on or under includes both the two elements being directly in contact with each other or one or more other elements being indirectly formed between the two elements.

Also, when expressed as "on" or "on or under", it may include not only an upward direction but also a downward direction with respect to one element.

It is also to be understood that the terms "first" and "second," "upper / upper / upper," and "lower / lower / lower" But may be used to distinguish one entity or element from another entity or element, without necessarily requiring or implying an order.

Hereinafter, a particle sensing apparatus 100 (100A to 100C) according to an embodiment will be described with reference to the accompanying drawings. For convenience of description, the particle sensing apparatus 100 (100A to 100C) is described using the Cartesian coordinate system (x-axis, y-axis, z-axis), but it can be explained by other coordinate systems. According to the Cartesian coordinate system, the x-axis, the y-axis and the z-axis are orthogonal to each other, but the embodiment is not limited to this. That is, according to another embodiment, the x-axis, the y-axis, and the z-axis may intersect with each other.

1 is a schematic block diagram for explaining the concept of the particle sensing apparatus 100 according to the embodiment and includes a light dumping unit 102, a light emitting unit 110, a first flow path unit 120, The controller 140 may include a controller 130, an air supplier 140, a signal converter 150, an information analyzer 160, a housing 170, and a fan 180.

Referring to FIG. 1, the light emitting unit 110 may emit light, and may include a light source unit 112, a lens unit 114, and a light emitting case 116.

The light source unit 112 serves to emit the first light L1 and may include at least one light source. The light source included in the light source unit 112 may be at least one of a light emitting diode (LED) or a laser diode (LD). The light source unit 112 may include at least one of a light source, But not limited to. For example, the light source that implements the light source 112 may be a blue LED having high linearity, a high-brightness LED, a chip LED, a high-lux LED, or a power LED, but the light source according to the embodiment is not limited to a specific LED .

If the light source unit 112 is implemented by an LED, light of a visible light wavelength band (for example, 405 nm to 660 nm) or an infrared (IR) wavelength band (for example, 850 nm to 940 nm) . ≪ / RTI > In addition, when the light source unit 112 is implemented as an LD, light of a red / blue wavelength band (for example, 450 nm to 660 nm) can be emitted. However, the embodiment is not limited to a specific wavelength band of the first light L1 emitted from the light source section 112. [

Also, the intensity of the third light L3 emitted from the light emitting portion 110 may be higher than 3000 mcd, but the embodiment is not limited to the specific intensity of the third light L3 emitted.

The packaging form of the light source included in the light source unit 112 may be implemented by an SMD (Surface Mount Device) type or a lead type. Here, the SMD type means a packaging type in which a light source of the light emitting portion 112A is mounted on a printed circuit board (PCB) through soldering, as shown in FIG. In addition, the lead type means a packaging type in which a lead that can be connected to a PCB electrode protrudes from a light source. However, the embodiment is not limited to a specific packaging form of the light source.

In addition, when the light source unit 112 is implemented as an LD, the LD may be a TO Can type packaged with metal, and may consume 5 mW or more of power, but the embodiment is not limited thereto.

The lens unit 114 may be disposed on the optical axis LX between the light source unit 112 and the first opening OP1. That is, the lens unit 114 may be disposed on a path through which the first light L1 passes from the light source unit 112 toward the first opening OP1. The lens unit 114 functions to condense the first light L1 emitted from the light source unit 112 into the first opening OP1 (L2). The lens unit 114 may also convert the first light L1 emitted from the light source unit 112 into parallel light L2. For this purpose, the lens portion 114 may include only one lens or may include a plurality of lenses arranged on the optical axis LX. The material of the lens portion 114 may be the same as that applied to a general camera module or an LED module.

The light emitting case 116 receives the light source unit 112 and the lens unit 114 and forms a first opening OP1. In the case of FIG. 1, the light emitting case 116 is illustrated as being separate from the top portion 172 of the housing 170, but the embodiment is not limited thereto. That is, the light emitting case 116 may be integrally formed with the top portion 172 of the housing 170. In this case, the light emitting case 116 can be omitted.

Further, the light emitting case 116 may include a first opening OP1. The first opening OP1 is a part of the first flow path 120 in which the second light L2 emitted from the light source part 112 and passed through the lens part 114 is scattered by the scattering part SS 3 light L3 and may be disposed on the optical axis LX of the light emitting portion 110. [ The scattering part SS will be described later in detail when the first and second flow paths 120 and 142 are described.

The first opening OP1 may have an area corresponding to a view angle of the first light L1 emitted from the light source unit 112. [ Generally, the emission angle of the LED, which may be the light source 112, may be about 15 ° when the luminous intensity falls to 50%. Thus, the light of the desired intensity can be emitted through the first opening OP1 even if the area of the first opening OP1 is not large because the power of the beam is large at the center. However, if the light emission angle is large, if the area of the first opening OP1 is determined so that the third light L3 having a desired intensity is emitted from the light emitting portion 110, light loss occurs and the intensity of the light is weakened have. Therefore, the light emission angle can be determined in consideration of this. For example, when the first opening OP1 has a circular planar shape, if the diameter of the first opening OP1 is larger than 15 mm, the size of the particle sensing device 100 becomes large and light noise may be caused have. The diameter of the first opening OP1 may be from 2 mm to 15 mm, for example from 3 mm to 10 mm, preferably from 4 mm to 6 mm, for example 5.5 mm, although the embodiment is not limited in this respect .

The first flow path unit 120 may be disposed below the light emitting unit 110 so as to intersect the optical axis LX of the light emitting unit 110 and may include air that may include particles Can flow through the first flow path. The first air capable of containing particles can flow in the IN1 direction toward the first inlet IH1 of the first flow path portion 120 and flow in the OUT1 direction through the first outlet OH1 of the first flow path portion 120 Can be discharged. For example, particles may be particles that float in the first air, may be dust or smoke, and embodiments are not limited to particular forms of particles.

The particles contained in the first air flowing in the direction IN1 through the first inlet IH1 of the first flow path portion 120 are separated from the first flow path by the third light L3 emitted from the light emitting portion 110 The scattered fourth light L4 (hereinafter, referred to as 'scattered light') may be provided to the light receiving unit 130,

The air supplier 140 may provide the filtered air (hereinafter referred to as "second air") between the first flow path and the light emitting portion 110 and between the first flow path and the light receiving portion 130. The second air may be provided in the same direction as the direction in which the first air flows (for example, the y-axis direction). To this end, the air supplier 140 may include a second flow path portion 142 for providing a second flow path through which the second air flows.

The second flow path portion 142 for providing the second flow path includes the second-first flow path portion 142-1 forming the second-1 flow path and the second 2-flow path portion 142 forming the second 2 flow path -2), and the second-1 and second-2-flow portions 142-1 and 142-2 are illustrated as being spaced apart from the first flow portion 120, To explain the concept of the second flow paths 120 and 142. [ That is, as described later, the second flow path portion 142 may be disposed so as to surround the first flow path portion 142. In this case, the 2-1 and 2-2 flow paths 142-1 and 142-2 are integrally formed, and the 2-1 and 2-2 flow paths can form a single second flow path.

According to the embodiment, the second flow path may be isolated from the first flow path before the scattering section SS, and may be formed in contact with the first flow path from the scattering section SS.

1, the second flow path portion 142 is illustrated as being spaced apart from the light emitting portion 110 and the light receiving portion 130. However, this is to explain the concept of the particle sensing device 100 according to the embodiment to be. That is, the second flow path portion 142 is disposed in contact with the light emitting portion 110 and the light receiving portion 130, as in the particle sensing apparatuses 100A to 100C described later, according to the manner in which the second flow path portion 142 is implemented. .

The fan 180 serves to induce the flow of the first and second air in the first and second flow paths 120 and 142. That is, the fan 180 maintains a constant flow rate of at least one of the first and second air in at least one of the first and second flow paths 120 and 142. For this purpose, the fan 180 may be disposed adjacent to the first and second flow path portions 120 and 142 in the direction in which the first and second air flow (for example, the y axis direction). 1, the fan 180 is connected to the first outlet port OH1 of the first flow path portion 120 and the second outlet port OH2 of the second flow path portion 142, , OH3), but embodiments are not limited thereto. That is, the embodiment is not limited to the specific arrangement position of the fan 180, as long as it can induce the flow of air within each of the first and second flow paths 120, 142.

For example, in each of the first and second flow paths 120 and 142, the first and second flow paths 120 and 142 are formed so as to maintain the flow rate of 5 ml / sec, Or determine the rotational speed of the fan 180, although embodiments are not limited in this respect.

The light receiving unit 130 receives the fourth light L4 that has passed through the first flow path unit 120. For this purpose, the light receiving unit 130 may be disposed on the optical axis LX under the first flow path unit 120 have. Here, the fourth light L4 having passed through the first flow path portion 120 may include at least one of scattered light or non-scattered light.

Figure 2 shows an exemplary profile of scattered light scattered by particles (P).

2, scattered light refers to light scattered by the particles P included in the first air passing through the first flow path portion 120, that is, the third light L3 emitted from the light emitting portion 110 can do. The non-scattered light means light that the third light L3 emitted from the light emitting portion 110 travels to the light receiving portion 130 without being scattered by the particles P passing through the first flow path portion 120 have.

The light receiving unit 130 receives the scattered light and can provide the signal conversion unit 150 with an electrical signal of the received light.

The light absorbing part 102 absorbs the fifth light L5 that has passed through the light receiving part 130 and may be disposed on the optical axis LX under the light receiving part 130. [ The light absorbing part 102 may correspond to a kind of dark room absorbing unwanted light (hereinafter referred to as 'main light') that is received without being received by the light receiving part 130.

The housing 170 serves to receive the light emitting portion 110, the first and second flow paths 120 and 142, the light receiving portion 130, and the light absorbing portion 102.

For example, the housing 170 may include a top portion 172, a middle portion 174, and a bottom portion 176. The middle part 174 is a part capable of accommodating the first and second flow paths 120 and 142 and the fan 180 and the bottom part 176 is a part capable of accommodating the light emitting part 110, Receiving part 130 and the light-absorbing part 102 can be accommodated.

In the case of FIG. 1, the intermediate portion 174 of the housing 170 and the first and second flow paths 120 and 142 are illustrated as being different, but the embodiment is not limited thereto. According to another embodiment, the first flow path portions 120A, 120B, and 120C and the second flow path portion 142 are formed by the intermediate portion 174 of the housing 170 as in the particle sensing devices 100A to 100C described later. Can be formed.

Hereinafter, embodiments 100A to 100C of the particle sensing apparatus 100 shown in FIG. 1 will be described with reference to the accompanying drawings.

FIG. 3 shows a cross-sectional view of one embodiment 100A of the particle sensing device 100 shown in FIG. For the sake of clarity, FIG. 3 shows the progress of the light as shading (L).

3 includes a light absorbing part 102, a light emitting part 110A, a first flow path part 120A, a light receiving part 130A, an air providing part 140A, housings 172 and 176 And a fan 180, and the signal converting unit 150 and the information analyzing unit 160 shown in FIG. 1 are omitted.

The light absorbing part 102, the light emitting part 110A, the first flow path part 120A, the light receiving part 130A, the air providing part 140A, the housings 172 and 176, and the fan 180 shown in FIG. The light absorbing portion 102, the light emitting portion 110, the first flow path portion 120, the light receiving portion 130, the air providing portion 140, the housings 172 and 176, the fan 180, The description of the overlapping portions will be omitted.

Referring to FIG. 3, the light source unit 112A includes only one light source. The lens portion 114A includes only one lens. The lens 114A is disposed on the optical axis LX between the light source 112A and the first opening OP1 and functions to condense the light emitted from the light source 112A into the first opening OP1.

FIG. 4A is a side sectional view of the first and second-1-channel intermediate portions FII1 in the first and second flow paths 120A and 142A shown in FIG. 3, 4A is a cross-sectional view of the first and second flow paths 120A and 142A, and FIG. 4B is a cross- Only the first portion FII1 and the first and third openings OP1 and OP3 are shown and the illustration of the fan 180 shown in Fig.

Referring to FIGS. 3, 4A and 4B, the first flow path portion 120A includes a first flow path inlet portion FI, a first flow path intermediate portion FII1, a scattering portion SS, A flow path middle portion FII2 and a first flow path outlet portion FO. The first flow path inlet portion FI, the first-first flow path intermediate portion FII2, the scattering portion SS, the first-second flow path intermediate portion FII2, and the first flow path outlet portion FO, It accomplishes.

The first flow path inlet portion FI may include a first inlet port IH1 and a first-first partial flow path as a portion into which the first air that may contain particles P may flow. The first inlet IH1 corresponds to the inlet of the first flow passage portion 120A through which air flows in from the outside in the IN1 direction and the 1-1 partial flow passage corresponds to the inlet from the first inlet IH1 to the And corresponds to a portion of the first flow path formed between the flow path middle portion FII1.

The first flow path outlet portion FO is a portion through which the first air that may contain particles P flows out and may include the first outlet port OH1 and the first and second partial flow paths. Here, the first outlet OH1 corresponds to the outlet of the first flow passage portion 120A through which the first air flows out to the OUT1 direction, and the first-second partial flow passage corresponds to the second-flow middle portion FII2 ) Of the first flow path (OH1) to the first outlet (OH1).

The scattering unit SS is located on the optical axis LX between the light emitting unit 110A and the light receiving unit 130A and between the first flow path inlet FI and the first flow path outlet FO. The scattering portion SS provides a space in which the light emitted from the light emitting portion 110A is scattered by the particles P. [ To this end, the scattering portion SS is a region in which the light emitting portion 110A and the light receiving portion 130A are spaced apart from each other in the first flow path portion 120, 120A in the direction (for example, the z- As shown in FIG.

The first-half channel intermediate portion FII1 is located between the first flow path inlet portion FI and the scattering portion SS and the first-second channel intermediate portion FII2 is positioned between the scattering portion SS and the first- (FO).

On the other hand, the second flow path portion 142A includes a second flow path inlet portion FI, a second-1 flow path intermediate portion FII1, an air curtain portion AC, a second 2-flow path middle portion FII2 And a second flow path outlet portion FO. The second curtain portion AC, the second-2 flow path middle portion FII2 and the second flow path outlet portion FO are connected to the second flow path opening portion F2, Respectively.

The second flow path inlet portion FI may be disposed around the first flow path inlet portion FI as a portion into which the particles P are filtered to be filtered and into which the filtered air flows. Second and third inlets IH2 and IH3, and a second-1 partial flow path. The second inlet IH2 corresponds to the inlet of one side 142-1 of the second flow passage portion 142A into which the second air flows from the outside in the IN2 direction and the third inlet IH3 corresponds to the inlet of IN2 To the other side 142-2 of the second flow path portion 142A through which air flows in the direction of the arrow. The second-part partial flow path corresponds to a part of the second flow path formed between each of the second and third inlets IH2 and IH3 and the second-1 flow path middle part FII1.

The second flow path outlet portion FO may be disposed around the first flow path outlet portion FO as a portion through which the second air flows out and the second and third outflow ports OH2 and OH3 and the second- . ≪ / RTI > Here, the second outlet OH2 corresponds to the outlet of one side 142A-1 of the second flow passage portion 142A through which the second air flows out in the OUT1 direction, and the third outlet OH3 corresponds to the outlet of the second air passage 142A- Corresponds to the outlet of the other side 142-2 of the second flow path portion 142 that flows out to the outside in the direction of OUT1 and the second 2-2 partial flow path corresponds to the outlet from the second and second flow path middle portion FII2, And a portion of the second flow path formed between each of the third outlets OH2 and OH3.

The first and second air curtain portions AC1 and AC2 are portions disposed around the scattering portion SS. The first air curtain part AC1 is positioned between the scattering part SS and the light emitting part 110A so as to separate them SS110A from each other and the second air curtain part AC2 has a scattering part SS And are positioned between the light receiving portions 130A to separate them (SS, 130A) from each other. Therefore, when the first air capable of containing particles passes through the scattering unit SS, the air curtain units AC1 and AC2 can block the entrance of the particles into the light emitting unit 110A or the light receiving unit 130A, respectively have.

The second-1 flow path middle portion FII1 is disposed around the first-half flow path middle portion FII1 and may be located between the second flow path inlet portion FI and the air curtain portions AC1 and AC2 . The second-2 flow path middle portion FII1 is disposed around the first-second flow path middle portion FII2 and may be positioned between the air curtain portions AC1 and AC2 and the second flow path outlet portion FO.

As described above, the second flow path may be isolated from the first flow path before the scattering portion SS, and the second flow path from the scattering portion SS may be disposed in contact with the first flow path. Therefore, the first and second flow path inlet portions FI are isolated from each other, and the 1-1 and 2-1 flow path intermediate portions FII1 are isolated from each other, and the air curtain portions AC1 and AC2 and the scattering portion SS are in contact with each other and the first and second flow path middle portions FII2 are in contact with each other and the first and second flow path outlet portions FO can contact with each other.

In FIG. 4B, the intermediate portion FII2 and the first and second flow path outlet portions F0 and F2 are indicated by dotted lines in FIG. 4B. However, since the second air from the scattering unit SS is combined with the first air, the second flow path through which the second air flows from the air curtain units AC1 and AC2 may be different from the dotted line.

3 and 4, the second flow path inlet portion FI of the second flow path is illustrated as being formed by bypassing the top portion 172 of the housing 170, but the embodiment is not limited thereto. That is, although not shown, according to another embodiment, the second flow path inlet portion FI of the second flow path may be formed so as to penetrate instead of bypassing the top portion 172 of the housing 170.

4A, the first-first-flow-path middle portion FII1 of the first flow-path portion 120A is connected to the second-first-flow-path middle portion FII1 of the second flow passage portion 142A . In this case, the inner wall 120A-1 of the first-first-flow-path intermediate portion FII1 defines (or forms) a portion of the first flow passage, and the outer walls 120A- 2) and the inner wall 142A-1 of the second-flow-path middle portion FII1 can define (or form) a part of the second flow path.

4A, the first flow path section of the first-first flow path intermediate portion FII1 of the first flow path portion 120A and the first flow path end face of the second-flow path intermediate portion FII1 of the second flow path portion 142A The two-flow cross section may be concentric, but the embodiment is not limited to this.

The first air containing the particles P flows through the first flow path inlet FI and then proceeds to the scattering portion SS via the first-half channel intermediate portion FII1, And is discharged through the first flow path outlet portion FO through the two-flow middle portion FII2. The second air filtered by the particles P flows into the air curtain units AC1 and AC2 through the second-flow path intermediate portion FII1 after flowing through the second flow path inlet portion FI And then discharged through the second-passage outlet portion FO via the second-2-flow-passage middle portion FII2. As described above, the fan 180 may be disposed to facilitate the smooth progress of the first air and / or the second air through the first and / or the second flow path, respectively. That is, the fan 180 serves to guide the flow of at least one of the first or second air. For example, as shown in FIG. 3, the fan 180 may be disposed in the first and second flow path outlet portions FO and may be provided at a first outlet portion FO of the first flow path outlet portion FO OH1 and the second and third outlets OH2, OH3 of the second flow path outlet FO. Or according to another embodiment, the fan 180 may be disposed in the first and second flow path inlet FI or adjacent to the first to third inlets IH1, IH2, IH3.

The third light L3 emitted from the first opening OP collides with the particles P at the scattering portion SS while the first air containing the particles P passes through the flow path portion 120A, It will spawn in the form shown. At this time, in order to cause all the particles P passing through the scattering portion SS to strike by the third light L3 emitted from the light emitting portion 110A, the third light L emitted from the first opening OP1 An area suitable for forming the light curtain at the scattering portion SS in the direction (e.g., the x-axis and the z-axis) intersecting with the direction (e.g., the y-axis direction) An opening OP1 can be provided.

The flow path cross-sectional area (for example, the area in the x-axis and the z-axis direction) of the first flow path of the first flow path portion 120A is determined by the area of the first opening OP1 Of the area of the surface of the substrate. The sum of the flow path cross-sectional area of the first flow path and the flow path cross-sectional area of the second flow path (for example, the area along the x-axis and the z-axis direction) may be smaller than the area of the first opening OP1.

For example, referring to FIG. 4B, when the length of the first opening OP1 in the x-axis direction is the same as the length of the first flow path portion 120A in the x-axis direction, The width D1 of the first flow path portion 120A may be greater than the height D21 of the first flow path portion 120A and the width D1 of the first opening portion OP1 may be greater than the height D21 of the first flow path portion 120A, May be greater than the sum of the heights D22 and D23 of the flow path portion 142A, that is, the sum of D21, D22 and D23.

4B, the first opening OP1 has a circular planar shape, the first flow path portion 120A has a circular cross-sectional shape, and the second flow path portion 142A has a circular- The diameter D1 of the first opening portion OP1 may be larger than the diameter D21 of the first flow path portion 120A and the diameter D1 of the first opening portion OP1 may be larger than the diameter D2. Lt; / RTI > The width (or diameter) D1 of the first opening OP1 may be 2 mm to 15 mm, for example, 3 mm to 10 mm, preferably 4 mm to 6 mm, for example, 5.5 mm, The embodiment is not limited to this.

When the flow path cross-sectional area of the first flow path portion 120A is smaller than the area of the first opening portion OP1 or the flow path cross-sectional area of the first flow path portion 120A and the flow path cross- When the sum is smaller than the area of the first opening OP1, the amount of the first and second air passing through the first and second flow paths 120A and 142A increases. Therefore, the number of particles passing through the first flow path portion 120A increases, and a larger amount of particles can be sensed. In addition, the amount of the filtered second air passing through the second flow path portion 142A increases, so that the particles entering the scattering portion SS do not enter the light emitting portion 110A or the light receiving portion 130A, It can be blocked more surely than by.

In addition, the flow path cross-sectional area of the first flow path portion 120A may be smaller than the beam size of the light emitted from the first opening OP1. As a result, the amount of air containing the particles P passing through the first flow path portion 120A increases, that is, the amount of particles passing through the first flow path portion 120A increases, P) can be sensed. As described above, since the information on the particles P can be secured more as the amount of the particles P passing through the first flow path portion 120A increases, the information on the particles P can be more accurately Can be analyzed. The first flow path portion 120 shown in FIG. 1 may have various configurations other than the configurations shown in FIGS. 3 and 4 so that many particles P can pass through.

Also, when the particle sensing device is driven, the first flow rate of the first air may be less than the second flow rate of the second air. This is to prevent the particles included in the first air from entering the light emitting portion 110A or the light receiving portion 130A by the second air.

5 is a cross-sectional view of another embodiment 100B of the particle sensing device 100 shown in Fig. 1, Fig. 6A is a cross-sectional view of the first flow path portion 120B and the second flow path portion 142B shown in Fig. 5 FIG. 6B is a cross-sectional view of an enlarged view of the portion 'A2' shown in FIG. 5, and for convenience of explanation, FIG. 6B is a cross- 6A shows only the first and second flow paths 120B and 142B and the first and third openings OP1 and OP3 and the illustration of the fan 180 shown in Fig. 5 in Fig. 6B is omitted.

The first flow path portion 120A shown in FIG. 3 and the first flow path portion 120B shown in FIG. 5 are different from each other in sectional shape. 3, the second flow path portion 142A has a cross-sectional shape extending in a predetermined direction (for example, the y-axis direction) in the same manner as the first flow path portion 120A. On the other hand, The flow path portion 142B does not have a sectional shape extending in a certain direction. Except for this, since the particle sensing apparatus 100B shown in FIG. 5 is the same as the particle sensing apparatus 100A shown in FIG. 3, the duplicate description will be omitted. For example, the definitions of the scattering unit SS and the air curtain units AC1 and AC2 described above with reference to FIG. 4B may be applied to the flow path unit 120B shown in FIG. 6B.

In the case of Figs. 3 and 4B, in the direction intersecting with the direction in which the first air flows (for example, the y-axis direction) (for example, in the x-axis direction and the z- Sectional area of the first-first-flow-path middle portion FII1, the scattering portion SS, the first-second-flow-path intermediate portion FII2, and the first-

Alternatively, the cross-sectional area of the first-half-path middle portion FII1 may be increased in the direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first air flows (for example, Sectional area of the middle portion FII2 of the first and second channels may increase as the distance from the scattering portion SS increases.

For example, as shown in Figs. 5 and 6B, in the direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first air flows The cross-sectional area of the intermediate portion FII1 is reduced and becomes constant as it approaches the scattering portion SS, and the cross-sectional area of the middle portion FII2 of the first and second channels is increased after the scattering portion SS . Alternatively, unlike the case shown in Figs. 5 and 6B, in the direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first air flows The cross-sectional area of the intermediate portion FII1 of the flow path continues to decrease as it approaches the scattering portion SS and the cross-sectional area of the middle portion FII2 of the first-second flow path may continue to increase as the distance from the scattering portion SS increases .

3 and 4B, in the direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the air flows (for example, the y- Sectional area of each of the first passage outlet FI and the first passage outlet portion FO may be larger than the cross-sectional area of the scattering portion SS.

In the first flow path portions 120A and 120B shown in Figs. 4B and 6B, the first-half channel intermediate portion FII1 (or the first-second channel intermediate portion FII2) and the scattering portion SS (For example, the area in the x-axis and the y-axis direction) of the first opening OP1 is defined as a direction in which the first air flows Sectional area of the second-1 opening OP21 in a direction (for example, the x-axis and the z-axis direction) intersecting with the first opening OP21 (for example, the y-axis direction).

In the second flow paths 142A and 1420B shown in Figs. 4B and 6B, the second-1 flow path middle portion FII1 (or the second-2 flow path middle portion FII2) and the air curtain portion (For example, the x-axis and the y-axis) of the first opening OP1 are defined as the second and second opening portions OP22 and OP23, respectively, (For example, the x-axis and the z-axis direction) intersecting with the direction (e.g., the y-axis direction) in which the second air flows , OP22, OP23).

For example, referring to FIGS. 4B and 6B, when the length of the first opening OP1 in the x-axis direction is equal to the length of the second-1 opening OP21 in the x-axis direction, OP1 may be larger than the height D41 of the second-1 opening OP21. Alternatively, when it is assumed that the length in the x-axis direction of the first opening OP1 and the length in the x-axis direction of the second to first to third opening portions OP21, OP22 and OP23 are the same, May be larger than the sum D4 of the heights D41, D42 and D43 of the second to first to third opening portions OP21, OP22 and OP23.

4B and 6B, when the first opening OP1 has a circular planar shape and the second-1 opening OP21 has a circular cross-sectional shape, the diameter of the first opening OP1 D1 may be larger than the diameter D41 of the second-1 opening OP21. Alternatively, referring to FIGS. 4B and 6B, the first opening OP1 has a circular planar shape, the second-1 opening OP21 has a circular cross-sectional shape, and the second- The diameter D1 of the first opening OP1 may be larger than the sum D4 of the diameters D41, D42 and D43 when the openings OP22 and OP23 have an arc-shaped cross-sectional shape.

When the first flow path portion 120B has a cross-sectional shape as shown in Figs. 5 and 6B, due to the change in cross-sectional area of the 1-1 and 1-2 flow path middle portions FII1 and FII2, The particles P can pass through the first flow path portion 120B and the accuracy of sensing the particles P can be increased.

6A, the second-1-flow path intermediate portion FII1 is in contact with the upper-side second-1-flow path middle portion UFII1 and the second air curtain portion AC2 which are in contact with the first air curtain portion AC1 And a lower second-1 channel intermediate portion DFII1. At this time, the upper second-1 channel intermediate portion UFII1 and the lower second-1 channel intermediate portion DFII1 are spaced apart from each other. Thus, the first and second air curtain portions AC1 and AC2 can be disposed apart from each other. On the other hand, in the case of FIG. 4B, the second-1-channel middle portion FII1 is not separated into the upper side and the lower side but one body, and the first and second air curtain portions AC1 and AC2 are not separated from each other, to be.

7 is a cross-sectional view of another embodiment 100C of the particle sensing apparatus 100 shown in FIG. 1, and FIG. 8 is a cross-sectional view illustrating the first and second flow path portions 120C and 142C shown in FIG. A3 'for the sake of simplicity, and the illustration of the fan 180 shown in Fig. 7 is omitted in Fig. 8 for convenience of explanation.

The first flow path portion 120A shown in FIG. 3 and the first flow path portion 120C shown in FIG. 7 have different sectional shapes. 3, the second flow path portion 142A has a sectional shape extending in a predetermined direction (for example, the y axis direction) like the first flow path portion 120A, while the second flow path portion 142A shown in FIG. The second flow path portion 142C does not have a sectional shape extending in a certain direction. Except for this, since the particle sensing apparatus 100C shown in FIG. 7 is the same as the particle sensing apparatus 100A shown in FIG. 3, a duplicate description will be omitted.

In the case of Figs. 3 and 4B, the first flow path inlet portion FI, the second flow path portion IB, and the second flow path portion are formed in the direction (for example, the x axis direction and the z axis direction) Sectional area of the first-first-flow-path middle portion FII1, the scattering portion SS, the first-second-flow-path intermediate portion FII2, and the first-

On the other hand, in the case of Figs. 7 and 8, in the direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first air flows (for example, The sectional area of the intermediate portion FII1 decreases as it approaches the scattering portion SS, and then increases. Further, the cross-sectional area of the first-second flow path middle portion FII2 is larger than the cross-sectional area of the second-flow path middle portion FII2 in the direction (for example, the x-axis and the z- And decreases as the distance from the portion SS increases.

It is also possible to prevent the flow of the first air in the first intermediate passage FII1 (or the first intermediate passage FII2) of the first passage portion 120C shown in FIG. 8 (For example, the area in the x-axis and the y-axis direction) of the first opening OP1 is defined as the second-first opening OP21, Sectional area of the second-1 opening OP21 in a direction (for example, the x-axis and the z-axis direction) intersecting with the flowing direction (for example, the y-axis direction).

It is also possible to prevent the flow of the second air in the second-1 intermediate passage portion FII1 (or the second -2 intermediate passage portion FII2) of the second passage portion 142C shown in Fig. 8 (For example, the x-axis and the y-axis) of the first opening OP1 when the opening area having the smallest cross-sectional area in the first opening OP2 is defined as the second and second opening parts OP22 and OP23, (For example, the x-axis and the z-axis direction) intersecting with the direction in which the first and second air flow (for example, the y-axis direction) Sectional area of the openings OP21 to OP23.

For example, referring to FIG. 8, the length in the x-axis direction of the first opening OP1 and the length in the x-axis direction of the second to first to second opening portions OP21, OP22, OP23 are equal to each other The width D1 of the first opening OP1 may be greater than the height D41 of the second-1 opening OP21, and the second-1 th to the 2-3th opening portions OP21, OP22, OP23 ) Of the heights D41, D42, and D43 of the first and second planes (i.e.

Alternatively, referring to FIG. 8, the first opening OP1 has a circular planar shape, the second-1 opening OP21 has a circular cross-sectional shape, and the second and second opening portions OP22 and OP23 The diameter D1 of the first opening OP1 may be larger than the sum D4 of the diameters D41, D42 and D43.

For example, the height D4 of the second opening OP2 shown in Figs. 4B, 6B and 8 is 1 mm to 10.0 mm, for example, 1 mm to 5.0 mm, preferably 1 mm to 2.0 mm, For example, it may be 2 mm, but the embodiment is not limited to this. As described above, according to the embodiment, since the height D4 of the second opening OP2 is small, the size of the entire particle sensing apparatuses 100A to 100C can be reduced.

In order to allow more particles to pass through the first flow path portions 120 (120A, 120B, and 120C), there should be no volume change in the flow rate of the first air passing through the first flow path portion 120. [ 7 and 8, when a double nozzle (DN) structure is formed by the second opening OP2, the flow rate of the first air passing through the first flow path portion 120C The flow rate of the first air can be adjusted to such a degree that the measurement can be easily performed and the accuracy of sensing the particles P can be increased. For example, since the bottleneck phenomenon is created by the double nozzle structure, more particles P can pass through the first flow path portion 120C, and the accuracy of sensing the particles P can be increased.

The structures of the first flow paths 120A, 120B, and 120C shown in FIGS. 3 to 8 are merely one example. That is, the embodiment is not limited to the specific example of the first flow path portion 120, as long as more first air can be introduced through the first flow path portions 120A, 120B, and 120C.

The first flow path portion 120A shown in FIG. 4B has the same flow cross-sectional area at any point on the first flow path, whereas the first flow path portion 120B shown in FIG. 6B and FIG. And does not have the same flow cross-sectional area at all points over one channel.

On the other hand, the second flow paths 142A, 142B, and 142C shown in Figs. 4B, 6B, and 8 may have a constant flow cross-sectional area at any point on the second flow path. However, the embodiment is not limited to this. That is, the structures of the second flow paths 142A, 142B, and 142C shown in Figs. 3 to 8 are merely one example. That is, if the second air flows through the second flow paths 142A, 142B, and 142C so that the particles contained in the first air can be blocked from entering the light emitting portion 110A and the light receiving portion 130A, The example is not limited to the specific example of the second flow path portion 142. [

Also, as illustrated in Figs. 6B and 8, in a direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first air flows (for example, Sectional area of each of the first outlet IH1 and the first outlet OH1 may be larger than the area of the first opening OP1 and larger than the sectional area of the second-1 opening OP21.

Also, as illustrated in Figs. 6B and 8, in a direction (for example, the x-axis and the z-axis direction) intersecting with the direction in which the first and second air flow (for example, the y- The sum of the flow cross sectional areas of the first to third inlet ports IH1, IH2, IH3 may be larger than the first opening area OP1 and larger than the sectional area of the second opening section OP2.

Alternatively, the first-first partial flow path of the first flow path inlet portion FI and the first-half partial flow path of the first flow path inlet portion FI are formed in a direction intersecting with the direction (e.g., the y-axis direction) The widest cross-sectional area of each of the first-second partial flow paths of the first-flow-path outlet portion FO may be larger than the area of the first opening OP1 and larger than the cross-sectional area of the second-1-th opening OP21.

Or the first and second flow path inlet ports FI and the first and second flow path inlet ports FI in the direction (for example, the x-axis and the z-axis direction) The sum of the widest cross-sectional areas of the partial flow path and the second-1 partial flow path, or the sum of the widest cross-sectional areas of the first- and second-part partial flow paths of the first and second flow path outlet portions FO, May be larger than the area of the first opening OP1 and larger than the sectional area of the second opening OP2.

For example, when the x-axis length of each of the first inlet IH1 and the first outlet OH1 is equal to the x-axis length of each of the first opening OP1 and the second-1 opening OP21, The height D21 in the z-axis direction of each of the inlet IH1 and the first outlet OH1 is larger than the width D1 in the y-axis direction of the first opening OP1, Axis direction D41 in the z-axis direction.

The x-axis length of each of the first to third inlets IH1, IH2, IH3 and the first to third outlets OH1, OH2, OH3 and the length of the first opening OP1 and the second- OH2 and OH3 of the first to third inlets IH1, IH2 and IH3 and the first to third outlets OH1, OH2 and OH3 when the x axis lengths of the three openings OP21, The sum D2 of the heights D21, D22 and D23 in the direction of the first opening OP1 is larger than the width D1 in the y-axis direction of the first opening OP1, May be larger than the sum D4 of the heights D41, D42, and D44 in the axial direction.

D2 may be from 1 mm to 15 mm, for example from 2 mm to 8 mm, preferably from 3 mm to 4 mm, for example, 3.5 mm, although the embodiment is not limited in this respect. The sum of the heights (or diameters) of the first to third outlets OH1, OH2 and OH3 is 5 mm to 25 mm, for example, 8 mm to 15 mm, preferably 10 mm to 12 mm, For example, it may be 11 mm, but the embodiment is not limited thereto.

Or, for example, when the x-axis length of each of the first inlet IH1 and the first outlet OH1 is equal to the x-axis length of each of the first opening OP1 and the second-1 opening OP21, The highest height in the z-axis direction of each of the first-first partial flow path and the first-second partial flow path is larger than the width D1 in the y-axis direction of the first opening OP1, may be greater than the height D41 in the z-axis direction.

The length of each of the first through third inlets IH1, IH2 and IH3 and the first through third outlets OH1, OH2 and OH3 and the length of the first openings OP1 and II- Axis direction of each of the 1-1, 1-2, 2-1 and 2-2 partial flow paths when the x-axis lengths of the second to third openings OP21, OP22 and OP23 are the same, The height of the first to the eighth openings OP21, OP22 and OP23 in the z-axis direction is larger than the width D1 in the y-axis direction of the first opening OP1 D41, D42, and D43).

Meanwhile, the air supplier 140 shown in FIG. 1 may further include an air filtering unit 144. The air filtering unit 144 filters the particles from the first air introduced through the input terminal IN1 and outputs the filtered air as the second air. For example, as shown in FIG. 3 or 7, the air filtering unit 144A may include only one outlet for outputting the second air, and the air filtering unit 144B, as shown in FIG. 5, And two outlets for outputting the second air.

Meanwhile, the light receiving unit 130 may have various structures in order to accurately detect light scattered by the particles P. The light receiving unit 130A shown in FIGS. 3, 5, and 7 corresponds to the light receiving unit 130 shown in FIG.

9 is an enlarged cross-sectional view of the portion 'B' shown in FIG.

3 and 9, the light receiving unit 130A may include a light transmitting member 132 and a light sensing unit 134. [ The light receiving portion 130A may further include a light guide portion 136A, but in some cases, the light guide portion 136A may be omitted.

The light-transmissive member 132 may be formed of a material capable of transmitting light, and may be embodied as glass, for example. The light transmitting member 132 may include a first surface 132-1 and a second surface 132-2. The first surface 132-1 corresponds to the top surface (i.e., the top surface) of the light transmitting member 132 facing the scattering section SS and the second surface 132-2 corresponds to the first surface 132-1. (That is, the bottom surface) of the light transmitting member 132 as the opposite surface of the light transmitting member 132. [

The light sensing part 134 and the light guide part 136A may be disposed around the optical axis of the light transmitting member 132. [ The light sensing part 134 and the light guide part 136A may be disposed on mutually opposing surfaces of the light transmitting member 132. [ 9, the light sensing part 134 is disposed on the second surface 132-2 of the light transmissive member 132, and the light guiding part 136A is disposed on the second surface 132-2 of the light transmissive member 132. [ And may be disposed on the first surface 132-1. 9, the light sensing portion 134 is disposed on the first surface 132-1 of the light transmitting member 132 and the light guiding portion 136A is disposed on the second surface 132-1 of the light transmitting member 132, May be disposed on the surface 132-2. The light sensing portion 134 is disposed on the second surface 132-2 of the light transmitting member 132 and the light guiding portion 136A is disposed on the first surface 132-1 of the light transmitting member 132 The following explanation can be applied to the case of the reverse.

The light sensing unit 134 is disposed around the optical axis LX under the light transmissive member 132 and is scattered by the particles P at the scattering unit SS and then incident on the light receiving unit OP3 through the light receiving unit OP3. Can be sensed. The light receiving incidence portion will be described later.

FIG. 10A is a plan view of the optical sensing unit shown in FIG. 9, and FIG. 10B is a cross-sectional view taken along line J-J 'of FIG. 10A.

Referring to FIGS. 10A and 10B, the light sensing portion 134A may include a center portion (or a light transmission region) 134-1 and a photodiode 134-2. The central portion 134-1 is an area defined by the inner edge of the photodiode 134-2 and passes through the scattering portion SS to pass the main light through the light absorbing portion 102, LX) and can be implemented with a material having translucency. For example, the central portion 134-1 may be made of glass.

Referring to FIG. 10B, the photodiode 134-2 may include a first electrode 1010, a semiconductor layer 1020, and a second electrode 1030. FIG. The first electrode 1010, the semiconductor layer 1020, and the second electrode 1030 may be at least partially overlapped in the thickness direction (e.g., the z-axis direction).

The semiconductor layer 1020 may include a P layer 1022, an active layer 1024, and an N layer 1026 when the PN, PIN, or Avalanche diode may be disposed in a thin film form and may be formed of a PIN diode. Here, the active layer 1024 may include an intrinsic semiconductor layer. The P layer 1022 and the N layer 1026 may have a thickness of 15 nm to 20 nm in the z axis direction and the active layer 1024 may have a thickness of 200 nm to 600 nm in the z axis direction. The first electrode 1010 may have a light transmitting property and may include a material such as GAZO, GZO and ITO. The second electrode 1030 may include a metal material such as Al, Ti, TiN, Ag, . Therefore, the first electrode 1010 may be referred to as a "transparent electrode ", and the second electrode 1030 may be referred to as a" metal electrode ". The thickness of the first electrode 1010 and the second electrode 1030 in the z-axis direction may be 100 μm to 1 mm. Of course, the thicknesses of the respective layers described above are exemplary and the embodiments are not limited thereto, and the photodiode 134-2 having the above-described structure can be manufactured by a method such as vapor deposition or printing.

Further, the central portion 134-1 may cover the light entrance OPL of the light absorbing portion 102. As described above, when the center portion 134-1 covers the light entrance OPL, the penetration of foreign matter into the light absorbing portion 102 can be prevented, and the particles P passing through the scattering portion SS absorb light The flow of the particles P in the flow path portion 120 can be smooth and the measurement error can also be reduced.

The light-transmissive member 132 may serve as a substrate of the photodiode 134-2. When the photodiode 134-2 is disposed on the second surface 132-2 of the light transmitting member 132, the upper surface of the first electrode layer 1010 is covered with the second surface 132-2 of the light transmitting member 132 . Alternatively, when the photodiode 134-2 is disposed on the first surface 132-1 of the light transmissive member 132, the bottom surface of the second electrode layer 1030 contacts the first surface 132 of the light transmissive member 132 -1).

The central portion 134-1 is located on the optical axis LX and is connected to the semiconductor layer 1020 of the photodiode 134-2 so as to pass the main light passing through the scattering portion SS to the light absorbing portion 102. [ And the second electrode 1030 are not disposed. According to an embodiment, when the first electrode 1010 extends in the J direction (i.e., the optical axis direction) of FIG. 10B, the center portion 134-1 may include at least a part of the first electrode 1010. [ For example, when the first electrode 1010 extends to the optical axis and has a circular plane shape, the first electrode 1010 may be included in the entire central portion 134-1.

In addition, when the photodiode 134-2 is disposed on the second surface 132-2 of the light transmitting member 132, damage to the photodiode 132-2 due to foreign matter can be prevented.

The photodiode 134-2 is disposed around the center portion 134-1 and serves to sense the light scattered by the particles P. [ The photodiode 134-2 corresponds to an active region for absorbing light in the structure of a general photodiode.

For example, the photodiode 134-2 can detect light in the 380 nm to 1100 nm wavelength band, but the embodiment is not limited to a specific wavelength band that can be detected by the photodiode 134-2. The photodiode 134-2 may have a sensitivity of 0.4 A / W at a wavelength band of 660 nm or a sensitivity of 0.3 A / W at 450 nm so that scattered light can be well sensed, Is not limited to this.

10A, the width W1 of the light sensing portion 134A may be between 5 mm and 20 mm, for example between 7 mm and 15 mm, preferably between 8 mm and 10 mm, It does not.

The width W2 of the central portion 134-1 may be 3 mm to 18 mm, for example, 5 mm to 13 mm, and preferably 7 mm to 9 mm, but the embodiment is not limited to this.

In addition, the width W3 of the photodiode 134-2 on the plane may be 0.1 mm to 5 mm, for example, 1 mm to 3 mm, preferably 1.5 mm to 2.5 mm, Do not.

The planar shape of the photodiode 134-2 shown in Fig. 10A is circular, but the embodiment is not limited to this. For example, if the light sensing portion 134 can include the central portion 134-1, the photodiode 134-2 can have various planar shapes. For example, the planar shape of the photodiode 134-2 may be a rectangular ring shape, a square ring shape, a triangular ring shape, or the like, although it is not shown, or may be an oval ring shape.

Fig. 11 shows a planar shape of another embodiment 134B of the light sensing part 134 shown in Fig.

The photodiode 134-2 may include a plurality of sensing segments spaced apart from one another on the same plane. For example, as illustrated in FIG. 11, the photodiode 134-2 may include a plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 spaced from one another .

In addition, the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 may be spaced apart at equal intervals or at different intervals. For example, the larger the spaced distance G of the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24, the higher the signal level and the greater the degree of design freedom. For example, the spacing G may be from 0.01 mm to 1 mm, for example from 0.1 mm to 0.5 mm, preferably from 0.15 mm to 0.25 mm, although the embodiments are not limited in this respect.

In addition, the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 may have the same planarity with each other, or may have different planarities.

Also, the light sensing portion 134B may be disposed symmetrically on a plane, but the embodiment is not limited to this. According to another embodiment, the light sensing portion 134B may be arranged asymmetrically on a plane.

Further, the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 may be arranged symmetrically or asymmetrically on a plane.

The widths W1, W2, and W3 shown in FIG. 11 may be those described with reference to FIG. 10A.

For example, like the photodiode 134-2, each of the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 can detect light in the 380 nm to 1100 nm wavelength band , The embodiment is not limited to a specific wavelength band that can be detected in the plurality of sensing segments 134-21, 134-22, 134-23, 134-24. Each of the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 has a sensitivity of 0.4 A / W in a wavelength band of 660 nm, or a sensitivity of 0.4 Nm to 0.3 A / W, but the embodiment is not limited to this.

When the photodiode 134-2 is spaced apart from the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24, the information analyzing unit 160 includes a plurality of sensing segments 134- 21, 134-22, 134-23, 134-24), the shape of the particle can be predicted using the relative size of the sensed result.

When the shape of the particles P is symmetrical, for example spherical, the intensities of scattered light detected in the plurality of sensing segments 134-21, 134-22, 134-23 and 134-24 are equal to each other. When the intensities of the light sensed by the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 are equal to each other, the information analysis unit 160 determines that the particles P have a symmetric shape . On the other hand, when the shape of the particles P is asymmetric, for example, non-spherical, the intensity of the scattered light detected in the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 is different from each other. When the intensity of light sensed by the plurality of sensing segments 134-21, 134-22, 134-23, and 134-24 is different from each other, the information analysis unit 160 determines that the particle P has an asymmetric shape .

It goes without saying that, in order to predict various shapes of the particles, the number of the divided shapes of the plurality of sensing segments may vary.

The packaging form of the photodiodes 134-2 and 134-21 to 134-24 of the light receiving unit 130A described above may be implemented as an SMD type or a lead type as in the light source 112A of the light emitting unit 110A. However, the embodiment is not limited to the specific packaging form of the photodiodes 134-2, 134-21 to 134-24.

On the other hand, the light receiving incidence portion is disposed between the scattering portion SS and the light receiving portion 130A, and can adjust the amount of light incident on the light receiving portion 130A. 3, 5, and 7, the light receiving incidence portion may include a third opening OP3 disposed on the optical axis LX.

The third opening OP3 is an area suitable for entering 20% to 80% of the total amount of light scattered by the particles P in the scattering part SS to the light receiving part 130A Axial area).

The scattering portion SS can be in contact with a plurality of openings. That is, the scattering portion SS communicates with the light emitting portion 110A via the first opening OP1, and the first and second-1-channel intermediate portions FII1 (or the first and second- -2 flow path middle portion FII2) and the second opening portion OP2, and can communicate with the light receiving portion 130A through the third opening portion OP3.

For example, in the light scattered by the particles P in the scattering part SS, when the distance from the center of the scattering part SS to the fifth opening OP5 is 12 degrees from the optical axis LX, 20% of the total light scattered in the particles P may be incident on the light receiving section 130A when the predetermined angle? Is 24 degrees as shown in FIGS. 3, 5 and 7, 50% of the total light scattered in the particles P may be incident on the light receiving portion 130A when the incident angle? Is 60 degrees (that is, 30 degrees left and right with respect to the optical axis LX). In consideration of this, in the third opening OP3, the left angle of the light scattered by the particles P with respect to the optical axis LX, that is, the predetermined angle? Is 24 ° to 60 ° The light receiving portion 130A can have an area suitable for the light in the range of 30 degrees to the left and right with respect to the optical axis LX. As described above, it can be seen that the amount of light incident on the light receiving portion 130A can be adjusted by adjusting the area of the third opening OP3.

4B, 6B and 8, the area of the third opening OP3 (for example, the area in the x-axis and the y-axis direction) is larger than the area of the first opening OP1 (for example, the area in the x-axis direction and the y-axis direction). For example, when the third opening OP3 has a circular planar shape and the diameter D3 of the third opening OP3 is larger than 10 mm, the photodiodes 134-2, 134-21 to 134-24, Scattered light may be introduced into the photodiode, resulting in light noise. Further, when the diameter D3 of the third opening OP3 is smaller than 2 mm, the amount of scattered light received by the photodiodes 134-2 and 134-21 to 134-24 is reduced and the photodiodes 134-2 and 134-21 To 134-24 may be small in size. Therefore, the diameter D3 of the third opening OP3 may be from 1 mm to 12 mm, for example from 1 mm to 6 mm, preferably from 2 mm to 4 mm, for example 3 mm, It is not limited.

Referring again to FIG. 9, the light guide unit 136A guides the light scattered by the scattering unit SS to the light sensing unit 134. Referring to FIG. For this purpose, for example, the light guide portion 136A may include inner side walls 136-1 and 136-2 and outer side walls 136-3 and 136-4. If the inner partitions 136-1 and 136-2 have a circular planar shape, the inner partitions 136-1 and 136-2 are integral, and the outer partitions 136-3 and 136-4 are circular, The outer side walls 136-3 and 136-4 may be integral with each other.

The inner side walls 136-1 and 136-2 have a fourth opening OP4 overlapping the light entrance OPL of the light absorbing portion 102 in a direction parallel to the optical axis LX Can be defined. The scattered light having passed through the third opening OP3 proceeds to the fifth opening OP5 and the main light passing through the third opening OP3 passes through the third opening OP3, Lt; RTI ID = 0.0 > OP1. ≪ / RTI > That is, the inner partitions 136-1 and 136-2 serve to separate the main light and the scattered light.

The height H1 of the inner side walls 136-1 and 136-2 may be 1 mm to 15 mm, for example, 2 mm to 10 mm, preferably 3 mm to 6 mm, for example, 5 mm, Examples are not limited to these.

The outer side walls 136-3 and 136-4 are connected to the fifth opening OP5 overlapping the photodiode 134-2 in the direction parallel to the optical axis LX -1, 136-2).

The width W4 of the fifth opening OP5 may be 0.1 mm to 6 mm, for example, 0.5 mm to 3 mm, preferably 0.8 mm to 1.5 mm, for example, 1 mm, Do not.

When the inner partitions 136-1 and 136-2 and the outer partitions 136-3 and 136-4 are disposed as described above, as indicated by the arrow in FIG. 3, the third part OP3 The main scattered light can proceed to the photodiode 134-2 of the light sensing part 134 and the main light incident on the third opening OP3 can travel toward the light absorbing part 140. [

Meanwhile, the light receiving portion 130A may further include the sensing support portion 138, but in some cases, the sensing support portion 138 may be omitted.

The sensing support portion 138 serves to support the light sensing portion 134 and may be implemented separately from the bottom portion 176 of the housing 170 as shown in FIG. And the bottom portion 176 of the first embodiment.

Meanwhile, according to one embodiment, as illustrated in FIG. 3, the light absorbing portion 102 may include an absorption case 102A, a protrusion 102B, and a protrusion 102C. The absorption case 102A defines a light entrance OPL through which the light passing through the light receiving unit 130A is incident and serves to receive the main light passing through the light receiving unit 130A. The width (for example, the width in the y-axis direction) of the light entrance OPL may be 2 mm to 15 mm, for example, 3 mm to 10 mm, preferably 4 mm to 6 mm, However, the embodiment is not limited to this.

To this end, the inner wall of the absorption case 102A may be coated with a material having a light absorbing property. In the case of FIG. 3, the absorption case 102A and the bottom portion 176 of the housing 170 are illustrated as being distinct, but the embodiment is not limited thereto. That is, the bottom portion 176 of the housing 170 and the absorption case 102A may be integrated. That is, the bottom portion 176 of the housing 170 can also serve as the absorption case 102A.

Further, the protruding portion 102B may have a shape protruding from the bottom surface of the absorption case 102A toward the light inlet OPL. Further, the width of the protruding portion 102B may become narrower from the bottom surface of the absorption case 102A toward the light inlet OPL. For example, as illustrated in Fig. 3, the protrusion 102B may have a circular cross-sectional shape, but the embodiment is not limited thereto. When the protrusion 102B is disposed, the main light incident on the light entrance OPL is prevented from being reflected by the inner wall of the absorption case 102A and escaping to the light entrance OPL, The absorption of the main light incident on the light entrance OPL can be improved by reflecting the main light incident through the light entrance OPL to the inner wall of the absorption case portion 102A. Further, in order to further improve the light absorption rate, the light absorption portion 102 may include a plurality of projections 102C disposed on the inner side wall thereof. In this way, when the plurality of protrusions 102C are formed, the main light incident through the light entrance OPL can be destroyed by colliding with the protrusion 102C.

12 is a block diagram of an embodiment 160A of the information analysis unit 160 shown in FIG. 1, and may include an amplification unit 162 and a control unit 164.

The amplification unit 162 amplifies the electrical signal input from the light receiving unit 130A (or the signal conversion unit 150) through the input terminal IN3 and outputs the amplified result to the control unit 164. The control unit 164 compares the analog signal amplified by the amplifying unit 162 with a pulse width modulation (PWM) reference signal and outputs the number, density, size or shape of the particles P , And output the analyzed result through the output terminal OUT2.

The particle sensing apparatus according to the above embodiments can be applied to home and industrial air cleaners, air purifiers, air cleaners, air coolers, air conditioners, air quality management systems for buildings, It can be applied to an air conditioning system or an indoor air quality measurement apparatus for a vehicle. However, it is needless to say that the particle sensing apparatuses 100, 100A to 100C according to the embodiment are applicable to various fields without being restricted to this example.

The air purifier according to the embodiment including the particle sensing apparatus according to the above-described embodiment will be described with reference to the accompanying drawings.

13 is a schematic cross-sectional view of an air purifier 400 according to an embodiment.

The air purifier 400 shown in FIG. 13 may include a body 410, a cover 420, an air filtering unit 430, and a particle sensing device 440. Here, the particle sensing device 440 may correspond to the particle sensing device 100 (100A to 100C) described above.

The body 400 serves to receive the air filtering unit 430 and the particle sensing device 440. The first air A1 capable of containing particles is introduced through the opening 422a of the cover 420. [ Thereafter, the particles contained in the introduced first air (A1) are filtered and filtered by the air filtering unit (430). Then, the second air (A2) filtered and filtered by the particles can be discharged to the outside through the discharge port (450) of the body (410). At this time, the particle sensing device 440 may provide the second air A2 filtered by the air filtering unit 430 to the second flow path unit 142. [ Since the air filtering unit 430 functions as the air filtering unit 144 included in the above-described particle sensing apparatus 100 (100A to 100C), the particle sensing apparatus 100 (100A to 100C) No part 144 is required.

Hereinafter, the particle sensing apparatuses according to the comparative example and the particle sensing apparatuses 100, 100A to 100C according to the embodiments will be described as follows. In the particle sensing apparatus according to the comparative example, the air providing unit 140 is omitted in the particle sensing apparatus 100 (100A to 100C) according to the embodiment. That is, in the case of the particle sensing device according to the comparative example, the area occupied by the second flow path portions 142 (142A, 142B, 142C) of the particle sensing device according to the embodiment corresponds to the first flow path portion.

FIG. 14 is a photograph of a first sensing device of a particle sensing device according to a comparative example in which the first air flows in the first flow path part, FIG. 15 is a photograph of the first sensing device and the second sensing device In which the first and second flow paths are respectively flowing.

14, particles included in the first air may enter the light emitting portion 110A or the light receiving portion 130A while the first air passes through the first flow path portion. When the particles enter the light emitting portion 110A or the light receiving portion 130A, the light emitting portion 110A or the light receiving portion 130A may be contaminated and information on the particles may not be accurately sensed.

On the other hand, referring to FIG. 15, the second air flows through the second flow path portion 142 while surrounding the first flow path portion 120 through which the first air flows. As described above, when the second air flows around the first air and flows at a velocity higher than that of the first air, the light emitting portion 110A and the light receiving portion 130A respectively receive the air curtain portions AC1 and AC2 formed by the second air, Thereby being able to be protected from the first air. That is, particles contained in the first air can not enter the light emitting portion 110A and the light receiving portion 130A.

Accordingly, in the case of the particle sensing apparatus according to the embodiment and the air purifier including the same, it is possible to reduce the inconvenience of periodically / non-periodically cleaning the particle-contaminated portions in the light emitting unit 110A and the light receiving unit 130A. Further, the fear that the light emitting portion 110A / the light receiving portion 130A is contaminated by the particles is solved, and the sensing information on the particles can be accurately obtained.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

100, 100A to 100C, 440: particle sensing device 102: light absorbing part
110: light emitting portion 120: first flow path portion
130: light receiving section 140:
142, 142A, 142B, 142C: second flow portion 144, 430: air filtering portion
150: signal conversion unit 160: information analysis unit
170: housing 180: fan
410: Body 420: Cover
430: air filtering unit

Claims (13)

A light emitting portion for emitting light;
A first flow path portion provided below the light emitting portion and crossing the optical axis of the light emitting portion to provide a first flow path through which first air that may contain particles flows;
The air providing unit providing the second air filtered by the particles in the same direction as the first air flows between the first flow path and the light emitting unit and between the first flow path and the light receiving unit; And
And a light receiving portion disposed on the optical axis below the first flow path portion and through which light passing through the first flow path portion is incident. The apparatus according to claim 1, wherein the first flow path portion
A first flow path inlet through which the first air flows;
A first flow path outlet through which the first air flows;
A scattering part located in the optical axis between the first flow path inlet part and the first flow path outlet part and between the light emitting part and the light receiving part and scattering the particles;
A first-1 < th > flow path intermediate portion positioned between the first flow path inlet portion and the scattering portion; And
And a first-second flow path intermediate portion positioned between the scattering portion and the first flow path outlet portion,
Wherein the first flow path inlet portion, the first-first flow path intermediate portion, the scattering portion, the first-second flow path intermediate portion, and the first flow path outlet portion constitute the first flow path. The air conditioner according to claim 2, wherein the air providing portion
And a second flow path which is isolated from the first flow path before the scattering part and which provides a second flow path through which the second air flows, the scattering part being in contact with the first flow path. 4. The apparatus according to claim 3, wherein the second flow path
A second flow path inlet portion through which the second air flows, the second flow path inlet portion being disposed around the first flow path inlet portion;
A second flow path outlet portion through which the second air flows, the second flow path outlet portion being disposed around the first flow path outlet portion;
An air curtain disposed around the scattering portion to separate the phase scattering portion and the light receiving portion and to separate the scattering portion and the light emitting portion;
A second-1-channel intermediate portion disposed around the first-1-path middle portion; And
And a second-2-channel intermediate portion disposed around the second-half-path middle portion,
Wherein the second flow path inlet portion, the second-1 flow path intermediate portion, the air curtain portion, the second-2 flow path middle portion, and the second flow path outlet portion form the second flow path,
The first and second flow path inlet portions are isolated from each other, the 1-1 and 2-1 flow path intermediate portions are isolated from each other, the air curtain portion and the scattering portion abut each other, and the 1-2 and 2-2 And the first and second flow path outlet portions are in contact with each other. 5. The fuel cell system according to claim 4, wherein the first-1-channel intermediate portion is disposed in the second-
The inner wall of the first-1-path middle part forms a part of the first flow path,
And a portion of the second flow path is formed between an outer wall of the middle portion of the first channel and an inner wall of the middle portion of the second channel. 6. The particle sensing device according to claim 5, wherein the first flow path end face of the first-first flow path middle part and the second flow path end face of the second-1 flow path middle part are concentric. The airbag apparatus according to claim 4, wherein the air curtain portion
A first air curtain unit positioned between the light emitting unit and the scattering unit; And
And a second air curtain portion located between the scattering portion and the light receiving portion and spaced apart from the first air curtain portion. 8. The apparatus as claimed in claim 7, wherein the second-1 <
An upper side second-1 flow path middle portion in contact with the first air curtain portion; And
And a lower second-1 flow path intermediate portion in contact with the second air curtain portion and spaced apart from the upper second-1 flow path intermediate portion. 5. The light-emitting device according to claim 4,
A light source; And
And a first opening disposed in the optical axis and emitting light emitted from the light source toward the scattering portion. 10. The particle sensing device according to claim 9, wherein the flow path cross-sectional area of the first flow path is smaller than the area of the first opening. 10. The particle sensing device according to claim 9, wherein a sum of a flow path cross-sectional area of the first flow path and a flow path cross-sectional area of the second flow path is smaller than an area of the first opening. 2. The particle sensing device of claim 1, wherein when the particle sensing device is driven, the first flow rate of the first air is less than the second flow rate of the second air. 4. The particle sensing device according to claim 3, wherein the flow path cross-sectional area of the second flow path portion is constant at any point on the second flow path.

Images